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CN101001751A - Apparatus and method for manufacturing photosensitive laminate - Google Patents

Apparatus and method for manufacturing photosensitive laminate Download PDF

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Publication number
CN101001751A
CN101001751A CN 200580023047 CN200580023047A CN101001751A CN 101001751 A CN101001751 A CN 101001751A CN 200580023047 CN200580023047 CN 200580023047 CN 200580023047 A CN200580023047 A CN 200580023047A CN 101001751 A CN101001751 A CN 101001751A
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photosensitive
substrate
bonding
web
peeling
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CN100528560C (en
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末原和芳
秋好宽和
伊本贤一
森亮
铃木智明
杉原了一
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Fujifilm Corp
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Fujifilm Corp
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  • Lining Or Joining Of Plastics Or The Like (AREA)

Abstract

A manufacturing apparatus (20) has a reel-out mechanism (32), a processing mechanism (36), a label bonding mechanism (40), a reservoir mechanism (42), a peeling mechanism (44), a substrate feed mechanism (45), and a joining mechanism (46). A detecting mechanism (47) for directly detecting a boundary position of a photosensitive web (22) is disposed upstream of and closely to the joining mechanism (46). Based on detected information from the detecting mechanism (47), a relative position of the boundary position and a substrate (24) in a joining position is adjusted.

Description

用于制造感光层叠体的装置和方法Apparatus and method for producing photosensitive laminated body

技术领域technical field

本发明涉及通过传送两个或多个的每个包括依次堆积在支撑上的感光材料层和保护膜的伸长感光连接板、剥离保护膜以暴露感应材料层并将彼此平行的暴露的感光材料层结合到基片的制造感光层叠体的装置和方法。The present invention relates to exposing the exposed photosensitive material by conveying two or more elongated photosensitive webs each comprising a photosensitive material layer and a protective film sequentially stacked on a support, peeling off the protective film to expose the sensitive material layer and parallel to each other. Apparatus and method for making a photosensitive laminate in which layers are bonded to a substrate.

背景技术Background technique

例如,液晶板用的基片、印制布线板用的基片和PDPs(等离子显示板)用的基片具有带有感光材料(感光树脂)层并贴合到基片表面感光片(感光连接板)。该感光片包括依次放置在挠性塑料支撑上的感光材料层和保护膜。For example, substrates for liquid crystal panels, substrates for printed wiring boards, and substrates for PDPs (plasma display panels) have a photosensitive sheet (photosensitive connection board) with a layer of photosensitive material (photosensitive resin) bonded to the surface of the substrate. ). The photosensitive sheet includes a layer of photosensitive material and a protective film sequentially placed on a flexible plastic support.

用于贴合(apply)这种感光片的贴合装置(applying apparatus)通常操作以预定间隔馈送诸如玻璃基片、树脂基片或类似物的基片,并从感光片剥离对应于将贴合到每个基片的感光材料层的范围的长度的保护膜。An applying apparatus for applying such a photosensitive sheet is generally operated to feed a substrate such as a glass substrate, a resin substrate, or the like at predetermined intervals, and to peel from the photosensitive sheet corresponding to the A protective film of the length of the photosensitive material layer of the substrate.

例如如附图的图32所示,根据如日本公开专利发布第11-34280号中公开的用于贴合膜的方法和装置,从膜卷1退卷下的层叠膜1a围绕引导辊2a,2b整形,并沿水平膜馈送平面延伸。该引导辊2b与用于输出取决于层叠膜1a被馈送的长度相同多的脉冲的旋转编码器3组合。For example, as shown in FIG. 32 of the accompanying drawings, according to the method and apparatus for laminating films as disclosed in Japanese Laid-Open Patent Publication No. 11-34280, the laminated film 1a unwound from the film roll 1 surrounds the guide roller 2a, 2b is shaped and extended along the horizontal film feed plane. This guide roller 2b is combined with a rotary encoder 3 for outputting as many pulses depending on the length to which the laminated film 1a is fed.

沿水平膜馈送平面从引导辊2a,2b延伸的层叠膜1a围绕吸辊4整形。沿水平膜馈送平面,部分切刀5和覆盖膜剥离器6被设置在引导辊2b和吸辊4之间。The laminated film 1 a extending from the guide rolls 2 a , 2 b along the horizontal film feed plane is shaped around a suction roll 4 . Along the horizontal film feed plane, a partial cutter 5 and a cover film stripper 6 are disposed between the guide roll 2b and the suction roll 4 .

该部分切刀5具有一对圆盘切刀5a,5b。该圆盘切刀5a,5b可横向运动经过层叠膜1a以与覆盖膜的背面侧上的感光树脂层(未示出)一起,切断层叠膜1a的覆盖膜(未示出)。The partial cutter 5 has a pair of disc cutters 5a, 5b. The disc cutters 5a, 5b are movable laterally across the laminated film 1a to cut the cover film (not shown) of the laminated film 1a together with the photosensitive resin layer (not shown) on the back side of the cover film.

该覆盖膜剥离器6将从胶带卷7退卷的胶带7a坚固地按靠着压辊8a,8b之间的覆盖膜,并且然后围绕收紧辊9缠绕胶带7a。该覆盖膜被胶带7a从感光树脂层剥离,并与胶带7a一起卷在收紧辊9上。The cover film stripper 6 firmly presses the adhesive tape 7 a unwound from the tape roll 7 against the cover film between the press rollers 8 a , 8 b and then winds the adhesive tape 7 a around the take-up roller 9 . This cover film is peeled from the photosensitive resin layer by the tape 7a, and is wound up on the take-up roller 9 together with the tape 7a.

该吸辊4的下游跟着一对层叠辊12a,12b,用于重叠和将层叠膜1a按靠在由基片馈送器10依次间歇馈送的多个基片11的上部表面上。支持膜收紧辊13被设置在层叠辊12a,12b的下游。贴在各自基片11上的透光支持膜(未示出)被剥离并被支持膜收紧辊13卷起。Downstream of this suction roller 4 is followed a pair of lamination rollers 12a, 12b for overlapping and pressing the lamination film 1a against the upper surfaces of a plurality of substrates 11 sequentially intermittently fed by the substrate feeder 10. A support film take-up roll 13 is provided downstream of the lamination rolls 12a, 12b. The light-transmitting support films (not shown) attached to the respective substrates 11 are peeled off and taken up by support film take-up rolls 13 .

在上面传统技术中,在部分切刀5开始切割层叠膜1a时,开始测量旋转编码器3产生的脉冲数目。当来自旋转编码器3的脉冲的测量值到达对应于层叠膜1a上将切割的预定位置的值时,基片馈送器10被启动。因此,基片11在层叠辊12a,12b之间与层叠膜1a同步地馈送。采用这种方式,层叠膜1a被定位用于贴合到每个基片11。In the above conventional technique, the measurement of the number of pulses generated by the rotary encoder 3 is started when the partial cutter 5 starts cutting the laminated film 1a. When the measured value of the pulse from the rotary encoder 3 reaches a value corresponding to a predetermined position on the laminated film 1a to be cut, the substrate feeder 10 is activated. Accordingly, the substrate 11 is fed between the lamination rollers 12a, 12b in synchronization with the lamination film 1a. In this way, the laminated film 1 a is positioned for attachment to each substrate 11 .

在传统技术中,在部分切刀5开始切割时,开始测量由引导辊2b上的旋转编码器3产生的脉冲数。基于测量值,该基片11被馈送,这样部分切割区被认为到达层叠辊12a,12b之间的预定位置。In the conventional technique, when the partial cutter 5 starts cutting, the measurement of the number of pulses generated by the rotary encoder 3 on the guide roller 2b is started. Based on the measured values, the substrate 11 is fed such that the part of the cut area is considered to reach a predetermined position between the laminating rollers 12a, 12b.

然而,在这种情况中,部分切刀5和层叠辊12a,12b之间的长度相当大。因此,层叠膜1a的长度会由于层叠单元的热量改变,或者旋转编码器3可能会空转。因此,不可能相对于层叠辊12a,12b精确地定位层叠膜1a和基片11。In this case, however, the length between the partial cutter 5 and the stacking rollers 12a, 12b is considerably large. Therefore, the length of the laminated film 1a may change due to the heat of the lamination unit, or the rotary encoder 3 may run idly. Therefore, it is impossible to precisely position the laminated film 1a and the substrate 11 with respect to the laminating rollers 12a, 12b.

发明内容Contents of the invention

本发明的主要目的在于提供通过经简单加工和布置将伸长感光连接板精确结合到基片上的用于制造高质量感光层叠体的装置和方法。A main object of the present invention is to provide an apparatus and method for manufacturing a high-quality photosensitive laminate by precisely bonding an elongated photosensitive web to a substrate through simple processing and arrangement.

根据本发明,提供了用于制造感光层叠体的装置,包括:用于卷出伸长感光连接板的连接板卷出机构,该伸长感光连接板包括:支撑;设置在支架上的感光材料层;和设置在感光材料层上的保护膜,该保护膜具有剥离区和剩余区;处理机构,其用于在剥离区和剩余区之间的边界位置处,在已由连接板卷出机构卷出的伸长感光连接板的保护膜中形成可横向分离的处理区域;剥离机构,其用于将剥离区从伸长感光连接板剥离,剩下剩余区;基片馈送机构,其用于将已被加热到预定温度的基片馈送到结合位置;结合机构,其用于将剩余区定位在基片之间,并将剥离了剥离区的感光材料层的暴露区域结合到结合位置中的基片,用于生产结合基片;接近结合位置设置的探测机构,其用于直接探测伸长感光连接板的边界位置,或与边界位置相关的设置在伸长感光连接板上的探测标记;和控制机构,其基于由探测机构探测的边界位置信息,用于调节边界位置和结合位置中的基片的相对位置。According to the present invention, there is provided an apparatus for manufacturing a photosensitive laminated body, comprising: a web unwinding mechanism for unrolling an elongated photosensitive web comprising: a support; a photosensitive material disposed on a support layer; and a protective film disposed on the photosensitive material layer, the protective film has a peeling area and a remaining area; a handling mechanism, which is used at a boundary position between the peeling area and the remaining area, after being rolled out by the connecting plate A laterally separable processing area is formed in the protective film of the elongated photosensitive web that is rolled out; a peeling mechanism for peeling the peeled area from the elongated photosensitive web to leave a remaining area; a substrate feeding mechanism for The substrate that has been heated to a predetermined temperature is fed to the bonding position; a bonding mechanism for positioning the remaining area between the substrates and bonding the exposed area of the photosensitive material layer stripped of the peeled area into the bonding position The substrate is used to produce the bonding substrate; the detection mechanism arranged close to the bonding position is used to directly detect the boundary position of the elongated photosensitive connection plate, or the detection mark set on the elongated photosensitive connection plate related to the boundary position; and a control mechanism for adjusting the relative position of the substrate in the boundary position and the bonding position based on the boundary position information detected by the detection mechanism.

因为伸长感光连接板和基片的相对位置能够通过简单控制得到调节,该探测机构应优选地被设置在结合位置的上游并接近结合位置。Since the relative positions of the elongated photosensitive web and the substrate can be adjusted by simple controls, the detection mechanism should preferably be arranged upstream of and close to the bonding position.

贮存机构应优选地设置在处理机构和剥离机构之间,用于改变伸长感光连接板被馈送的速度或状态。因此,该伸长感光连接板经处理机构被间歇地馈送,并且此后通过后续的剥离机构中的贮存机构,被连续地馈送。A storage mechanism should preferably be provided between the handling mechanism and the stripping mechanism for varying the speed or state at which the elongated photosensitive web is fed. Thus, the elongated photosensitive web is intermittently fed through the handling mechanism and thereafter continuously fed through the storage mechanism in the subsequent stripping mechanism.

此外,张力控制机构应优选地被设置在剥离机构和结合机构之间,用于将张力施加到伸长感光连接板。结果,为进行拉伸,该伸长感光连接板能够得到调节,使将被调节的边界位置容易地对准结合位置。Furthermore, a tension control mechanism should preferably be provided between the peeling mechanism and the bonding mechanism for applying tension to the elongated photosensitive web. As a result, for stretching, the elongated photosensitive web can be adjusted so that the border position to be adjusted is easily aligned with the bonding position.

此外,切割机构应优选地被设置在结合机构的下游,用于切断基片之间的伸长感光连接板。Furthermore, a cutting mechanism should preferably be provided downstream of the bonding mechanism for severing the elongated photosensitive web between the substrates.

支撑剥离机构应优选地被设置在结合机构的下游,用于从结合基片剥离支撑。在被切到对应于各个基片的长度后,该支撑可被自动剥离,或可被连续地缠绕以被自动剥离。A support stripping mechanism should preferably be arranged downstream of the bonding mechanism for stripping the support from the bonded substrate. The support may be automatically stripped after being cut to lengths corresponding to the respective substrates, or may be continuously wound to be automatically stripped.

该结合机构应优选地包括:能够被加热到预定温度的一对橡胶辊;和用于前后运动一个橡胶辊的辊夹单元。该辊夹单元应优选地包括:用于向一个橡胶辊施加夹紧压力的汽缸;和由用于前后运动汽缸的致动器运动的凸轮。The bonding mechanism should preferably include: a pair of rubber rollers capable of being heated to a predetermined temperature; and a nip unit for moving one rubber roller back and forth. The roller clamp unit should preferably include: a cylinder for applying clamping pressure to a rubber roller; and a cam moved by an actuator for moving the cylinder back and forth.

预加热单元应被优选地设置在结合机构的上游并接近结合机构,用于将伸长感光连接板预先加热到预定温度。A preheating unit should preferably be arranged upstream and close to the bonding mechanism for preheating the elongated photosensitive web to a predetermined temperature.

