CN1008945B - Linear type displacement measurement instrument - Google Patents
Linear type displacement measurement instrumentInfo
- Publication number
- CN1008945B CN1008945B CN 85104020 CN85104020A CN1008945B CN 1008945 B CN1008945 B CN 1008945B CN 85104020 CN85104020 CN 85104020 CN 85104020 A CN85104020 A CN 85104020A CN 1008945 B CN1008945 B CN 1008945B
- Authority
- CN
- China
- Prior art keywords
- master calibration
- calibration chi
- displacement measurement
- balladeur train
- aforesaid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 42
- 238000005259 measurement Methods 0.000 title claims abstract description 30
- 230000007935 neutral effect Effects 0.000 claims abstract description 34
- 238000012423 maintenance Methods 0.000 claims description 3
- 230000004075 alteration Effects 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 6
- 230000008602 contraction Effects 0.000 description 3
- 238000001764 infiltration Methods 0.000 description 3
- 230000008595 infiltration Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The present invention relates to a linear displacement measurement device which is composed of a casing fixed to one side of a relative displacement element, a main scale, a slide frame, a dial scale and a detector, wherein a connecting mechanism is connected with the slide frame and the other side of the relative displacement element; one end of the connecting mechanism is connected with the slide frame, and the other end is connected with the other side of the relative displacement element in the standard length position in the straight interval which maintains the main scale, namely a neutral layer of the total body of the casing with the main scale, and the connecting mechanism allows the posture alteration of the slide frame which maintains the verticality of the normal line of the bend surface of the dial scale.
Description
The present invention relates to linear type displacement measurement instrument, especially relevant with the improvement of the optical profile type linear type displacement measurement instrument of master calibration chi made from transparent materials such as glass and dials rule.From now as can be known, linear pattern optical displacement determinator by the hollow thin-long casing of a side that is fixed on the member that relatively moves, the master calibration chi of installing along total length direction in this housing inboard, is connected with the opposite side of the member that relatively moves along aforesaid master calibration chi, at balladeur train mobile on its total length direction, the relative detecting device composition that remains on dials rule on the aforementioned balladeur train, the amount of moving that relatively moves between aforesaid master calibration chi and the dials rule is converted to electric signal with aforesaid master calibration chi.In such displacement measurement apparatus, because it is 1 μ m(micron that resultnat accuracy requires) about, so the requirement of part and assembly structure thereof is very strict in addition to it, in addition, even part is the same in addition for each, also there are the so-called instrument error special circumstances relevant with the quality of precision.The distinctive a kind of situation of this displacement measurement apparatus is can not the displacement measurement apparatus of assembling reliably under the structure of regulation in statu quo be assemblied in mechanically.That is, be assemblied in mechanical occasion, displacement measurement apparatus is applied external force, the result bends the straight master calibration chi of adjustment.The displacement that makes the actual displacement amount of the balladeur train that is connected with the opposite side of the member that relatively moves like this and read from the master calibration chi of bending produces error, causes what is called can not guarantee the unfavorable condition of accuracy of detection.At present, produce the bending of master calibration chi during this assembling, started viewpoint that so-called detection error is difficult to avoid, should alleviate because of its crooked error that produces, the countermeasure taked be that imagination keeps the two ends of master calibration chi freely to add the simple beam of crooked distance in the space.For example, at the public clear 56-27803 of spy, special public clear 57-5441 among the special public clear 58-9007 etc., has disclosed the structure at the center connection balladeur train of the neutral line of master calibration chi itself or scale face.Promptly, the example that each has earlier, as thickness direction, middle as neutral line master calibration chi thickness direction for the master calibration chi, set up the prerequisite that a side is extended, opposite side shrinks, in the property layer balladeur train is rotated connection freely for the master calibration chi therein.But, there is example not talkative satisfactory for result earlier, along with high precision int in recent years, expect that it can be improved.That is, the bending of the master calibration chi that takes place when making practical set takes place along with the distortion of the housing that is assembling the master calibration chi.Therefore, the bending of master calibration chi is along with the curvature of housing, according to the shift in position of master calibration chi in housing.So when considering that it obeys the characteristic that beam had that is made up by different materials, the example that has earlier is with regard to utmost point imperfection.
The present invention with provide can eliminate the aforesaid problem that has earlier, can be in the neutral line of the reality of master calibration chi, the opposite side of the member that relatively moves is connected with balladeur train, therefore, the bending of master calibration chi during regardless of assembling, the linear type displacement measurement instrument of energy high-precision measuring displacement is a purpose.
