CN101287962A - Vibration type inertial force detection sensor and electronic equipment using same - Google Patents

Abstract

A vibration-type inertial force detection sensor and an electronic device using the same, the vibration-type inertial force detection sensor comprising: the vibrator, a driving unit for vibrating the vibrator, a detecting unit for detecting strain generated in the vibrator due to an inertial force, and a power supply unit for supplying power to the driving unit and the detecting unit in a normal state, and for supplying power to either the driving unit or the detecting unit and not to the other of the driving unit and the detecting unit in a power saving state.

Description

Vibration type inertial force detection sensor and electronic equipment using same

technical field

The present invention relates to a vibration-type inertial force detection sensor used in various electronic equipment and electronic equipment using the sensor.

Background technique

First, a conventional vibration type inertial force detection sensor will be described. As a vibration type inertial force detection sensor, an angular velocity sensor is mentioned, for example. This angular velocity sensor has a vibrator, a drive circuit for vibrating the vibrator, a detection circuit for detecting deformation of the vibrator due to Coriolis force (inertial force), and a power supply circuit for supplying power to the drive circuit and the detection circuit.

The vibrator of the angular velocity sensor has various shapes such as a tuning fork shape, an H shape, or a T shape. The angular velocity sensor calculates the angular velocity by vibrating its vibrator and electrically detecting the deformation of the vibrator due to the Coriolis force (see, for example, Japanese Patent Laid-Open No. 2002-243451).

In addition, a technique using the above-mentioned angular velocity sensor as a component for realizing the anti-shake function of a digital camera has also been proposed (for example, refer to Japanese Patent Laid-Open No. 2004-77711).

Generally, since a digital camera is driven by a battery, the greater the power consumption of the battery, the shorter the usable time. Therefore, in order to save battery power consumption and enable long-term use, a function is adopted that minimizes power supply to main functions and cuts off power supply to other additional functions when not in use.

However, since power is always supplied to the angular velocity sensor that realizes the anti-shake function, there is a problem that it may hinder the suppression of power consumption.

Contents of the invention

The present invention was made in view of the above problems, and provides a vibration type inertial force detection sensor capable of reducing power consumption when mounted in electronic devices such as digital cameras, and electronic equipment using the sensor.

The vibration-type inertial force detection sensor of the present invention is characterized in that it has a vibrator, a drive unit for vibrating the vibrator, a detection unit for detecting deformation (distortion) of the vibrator due to inertial force, and a power supply unit. The power supply unit supplies power to the drive unit and the detection unit in a normal state, and supplies power to any one of the drive unit and the detection unit and does not supply power to the other of the drive unit and the detection unit in a power saving state.

According to such a structure, power is supplied to the drive unit and the detection unit in the normal state, and only one of the drive unit and the detection unit is supplied with power in the power-saving state. Therefore, when mounted in electronic equipment such as a digital camera, the Realized a vibration-type inertial force detection sensor capable of reducing power consumption.

In addition, it may be configured such that, in the power-saving state, the power supply unit supplies power to the drive unit and does not supply power to the detection unit.

According to such a structure, in the power-saving state, power is not supplied to the detection part for detecting the deformation of the vibrator due to inertial force, so the power consumption can be reduced, and in the power-saving state, power is supplied to the drive part, Therefore, when returning to the normal state from the power-saving state, the recovery time required for the vibration-type inertial force detection sensor to function can be shortened.

In addition, a return unit for returning the power supply unit to the normal state from the power saving state may be provided.

According to such a configuration, it is possible to reliably transition the power feeding unit from the power saving state to the normal state.

It may also be configured such that when an external signal is input, the recovery unit returns the power supply unit from the power-saving state to the normal state.

According to such a configuration, the power supply can be appropriately changed from the power saving state to the normal state according to the input of an external signal generated when the user touches the device or the like.

In addition, when the detection unit detects no deformation, the power supply unit may transition from the normal state to the power saving state.

According to such a configuration, when the user does not operate the device, the normal state can be changed to the power saving state.

When the detection unit detects no deformation for a predetermined period of time, the power supply unit may transition from the normal state to the power saving state.

