CN101268714B

CN101268714B - Noise canceling microphone system and method

Info

Publication number: CN101268714B
Application number: CN2006800310711A
Authority: CN
Inventors: 贾森·W·魏戈尔德; 加里·埃尔科; 基兰·P·哈尼
Original assignee: Analog Devices Inc
Current assignee: InvenSense Inc
Priority date: 2005-08-23
Filing date: 2006-08-23
Publication date: 2012-07-04
Anticipated expiration: 2026-08-23
Also published as: US8130979B2; WO2007024958A2; EP1917836A2; EP1917836B1; JP4864089B2; WO2007024958A3; US20070047744A1; JP2009506658A; CN101268714A

Abstract

A microphone system has a base engaged with first and second microphone devices. The first microphone apparatus is capable of producing a first output signal having a noise component, and the second microphone apparatus is capable of producing a second output signal. The system also has combining logic operatively coupled to the second microphone apparatus and the second microphone apparatus. The combinational logic uses the second output signal to remove at least a portion of the noise component from the first output signal.

Description

Noise mitigating microphone system and method

Technical field

The present invention relates generally to microphone, relate in particular to the performance that improves microphone.

Background technology

Electret Condencer Microphone typically has barrier film, and it forms capacitor with following backboard.The reception of earcon causes the barrier film vibration, thereby forms the variable capacitance signal of expression earcon.This variable capacitance signal can be exaggerated, write down or send in addition other electronic equipments.

Yet when microphone stood mechanical shock, problem had produced.Especially, mechanical shock can cause barrier film so that the mode that microphone output signal is degenerated is vibrated.

Summary of the invention

According to one embodiment of present invention, a kind of microphone system has the pedestal that engages with first and second microphone apparatus.First microphone apparatus can produce the first output signal with noise component, and second microphone apparatus can produce the second output signal.This system also has with first microphone apparatus and second microphone apparatus can operate the combinational logic that connects.This combinational logic uses the second output signal from the first output signal, to remove part noise component at least.

Wherein, the second output signal can have the data relevant with the mechanical response of first microphone apparatus.And second microphone apparatus can have the lid of barrier film and this barrier film of acoustic seal.Selectively, this barrier film can be exposed in the space, and another barrier film in the system also is exposed in this space.In certain embodiments, second microphone apparatus has microphone and low pass filter.

The various embodiment of first microphone apparatus have first microphone, and second microphone apparatus has second microphone.Second microphone can be configured to have the low-frequency cutoff greater than the low-frequency cutoff (cut-off) of first microphone.In addition; First circumference (circumferential) gap that this first microphone can have first barrier film and limited in first barrier film at least in part, and second circumferential gap that second microphone can have second barrier film and limited in second barrier film at least in part.Exemplarily, second circumferential gap is greater than first circumferential gap.Second gap alleviates the bass frequency component effectively, and filter is eliminated basically or alleviated remaining audio component when using filter.

In order to eliminate the noise component that at least a portion is caused by mechanical shock, second microphone apparatus can have microphone and signal conversion module (for example sef-adapting filter).

According to another embodiment of the invention, a kind of microphone system has the pedestal that engages with first and second microphone apparatus.First microphone apparatus can produce the first output signal and have first microphone, and this first microphone has first mechanical response.In a similar fashion, second microphone apparatus can produce the second output signal, and has second microphone, and this second microphone has second mechanical response.This system also has with first microphone apparatus and second microphone apparatus can operate the combinational logic that connects.These combinational logic combination first and second output signals produce output audio signal.Exemplarily, first and second mechanical responses in fact (effectively) identical.

Wherein, this combinational logic can comprise subtracter, and this subtracter deducts the second output signal from the first output signal.In other embodiments, this combinational logic can have adder.

