CN101286730B - Contour resonator - Google Patents

Abstract

The invention provides a contour vibrator with low loss and high structural strength. The outline vibrator (10) is formed by bonding at least the opposing main surfaces of the vibrating substrate (20) and the vibrating substrate (40) having a common resonant frequency and vibration mode, and the outline vibrator (10) has: ) on the front main surface of the excitation electrode (30); the excitation electrode (60) arranged on the back main surface of the vibration substrate (40); and the boundary surface arranged on the vibration substrate (20) and the vibration substrate (40) The common intermediate excitation electrode (50) is applied with an excitation signal that makes the excitation electrode (30) and the excitation electrode (60) have the same potential and the middle excitation electrode (50) has an opposite potential. The cutting angle of the vibrating substrate (20) is When , the cutting angle of the vibrating substrate (40) is

or

. In this way, the thickness of the vibrating substrate alone can be reduced, the electric field efficiency can be improved, and the structural strength can be improved by lamination bonding.

Description

Contour vibrator

technical field

The present invention relates to a contour resonator (contour resonator) formed by stacking and bonding a plurality of vibrating substrates.

Background technique

Examples of piezoelectric vibrators for electronic equipment such as portable devices, information communication devices, and measurement devices include thickness-shear vibrators such as AT-cut quartz resonators, DT-cut quartz resonators (profile-shear quartz resonators), Contour resonators such as Lame-Mode Quartz Crystal Resonators and quasi-Lame mode quartz resonators.

In Non-Patent Document 1 and Non-Patent Document 2, a Lame mode quartz vibrator in which excitation electrodes are formed on both sides of a square quartz substrate is reported, and the Lame mode excited between two opposing sides of the quartz substrate is shown. Lame mode vibration, the Lame mode vibration is the vibration of alternate stretching between the two sides of one side and the two sides of the other side orthogonal to it.

表示的切角表记中，设θ为40°～50°，

为-40°～-60°(即

为120°～140°)或为40°～60°的石英基板。In Patent Document 1, a Lame mode quartz vibrator is disclosed, which is used in the IRE (abbreviation of Institute of Radio Engineers (Institute of Radio Engineers), now IEEE) standard

In the notation of the cut angle, let θ be 40°～50°,

-40°～-60° (ie

120°～140°) or It is a quartz substrate of 40°～60°.

Patent Document 3 discloses a GT-cut quartz resonator in which θ is 40° to 50°. Patent Document 2 and Non-Patent Document 3 disclose techniques for forming a Lame mode quartz oscillator by setting the side length ratio of a GT-cut quartz oscillator of θ=45° to 1.

Also, Patent Document 4 discloses a profile-shear quartz oscillator.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2005-26843

[Patent Document 2] Japanese Unexamined Patent Publication No. 2001-313537

[Patent Document 3] Japanese Patent Application Laid-Open No. 52-149084

[Patent Document 4] Japanese Patent Publication No. 8-31758

[Non-Patent Document 1] The 24th EM Symposium, pp. 11-16, "Etsuching method ni yotsute forms a crystal vibrator of されたラ-メモモード", Hirofumi Kawashima, Masaru Matsuyama

剛史、

沢英

、丸茂正秀、雨宮正人[Non-Patent Document 2] The 35th chapter of EM Symposium, pages 31-34, "Development of Small-sized ラーメモモード Crystal Vibrator", Katsuya Mizumoto, Masashi Akino, Nishi

just history,

Sawahide

, Masahide Marushige, Masato Amamiya

[Non-Patent Document 3] P.C.Y.Lee, et al. "Extensional Vibrations of Rectangular Crystal Plates", Proc.35th Ann.Freq.Control Symposium(1981)

In such a profile transducer, excitation electrodes are formed on both the front and back surfaces of a single-layer quartz substrate. Here, by reducing the distance between the excitation electrodes on the front and rear surfaces (that is, by making the quartz substrate thinner), the electric field efficiency can be improved, and a low-loss contour oscillator can be realized. However, when the quartz substrate is thinned, there is a problem that the strength of the structure including the support structure is not enough to be suitable for practical use.

Contents of the invention

The object of the present invention is to provide a contour vibrator with high electric field efficiency and high structural strength.

[Application example 1] A contour vibrator having at least a first vibration substrate and a second vibration substrate, which is formed by joining main surfaces of the first vibration substrate and the second vibration substrate facing each other, wherein It is characterized in that the outline vibrator has: a first excitation electrode provided on the front main surface of the first vibration substrate; a second excitation electrode provided on the back main surface of the second vibration substrate; A common intermediate excitation electrode on the boundary surface between the first vibration substrate and the second vibration substrate, the first excitation electrode and the second excitation electrode are electrically connected as a first terminal, and the intermediate excitation electrode serves as The second terminal is configured to cause contour vibration of the first vibration substrate and the second vibration substrate based on an excitation signal applied between the first terminal and the second terminal.

Preferably, the first vibration substrate and the second vibration substrate have the same resonance frequency, vibration mode, and vibration displacement direction.

Assuming that the outline vibrator of the present invention has a stacked structure of the first and second vibrating substrates, for the first vibrating substrate, the first excitation electrode is the upper electrode, and the middle excitation electrode is equivalent to the lower electrode. On the other hand, for the second vibration substrate, the intermediate excitation electrode corresponds to the upper electrode, and the second excitation electrode corresponds to the lower electrode.

Therefore, even if the distance between the excitation electrodes of the first vibrating substrate and the second vibrating substrate is reduced in a single body (that is, even if the respective vibrating substrates are thinned), they are formed in a mutually laminated structure, compared to a single body. The language also has twice the structural thickness. Thus, by reducing the distance between the excitation electrodes, the electric field applied to the vibrating substrate can be increased (that is, the electric field efficiency can be improved), and by joining the boundary surfaces, a contour vibrator with sufficient structural strength for practical use can be realized.

In addition, if the resonant frequency, vibration mode, and vibration displacement direction are the same in the first vibrating substrate and the second vibrating substrate, the first vibrating substrate and the second vibrating substrate do not interfere with each other's vibration, and the resonance can be suppressed. increase in resistance.

[Application example 2] In the outline vibrator according to application example 1, it is characterized in that the resonant frequency Fb of at least one of the vibration substrates of the first vibration substrate or the second vibration substrate; and the The resonance frequency Fe of at least one excitation electrode among the first excitation electrode, the second excitation electrode or the intermediate excitation electrode satisfies the following relationship: 0.995×Fe≤Fb≤1.005×Fe.

Preferably Fe=Fb.

According to such a contour vibrator, it is possible to suppress the vibration of the excitation electrode from obstructing the vibration of the vibrating substrate, and maintain good contour vibration. In addition, it is possible to reduce the frequency variation of the contour vibrator due to the variation in film thickness of the excitation electrode.

The relationship between the resonant frequency Fb and the resonant frequency Fe is optimal when Fb=Fe, but the above effects can be exhibited as long as the difference between the resonant frequency Fb and the resonant frequency Fe is within ±0.5%.

[Application example 3] In the outline vibrator described in application example 1 or application example 2, the outline vibrator is a Lame mode vibrator or a quasi-Lame mode vibrator as follows: that is, the first vibrating substrate and the second vibrating substrate is made of a crystal having crystal anisotropy, the cut angles of the crystals of the first vibrating substrate and the second vibrating substrate are the same, and the in-plane rotation angles are different from each other by 90°, Alternatively, the cut angles of the first vibration substrate and the second vibration substrate from the crystal are different from each other by 180°, and the in-plane rotation angles are the same or different from each other by 180°.

According to such a contour vibrator, the contour vibration mode and the vibration displacement direction can be made to be the same in the first vibration substrate and the second vibration substrate, and furthermore, the contour vibration mode can be a Lame mode. Therefore, a Lame mode oscillator or a quasi-Lame mode oscillator with high electric field efficiency, low loss, and high structural strength can be realized.