根据本发明,还提供了制造感光层叠体的方法,包括步骤:卷出伸长感光连接板,该伸长感光连接板包括:支撑;设置在支架上的感光材料层;和设置在感光材料层上的保护膜,该保护膜具有剥离区和剩余区;在剥离区和剩余区之间的边界位置处,在已卷出的伸长感光连接板的保护膜中形成可横向分离的处理区域;将剥离区从伸长感光连接板剥离,剩下剩余区;通过直接探测伸长感光连接板的边界位置,或探测与边界位置相关的设置在伸长感光连接板上的标记,取得边界位置信息;将已被加热到预定温度的基片馈送到结合位置;基于获得的边界位置信息,调节边界位置和结合位置中的基片的相对位置;和将剩余区定位在基片之间,并将剥离了剥离区的感光材料层结合到结合位置中的基片,用于生产结合基片。According to the present invention, there is also provided a method for manufacturing a photosensitive laminated body, comprising the steps of: rolling out an elongated photosensitive connection plate, the elongated photosensitive connection plate comprising: a support; a photosensitive material layer arranged on the support; and a photosensitive material layer arranged on the photosensitive material layer On the protective film, the protective film has a peeling area and a remaining area; at the boundary position between the peeling area and the remaining area, a laterally separable processing area is formed in the protective film of the elongated photosensitive connection plate that has been rolled out; The peeling area is peeled off from the elongated photosensitive connection plate, and the remaining area is left; by directly detecting the boundary position of the elongated photosensitive connection plate, or detecting the mark set on the elongated photosensitive connection plate related to the boundary position, the boundary position information is obtained ; feeding the substrate that has been heated to a predetermined temperature to the bonding position; adjusting the relative position of the substrate in the boundary position and the bonding position based on the obtained boundary position information; and positioning the remaining area between the substrates, and The photosensitive material layer peeled off the peeled area is bonded to the substrate in the bonding position for producing a bonded substrate.

根据本发明,由于直接探测伸长感光连接板的边界位置,或与边界位置相关的设置在伸长感光连接板上的标记,边界位置能够相对于结合位置得到高精度的定位。由于基于取得的边界位置信息,调节边界位置与结合位置中的基片之间的相对位置,通过简单的过程和布置,伸长感光连接板的感光材料层能够被精确地结合到基片的期望区域。因此,能够有效地生产高质量感光层叠体。According to the present invention, since the boundary position of the elongated photosensitive web is directly detected, or a mark provided on the elongated photosensitive web in relation to the boundary position, the boundary position can be positioned with high precision relative to the bonding position. Since the relative position between the boundary position and the substrate in the bonding position is adjusted based on the obtained boundary position information, the photosensitive material layer of the elongated photosensitive connection plate can be precisely bonded to the substrate as desired through a simple process and arrangement. area. Therefore, a high-quality photosensitive laminate can be efficiently produced.

通过结合其中本发明的优选实施例通过所示实例显示的附图进行的如下描述,本发明的上述和其它目的、特征和优点将变得更加明显。The above and other objects, features and advantages of the present invention will become more apparent from the following description taken in conjunction with the accompanying drawings in which preferred embodiments of the present invention are shown by way of illustrated examples.

附图说明Description of drawings

图1是显示根据本发明第一实施例的制造装置的示意侧视图;1 is a schematic side view showing a manufacturing apparatus according to a first embodiment of the present invention;

图2是制造装置中使用的伸长感光连接板的放大片断横断面视图;Figure 2 is an enlarged fragmentary cross-sectional view of an elongated photosensitive web used in the fabrication apparatus;

图3是粘附标签贴合到其上的伸长感光连接板的片断俯视图;Figure 3 is a fragmentary top view of an elongated photosensitive web with an adhesive label attached thereto;

图4是制造装置的结合机构的前侧视图;Figure 4 is a front side view of the coupling mechanism of the manufacturing device;

图5是制造装置的通过区域的片断横断面视图;Figure 5 is a fragmentary cross-sectional view of the pass-through region of the manufacturing apparatus;

图6是制造装置的一部分的示意图,显示了其初始状态;Figure 6 is a schematic diagram of a part of the manufacturing device, showing its initial state;

图7是显示其中保护膜从伸长感光连接板剥离的方式的片断侧前视图;Figure 7 is a fragmentary side front view showing the manner in which the protective film is peeled off from the elongated photosensitive web;

图8是制造装置的一部分的示意图,显示了其中玻璃基片进入橡胶辊之间的方式;Fig. 8 is a schematic diagram of a part of the manufacturing apparatus, showing the manner in which the glass substrate enters between rubber rollers;

图9是制造装置的一部分的示意图,显示了其中橡胶辊开始旋转的方式;Figure 9 is a schematic diagram of a part of the manufacturing apparatus, showing the manner in which the rubber roller begins to rotate;

图10是制造装置的一部分的示意图,显示了在第一玻璃基片上的层叠过程结束时的操作;Figure 10 is a schematic diagram of a portion of the manufacturing apparatus showing operations at the end of the lamination process on the first glass substrate;

图11是制造装置的一部分的示意图,显示了其中橡胶辊和基片馈送辊旋转的方式;11 is a schematic diagram of a part of the manufacturing apparatus, showing the manner in which the rubber roller and the substrate feed roller rotate;

图12是感光树脂层被转移到其上的玻璃基片的片断横断面视图;Figure 12 is a fragmentary cross-sectional view of a glass substrate onto which a photosensitive resin layer is transferred;

图13是制造装置的一部分的示意图,显示了其中基片馈送辊与结合基片的端部间隔开的方式;Figure 13 is a schematic diagram of a portion of a manufacturing apparatus showing the manner in which substrate feed rollers are spaced apart from the ends of bonded substrates;

图14是制造装置的一部分的示意图,显示了其中伸长感光连接板在结合基片间分离的方式;Figure 14 is a schematic diagram of a portion of a manufacturing apparatus showing the manner in which the elongated photosensitive web is separated between bonded substrates;

图15是制造装置的一部分的示意图,显示于其停止状态;Figure 15 is a schematic diagram of a portion of the manufacturing apparatus, shown in its stopped state;

图16是制造装置的一部分的示意图,显示于其结束状态;Figure 16 is a schematic diagram of a portion of the manufacturing apparatus, shown in its finished state;

图17是制造装置的一部分的示意图,显示了其中伸长感光连接板使其前端设置就位的方式;Figure 17 is a schematic diagram of a portion of a manufacturing apparatus showing the manner in which the photosensitive web is extended so that its front end is set in place;

图18是显示其中感光树脂层相对于玻璃基片超前的俯视图;Fig. 18 is a top view showing where the photosensitive resin layer is advanced with respect to the glass substrate;

图19是显示其中感光树脂层相对于玻璃基片延迟的俯视图;Fig. 19 is a plan view showing where the photosensitive resin layer retards with respect to the glass substrate;

图20是根据本发明第二实施例的制造装置的示意侧视图;20 is a schematic side view of a manufacturing apparatus according to a second embodiment of the present invention;

图21是显示其中具有规定长度的感光树脂层被贴合到玻璃基片的方式的俯视图;Fig. 21 is a plan view showing the manner in which a photosensitive resin layer having a prescribed length is bonded to a glass substrate;

图22是显示其中大于规定长度的感光树脂层被贴合到玻璃基片的方式的俯视图;Fig. 22 is a plan view showing the manner in which a photosensitive resin layer larger than a prescribed length is bonded to a glass substrate;

图23是显示其中小于规定长度的感光树脂层被贴合到玻璃基片的方式的俯视图;Fig. 23 is a plan view showing the manner in which a photosensitive resin layer smaller than a prescribed length is bonded to a glass substrate;

图24是根据本发明第三实施例的制造装置的示意侧视图;24 is a schematic side view of a manufacturing apparatus according to a third embodiment of the present invention;

图25是根据第三实施例的制造装置的预剥离器的放大横断面视图;25 is an enlarged cross-sectional view of a pre-peeler of a manufacturing apparatus according to a third embodiment;

图26是显示其中预剥离器操作的方式的放大横断面图;Figure 26 is an enlarged cross-sectional view showing the manner in which the pre-peeler operates;

图27是其中探测贴合到玻璃基片的感光树脂层的位置的方式的视图;Fig. 27 is a view of the manner in which the position of the photosensitive resin layer bonded to the glass substrate is detected;

图28是传统的膜贴合装置的示意侧侧视图。Fig. 28 is a schematic side view of a conventional film bonding device.

具体实施方式Detailed ways

图1采用示意侧视图显示了根据本发明第一实施例的制造感光层叠体的装置20。在制造液晶或有机EL彩色滤波器的过程中,该制造装置20操作以将伸长感光连接板22的感光树脂层28(以后描述)热转移到玻璃基片24。FIG. 1 shows an apparatus 20 for manufacturing a photosensitive laminate according to a first embodiment of the present invention in a schematic side view. The manufacturing apparatus 20 operates to thermally transfer the photosensitive resin layer 28 (described later) of the elongated photosensitive web 22 to the glass substrate 24 in the process of manufacturing a liquid crystal or organic EL color filter.

图2以横断面显示了制造装置20中使用的感光连接板22。感光连接板22包括挠性底膜(支撑)26、设置在挠性底膜26上的感光树脂层(感光材料层)28;和设置在感光树脂层28上的保护膜30的层叠组件。FIG. 2 shows the photosensitive connection board 22 used in the manufacturing apparatus 20 in cross section. The photosensitive connection board 22 includes a laminated assembly of a flexible base film (support) 26 , a photosensitive resin layer (photosensitive material layer) 28 provided on the flexible base film 26 ; and a protective film 30 provided on the photosensitive resin layer 28 .

如图1所示,该制造装置20包括:卷出机构,其用于容纳采用卷起感光连接板22形式的感光连接板卷22a,和从感光连接板卷22a卷出感光连接板22;处理机构36,其用于形成位于从感光连接板卷22a卷出的感光连接板22的保护膜30中的横向可分离边界位置的部分切割区域(处理区域)34;和标签结合机构40,其用于将每个具有非粘性区域38a的粘附标签38(参见图3)粘结到保护膜30。As shown in Figure 1, the manufacturing device 20 includes: a roll-out mechanism for accommodating a photosensitive web roll 22a in the form of a rolled photosensitive web 22, and rolling out the photosensitive web 22 from the photosensitive web roll 22a; A mechanism 36 for forming a partial cut area (processing area) 34 at a laterally separable boundary position in the protective film 30 of the photosensitive web 22 unwound from the photosensitive web roll 22a; and a label bonding mechanism 40 for using Adhesive labels 38 (see FIG. 3 ) each having a non-adhesive area 38 a are bonded to the protective film 30 .

该制造装置20还具有:贮存(reservoir)机构42,其位于标签结合机构40的下游,用于将感光连接板22的馈送模式从间歇馈送模式改变为连续馈送模式;剥离机构44,其用于从感光连接板22剥离预定长度的保护膜30;基片馈送机构45,其用于将被加热到预定温度的玻璃基片24馈送到结合位置;和结合机构46,其用于将已通过剥离保护膜30暴露的感光树脂层28结合到玻璃基片24。This manufacturing device 20 also has: a storage (reservoir) mechanism 42, which is positioned at the downstream of the label bonding mechanism 40, for changing the feed mode of the photosensitive connection plate 22 from an intermittent feed mode to a continuous feed mode; a peeling mechanism 44 for Peel off the protective film 30 of predetermined length from photosensitive connecting plate 22; Substrate feeding mechanism 45, it is used to feed the glass substrate 24 that is heated to predetermined temperature to bonding position; The exposed photosensitive resin layer 28 of the protective film 30 is bonded to the glass substrate 24 .

探测机构47位于结合机构46中的结合位置的上游并接近结合机构46,用于直接探测在感光连接板22的边界位置处的部分切割区域34。基片间连接板切割机构48位于结合机构46的下游,用于切割相邻玻璃基片24之间的感光连接板22。连接板切割机构48a被设置在基片间连接板切割机构48的上游,其在制造装置20开始和结束操作时使用。The detection mechanism 47 is located upstream of the bonding position in the bonding mechanism 46 and close to the bonding mechanism 46 , and is used for directly detecting the partially cut region 34 at the boundary position of the photosensitive connecting plate 22 . The inter-substrate connecting plate cutting mechanism 48 is located downstream of the bonding mechanism 46 and is used for cutting the photosensitive connecting plate 22 between adjacent glass substrates 24 . A web cutting mechanism 48a is provided upstream of the inter-substrate web cutting mechanism 48, which is used when the manufacturing apparatus 20 starts and ends operations.

结合基座49位于卷出机构32的下游并接近卷出机构32,用于结合已实质用完的感光连接板22的末端和将新使用的感光连接板22的前端。该结合基座49的下游跟随着膜端部位置探测器51,该位置探测器51用于控制由于感光连接板辊22a的缠绕不规则感光连接板22的横向偏移。该感光连接板22的膜端部的位置通过横向运动卷出机构32调节。然而,感光连接板22的膜端部可由与辊组合的位置调节机构调节。该卷出机构32可包括由两个或三个退卷轴组成的多轴机构,用于支撑感光连接板辊22a并馈送出感光连接板22。The coupling base 49 is located downstream of the unwinding mechanism 32 and close to the unwinding mechanism 32 , and is used for coupling the end of the substantially used up photosensitive web 22 with the front end of the newly used photosensitive web 22 . Downstream of the bonding base 49 is followed a film end position detector 51 for controlling the lateral deviation of the photoweb 22 due to winding irregularities of the photoweb roll 22a. The position of the film end of the photosensitive web 22 is adjusted by the laterally moving unwinding mechanism 32 . However, the film end of the photosensitive web 22 can be adjusted by a position adjustment mechanism combined with a roller. The unwinding mechanism 32 may include a multi-axis mechanism composed of two or three unwinding shafts for supporting the photosensitive web roll 22 a and feeding out the photosensitive web 22 .

该处理机构36被设置在用于计算卷出机构32中累积的感光连接板卷22a的直径的各自辊对50的下游。该处理机构36具有单个圆形刀片52,该单个圆形刀片52横向行进经过感光连接板22以在感光连接板22中在其上给定位置处形成部分切割区域34。The processing mechanism 36 is provided downstream of the respective roller pairs 50 for calculating the diameter of the photoweb roll 22 a accumulated in the unwinding mechanism 32 . The processing mechanism 36 has a single circular blade 52 that travels laterally across the photosensitive web 22 to form a partially cut region 34 in the photosensitive web 22 at a given location thereon.