According to such a configuration, when the user does not operate the device for a predetermined time, the normal state can be changed to the power saving state.

The electronic device of the present invention is characterized by comprising the vibration type inertial force detection sensor of the present invention.

According to such a configuration, power is supplied to the drive unit and the detection unit in the normal state, but only one of the drive unit and the detection unit is supplied with power in the power saving state, so that an electronic device capable of reducing power consumption can be realized.

The electronic equipment of the present invention has a vibrating type inertial force detection sensor and a power supply unit. The power supply unit supplies power to the drive unit and the detection unit in a normal state, and supplies power to any one of the drive unit and the detection unit and does not supply power to the other of the drive unit and the detection unit in a power-saving state.

According to such a configuration, power is supplied to the drive unit and the detection unit in the normal state, but only one of the drive unit and the detection unit is supplied with power in the power-saving state, so that an electronic device capable of reducing power consumption can be realized.

In addition, it may be configured such that, in the power-saving state, the power supply unit supplies power to the drive unit and does not supply power to the detection unit.

According to such a structure, in the power-saving state, power is not supplied to the detection part for detecting the deformation of the vibrator due to the inertial force, so the power consumption can be reduced, and in the power-saving state, since the power is supplied to the drive part Power supply, so when returning to the normal state from the power-saving state, the recovery time required to restore the function of the vibration-type inertial force detection sensor can be shortened.

It may also be configured such that the power supply unit transitions from the power-saving state to the normal state when an external signal is input.

According to such a configuration, the power supply can be appropriately changed from the power saving state to the normal state according to the input of the external signal.

In addition, the external signal may be a signal generated by a user touching the device.

According to such a structure, when the user touches the shutter button, the tripod screw, or the like, the power supply can be appropriately changed from the power saving state to the normal state.

It may also be configured such that when the detection unit detects no deformation, the power supply unit transitions from the normal state to the power-saving state.

According to such a configuration, when the user does not operate the device, the normal state can be changed to the power saving state.

It may also be configured such that the power supply unit transitions from the normal state to the power saving state when the detection unit detects no deformation for a predetermined period of time.

According to such a configuration, when the user does not operate the device for a predetermined time, the normal state can be changed to the power saving state.

It may also be configured such that the power supply unit transitions from the normal state to the power saving state when there is no external signal input for a predetermined time.

According to such a configuration, it is possible to change from the normal state to the power saving state according to the input of an external signal.

The external signal may be a signal generated by a user touching the device.

According to such a configuration, when the user does not touch the shutter button or the tripod screw of the device for a predetermined time, the normal state can be changed to the power saving state.

Description of drawings

FIG. 1 is a block diagram showing the structure of an angular velocity sensor according to a first embodiment of the present invention;

Fig. 2 is the plane view of the vibrator of this angular velocity sensor;

Fig. 3 is a perspective view of a digital camera equipped with the angular velocity sensor;

4 is a schematic diagram showing an electronic device according to a second embodiment of the present invention;

5 is a block diagram showing the structure of an inertial force detection sensor used in the electronic device;

6 is a plan view showing a sensor element used in the inertial force detection sensor;

7 is a schematic diagram showing an electronic device according to a third embodiment of the present invention;

FIG. 8 is a block diagram showing the configuration of an inertial force detection sensor used in the electronic device.

Explanation of reference signs

2: Angular velocity sensor; 4: Vibrator; 6: Drive circuit (drive part); 8: Detection circuit (detection part); 10: Power supply circuit (power supply part); 12: Reply circuit (return part); 14: Silicon substrate; 16, 62: driving electrode; 18, 64: detecting electrode; 20, 40, 70: digital camera; 22, 48: battery; 24: external signal; 26: output signal; 32: input part; 34: output part; 42 : optical system; 44: inertial force detection sensor; 46: threaded hole; 50, 80: power supply unit; 52: shutter button; 54: sensor element (vibrator); 56: drive control unit (drive unit); 58: detection signal Processing part (detection part); 60: Vibration part; 66: Detection shaft rotation direction; 72: Built-in timer; 74: Restart signal (external signal); 92: Contact signal (external signal); 94: Timing signal

Detailed ways

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(first embodiment)

First, a vibration type inertial force detection sensor according to a first embodiment of the present invention will be described. In this embodiment, an angular velocity sensor is used as a vibration-type inertial force detection sensor.

