CN101303488A - liquid supply system - Google Patents

Abstract

The invention provides a liquid supply system, which comprises a liquid storage device, a drip system, a liquid monitoring system, and a transmission device, the transmission device is located between the liquid storage device and the drip system; the buffer container is located Between the liquid storage device and the infusion system, it is connected with the transmission device. The buffer container has an inflow port and an outflow port. The liquid flows in from the inflow port of the buffer container and flows out from the outflow port. The cross-sectional area is larger than the cross-sectional areas of the inflow port and the outflow port. The liquid supply system can make full use of the liquid and reduce the waste of the liquid by monitoring the liquid level of the liquid in the transmission device.

Description

liquid supply system

technical field

The invention relates to a liquid supply system, in particular to a liquid supply system capable of reducing liquid waste in production.

Background technique

At present, when making a liquid crystal display panel, the liquid crystal is distributed on the target substrate through a liquid crystal supply system. The existing liquid crystal supply system as shown in Figure 1 comprises: liquid crystal containing device 11, liquid crystal is housed in it; Sensor 12, is used for monitoring whether the liquid crystal in liquid crystal containing device 11 is sufficient; The liquid crystal is added dropwise on the target substrate; the liquid crystal dripping system 13 is connected with the liquid crystal containing device 11 through the first conduit 14, and the end of one end (shown as A end in the figure) of the first conduit 14 is arranged near The position at the bottom of the liquid crystal holding device 11, so that the liquid crystal in the liquid crystal holding device 11 can be transported to the liquid crystal infusion system through the first conduit 14; the gas delivery conduit 15 is used for liquid crystal protection gas, such as nitrogen or helium, etc. , filled into the liquid crystal containing device 11; the sealing plug 16 is used to isolate the liquid crystal in the liquid crystal containing device 11 from the outside air.

In the existing liquid crystal supply system, the liquid crystal in the liquid crystal containing device 11 is transported in the liquid crystal infusion system 13 through the first conduit 14 under the action of the vacuum pump (not shown) in the liquid crystal infusion system 13, Then the liquid crystal is evenly distributed to the target substrate by the liquid crystal dripping system 13 . The sensor 12 is used to monitor whether the liquid crystal in the liquid crystal holding device 11 is sufficient, and when the liquid level of the liquid crystal in the liquid crystal holding device 11 is lower than the monitoring liquid level monitored by the sensor 12, the machine will send an alarm and stop automatically, indicating that The liquid crystal in the liquid crystal holding device 11 is about to run out and cannot meet the production needs, so it is necessary to replace a new liquid crystal holding device 11 full of liquid crystals or to add liquid crystals to the liquid crystal holding device 11 .

The main problems of utilizing the existing liquid crystal supply system are:

Since the sensor is arranged on the side wall of the liquid crystal holding device 11, usually the monitoring liquid level of the sensor 12 is set at a position above the bottom of the liquid crystal holding device 11, that is, the monitoring liquid level has a certain distance from the bottom of the liquid crystal holding device 11. When the liquid crystal liquid level is below the monitoring liquid level, the sensor will think that the liquid crystal in the liquid storage device 11 is used up, but in fact there is still liquid crystal in the liquid crystal storage device 11 at this time, so it will cause the liquid crystal to be below the monitoring liquid level. waste of LCD. The above-mentioned waste is huge for the factory, and the amount of liquid crystal waste every year is huge.

If the monitoring liquid level monitored by the sensor 12 is set near the bottom of the liquid crystal holding device 11, when the liquid crystal is almost used up, the liquid crystal liquid level will be close to the bottom of the liquid crystal holding device 11, and the A end of the first conduit 14 is also Close to the bottom of the liquid crystal containing device 11, that is, the end A of the first conduit 14 will be very close to the liquid crystal surface. In actual production, the liquid crystal in the liquid crystal storage device 11 will shake due to the vibration generated when the production equipment is in operation, so that the liquid crystal level will fluctuate. Therefore, when the liquid crystal is almost used up, the liquid crystal level will be low from time to time. At the A-end of the first conduit 14 or sometimes higher than the A-end of the first conduit 14 . When the liquid crystal liquid level is lower than the A end of the first conduit 14, the protective gas in the liquid holding device 11 will enter the first conduit 14, resulting in a deviation in the volume of the liquid crystal dropped into the target substrate, and resulting in defective products. . In addition, because the liquid crystal liquid level fluctuates up and down, the liquid crystal liquid level will sometimes be lower than the monitoring liquid level monitored by the sensor 12 , thus causing false alarms in the liquid crystal supply system, which will also cause waste of liquid crystals.