According to a further embodiment of the invention; A kind of method from microphone system generation output audio signal provides pedestal; This pedestal has first microphone, and this first microphone is in response to input audio signal and mechanical signal and produce first microphone output signal (having audio component and mechanical component).This pedestal also has second microphone, and this second microphone produces second microphone output signal in response to mechanical signal.This method is used the information from second microphone output signal, from first microphone output signal, to remove at least a portion mechanical component.

Second microphone output signal can have second audio component.In this case, this method can be removed part second audio component at least from second microphone output signal.In addition, but this method adaptive-filtering second microphone output signal.Wherein, this method can be removed part second audio component at least from second microphone output signal before adaptive-filtering.

Illustrative examples of the present invention is embodied as computer program, and the computer usable medium of computer readable program code is arranged above this computer program has.According to conventional treatment, can and use this computer-readable code through computer system reads.

Description of drawings

Through the detailed description below with reference to accompanying drawing, above-mentioned advantage of the present invention will more fully be understood.In the accompanying drawing:

Fig. 1 has schematically shown the pedestal with microphone system of illustrative example configuration according to the present invention.

Fig. 2 has schematically shown the sectional view of the MEMS microphone that can use with illustrative example according to the present invention.

Fig. 3 A has schematically shown the plane graph according to the microphone system of first embodiment of the invention.

Fig. 3 B has schematically shown the plane graph according to the microphone system of second embodiment of the invention.

Fig. 4 A has schematically shown the frequency response of the main microphone in the microphone system of illustrative example of the present invention.

Fig. 4 B has schematically shown the frequency response of the correction microphone in the microphone system of illustrative example of the present invention.

Fig. 5 has schematically shown other details of the illustrative example of microphone system, comprises filter and combinational logic.

Fig. 6 illustrates illustrative example according to the present invention and makes the process that is used for producing audio signal by the microphone system of Fig. 1.

Embodiment

In illustrative example, microphone system has the main microphone and the correction microphone of the same base of joining to, all to receive identical noise signal (for example mechanical shock signal) and to make a response in the corresponding way.In order to improve the quality of the output audio signal that microphone system produces, this microphone system uses the noise signal that is detected by this correction microphone to come from by removing a large amount of noises the signal of main microphone generating.As a result, compare with situation about not handling and noise exists, this output audio signal can have noise still less.The details of illustrative example is described below.

The schematically illustrated mobile phone of Fig. 1 is used for supporting the microphone system 12 of the illustrative example configuration according to the present invention as pedestal 10.For this reason; This mobile phone (by reference number 10 signs) has plastic body 14; This plastic body 14 comprises microphone system 12, earphone 16 and the various miscellaneous part that is used to produce output audio signal, this miscellaneous part such as keyboard, transponder logic and other logic element (not shown).With more detailed discussion, this microphone system 12 has main microphone 18A and correction microphone 18B below, two microphones all fixedly secured on phone body 14 and each other very near.In general, schematically, two microphone 18A and the mutual mechanical engagement of 18B (for example through pedestal 10 or directly be connected) receive identical mechanical signal basically to guarantee them.For example; If phone 10 drops on the ground; Two

microphone

18A and 18B should receive substantially the same machinery/inertial signal, and this machinery/inertial signal is represented moving and subsequently (repeatedly) vibrations (if for example phone 10 behind colliding surface, upspring several times) of phone 10.

Can select among the embodiment, this microphone system 12 is not fixedly attached on the phone body 14, and it can be fixed on the phone body 14 movably.Because their mechanical connections, as stated, two

microphone

18A and 18B still should receive essentially identical mechanical signal.For example, two

microphone

18A and 18B can be formed on the singulated dies (die), and this singulated dies is connected to phone body 14 movably.Selectively, this

microphone

18A and 18B can be formed by the separately tube core of encapsulation or separate packages together.