FIG. 1 is a block diagram showing the configuration of an angular velocity sensor 2 according to the first embodiment, and FIG. 2 is a plan view showing the configuration of a vibrator 4 of the angular velocity sensor 2 .

First, in FIG. 1 , the angular velocity sensor 2 has: a vibrator 4 having a structure described later, a drive circuit 6 which is a driving part for vibrating the vibrator 4, and a circuit 6 for detecting the vibration of the vibrator 4 due to Coriolis force (inertial force). A detection circuit 8 which is a detection part for deformation, and a power supply circuit 10 which is a power supply part for supplying power to the drive circuit 6 and the detection circuit 8 in a normal state.

When the vibrator 4 is not subjected to Coriolis force for a predetermined time, the detection circuit 8 determines that the angular velocity sensor 2 is not operating, and instructs the power supply circuit 10 to activate the sleep function (specifically, the function of transitioning from the normal state to the power saving state).

When the power supply circuit 10 receives an instruction from the detection circuit 8 to enable the sleep function, it transitions to a power-saving state in which power is supplied to the drive circuit 6 but not to the detection circuit 8 .

In addition, when a signal from the outside to release the sleep function (that is, return to the normal state from the power-saving state) is input as the external signal 24 through the input unit 32, the recovery circuit 12 receives the external signal 24 and instructs the power supply circuit 10 to The sleep function is released, and the detection circuit 8 is restarted to detect the deformation of the vibrator 4 . When the power supply circuit 10 receives an instruction from the recovery circuit 12 to release the sleep function, it continues to supply power to the drive circuit 6 and resumes supplying power to the detection circuit 8 . Thus, the detection circuit 8 restarts the detection of the deformation of the vibrator 4 .

As shown in Fig. 2, the vibrator 4 arranges the driving electrode 16 and the detecting electrode 18 of the multi-layer structure formed by sandwiching the electrode with a metal conductor such as Ag or Au into the piezoelectric film with PZT in a tuning fork shape, an H shape or a T shape. shape, etc., on a silicon substrate 14 of various shapes.

Returning to FIG. 1 , the drive circuit 6 is a circuit that controls the drive voltage applied to the drive electrode 16 so that the vibrator 4 vibrates with a constant amplitude, and the drive circuit 6 includes an AGC and an amplifier.

The detection circuit 8 is a circuit for processing a detection signal electrically output from the detection electrode 18 due to the deformation of the vibrator 4 due to the generation of the Coriolis force, and is composed of a differential circuit, an integrating circuit, or an IC. The result of the arithmetic processing by the detection circuit 8 is output to the outside through the output unit 34 as the output signal 26 .

The angular velocity sensor 2 described above is mounted, for example, as a component that realizes the anti-shake function of the digital camera 20 shown in FIG. 3 . In addition, the digital camera 20 is driven by a battery 22 . The battery 22 supplies power to the power supply circuit 10 of the angular velocity sensor 2 . Therefore, the greater the amount of power consumed by the battery 22, the shorter the usable time. Therefore, in the digital camera 20, in order to save the power consumed by the battery 22 and enable it to be used for a long time, a sleep function is adopted. The sleep function is to set the power supply to the main function part to a minimum and cut off other auxiliary functions when not in use. Power supply for functional parts.

In the angular velocity sensor 2 described above, power is not supplied to the detection circuit 8 for detecting the deformation of the vibrator 4 due to the Coriolis force when the Coriolis force is not received (power-saving state), so power consumption can be reduced. If this angular velocity sensor 2 is used in the digital camera 20 , the power consumption of the battery 22 of the digital camera 20 can be saved.

In addition, the indication time until the detection circuit 8 instructs the power supply circuit 10 to activate the sleep function may be immediately after the vibrator 4 is not subjected to the Coriolis force, or after a certain period of time after the vibrator 4 is not subjected to the Coriolis force. This time can be set arbitrarily in combination with specific specifications.