如图2所示,该部分切割区域34需要形成在保护膜30中并至少穿过保护膜30。实际上,为了可靠地切割保护膜30,该圆形刀片52被设置到足以切割入感光树脂层28或底膜26的切割深度。该圆形刀片52可以是固定的,不旋转,并被横向运动穿过感光连接板22以形成部分切割区域34;或可以在感光连接板22上无滑程地旋转,并横向运动穿过感光连接板22以形成部分切割区域34。该圆形刀片52可例如由激光束或超声波切刀、刀片或推进刀片(汤普森刀片)替换。As shown in FIG. 2 , the part of the cutting area 34 needs to be formed in the protective film 30 and at least pass through the protective film 30 . Actually, in order to reliably cut the protective film 30 , the circular blade 52 is set to a cutting depth sufficient to cut into the photosensitive resin layer 28 or the base film 26 . The circular blade 52 may be fixed, non-rotating, and moved laterally across the photosensitive web 22 to form the partial cutting region 34; or may rotate without slip on the photosensitive web 22 and move laterally across the photosensitive web 22. The plates 22 are joined to form a partial cutting area 34 . This circular blade 52 may for example be replaced by a laser beam or ultrasonic cutter, blade or advancing blade (Thompson blade).

该处理机构36可包含沿其中感光连接板22馈送的箭头A指示的方向以预定间隙设置的两个处理机构,用于同时形成两个部分切割区域34,剩余区30b介于其间。The processing mechanism 36 may include two processing mechanisms disposed with a predetermined gap along the direction indicated by the arrow A in which the photosensitive web 22 is fed, for simultaneously forming two partially cut regions 34 with the remaining region 30b interposed therebetween.

在保护膜30中形成的两个接近间隔的部分切割区域34用于在两个相邻玻璃基片24之间设置间隔间隙。例如,这些部分切割区域34形成在从玻璃基片24的各个边缘向内间隔10mm的位置处的保护膜30中。该保护膜30的部分介于部分切割区域34之间并暴露在玻璃基片24之间,当感光树脂层28在将在后面描述的结合机构46中作为框架贴合到玻璃基片24上时,该保护膜30用作掩膜。Two closely spaced partially cut regions 34 formed in the protective film 30 serve to provide a separation gap between two adjacent glass substrates 24 . These partially cut regions 34 are formed in the protective film 30 at positions spaced inwardly from the respective edges of the glass substrate 24 by 10 mm, for example. The part of this protective film 30 is between the partial cutting regions 34 and is exposed between the glass substrates 24. , the protective film 30 is used as a mask.

该标签结合机构40供应用于相互连接前剥离区30aa和后剥离区30ab的粘附标签38,以将保护膜30的剩余区30b留在玻璃基片24之间。如图2所示,将被最初剥离的前剥离区30aa和将被后面剥离的后剥离区30ab被定位在剩余区30b的各自两侧上。The label bonding mechanism 40 supplies an adhesive label 38 for interconnecting the front peel area 30aa and the rear peel area 30ab to leave the remaining area 30b of the protective film 30 between the glass substrates 24 . As shown in FIG. 2, a front peeling region 30aa to be peeled initially and a rear peeling region 30ab to be peeled later are positioned on respective both sides of the remaining region 30b.

如图3所示,每个粘附标签38是矩形条形状,并由与保护膜30相同的材料制成。每个粘附标签38具有:位于中央的无粘性的非-粘附(或微粘性)区域38a;和第一粘性区域38b和第二粘性区域38c,其分别被设置在非粘性区域38a的相反侧(粘附侧)的纵向相对端上,即粘附标签38的纵向相反端部上,第一粘性区域38b和第二粘性区域38c被分别结合到前剥离区30aa和后剥离区30ab。As shown in FIG. 3 , each adhesive label 38 is in the shape of a rectangular strip, and is made of the same material as the protective film 30 . Each adhesive label 38 has: a non-adhesive non-adhesive (or slightly adhesive) area 38a located at the center; On the longitudinally opposite ends of the side (adhesive side), that is, on the longitudinally opposite ends of the adhesive label 38, a first adhesive region 38b and a second adhesive region 38c are bonded to the front peeling area 30aa and the rear peeling area 30ab, respectively.

如图1所示,标签结合机构40具有吸盘54a到54e,用于以预定间隙最多贴合5张粘附标签38。支撑基座56可垂直运动用于从下方保持感光连接板22,该支撑基座56被设置在其中由吸盘54a到54e将粘附标签38贴合到感光连接板22处的位置。As shown in FIG. 1, the label bonding mechanism 40 has suction cups 54a to 54e for bonding up to five adhesive labels 38 with a predetermined gap. The support base 56 vertically movable for holding the photosensitive connection board 22 from below is provided at a position where the adhesive label 38 is attached to the photosensitive connection board 22 by the suction cups 54a to 54e.

该贮存机构42消减了其中感光连接板22被馈送到贮存机构42上游的间歇馈送模式与其中感光连接板22被馈送到贮存机构42下游的连续馈送模式之间的速度差。该贮存机构42具有包括可旋转并可摆动用于阻止张力变化的两个距离辊60的跳跃辊单元61。根据连接板的期望贮存量,该跳跃辊单元61可仅包括一个辊或包括三个或更多辊。The storage mechanism 42 bridges the speed difference between the intermittent feed mode in which the photosensitive web 22 is fed upstream of the storage mechanism 42 and the continuous feed mode in which the photosensitive web 22 is fed downstream of the storage mechanism 42 . The storage mechanism 42 has a jumping roller unit 61 including two distance rollers 60 that are rotatable and swingable for preventing changes in tension. Depending on the desired storage capacity of the web, the skip roller unit 61 may comprise only one roller or three or more rollers.

剥离机构44设置在贮存机构42的下游,该剥离机构44具有吸鼓62,用于阻止供应的感光连接板22受到的张力变化,从而稳定它随后被层叠时感光连接板22的张力。该剥离机构44还具有设置接近吸鼓62的剥离辊63。保护膜30以尖锐的剥离角从感光连接板22剥去,除剩余区30b外,保护膜30被保护膜收紧单元64缠绕。Disposed downstream of the storage mechanism 42 is a peeling mechanism 44 having a suction drum 62 for resisting changes in tension to which the supplied photosensitive web 22 is subjected, thereby stabilizing the tension of the photosensitive web 22 when it is subsequently laminated. This peeling mechanism 44 also has a peeling roller 63 provided close to the suction drum 62 . The protective film 30 is peeled off from the photosensitive connecting plate 22 at a sharp peeling angle, and the protective film 30 is wound by the protective film tightening unit 64 except for the remaining area 30b.

用于将张力传送到感光连接板22的张力控制机构66被设置在剥离机构44的下游。该张力控制机构66具有汽缸68,该汽缸68可驱使以角度移位张力跳动器70以调节与张力跳动器70保持滚动接触的感光连接板22。该张力控制机构66可仅在需要时使用,并可省略。A tension control mechanism 66 for transmitting tension to the photosensitive web 22 is provided downstream of the peeling mechanism 44 . The tension control mechanism 66 has a cylinder 68 actuatable to angularly displace a tension jumper 70 to adjust the photosensitive web 22 in rolling contact with the tension jumper 70 . The tension control mechanism 66 can only be used when necessary and can be omitted.

该探测机构47具有诸如激光传感器、光敏器件或相类似物的光电传感器72,用于直接探测由于部分切割区域34中的楔形槽、由不同厚度的保护膜30产生的台阶或其组合的感光连接板22的变化。来自光电传感器72的探测信号被用作代表保护膜30中的边界位置的边界位置信号。该光电传感器72以面对垫辊73的关系设置。可选地,代替光电传感器72,可以使用非接触型位移计或诸如CCD照相机或相类似物的图像检查装置。The detection mechanism 47 has a photoelectric sensor 72, such as a laser sensor, a photosensitive device or the like, for direct detection of photosensitive connections due to wedge-shaped grooves in the partly cut area 34, steps produced by the protective film 30 of different thicknesses, or a combination thereof. Plate 22 changes. The detection signal from the photosensor 72 is used as a boundary position signal representing a boundary position in the protective film 30 . The photoelectric sensor 72 is provided in a relationship facing the pad roller 73 . Alternatively, instead of the photoelectric sensor 72, a non-contact type displacement meter or an image inspection device such as a CCD camera or the like may be used.

由探测机构47探测的部分切割区域34的位置数据能够得到统计处理,并实时地被转换为图形数据。当探测机构47探测的位置数据显示过度变化或偏差时,制造装置20会发出告警。The position data of the partial cutting area 34 detected by the detection mechanism 47 can be statistically processed and converted into graphic data in real time. When the position data detected by the detection mechanism 47 shows excessive changes or deviations, the manufacturing device 20 will issue an alarm.

为产生边界位置信号,该制造装置20可使用不同系统。根据这种不同系统,部分切割区域34不被直接探测,但标记被贴合于感光连接板22。例如,在处理机构36附近,孔就凹陷可形成在部分切割区域34附近的感光连接板22中;或者感光连接板22可被激光束或水流喷射切开,或可由喷墨打印机或打印机标记。感光连接板22上的标记被探测,并且探测信号被用作边界位置信号。For generating boundary position signals, the manufacturing device 20 can use different systems. According to this different system, the partially cut area 34 is not detected directly, but the markings are attached to the photosensitive web 22 . For example, holes may be recessed in the photosensitive web 22 near the partially cut region 34 near the processing mechanism 36; or the photosensitive web 22 may be cut by a laser beam or water jet, or may be marked by an inkjet printer or printer. Marks on the photosensitive web 22 are detected, and the detection signal is used as a boundary position signal.

该基片馈送机构45具有:设置用于夹在中间并加热玻璃基片24的多个基片加热单元(例如,加热器)74;和馈送器76,其用于沿箭头C指示的方向馈送玻璃基片24。该基片加热器单元74中的玻璃基片24的温度一直被监视。当监视的玻璃基片24温度异常时,使馈送器76不活动(inactivated),并发出告警,并且异常信息被发送以在后续进程中拒绝并排出玻璃基片24,并且还用于质量控制和生产管理。该馈送器76具有用于沿箭头C指示的方向浮动和馈送玻璃基片24的空气浮动板(未示出)。代替地,该馈送器76可包括用于馈送玻璃基片24的辊输送器。This substrate feeding mechanism 45 has: a plurality of substrate heating units (for example, heaters) 74 provided to sandwich and heat the glass substrate 24; and a feeder 76 for feeding in the direction indicated by arrow C Glass substrate 24. The temperature of the glass substrate 24 in the substrate heater unit 74 is constantly monitored. When the temperature of the monitored glass substrate 24 is abnormal, the feeder 76 is inactivated, and an alarm is issued, and the abnormal information is sent to reject and discharge the glass substrate 24 in the follow-up process, and is also used for quality control and production management. The feeder 76 has an air floating plate (not shown) for floating and feeding the glass substrate 24 in the direction indicated by the arrow C. As shown in FIG. Alternatively, the feeder 76 may comprise a roller conveyor for feeding the glass substrate 24 .

根据接触处理(例如使用热电偶)或非接触处理,玻璃基片24的温度应优选地在基片加热单元74中测量,或就在接合位置前。Depending on the contact process (eg using a thermocouple) or non-contact process, the temperature of the glass substrate 24 should preferably be measured in the substrate heating unit 74, or just before the bonding location.

存储多个玻璃基片24用的基片存储机架71被设置在基片加热单元74的上游。机器人75的手75a上的吸盘79一个接一个地吸附在基片存储机架71中存储的玻璃基片24,从基片存储机架71取出,并插入基片加热单元74。A substrate storage rack 71 for storing a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74 . The suction cup 79 on the hand 75 a of the robot 75 sucks the glass substrates 24 stored in the substrate storage rack 71 one by one, takes them out from the substrate storage rack 71 , and inserts them into the substrate heating unit 74 .

挡块77和位置传感器78位于基片加热单元74的下游,挡块77用于紧靠玻璃基片24的前端并保持玻璃基片24,位置传感器78用于探测玻璃基片24的前端的位置。在其向着结合位置的通路上,该位置传感器78探测玻璃基片24的前端的位置。在位置传感器78已探测到玻璃基片24的前端的位置后,该玻璃基片24被馈送预定距离,并位于结合机构46的橡胶辊80a,80b之间。优选地,多个位置传感器78沿馈送通路以预定间隔设置,用于监视玻璃基片24到达位置传感器78的各个位置的时刻,从而在玻璃基片24开始馈送时,检查由于玻璃基片24的滑动或相类似物的延迟。在图1中,在玻璃基片24被馈送的同时,玻璃基片24被基片加热单元加热。然而,玻璃基片24可在批量加热炉中加热,并被机器人馈送。Stopper 77 and position sensor 78 are positioned at the downstream of substrate heating unit 74, and stopper 77 is used for being close to the front end of glass substrate 24 and keeps glass substrate 24, and position sensor 78 is used for detecting the position of the front end of glass substrate 24 . On its way to the bonding position, the position sensor 78 detects the position of the front end of the glass substrate 24 . After the position sensor 78 has detected the position of the front end of the glass substrate 24 , the glass substrate 24 is fed a predetermined distance and positioned between the rubber rollers 80 a , 80 b of the bonding mechanism 46 . Preferably, a plurality of position sensors 78 are arranged at predetermined intervals along the feeding path for monitoring the timing at which the glass substrate 24 reaches the respective positions of the position sensors 78, thereby checking the Swipe or similar delay. In FIG. 1, the glass substrate 24 is heated by the substrate heating unit while the glass substrate 24 is being fed. However, the glass substrate 24 can be heated in a batch furnace and fed by a robot.

该结合机构46具有能够加热到预定温度的一对垂直间隔的层叠橡胶辊80a,80b。该结合机构46还具有分别与橡胶辊80a,80b滚动接触地保持的一对垫辊(backup roller)82a,82b。该垫辊82b被辊夹单元(roller clamp unit)83按靠在橡胶辊80b上。The bonding mechanism 46 has a pair of vertically spaced laminated rubber rollers 80a, 80b capable of being heated to a predetermined temperature. The bonding mechanism 46 also has a pair of backup rollers 82a, 82b held in rolling contact with the rubber rollers 80a, 80b, respectively. The backup roller 82b is pressed against the rubber roller 80b by a roller clamp unit 83.