Pedestal 10 can be any structure that can be suitable for using microphone.Those skilled in the art are to be understood that and can use other structures as pedestal 10, and just to illustration purpose mobile phone 10 are discussed.For example, wherein, pedestal 10 can be movably or small-sized relatively equipment, as fascia, computer monitor, video recorder, camcorder or, tape recorder.Pedestal 10 also can be a kind of surface, the substrate of for example single chip or tube core, the perhaps die attach pad of encapsulation (package).Opposite, pedestal 10 also can be large-scale or immovable relatively structure, like (for example house doorbell other) building.

Fig. 2 has schematically shown the sectional view of MESM microphone (by reference number 18 signs), the structure of the embodiment of this MEMS microphone ordinary representation master microphone 18A and correction microphone 18B.Wherein, microphone 18 comprises static backboard 22, and this backboard 22 supports and forms capacitor with flexible partition 24.In illustrative example, backboard 22 is formed by monocrystalline silicon, and barrier film 24 is formed by the polysilicon of deposition.A plurality of springs 26 (do not show among Fig. 2, but in Fig. 3 A and 3B, more clearly show) are connected to this barrier film 24 on the backboard 22 through multiple other layers such as oxide skin(coating) 28 movably.For convenient operation, this backboard 22 has a plurality of through holes 30 that lead to backside cavity 32.Based on this embodiment and its function, this microphone 18 can have lid 34.

Audio signal causes this barrier film 24 vibrations, the electric capacity that changes thus.On the chip or the off-chip circuitry (not shown) will change that electric capacity converts into can be by the signal of telecommunication of further handling.The microphone that should be noted that the Fig. 2 that is discussed only is used for illustration purpose.Therefore, the microphone of other MEMS or non-MEMS can use with illustrative example of the present invention.

The function of main microphone 18A is to produce the main signal with audio component and (zero or non-zero) noise component.Wherein, this noise component can comprise: 1) mechanical part and 2) to the acoustic frequency response of the mechanical part of noise component.For example, the mechanical part of this noise component can be the response of the microphone of (barrier film 24 of microphone moves as the inertia response) when microphone drops on the ground.As another embodiment, can be the result of initial sound and the echo that produces when microphone/base 10 colliding surfaces for the acoustic frequency response of the mechanical part of this noise signal.This main microphone 18A also can be packed or be covered, as shown in (the for example lid of back processing or the lid of original position (in-situ)), and have through hole and get into to allow audio signal.

The function of correction microphone 18B is to produce correction signal, and this correction signal can be used to fully to alleviate the big portion of the noise component of main signal.This alleviates the suitable major part or the relative smaller portions of the noise component that can remove in the main signal.Yet various embodiment preferably remove the noise component of all discussion basically.Remove the quality (for example signal to noise ratio) that this noise component can strengthen final output signal.

Total amount that alleviates and type possibly depend on application.For example, some embodiment only remove the mechanical part of noise component.Other embodiment remove mechanical part and its acoustic frequency response.Other embodiment possibly only remove the acoustic frequency response part of noise signal.

This correction microphone 18B can consider as the effective accelerometer in the microphone system 12.Therefore, in this case, term " microphone " can be generally used for comprising other equipment, like inertial sensor.Accurate title that let it be, this correction microphone 18B helps to alleviate the noise (that is, causing the signal and the coherent noise of the barrier film displacement of not expecting) based on inertia.In certain embodiments; Do not use above-mentioned correction microphone 18B; This microphone system 12 has accelerometer thus, one of the Analog Devices company production and selling of for example one or more Norwood by Massachusetts, diaxon or three IMEMS accelerometers.

This main microphone 18A and correction microphone 18B preferably are formed has substantially the same response to audio frequency and noise signal in this discussion.For this reason, illustrative example use essentially identical manufacturing process and material (for example silicon-on-insulator process or on the silicon chip substrate the traditional non-SOI surface micro of deposit multilayer handle) produce two microphone 18A and 18B.Therefore, to the degree that they can be consistent with the embodiment of various discussion,

microphone

18A and 18B should have essentially identical diaphragm quality, backboard, hole size, material etc.Yet alternate embodiments can be used

different microphone

18A and 18B, and these microphones are calibrated the function of discussing with above carrying out.