The angular velocity sensor 2 does not supply power to the detection circuit 8 but supplies power to the drive circuit 6 when the vibrator 4 is not subjected to a Coriolis force (power-saving state). Accordingly, in the angular velocity sensor 2 , when returning from the power-saving state to the normal state, the recovery time for returning to the function of the angular velocity sensor 2 that detects the deformation of the vibrator 4 can be shortened.

For example, when the power supply to the drive circuit 6 for vibrating the vibrator 4 is cut off, and then the power supply to the drive circuit 6 is restarted, the vibration of the vibrator 4 whose vibration was stopped due to the power cutoff is supplied with power again, so that the vibration needs to be stabilized. a certain amount of time. Therefore, high-precision deformation detection cannot be performed until the vibration of the vibrator 4 reaches a stable state. However, as shown in the angular velocity sensor 2 of this embodiment, even in the power-saving state, if the power supply to the drive circuit 6 for vibrating the vibrator 4 is not cut off and the supply is continued, the vibration of the vibrator 4 is always in a stable state. It does not take time to recover the function of the angular velocity sensor 2 which detects the deformation of the vibrator 4 . In addition, since the detection circuit 8 can return to the normal state from the power-saving state in a relatively short time, it is preferable not to supply power in the power-saving state from the viewpoint of saving power consumption.

In addition, since the angular velocity sensor 2 is provided with the return circuit 12 for returning to the normal state from the power-saving state, it can smoothly return to the normal state from the power-saving state. The transmission of the external signal 24 to facilitate the return is performed from the digital camera 20 equipped with the angular velocity sensor 2 , and various buttons such as a shutter button and a setting button of the digital camera 20 can be used as a transmission switch of the external signal 24 . In addition, the power supply circuit 10 can change from the power-saving state to the normal state immediately after the external signal 24 is input, or can change from the power-saving state to the normal state when the external signal 24 is input continuously or intermittently within a certain period of time. state. If the power-saving state is changed to the normal state immediately after the external signal 24 is input, it can quickly return to the normal state. or the possibility of state transitions caused by erroneously touching various buttons, etc.

In addition, in the present embodiment, an example has been described in which, when the sleep function is activated, the power supply from the power supply circuit 10 to the drive circuit 6 is continued and the power supply from the power supply circuit 10 to the detection circuit 8 is cut off. It is not limited to this. For example, on the contrary, when the sleep function is activated, the power supply from the power supply circuit 10 to the detection circuit 8 may be continued and the power supply from the power supply circuit 10 to the drive circuit 6 may be cut off. At this time, it takes time for the function of the angular velocity sensor 2 to return to the normal state from the power saving state, but power consumption can be reduced.

In the present embodiment, the angular velocity sensor 2 is used as the vibration-type inertial force detection sensor, but the present invention is not limited to this configuration. For example, various sensors can be used as long as they detect inertial force based on the vibration of the vibrator 4 , such as an acceleration sensor having the vibrator 4 .

In addition, in the present embodiment, the digital camera 20 has been used as the electronic device, but the present invention is not limited to this configuration. For example, the angular velocity sensor 2 of the present embodiment can be mounted on various electronic devices as long as they are electronic devices such as digital cameras equipped with vibration-type inertial force detection sensors.

(second embodiment)

Next, an electronic device according to a second embodiment of the present invention will be described in detail.

In this embodiment, a digital camera 40 will be used as an example of electronic equipment.

4 is a diagram schematically showing a digital camera 40 according to a second embodiment of the present invention. As a characteristic structure of the digital camera 40, a hand-shake prevention function is provided on the main body of the device relative to an optical system 42. The optical system 42 has Lens and CCD. As part of the system structure to realize the anti-shake function, a vibration-type inertial force detection sensor 44 is installed on the digital camera 40. Based on the detection signal from the inertial force detection sensor 44, by controlling the optical system 42, the digital camera can be prevented from 40's shaking hands.