In the Lame mode vibrator, the four corners and the central part of the vibrating substrate are nodes of the contour vibration (parts where the displacement of the contour vibration hardly occurs). In this way, the support portion of the vibrating substrate can be provided on the node of the contour vibration, and the hindrance of the support to the contour vibration can be significantly reduced. In addition, even in the state where the four corners of the vibrating substrate are not completely on the joints, as long as it is between the two opposing sides of the vibrating substrate, it can alternately expand and contract between the two sides of one side and the two sides of the other side perpendicular to it. In the vibration mode (hereinafter referred to as the quasi-Lame mode), there are places where the contour vibration displacement is relatively small around the four corners of the vibrating substrate, so the hindrance of the support to the contour vibration can be reduced.

或

表示。[Application example 4] In the outline vibrator according to application example 3, the first vibration substrate and the second vibration substrate are composed of square quartz substrates, and the first vibration substrate and the The chamfer of the quartz substrate of one of the second vibrating substrates conforms to the IRE standard Indicates that the chamfered corner of the quartz substrate on the other side is

or

express.

[Application example 5] In the profile vibrator described in application example 4, the profile vibrator satisfies the following conditions: 40°≤θ≤50°, -50°≤θ≤-40°, 130°≤θ ≤140°, or -140°≤θ≤-130°.

According to this profile vibrator, a stable piezoelectric single crystal quartz is used as a material for the vibrating substrate, so a Lame mode quartz vibrator or a quasi-Lame mode quartz vibrator with good temperature characteristics and little change over time can be realized.

[Application Example 6] In the profile oscillator described in any one of Application Example 1 to Application Example 5, the profile oscillator is a Lame mode oscillator as follows: that is, the first excitation electrode is in a plane Divided by n in the direction (n is an integer greater than or equal to 2), the middle excitation electrode and the second excitation electrode are divided by n opposite to the first excitation electrode, and the adjacent ones divided by n in the planar direction One of the excitation electrodes is connected to the first terminal, and the other is connected to the second terminal.

In this way, n pairs of contour vibrators with the first excitation electrode, the first vibration substrate, the intermediate excitation electrode, the second vibration substrate, and the second excitation electrode as a pair are formed. Due to the number of pairs, a high-order vibration mode can be realized. Contour vibrator.

[Application Example 7] In the profile vibrator described in Application Example 1 or Application Example 2, the profile vibrator is a profile shear vibrator: that is, the first vibrating substrate and the second vibrating The substrates are made of crystals having crystal anisotropy, the cut angles of the crystals of the first vibration substrate and the second vibration substrate are the same, and the in-plane rotation angles are different from each other by 90°, or the first The vibrating substrate and the second vibrating substrate have a difference of 180° between cut angles cut from the crystal, and a difference of 90° between in-plane rotation angles.

According to such a contour vibrator, even when the contour shear vibration is used as a vibration mode common to the first vibration substrate and the second vibration substrate, the directions of vibration displacement can be made the same. Accordingly, it is possible to realize a low-loss contour-shear vibrator in which the electric field efficiency is high, and the first vibrating substrate and the second vibrating substrate do not interfere with each other in vibration.

表示，另一方的石英基板的切角以

或

表示。[Application example 8] In the outline vibrator according to application example 7, the first vibration substrate and the second vibration substrate are composed of square quartz substrates, and the first vibration substrate and the second vibration substrate are 2. The chamfer of one of the vibration substrates, the quartz substrate, is based on the IRE standard

Indicates that the chamfered corner of the quartz substrate on the other side is

or

express.

[Application example 9] In the profile vibrator described in application example 8, the profile vibrator satisfies the following conditions: -5°≤θ≤5°, 85°≤θ≤95°, 175°≤θ≤ 185°, or -95°≤θ≤-85°.

According to such a profile vibrator, a stable piezoelectric single crystal, ie, quartz, is used as a material for the vibrating substrate. Therefore, a profile-shear quartz vibrator with good temperature characteristics and little change over time can be realized.

[Application example 10] In the outline vibrator described in any one of application example 1 to application example 9, it is characterized in that the electrode material of the first excitation electrode, the second excitation electrode or the intermediate excitation electrode is made of The electrode material mainly consists of any one of Al, Au, Ag, and Cu.

As the electrode material, low-resistance metals such as Al, Ag, Cu, Au, or an alloy mainly composed of any of them can be used, thereby reducing the sheet resistance of the excitation electrode film and realizing a low-loss profile. Vibrator.

Description of drawings

表示的切角的说明图。Figure 1 is a schematic illustration of the IRE standard

An explanatory diagram of the indicated chamfer.

FIG. 2 is a perspective view showing a schematic configuration of an outline vibrator according to Embodiment 1 of the present invention.

3 is a plan view showing the outer shape and electrode structure of the outline vibrator according to Embodiment 1 of the present invention, (a) is a plan view of the vibrating substrate 20, (b) is a plan view of the vibrating substrate 40, and (c) is a plan view of the vibrating substrate 40. bottom view.

FIG. 4 shows the vibrating part of the vibrating substrate 20, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibrating attitude.

FIG. 5 is a diagram when the cut angle of the vibrating substrate 40 is the same as that of the vibrating substrate 20 , (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture.

的情况，(a)是侧视图，(b)是示意性地表示振动姿态的说明图。FIG. 6 shows that the vibrating substrate 40 is

In the case of , (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration attitude.

7 is a partial cross-sectional view of a first modification example of Embodiment 1 of the present invention.

8 is a partial cross-sectional view of a second modified example of Embodiment 1 of the present invention.

9 shows a profile vibrator according to Embodiment 2 of the present invention, (a) is a plan view, and (b) is a cross-sectional view showing the A-A cross section of (a).

10 shows a vibrating substrate alone according to Embodiment 2 of the present invention, (a) is a plan view of vibrating substrate 120 , (b) is a plan view of vibrating substrate 140 , and (c) is a bottom view of vibrating substrate 140 .

FIG. 11 is a perspective view showing a schematic configuration of a profile shear vibrator according to Embodiment 3 of the present invention.

FIG. 12 shows the third embodiment of the present invention using chamfering to The state of the substrate of the vibrating substrate 220 is shown, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture.

表示的振动基板240的基板的情况，(a)是侧视图，(b)是示意性地表示振动姿态的说明图。FIG. 13 shows the third embodiment of the present invention using chamfering to

The state of the substrate of the vibrating substrate 240 is shown, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture.

FIG. 14 shows that the chamfer of the vibrating substrate 240 according to Embodiment 3 of the present invention is IRE standard. In the case of , (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration attitude.

Detailed ways

来表示从具有晶体各向异性的晶体切出振动基板时的切角

和面内旋转角θ。首先，说明该IRE标准的和

In the following descriptions, the IRE standard or

to represent the cut angle when cutting out the vibrating substrate from a crystal with crystal anisotropy

and the in-plane rotation angle θ. First, explain the IRE standard's and

中的“Y”字母是指取Y轴作为旋转前的振动基板1的厚度方向，

中的“X”字母是指取X轴作为旋转前的振动基板1的长度方向(振动基板的平面形状为长方形时为沿着长边的方向)。

中的“1”是指第1旋转轴为振动基板1的长度方向。

中的

表示振动基板1相对于第1旋转轴的旋转角度。

中的“t”是指第2旋转轴为第1旋转后的振动基板1的厚度方向，

中的“θ”表示振动基板1相对于第2旋转轴的旋转角度。Figure 1 is used to illustrate the IRE standard A plot of the tangent and in-plane rotation angles represented. In FIG. 1 , piezoelectric single crystals such as quartz, LiTaO ₃ , LiNbO ₃ , Li ₂ B ₄ O ₇ , or La ₃ Ga ₅ SiO ₁₄ or silicon single crystals are represented by the X-axis, Y-axis, and Z-axis, The crystallographic axis of a crystal with crystal anisotropy. Where the crystal is quartz, the electrical axis is the X axis, the mechanical axis is the Y axis, and the optical axis is the Z axis.

The letter "Y" in the figure refers to taking the Y axis as the thickness direction of the vibrating substrate 1 before rotation,

The letter "X" in the figure means that the X axis is taken as the longitudinal direction of the vibrating substrate 1 before rotation (the direction along the long side when the planar shape of the vibrating substrate is rectangular).