Go through with reference to figure 6 as following, illustrative example with correction signal and main signal combination to remove noise component from main signal.Wherein, illustrative example can deduct correction signal from main signal.Therefore, for fear of from main signal, having deducted the audio signal of wanting, the illustrative example of correction signal does not comprise significant audio component (for example, it can comprise the version that significantly alleviates of audio component) basically.If in fact this correction signal has audio component, it can not conform to hopes the ground cancellation or in fact alleviates this audio component from main signal, has therefore in fact weakened the advantage of the various embodiment of this system.

Therefore, various embodiments physically shields this correction microphone 18B and input audio signal.So, but this correction microphone diaphragm 24 receives machinery (or relevant) signals received audio signal not.In order physically to shield this barrier film 24, correction microphone 18B can: 1) have

lid

34,34 pairs of barrier films 24 of lid provide acoustic seal (promptly shielding this correction microphone diaphragm 24); 2) be comprised in the encapsulation of sealing; Perhaps 3) have some other physical units, be used to stop its barrier film 24 of input audio signal contact.

Yet other embodiment shield the barrier film 24 of this correction microphone 18B with the input audio signal logic.If this barrier film 24 is by the logic shielding, then the barrier film 24 of correction microphone 18B and main microphone 18A can be exposed on (space that the audio signal of for example expecting is passed) in the common space.In other words, two barrier films 24 can receive essentially identical audio input signal.Fig. 3 A and 3B have schematically shown two embodiment that this function is provided.

Fig. 3 A has schematically shown the plane graph according to the microphone system 12 of first enforcement, its this correction microphone diaphragm 24 of logic shielding.Particularly, this microphone system 12 comprises that main microphone 18A and correction microphone 18B and being used on the fastening printed circuit board (PCB) 36 that is fixed on the below improves logic 38 (see figure 5)s by the quality of the audio signal of main microphone 18A reception.Because be plane graph, Fig. 3 A has shown

microphone

18A and 18B barrier film 24 separately and their spring 26.Structure with the barrier film 24 that is supported by discrete spring 26 produces the gap between the intrinsic parameter of the structure that outer parameter and each spring 26 of barrier film 24 connects.Among Fig. 3 A, this gap is designated " gap 1 " for main microphone 18A, and this gap is designated " gap 2 " for correction microphone 18B.

One skilled in the art will appreciate that the minimized in size of common hope, to guarantee Mike's wind energy response low-frequency audio signal with this gap (for example the gap 1).In other words, if the gap is too big, microphone may not detect the audio signal with relatively low frequency.Particularly, about the frequency response of microphone, the position of its low-frequency cutoff (for example 3dB point) is the function in this gap.Fig. 4 A has schematically shown the illustrative frequency response curve of the main microphone 18A when illustrative example is provided with according to the present invention.As shown in, low-frequency cutoff is F1, its preferably low relatively frequency (50-100Hz for example, gap such as about 1 micron gap through the appropriate clearance size produce).

Should be noted that and hope that response has insignificant influence to the inertia of mechanical signal for microphone in this gap.Therefore, although this microphone does not detect the audio signal with frequency lower than low-frequency cutoff basically, it still can detect low-frequency inertial signals.For example, has the mechanical signal that microphone that size is conditioned the gap of the low-frequency cutoff that produces about 350Hz still can detect the frequency with 150Hz.

