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CN101226906A - Chip carrier with dam - Google Patents

Chip carrier with dam Download PDF

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Publication number
CN101226906A
CN101226906A CN200810074320.6A CN200810074320A CN101226906A CN 101226906 A CN101226906 A CN 101226906A CN 200810074320 A CN200810074320 A CN 200810074320A CN 101226906 A CN101226906 A CN 101226906A
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Prior art keywords
dam
groove
chip carrier
protective layer
connection pad
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CN200810074320.6A
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Chinese (zh)
Inventor
陈家庆
陈裕文
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Advanced Semiconductor Engineering Inc
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Advanced Semiconductor Engineering Inc
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Priority to CN200810074320.6A priority Critical patent/CN101226906A/en
Publication of CN101226906A publication Critical patent/CN101226906A/en
Pending legal-status Critical Current

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    • H10W74/15

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

The invention discloses a chip carrier with a blocking dam, which mainly comprises a base material, a protective layer and the blocking dam. The substrate is provided with a plurality of first connecting pads and a plurality of second connecting pads, the protective layer is formed on the surface of the substrate, the protective layer is provided with a groove, a plurality of first openings and a plurality of second openings, the groove is formed between the first openings and the second openings, the groove is provided with a first side wall and a second side wall, the first openings and the second openings respectively expose the first connecting pads and the second connecting pads, and the dam is formed between the first side wall and the second side wall of the groove and protrudes out of the protective layer. The dam has the function of preventing the chip carrier from being polluted by the overflow of the underfill, and the width and the height of the dam can be controlled because the dam is formed in the groove of the protective layer, and the contact area and the bonding strength between the dam and the protective layer can be increased to prevent the dam and the protective layer from being peeled off. The invention also discloses a semiconductor structure.

Description

具有拦坝的芯片承载器 Chip carrier with dams

技术领域technical field

本发明涉及一种芯片承载器,特别涉及一种可防止溢胶污染连接垫的芯片承载器。The invention relates to a chip carrier, in particular to a chip carrier capable of preventing overflow glue from polluting connection pads.

背景技术Background technique

已知基板具有多个凸块连接垫与多个焊球连接垫,通常该凸块连接垫与该焊球连接垫位于该基板的同一平面且该凸块连接垫与该焊球连接垫为相邻,由于目前对电子产品皆要求轻薄短小的情形下,因此该凸块连接垫与该焊球连接垫的间距相当小,当芯片以凸块电性连接至该基板,并以底部填充胶填充于该基板与该芯片之间以密封该凸块时,该底部填充胶容易溢流至该焊球连接垫而污染相邻的该焊球连接垫,导致该焊球连接垫于后续的工艺中无法顺利与焊球接合。A known substrate has a plurality of bump connection pads and a plurality of solder ball connection pads, usually the bump connection pads and the solder ball connection pads are located on the same plane of the substrate and the bump connection pads and the solder ball connection pads are in phase Adjacent, due to the current requirements for electronic products to be light, thin and short, the distance between the bump connection pad and the solder ball connection pad is quite small. When the chip is electrically connected to the substrate with bumps and filled with underfill When sealing the bump between the substrate and the chip, the underfill is likely to overflow to the solder ball connection pad and contaminate the adjacent solder ball connection pad, causing the solder ball connection pad to be damaged in subsequent processes. Unable to smoothly bond with solder balls.

发明内容Contents of the invention

本发明的主要目的在于提供一种具有拦坝的芯片承载器,保护层形成于具有多个第一连接垫及多个第二连接垫的基材的基材表面,该保护层具有凹槽、多个第一开口及多个第二开口,其中该凹槽形成于该第一开口与该第二开口之间,该凹槽具有第一侧壁与第二侧壁,拦坝形成于该凹槽的该第一侧壁与该第二侧壁之间,且凸出于该保护层。该拦坝具有防止底部填充胶溢流导致污染该芯片承载器的功效,且该拦坝形成于该保护层的该凹槽内,因此可控制该拦坝的宽度及高度,并且可增加该拦坝与该保护层的接触面积及结合强度,以避免该拦坝与该保护层剥离。The main purpose of the present invention is to provide a chip carrier with a dam, a protective layer is formed on the substrate surface of a substrate having a plurality of first connection pads and a plurality of second connection pads, the protection layer has grooves, A plurality of first openings and a plurality of second openings, wherein the groove is formed between the first opening and the second opening, the groove has a first side wall and a second side wall, and a dam is formed in the groove The groove is between the first sidewall and the second sidewall and protrudes from the protective layer. The dam has the effect of preventing the overflow of underfill glue from polluting the chip carrier, and the dam is formed in the groove of the protective layer, so the width and height of the dam can be controlled, and the dam can be increased The contact area and bonding strength between the dam and the protective layer are used to prevent the dam from being peeled off from the protective layer.