The “1” in the symbol means that the first rotation axis is the longitudinal direction of the vibrating substrate 1 .

middle

Indicates the rotation angle of the vibration substrate 1 with respect to the first rotation axis.

"t" in the above means that the second rotation axis is the thickness direction of the vibrating substrate 1 after the first rotation,

"θ" in , represents the rotation angle of the vibrating substrate 1 with respect to the second rotation axis.

设旋转后的晶体的坐标系为X、y’、z’(省略图示)。在该坐标系中，进一步以y’为旋转轴旋转角度θ，用x’、y’、z”来表示旋转后的晶体的坐标系。First, take the X axis as the rotation axis to rotate the angle

Let the coordinate system of the rotated crystal be X, y', z' (illustration omitted). In this coordinate system, the angle θ is further rotated with y' as the rotation axis, and the coordinate system of the crystal after rotation is represented by x', y', and z".

这也可以表记为

另外，关于的旋转方向，当以X轴为第1旋转轴时，设从+Z轴向-Y轴旋转的方向为正的旋转方向。关于θ的旋转方向，当以y’轴为第2旋转轴时，设从+z’轴向+X轴旋转的方向为正的旋转方向。When only the first rotation is performed without the second rotation, according to the above description, θ=0° is expressed as

This can also be expressed as

In addition, about When the X axis is used as the first rotation axis, the direction from the +Z axis to the -Y axis is defined as the positive rotation direction. Regarding the rotation direction of θ, when the y' axis is used as the second rotation axis, the direction rotating from the +z' axis to the +X axis is defined as a positive rotation direction.

Embodiments of the present invention will be described below with reference to the drawings.

2 to 8 show the structure and function of the contour vibrator of Embodiment 1 and its modifications, Fig. 9 and Fig. 10 show the structure and function of the contour vibrator of Embodiment 2, and Fig. 11 and Fig. 12 show the structure and function of the contour vibrator of Embodiment 3 The structure and function of the outline oscillator.

In addition, for convenience of illustration, the drawings referred to in the following description are schematic diagrams in which the vertical and horizontal scales of components or parts are different from actual ones.

(Embodiment 1)

FIG. 2 is a perspective view showing a schematic configuration of an outline vibrator according to Embodiment 1 of the present invention. In FIG. 2 , the outline vibrator 10 is a mutual bonded vibrating substrate (hereinafter only shown as vibrating substrate 20 ) 20 as a first vibrating substrate and a vibrating substrate (hereinafter only shown as vibrating substrate 40 ) 40 as a second vibrating substrate. A laminated profile vibrator formed of opposing main surfaces.

Moreover, an excitation electrode (hereinafter referred to simply as an excitation electrode 30) 30 as a first excitation electrode is provided on the front main surface of the vibration substrate 20, and an excitation electrode (hereinafter referred to as an excitation electrode 30) 30 as a second excitation electrode is provided on the back main surface of the vibration substrate 40. The electrodes (hereinafter simply referred to as excitation electrodes 60 ) 60 are provided with a common intermediate excitation electrode 50 on the interface between the vibration substrate 20 and the vibration substrate 40 .

When the material of the vibrating substrate is fixed, the resonant frequency of the profile vibrator mainly depends on the external dimensions of the vibrating substrate (details will be described later), so the thickness of the vibrating substrate is not restricted by the resonant frequency like the thickness shear vibrator . In the contour vibrator, the electric field efficiency for causing the vibrating substrate to contour vibrate is improved by reducing the thickness of the vibrating substrate. However, if the vibrating substrate is thinned, the vibrating substrate is easily damaged. According to the structure shown in FIG. 2, even if the vibrating substrate is thinned to narrow the space between the excitation electrodes, the thickness of the vibrating substrate 20 and the vibrating substrate 40 as a laminated structure is also very thick, so the vibrating parts 21, 41 in particular are difficult to Breakage occurs.

表示的石英基板，振动基板40是以

或

表示的石英基板。It is preferable that the vibration substrates 20 and 40 have the same resonance frequency, vibration mode, and vibration displacement direction as each other so as not to hinder the mutual contour vibration. Accordingly, an increase in resonance resistance can be suppressed. The vibrating substrate 20 is based on the IRE standard

Indicates the quartz substrate, the vibrating substrate 40 is

or

Indicates the quartz substrate.

3 is a plan view of the vibrating substrate 20 and the vibrating substrate 40 disassembled to show the external shape and the electrode structure, (a) is a plan view of the vibrating substrate 20, (b) is a plan view of the vibrating substrate 40, and (c) is a vibrating substrate. 40's bottom view. Referring to Fig. 2 and Fig. 3, the structure of the profile vibrator 10 will be described.

As shown in Figure 3 (a), the vibrating substrate 20 is made up of the following parts: a vibrating portion 21; a supporting arm 22 extending from the corner of the vibrating portion 21; and a supporting portion 23 arranged on the front end of the supporting arm 22 . An excitation electrode 30 is provided on the front main surface of the vibration portion 21 , and the excitation electrode 30 is connected to a connection electrode 32 provided on the surface of the support portion 23 via a connection electrode 31 .

Here, the vibrating portion 21 and the excitation electrode 30 are each in a square shape, and the length of one side of the vibrating portion 21 is represented by Lb, and the length of one side of the excitation electrode 30 is represented by Le.

As shown in Figure 3 (b), the vibrating substrate 40 is made up of the following parts: a vibrating part 41; supporting arm parts 42, 44 extending to both sides from the two opposite corners of the vibrating part 41; The supporting part 43 on the front end part of the arm part 42; and the supporting part 45 provided on the front end part of the supporting arm part 44.

An intermediate excitation electrode 50 is provided on the front main surface of the vibrator 41 (corresponding to the boundary surface with the vibrator 21), and the intermediate excitation electrode 50 is connected to the surface of the support portion 43 via the connection electrode 53 on the surface of the support arm 42. The electrode 54 is connected. On the other hand, on the support arm portion 44 side, it is connected to the connection electrode 52 on the surface of the support portion 45 via the connection electrode 51 . The connection electrodes 51 and 52 are electrically separated from the intermediate excitation electrode 50 , and are provided in order to improve mutual adhesion when the multilayer vibration substrate 20 and the vibration substrate 40 are bonded.

In the vibrating substrate 40, the vibrating portion 41 and the intermediate excitation electrode 50 are squares of the same size as the vibrating portion 21 and the excitation electrode 30 of the vibrating substrate 20, the length of one side of the vibrating portion 41 can be represented by Lb, and the intermediate excitation electrode can be represented by Le. 50 for the length of one side.

And, as shown in FIG. 3( c), an excitation electrode 60 is provided on the back main surface of the vibration substrate 40, and the excitation electrode 60 is connected to the connection electrode 62 on the surface of the support portion 45 via the connection electrode 61 on the surface of the support arm portion 44. . On the other hand, a connection electrode 63 is provided on the support portion 43 side.

In addition, the length of one side of the excitation electrode 60 may also be represented by Le.

In addition, the respective electrode materials of the excitation electrode 30 , the intermediate excitation electrode 50 , and the excitation electrode 60 can be selected from electrode materials mainly composed of Al, Au, Ag, and Cu.

The state in which the vibration substrates 20 and 40 are stacked and bonded shown in FIG. 3 is the outline vibrator 10 shown in FIG. 2 . Here, the connection electrode 32 provided on the front main surface side of the vibration substrate 20 is connected to the connection electrode 62 provided on the rear main surface of the vibration substrate 40 via the side electrode 33 to constitute a first terminal. Therefore, the excitation electrode 30 and the excitation electrode 60 are electrodes of the same electric potential.

Furthermore, the connection electrode 54 provided on the upper surface of the vibrating substrate 40 (specifically, the support portion 43 ) is connected to the connection electrode 63 on the rear main surface side via the side surface electrode 64 to form a second terminal (see FIG. 2 ). Therefore, the intermediate excitation electrode 50 is an electrode having a different potential from the excitation electrode 30 and the excitation electrode 60 .

When an excitation signal is applied between the first terminal and the second terminal, the vibrating substrates 20 and 40 vibrate according to their contours.