如图4所示,该辊夹单元83具有驱动电机(致动器)93,该电机(致动器)93的驱动轴联接到被同轴地连接到滚珠螺杆94的驱动轴93b的减速器93a。螺帽95拧在滚珠螺杆94上,并被安装到滑动基座96。沿箭头B指示的感光连接板22的横向方向,锥形凸轮97a,97b被固定地安装在滑动基座96的各个相对端上。锥形凸轮97a,97b沿箭头B1指示的方向逐渐变高。辊98a,98b被放置在各个锥形凸轮97a,97b上,并被保持在按压汽缸84a,84b的各自下端。As shown in FIG. 4 , the roller clamp unit 83 has a drive motor (actuator) 93 whose drive shaft is coupled to a speed reducer that is coaxially connected to a drive shaft 93b of a ball screw 94. 93a. The nut 95 is screwed onto the ball screw 94 and mounted to the slide base 96 . Conical cams 97a, 97b are fixedly mounted on respective opposite ends of the slide base 96 in the transverse direction of the photosensitive connection plate 22 indicated by arrow B. As shown in FIG. The tapered cams 97a, 97b gradually become higher in the direction indicated by the arrow B1. The rollers 98a, 98b are placed on the respective conical cams 97a, 97b and are held at the respective lower ends of the pressing cylinders 84a, 84b.

如图1所示,接触防止辊86被可移动地设置在橡胶辊80a附近,用于防止感光连接板22接触橡胶辊80a。预加热单元87被设置在结合机构46的上游并接近结合机构46,用于将感光连接板22预先加热到预定温度。该预加热单元87包括红外加热棒或热量施加装置。As shown in FIG. 1 , a contact preventing roller 86 is movably disposed near the rubber roller 80 a for preventing the photosensitive web 22 from contacting the rubber roller 80 a. The preheating unit 87 is disposed upstream of the bonding mechanism 46 and close to the bonding mechanism 46 for preheating the photosensitive web 22 to a predetermined temperature. The pre-heating unit 87 includes an infrared heating rod or heat application device.

沿由箭头C指示的方向延伸的馈送通路88,玻璃基片24经基片间连接板切割机构48从接合机构46馈送。该馈送通路88包括包括膜馈送辊90和基片馈送辊92、连接板切割机构48a介于其间的辊排列。该橡胶辊80a,80b和基片馈送辊92之间的距离等于或小于一个玻璃基片24的长度。Along the feed path 88 extending in the direction indicated by the arrow C, the glass substrate 24 is fed from the bonding mechanism 46 via the inter-substrate web cutting mechanism 48 . The feed path 88 includes a roller array including a film feed roller 90 and a substrate feed roller 92 with the web cutting mechanism 48a interposed therebetween. The distance between the rubber rollers 80a, 80b and the substrate feed roller 92 is equal to or less than the length of one glass substrate 24.

在制造装置20中,卷出机构32、处理机构36、标签粘结机构40、贮存机构42、剥去机构44、张力控制机构66和探测机构47被设置在结合机构46上方。在制造装置20中,卷出机构32、处理机构36、标签粘结机构40、贮存机构42、剥去机构44、张力控制机构66和探测机构47可被设置在结合机构46下方,以便:感光连接板22可被颠倒地传送,以便:感光树脂层28被结合到玻璃基片24的下表面。可选地,制造装置20的所有机构可被线性地布置。In the manufacturing device 20 , the unwinding mechanism 32 , the processing mechanism 36 , the label bonding mechanism 40 , the storage mechanism 42 , the peeling mechanism 44 , the tension control mechanism 66 and the detection mechanism 47 are arranged above the bonding mechanism 46 . In the manufacturing device 20, the unwinding mechanism 32, the processing mechanism 36, the label bonding mechanism 40, the storage mechanism 42, the peeling mechanism 44, the tension control mechanism 66 and the detection mechanism 47 can be arranged under the bonding mechanism 46, so as to: The web 22 may be conveyed upside down so that the photosensitive resin layer 28 is bonded to the lower surface of the glass substrate 24 . Alternatively, all mechanisms of the manufacturing device 20 may be arranged linearly.

如图1所示,该制造装置20整体由层叠处理控制器100控制。该制造装置20还具有:层叠控制器102;基片加热控制器104等,用于控制制造装置20的不同功能部分。这些控制器由进程中网络相互连接。该层叠进程控制器100被连接到该制造装置20所属工厂的网络,并基于来自工厂CPU(未示出)的指令信息(条件装置和生产信息)执行生产信息处理,例如,生产管理和机构操作管理。As shown in FIG. 1 , the entire manufacturing apparatus 20 is controlled by a lamination process controller 100 . The manufacturing device 20 also has: a lamination controller 102 ; a substrate heating controller 104 , etc., for controlling different functional parts of the manufacturing device 20 . These controllers are interconnected by an in-process network. The lamination process controller 100 is connected to the network of the factory to which the manufacturing device 20 belongs, and executes production information processing based on instruction information (condition device and production information) from the factory CPU (not shown), such as production management and mechanism operation manage.

该基片加热控制器104控制基片加热单元74以从上游进程接收玻璃基片24,并将接收的玻璃基片24加热到期望的温度,控制馈送器76以将加热过的玻璃基片24馈送到结合机构46;并且还控制有关玻璃基片24的信息的处理。The substrate heating controller 104 controls the substrate heating unit 74 to receive the glass substrate 24 from an upstream process and heats the received glass substrate 24 to a desired temperature, and controls the feeder 76 to feed the heated glass substrate 24 feeds to the bonding mechanism 46; and also controls the processing of information about the glass substrate 24.

该层叠控制器102用作进程管理器,用于控制制造装置20的功能部件。该层叠控制器102作为控制机构,用于基于由探测机构47探测的感光连接板22的部分切割区域34的位置信息,例如控制基片馈送机构45。The stack controller 102 functions as a process manager for controlling the functional components of the manufacturing apparatus 20 . The lamination controller 102 serves as a control mechanism for, for example, controlling the substrate feeding mechanism 45 based on the position information of the partial cut region 34 of the photosensitive web 22 detected by the detection mechanism 47 .

制造装置20的安装空间被分隔壁110分成第一无尘室112a和第二无尘室112b。第一无尘室112a中容纳着卷出机构32、处理机构36、标签粘结机构40、贮存机构42、剥去机构44和张力控制机构66。第二无尘室112b中容纳着探测机构47和探测机构47后的其它部件。第一无尘室112a和第二无尘室112b由连通区域114彼此连接。The installation space of the manufacturing apparatus 20 is divided into a first clean room 112 a and a second clean room 112 b by a partition wall 110 . The first clean room 112 a accommodates the unwinding mechanism 32 , the handling mechanism 36 , the label bonding mechanism 40 , the storage mechanism 42 , the stripping mechanism 44 and the tension control mechanism 66 . The detection mechanism 47 and other components behind the detection mechanism 47 are accommodated in the second clean room 112b. The first clean room 112 a and the second clean room 112 b are connected to each other by a communication area 114 .

如图5所示,连通区域114具有设置在第一无尘室112a中的除尘器115和设置在第二无尘室112b中的气封器116。As shown in FIG. 5, the communication area 114 has a dust remover 115 provided in the first clean room 112a and an air sealer 116 provided in the second clean room 112b.

该除尘器115具有:以面对感光连接板22的相对表面的关系设置的一对吸嘴117a;和分别设置在吸嘴117a中的一对喷嘴118。该喷嘴118将空气喷射到感光连接板22以从感光连接板22去除灰尘颗粒;并且吸嘴117a抽取喷射空气和去除的灰尘颗粒。优选地,自喷嘴118的空气可以是电中性(或抗静电)空气。The dust remover 115 has: a pair of suction nozzles 117a provided in a relationship facing the opposite surface of the photosensitive web 22; and a pair of nozzles 118 respectively provided in the suction nozzles 117a. The nozzle 118 sprays air to the photosensitive connection board 22 to remove dust particles from the photosensitive connection board 22 ; and the suction nozzle 117 a sucks the sprayed air and the removed dust particles. Preferably, the air from the nozzle 118 may be electrically neutral (or antistatic) air.

该气封器116具有以面对感光连接板22的相对表面的关系设置的一对吸嘴117b。该吸嘴117b抽取空气以密封通过区域114。该除尘器115和气封器116的位置可互换;或可彼此结合多个除尘器115和多个气封器116。仅吸嘴117a,但不是喷嘴118,可以与其中暴露感光树脂层28的感光连接板22的侧面面对的关系设置。The air sealer 116 has a pair of suction nozzles 117b provided in a relationship facing opposite surfaces of the photosensitive connection board 22 . The suction nozzle 117b draws air to seal through the area 114 . The positions of the precipitator 115 and the gas sealer 116 may be interchanged; or a plurality of dust removers 115 and a plurality of gas sealers 116 may be combined with each other. Only the suction nozzle 117a, but not the nozzle 118, may be disposed in facing relationship to the side of the photosensitive connection board 22 in which the photosensitive resin layer 28 is exposed.

在制造装置20中,分隔壁110防止自结合机构46的加热空气热影响感光连接板22,即起皱、变形、热收缩或拉伸感光连接板22。分隔壁110将制造装置20的上部区域(即容易出现灰尘颗粒的第一无尘室112a)与制造装置20的下部区域(即第二无尘室112b)分离,从而保持结合机构46特别清洁。期望地,保持第二无尘室112b中的压力比第一无尘室112a中的压力更高,从而防止灰尘颗粒从第一无尘室112a流入第二无尘室112b。In the manufacturing apparatus 20 , the partition wall 110 prevents the heated air from the bonding mechanism 46 from thermally affecting the photosensitive web 22 , that is, wrinkling, deforming, thermally shrinking or stretching the photosensitive web 22 . The partition wall 110 separates the upper area of the manufacturing device 20 (ie the first clean room 112a prone to dust particles) from the lower area of the manufacturing device 20 (ie the second clean room 112b ), thereby keeping the coupling mechanism 46 particularly clean. Desirably, the pressure in the second clean chamber 112b is maintained higher than the pressure in the first clean chamber 112a to prevent dust particles from flowing from the first clean chamber 112a into the second clean chamber 112b.

空气供应装置(未示出)用于供应向下流的清洁空气,其被设置在第二无尘室112b的上部。An air supply device (not shown) for supplying clean air flowing down is provided at an upper portion of the second clean room 112b.

以下将描述用于执行根据本发明的制造方法的制造装置20的操作。The operation of the manufacturing apparatus 20 for performing the manufacturing method according to the present invention will be described below.

最初地,为了定位感光连接板的前端,感光连接板22被从容纳在卷出机构32中的感光连接板卷22a退卷。该感光连接板22经加工机构36、标签粘结机构40、贮存机构42、剥离机构44和结合机构46传送到膜馈送辊90。该感光连接板22的前端由膜馈送辊90挤压。Initially, in order to position the front end of the photo-web, the photo-web 22 is unwound from the photo-web roll 22 a housed in the unwinding mechanism 32 . The photosensitive web 22 is conveyed to the film feed roll 90 via the processing mechanism 36 , label bonding mechanism 40 , storage mechanism 42 , peeling mechanism 44 and bonding mechanism 46 . The front end of the photosensitive web 22 is pressed by the film feed roller 90 .

当部分切割区域34被光电传感器72探测到时,膜馈送辊90基于来自光电传感器72的探测信号旋转。利用膜馈送辊22,该感光连接板22现在被馈送预定距离到结合位置。该部分切割区域34对应于结合位置定位。可选地,可在结合位置的下游位置探测部分切割区域34,并且感光连接板22可停止在预定位置处。When the partially cut area 34 is detected by the photoelectric sensor 72 , the film feed roller 90 rotates based on the detection signal from the photoelectric sensor 72 . With the film feed roller 22, the photosensitive web 22 is now fed a predetermined distance to the bonding position. The partially cut region 34 is positioned corresponding to the bonding location. Alternatively, the partially cut region 34 may be detected at a position downstream of the bonding position, and the photosensitive web 22 may be stopped at a predetermined position.

如图6所示,防止接触辊86被下降以防止感光连接板22接触橡胶辊80a。该玻璃基片24恰好在结合位置前等待。该感光连接板22现在处于制造装置20的初始状态。As shown in FIG. 6, the contact preventing roller 86 is lowered to prevent the photosensitive web 22 from contacting the rubber roller 80a. The glass substrate 24 waits just before the bonding position. The photosensitive connection plate 22 is now in the initial state of the manufacturing device 20 .

以下将描述在层叠模式中制造装置20功能部件的操作。The operation of manufacturing the functional parts of the device 20 in the lamination mode will be described below.

如图1所示,在处理机构36中,圆形刀片52横向运动穿过感光连接板22,以切入保护膜30、感光树脂层28和底膜26,从而形成部分切割区域34(参见图2)。然后,沿箭头A指示的方向(参见图1),该感光连接板22被再次馈送对应于保护膜30的剩余区30b的尺寸的距离,并且然后停止,于是圆形刀片52在其中形成另一部分切割区域34。如图2所示,前剥离区30aa和后剥离区30ab现在被设置在感光连接板22中,剩余区30b介于其间。As shown in Figure 1, in the processing mechanism 36, the circular blade 52 moves laterally through the photosensitive connecting plate 22 to cut into the protective film 30, the photosensitive resin layer 28 and the base film 26, thereby forming a part of the cutting area 34 (see Figure 2 ). Then, along the direction indicated by arrow A (see FIG. 1 ), the photosensitive connection plate 22 is fed again by a distance corresponding to the size of the remaining area 30b of the protective film 30, and then stops, so that the circular blade 52 forms another part therein Cutting area 34. As shown in FIG. 2, the front peeling area 30aa and the rear peeling area 30ab are now disposed in the photosensitive web 22 with the remaining area 30b interposed therebetween.

然后,该感光连接板22被馈送到标签结合机构40,以将保护膜30的预定结合区域放置在支撑基座56上。在标签粘结机构40中,预定数目的粘性标签38在吸力下被吸引,并被吸盘54b到54e保持,并横过其剩余区30b,被紧固地粘结到保持膜30的前剥离区33aa和后剥离区30ab(参见图3)。Then, the photosensitive web 22 is fed to the label bonding mechanism 40 to place the predetermined bonding area of the protective film 30 on the support base 56 . In the label bonding mechanism 40, a predetermined number of adhesive labels 38 are attracted by suction and held by the suction cups 54b to 54e, and are firmly bonded to the front peeling area of the holding film 30 across the remaining area 30b thereof. 33aa and post-stripping region 30ab (see Figure 3).