The present invention is by at the fixing hollow thin-long casing of a side of the member that relatively moves, the master calibration chi of installing along total length direction in this housing inboard, the balladeur train that moves at its total length direction along aforesaid master calibration chi that is connected with the opposite side of the member that relatively moves, relative with aforesaid master calibration chi, at the dials rule that is contained on the aforesaid balladeur train, rate of travel between aforesaid master calibration chi and the dials rule is converted in the linear type displacement measurement instrument that the detecting device of electric signal forms, by allowing that an end is connected with balladeur train, the other end is connected with the opposite side of the aforesaid member that relatively moves in the overall neutrality of the housing that the master calibration chi is installed, simultaneously also can permitted energy keep the dials rule to become the bindiny mechanism of posture changing of the balladeur train of plumbness for the normal of the flexure plane of master calibration chi, connect aforesaid balladeur train and the opposite side of the member that relatively moves.Realized purpose of the present invention thus.
In addition, form of implementation of the present invention is on the intersection of overall cross one another several neutral lines of the housing that the master calibration chi is installed, and connects by aforesaid bindiny mechanism, uses open-and-shut structure, and the present invention is specialized.
Form of implementation of the present invention is that single bar is made by aforesaid bindiny mechanism, and the utmost point is realized the present invention simply.
Another form of implementation of the present invention is at overall cross one another each neutral line of housing that the master calibration chi is installed, and carries out the connection by aforesaid bindiny mechanism respectively.Even the overall neutral line intersection of housing of master calibration chi is installed, be positioned within the object of master calibration chi etc., the present invention is specialized.
Form of implementation of the present invention be one of 2 groups of laminated springs, bindiny mechanism made by aforesaid bindiny mechanism can shared linking arm, not only constitute fairly simplely, nor influenced by the fixing means of master calibration chi and housing.
The other form of implementation of the present invention is the connection carriage that aforesaid connection machinery is made 2 groups of laminated springs and connected between them, the posture changing of balladeur train can be carried out sleekly, be present in any position even the overall neutral line of housing of master calibration chi is installed, they also adapt to easily.
In the present invention, owing to be connected with balladeur train by the end that can allow the member that relatively moves, the other end is in the standard length part that keeps the straight interval of master calibration chi, promptly, in the overall neutral line of the housing that comprises master calibration chi and mounting means, be connected with the opposite side of the aforesaid member that relatively moves, also permitted energy keeps the dials rule to become the bindiny mechanism of the balladeur train posture changing of plumbness to connect the opposite side of the balladeur train and the member that relatively moves for the normal of the flexure plane of master calibration chi, in the actual neutral line that the master calibration chi is installed, balladeur train is connected with the opposite side of the member that relatively moves, and the actual flexion of master calibration chi is done correspondingly and is connected during according to assembling.The bending of master calibration chi still can be measured displacement accurately during therefore regardless of assembling.
According to inventor's experiment, there is difference between the imaginary characteristic of the actual flexion of master calibration chi and present example, confirm that thus the effect of the example have earlier is undesirable.That is, in the bending of reality, exist the thickness direction both sides of master calibration chi to produce extension or contraction simultaneously.Therefore, specified standard length may not remain in the Width of the master calibration chi after the distortion when master calibration chi was straight, so the intention that example is arranged earlier that exists the constant position of standard length as the basis of revisal in the master calibration chi, not talkative its basis has ubiquity.
With above situation the 1st figure, illustrate in greater detail.The 1st figure has showed in the straight housing 10 turgidly for ease of explanation, and straight master calibration chi 12 is installed, and when assemblings such as machinery, is bent the overall extension 12 of generation because of housing 10
1Perhaps overall shrinkage 12
2State.Among the figure, T-T represents the vertical neutral axis of the housing 10 determined with housing overall shape etc., the center line of the Width of T '-T ' expression master calibration chi 12, and when being conceived to the master calibration chi, also neutral axis is indulged in expression.Therefore,, the housing 10 of master calibration chi 12 totally studies as combination beam if will being installed, its vertical neutral axis T-T, even housing 10 bendings, length is constant.But master calibration chi 12 departs from Y apart from the vertical neutral axis T-T of housing 10, and its standard length l-l can extend into l
1-l
1(totally extend 12
2Situation) or be shrunk to l
2-l
2(overall shrinkage 12
2Situation).Here elongation λ
1Perhaps amount of contraction λ
2All use the relation of following formula to represent:
λ
i＝ε
il
i＝（y
i/p
i）l
i（1）
Wherein: ε
i-distortion
l
iThe natural length of-master calibration chi 12
p
iThe radius-of-curvature of the bending of-master calibration chi 12.