The contour vibrator 10 configured in this way is a laminate of two contour vibrators: namely, a contour vibrator in which the excitation electrode 30 is an upper electrode and the intermediate excitation electrode 50 is a lower electrode with respect to the vibrating part 21 , and a contour vibrator with a vibrating part 41 . It is said that the middle excitation electrode 50 is the upper electrode and the excitation electrode 60 is the lower electrode.

Furthermore, the connection electrodes 62 and 63 provided on the rear main surface side of the vibrating substrate 40 shown in FIG. It is input to the excitation electrode 30 , the excitation electrode 60 , and the intermediate excitation electrode 50 via the connection electrodes 62 and 63 .

Next, the vibration posture of the outline vibrator 10 according to the present embodiment will be described with reference to the drawings. FIG. 4 shows the vibrating part 21 of the vibrating substrate 20, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibrating attitude. The vibrating substrate 20 is a quartz substrate whose chamfer is in IRE standard The square flat plate shown, when a positive potential is applied to the excitation electrode 30 (equivalent to the upper electrode) and a negative potential is applied to the middle excitation electrode 50 (equivalent to the lower electrode), it appears in the figure (b) represented by the two-dot dash line Lame mode vibration shown in R. The cut angle and vibration mode of the vibrating substrate 40 at this time will be described with reference to FIGS. 5 and 6 .

Figure 5 shows the use of the same vibration substrate 20 (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture when a quartz substrate is used as the vibration substrate 40 . Here, the intermediate excitation electrode 50 is the same electrode as the vibrating substrate 20 , so it has a negative potential, and the excitation electrode 60 has the same potential as the excitation electrode 30 , so it has a positive potential.

Therefore, the cut angles of the vibrating substrate 20 and the vibrating substrate 40 are exactly the same, and when excitation signals of opposite phases are applied, as shown in FIG. The vibration modes that are shifted by 90°, if driven at the same time, will hinder each other's vibration.

从而使振动模态一致。Therefore, as shown in FIG. 6, the cut angle of the quartz substrate of the vibration substrate 40 is IRE standard.

This makes the vibration modes consistent.

或

的石英基板作为振动基板40的情况，(a)是侧视图，(b)是示意性地表示振动姿态的说明图。这样，即使对振动基板40施加了与振动基板20相反的电位，即施加了相反相位的激励信号，如图(b)所示，也为与振动基板20相同的振动模态，不会妨碍彼此的振动。Figure 6 shows the use of

or

(a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture when a quartz substrate is used as the vibration substrate 40 . In this way, even if a potential opposite to that of the vibration substrate 20 is applied to the vibration substrate 40, that is, an excitation signal of an opposite phase is applied, as shown in FIG. vibration.

或

的振动基板40。所谓切角为

或

是指相对于

使振动基板的晶体的表面背面相反，即，振动模态左右倒换，所以，虽然省略了图示，但是，即使施加了与振动基板20相反相位的激励信号，振动模态也与振动基板20一致。并且，在

恒定时，在θ、θ+180°以及θ- 80°的情况下，振动模态和振动移位方向都相同。and, for The vibrating substrate 20 can also be combined

or

The vibrating substrate 40. The so-called cutting angle is

or

means relative to

The surface and back of the crystal of the vibrating substrate are reversed, that is, the vibration mode is reversed left and right. Therefore, although the illustration is omitted, even if an excitation signal with an opposite phase to that of the vibrating substrate 20 is applied, the vibration mode is consistent with that of the vibrating substrate 20. . and, in

When constant, in the case of θ, θ+180° and θ- 80°, the vibration modes and vibration displacement directions are the same.

θ＝+45°的LQ2T切的情况下，如果振动基板40的切角为

θ＝-45°(相当于

)，或者θ＝+45°(相当于)，则振动模态一致。For example, when the vibrating substrate 20 is

In the case of the LQ2T cut of θ=+45°, if the cut angle of the vibrating substrate 40 is

θ＝-45°(equivalent to

),or θ＝+45°(equivalent to ), the vibration modes are the same.

振动基板20的切角为或

In addition, it is also possible to set the cut angle of the vibrating substrate 40 described above as

The cut angle of the vibrating substrate 20 is or

Next, the relationship between the planar size of the vibrating portion and the planar size of the excitation electrodes will be described. The relationship between the vibrator 21 and the excitation electrode 30 will be described as a representative. Refer to Figure 3.

The frequency equation for solving the resonance frequency f of the Lame mode oscillator is given by the above-mentioned Non-Patent Document 1 (Non-Patent Document 1, page 12, equation (9)).

$\mathrm{<span\; class="notranslate">\; f</span>}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; m</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; x</span>}}_{\mathrm{<span\; class="notranslate">\; o</span>}}<span\; class="notranslate">\; )</span>}\sqrt{\frac{{{\mathrm{<span\; class="notranslate">\; c</span>}}^{<span\; class="notranslate">\; \&prime;</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}<span\; class="notranslate">\; -</span>{{\mathrm{<span\; class="notranslate">\; c</span>}}^{<span\; class="notranslate">\; \&prime;</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}}{\mathrm{<span\; class="notranslate">\; \&rho;</span>}}}<span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; no</span>}}{\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; (</span>{\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; z</span>}}_{\mathrm{<span\; class="notranslate">\; o</span>}}<span\; class="notranslate">\; )</span>}\sqrt{\frac{{{\mathrm{<span\; class="notranslate">\; c</span>}}^{<span\; class="notranslate">\; \&prime;</span>}}_{\mathrm{<span\; class="notranslate">\; 11</span>}}<span\; class="notranslate">\; -</span>{{\mathrm{<span\; class="notranslate">\; c</span>}}^{<span\; class="notranslate">\; \&prime;</span>}}_{\mathrm{<span\; class="notranslate">\; 13</span>}}}{\mathrm{<span\; class="notranslate">\; \&rho;</span>}}}<span\; class="notranslate">\; \&Center\; Dot;</span><span\; class="notranslate">\; \&Center\; Dot;</span><span\; class="notranslate">\; \&Center\; Dot;</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span>$

Let ρ be the mass density of the vibrating part, C' ₁₁ and C' ₁₃ be elastic constants (constants obtained by deforming the elastic stiffness constant Cpq according to Non-Patent Document 1 (page 11, supplementary note to formula (2))), m=n=1. 2x _o is the length of the lateral side of the vibrator 21 and 41 , and 2z _o is the length of the vertical side. In FIG. 3 , 2x _o =2z _o =Lb. In addition, if the material constants of the excitation electrodes are used for ρ, C' ₁₁ , and C' ₁₃ , and 2x _o =2z _o =Le, then the resonance frequency of the excitation electrode itself can also be obtained using the same frequency equation. Furthermore, Equation 1 shows that it holds true even when the vibrator or the excitation electrode is rectangular (for example, the length of the horizontal side is an integer multiple of the length of the vertical side).

具体而言为0.995×Fe≤Fb≤1.005×Fe。由此，振动部21的轮廓振动不会受到激励电极30的轮廓振动的阻碍，能够维持良好的轮廓振动。并且，振动部21和激励电极30都进行相同频率的Lame模态振动，由此，能够降低由于激励电极30的膜厚偏差而引起的轮廓振子的频率偏差。谐振频率Fb和谐振频率Fe之间的关系为Fb＝Fe时最佳，但是，只要谐振频率Fb和谐振频率Fe的差值在±0.5％以内，就能够发挥上述效果。In this way, the resonant frequency of the Lame mode oscillator is determined by the plane size. Therefore, assuming that the resonant frequency of the vibrator 21 alone with respect to the length Lb of one side is Fb, and the resonant frequency of the excitation electrode 30 alone with the length Le of one side is Fe, then Lb and Le are designed so that As a result, both the vibration unit 21 and the excitation electrode 30 are in the vibration posture of the Lame mode at the same frequency. here,

Specifically, 0.995×Fe≦Fb≦1.005×Fe. Accordingly, the contour vibration of the vibrator 21 is not hindered by the contour vibration of the excitation electrode 30 , and good contour vibration can be maintained. In addition, both the vibrator 21 and the excitation electrode 30 vibrate in the Lame mode at the same frequency, thereby reducing the frequency variation of the contour vibrator due to the variation in the film thickness of the excitation electrode 30 . The relationship between the resonant frequency Fb and the resonant frequency Fe is optimal when Fb=Fe, but the above effects can be exhibited as long as the difference between the resonant frequency Fb and the resonant frequency Fe is within ±0.5%.