依本发明的一种具有拦坝的芯片承载器主要包含基材、保护层以及拦坝,该基材具有基材表面、多个第一连接垫及多个第二连接垫,该保护层形成于该基材的该基材表面,该保护层具有凹槽、多个第一开口及多个第二开口,其中该凹槽形成于该第一开口与该第二开口之间,该凹槽具有第一侧壁与第二侧壁,该第一开口与该第二开口分别显露该第一连接垫与该第二连接垫,该拦坝形成于该凹槽的该第一侧壁与该第二侧壁之间,且凸出于该保护层。A chip carrier with a dam according to the present invention mainly includes a substrate, a protective layer and a dam, the substrate has a surface of the substrate, a plurality of first connection pads and a plurality of second connection pads, the protection layer forms On the substrate surface of the substrate, the protective layer has a groove, a plurality of first openings and a plurality of second openings, wherein the groove is formed between the first opening and the second opening, and the groove It has a first side wall and a second side wall, the first opening and the second opening reveal the first connection pad and the second connection pad respectively, and the dam is formed on the first side wall and the second connection pad of the groove. between the second sidewalls and protrude from the protective layer.

附图说明Description of drawings

图1为依据本发明第一具体实施例的一种具有拦坝的芯片承载器的截面示意图。FIG. 1 is a schematic cross-sectional view of a chip carrier with dams according to a first embodiment of the present invention.

图2为依据本发明第一具体实施例的该具有拦坝的芯片承载器的上视图。FIG. 2 is a top view of the chip carrier with dams according to the first embodiment of the present invention.

图3为依据本发明第二具体实施例的另一种有拦坝的芯片承载器的上视图。FIG. 3 is a top view of another chip carrier with dams according to the second embodiment of the present invention.

图4为依据本发明第三具体实施例的另一种有拦坝的芯片承载器的上视图。FIG. 4 is a top view of another chip carrier with dams according to a third embodiment of the present invention.

图5为依据本发明第四具体实施例的另一种具有拦坝的芯片承载器的上视图。FIG. 5 is a top view of another chip carrier with dams according to a fourth embodiment of the present invention.

图6为依据本发明第一具体实施例的该具有拦坝的芯片承载器应用于半导体结构的截面示意图。6 is a schematic cross-sectional view of the application of the chip carrier with dams to a semiconductor structure according to the first embodiment of the present invention.