The digital camera 40 is driven by a battery 48. Because it is important to suppress its power consumption, a sleep function is adopted. This sleep function is to set the power supply to the main functions to the minimum necessary limit and cut off the power supply to other additional functions when not in use. .

FIG. 5 is a block diagram showing the configuration of an inertial force detection sensor used in the electronic device of this embodiment. The inertial force detection sensor 44 used in this digital camera 40 is an angular velocity sensor. As shown in FIG. The detection signal processing unit 58 is a detection unit of the deformation of the force-hour sensor element 54 .

FIG. 6 is a plan view showing a sensor element used in the inertial force detection sensor of this embodiment. As shown in FIG. 6, the sensor element 54 is provided with a pair of drive electrodes 62 and detection electrodes 64 respectively on a pair of vibration parts 60 processed into a tuning fork shape on a silicon substrate. By applying a driving voltage to the drive electrodes 62, the pair of vibration parts 60 Vibrate side by side. In this state, when the sensor element 54 has an angular velocity in the detection shaft rotation direction 66 , the vibrating portion 60 is deflected by the Coriolis force. Due to the deflection of the vibration unit 60 , charges are generated on the detection electrodes 64 , and the detection signals can be output to the detection signal processing unit 58 .

In addition, the drive electrodes 62 and the detection electrodes 64 provided in the vibrating inertial force detection sensor 44 are not shown in particular, and they are composed of electrodes having metal conductors such as Ag or Au sandwiching a plurality of upper and lower surfaces of a piezoelectric thin film having PZT. layer structure.

As shown in FIG. 5 , the drive control unit 56 controls the drive voltage applied to the drive electrode 62 so that the vibration unit 60 in the sensor element 54 vibrates with a constant amplitude. The drive control unit 56 is not particularly shown, and is composed of an AGC and an amplifier.

The detection signal processing unit 58 electrically processes the detection signal output from the detection electrode 64 of the sensor element 54 . The detection signal processing unit 58 has a differential circuit, an integrating circuit, or an IC.

In addition, the digital camera 40 has a power supply unit 50 that supplies power to at least one of the drive control unit 56 and the detection signal processing unit 58 .

In the inertial force detection sensor 44 as described above, an accurate result cannot be obtained unless the amplitude of the sensor element 54 shown in FIG. 6 is stabilized. Therefore, when the operation of the inertial force detection sensor 44 as a whole is stopped by the above-mentioned sleep function, the vibration state of the sensor element 54 must be stabilized again at the next recovery time, resulting in prolonged restart time of the digital camera.

Therefore, in the digital camera 40 of the present embodiment, when the sleep function is enabled, that is, in the power-saving state, the power supply unit 50 supplies power to at least a part of the inertial force detection sensor 44 (for example, the drive control unit 56 and the detection signal processing unit 58 ). Either) to supply power, thereby shortening the restart time of the digital camera 40 .

In particular, when the sleep function of the inertial force detection sensor 44 is enabled, that is, in the power-saving state, as described above, the time required for the sensor element 54 to stabilize the amplitude of the sensor element 54 has a relatively large impact on the time required for restarting. Therefore, there is an effect of continuing to supply power to the drive control unit 56 that controls this part, and stopping power supply to the detection signal processing unit 58 that does not take much time to restart.

However, when the power supply from the power supply unit 50 to the detection signal processing unit 58 of the inertial force detection sensor 44 is stopped, the inertial force detection sensor 44 itself cannot generate the restart signal 74 which is an external signal that becomes an opportunity to return from the power saving state to the normal state. , so the restart signal 74 needs to be formed by other parts of the electronic device and transmitted to the power supply unit 50 .

For example, if it is the digital camera 40 shown in FIG. 4, the restart signal 74 can be formed by the following information generated by the user touching or acting on the device body of the digital camera 40. The information is that the user presses the shutter with a finger. Information generated when pressing the button 52, information generated when the device body is held in the hand by detecting its contact, or information generated when a tripod screw is attached to the threaded hole 46 of the device body.