Therefore, if the frequency constant of the contour vibration on the vibrating substrate side is ζb, and the frequency constant of the contour vibration on the excitation electrode side is ζe, then it can be expressed by ζb=Fb·Lb, ζe=Fe·Le, so preferably Le=(ζe /ζb) Lb.

More preferably, this relationship is established between the excitation electrode 30 and the intermediate excitation electrode 50 with respect to the vibrating substrate 20, and between the intermediate excitation electrode 50 and the excitation electrode 60 with respect to the vibrating substrate 40, respectively. The intermediate excitation electrode 50 on the boundary surface between the substrate 20 and the vibrating substrate 40 is particularly important.

As described above, according to Embodiment 1 described above, the outline vibrator 10 of this embodiment is composed of a two-layer structure of the vibrating substrate 20 and the vibrating substrate 40 . The distance between the excitation electrodes in the respective cells of the vibrating substrate 40 improves the electric field efficiency, and at the same time, a contour vibrator having sufficient structural strength for practical use can be realized by the laminated structure.

或

表示的四方形的平板，则在激励电极30和激励电极60为相同电位，且对中间激励电极50施加了相反电位的激励信号的情况下，振动基板20和振动基板40呈振动模态和振动移位方向一致的Lame模态振动。因此，能够实现电场效率高且结构强度高的Lame模态振子。In addition, the vibrating substrate 20 and the vibrating substrate 40 are made of a quartz substrate, and one of the vibrating substrate 20 and the vibrating substrate 40 is a quartz substrate. Represents a square plate. the other party thinks

or

For the square plate shown, when the excitation electrode 30 and the excitation electrode 60 are at the same potential, and an excitation signal with an opposite potential is applied to the middle excitation electrode 50, the vibration substrate 20 and the vibration substrate 40 are in a vibration mode and vibration Lame mode vibrations with consistent displacement directions. Therefore, a Lame mode oscillator with high electric field efficiency and high structural strength can be realized.

In particular, if 40°≤θ≤50°, -50°≤θ≤-40°, 130°≤θ≤140°, or -140°≤θ≤-130° are satisfied, a vibration characteristic having good The Lame mode oscillator.

In the Lame mode vibrator, the four corners and the central part of the vibrating substrate are the nodes of the contour vibration (parts where the contour vibration hardly shifts). In this way, the support portion of the vibrating substrate can be provided on the node of the contour vibration, and the hindrance to the contour vibration caused by the support can be significantly reduced. In the quasi-Lame mode vibrator in which the four corners of the vibrating substrate do not form complete joints, as long as it is between two opposing sides of the vibrating substrate, between two sides of one side and between two sides of the other side perpendicular thereto In the vibration mode, there are places where the contour vibration displacement is relatively small around the four corners of the vibrating substrate, so the hindrance to the contour vibration caused by the support can be reduced.

In Embodiment 1 described above, quartz, which is a stable piezoelectric single crystal, is used as the crystal constituting the vibrating substrate, thereby realizing a profile vibrator with good temperature characteristics and little change over time. However, even when LiTaO ₃ , The present invention can also be applied when a piezoelectric single crystal such as LiNbO ₃ , Li ₂ B ₄ O ₇ , or La ₃ Ga ₅ SiO ₁₄ or a silicon single crystal is used as the crystal. In this case, a Lame mode oscillator or a quasi-Lame mode oscillator may be used in which the vibrating substrate 20 and the vibrating substrate 40 are composed of crystals having crystal anisotropy, and the crystals of the vibrating substrate 20 and the vibrating substrate 40 have The cut angles are the same and the in-plane rotation angles are 90° different from each other, or the cut angles of the vibrating substrate 20 and the vibration substrate 40 from the crystal are 180° different from each other and the in-plane rotation angles are the same or different from each other by 180°.

In addition, combining vibrating substrates with different cut angles as a laminate will complement each other's frequency-temperature characteristics, thereby also providing an effect of providing a contoured vibrator with excellent temperature characteristics.

这样，能够排除附加激励电极对振动基板的振动阻碍，能够维持良好的轮廓振动模态。And, set the size of one side of the vibrating substrate 20, 40 and each excitation electrode so that the resonant frequency Fb of the vibrating substrate 20 and the resonant frequency Fb of the vibrating substrate 40 in the same contour vibration mode and the resonant frequency of the excitation electrode monomer Fe is

In this way, the vibration obstruction of the vibrating substrate by the additional excitation electrodes can be eliminated, and a good contour vibration mode can be maintained.

需要使激励电极的质量密度和弹性常数为与振动基板的这些常数极为相近的值。在使用石英作为各振动基板，使用Al作为各激励电极的情况下，在满足的关系的同时，能够增大各激励电极的面积，所以，能够将相对于膜厚的频率灵敏度维持得较低，同时，能够实现低损耗的轮廓振子。In addition, a metal material mainly composed of Ag, Cu, Au, and Al is used as the electrode material of the excitation electrode 30 , the intermediate excitation electrode 50 , and the excitation electrode 60 . These are all low-resistance metals, so the sheet resistance of the excitation electrode film can be reduced, and a low-loss outline vibrator 10 can be realized. In addition, it is particularly preferable to use Al for each excitation electrode. Although increasing the area of the excitation electrode can realize a low-loss contour vibrator, but in order to increase the area of the excitation electrode as much as possible, further use

It is necessary to set the mass density and elastic constant of the excitation electrode to values extremely close to those of the vibrating substrate. In the case of using quartz as each vibration substrate and Al as each excitation electrode, in the case of satisfying The area of each excitation electrode can be increased while maintaining the relationship between the excitation electrodes, so that the frequency sensitivity with respect to the film thickness can be kept low, and at the same time, a low-loss outline oscillator can be realized.

(1st modified example)

Next, a first modification of Embodiment 1 will be described with reference to the drawings. The first modified example is characterized in the structure of the intermediate excitation electrode.

Fig. 7 is a partial sectional view of a first modified example. In FIG. 7, the first exciting electrode 30 is provided on the front main surface of the vibrating part 21 at the center of the vibrating substrate 20, and the exciting electrode 60 is provided on the back main surface of the vibrating part 41 at the center of the vibrating substrate 40. The intermediate excitation electrode 50 is provided on the boundary surface between the portion 21 and the vibrating portion 41 . Here, as shown in the figure, a concave portion 41 a having a shape corresponding to the intermediate excitation electrode 50 is formed through the vibrating portion 41 , and the intermediate excitation electrode 50 is formed in the concave portion 41 a.

After the intermediate excitation electrodes 50 are formed, if a process of polishing the vibration substrate 40 and the intermediate excitation electrodes 50 at the same time is provided, the vibrating part 41 and the intermediate excitation electrodes 50 can be finished on the same plane, and the vibration substrate 20 and the vibration substrate 20 can be vibrated. The boundary surfaces of the substrate 40 are in close contact.

(Second modified example)

表示的石英基板，振动基板40是切角以

或

表示的石英基板，而且，最下层的振动基板25是切角以

表示的石英基板(即与振动基板20的切角相同)。Next, a profile vibrator according to a second modified example of Embodiment 1 will be described with reference to the drawings. The second modified example is characterized in that the vibrating substrate is a plurality of substrates having three or more substrates. Fig. 8 is a partial cross-sectional view of a second modification. In FIG. 8 , the outline vibrator 10 is configured by stacking a vibrating substrate 20 , a vibrating substrate 40 , and a vibrating substrate 25 from above in the figure. The vibrating substrate 20 is chamfered to

Indicated quartz substrate, vibrating substrate 40 is chamfered to

or

The quartz substrate shown, and the lowermost vibrating substrate 25 is chamfered to

The quartz substrate shown (that is, the same cut angle as the vibrating substrate 20).