附图标记说明Explanation of reference signs

100芯片承载器                110基材100 chip carrier 110 substrate

111基材表面                  112第一连接垫111 substrate surface 112 first connection pad

113第二连接垫                120保护层113 second connection pad 120 protective layer

121凹槽                      121a第一侧壁121 groove 121a first side wall

121b第二侧壁                 122第一开口121b second side wall 122 first opening

123第二开口                  124保护层表面123 second opening 124 protective layer surface

130拦坝                      140线路层130 Barrage 140 Line layer

200半导体结构                210芯片承载器200 semiconductor structure 210 chip carrier

211基材                      212保护层211 base material 212 protective layer

213拦坝                      214第一连接垫213 Barrage 214 First connection pad

215第二连接垫                216凹槽215 second connection pad 216 groove

216a第一侧壁                 216b第二侧壁216a first side wall 216b second side wall

217第一开口                  218第二开口217 First opening 218 Second opening

219保护层表面                220芯片219 protective layer surface 220 chip

221凸块                      230底部填充胶221 Bump 230 Underfill

具体实施方式Detailed ways

请参阅图1,依据本发明的一具体实施例揭示一种具有拦坝的芯片承载器100,其主要包含有基材110、保护层120以及拦坝130,该基材110可选自于芯片、芯片或电路板,该基材110具有基材表面111、多个第一连接垫112及多个第二连接垫113,该第一连接垫112与该第二连接垫113形成于该基材表面111,此外,该芯片承载器100另包含有线路层140,该线路层140、该第一连接垫112与该第二连接垫113可由金属层经图案化步骤后形成,在本实施例中,该基材110为印刷电路板,该保护层120为防焊层,如绿漆,该第一连接垫112为凸块连接垫,该第二连接垫113为焊球连接垫。该保护层120形成于该基材110的该基材表面111上,且该保护层120覆盖该线路层140,该保护层120具有凹槽121、多个第一开口122及多个第二开口123,其中该凹槽121形成于该第一开口122与该第二开口123之间,该凹槽121具有第一侧壁121a与第二侧壁121b,该凹槽121可显露出该线路层140,或者,在其他实施例中该凹槽121不显露该线路层140,该凹槽121的形状可选自于「口」形、「ㄇ」形、「I」形或「L」形,请参阅第2及3图,该凹槽121可为连续的「口」形、「ㄇ」形、「I」形或「L」形,或者,请参阅第4及5图,该凹槽121亦可为不连续的「口」形、「ㄇ」形、「I」形或「L」形,请再参阅图1,该第一开口122与该第二开口123分别显露该第一连接垫112与该第二连接垫113,该拦坝130形成于该凹槽121的该第一侧壁121a与该第二侧壁121b之间,且该拦坝130凸出于该保护层120,该拦坝130的材料选自于金属或树脂,该拦坝130的形成方法选自于电镀、印刷或涂布法,在本实施例中,该拦坝130接触该凹槽121的该第一侧壁121a与该第二侧壁121b,且该拦坝130凸出于该保护层120的保护层表面124,或者在另一实施例中,该拦坝130可延伸接触该保护层120的该保护层表面124。由于该拦坝130形成于该保护层120的该凹槽121内,因此可控制该拦坝130的宽度及高度,并且由于该拦坝130接触该凹槽121的该第一侧壁121a与该第二侧壁121b,因此可增加该拦坝130与该保护层120的接触面积及结合强度,以避免该拦坝130与该保护层120剥离,本发明的该芯片承载器100可运用于半导体结构中,如芯片堆叠结构或半导体封装结构中,以防止底部填充胶溢流导致污染该芯片承载器100。Please refer to FIG. 1 , according to a specific embodiment of the present invention, a chip carrier 100 with a dam is disclosed, which mainly includes a substrate 110, a protective layer 120 and a dam 130. The substrate 110 can be selected from a chip , chip or circuit board, the substrate 110 has a substrate surface 111, a plurality of first connection pads 112 and a plurality of second connection pads 113, the first connection pads 112 and the second connection pads 113 are formed on the substrate Surface 111, in addition, the chip carrier 100 further includes a circuit layer 140, the circuit layer 140, the