Therefore, each number of degrees are at (λ
1/2+ λ
1/2) or (λ
2/2+ λ
2/2) extend or contraction along the direction of arrow.And say that the standard length L when master calibration chi 12 is straight just exists with ... overall vertical neutral axis T-T.Therefore, make the motion track and the vertical neutral axis T-T engagement of the mechanical movable piece that straight line moves.And if the number of degrees when this moves are at (L+ λ
1) or (L-λ
2) in the scope, that is, read the identical reading of the number of degrees in the standard length when straight, two sides' value equates, does not exist because the error that the bending of master calibration chi 12 produces.And say, the vertical neutral axis T-T of housing, obvious in the installation situation of housing 10 and master calibration chi 12 is different, if its structure one determines that it is also just definite, and with flexible irrelevant.That is,, do not produce displacement in its vertical direction even can think in longitudinally generation relative displacement.In addition, even the bending direction of master calibration chi 12 changes, its vertical neutral axis T-T is also constant, does not limit the assembling form to housing, can utilize vertical neutral axis T-T.
Above-mentioned explanation is narrated the Width of master calibration chi, also can do same consideration for the short transverse of master calibration chi.It is accomplished to the present invention is based on above-mentioned result of study.
According to the present invention, one end of bindiny mechanism, the not bending of tube shell, move on the line of constant length, the dials rule can be read the number of degrees of the standard length that is equivalent to this rule extension (perhaps shrinking) by the bending change corresponding to this housing, and the other end, that is, the movable length of movable piece is consistent with the amount of reading, the error that produces when not having assembling.The position of neutral line can be selected in any place of element structure, in housing, guarantee the essential space of guide carriage easily.The position of the scale mark of attached master calibration chi is unrestricted.The shape of regulation housing etc., the overall neutrality of the neutral line that makes the master calibration chi and housing overlaps, and can simplify bindiny mechanism.Do not limit the assembly method of master calibration chi and housing, can at will be chosen as the movable assembly method of length direction that prevents to produce breakage because of the rigid body thermal deformation.In addition, even how concavo-convex bending of chi in the housing, the neutral line of member defined is constant, so during assembling work, needn't consider deformation direction or/and degree.
Brief description of drawings:
Characteristic of the present invention and other purpose and advantage, the explanation of the accompanying drawing content that will relate to from below is well understood to, and same reference marks is indicated same or similar parts in the accompanying drawing, and its symbol is arabic numeral.
The 1st figure is an explanation schematic diagram of the present invention.
The 2nd figure is the cross-sectional view of the 1st example structure of the linear type displacement measurement instrument relevant with the present invention.
The 3rd figure is the skiagraph of the 1st embodiment.
The 4th figure is bindiny mechanism's oblique view of the 1st embodiment.
The 5th figure is the oblique view of intersection of the neutral line of the master calibration chi of the 1st embodiment and housing.
The 6th figure is the planimetric map of allowing state of the balladeur train posture changing in bindiny mechanism of the 1st embodiment.
The 7th figure is the planimetric map of allowing state of balladeur train posture changing of the variation of the 1st embodiment.
The 8th figure is the cross-sectional view of the 2nd example structure of the linear type displacement measurement instrument relevant with the present invention.
The 9th figure is the skiagraph of the 2nd embodiment.
The 10th figure is the oblique view of the connection machinery of the 2nd embodiment.
The 11st figure is the cross-sectional view of the 3rd embodiment of the linear type displacement measurement instrument relevant with the present invention.
The 12nd figure is the skiagraph of the 3rd embodiment.
The 13rd figure is the oblique view of the bindiny mechanism of the 3rd embodiment.
The following embodiment that adopts optical profile type linear type displacement measurement instrument of the present invention that describes in detail with reference to figure.
The 1st embodiment of the present invention, shown in the 2nd figure to the 5 figure, in the hollow elongated housing 10 of fixing by a side 8A place of the member that relatively moves, the reflection-type master calibration chi of installing along total length direction in this housing inboard 12, the balladeur train 14 that on total length direction, moves along aforesaid master calibration chi 12 that is connected with the member opposite side 8B that relatively moves, relative with the scale mark 12A of aforesaid master calibration chi 12, remain on 4 dials rules 16 on the balladeur train 14, reach the detecting device (omitting among the figure) that the displacement that relatively moves between aforesaid master calibration chi 12 and the dials rule 16 is converted to electric signal, and the reflection-type optical formula linear type displacement measurement instrument that the intersection T-T of mutually perpendicular 2 neutral lines of master calibration chi 12 places the space of housing 10 to form, by allowing that an end is connected with balladeur train 14, the other end is seen Fig. 5 at the intersection T-T(of overall 2 the orthogonal crossing neutral lines of the housing 10 that master calibration chi 12 is installed) on, be connected with the aforesaid opposite side that relatively moves member 8B, also can allow to keep dials rule 16 to become the single bar 20 and the linking arm 21 of posture changing of the balladeur train 14 of plumbness for the normal of the flexure plane of master calibration chi 12, connect the opposite side 8B of the aforesaid balladeur train 14 and the member that relatively moves.