Moreover, since the liquid crystal containing device 11 is usually opaque, the operator cannot determine whether the first conduit 14 is correctly inserted into the liquid crystal containing device 11 through the sealing plug, so it often happens that the first conduit 14 is not inserted into the liquid crystal containing device. 11 The bottom position or the situation where the end (A end) of the first conduit 14 is warped when it is inserted into the liquid crystal storage device 11 due to the soft material of the conduit, as shown in Figures 2 and 3, where In both cases, the A-end end of the first conduit 14 will be positioned above the monitoring liquid level monitored by the sensor 12 . Therefore, when the liquid crystal liquid level in the liquid crystal containing device 11 drops below the A end of the first conduit 14, the liquid crystal liquid level is actually above the monitoring liquid level monitored by the sensor 12, so that the machine does not issue a replacement The alarm of the liquid crystal holding device, but at this time no liquid crystal is input into the first conduit 14, so the liquid crystal dripping system 13 will not drip liquid crystal into the target substrate, that is, the phenomenon of empty liquid crystal drops occurs, but this is not detected. The target substrate dripped with liquid crystal will continue to flow to the next process, which will eventually lead to the scrapping of the corresponding liquid crystal panel. Therefore, the liquid crystal supply system in the prior art has problems such as waste of liquid crystals, volume deviation of dripped liquid crystals, empty drops of liquid crystals, etc., thereby causing certain economic losses to the enterprise.

Also in other liquid supply systems, there are also the above-mentioned liquid waste, and the problems of empty drops.

Contents of the invention

The present invention provides a liquid supply system, the system includes a liquid storage device, a drip system, a liquid monitoring system, and also includes: a transmission device, the transmission device is located between the liquid storage device and the drip system, for from The liquid holding device delivers liquid to the infusion system; the buffer container, which is located between the liquid holding device and the infusion system, is connected with the transmission device, and the buffer container has an inflow port and an outflow port, and the liquid flows from the buffer container The inflow port flows in, and the outflow port flows out, and the buffer container has a maximum cross-sectional area larger than the cross-sectional areas of the inflow port and the outflow port.

Optionally, the delivery device comprises a delivery catheter.

Optionally, the liquid monitoring system includes a monitoring sensor located on the side wall of the liquid storage device, for monitoring whether the liquid in the liquid storage device is sufficient.

Optionally, the liquid monitoring system includes a monitoring sensor located on the side wall of the conveying device for monitoring whether the conveying device is supplied with liquid.

Optionally, the liquid monitoring system includes a monitoring sensor located on the side wall of the buffer container for monitoring whether the buffer container is supplied with liquid.

Optionally, the transmission conduit includes a first conduit, one end of the first conduit extends into the liquid storage device, and the other end is connected to the buffer container, the first conduit and the inflow port of the buffer container Connected via connecting device.

Optionally, the transmission conduit includes a second conduit, one end of the second conduit is connected to the dripping device, and the other end is connected to the buffer container, and the second conduit and the outlet of the buffer container pass through Connecting devices are connected.

Optionally, the monitoring sensor is located on the side wall of the buffer container.

Optionally, the buffer container is cylindrical.

Optionally, the upper part of the buffer container has a pressure relief port for adjusting the air pressure and liquid level in the buffer container.

Optionally, the liquid monitoring system further includes an alarm device connected to the monitoring sensor.

Optionally, the liquid is liquid crystal.

Optionally, the liquid crystal contained in the liquid supply system from the monitoring position of the liquid monitoring system to the outlet of the infusion system can meet the production requirements of a target substrate.

Compared with the prior art, the above-mentioned technical solution has the following advantages:

Because in the traditional method, the sensor is arranged at the bottom of the side wall of the liquid holding device, when the liquid is close to the monitoring liquid level, due to the vibration, the air bubbles will enter the transmission device, which will make the product unqualified. Therefore, the sensor can only be arranged on the upper part of the side wall of the liquid holding device, so that the liquid below the monitoring liquid level is wasted, and the technical solution of the present invention separates the gas and liquid through the buffer container, so that when the liquid is almost used up, there will be no Because air bubbles affect the quality of the product, the monitoring liquid level can be set on the bottom of the liquid holding device or on the side wall of the transmission device or on the side wall of the buffer container, so that the liquid in the liquid holding device can be fully utilized, thereby improving the quality of the product. The utilization rate of liquid reduces waste.