According to one embodiment of present invention, (correction microphone 18B's) gap 2 is greater than (main microphone 18A's) gap 1.Therefore, shown in Fig. 4 B, (shown the frequency response of correction microphone 18B), the low-frequency cutoff F2 of correction microphone 18B (for example, by the 2-2.5KHz that the gap produced of suitable dimension such as about 5-10 micron) is far above the low-frequency cutoff F1 of main microphone 18A.Thus, this correction microphone 18B can not detect the low-frequency audio signal of wide region fully.In other words, the size in increase gap 2 is used as the audio high pass filter of correction microphone 18B effectively.As following going through, illustrative example uses this effective high pass filter combination low pass filter 46 subsequently significantly to alleviate the response of correction microphone 18B to input audio signal.Therefore, this correction microphone 18B need not be used for some devices (for example lid 34) that it and input audio signal are shielded.

Exist multiple mode to make gap 2, and guarantee that still two

microphone

18A and 18B have essentially identical response for noise signal greater than gap 1.Wherein, barrier film 24 can be formed and have essentially identical quality.For this reason, the barrier film 24 of correction microphone 18B can be thicker than the barrier film 24 of main microphone 18A, and the diameter of the barrier film 24 of this correction microphone 18B is less than the diameter of the barrier film 24 of this main microphone 18A.

In other embodiments, this diaphragm quality can be different.In this case, inside or external logic can be used for the compensation quality difference.For example, if the quality of correction microphone diaphragm 24 is the half the of main microphone diaphragm 24, then the signal times of logic self-correcting in the future microphone 18B is with scalar value (for example scalar 2).Thus, this logic makes that effective vibration output of two microphones is practically identical.In other words, the mechanical response of two microphones can be considered to practically identical, if 1) in fact they have identical diaphragm quality, and perhaps 2) if thereby this logic compensation diaphragm quality difference makes them present identical (for example using scalar) effectively.In other embodiments, two microphones can be different fully, therefore, need other logics to guarantee and the consistent accurate result of discussion here.

Fig. 3 B has schematically shown another embodiment, and wherein top gap of discussing is basic identical.Although have identical gap, correction microphone 18B still is configured to have the frequency response (that is, having higher low-frequency cutoff) shown in Fig. 4 B.For this reason, the barrier film 24 of this correction microphone 18B has one or more perforation or through hole, and it increases low-frequency cutoff effectively.Particularly, through confirming this low-frequency cutoff by the regional total amount of gap and the definition of (a plurality of) hole through this barrier film 24.Select this zone so that the cut-off frequency of expectation to be provided thus.

In general, the embodiment that shows of Fig. 3 A and 3B is used for control air to leak two kinds of extensive multiple means through respective diaphragm 24.In other words, those embodiment control airs flow through the speed of this barrier film, thereby control corresponding low frequency cut-off points.Those skilled in the art can use other technologies to adjust the low-frequency cutoff of the expectation of

microphone

18A or 18B.

As stated, illustrative example makes up correction signal and main signal to remove noise component from main signal.For this reason, Fig. 5 has schematically shown the various elements of the microphone system 12 that is used to realize these targets.Usually, this microphone system 12 comprises the main microphone apparatus 40 with main microphone 18A and has the correction microphone apparatus 42 of correction microphone 18B, and two processing levels 46 and 48 (being logic 38) subsequently.Sum logic 44 (being also referred to as " combinational logic 44 ") will make up to produce output audio signal from the output of two microphone apparatus, and it preferably has low relatively noise component.

As stated, this correction microphone apparatus 42 produces the noise component of the noise component that is used to alleviate main signal.For this reason, this correction microphone apparatus 42 has: 1) low pass filter 46, are used for fully alleviating the audio component from the correction signal that this correction microphone 18B receives; With 2) signal conversion module 48, be used for acoustic frequency response standardization (normalize) for the mechanical part of noise component.

More specifically, although they are closely similar on diagram, two

microphone

18A and 18B still have some difference.For example, because the tolerance and the restriction of their manufacturing process,

microphone

18A and 18B possibly have some less difference, like membrane thicknesses.In fact, so said, some embodiment use dissimilar devices to be used to provide one or whole two functions (for example, correction microphone 18B can be conventional accelerometer) of microphone 18A and 18B.As another example,

microphone

18A and 18B are separated from each other.This correction microphone 18B can receive the version of time delay a little of audio frequency and/or noise signal thus.