例如5个粘性标签38结合到其上的感光连接板22被贮存机构42隔离所供应的感光连接板22受到的张力变化,并且然后被连续馈送到剥离机构44。如图7所示,在剥离机构44中,感光连接板22的底膜26被吸引到吸鼓62,并且保护膜30被从感光连接板22剥离,留下剩余区30b。该保护膜30被以尖锐的剥离角剥离,并由保护膜收紧单元64缠绕(参见图1)。优选地,电中性空气可吹在剥离部上。The photosensitive web 22 to which, for example, 5 adhesive labels 38 are bonded is isolated by the storage mechanism 42 from tension variations to which the supplied photosensitive web 22 is subjected, and is then continuously fed to the peeling mechanism 44 . As shown in FIG. 7, in the peeling mechanism 44, the base film 26 of the photosensitive web 22 is attracted to the suction drum 62, and the protective film 30 is peeled off from the photosensitive web 22, leaving a remaining area 30b. The protective film 30 is peeled off at a sharp peeling angle, and wound by the protective film take-up unit 64 (see FIG. 1 ). Preferably, electrically neutral air can be blown on the peeled-off portion.

在此时,由于感光连接板22被吸鼓62紧固地保持,保护膜30被从感光连接板22剥离时产生的震动不会被传送到吸鼓62下游的感光连接板22。因此,这种震动不会传送到接合机构46,并且因此,玻璃基片24的层叠部分被有效地防止发展成条状缺陷区域。At this time, since the photosensitive web 22 is firmly held by the suction drum 62 , the shock generated when the protective film 30 is peeled off from the photosensitive web 22 is not transmitted to the photosensitive web 22 downstream of the suction drum 62 . Therefore, such shock is not transmitted to the bonding mechanism 46, and thus, the laminated portion of the glass substrate 24 is effectively prevented from developing into a stripe-shaped defect region.

在剥离机构44已从底膜26剥离保护膜30后,留着剩余区30b,张力控制机构66调节感光连接板纸22的张力;并且然后,探测机构47的光电传感器72探测感光连接板22的部分切割区域34。After the peeling mechanism 44 has peeled the protective film 30 from the base film 26, leaving the remaining area 30b, the tension control mechanism 66 regulates the tension of the photosensitive connection board paper 22; Partially cut area 34 .

基于部分切割区域34的探测信号,膜馈送辊90被旋转以馈送感光连接板22预定长度到结合机构46。此时,接触防止辊86在感光连接板22上方等待,并且橡胶辊80b被设置在感光连接板22下。Based on the detection signal of the partial cutting area 34 , the film feed roller 90 is rotated to feed the photosensitive web 22 to the bonding mechanism 46 by a predetermined length. At this time, the contact prevention roller 86 waits above the photosensitive web 22 , and the rubber roller 80 b is disposed under the photosensitive web 22 .

如图8所示,经预加热的第一玻璃基片24被基片馈送机构45馈送到结合位置。该玻璃基片24被暂时定位在橡胶辊80a,80b之间,以与感光连接板22的结合感光树脂层28对准。As shown in FIG. 8 , the preheated first glass substrate 24 is fed to the bonding position by a substrate feeding mechanism 45 . The glass substrate 24 is temporarily positioned between the rubber rollers 80a, 80b to align with the bonded photosensitive resin layer 28 of the photosensitive web 22.

然后,如图4所示,该滚球螺杆94由联接到驱动电机93的减速器93a沿特定方向旋转,与拧在滚球螺杆94上的螺母95一起,沿由箭头B2指示的方向运动滑动基座96。因此,锥形凸轮97a,97b使其与凸起的辊98a,98b接触的凸轮表面上升,使辊98a,98b向上移位。该按压汽缸84a,84b被升起,升高垫辊82b和橡胶辊80b以预定按压压力将玻璃基片24夹在橡胶80a,80b之间。此时,按压压力被供应到按压汽缸84a,84b的空气压力调节。该橡胶辊80a被旋转以将由热量融化的感光树脂层28传送,即层叠,到玻璃基片24。Then, as shown in FIG. 4, the ball screw 94 is rotated in a specific direction by the speed reducer 93a coupled to the drive motor 93, and together with the nut 95 screwed on the ball screw 94, moves and slides in the direction indicated by the arrow B2. Base 96. Thus, the tapered cams 97a, 97b raise their cam surfaces in contact with the raised rollers 98a, 98b, displacing the rollers 98a, 98b upwardly. The pressing cylinders 84a, 84b are raised, and the pad roller 82b and the rubber roller 80b are raised to sandwich the glass substrate 24 between the rubbers 80a, 80b at a predetermined pressing pressure. At this time, the pressing pressure is regulated by the air pressure supplied to the pressing cylinders 84a, 84b. The rubber roller 80 a is rotated to transfer, ie, laminate, the photosensitive resin layer 28 melted by heat to the glass substrate 24 .

该感光树脂层28在如下条件下被层叠在玻璃基片24上:感光树脂层28以范围从1.0m/min.到10.0m/min的速度馈送;橡胶辊80a,80b具有范围从100℃到150℃的温度,并且硬度范围从40到90;并且施加范围从50N/cm到400N/cm的压力(线压力)。The photosensitive resin layer 28 is laminated on the glass substrate 24 under the following conditions: the photosensitive resin layer 28 is fed at a speed ranging from 1.0 m/min. to 10.0 m/min; A temperature of 150° C., and a hardness ranging from 40 to 90; and applying a pressure ranging from 50 N/cm to 400 N/cm (linear pressure).

如图9所示,当玻璃基片24的前端到达接近膜馈送辊90的位置时,该膜馈送辊90从玻璃基片24运动离开。当沿由箭头C指示的方向从玻璃基片24向前突起的感光连接板22的前端到达相对于连接板切割机构48a的预定位置时,连接板切割机构48a启动以切断感光连接板22的前端。除了切断感光连接板22的前端的时刻,操作终止的时刻和在故障的情况中切割感光连接板22的时刻,该连接板切割机构48a返回到其待用位置。在制造装置20正常工作时,该连接板切割机构48a将不会使用。As shown in FIG. 9 , when the front end of the glass substrate 24 reaches a position close to the film feed roller 90 , the film feed roller 90 moves away from the glass substrate 24 . When the front end of the photosensitive web 22 protruding forward from the glass substrate 24 in the direction indicated by the arrow C reaches a predetermined position relative to the web cutting mechanism 48a, the web cutting mechanism 48a is activated to cut off the front end of the photosensitive web 22. . Except for the timing of cutting the front end of the photosensitive web 22 , the timing of operation termination and the timing of cutting the photosensitive web 22 in case of failure, the web cutting mechanism 48 a returns to its standby position. When the manufacturing device 20 is working normally, the web cutting mechanism 48a will not be used.

如图10所示,当感光连接板22已被橡胶辊80a,80b层叠在玻璃基片24上直到其尾端时,橡胶辊80a,80b停止旋转,并且由基片馈送辊92夹着具有层叠感光连接板22的玻璃基片24(也称作“结合基片24a”)。As shown in FIG. 10, when the photosensitive web 22 has been laminated on the glass substrate 24 by the rubber rollers 80a, 80b up to its trailing end, the rubber rollers 80a, 80b stop rotating, and are sandwiched by the substrate feed rollers 92 with the laminated film. The glass substrate 24 of the photosensitive connection board 22 (also referred to as "bonding substrate 24a").

该橡胶辊80b从橡胶辊80a缩回,松开结合基片24a。特别地,如图4所示,联接到驱动电机93的减速器93a反转,导致滚珠螺杆94和螺母95沿箭头B1指示的方向运动滑动底部96。因此,锥形凸轮97a,97b使其与辊98a,98b接触的凸轮表面下降,使按压汽缸84a,84b向下移位。该垫辊82b和橡胶辊80b被降低,松开结合基片24a。The rubber roller 80b retracts from the rubber roller 80a, releasing the bonded substrate 24a. Specifically, as shown in FIG. 4 , the speed reducer 93 a coupled to the driving motor 93 is reversed, causing the ball screw 94 and the nut 95 to move in the direction indicated by the arrow B1 to slide the bottom 96 . Accordingly, the tapered cams 97a, 97b lower their cam surfaces contacting the rollers 98a, 98b, displacing the pressing cylinders 84a, 84b downward. The backup roller 82b and rubber roller 80b are lowered, releasing the bonded substrate 24a.

该基片馈送辊92然后开始旋转以将结合基片24a沿箭头C指示的方向馈送预定距离。将被送到两个相邻玻璃基片24之间的感光连接板22的位置22b现在被移位到橡胶辊80a下的位置。下一玻璃基片24被基片馈送机构45向前馈送到结合位置。当下一玻璃基片24的前端被定位在橡胶辊80a,80b之间时,该橡胶辊80b被抬升,将下一玻璃基片24和感光连接板22夹在橡胶辊80a,80b之间。同时,基片馈送辊92夹着结合基片24a。橡胶辊80a,80b和基片馈送辊92被旋转以开始将感光连接板22层叠在玻璃基片24上,并且箭头C指示的方向馈送结合基片24a(参见图11)。The substrate feed roller 92 then starts to rotate to feed the bonded substrate 24a in the direction indicated by arrow C by a predetermined distance. The position 22b of the photosensitive web 22 to be fed between two adjacent glass substrates 24 is now displaced to a position under the rubber roller 80a. The next glass substrate 24 is fed forward by the substrate feed mechanism 45 to the bonding position. When the front end of the next glass substrate 24 is positioned between the rubber rollers 80a, 80b, the rubber roller 80b is lifted, sandwiching the next glass substrate 24 and photosensitive web 22 between the rubber rollers 80a, 80b. At the same time, the substrate feed rollers 92 sandwich the bonded substrate 24a. The rubber rollers 80a, 80b and the substrate feed roller 92 are rotated to start laminating the photosensitive web 22 on the glass substrate 24, and feed the bonded substrate 24a in the direction indicated by arrow C (see FIG. 11).

此时,如图12所示,该结合基片24a的相对端覆盖着各个剩余区30b。At this time, as shown in FIG. 12, the opposite ends of the bonded substrate 24a cover the respective remaining regions 30b.

如图13所示,当第一结合基片24a的后端到达基片馈送辊92时,该基片馈送辊92的上面一个被抬升以松开第一基片24a,并且基片馈送辊92的下面一个和馈送通路88的其它辊被连续旋转以馈送结合基片24a。当下一个,即第二个结合基片24a的后端到达橡胶辊80a,80b附近的位置时,该橡胶辊80a,80b和基片馈送辊92停止旋转。该基片馈送辊92的上面一个被降低以夹住第二结合基片24a,并且橡胶辊80b被降低以松开第二结合基片24a。然后,该基片馈送辊92被旋转以馈送第二结合基片24a。将被送到两个相邻玻璃基片24之间的感光连接板22的位置22b现在被移位到橡胶辊80a下的位置;并且感光连接板22被重复地重叠到玻璃基片24上。As shown in FIG. 13, when the rear end of the first bonded substrate 24a reaches the substrate feed roller 92, the upper one of the substrate feed rollers 92 is lifted to release the first substrate 24a, and the substrate feed roller 92 The lower one and the other rollers of the feed path 88 are continuously rotated to feed the bonded substrate 24a. When the rear end of the next, second bonded substrate 24a reaches a position near the rubber rollers 80a, 80b, the rubber rollers 80a, 80b and the substrate feed roller 92 stop rotating. The upper one of the substrate feed rollers 92 is lowered to clamp the second bonded substrate 24a, and the rubber roller 80b is lowered to release the second bonded substrate 24a. Then, the substrate feeding roller 92 is rotated to feed the second bonded substrate 24a. The position 22b of the photosensitive web 22 to be fed between two adjacent glass substrates 24 is now displaced to a position under the rubber roller 80a;

如图14所示,在以与结合基片24a相同的速度沿箭头C指示的方向运动的同时,当两个相邻结合基片24a之间的位置到达对应于基片间连接板切割机构48的位置时,基片间连接板切割机构48分离结合基片24a之间的感光连接板22。随后,基片间连接板切割机构48返回到待用位置,并且底膜26和剩余区30b被从前部结合基片24a剥离,从而制造感光层叠体106。As shown in FIG. 14 , while moving in the direction indicated by arrow C at the same speed as the bonded substrates 24a, when the position between two adjacent bonded substrates 24a reaches the position corresponding to the connecting plate cutting mechanism 48 between the substrates position, the inter-substrate connection plate cutting mechanism 48 separates the photosensitive connection plate 22 between the bonded substrates 24a. Subsequently, the inter-substrate web cutting mechanism 48 returns to the stand-by position, and the base film 26 and the remaining region 30b are peeled off from the front bonding substrate 24a, thereby manufacturing the photosensitive laminated body 106.

如图15所示,当层叠加工暂时停止时,该膜馈送辊90和橡胶辊80b进入松开位置,并且接触防止辊86被降低以防止感光连接板22接触橡胶辊80a。As shown in FIG. 15, when the lamination process is temporarily stopped, the film feed roller 90 and the rubber roller 80b enter the unclamped position, and the contact preventing roller 86 is lowered to prevent the photosensitive web 22 from contacting the rubber roller 80a.

当制造装置20将被关闭时,基片馈送辊92被旋转以沿箭头C指示的方向馈送结合基片24a,并且膜馈送辊90夹着感光连接板22。当旋转的膜馈送辊90正夹着感光连接板22时,该连接板切割机构48a横向行进穿过感光连接板22,切断感光连接板22。When the manufacturing apparatus 20 is to be closed, the substrate feed roller 92 is rotated to feed the bonded substrate 24 a in the direction indicated by arrow C, and the film feed roller 90 sandwiches the photosensitive web 22 . The web cutting mechanism 48 a travels laterally across the photosensitive web 22 , severing the photosensitive web 22 as the rotating film feed roller 90 is clamping the photosensitive web 22 .

接着,如图16所示,该感光连接板22经过橡胶辊80a,80b之间,并被膜馈送辊90夹在中间,并且由降低的接触防止辊86支撑离开橡胶辊80a。该连接板切割机构48a已被置于其待用位置。Next, as shown in FIG. 16, the photosensitive web 22 passes between the rubber rollers 80a, 80b, is sandwiched by the film feed roller 90, and is supported by the lowered contact preventing roller 86 away from the rubber roller 80a. The web cutting mechanism 48a has been placed in its standby position.