Moreover, the liquid supply system provided by the technical solution of the present invention has a simple structure and is easy to realize.

Description of drawings

Fig. 1 is a kind of liquid crystal supply system in the prior art;

Fig. 2 is a liquid crystal supply system in the prior art with the problem that the first conduit is not correctly inserted into the liquid crystal holding device;

Fig. 3 is another liquid crystal supply system in the prior art that has the problem that the first conduit is not correctly inserted into the liquid crystal holding device;

Fig. 4 is the first embodiment of the liquid supply system of the present invention;

Fig. 5 is the second embodiment of the liquid supply system of the present invention;

Fig. 6 is the third embodiment of the liquid supply system of the present invention;

Fig. 7 is a fourth embodiment of the liquid supply system of the present invention.

Detailed ways

In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and understandable, the specific implementation modes of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the above-mentioned and other purposes, features and advantages of the present invention will be clearer. Like reference numerals designate like parts throughout the drawings. The drawings have not been drawn to scale, emphasis instead being placed upon illustrating the gist of the invention.

The first embodiment of the liquid supply system of the present invention will be described in detail below with reference to FIG. 4 .

As shown in FIG. 4 , the liquid supply system includes: a liquid storage device 41 , a transmission device 42 , a liquid monitoring system 43 , a drip system 44 , a protective gas transmission device 52 and a buffer container 60 . Wherein, the liquid holding device 41 is used for holding liquid crystals. The dripping system 44 is used to drip liquid crystal onto the target substrate.

The upper part of the liquid storage device 41 has an opening and a sealing plug 50 located at the opening. The sealing plug 50 is used to isolate the liquid crystal in the liquid storage device 41 from the outside air. The liquid supply system also includes a shielding gas transmission device 52 that extends into the liquid holding device 41 through the sealing plug 50, and is used to pass protective gas into the liquid holding device 41, such as nitrogen and helium, to make the liquid contain The liquid in the device 41 is isolated from the outside air, maintaining higher purity and preventing oxidation.

The transfer device 42 is located between the liquid storage device 41 and the infusion system 44 , and is used for transferring liquid from the liquid storage device 41 to the buffer container 60 . In this embodiment, the delivery device 42 comprises a delivery catheter. The buffer container 60 has an inflow opening 58 and an outflow opening 59 . The largest cross-sectional area of the buffer container 60 is larger than the cross-sectional areas of the inflow opening 58 and the outflow opening 59 .

The buffer container 60 may also be in a shape other than a cylinder, such as a prism.

The transport conduits include a first conduit 54 and a second conduit 55 . The end A of the first conduit 54 passes through the sealing plug 50 and extends below the liquid crystal liquid surface in the liquid holding device 41 . The B end of the first conduit 54 links to each other with the inflow port 58 of the buffer container 60; the A end of the second conduit 55 links to each other with the infusion device 44, and the B end of the second conduit 55 links to each other with the outflow port 59 of the buffer container 60; The inlet of the conduit 54 and the buffer container 60 has a screw thread or a bayonet that is connected to each other, and the outlet 59 of the second conduit 55 and the buffer container 60 has a thread or a bayonet that is connected to each other. When replacing the liquid holding device 41, it can be convenient The first conduit 54, the second conduit 55 and the buffer container 60 are disassembled to separate them, so it is convenient to use.

In addition, the B end of the first conduit 54 can be fixedly connected with the inlet 58 of the buffer container 60, and the B end of the second conduit 55 can also be fixedly connected with the outlet 59 of the buffer container 60, or a connecting device can be used to The end B of the first conduit 54 is connected to the inflow port of the buffer container, and the end B of the second conduit 55 is connected to the outflow port 59 of the buffer container 60 .

In addition, the transmission device may not include the second conduit 55 , and the buffer container 60 is directly connected to the dripping device 44 .