A positive potential is applied to the excitation electrode 30 arranged on the vibration substrate 20, a negative potential is applied to the intermediate excitation electrode 50 located at the boundary surface of the vibration substrate 20 and the vibration substrate 40, and a negative potential is applied to the middle excitation electrode 50 located at the boundary surface of the vibration substrate 40 and the vibration substrate 25. A positive potential is applied to the excitation electrodes (corresponding to the excitation electrodes 60 ), and a negative potential is applied to the third excitation electrodes 70 provided on the rear main surface of the vibrating substrate 25 .

或

而呈与振动基板20、25一致的Lame模态振动。Since the cut angles of the vibrating substrates 20 and 25 and the applied potentials are the same, common Lame mode vibration is excited. The vibrating substrate 40 is the same as in the first embodiment (see FIGS. 4 to 6 ), by making the cut corners

or

Instead, it vibrates in the Lame mode consistent with the vibrating substrates 20 and 25 .

In this way, compared with the structure of two vibration substrates, the thickness of the vibration substrate can be further reduced to improve the electric field efficiency, and the structural strength can be increased to the actual use level by stacking.

或

的振动基板即可。In addition, the vibrating substrate can also be a multilayer substrate with more than 3 sheets. At this time, the alternately stacked cut angle is

or

The vibrating substrate is sufficient.

(Embodiment 2)

Next, a profile vibrator according to Embodiment 2 of the present invention will be described with reference to the drawings. Fig. 9 shows an outline vibrator according to Embodiment 2, (a) is a plan view, and (b) is a cross-sectional view showing the A-A cross section of (a). 10 is a plan view showing the vibrating substrate alone, (a) is a plan view of the vibrating substrate 120, (b) is a plan view of the vibrating substrate 140, and (c) is a bottom view of the vibrating substrate 140. In FIGS. 9 and 10 , the outline vibrator 100 is formed by stacking a vibrating substrate 120 and a vibrating substrate 140 .

表示的石英基板。As shown in Fig. 10(a), the vibrating substrate 120 is composed of the following parts: the supporting arm parts 124, 125 extending from the supporting part 123; The vibration part 121. Excitation electrodes 130 a , 130 b , and 130 c are formed on the front main surface of vibrator 121 . Here, the excitation electrodes 130a and 130c have the same potential (for example, positive potential), and the excitation electrode 130b is an electrode to which a different potential (for example, negative potential) is applied. Also, the vibrating substrate 120 is chamfered to

Indicates the quartz substrate.

The excitation electrode 130 a is connected from one end to a connection electrode 132 provided on the support portion 123 via a connection electrode 131 . The connection electrode 135 is connected to a connection electrode 157 (see FIG. 10( b )) extending from the excitation electrode 150 b of the vibrating substrate 140 via a side electrode (not shown).

Also, the excitation electrode 130c is connected to the connection electrode 132 via one connection electrode 134, and the other connection electrode 138 is connected to the connection electrode 158 extending from the excitation electrode 150b of the vibrating substrate 140 via a side electrode (not shown). (Refer to Figure 10(b)).

Furthermore, the connection electrodes 136 and 137 of the excitation electrode 130b are respectively connected to the connection electrodes 156 and 159 of the vibrating substrate 140 via side electrodes not shown in the figure, so that the excitation electrode 130b is connected to the connection electrode 154 on the upper surface of the support portion 143 (refer to Figure 10(b)) connections.

的石英基板构成。As shown in FIG. 10( b ), vibrating substrate 140 has vibrating portion 141 whose corners are supported by four supporting arms 142 , 144 , 146 , 147 extending from supporting portions 143 , 145 . The vibrating portion 141 of the vibrating substrate 140 has the same shape as the vibrating portion 121 of the vibrating substrate 120, and the vibrating substrate has a cut angle of or

composed of quartz substrates.

Further, excitation electrodes 150 a , 150 b , and 150 c are provided on the surface of vibrating portion 141 (boundary surface with vibrating portion 121 ) to face excitation electrodes 130 a , 130 b , and 130 c , respectively. With respect to the vibrating substrate 120 , the excitation electrodes 130 a , 130 b , and 130 c are upper electrodes, and the excitation electrodes 150 a , 150 b , and 150 c are lower electrodes. Furthermore, with respect to the vibrating substrate 140 , the excitation electrodes 150 a , 150 b , and 150 c are upper electrodes. That is, excitation electrodes 150 a , 150 b , and 150 c correspond to intermediate excitation electrodes for vibration substrate 120 and vibration substrate 140 . Further, an opposite potential (eg, negative potential) to the excitation electrodes 130a, 130c is applied to the excitation electrodes 150a, 150c, and an opposite potential (eg, positive potential) to the excitation electrode 150b is applied to the excitation electrode 150b.

表示的石英基板，所以，示出所述实施方式1所示的振动模态。被激励电极130a、150a以及激励电极130c、150c夹持的振动部以图4(b)所示的振动姿态进行振动，被激励电极1 30b、150b夹持的振动部以图5(b)所示的振动姿态进行振动。因此，相邻的振动部分别进行相位偏移了90°的面内振动，由此，整体上为取得了平衡的振动，实现了多次模态的振动。The vibrating substrate 120 is chamfered to

The quartz substrate shown in , therefore, shows the vibration modes shown in the first embodiment. The vibration part clamped by the excitation electrodes 130a, 150a and the excitation electrodes 130c, 150c vibrates with the vibration attitude shown in Fig. 4 (b), and the vibration part sandwiched by the excitation electrodes 130b, 150b is shown in Fig. Vibrate according to the vibration gesture shown. Therefore, the adjacent vibrating parts vibrate in-plane with a phase shift of 90°, thereby achieving vibration in multiple modes for balanced vibration as a whole.

In addition, excitation electrode 150 a is connected to connection electrode 154 provided on support portion 143 via connection electrode 153 , and excitation electrode 150 c is connected to connection electrode 154 via connection electrode 155 . In addition, the electrodes 152 are provided to bring the vibrating substrate 120 and the vibrating substrate 140 into close contact.

In addition, the excitation electrode 150b is connected to the connection electrodes 165, 168 on the rear main surface of the vibrating substrate 140 and the connection electrode 162 of the support portion 145 via the connection electrodes 157, 158 and side electrodes not shown (see FIG. 10(c)). .

Furthermore, as shown in FIG. 10( c ), excitation electrodes 160 a , 160 b , and 160 c are provided on the rear main surface of vibration substrate 140 to face excitation electrodes 150 a , 150 b , and 150 c , respectively. Furthermore, the excitation electrodes 160a and 160c are electrodes having an opposite potential (for example, positive potential) to the excitation electrodes 150a and 150c, and the excitation electrode 160b is an electrode to which an opposite potential (for example, negative potential) is applied to the excitation electrode 150b.

或

表示的石英基板，所以，具有与上述振动基板120相同的振动姿态，进行Lame模态振动。The vibrating substrate 140 is chamfered to

or

The quartz substrate shown in , therefore, has the same vibration posture as the vibrating substrate 120 described above, and vibrates in the Lame mode.

After lamination and bonding of vibration substrates 120 and 140 , connection electrode 132 is connected to connection electrode 162 on the rear main surface of support portion 145 via side electrode 133 (see FIG. 9( b )). At this time, the excitation electrodes 130 a , 130 c , 150 b , 160 a , and 160 c are connected to the connection electrodes 162 , respectively.

Furthermore, the connection electrode 154 is connected to the connection electrode 163 on the rear main surface of the support portion 143 via the side surface electrode 170 (see FIG. 9( b )). At this time, the excitation electrodes 130 b , 150 a , 150 c , and 160 b are connected to the connection electrodes 163 , respectively.

Therefore, multiple vibration modes can be realized by inputting an excitation signal to the connection electrodes 163 and 162 on the rear main surface side of the support portions 143 and 145 of the vibrating substrate 140 .

In addition, in Embodiment 2, an example was shown in which three pairs of vibrating parts having excitation electrodes divided into three in the x' direction were formed, but it is also possible to provide a Lame mode vibrator arranged as follows: the excitation electrodes It is divided by n in the plane direction (n is an integer equal to or greater than 2), and the potentials of the excitation electrodes facing each other in the plane direction and the thickness direction are opposite to each other.