first connection pad 112 and the second connection pad 113 can be formed by a metal layer after a patterning step, in this embodiment , the base material 110 is a printed circuit board, the protective layer 120 is a solder mask, such as green paint, the first connection pad 112 is a bump connection pad, and the second connection pad 113 is a solder ball connection pad. The protective layer 120 is formed on the substrate surface 111 of the substrate 110, and the protective layer 120 covers the circuit layer 140, the protective layer 120 has a groove 121, a plurality of first openings 122 and a plurality of second openings 123, wherein the groove 121 is formed between the first opening 122 and the second opening 123, the groove 121 has a first side wall 121a and a second side wall 121b, the groove 121 can reveal the circuit layer 140, or, in other embodiments, the groove 121 does not expose the circuit layer 140, and the shape of the groove 121 can be selected from a "mouth" shape, a "ㄇ" shape, an "I" shape or an "L" shape, Please refer to Figures 2 and 3, the groove 121 can be a continuous "mouth" shape, "ㄇ" shape, "I" shape or "L" shape, or, please refer to Figures 4 and 5, the groove 121 It can also be a discontinuous "mouth" shape, "ㄇ" shape, "I" shape or "L" shape, please refer to Figure 1 again, the first opening 122 and the second opening 123 reveal the first connection pad respectively 112 and the second connection pad 113, the dam 130 is formed between the first side wall 121a and the second side wall 121b of the groove 121, and the dam 130 protrudes from the protective layer 120, the The material of the dam 130 is selected from metal or resin, and the forming method of the dam 130 is selected from electroplating, printing or coating methods. In this embodiment, the dam 130 contacts the first side of the groove 121 wall 121a and the second side wall 121b, and the dam 130 protrudes from the protective layer surface 124 of the protective layer 120, or in another embodiment, the dam 130 can extend to contact the protective layer of the protective layer 120. layer surface 124 . Since the dam 130 is formed in the groove 121 of the protective layer 120, the width and height of the dam 130 can be controlled, and since the dam 130 contacts the first side wall 121a of the groove 121 and the The second side wall 121b can therefore increase the contact area and bonding strength between the dam 130 and the protective layer 120, so as to avoid peeling off the dam 130 and the protective layer 120. The chip carrier 100 of the present invention can be applied to semiconductors structure, such as a chip stack structure or a semiconductor package structure, to prevent the underfill glue from overflowing and contaminating the chip carrier 100 .