The infusion system 44 may include a vacuum pump (not shown), under the action of the vacuum pump, the gas in the transfer device 42 is drawn out, and the liquid crystal flows from the liquid storage device 41 into the first conduit 54, and then flows into the buffer container from the first conduit 54 60, because the buffer container 60 is cylindrical, and the cross-sectional area is larger than the cross-sectional area of the inflow port 58 and the outflow port 59, so when the liquid crystal enters the buffer container 60 from the inflow port 58, the liquid crystal will naturally fall to the buffer container under the action of gravity. The bottom of the container 60 makes the bottom of the buffer container 60 full of liquid crystal, and a cavity 601 is formed at the top of the buffer container 60 , so there is a liquid crystal liquid level in the buffer container 60 .

Moreover, when bubbles or a small amount of gas mixed in the liquid crystal flow into the buffer container 60 from the inflow port 58, due to the low gas density, the mixed gas will float in the upper cavity 601 of the buffer container 60 without Into the second conduit 55, so that the gas or bubbles mixed in the liquid will be automatically separated from the liquid, and will not flow into the dripping system 44 with the liquid, but will be dripped onto the target substrate, thereby avoiding the purity of the injected liquid Insufficient and resulting in poor production of products.

The liquid crystal flows into the second conduit 55 from the outlet 59 of the buffer container 60 , then flows into the infusion system 44 from the second conduit 55 , and finally flows out from the infusion system 44 to evenly drop on the target substrate.

Afterwards, under the continuous extraction of the vacuum pump, the liquid crystal continues to flow out of the buffer container 60 from the outlet 59, so that the air pressure in the upper cavity of the buffer container 60 decreases, so under the action of the air pressure in the liquid holding device 41, the liquid crystal is compressed. into the first conduit 54 and continue to flow into the buffer container 60, so that the liquid crystal level in the buffer container 60 remains at the original position and will not drop.

When the liquid crystal flows out of the liquid storage device 41, since the liquid storage device 41 is sealed by the sealing plug 50, the air pressure in the upper space of the liquid storage device 41 decreases, so that the shielding gas enters the liquid storage device from the shielding gas delivery device 52 41, the liquid crystal is isolated from the outside air.

In this embodiment, the monitoring sensor 45 of the liquid monitoring system 43 is located on the side wall of the buffer container 60 , and is used to monitor whether the liquid crystal in the buffer container 60 is supplied. The monitoring liquid level monitored by the monitoring sensor 45 can be set at any position of the buffer container 60 , and it is set near the bottom of the buffer container 60 in this embodiment.

After the liquid crystal drops on the target substrate, the monitoring sensor 45 of the liquid monitoring system 43 is turned on. If the A end of the first conduit 54 is positioned under the liquid crystal liquid level in the liquid crystal containing device 41, then the buffer container 60 can obtain the normal liquid crystal supply of the liquid containing device 41, so the liquid crystal liquid level in the buffer container 60 remains at the original level. There is a position; when the liquid crystal liquid level in the liquid crystal holding device 41 is lower than the A end of the first conduit 54 below, that is, when the liquid crystal in the liquid crystal holding device 41 is insufficient, the buffer container 60 cannot obtain the liquid holding device 41 Therefore, the liquid crystal liquid level in the buffer container 60 drops, and when the liquid crystal liquid level in the buffer container 60 is lower than the monitoring liquid level monitored by the monitoring sensor 45, the monitoring sensor 45 monitors that the liquid crystal supply in the buffer container 60 is insufficient . Because the liquid monitoring system 43 also includes an alarm device 61 connected to the monitoring sensor 45, when the liquid crystal liquid level in the buffer container 60 is lower than the monitoring liquid level monitored by the monitoring sensor 45, the monitoring sensor 45 monitors the liquid crystal in the buffer container 60. The supply of liquid crystal is insufficient, and the signal is transmitted to the alarm device 61, and the alarm device 61 issues an alarm. Thus, the staff can find out in time.