The outline vibrator 100 configured in this way has a higher-order vibration mode than the outline vibrator 10 of Embodiment 1, and is called a vibrator of the 1×n order mode according to its arrangement. 1 represents the number of vibration modes in the z" direction, and n (n is an integer) represents the number of vibration modes in the x' direction. That is, the Lame mode vibrator described in Embodiment 2 is called a 1×3 Lame mode Vibrator. It is also possible to form a vibrating part divided by m in the z" direction to provide an m×n Lame mode vibrator.

(Embodiment 3)

Next, a profile vibrator according to Embodiment 3 of the present invention will be described with reference to the drawings. The contour vibrator according to Embodiment 3 is a contour shear vibrator whose vibration mode is a contour shear mode. FIG. 11 is a perspective view showing a schematic configuration of a profile shear vibrator according to Embodiment 3. FIG. In FIG. 11 , the profile shear vibrator 200 is a vibrating substrate (hereinafter only shown as a vibrating substrate 220 ) 220 as a first vibrating substrate and a vibrating substrate as a second vibrating substrate having a common resonant frequency and vibration mode joined together. (Hereafter only shown as substrate 240 ) A laminated profile vibrator formed by vibrating the main surfaces of the substrate 240 that face each other.

Furthermore, an excitation electrode (hereinafter referred to simply as excitation electrode 230 ) 230 as a first excitation electrode is provided on the front main surface of the vibrating substrate 220 , and an excitation electrode (hereinafter referred to simply as excitation electrode 230 ) 230 as a second excitation electrode is provided on the back main surface of the vibration substrate 240 . An electrode (hereinafter simply referred to as an excitation electrode 260 ) 260 is provided with a common intermediate excitation electrode 250 on the boundary surface between the vibration substrate 220 and the vibration substrate 240 .

表示的平板构成，另一方的振动基板240由石英基板的切角以

或

表示的平板构成。θ优选满足-5°≤θ≤5°、85°≤θ≤95°、175°≤θ≤185°、或-95°≤θ≤-85°，由此，能够实现具有良好的振动特性的轮廓切变振子。另外，振动基板220和振动基板240的切角也可以调换。The vibrating substrate 220 is made of a quartz substrate chamfered with an IRE standard

The flat plate shown, the other vibrating substrate 240 is made of the cut corner of the quartz substrate to

or

Indicated tablet composition. θ preferably satisfies -5°≤θ≤5°, 85°≤θ≤95°, 175°≤θ≤185°, or -95°≤θ≤-85°, whereby a vibration sensor with good vibration characteristics can be realized. Contour shear oscillator. In addition, the cut angles of the vibrating substrate 220 and the vibrating substrate 240 may also be exchanged.

The vibrating substrate 220 is composed of a vibrating part 221 , a supporting arm part 222 extending from the center of one side of the vibrating part 221 , and a supporting part 223 provided on the front end of the supporting arm part 222 . An excitation electrode 230 is provided on the front main surface of the vibrating portion 221 , and the excitation electrode 230 is connected to a connection electrode 232 provided on the surface of the support portion 223 via a connection electrode 231 .

Here, the vibrating portion 221 and the excitation electrode 230 are respectively square, and the length of one side of the vibrating portion 221 is represented by Lb, and the length of one side of the excitation electrode 230 is represented by Le. However, the contour shear vibration can be excited even if the vibration part and the excitation electrode are rectangular.

The vibrating substrate 240 is composed of the following parts: a vibrating part 241; supporting arm parts 242, 244 extending to both sides from the central part of the opposing two sides of the vibrating part 241; 243; and a supporting portion 245 provided on the front end portion of the supporting arm portion 244.

An intermediate excitation electrode 250 is provided on the upper surface of the vibrating portion 241 (the boundary surface with the vibrating portion 221 ), and the intermediate excitation electrode 250 is connected to the connection electrode 254 on the surface of the support portion 243 via the connection electrode 253 on the surface of the support arm portion 242. . Furthermore, it is connected to the connection electrode 263 on the back side via the side electrode 264 . On the other hand, on the support arm portion 244 side, a connection electrode 252 for connecting the electrode 251 and the surface of the support portion 245 is provided. The connection electrode 251 is electrically separated from the intermediate excitation electrode 250 , and is provided in order to improve mutual adhesion when the vibration substrate 220 and the vibration substrate 240 are laminated and bonded.

In the vibrating substrate 240, the vibrating portion 241 and the intermediate excitation electrode 250 are squares of the same size as the vibrating portion 221 and the excitation electrode 230 of the vibrating substrate 220, the length of one side of the vibrating portion 241 can be represented by Lb, and the intermediate excitation electrode can be represented by Le. 250 in length on one side.

Further, an excitation electrode 260 is provided on the rear main surface of the vibrating substrate 240 , and the excitation electrode 260 is connected to a connection electrode 262 on the rear surface of the support portion 245 via a connection electrode 261 on the rear surface of the support arm portion 244 . Further, the excitation electrodes 230 of the vibration substrate 220 are connected to the connection electrodes 262 on the back side of the vibration substrate 240 via the connection electrodes 231 and 232 and the side electrode 233 .

In addition, the length of one side of the excitation electrode 260 may also be represented by Le.

In addition, the electrode materials of the excitation electrodes 230, the intermediate excitation electrodes 250, and the excitation electrodes 260 can be selected from electrode materials mainly composed of Al, Au, Ag, and Cu.

Next, the vibration posture of the contour-shear vibrator 200 according to Embodiment 3 will be described with reference to the drawings.

表示的四方形的平板，在对激励电极230(相当于上电极)施加正电位、且对中间激励电极250(相当于下电极)施加负电位时，呈图12(b)中由双点划线R所示的轮廓切变振动模态。参照图13、图14说明此时的振动基板240的切角和振动模态。FIG. 12 shows the vibrating part 221 of the vibrating substrate 220, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibrating posture. The vibrating substrate 220 is a quartz substrate with chamfered corners in accordance with the IRE standard

The square flat plate shown, when a positive potential is applied to the excitation electrode 230 (equivalent to the upper electrode), and a negative potential is applied to the middle excitation electrode 250 (equivalent to the lower electrode), it is shown by double dots in FIG. 12(b). Line R shows the profile of the shear vibration mode. The cut angle and vibration mode of the vibrating substrate 240 at this time will be described with reference to FIGS. 13 and 14 .

表示的石英基板的情况，(a)是侧视图，(b)是示意性地表示振动姿态的说明图。这里，中间激励电极250为与振动基板220共同的电极，所以为负电位，激励电极260为与激励电极230相同的电位，所以为正电位。FIG. 13 shows that the vibrating substrate 240 is the same as the vibrating substrate 220 and uses a chamfered corner according to the IRE standard.

In the case of the quartz substrate shown, (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration attitude. Here, the intermediate excitation electrode 250 is the same electrode as the vibration substrate 220 and therefore has a negative potential, and the excitation electrode 260 has the same potential as the excitation electrode 230 and therefore has a positive potential.

Therefore, the cut angles of the vibrating substrate 220 and the vibrating substrate 240 are exactly the same, and when excitation signals of opposite phases are applied, as shown in FIG. Vibration modes that are shifted by 90° will interfere with each other's vibration if driven simultaneously.

从而使振动模态一致。Therefore, as shown in FIG. 14, the chamfer of the quartz substrate of the vibrating substrate 240 is IRE standard.

This makes the vibration modes consistent.

的情况，(a)是侧视图，(b)是示意性地表示振动姿态的说明图。这样，即使对振动基板240施加了与振动基板220相反的电位，即施加了相反相位的激励信号，如图14(b)所示，也为与振动基板220相同的振动模态(参照图12(b))，不会妨碍彼此的振动。Fig. 14 shows that the chamfer of the quartz substrate of the vibrating substrate 240 is an IRE standard

In the case of , (a) is a side view, and (b) is an explanatory diagram schematically showing a vibration posture. In this way, even if a potential opposite to that of the vibrating substrate 220 is applied to the vibrating substrate 240, that is, an excitation signal of an opposite phase is applied, as shown in FIG. (b)), without hindering each other's vibration.