Among the figure, the 22nd, the roller that guide carriage 14 moves in housing 10, the 24th, the auxiliary wheel that the auxiliary balladeur train 14 of built-in spring (omitting among the figure) engages with the interval that master calibration chi 12 is stipulated through being everlasting, the 26th, light source.Aforesaid master calibration chi 12 and dials rule 16 usefulness as transparent materials such as glass, form so that transmittance section uniformly-spaced and light tight are mutual.Why mark 4 kinds of scale marks, be because carry out the judgement of moving direction mutually, and cut apart the displacement signal that obtains with detecting device by changing mutual position at aforesaid dials rule 16 places.Aforesaid bar 20 as shown in Figure 6, at its two ends, is done to such an extent that rotate freely, therefore, and balladeur train 14 posture changing of the frequent state that becomes to intersect vertically of normal of the flexure plane of 16 pairs of master calibration chis 12 of permitted energy maintenance dials rule.And the structure of allowing balladeur train 14 posture changing is not done qualification, for example, as shown in Figure 7 with maintenance place of the dials rule 16 in the joint of bar 20 and balladeur train 14 and the balladeur train 14, do to such an extent that rotate freely, and, doing to such an extent that on the direction of principal axis of arm 18, slide freely with the joint of bar 20 the arm 18 that connects dials rule 16 and bar 20.
In the 1st embodiment, the intersection T-T of two neutral lines of master calibration chi 12 only adopts single bar 20 in the space of housing 10, and the utmost point has been realized the present invention simply.
Following the 2nd embodiment of Xiang Xishuominging.
The 2nd embodiment is suitable for representing the present invention with Fig. 8 to Figure 10.By the housing 10 same with aforesaid the 1st embodiment, the master calibration chi 12 of infiltration type, balladeur train 14, dials rule 16, detecting device (omitting among the figure) is formed, and the neutral line intersection of master calibration chi 12 as one man is applicable to infiltration type optical profile type linear type displacement measurement instrument in the occasion of master calibration chi 12 monomers and the occasion that is installed in the housing 10, by allowing that an end is connected with balladeur train 14, the other end is connected with the opposite side 8B of each member that relatively moves in overall mutually perpendicular 2 neutral lines of the housing 10 that master calibration chi 12 is installed, also allow and keep dials rule 16 to become 2 groups of laminated springs 30 of balladeur train 14 posture changing of plumbness for the normal of the flexure plane of master calibration chi 12,32, the opposite side 8B of the connection balladeur train 14 and the member that relatively moves.Other point is identical with aforesaid the 1st embodiment, omits explanation.Aforesaid laminated spring 30,32 is configured in 1/2 the elevation plane of height b of master calibration chi 12 respectively and in the plane of 1/2 thickness of the thickness t of master calibration chi 12.Aspect present embodiment, a side of bindiny mechanism can shared linking arm, and is not only simple in structure, the characteristics that have the fixing means that is not subjected to master calibration chi 12 and housing 10 to influence.
Below the 3rd embodiment of the present invention done explain.
The 3rd embodiment represents the present invention with the 11st figure to the 13 figure.By the housing 10 identical with aforementioned the 2nd embodiment, master calibration chi 12, balladeur train 14, dials rule 16, detecting device (omitting among the figure) is formed, and master calibration chi 12 is installed in the infiltration type optical profile type linear type displacement measurement instrument of its intersection of neutral line in master calibration chi 12 of housing 10, by allowing an end to be connected with balladeur train 14 respectively, the other end is connected with the opposite side 8B of the aforesaid member that relatively moves in overall 2 the orthogonal crossing neutral lines of the housing 10 that master calibration chi 12 is installed, also allow and keep dials rule 16 to become 2 groups of laminated springs 34 of posture changing of the balladeur train 14 of plumbness for the normal of the flexure plane of master calibration chi 12,36 and web joint spring 34 be connected carriage 38 with 38, connect the opposite side 8B of the balladeur train 14 and the member that relatively moves.
Other point is identical with aforesaid embodiment, and omission is described.
Among the 3rd embodiment,, can carry out the posture changing of balladeur train 14 sleekly because of connection carriage 38 being installed at balladeur train 14 with between connecting 21.