Because in this embodiment, the monitoring liquid level monitored by the monitoring sensor 45 is set in the buffer container 60, when the A end of the first conduit 54 is set at the bottom of the liquid crystal containing device 41, and the liquid crystal containing device 41 When the liquid crystal in the liquid crystal is nearly used up, even if the liquid crystal liquid level in the liquid crystal containing device 41 fluctuates due to the vibration in the production process, the monitoring sensor 45 will not monitor the lack of liquid crystal, that is, no false alarm signal will be sent. When the liquid crystal in the liquid crystal containing device 41 is exhausted, the buffer container 60 cannot obtain the normal liquid crystal supply of the liquid containing device 41, and the liquid crystal liquid level in the buffer container 60 keeps dropping. When facing, alarm device 61 just can send correct alarm. Therefore, the adoption of the liquid crystal supply system of this embodiment can effectively prevent the occurrence of false alarms, thereby making full use of the liquid crystals in the liquid crystal containing device 41 and avoiding waste of liquid crystals. Also, because the liquid crystal supply system of the present embodiment is provided with a buffer container 60, even if the A end of the first conduit 54 is arranged at the bottom of the liquid crystal containing device 41, it will not occur that a small amount of protective gas enters the transmission conduit. In the event of product failure.

In addition, since the monitoring liquid level monitored by the monitoring sensor 45 is set in the buffer tank 60, even if the A-end end of the first conduit 54 is improperly inserted, for example, the A-end end of the first conduit 54 is not inserted. Inserted into the bottom of the liquid crystal holding device 41 or when the A end of the first conduit 54 is tilted, when the liquid crystal liquid in the liquid crystal containing device 41 is lower than the A end of the first conduit 54 , the buffer container 60 cannot obtain the normal liquid crystal supply of the liquid holding device 41, the monitoring sensor 45 will monitor the liquid crystal supply shortage of the buffer container 60 equally, and transmit the signal to the alarm device 61, and the alarm device 61 sends an alarm. Therefore, the staff can find out in time, and then can effectively prevent the phenomenon of empty liquid crystal drops.

According to the liquid crystal supply system of this embodiment, the monitoring liquid level monitored by the monitoring sensor 45 can be set at an appropriate position of the buffer container 60 according to the actual situation of production, thereby ensuring that when the monitoring sensor 45 monitors that the liquid crystal supply is insufficient, the buffer container 60. The remaining liquid crystals in the second conduit 55 and the infusion system 44 can still meet the normal production amount of a target substrate, thus ensuring the normal production of the current substrate, and will not cause the current substrate to be scrapped due to insufficient liquid crystal supply question. In this way, after the alarm, after the liquid crystal dripping of the target substrate is completed, the machine will stop automatically, waiting for the operator to replace the liquid holding device 41 filled with liquid crystal or to add liquid crystal.

In addition, the upper part of the buffer container 60 can also be provided with a pressure relief port 56, which is used to adjust the air pressure and liquid level in the buffer container 60 after replacing the new liquid holding device 41, so that the liquid crystal liquid level remains at the level of the monitoring sensor 45. The monitoring monitors the top of the liquid level, thus making the use of the liquid supply system more convenient.

The second embodiment of the liquid supply system of the present invention will be described in detail below with reference to FIG. 5 .

As shown in FIG. 5 , the liquid supply system includes: a liquid storage device 41 , a transmission device 42 , a monitoring device 43 , an infusion system 44 , a protective gas transmission device 52 and a buffer container 60 .

Among them, the functions and connection methods of the liquid storage device 41 , the transmission device 42 , the infusion system 44 , the shielding gas transmission device 52 and the buffer container 60 are the same as those of the first embodiment and will not be repeated here.

According to the present invention, because the buffer container 60 can effectively separate the gas or bubbles mixed in the liquid from the liquid, so when the monitoring liquid level monitored by the monitoring device 43 is set near the bottom of the liquid holding device 41, the liquid holding When the liquid in the device 41 is almost used up, even if the protective gas in the liquid holding device 41 will enter the transmission device 42 due to the vibration in the production process, thus causing the liquid volume deviation to fail to meet the production requirements, but according to the present invention in the liquid Before being dripped onto the target substrate, the gas and liquid have been separated by the buffer container 60, so that the produced product will not be defective due to insufficient gas mixed in the liquid.

Therefore, in the liquid supply system of this embodiment, the monitoring liquid level monitored by the monitoring device 43 can be set near the bottom of the liquid storage device 41, even when the end A of the transmission device 42 is inserted near the bottom of the liquid crystal storage device 11 , It will not cause poor production products caused by insufficient liquid purity, thereby reducing liquid waste caused by setting the monitoring liquid level too high.

The third embodiment of the liquid supply system of the present invention will be described in detail below with reference to FIG. 6 .