In addition, in this embodiment, a digital camera is used as an electronic device and an angular velocity sensor is used as the inertial force detection sensor 44, but the present invention is not limited to these examples. For example, a battery-driven electronic device such as a digital camera or a mobile phone with a camera can achieve the same effect as long as it has a vibration-type inertial force detection sensor that detects inertial forces such as angular velocity and acceleration.

(third embodiment)

Next, an electronic device according to a third embodiment of the present invention will be described in detail with reference to the drawings. In this embodiment, a digital camera will be used as an example of electronic equipment.

FIG. 7 is a diagram schematically showing a digital camera 70 according to a third embodiment of the present invention, and FIG. 8 is a block diagram showing the configuration of an inertial force detection sensor used in the electronic device.

The digital camera 70 has, as its characteristic structure, an anti-shake function for the optical system 42 having a lens and a CCD provided in the main body of the device. As part of the system structure for realizing the anti-shake function, an angular velocity sensor, that is, a vibration-type inertial force detection sensor 44 is installed. Based on the detection signal from the inertial force detection sensor 44, it is possible to prevent digital cameras from blurring images caused by hand shake. unclear.

In addition, since the inertial force detection sensor 44 used in this digital camera 70 has the same structure as the inertial force detection sensor 44 mounted on the digital camera 40 described in the second embodiment, description thereof is omitted here.

The digital camera 70 is driven by the battery 48, and it is important to suppress its power consumption. Therefore, a sleep function is also employed in the digital camera 70 , which sets the power supply to the main function to the minimum necessary level and cuts off the power supply to other additional functions when it is not in use.

As shown in Figures 7 and 8, the digital camera 70 also has a built-in timer 72, a timing signal 94 representing the time information measured by the built-in timer 72 and external information generated by the user touching the device such as the shutter button, that is, the touch signal. Information 92 is input into the power supply unit 80 . In addition, deformation detection information from the detection signal processing unit 58 is also input to the power supply unit 80 . Based on these inputs, the power supply unit 80 supplies power to at least one of the drive control unit 56 and the detection signal processing unit 58 . How the power supply unit 80 supplies power in the normal state and in the power-saving state is the same as that of the power supply unit 50 in the second embodiment, and thus description thereof will be omitted here.

According to such a configuration, in the digital camera 70, the transition from the normal state to the power saving state, and the transition from the power saving state to the normal state can use the so-called timer sleep function, and can also use the function based on hand shake. The angular velocity sleep function of the angular velocity information output by the inertial force detection sensor 44 for calibration and received by the device itself, the timer sleep function utilizes the aforementioned user's contact signal 92 and the built-in timer 72 from the digital camera 70. Timing signal 94.

First of all, in the timer sleep function, the transition from the normal state to the power-saving state is after a certain period of time (by built-in timer 72) after the user does not touch the device (specifically, since the contact signal 92 is not detected). Timed and judged) and carried out. At this point, the user is not in contact with the device, specifically. Immediately after the contact signal 92 is not detected, it changes from the normal state to the power saving state, thus further power saving can be achieved. Regardless of whether the user is using the device, the likelihood of transitioning to a power-saving state is reduced.

In addition, when the user touches the device, specifically, when the power supply unit 80 detects the touch signal 92 , the transition from the power saving state to the normal state is performed. The power supply circuit 80 can change from the power-saving state to the normal state immediately after the contact signal 92 is input, and can also change from the power-saving state to the normal state when the contact signal 92 is input continuously or intermittently for a certain period of time. If the power-saving state is changed to the normal state immediately after the contact signal 92 is input, it can be quickly changed to the normal state. There is a possibility of transitioning to the normal state when various buttons are touched by mistake.

Next, in the angular velocity sleep function, the transition from the normal state to the power-saving state is performed when the power supply unit 80 judges that the user has not operated the device based on the output from the detection signal processing unit 58 The user does not operate the device within a certain period of time. At this time, after it is judged that the user does not operate the device, the normal state is changed to the power saving state immediately, so that power can be saved. Regardless of whether the user is using the device, the likelihood of transitioning to a power-saving state is reduced.