当该基片间连接板切割机构48和连接板切割机构48a切割感光连接板22时,它们沿箭头C指示的方向与感光连接板22同步地运动。然而,该基片间连接板切割机构48和连接板切割机构48a可仅横向运动经过感光连接板22以切断感光连接板22。该感光连接板22可由汤姆逊刀(Thompson blade)切割,同时连接板被保持静止,或可在连接板运动时由旋转刀片切断。When the inter-substrate web cutting mechanism 48 and the web cutting mechanism 48a cut the photosensitive web 22, they move in the direction indicated by the arrow C in synchronization with the photosensitive web 22. However, the inter-substrate web cutting mechanism 48 and web cutting mechanism 48a can only move laterally past the photosensitive web 22 to sever the photosensitive web 22 . The photosensitive web 22 can be cut by a Thompson blade while the web is held stationary, or can be severed by a rotating blade while the web is in motion.

如图17所示,当制造装置20在其初始状态操作时,该接触防止辊86被设置在下部位置,并且橡胶辊80b被间隔离开橡胶辊80a。然后,该膜馈送辊90被旋转以将感光连接板22排放入连接板处理容器中(未示出)。此时,该感光连接板22被连接板切割机构48a分离成特定长度。As shown in FIG. 17 , when the manufacturing apparatus 20 is operated in its initial state, the contact preventing roller 86 is disposed at the lower position, and the rubber roller 80b is spaced apart from the rubber roller 80a. Then, the film feed roller 90 is rotated to discharge the photosensitive web 22 into a web processing container (not shown). At this time, the photosensitive web 22 is separated into specific lengths by the web cutting mechanism 48a.

当该探测机构47探测感光连接板22的部分切割区域34时,感光连接板22被从探测位置馈送预定长度。具体地,当接触防止辊86被升高时,该感光连接板22被馈送直到部分切割区域34到达感光连接板22将被橡胶辊80a,80b层叠的位置。该感光连接板22的前端现在被定位就位。When the detection mechanism 47 detects the partially cut region 34 of the photosensitive web 22, the photosensitive web 22 is fed by a predetermined length from the detection position. Specifically, when the contact prevention roller 86 is raised, the photosensitive web 22 is fed until the partially cut region 34 reaches the position where the photosensitive web 22 is to be laminated by the rubber rollers 80a, 80b. The front end of the photosensitive web 22 is now positioned in place.

在第一实施例中,该感光连接板22的部分切割区域34由结合机构46上面并接近结合机构46的光电传感器72直接探测。从探测机构47到其中部分切割区域34被橡胶辊80a,80b停止处的位置的距离需要比将被层叠的感光连接板22的最短长度更小。这里因为通过反馈,该探测部分切割区域34的信息被用于下一层叠加工。In the first embodiment, the partially cut region 34 of the photosensitive connecting plate 22 is directly detected by the photoelectric sensor 72 above and close to the bonding mechanism 46 . The distance from the detection mechanism 47 to the position where the partially cut region 34 is stopped by the rubber rollers 80a, 80b needs to be smaller than the shortest length of the photosensitive web 22 to be laminated. Here, through feedback, the information of the detected partial cutting area 34 is used for the next layer of stacking.

该探测机构47执行如下描述的两个测量过程。根据第一测量过程,该橡胶辊80a,80b夹住玻璃基片24;并且与用于驱动橡胶辊80a,80b的驱动电机(未示出)组合的编码器产生的脉冲数目代表从橡胶辊80a,80b开始旋转馈送玻璃基片24的距离,其与当部分切割区域34将被探测机构47探测时产生的脉冲预先设置数目比较,从而测量部分切割区域34的位移。如果在达到预定数目的脉冲前,感光连接板22的部分切割区域34被探测到,则部分切割区域34被判断为玻璃基片24上的预定位置前被移位了由脉冲数目差指示的距离。相反地,如果在达到预定数目的脉冲后,感光连接板22的部分切割区域34被探测到,则部分切割区域34被判断为被移位在玻璃基片24上的预定位置后。The detection mechanism 47 carries out two measuring processes described below. According to the first measurement process, the rubber rollers 80a, 80b clamp the glass substrate 24; , 80b starts to rotate the distance of feeding the glass substrate 24, which is compared with the preset number of pulses generated when the partially cut area 34 will be detected by the detection mechanism 47, thereby measuring the displacement of the partially cut area 34. If the partially cut region 34 of the photosensitive web 22 is detected before reaching the predetermined number of pulses, the partially cut region 34 is judged to be displaced by the distance indicated by the difference in the number of pulses before the predetermined position on the glass substrate 24 . Conversely, if the partially cut region 34 of the photosensitive web 22 is detected after reaching the predetermined number of pulses, the partially cut region 34 is judged to be displaced behind the predetermined position on the glass substrate 24 .

根据第二测量过程,由与用于驱动橡胶辊80a,80b的驱动电机(未示出)组合的编码器产生的脉冲数目被从部分切割区域34的探测到下一部分切割区域34的探测进行测量,从而测量感光连接板22的层叠长度H。在每个感光连接板22的正常条件下对应于层叠长度的脉冲预设数目与实际测量的脉冲数目比较。如果实际测量的脉冲数目大于预设脉冲数,则感光传送板22被判断为由于热量或相类似物拉伸了脉冲数目差指示的距离。如果实际测量脉冲数小于预设脉冲数,则感光连接板22被判断为变短。According to the second measurement procedure, the number of pulses produced by an encoder combined with a drive motor (not shown) for driving the rubber rollers 80a, 80b is measured from the detection of a partial cutting area 34 to the detection of the next partial cutting area 34 , so as to measure the stacking length H of the photosensitive connecting plate 22 . The preset number of pulses corresponding to the lamination length under normal conditions of each photosensitive web 22 is compared with the actually measured number of pulses. If the actually measured number of pulses is greater than the preset number of pulses, the photosensitive transfer plate 22 is judged to be stretched by the distance indicated by the difference in the number of pulses due to heat or the like. If the actual measured pulse number is less than the preset pulse number, the photosensitive connecting plate 22 is judged to be shortened.

如图18所示,如果根据第一测量过程,该感光树脂层28的前端被探测相对于的玻璃基片24的结合范围P1-P2移位(前进)了相同距离或实质相同距离,则调节玻璃基片24和感光连接板22的部分切割区域34的相对位置。As shown in FIG. 18, if according to the first measurement process, the front end of the photosensitive resin layer 28 is displaced (advanced) by the same distance or substantially the same distance relative to the bonding range P1-P2 of the glass substrate 24, then the adjustment The relative positions of the glass substrate 24 and the partially cut region 34 of the photosensitive connecting plate 22 .

具体地说,如果由光电传感器72探测的部分切割区域34被探测为从预定位置前进,则如图10所示,该基片馈送辊92将层叠后的感光连接板22的未结合部馈送预设置距离和前进距离之间的差表示的距离。结果,该部分切割区域34被位置调节并放置在橡胶辊80a,80b之间的预定位置中。此后,在正常传送控制下,该玻璃基片24被传送在橡胶辊80a,80b之间,并且感光树脂层28在正常位置被结合到玻璃基片24上,即在玻璃基片24的结合范围P1-P2中。Specifically, if the partially cut region 34 detected by the photoelectric sensor 72 is detected to advance from a predetermined position, as shown in FIG. Sets the distance represented by the difference between distance and distance traveled. As a result, the partially cut region 34 is positionally adjusted and placed in a predetermined position between the rubber rollers 80a, 80b. Thereafter, under normal conveying control, the glass substrate 24 is conveyed between the rubber rollers 80a, 80b, and the photosensitive resin layer 28 is bonded to the glass substrate 24 at the normal position, that is, within the bonding range of the glass substrate 24. P1-P2.

如图19所示,如果由光电传感器72探测的部分切割区域34被探测为从玻璃基片24的结合范围P1-P2延迟,则基片馈送辊92将层叠后的感光连接板22的未结合部馈送由预设距离和延伸距离的和表示的距离。As shown in FIG. 19, if the partially cut region 34 detected by the photosensor 72 is detected to be delayed from the bonding range P1-P2 of the glass substrate 24, the substrate feed roller 92 will unbond the laminated photosensitive connection plate 22. The section feeds the distance represented by the sum of the preset distance and the extended distance.

代替调节结合基片24a被基片馈送辊92馈送的距离,基片馈送机构45可被控制以调节玻璃基片24将被停止的位置向前或迟延距离。Instead of adjusting the distance by which the bonded substrate 24a is fed by the substrate feed roller 92, the substrate feeding mechanism 45 may be controlled to adjust the forward or retarded distance of the position where the glass substrate 24 is to be stopped.

根据第二测量过程,测量了由光电传感器72探测的部分切割区域34之间的距离,即将被结合到玻璃基片24的感光树脂层28的长度H。如果长度H大于结合范围,则处理机构36改变部分切割区域34的位置,以便部分切割区域34之间的距离,即长度H,被减小该差值。如果长度H小于结合范围,则处理机构36改变部分切割区域34的位置,以便部分切割区域34之间的距离,即长度H,增加该差值。采用这种方式,该感光树脂层28的结合长度被调节到预定长度。According to the second measurement process, the distance between the partially cut regions 34 detected by the photosensor 72, the length H of the photosensitive resin layer 28 to be bonded to the glass substrate 24, is measured. If the length H is greater than the bonding range, the processing mechanism 36 changes the position of the partially cut regions 34 so that the distance between the partially cut regions 34, ie the length H, is reduced by the difference. If the length H is less than the bonding range, the processing mechanism 36 changes the position of the partially cut regions 34 so that the distance between the partially cut regions 34, ie the length H, increases by the difference. In this way, the bonding length of the photosensitive resin layer 28 is adjusted to a predetermined length.

通过利用张力控制机构66的张力跳动器70调节感光连接板22的张力,也可以改变感光连接板22的拉伸量。By using the tension jumper 70 of the tension control mechanism 66 to adjust the tension of the photosensitive web 22 , the stretching amount of the photosensitive web 22 can also be changed.

因此,感光连接板22的部分切割区域34能够相对于结合位置得到高度精确地定位,使感光连接板22的感光树脂层28精确地结合在玻璃基片24的期望区域。因此,通过简单过程和安排可以有效地制造感高质量的感光层叠体106。Therefore, the partially cut region 34 of the photosensitive connecting plate 22 can be positioned with high precision relative to the bonding position, so that the photosensitive resin layer 28 of the photosensitive connecting plate 22 can be precisely bonded to the desired area of the glass substrate 24 . Therefore, the high-quality photosensitive laminated body 106 can be efficiently manufactured through simple processes and arrangements.

图20以侧视图示意性地显示了根据本发明第二实施例的制造装置120。与根据第一实施例的制造设置20的那些部件相同的根据第二实施例的制造装置120的那些部件由相同的标示符指示,并在下面将不再详细描述。FIG. 20 schematically shows a manufacturing device 120 according to a second embodiment of the invention in side view. Those parts of the manufacturing device 120 according to the second embodiment that are identical to those of the manufacturing setup 20 according to the first embodiment are indicated by the same designations and will not be described in detail below.

如图20所示,该制造装置120包括:探测机构47a;设置在基片间连接板切割机构48的下游的冷却机构122;和设置在冷却机构122下游的基部剥离机构124。该探测机构47a具有光电传感器72a,72b,其彼此间隔预定距离L,并分别以与垫辊73a,73b面对的关系设置。As shown in FIG. 20, the manufacturing apparatus 120 includes: a detection mechanism 47a; a cooling mechanism 122 provided downstream of the inter-substrate web cutting mechanism 48; and a base peeling mechanism 124 provided downstream of the cooling mechanism 122. The detection mechanism 47a has photoelectric sensors 72a, 72b, which are spaced apart from each other by a predetermined distance L, and are arranged in facing relationship with the pad rollers 73a, 73b, respectively.

在由基片间连接板切割机构48在结合基片24a和接着的结合基片24a之间切割感光连接板22后,该冷却机构122将冷却空气供应到结合基片24a,以冷却结合基片24a。具体地,该冷却机构122以范围从1.0到2.0m/min的速度供应温度为10℃的冷空气。可选地,该冷却机构122可被省略,并且结合基片24a可在感光层叠体存储架132(后面描述)中得到冷却,不使用任何专用冷却装置。After the photosensitive web 22 is cut between the bonding substrate 24a and the following bonding substrate 24a by the inter-substrate web cutting mechanism 48, the cooling mechanism 122 supplies cooling air to the bonding substrate 24a to cool the bonding substrate. 24a. Specifically, the cooling mechanism 122 supplies cold air having a temperature of 10° C. at a speed ranging from 1.0 to 2.0 m/min. Alternatively, the cooling mechanism 122 can be omitted, and the bonded substrate 24a can be cooled in a photosensitive laminate storage rack 132 (described later) without using any dedicated cooling means.

该基部剥离机构124被设置在冷却机构122的下游,其具有用于吸引结合基片24a的下表面的多个吸盘126。当吸盘126利用吸力吸引结合基片24a时,底膜26和剩余区30b被机器手128从结合基片24a剥离。电中性鼓风机(未示出)用于将离子空气喷射到结合基片24a的层叠区域的4个边,其被设置在吸盘126的上游、下游和旁边。该底膜26和剩余区30b可从结合基片24a剥离,同时为去除灰尘,用于在其上支撑结合基片24a的台被垂直、倾斜或上下翻转地定位。The base peeling mechanism 124 is provided downstream of the cooling mechanism 122, and has a plurality of suction cups 126 for attracting the lower surface of the bonded substrate 24a. When the suction cup 126 attracts the bonded substrate 24a with suction, the base film 26 and the remaining area 30b are peeled off from the bonded substrate 24a by the robot 128 . An electrically neutral blower (not shown) for blowing ionized air to the 4 sides of the lamination area of the bonded substrate 24 a is provided upstream, downstream and beside the chuck 126 . The base film 26 and the remaining area 30b are peelable from the bonded substrate 24a, while the stage for supporting the bonded substrate 24a thereon is positioned vertically, obliquely or upside down for dust removal.

该底部剥离机构124下游接着用于存储多个感光层叠体106的感光层叠体存储架132。在底部剥离机构124从结合基片24a剥离底膜26和剩余区30b时,生产了感光层叠体106,该感光层叠体106被机器人134的手134a上的吸盘136吸取,从底部剥离机构124取出,并被放置在感光层叠体存储架132中。Downstream of the bottom peeling mechanism 124 is a photosensitive stack storage rack 132 for storing a plurality of photosensitive stacks 106 . When the bottom peeling mechanism 124 peels the base film 26 and the remaining area 30b from the bonded substrate 24a, the photosensitive laminated body 106 is produced, and the photosensitive laminate 106 is picked up by the suction cup 136 on the hand 134a of the robot 134 and taken out from the bottom peeling mechanism 124. , and placed in the photosensitive laminate storage rack 132.