As shown in FIG. 6 , the liquid supply system includes: a liquid storage device 41 , a transmission device 42 , a monitoring device 43 , an infusion system 44 , a protective gas transmission device 52 and a buffer container 60 .

Among them, the functions and connection methods of the liquid storage device 41 , the transmission device 42 , the infusion system 44 , the shielding gas transmission device 52 and the buffer container 60 are the same as those of the first embodiment and will not be repeated here.

The difference is that in the third embodiment, the monitoring sensor 45 is arranged on the side wall of the second conduit 55 to monitor the liquid crystal level in the second conduit 55 .

In the fourth embodiment shown in FIG. 7 , the connection methods of the liquid holding device 41 , the transmission device 42 and the infusion system 44 are the same as those of the third embodiment, and will not be repeated here. The difference is that in the fourth embodiment, the monitoring sensor 45 is arranged on the side wall of the first conduit 54 for monitoring the liquid crystal level in the first conduit 54 .

The monitoring sensor 45 of the present invention may be a magnetic response liquid level sensor, a laser sensor, an immersion photoelectric liquid level sensor, a floating ball liquid level sensor, and the like.

In addition, the technical solution of the present invention can also be used in the supply of other liquids besides liquid crystal supply.

In the foregoing description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the above descriptions are only preferred embodiments of the present invention, and the present invention can be implemented in many other ways different from those described here, so the present invention is not limited by the specific implementations disclosed above. At the same time, any person skilled in the art can use the methods and technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention without departing from the scope of the technical solution of the present invention, or modify it into an equivalent implementation of equivalent changes example. All the content that does not deviate from the technical solution of the present invention, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention still belong to the protection scope of the technical solution of the present invention.

Claims (13)

1. A liquid supply system, which includes a liquid holding device, a drip system, and a liquid monitoring system, characterized in that it also includes: a delivery device positioned between the liquid holding device and the drip system for delivering liquid from the liquid holding device to the drip system; A buffer container, the buffer container is located between the liquid holding device and the infusion system, and is connected with the transmission device, the buffer container has an inflow port and an outflow port, the liquid flows in from the inflow port of the buffer container, and flows in from the flow port The outlet flows out, and the largest cross-sectional area of the buffer container is larger than the cross-sectional areas of the inflow port and the outflow port. 2. The liquid supply system of claim 1, wherein the delivery means comprises a delivery conduit. 3. The liquid supply system according to claim 1, wherein the liquid monitoring system comprises a monitoring sensor located on the side wall of the liquid containing device for monitoring whether the liquid in the liquid containing device is sufficient. 4. The liquid supply system according to claim 1, wherein the liquid monitoring system comprises a monitoring sensor located on the side wall of the transfer device for monitoring whether the transfer device is supplied with liquid. 5. The liquid supply system according to claim 1, wherein the liquid monitoring system comprises a monitoring sensor located on the side wall of the buffer container for monitoring whether the buffer container is supplied with liquid. 6. The liquid supply system according to claim 2, wherein the transmission conduit comprises a first conduit, one end of the first conduit extends into the liquid storage device, and the other end is connected to the buffer container, The first conduit is connected to the inflow port of the buffer container through a connecting device. 7. The liquid supply system according to claim 2, wherein the delivery conduit comprises a second conduit, one end of the second conduit is connected to the dripping device, and the other end is connected to the buffer container, the The second conduit is connected to the outflow port of the buffer container through a connecting device. 8. The liquid supply system of claim 2, wherein said monitoring sensor is located on a side wall of said buffer vessel. 9. The liquid supply system of claim 2, wherein the buffer container is cylindrical. 10. The liquid supply system according to claim 2, wherein the upper part of the buffer container has a pressure relief port for adjusting the air pressure and liquid level in the buffer container. 11. The liquid supply system according to claim 2, wherein the liquid monitoring system further comprises an alarm device connected to the monitoring sensor. 12. The liquid delivery system of claim 1, wherein said liquid is a liquid crystal. 13. The liquid supply system according to claim 12, characterized in that when the liquid monitoring system monitors that the supply of liquid crystals is insufficient, the fluid contained in the liquid supply system from the monitoring position of the liquid monitoring system to the outlet of the infusion system Liquid crystals can meet the production requirements of a target substrate.

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