Remove nonstandardized technique, change otherwise these difference can cause the noise component of two microphone 18A and 18B.If change too much, this output signal will be destroyed or have more undesirable signal to noise ratio.Therefore, the influence of these between two microphone 18A of illustrative example compensation and the 18B and other difference has essentially identical noise component to guarantee two microphone 18A and 18B.As stated, can be called " standardization " process in this this process.

For this reason, the difference of these signal conversion module 48 compensation between main microphone 18A and correction microphone 18B.In illustrative example, this signal conversion module 48 is conventional sef-adapting filters.Can select among the embodiment, this signal conversion module 48 is fixed filters.Can use other devices to realize The above results.Each filter can be any known filter that is used for the routine of above-mentioned purpose.For example, if use, then sef-adapting filter can be a minimum mean square self-adaption filter, is also referred to as " LMS " filter in the art.

Therefore, in illustrative example, this correction microphone apparatus 42 produces such signal, and this signal has the audio signal that is not more than negligible quantity, fully comprises noise component thus.This noise component is used to remove the corresponding noise component that is produced by this main microphone apparatus 40.

Therefore, this microphone system 12 has the combinational logic 44 of two signals of combination.Wherein, as stated, this combinational logic 44 can comprise conventional subtract logic, and this routine subtract logic deducts the signal that is produced by this correction microphone apparatus 42 from the signal that is produced by this main microphone apparatus 40.Can select among the embodiment, this combinational logic 44 can comprise adder.For example, in this embodiment,

microphone

18A and 18B can be arranged in pedestal 10 differs 180 degree with generation signal.More specifically, conceived: microphone can be oriented make it barrier film 24 top surface up, and another microphone can be positioned as make it barrier film 24 top surface down.Certainly, it will be appreciated by those skilled in the art that and to use other combinational logics 44 to come convenience system to implement.

Should be noted that the signal that is produced by this correction microphone apparatus 42 can be considered to above-mentioned correction signal (that is, as by filter process).In a similar manner, the signal that is produced by this main microphone apparatus 40 also can be considered to above-mentioned main signal (that is, being handled by any intermediate logic element shown in not).Therefore, in order to simplify, the output signal of this main microphone apparatus 40 and this correction microphone apparatus 42 is called as main signal and correction signal respectively.

Fig. 6 has shown according to the present invention the process of illustrative example generation output audio signal.This process fully alleviates the audio component in the signal that is produced by this correction microphone 18B in step 600 beginning.For this reason, carry out filtering through 46 pairs of these correction output signals of this low pass filter.As stated, when the embodiment that uses Fig. 3 A, 3B or other relevant embodiment, this correction microphone 18B nature carries out filtering to the signal with frequency lower than the low-frequency cutoff of low pass filter 46.For example, if the frequency response of this correction microphone 18B has the low-frequency cutoff of about 200Hz, then this low pass filter 46 should have about 190-200Hz or higher high-frequency cut-off similarly.

Therefore, after execution in step 600, this correction output signal should not have basically can not ignore with input audio signal corresponding audio component.Yet the embodiment for barrier film 24 and input audio signal are shielded can skip this step.

Before execution in step 600, simultaneously or afterwards, this process will be for the acoustic frequency response standardization (step 602) of the mechanical part of this noise component.The embodiment that does not remove this acoustic frequency response can skip this step.Yet, under normal conditions, but in this system stick signal modular converter 48 as selectively activated all-pass filter.Selectively, can remove this signal conversion module 48.

This point in this process, correction microphone apparatus 42 should produce correction signal, this correction signal have with main signal in the essentially identical noise component of noise component.Thus, give sum logic 44, removing/to alleviate this noise component (step 604) from main signal, thereby finish this process two signal forwarding.In other words, step 604 is removed the mechanical part and relevant with it acoustic frequency response of noise signal.