请参阅图6,一种应用上述的芯片承载器的半导体结构200,该半导体结构200可为芯片堆叠结构或半导体封装结构,其包含芯片承载器210、芯片220以及底部填充胶230。该芯片承载器210包含有基材211、保护层212及拦坝213,在本实施例中该基材211为电路板,该保护层212为防焊层,如绿漆,该基材211具有多个第一连接垫214及多个第二连接垫215,该保护层212形成于该基材211上且具有凹槽216、多个第一开口217及多个第二开口218,其中该凹槽216形成于该第一开口217与该第二开口218之间,该凹槽216具有第一侧壁216a与第二侧壁216b,该第一开口217与该第二开口218分别显露该第一连接垫214与该第二连接垫215,该拦坝213形成于该凹槽216的该第一侧壁216a与该第二侧壁216b之间,且该拦坝213凸出于该保护层212的保护层表面219,在本实施例中,该拦坝213接触该凹槽216的该第一侧壁216a与该第二侧壁216b,该芯片220具有多个凸块221,该芯片220倒装焊接合于该芯片承载器210且该芯片220的该凸块221电性连接该芯片承载器210的该第一连接垫214,在本实施例中,该第一连接垫214为凸块连接垫,该第二连接垫215为焊球连接垫,该底部填充胶230形成于该芯片220与该芯片承载器210之间以密封该凸块221,在本实施例中,该拦坝213形成于该凹槽216中,且凸出于该保护层212,该拦坝213的高度小于该凸块221的高度,或者,在另外实施例中,该拦坝213的高度可等于或大于该凸块221的高度。在该芯片承载器210设置多个焊球(图未绘出)于该第二连接垫215之前,该底部填充胶230先形成于该芯片承载器210与该芯片220之间以密封保护该凸块221,通过该拦坝213可将该底部填充胶230限位于该凸块221与该拦坝213之间,以防止该底部填充胶230溢流至该第二连接垫215而污染该第二连接垫215,此外由于该拦坝213形成于该保护层212的该凹槽216内,因此可控制该拦坝213的宽度及高度,以避免在形成该拦坝213时扩散而污染该第一连接垫214与该第二连接垫215,并且由于该拦坝213接触该凹槽216的该第一侧壁216a与该第二侧壁216b,因此可增加该拦坝213与该保护层212的接触面积及结合强度,或,在另一实施例中该拦坝213不接触该凹槽216的该第一侧壁216a与该第二侧壁216b。Please refer to FIG. 6 , a semiconductor structure 200 using the above-mentioned chip carrier, the semiconductor structure 200 may be a chip stack structure or a semiconductor package structure, which includes a chip carrier 210 , a chip 220 and an underfill 230 . The chip carrier 210 includes a substrate 211, a protective layer 212 and a dam 213. In this embodiment, the substrate 211 is a circuit board, and the protective layer 212 is a solder mask, such as green paint. The substrate 211 has A plurality of first connection pads 214 and a plurality of second connection pads 215, the protection layer 212 is formed on the substrate 211 and has a groove 216, a plurality of first openings 217 and a plurality of second openings 218, wherein the concave The groove 216 is formed between the first opening 217 and the second opening 218. The groove 216 has a first sidewall 216a and a second sidewall 216b. The first opening 217 and the second opening 218 respectively expose the first A connection pad 214 and the second connection pad 215, the dam 213 is formed between the first side wall 216a and the second side wall 216b of the groove 216, and the dam 213 protrudes from the protective layer 212 of the protective layer surface 219, in this embodiment, the dam 213 contacts the first side wall 216a and the second side wall 216b of the groove 216, the chip 220 has a plurality of bumps 221, the chip 220 The chip carrier 210 is flip-chip soldered and the bump 221 of the chip 220 is electrically connected to the first connection pad 214 of the chip carrier 210. In this embodiment, the first connection pad 214 is a bump connection pad, the second connection pad 215 is a solder ball connection pad, the underfill 230 is formed between the chip 220 and the chip carrier 210 to seal the bump 221, in this embodiment, the dam 213 Formed in the groove 216 and protruding from the protective layer 212, the height of the dam 213 is smaller than the height of the protrusion 221, or, in another embodiment, the height of the dam 213 can be equal to or greater than the The height of the bump 221 . Before the chip carrier 210 disposes a plurality of solder balls (not shown) on the second connection pad 215, the underfill 230 is first formed between the chip carrier 210 and the chip 220 to seal and protect the bumps. Block 221, the underfill 230 can be limited between the bump 221 and the dam 213 by the dam 213, so as to prevent the underfill 230 from overflowing to the second connection pad 215 and contaminating the second pad 215. The connection pad 215, in addition, because the dam 213 is formed in the groove 216 of the protective layer 212, the width and height of the dam 213 can be controlled, so as to avoid spreading and contaminating the first dam 213 when forming the dam 213. The connection pad 214 and the second connection pad 215, and since the dam 213 contacts the first side wall 216a and the second side wall 216b of the groove 216, the distance between the dam 213 and the protective layer 212 can be increased. contact area and bonding strength, or, in another embodiment, the dam 213 does not contact the first sidewall 216 a and the second sidewall 216 b of the groove 216 .