Among the 3rd embodiment, there is what kind of occasion, also adapts to easily even comprise the overall neutral line of the housing of master calibration chi 12.And in the aforesaid enforcement, balladeur train 14 is by 12 or master calibration chi 12 and housing 10 both guiding of master calibration chi own, and applicable object of the present invention is not limited thereto, and for example, only with housing 10 guide carriage 14, can be suitable for equally.
Claims (12)
1, a kind of linear type displacement measurement instrument comprises: a hollow thin-long casing, direction of elongate are exactly the straight line moving direction of member of relatively moving, and this housing is connected on those one of members that relatively move; One master calibration chi is fixed on this housing inboard, along its longitudinally; One balladeur train is connected on another of those members that relatively move, and can move along the longitudinally of this master calibration chi; One bindiny mechanism is connecting this balladeur train and this another member that relatively moves, and makes dials rule that this balladeur train supports facing to this master calibration chi; One detecting device is used for the rate of travel between this master calibration chi and this dials rule is converted to electric signal;
Feature of the present invention is that an end of this bindiny mechanism is being connected this another member that relatively moves being arranged in neutral line that this housing comprises the integral body that this master calibration chi is installed, thereby and this bindiny mechanism can allow this balladeur train to change the state that posture can be supported at this dials rule to intersect vertically the normal of this master calibration chi flexure plane.
2,, it is characterized in that aforesaid balladeur train is guided by master calibration chi itself according to the displacement measurement apparatus of claim 1.
3,, it is characterized in that aforesaid balladeur train is by master calibration chi and housing guiding according to the displacement measurement apparatus of claim 1.
4,, it is characterized in that aforesaid balladeur train is only guided by housing according to the displacement measurement apparatus of claim 1.
5,, it is characterized in that on the intersection of the neutral line of the overall cross one another majority of the housing that the master calibration chi is installed, carrying out the connection of aforementioned bindiny mechanism according to the displacement measurement apparatus of claim 1.
6,, it is characterized in that aforesaid bindiny mechanism is made of single bar according to the displacement measurement apparatus of claim 5.
7,, it is characterized in that aforesaid bar does to such an extent that rotate freely at both ends according to the displacement measurement apparatus of claim 6.
8, according to the displacement measurement apparatus of claim 6, it is characterized in that doing dials rule maintenance place in the joint of aforesaid bar and balladeur train and the balladeur train to such an extent that rotate freely, and, doing to such an extent that slide freely on the direction of principal axis at arm with the bar joint the arm that connects dials rule and bar.
9,, it is characterized in that in overall cross one another each neutral surface of the housing that the master calibration chi is installed, carrying out respectively connection by aforementioned bindiny mechanism according to the displacement measurement apparatus of claim 1.
10,, it is characterized in that aforesaid bindiny mechanism is made of 2 groups of laminated springs according to the displacement measurement apparatus of claim 9.
11, according to the displacement measurement apparatus of claim 10, it is characterized in that aforesaid laminated spring (a plurality of), be configured in respectively in the plane at 1/2 thickness place of the thickness that reaches the master calibration chi in the plane of 1/2 height of master calibration chi.
12,, it is characterized in that aforesaid bindiny mechanism is made of 2 groups of laminated springs and the connection carriage that is connected between the leaf spring according to the displacement measurement apparatus of claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85104020 CN1008945B (en) | 1985-05-25 | 1985-05-25 | Linear type displacement measurement instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85104020 CN1008945B (en) | 1985-05-25 | 1985-05-25 | Linear type displacement measurement instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85104020A CN85104020A (en) | 1986-12-03 |
| CN1008945B true CN1008945B (en) | 1990-07-25 |
Family
ID=4793588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 85104020 Expired CN1008945B (en) | 1985-05-25 | 1985-05-25 | Linear type displacement measurement instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1008945B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100355919C (en) * | 2003-11-26 | 2007-12-19 | 马渊马达株式会社 | Material for sliding contacts, clad composite material and small-sized DC motor using the same |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6355349B2 (en) * | 2014-02-04 | 2018-07-11 | 株式会社ミツトヨ | Linear encoder |
| EP3276310B1 (en) * | 2016-07-27 | 2018-09-19 | Dr. Johannes Heidenhain GmbH | Length measuring device |
| CN111896390A (en) * | 2019-05-06 | 2020-11-06 | 黄国轩 | Thermal elongation measuring device |
-
1985
- 1985-05-25 CN CN 85104020 patent/CN1008945B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100355919C (en) * | 2003-11-26 | 2007-12-19 | 马渊马达株式会社 | Material for sliding contacts, clad composite material and small-sized DC motor using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN85104020A (en) | 1986-12-03 |
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