As stated, according to the location of

microphone

18A and 18B, sum logic 44 can subtract each other or addition two signals.Certainly, also can use other logics to replace subtraction and the adder logic of being discussed, or except that subtraction of being discussed and adder logic, re-use other logical circuits.Therefore, the specific subtraction or the discussion of adder logic only are used for signal, are not intended to limit all embodiment of the present invention.

Therefore, compare with the conventional single microphone system that the inventor is understood, embodiment can significantly improve signal to noise ratio.Should reaffirm that the various piece that shows in the accompanying drawing only is used for signal, be not intended to limit the scope of all embodiment.For example, can use other parts with optimized operation.As another example, this microphone system 12 can have than two microphone 18A and more microphone of 18B or microphone apparatus.Substitute, wherein this microphone system 12 can have three or more microphone, or three or more microphone apparatus.And one or more microphone apparatus can just comprise microphone (for example, this correction microphone 18B can only have lid 34 and not have audio input port).

Various embodiment of the present invention can have such part at least, and this part is implemented with any conventional computer programming language at least in part.For example, some embodiment can implement through process programming language (for example " C ") or object oriented programming languages (for example " C++ ").Other embodiment of the present invention can be embodied as programmable hardware element (for example application-specific integrated circuit (ASIC), FPGA and digital signal processor) or other associated components.

In alternate embodiments, some part of disclosed apparatus and method (for example referring to above-mentioned flow chart) can be implemented as the computer program that uses with computer system.This realization can comprise the sequence of computer instructions that maybe can send computer system through modulator-demodulator or other interface equipments to that is fixed on the tangible medium; This tangible medium such as computer-readable medium are (for example; Disk, CD-ROM, ROM or hard disk), other interface equipments are as being connected to the communication adapter of network through medium.This medium can be tangible medium (for example light or analog communication line) or pass through the medium that wireless technology (for example WIFI, microwave, infrared or other transmission technologys) realizes.This sequence of computer instructions can realize relevant with this system before described all or part functional.

It will be apparent to those skilled in the art that thereby this computer instruction can many programming languages be write with many Computer Architectures or operating system uses.And this instruction can be stored in any memory device, and in semiconductor, magnetic storage apparatus, light storage device or other memory devices, and any communication technology such as light, infrared, microwave or other transmission technologys capable of using is transmitted.

Wherein, this computer program can be used as the additional removable medium that document printing or electronics (for example shrink-wrapped software) arranged and distributes, utilizes computer system prestrain (for example on ROM of system or hard disk) or issued by server or broadcasting bulletin system through network (for example internet or World Wide Web).Certainly, some embodiments of the present invention can be implemented as the combination of software (for example computer program) and hardware.Other embodiment in addition of the present invention can be completely achieved to hardware or are embodied as software fully.

Although foregoing discloses various exemplary embodiments of the present invention, obvious those skilled in the art can carry out various modifications and obtain advantages more of the present invention and do not break away from true scope of the present invention.

Claims

1. microphone system comprises:

Pedestal;

First microphone apparatus that engages with said pedestal, said first microphone apparatus can produce the first output signal with noise component;

Second microphone apparatus that engages with said pedestal, said second microphone apparatus can produce the second output signal; And

Can operate the combinational logic that connects with said first microphone apparatus and said second microphone apparatus, said combinational logic uses the said second output signal from the said first output signal, to remove the said noise component of at least a portion,

Said first microphone apparatus comprises first microphone; Said second microphone apparatus comprises second microphone; Said second microphone is configured to form audio high pass filter, and the low-frequency cutoff of said audio high pass filter has the low-frequency cutoff greater than the low-frequency cutoff of said first microphone, wherein; Said second microphone and input audio signal logic shield, and make the only version that alleviates of output audio component of said second microphone.