本发明的保护范围当视后附的权利要求所界定的为准,本领域技术人员在不脱离本发明的精神和范围内所作的任何变化与修改,均属于本发明的保护范围。The scope of protection of the present invention shall be defined by the appended claims. Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the present invention shall all belong to the scope of protection of the present invention.

Claims (11)

1.一种具有拦坝的芯片承载器,其包含:1. A chip carrier with a dam comprising: 基材,其具有基材表面、多个第一连接垫及多个第二连接垫,该第一连接垫与该第二连接垫形成于该基材表面;a substrate having a substrate surface, a plurality of first connection pads and a plurality of second connection pads, the first connection pads and the second connection pads are formed on the substrate surface; 保护层,其形成于该基材的该基材表面,该保护层具有凹槽、多个第一开口及多个第二开口,其中该凹槽形成于该第一开口与该第二开口之间且该凹槽具有第一侧壁与第二侧壁,该第一开口与该第二开口分别显露该第一连接垫与该第二连接垫;以及A protective layer formed on the substrate surface of the substrate, the protective layer has a groove, a plurality of first openings and a plurality of second openings, wherein the groove is formed between the first opening and the second opening and the groove has a first sidewall and a second sidewall, the first opening and the second opening expose the first connection pad and the second connection pad respectively; and 拦坝,其形成于该凹槽的该第一侧壁与该第二侧壁之间,且凸出于该保护层。The dam is formed between the first sidewall and the second sidewall of the groove and protrudes from the protection layer. 2.如权利要求1所述的芯片承载器,其中该拦坝接触该凹槽的该第一侧壁与该第二侧壁。2. The chip carrier of claim 1, wherein the dam contacts the first sidewall and the second sidewall of the groove. 3.如权利要求1所述的芯片承载器,其中该凹槽为连续的“口”形、“ㄇ”形、“I”形或“L”形。3. The chip carrier as claimed in claim 1, wherein the groove is in a continuous "mouth" shape, "ㄇ" shape, "I" shape or "L" shape. 4.如权利要求1所述的芯片承载器,其中该凹槽为不连续的“口”形、“ㄇ”形、“I”形或“L”形。4. The chip carrier as claimed in claim 1, wherein the groove is in a discontinuous "mouth", "ㄇ" shape, "I" shape or "L" shape. 5.如权利要求1所述的芯片承载器,其中该保护层具有保护层表面,该拦坝延伸接触至该保护层的该保护层表面。5. The chip carrier as claimed in claim 1, wherein the passivation layer has a passivation layer surface, and the dam extends to contact the passivation layer surface of the passivation layer. 6.如权利要求1所述的芯片承载器,其另包含有线路层,该保护层覆盖该线路层。6. The chip carrier as claimed in claim 1, further comprising a circuit layer, the protective layer covering the circuit layer. 7.如权利要求6所述的芯片承载器,其中该凹槽显露该线路层。7. The chip carrier as claimed in claim 6, wherein the groove exposes the circuit layer. 8.如权利要求1所述的芯片承载器,其中该第一连接垫为凸块连接垫,该第二连接垫为焊球连接垫。8. The chip carrier as claimed in claim 1, wherein the first connection pad is a bump connection pad, and the second connection pad is a solder ball connection pad. 9.如权利要求8所述的芯片承载器,其中该凸块连接垫用于电性连接一倒装芯片。9. The chip carrier as claimed in claim 8, wherein the bump pad is used to electrically connect a flip chip. 10.如权利要求9所述的芯片承载器,其中更包含一底胶填充于该倒装芯片和该芯片承载器之间。10. The chip carrier as claimed in claim 9, further comprising an underfill filling between the flip chip and the chip carrier. 11.如权利要求1所述的芯片承载器,其中该拦坝的形成方法选自于电镀、印刷或涂布法。11. The chip carrier as claimed in claim 1, wherein the forming method of the dam is selected from electroplating, printing or coating methods.
CN200810074320.6A 2008-02-15 2008-02-15 Chip carrier with dam Pending CN101226906A (en)

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CN107546189A (en) * 2016-06-27 2018-01-05 矽品精密工业股份有限公司 Encapsulate stacking structure
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CN109075233A (en) * 2016-03-03 2018-12-21 奥斯兰姆奥普托半导体有限责任公司 Photoelectron lighting device, carrier and photoelectron lighting system for opto-electronic semiconductor chip
CN111092064A (en) * 2018-10-23 2020-05-01 矽品精密工业股份有限公司 Electronic package
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CN104681499A (en) * 2013-11-29 2015-06-03 矽品精密工业股份有限公司 Package stack structure and its manufacturing method
CN109075233A (en) * 2016-03-03 2018-12-21 奥斯兰姆奥普托半导体有限责任公司 Photoelectron lighting device, carrier and photoelectron lighting system for opto-electronic semiconductor chip
DE112017001125B4 (en) 2016-03-03 2022-10-13 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelectronic lighting device, manufacturing method and optoelectronic lighting system
CN107546189A (en) * 2016-06-27 2018-01-05 矽品精密工业股份有限公司 Encapsulate stacking structure
CN107546189B (en) * 2016-06-27 2019-11-01 矽品精密工业股份有限公司 Encapsulate stacking structure
CN109037163A (en) * 2017-06-09 2018-12-18 日月光半导体制造股份有限公司 Semiconductor device package
CN109037163B (en) * 2017-06-09 2020-08-07 日月光半导体制造股份有限公司 Semiconductor device packaging
CN111092064B (en) * 2018-10-23 2021-10-22 矽品精密工业股份有限公司 electronic package
CN111092064A (en) * 2018-10-23 2020-05-01 矽品精密工业股份有限公司 Electronic package
CN111146322A (en) * 2018-11-05 2020-05-12 光宝电子(广州)有限公司 Semiconductor light emitting device and method for manufacturing the same
CN111146322B (en) * 2018-11-05 2021-04-06 光宝电子(广州)有限公司 Semiconductor light emitting device and method for manufacturing the same
CN111354649A (en) * 2018-12-21 2020-06-30 台湾积体电路制造股份有限公司 Package structure and method of forming the same
CN113038698A (en) * 2021-03-08 2021-06-25 京东方科技集团股份有限公司 Flexible circuit board, display panel, manufacturing method and display device
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