表示的振动基板220，也可以组合切角以

表示的振动基板240。所谓切角为

等效于相对于

使表面背面颠倒。因此，虽然省略了图示，但是，即使施加了与振动基板220相反相位的激励信号，振动模态也与振动基板220一致。And, with respect to the chamfer by

The vibrating substrate 220 shown can also be combined with chamfered corners to

Denotes the vibrating substrate 240 . The so-called cutting angle is

equivalent to

Turn the face back upside down. Therefore, although illustration is omitted, even when an excitation signal having an opposite phase to that of the vibrating substrate 220 is applied, the vibration mode matches that of the vibrating substrate 220 .

的DT切的情况下，如果振动基板240的切角为

θ＝±90°(相当于)，或者

θ＝±90°(相当于

)，则振动模态一致。For example, the vibrating substrate 220 is

In the case of DT cut, if the cut angle of the vibrating substrate 240 is

θ＝±90°(equivalent to ),or

θ＝±90°(equivalent to

), the vibration modes are the same.

这里，具体而言为0.995×Fe≤Fb≤1.005×Fe。In addition, in the profile shear vibrator 200, similar to the profile vibrator 10 vibrating in the Lame mode described above, it is more preferable to set the dimensions (Lb and Le) of one side so that the vibrating substrate 220 and the vibrating substrate 240 as a single unit The resonant frequency Fb and the resonant frequency Fe of the excitation electrode 230, the excitation electrode 260 or the middle excitation electrode 250 are

here, Specifically, 0.995×Fe≦Fb≦1.005×Fe.

Therefore, in the third embodiment described above, the vibrating substrate 220 and the vibrating substrate 240 are constituted by a two-layer structure, and compared with the conventional structure in which the vibrating substrate is a single unit, the individual components of the vibrating substrate 220 and the vibrating substrate 240 can be reduced. The distance between the electrodes improves the electric field efficiency, and at the same time, through the stacked structure, a contour vibrator with sufficient structural strength for practical use can be realized.

表示的四方形的平板构成，振动基板240以

或表示。在所述的激励电极230、中间激励电极250和激励电极260的结构中，振动基板220和振动基板240呈完全相同的轮廓切变模态的振动。因此，能够实现电场效率高且结构强度高的轮廓切变振子。Furthermore, the vibrating substrate 220 and the vibrating substrate 240 are made of a quartz substrate, and the vibrating substrate 220 is cut in the IRE standard

The quadrangular flat plate shown, the vibrating substrate 240 is

or express. In the structure of the excitation electrode 230 , the middle excitation electrode 250 and the excitation electrode 260 , the vibrating substrate 220 and the vibrating substrate 240 vibrate in exactly the same contour shear mode. Therefore, a profile shear vibrator with high electric field efficiency and high structural strength can be realized.

In Embodiment 2 and Embodiment 3 above, as the crystal constituting the vibrating substrate, quartz, which is a stable piezoelectric single crystal, can be realized with good temperature characteristics and a profile vibrator with little change over time. However, even in The present invention can also be applied when a piezoelectric single crystal such as LiTaO ₃ , LiNbO ₃ , Li ₂ B ₄ O ₇ , or La ₃ Ga ₅ SiO ₁₄ or a silicon single crystal is used as the crystal.

In addition, the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the range in which the object of the present invention can be achieved are also included in the present invention.

For example, in the above-mentioned Embodiments 1 to 3, the vibrating substrate is described as an example of a profile vibrator composed of two quartz substrates. However, as the vibrating substrate, a quartz substrate and other piezoelectric substrates may be combined, or other piezoelectric substrates may be combined. Two piezoelectric substrates. In such a structure, by matching the respective vibration modes and resonance frequencies, and making the resonance frequencies of the vibrating substrate and the excitation electrodes substantially the same in a single body, a contour oscillator with high electric field efficiency and high structural strength can be realized.

和面内旋转角θ的相对的差值相对于所期望的差值偏离了±5°，也能够发挥本发明的效果。In addition, even if the chamfer between the laminated vibration substrates

The effect of the present invention can be exerted even if the relative difference with the in-plane rotation angle θ deviates from the expected difference by ±5°.

Claims (9)

1. contour resonator, this contour resonator have the 1st vibration substrate and the 2nd vibration substrate at least, by engaging described the 1st vibration substrate and the mutual opposed interarea of described the 2nd vibration substrate forms, it is characterized in that,

This contour resonator has: be arranged on described the 1st the vibration substrate the front interarea on the 1st exciting electrode; Be arranged on described the 2nd the vibration substrate back side interarea on the 2nd exciting electrode; And be arranged on described the 1st the vibration substrate and described the 2nd the vibration substrate boundary face on common middle exciting electrode,

Described the 1st exciting electrode and described the 2nd exciting electrode are electrically connected as the 1st terminal, exciting electrode is as the 2nd terminal in the middle of described, according to the pumping signal that applies between described the 1st terminal and described the 2nd terminal, described the 1st vibration substrate and described the 2nd vibration substrate carry out contour vibration.

2. contour resonator according to claim 1 is characterized in that,

The resonance frequency Fb of the monomer of at least one the vibration substrate in described the 1st vibration substrate or described the 2nd vibration substrate; And the resonance frequency Fe of the monomer of at least one exciting electrode in described the 1st exciting electrode, described the 2nd exciting electrode or the described middle exciting electrode satisfies following relation:

0.995×Fe≤Fb≤1.005×Fe。

3. contour resonator according to claim 1 is characterized in that,

Described contour resonator is following Lame mode oscillator or accurate Lame mode oscillator: promptly,

Described the 1st vibration substrate and described the 2nd vibration substrate are made of the crystal with crystalline anisotropy,

The corner cut of the described crystal of described the 1st vibration substrate and described the 2nd vibration substrate is mutually the same, and the face internal rotation angle differs 90 ° each other.

4. contour resonator according to claim 1 is characterized in that,

Described contour resonator is following Lame mode oscillator or accurate Lame mode oscillator: promptly,

Described the 1st vibration substrate and described the 2nd vibration substrate are made of the crystal with crystalline anisotropy,

The corner cut of downcutting from described crystal of described the 1st vibration substrate and described the 2nd vibration substrate differs 180 ° each other, and the face internal rotation angle is mutually the same or differ 180 °.

5. contour resonator according to claim 3 is characterized in that,

Described the 1st vibration substrate and described the 2nd vibration substrate are made of tetragonal quartz base plate,

The corner cut of described the 1st vibration substrate and described the 2nd side of vibration in the substrate quartz base plate is with the IRE standard

Expression,

The corner cut of the opposing party's quartz base plate with

Or

Expression.

6. contour resonator according to claim 5 is characterized in that,

Described contour resonator meets the following conditions:

40 °≤θ≤50 ° ,-50 °≤θ≤-40 °, 130 °≤θ≤140 ° or-140 °≤θ≤-130 °.

7. according to each described contour resonator in the claim 1～6, it is characterized in that,

Described contour resonator is following Lame mode oscillator: promptly,

Described the 1st exciting electrode is cut apart (n is the integer more than or equal to 2) by n on in-plane,

Exciting electrode and described the 2nd exciting electrode and described the 1st exciting electrode are cut apart by n opposed to each other in the middle of described,

One side of the adjacent exciting electrode of being cut apart by n on in-plane is connected with described the 1st terminal, and the opposing party is connected with described the 2nd terminal.

8. contour resonator according to claim 1 and 2 is characterized in that,

Described contour resonator is following profile shear oscillator: promptly,

Described the 1st vibration substrate and described the 2nd vibration substrate are made of the crystal with crystalline anisotropy,

The corner cut of the described crystal of described the 1st vibration substrate and described the 2nd vibration substrate is mutually the same, and the face internal rotation angle differs 90 ° each other.

9. contour resonator according to claim 1 and 2 is characterized in that,

Described contour resonator is following profile shear oscillator: promptly,

Described the 1st vibration substrate and described the 2nd vibration substrate are made of the crystal with crystalline anisotropy,

Described the 1st vibration substrate and described the 2nd vibration substrate differ 180 ° each other from the corner cut that described crystal downcuts, and the face internal rotation angle differs 90 ° each other.

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