除了玻璃基片24或感光层叠体106被放置和取出的侧面,在其三个侧面上,基片存储架71和感光层叠体存储架132的每个具有除尘风扇单元(或导管单元)137。该风扇单元137将清洁和电中性空气吹入基片存储架71和感光层叠体存储架132。Each of the substrate storage rack 71 and the photosensitive stack storage rack 132 has a dust removal fan unit (or duct unit) 137 on three sides thereof except the side where the glass substrate 24 or photosensitive laminate 106 is placed and taken out. The fan unit 137 blows clean and electrically neutral air into the substrate storage rack 71 and the photosensitive laminate storage rack 132 .

层叠控制器102、基片加热控制器104和基片剥离控制器138被连接到层叠过程控制器100。该底部剥离控制器138控制底部剥离机构124,以从自结合机构46供应的结合基片24a剥离底膜26,并且还将感光层叠体106排放到下游过程。该底部剥离控制器138还处理有关结合基片24a和感光层叠体106的信息。The lamination controller 102 , the substrate heating controller 104 and the substrate stripping controller 138 are connected to the lamination process controller 100 . This bottom peeling controller 138 controls the bottom peeling mechanism 124 to peel the base film 26 from the bonded substrate 24a supplied from the bonding mechanism 46, and also discharges the photosensitive laminate 106 to a downstream process. The bottom release controller 138 also handles information about the bonded substrate 24a and the photosensitive laminate 106 .

在根据第二实施例的探测机构47a中,位于光电传感器72b上游的光电传感器72a首先探测感光连接板22的部分切割区域34。此后,下游光电传感  72b探测感光连接板22的部分切割区域34。垫辊73a,73b之间的距离L对应于贴合到玻璃基片24的感光树脂层28的长度。In the detection mechanism 47 a according to the second embodiment, the photosensor 72 a located upstream of the photosensor 72 b first detects the partially cut region 34 of the photosensitive connection plate 22 . Thereafter, the downstream photoelectric sensor 72b detects the partial cutting area 34 of the photosensitive connection plate 22. The distance L between the pad rollers 73a, 73b corresponds to the length of the photosensitive resin layer 28 bonded to the glass substrate 24 .

从上游光电传感器72a探测感光连接板22的部分切割区域34时的时刻与下游光电传感器72b探测感光连接板22的相同部分切割区域34时的时刻之间的差,可以精确地计算出该感光树脂层28的实际贴合长度。基于计算的感光树脂层28实际贴合长度,该感光连接板22被馈送的速度得到调节以将感光树脂层28贴合到玻璃基片24的中央。The photoresist can be accurately calculated from the difference between the moment when the upstream photosensor 72a detects the partially cut region 34 of the photosensitive web 22 and the moment when the downstream photosensor 72b detects the same partially cut region 34 of the photosensitive web 22. The actual fit length of layer 28. Based on the calculated actual bonding length of the photosensitive resin layer 28 , the feeding speed of the photosensitive web 22 is adjusted to bond the photosensitive resin layer 28 to the center of the glass substrate 24 .

因此,根据第二实施例,感光连接板22的部分切割区域34之间的距离,即贴合到玻璃基片24的感光树脂层28的长度H得到精确的探测以将感光树脂层28贴合到玻璃基片24的中央(参见图21)。Therefore, according to the second embodiment, the distance between the partial cutting regions 34 of the photosensitive connection plate 22, that is, the length H of the photosensitive resin layer 28 bonded to the glass substrate 24 is accurately detected to bond the photosensitive resin layer 28. to the center of the glass substrate 24 (see FIG. 21).

如图22所示,如果由探测机构47a探测的感光树脂层28的长度H1大于正常的长度H,则感光树脂层28被贴合到玻璃基片24的中央,这样感光树脂层28的相对端部从贴合长度L的端向外间隔相同的距离。As shown in Figure 22, if the length H1 of the photosensitive resin layer 28 detected by the detection mechanism 47a is greater than the normal length H, the photosensitive resin layer 28 is attached to the center of the glass substrate 24, so that the opposite ends of the photosensitive resin layer 28 The parts are spaced the same distance outward from the ends of the fit length L.

如图23所示,如果由探测机构47a探测的感光树脂层28的长度H2小于正常的长度H,则感光树脂层28被贴合到玻璃基片24的中央,这样感光树脂层28的相对端部从贴合长度L的端向内间隔相同的距离。在这种情况中,感光树脂层28的贴合位置的目标位移约为如果感光树脂层28的相对端部不从贴合长度L的端部向内间隔相同距离出现的一半位移。As shown in Figure 23, if the length H2 of the photosensitive resin layer 28 detected by the detection mechanism 47a is less than the normal length H, the photosensitive resin layer 28 is attached to the center of the glass substrate 24, so that the opposite ends of the photosensitive resin layer 28 The parts are spaced the same distance inward from the end of the fit length L. In this case, the target displacement of the bonding position of the photosensitive resin layer 28 is approximately half of the displacement that would occur if the opposite ends of the photosensitive resin layer 28 were not spaced inwardly from the end of the bonding length L by the same distance.

此外,根据第二实施例,部分切割区域34被形成在从卷出机构32退卷的感光连接板22中;并且然后,保护膜30被剥离,剩下剩余区30b,之后,感光连接板22被层叠在玻璃基片24上,以转移感光树脂层28;并且然后,该底膜26和剩余区30b被底部剥离机构124剥离,从而制造感光层叠体106。该感光层叠体106能够被容易地自动制造。In addition, according to the second embodiment, a partial cut area 34 is formed in the photosensitive connection sheet 22 unwound from the unwinding mechanism 32; is laminated on the glass substrate 24 to transfer the photosensitive resin layer 28; and then, the base film 26 and the remaining region 30b are peeled off by the bottom peeling mechanism 124, thereby manufacturing the photosensitive laminated body 106. This photosensitive laminated body 106 can be easily and automatically manufactured.

图24以侧视图示意性地显示了根据本发明第三实施例的制造装置140。与根据第一实施例的制造设置20的那些部件相同的根据第三实施例的制造装置140的那些部件由相同的标示符指示,并在下面将不再详细描述。FIG. 24 schematically shows a manufacturing device 140 according to a third embodiment of the invention in side view. Those parts of the manufacturing device 140 according to the third embodiment that are identical to those of the manufacturing setup 20 according to the first embodiment are indicated by the same designations and will not be described in detail below.

该制造机构140包括基片间连接板切割机构48,其通常不使用,除于在故障的情况中切割感光连接板22,并分离感光连接板22以排放有问题的区域。该制造装置140具有设置在连接板切割机构48a的下游的冷却机构122和自动底部剥离机构142。该自动底部剥离机构142用于连续地剥离伸长底膜26,通过它,以给定间隔间隔的玻璃基片24被结合在一起。该自动底部剥离机构142具有:预剥离器144;具有相当小直径的剥离辊146;收紧辊148;和自动结合单元150。The fabrication mechanism 140 includes an inter-substrate web cutting mechanism 48, which is not normally used, except to cut the photo-web 22 in the event of a failure, and to separate the photo-web 22 to drain the problematic area. This manufacturing apparatus 140 has a cooling mechanism 122 and an automatic bottom peeling mechanism 142 provided downstream of the web cutting mechanism 48a. The automatic bottom peeling mechanism 142 is used to continuously peel off the elongated bottom film 26 by which the glass substrates 24 spaced at given intervals are bonded together. The automatic bottom peeling mechanism 142 has: a pre-peeler 144 ; a peeling roller 146 having a relatively small diameter; a take-up roller 148 ; and an automatic bonding unit 150 .

如图25和26所示,预剥离器144具有一对轧辊组件152,154和剥离杆156。该轧辊组件152,154可沿其中玻璃基片24被馈送的方向彼此向着和离开运动。该轧辊组件152,154具有可垂直运动的上部辊152a,154a和下部辊152b,154b。当上部辊152a,154a被下降时,上部辊152a,154a和下部辊152b,154b将玻璃基片24夹在中间。该剥离杆156可在相邻玻璃基片24之间垂直运动。该上部辊152a,154a更换为压杆或压销。As shown in FIGS. 25 and 26 , the pre-striper 144 has a pair of roller assemblies 152 , 154 and a stripper bar 156 . The roller assemblies 152, 154 are movable toward and away from each other in the direction in which the glass substrate 24 is fed. The roll assemblies 152, 154 have vertically movable upper rolls 152a, 154a and lower rolls 152b, 154b. The upper rollers 152a, 154a and the lower rollers 152b, 154b sandwich the glass substrate 24 as the upper rollers 152a, 154a are lowered. The peel bar 156 is vertically movable between adjacent glass substrates 24 . The upper rollers 152a, 154a are replaced by pressing rods or pressing pins.

该感光连接板22被剥离辊146重新加热到从30℃到120℃范围的温度,或在刚好在剥离辊146前的位置处。当感光连接板22被因此重新加热时,当底膜26被剥离时,彩色材料层被防止从那里剥离,以便能够在玻璃基片24上产生高质量层叠表面。重新加热可由也用作加热辊的剥离辊执行,诸如由其中热水加热的辊。可选地,重新加热可由分离杆加热器或IR加热器执行。The photosensitive web 22 is reheated by the peel roll 146 to a temperature ranging from 30° C. to 120° C., or at a location just before the peel roll 146 . When the photosensitive web 22 is thus reheated, when the base film 26 is peeled off, the color material layer is prevented from being peeled off therefrom, so that a high-quality lamination surface can be produced on the glass substrate 24 . The reheating may be performed by a peeling roller also serving as a heating roller, such as a roller heated by hot water therein. Alternatively, reheating can be performed by split rod heaters or IR heaters.

该自动底部剥离机构142的下游接着测量单元158,该测量单元158被用于测量实际被结合到玻璃基片24的感光树脂层28的区域。该测量单元158具有每个包括CCD或相类似物的多个间隔照相机160。如图27所示,测量单元158具有例如4个照相机160,用于捕获感光树脂层28被结合到玻璃基片24的四个角K1到K4的图像。可选地,测量单元158可具有至少两个照相机,用于捕获玻璃基片24的每个纵向和横向侧的图像,而不是4个角K1到K4的图像。Downstream of the automatic bottom peel mechanism 142 is a measurement unit 158 that is used to measure the area of the photosensitive resin layer 28 that is actually bonded to the glass substrate 24 . The measurement unit 158 has a plurality of spaced cameras 160 each including a CCD or the like. As shown in FIG. 27 , the measurement unit 158 has, for example, four cameras 160 for capturing images of the four corners K1 to K4 where the photosensitive resin layer 28 is bonded to the glass substrate 24 . Alternatively, the measurement unit 158 may have at least two cameras for capturing images of each longitudinal and lateral side of the glass substrate 24, instead of images of the 4 corners K1 to K4.

该测量单元158可包括用于探测玻璃基片24的端面的彩色传感器或激光传感器;或可包括LED传感器、光电二极管传感器或线传感器,用于探测玻璃基片24的端面。为探测每个端面的直线性,这些传感器的至少两个应期望地用于捕获每个端面的图像,。The measuring unit 158 may include a color sensor or a laser sensor for detecting the end surface of the glass substrate 24 ; or may include an LED sensor, a photodiode sensor or a line sensor for detecting the end surface of the glass substrate 24 . To detect the straightness of each end face, at least two of these sensors should desirably be used to capture an image of each end face.

表面检查单元(未示出)可被使用以探测感光层叠体106的表面缺陷,诸如由感光连接板22本身导致的表面不规则、由制造设施引起的层叠膜密度不规则、皱褶、条形图案、灰尘颗粒和其它异物。当探测到这种表面缺陷时,制造装置140发出告警,排出有缺陷的产品,并基于探测到的表面缺陷管理后续的过程。A surface inspection unit (not shown) may be used to detect surface defects of the photosensitive laminated body 106, such as surface irregularities caused by the photosensitive web 22 itself, laminated film density irregularities caused by manufacturing facilities, wrinkles, stripes, etc. patterns, dust particles and other foreign matter. When such a surface defect is detected, the manufacturing device 140 issues an alarm, discharges a defective product, and manages subsequent processes based on the detected surface defect.

根据第三实施例,层叠感光连接板22的结合基片24a被冷却机构122冷却并且然后被传送到预剥离器144。在预剥离器144中,该轧辊组件152,154紧夹两个相邻玻璃基片24的尾和前端,并且轧辊组件152以与玻璃基片24相同的速度沿由箭头C指示的方向运动,轧辊组件154沿由箭头C指示的方向在其行进中减速。According to the third embodiment, the bonded substrate 24 a of the laminated photosensitive connection board 22 is cooled by the cooling mechanism 122 and then transferred to the pre-peeler 144 . In the pre-peeler 144, the roller assembly 152, 154 clamps the tail and the front end of two adjacent glass substrates 24, and the roller assembly 152 moves in the direction indicated by the arrow C at the same speed as the glass substrate 24, Roller assembly 154 is decelerated in its travel in the direction indicated by arrow C. As shown in FIG.

结果,如图26所示,玻璃基片24之间的感光连接板22可在轧辊组件152,154之间弯曲。然后,该剥离杆156被抬升以向上推动感光连接板22,从两个相邻玻璃基片24的尾端和前端剥离突出膜30。As a result, the photosensitive web 22 between the glass substrates 24 can be bent between the roller assemblies 152,154 as shown in FIG. Then, the peeling bar 156 is lifted to push the photosensitive connection plate 22 upward, and the protruding film 30 is peeled off from the rear end and the front end of the two adjacent glass substrates 24 .

在自动底部剥离机构142,该收紧辊148被旋转以从结合基片24a连续缠绕底膜26。在感光连接板22在故障的情况中被切除后并被分离以排出有缺陷的部分后,感光连接板22开始被层叠的结合基片24a上的底膜26的前端和卷在收紧辊148上的底膜26的后端由自动结合单元150自动地彼此连接在一起。In the automatic bottom peeling mechanism 142, the take-up roll 148 is rotated to continuously wind the bottom film 26 from the bonded substrate 24a. After the photosensitive web 22 is cut off in the event of failure and separated to discharge defective parts, the photosensitive web 22 begins to be laminated with the front end of the base film 26 on the bonded substrate 24a and wound on a take-up roller 148. The rear ends of the upper base films 26 are automatically connected to each other by the automatic bonding unit 150 .