2. microphone system as claimed in claim 1, wherein, the said second output signal comprises the data relevant with the mechanical response of said first microphone apparatus.

3. microphone system as claimed in claim 1, wherein, said second microphone has the lid of barrier film and the said barrier film of acoustic seal.

4. microphone system as claimed in claim 1, wherein, said second microphone apparatus comprises low pass filter.

5. microphone system as claimed in claim 1; Wherein, First circumferential gap that said first microphone has first barrier film and at least partly defined by said first barrier film; Said second microphone has second barrier film and part is by second circumferential gap of said second barrier film definition at least, and said second circumferential gap is greater than said first circumferential gap.

6. microphone system as claimed in claim 1, wherein, said first microphone has first barrier film, and said second microphone has second barrier film, and said first and second barrier films are exposed in the common space.

7. microphone system as claimed in claim 1, wherein, said second microphone apparatus comprises signal conversion module.

8. microphone as claimed in claim 1, wherein, said first microphone has different escape of air speed with second microphone, to said first and second microphones different low frequency cut-off points to be provided.

9. microphone system comprises:

Pedestal;

First microphone apparatus, it engages and can produce the first output signal with said pedestal, and said first microphone apparatus comprises first microphone with first mechanical response;

Second microphone apparatus; It engages and can produce the second output signal with said pedestal; Said second microphone apparatus comprises second microphone with second mechanical response; Said first microphone has low-frequency cutoff, and said second microphone is configured to form audio high pass filter, and the low-frequency cutoff of said audio high pass filter is greater than the low-frequency cutoff of said first microphone; Said second microphone and input audio signal logic shield, and make the only version that alleviates of output audio component of said second microphone; With

Can operate the combinational logic that connects with said first microphone apparatus and said second microphone apparatus, said combinational logic makes up the said first and second output signals with the generation output audio signal,

Said first and second mechanical responses are practically identical, and said first microphone and said second microphone are formed on the singulated dies.

10. microphone system as claimed in claim 9, wherein, said combinational logic comprises subtracter, said subtracter deducts the said second output signal from the said first output signal.

11. microphone system as claimed in claim 9 also comprises being used for removing the device of listened to the response of mechanical shock from the said first output signal.

12. microphone system as claimed in claim 9, wherein, said second microphone apparatus comprises sef-adapting filter.

13. microphone system as claimed in claim 9; Wherein, The said first output signal comprises the audio component and first noise component; The said second output signal comprises second noise component, and said combinational logic uses said second noise component to alleviate said first noise component in the said first output signal, thereby produces said output audio signal.

14. the method from microphone system generation output audio signal, this method comprises:

Pedestal is provided; This pedestal has first microphone; Be used for generating first microphone output signal in response to input audio signal and mechanical signal; Said first microphone output signal has audio component and mechanical component, and said pedestal also has second microphone, is used for generating second microphone output signal in response to said mechanical signal; With

Use from the information in said second microphone output signal from said first microphone output signal, removing the said mechanical component of at least a portion,

Said first microphone has first barrier film of definition first circumferential gap, and said second microphone has second barrier film of definition second circumferential gap, and said second circumferential gap is greater than said first circumferential gap.

15. method as claimed in claim 14, wherein, said second microphone output signal has second audio component, and said use comprises removes said second audio component of at least a portion from said second microphone output signal.

16. method as claimed in claim 14 also comprises said second microphone output signal is fixed or adaptive-filtering.

17. method as claimed in claim 16, wherein, said second microphone output signal has second audio component, and said use is removed said second audio component of at least a portion before being included in filtering from said second microphone output signal.

18. method as claimed in claim 14, wherein, said first microphone has first barrier film, and said second microphone has second barrier film, and said method is exposed to said input audio signal with said first and second barrier films.

19. microphone system according to claim 1, wherein, said first microphone and said second microphone are formed on the singulated dies.

20. method according to claim 14, wherein, said pedestal is a singulated dies.