That is, since the digital camera 70 of this embodiment is provided with the inertial force detection sensor 44 on the device body, the output signal from the inertial force detection sensor 44 is output in real time in accordance with the operation of the device body. This output signal is not only used for the anti-shake function, but also used as sleep function activation information to re-transition the electronic equipment from the normal state to the power saving state. Therefore, compared with the case where only the timer sleep function is used, The operation of the device body can be judged more accurately, and further power saving of the electronic device can be achieved. For example, when only the sleep function of the timer is used, when the user puts the digital camera on the table, although it remains in the normal state for a certain period of time, when the sleep function of the angular velocity is used, it can be judged in real time whether the digital camera is placed on the table or not. This situation, so the sleep function can be enabled earlier.

In addition, in this embodiment, a digital camera is exemplified as an electronic device and described, but the present invention is not limited thereto. As an electronic device, a battery-driven electronic device such as a digital video camera or a mobile phone with a camera, as long as the configuration The same effect can also be achieved by including a vibration-type inertial force detection sensor such as an angular velocity sensor.

Industrial availability

As described above, according to the present invention, when mounted in electronic equipment such as a digital camera, a vibration-type inertial force detection sensor that can reduce power consumption can be realized, so it can be used as a vibration-type inertial force detection sensor and sensor for various electronic equipment. Electronic equipment and the like using this sensor are useful.

Claims (15)

1. A vibration type inertial force detection sensor, is characterized in that, has: Vibrator; a driving part for vibrating the vibrator; a detection unit for detecting deformation of the vibrator due to inertial force; a power supply unit, the power supply unit supplies power to the drive unit and the detection unit in a normal state, and supplies power to any one of the drive unit and the detection unit in a power-saving state and does not supply power to the drive unit and the other one of the detection parts is powered. 2 . The vibration type inertial force detection sensor according to claim 1 , wherein in the power saving state, the power supply unit supplies power to the drive unit and does not supply power to the detection unit. 3 . 3. The vibration-type inertial force detection sensor according to claim 2, further comprising a return unit for returning the power supply unit from the power-saving state to the normal state. 4 . The vibration type inertial force detection sensor according to claim 3 , wherein when an external signal is input, the return unit returns the power supply unit from the power-saving state to the normal state. 5 . 5 . The vibration type inertial force detection sensor according to claim 2 , wherein the power supply unit transitions from the normal state to the power saving state when the detection unit does not detect the deformation. 5 . 6. The vibration-type inertial force detection sensor according to claim 5, wherein when the detection part does not detect the deformation for a predetermined time, the power supply part changes from the normal state to the power-saving state. state. 7. An electronic device comprising the vibration-type inertial force detection sensor according to any one of claims 1 to 6. 8. An electronic device, characterized in that, there is a vibrating type inertial force detection sensor and a power supply part, and the vibrating type inertial force detection sensor has: a vibrator, a driving part for vibrating the vibrator, and a vibrator for detecting the vibrator due to inertial force. As for the detection part of the deformation generated by the vibrator, the power supply part supplies power to the driving part and the detection part in the normal state, and supplies power to any of the driving part and the detection part in the power-saving state. One supplies power and does not supply power to the other of the drive unit and the detection unit. 9 . The vibration type inertial force detection sensor according to claim 8 , wherein in the power saving state, the power supply unit supplies power to the drive unit and does not supply power to the detection unit. 10. The vibration-type inertial force detection sensor according to claim 9, wherein the power supply unit transitions from the power-saving state to the normal state when an external signal is input. 11. The vibration type inertial force detection sensor according to claim 10, wherein the external signal is a signal generated by a user touching the device. 12 . The vibration-type inertial force detection sensor according to claim 9 , wherein when the detection unit does not detect the deformation, the power supply unit transitions from the normal state to the power saving state. 13 . 13. The vibration type inertial force detection sensor according to claim 9, wherein when the detection unit does not detect the deformation for a predetermined time, the power supply unit switches from the normal state to the power saving state. state. 14. The vibration type inertial force detection sensor according to claim 9, wherein the power supply unit transitions from the normal state to the power saving state when no external signal is input for a predetermined time. 15. The vibration type inertial force detection sensor according to claim 14, wherein the external signal is a signal generated by a user touching the device.

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