底部膜26被剥离的玻璃基片24被放置在与测量单元158组合的检查台中。在检查台中,玻璃基片24被固定到位,并且四个照相机160捕获玻璃基片24和感光树脂层28的图像。该捕获图像被处理以确定贴合的位置a到d。The glass substrate 24 from which the bottom film 26 has been peeled is placed in an inspection stand combined with the measurement unit 158 . In the inspection station, glass substrate 24 is held in place and four cameras 160 capture images of glass substrate 24 and photoresist layer 28 . This captured image is processed to determine the locations a to d of the fit.

在检查台中,该玻璃基片24可被不停止地馈送,并且玻璃基片24的横向端部可由照相机或图像扫描探测,并且其纵向端部可由计时传感器探测。然后,该玻璃基片24可基于照相机或图像扫描的探测数据和传感器测量。In the inspection station, the glass substrate 24 can be fed without stopping, and the lateral ends of the glass substrate 24 can be detected by a camera or image scanning, and the longitudinal ends thereof can be detected by a timing sensor. The glass substrate 24 can then be based on camera or image scanning probe data and sensor measurements.

根据第三实施例,在感光连接板22已被层叠在玻璃基片24上,两个相邻结合基片24a之间的感光连接板22不被切断。更确切地说,当结合基片24a正被剥离辊146按压时,该底膜26被从结合基片24a连续剥离,并围绕旋转收紧辊148缠绕。并且,剥离的底膜26容易被处理。According to the third embodiment, after the photosensitive web 22 has been laminated on the glass substrate 24, the photosensitive web 22 between two adjacent bonded substrates 24a is not cut. More specifically, the base film 26 is continuously peeled off from the bonded substrate 24 a and wound around the rotating take-up roller 148 while the bonded substrate 24 a is being pressed by the peeling roller 146 . Also, the peeled base film 26 is easily handled.

根据第三实施例,取得了与第二实施例相同的优点,例如,感光层叠体106能够被自动和有效地制造。此外,制造装置140的结构简单。According to the third embodiment, the same advantages as those of the second embodiment are obtained, for example, the photosensitive laminated body 106 can be manufactured automatically and efficiently. In addition, the structure of the manufacturing device 140 is simple.

虽然已显示和详细描述了本发明的特定优选实施例,应该理解:在不背离所附权利要求的范围的情况下,这里可进行多种改变和修改。While certain preferred embodiments of the present invention have been shown and described in detail, it should be understood that various changes and modifications may be made therein without departing from the scope of the appended claims.

Claims (15)

1.一种用于制造感光层叠体的设备,包括:1. An apparatus for manufacturing a photosensitive laminate, comprising: 用于卷出伸长感光连接板(22)的连接板卷出机构(32),所述伸长感光连接板(22)包括:支撑(26);设置在所述支架(26)上的感光材料层(28);和设置在所述感光材料层(28)上的保护膜(30),所述保护膜(30)具有剥离区(30aa)和剩余区(30b);A connecting plate roll-out mechanism (32) for rolling out an elongated photosensitive connecting plate (22), the elongated photosensitive connecting plate (22) comprising: a support (26); a photosensitive connecting plate arranged on the support (26) a material layer (28); and a protective film (30) disposed on the photosensitive material layer (28), the protective film (30) having a peeling area (30aa) and a remaining area (30b); 处理机构(36),其用于在所述剥离区(30aa)和所述剩余区(30b)之间的边界位置处,在已由所述连接板卷出机构(32)卷出的所述伸长感光连接板(22)的所述保护膜(30)中,形成可横向分离的处理区域(34);a processing mechanism (36), which is used for, at the boundary position between the peeling area (30aa) and the remaining area (30b), the said connecting plate unwinding mechanism (32) has been rolled out In the protective film (30) of the elongated photosensitive connection plate (22), a laterally separable processing area (34) is formed; 剥离机构(44),其用于将所述剥离区(44)从所述伸长感光连接板(22)剥离,剩下所述剩余区(30b);a peeling mechanism (44) for peeling said peeling region (44) from said elongated photosensitive web (22), leaving said remaining region (30b); 基片馈送机构(45),其用于将已被加热到预定温度的基片(24)馈送到结合位置;a substrate feeding mechanism (45) for feeding the substrate (24) heated to a predetermined temperature to the bonding position; 结合机构(46),其用于将所述剩余区(30b)定位在所述基片(24)之间,并将剥离所述剥离区(30aa)的所述感光材料层(28)的暴露区域结合到所述结合位置中的所述基片(24),用于生产结合基片(24a);bonding means (46) for positioning said remaining region (30b) between said substrates (24) and exposing said photosensitive material layer (28) from said peeling region (30aa) regions bonded to said substrate (24) in said bonding sites for producing a bonded substrate (24a); 接近所述结合位置设置的探测机构(47),其用于直接探测所述伸长感光连接板(22)的所述边界位置,或与所述边界位置相关的设置在所述伸长感光连接板(22)上的探测标记;和A detection mechanism (47) arranged close to the joint position, which is used to directly detect the boundary position of the elongated photosensitive connection plate (22), or a position related to the boundary position arranged on the elongated photosensitive connection detection marks on the plate (22); and 控制机构(102),其基于由所述探测机构(47)探测的边界位置信息,用于调节所述边界位置和所述结合位置中的所述基片(24)的相对位置。A control mechanism (102) for adjusting the relative position of the boundary position and the substrate (24) in the bonding position based on the boundary position information detected by the detection mechanism (47). 2.根据权利要求1所述的设备,其中:所述探测机构(47)被设置在所述结合位置的上游并接近所述结合位置。2. Apparatus according to claim 1 , wherein said detection means (47) is arranged upstream and close to said joint location. 3.根据权利要求1所述的设备,还包括:设置在所述处理机构(36)和所述剥离机构(44)之间的贮存机构(42),用于改变所述伸长感光连接板(22)被馈送的速度或状态。3. The apparatus according to claim 1, further comprising: a storage mechanism (42) arranged between said processing mechanism (36) and said stripping mechanism (44) for changing said elongated photosensitive web (22) The speed or state being fed. 4.根据权利要求1至3中任何一个的设备,还包括:被设置在所述剥离机构(44)和所述结合机构(46)之间的张力控制机构(66),用于将张力施加到所述伸长感光连接板(22)。4. The apparatus according to any one of claims 1 to 3, further comprising: a tension control mechanism (66) arranged between said stripping mechanism (44) and said bonding mechanism (46), for applying tension to the elongated photosensitive connecting plate (22). 5.根据权利要求1至3中任何一个的设备,还包括:被设置在所述结合机构(46)的下游的切割机构(48),用于切断所述基片(24)之间的伸长感光连接板(22)。5. The apparatus according to any one of claims 1 to 3, further comprising: a cutting mechanism (48) arranged downstream of the bonding mechanism (46) for severing the stretch between the substrates (24). Long photosensitive connecting plate (22). 6.根据权利要求1至3中任何一个的设备,还包括:被设置在所述结合机构(46)的下游的支撑剥离机构(124),用于将所述支撑(26)剥离所述结合基片(24a)。6. Apparatus according to any one of claims 1 to 3, further comprising: a support stripping mechanism (124) arranged downstream of said bonding mechanism (46), for stripping said support (26) from said bonding Substrate (24a). 7.根据权利要求1所述的设备,其中:所述结合机构(46)包括:7. The apparatus according to claim 1, wherein: said coupling mechanism (46) comprises: 被加热到预定温度的一对橡胶辊(80a,80b);和a pair of rubber rollers (80a, 80b) heated to a predetermined temperature; and 用于前后运动所述橡胶辊(80b)的一个的辊夹单元(83);a roller clamp unit (83) for moving one of said rubber rollers (80b) back and forth; 所述辊夹单元(83)包括:The roller clamp unit (83) includes: 用于向所述橡胶辊(80b)的所述一个施加夹紧压力的汽缸(84a);和a cylinder (84a) for applying clamping pressure to said one of said rubber rollers (80b); and 可由用于前后运动所述汽缸(84a)的致动器(93)运动的凸轮(97a)。A cam (97a) movable by an actuator (93) for moving said cylinder (84a) back and forth. 8.根据权利要求1所述的设备,还包括:设置在所述结合机构(46)的上游并接近所述结合机构(46)的预加热单元(87),用于将所述伸长感光连接板(22)预先加热到预定温度。8. The apparatus according to claim 1, further comprising: a preheating unit (87) arranged upstream and close to the bonding mechanism (46) for extensifying the photosensitive The connection plate (22) is preheated to a predetermined temperature. 9.一种制造感光层叠体的方法,包括步骤:9. A method of manufacturing a photosensitive laminate, comprising the steps of: 卷出伸长感光连接板(22),所述伸长感光连接板(22)包括:支撑(26);设置在所述支架(26)上的感光材料层(28);和设置在所述感光材料层(28)上的保护膜(30),所述保护膜(30)具有剥离区(30aa)和剩余区(30b);Roll out the elongated photosensitive connection plate (22), and the elongated photosensitive connection plate (22) includes: a support (26); a photosensitive material layer (28) arranged on the support (26); A protective film (30) on the photosensitive material layer (28), the protective film (30) having a peeling area (30aa) and a remaining area (30b); 在所述剥离区(30aa)和所述剩余区(30b)之间的边界位置处,在已卷出的所述伸长感光连接板(22)的所述保护膜(30)中形成可横向分离的处理区域(34);At the boundary position between the peeling area (30aa) and the remaining area (30b), a laterally adjustable separate treatment areas (34); 从所述伸长感光连接板(22)剥离所述剥离区(30aa),剩下所述剩余区(30b);peeling off said stripped region (30aa) from said elongated photosensitive web (22), leaving said remaining region (30b); 通过直接探测所述伸长感光连接板(22)的所述边界位置,或探测与所述边界位置相关的设置在所述伸长感光连接板(22)上的标记,取得边界位置信息;Obtaining boundary position information by directly detecting the boundary position of the elongated photosensitive connection plate (22), or detecting a mark set on the elongated photosensitive connection plate (22) related to the boundary position; 将已被加热到预定温度的基片(24)馈送到结合位置;feeding the substrate (24) heated to a predetermined temperature to the bonding position; 基于所述获得的边界位置信息,调节所述边界位置和所述结合位置中的基片(24)的相对位置;和adjusting the relative position of the substrate (24) in the boundary position and the bonding position based on the obtained boundary position information; and 用于将所述剩余区(30b)定位在所述基片(24)之间,并将剥离所述剥离区(30aa)的所述感光材料层(28)的暴露区域结合到所述结合位置中的所述基片(24),用于生产结合基片(24a);for positioning the remaining region (30b) between the substrates (24), and bonding the exposed area of the photosensitive material layer (28) peeled off the peeling region (30aa) to the bonding position Said substrate (24) in is used for producing bonded substrate (24a); 10.根据权利要求9所述的方法,其中:所述边界位置信息在所述结合位置的上游并接近所述结合位置处取得。10. The method of claim 9, wherein the boundary location information is obtained upstream of and close to the junction location. 11.根据权利要求9所述的方法,还包括步骤:11. The method of claim 9, further comprising the step of: 将所述伸长感光连接板(22)间歇地馈送通过所述处理机构(36);和intermittently feeding said elongated photosensitive web (22) through said processing mechanism (36); and 此后,在剥离机构(44)中和随后,将所述伸长感光连接板(22)连续地馈送通过贮存机构(42)。Thereafter, in the stripping mechanism (44) and subsequently, the elongated photosensitive web (22) is continuously fed through the storage mechanism (42). 12.根据权利要求9至11中任何一个的方法,还包括步骤:在剥离所述剥离区(30aa)的所述步骤和结合所述感光材料层(28)的暴露区域的所述步骤之间,将张力施加到所述伸长感光连接板(22)。12. A method according to any one of claims 9 to 11, further comprising the step of: between said step of peeling said peeled-off region (30aa) and said step of bonding the exposed region of said layer of photosensitive material (28) , applying tension to the elongated photosensitive web (22). 13.根据权利要求9至11中任何一个的方法,还包括步骤:13. A method according to any one of claims 9 to 11, further comprising the step of: 在结合所述感光材料层(28)的暴露区域的所述步骤后,切断所述基片(24)之间的所述伸长感光连接板(22);和After said step of bonding exposed areas of said photosensitive material layer (28), severing said elongated photosensitive web (22) between said substrates (24); and 此后,从所述结合基片(24a)剥离所述支撑(26),以生产感光层叠组件(106)。Thereafter, the support (26) is peeled off from the bonded substrate (24a) to produce a photosensitive laminated assembly (106). 14.根据权利要求9至11中任何一个的方法,还包括步骤:在结合所述感光材料层(28)的暴露区域的所述步骤后,连续或间歇地从所述结合基片(24a)剥离所述支撑(26)。14. A method according to any one of claims 9 to 11, further comprising the step of: after said step of bonding the exposed regions of said layer of photosensitive material (28), continuously or intermittently removing from said bonding substrate (24a) The support (26) is peeled off. 15.根据权利要求9至11中任何一个的方法,还包括步骤:在结合所述感光材料层(28)的暴露区域的所述步骤前,将所述伸长感光连接板(22)加热到预定温度。15. A method according to any one of claims 9 to 11, further comprising the step of heating said elongated photosensitive web (22) to Predetermined temperature.
CNB2005800230479A 2004-07-06 2005-07-06 Apparatus and method for manufacturing photosensitive laminated body Expired - Fee Related CN100528560C (en)

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CN101544092A (en) * 2008-03-25 2009-09-30 富士胶片株式会社 Manufacturing device of photosensitive laminated object
CN103738010A (en) * 2013-11-14 2014-04-23 大连创达技术交易市场有限公司 Photosensitive glass production method
CN115723201A (en) * 2022-11-29 2023-03-03 深圳市博硕科技股份有限公司 A kind of die-cut splicing equipment and its die-cut splicing process

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Publication number Priority date Publication date Assignee Title
CN101544092A (en) * 2008-03-25 2009-09-30 富士胶片株式会社 Manufacturing device of photosensitive laminated object
CN103738010A (en) * 2013-11-14 2014-04-23 大连创达技术交易市场有限公司 Photosensitive glass production method
CN115723201A (en) * 2022-11-29 2023-03-03 深圳市博硕科技股份有限公司 A kind of die-cut splicing equipment and its die-cut splicing process
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