CN100439817C - Electron optical device for direct cooling long wave infrared detector of pulse tube refrigerator - Google Patents

Abstract

The invention relates to an electron optical device for directly cooling a long wave infrared detector by a pulse tube refrigerator, which comprises: a pulse tube refrigerator; a linear compressor is connected with a cold accumulator tube of the pulse tube refrigerator through a connecting tube and a hot end flange; a vacuum cover is arranged on the hot end flange; the phase modulation mechanism at the hot end of the refrigerator is connected with a cold accumulator tube of the pulse tube refrigerator through a hot end flange; the cold head is connected with a cold end platform which is made of red copper and used for fixing the infrared device to be processed by long wave through a heat-conducting silicone sheet or a soft metal sheet with high heat conductivity coefficient; a radiation protection protective cover is arranged on the cold end platform; the wall of the vacuum cover is respectively provided with a test window connected with the measurement system and a vacuum pumping channel communicated with the vacuum system; the front end cover wall of the vacuum cover is provided with an infrared filter; the long-wave fiber external device is connected with a measuring system arranged outside the vacuum cover through a coaxial shielding wire and a measuring lead. The invention has the advantages of simple structure, small cold loss, low working temperature, convenient operation and the like.

Description

Electron optical device for direct cooling of long-wave infrared detection devices by pulse tube refrigerator

technical field

The invention belongs to the electron optical device in the technical field of refrigeration and low temperature, in particular to an electron optical device in which a pulse tube refrigerator directly cools a long-wave infrared detection device.

Background technique

The long-wave infrared detection system specifically refers to an electron optical system composed of a quantum well infrared detection device and a miniature cryogenic refrigerator. The main purpose of using a miniature cryogenic refrigerator to cool the long-wave infrared detection system is to reduce the size of the equipment, ensure the normal function of the electronic device or system, or improve the sensitivity of the device, shield or reduce the thermal noise from the system itself or the surroundings, and make it The signal-to-noise ratio can be greatly improved.

The widespread application of LWIR devices depends on the development of cryogenic systems. In recent years, with the development of large area array and focal plane infrared detection device manufacturing technology; infrared technology is developing at an unprecedented speed and scale, forming a huge industry, and its further development urgently needs to be cooled by mechanical refrigeration methods. Infrared detection devices, and the refrigeration temperature of the refrigerator is required to develop towards the deep low temperature zone below 40K.

At present, domestic cooling infrared devices usually use cryogenic liquid (liquid nitrogen or liquid helium), J-T refrigeration, radiation refrigeration, semiconductor refrigeration and mechanical refrigeration (such as Stirling refrigerator). For the cooling of the long-wave infrared detection device in the temperature range below 40K, there are only two methods: liquid helium cooling and mechanical refrigerator cooling. The use of liquid helium cooling is not only costly, but also inconvenient to use. The use of mechanical refrigeration is an inevitable choice. Because the cold end of the pulse tube refrigerator completely cancels the mechanical moving parts, which makes it have the natural advantages of small mechanical vibration and small electromagnetic interference, and can be directly coupled with infrared devices. Compared with other mechanical refrigerators, it is more convenient to use , the cost is lower, and the cooling loss is smaller.

Contents of the invention

The purpose of the present invention is to combine the advantages of the pulse tube refrigeration technology and the characteristics of the long-wave infrared device, and propose an electron optical device in which the pulse tube refrigerator directly cools the long-wave infrared detection device.

Technical scheme of the present invention is:

The pulse tube refrigerator provided by the present invention directly cools the electron optical device of the long-wave infrared detection device, including:

A pulse tube refrigerator; the pulse tube refrigerator is a single-stage pulse tube refrigerator with a coaxial or parallel structure;

A linear compressor 1; the linear compressor 1 is connected to the regenerator pipe 4 of the pulse tube refrigerator through a connecting pipe and through a hot end flange 3;

a vacuum cover 15 installed on the hot end flange 3; and

The hot end phase adjustment mechanism 20 of the refrigerator is composed of the two-way inlet valve 2, the inertia tube 11 and the gas storehouse 12; when the pulse tube refrigerator is a pulse tube refrigerator with a single-stage coaxial structure, the phase adjustment mechanism at the hot end of the refrigerator 20 is connected to the regenerator 4 of the pulse tube refrigerant through the hot end flange 3; when the pulse tube refrigerator is a single-stage parallel structure pulse tube refrigerator, the phase adjustment mechanism 20 at the hot end of the refrigerator passes through the hot end flange 3 Link to each other with the pulse tube 10 of pulse tube refrigerator;

The cold head 5 of the pulse tube refrigerator is connected to the cold end platform 6 made of red copper for fixing the long-wave infrared device 7 through a thermally conductive silicone grease sheet or soft metal sheet with high thermal conductivity; the cold end platform 6 Radiation shield 13 is installed on it;

The wall of the vacuum cover 15 is respectively provided with a test window 16 connected to the measurement system and a vacuum passage connected to the vacuum system; an infrared filter 14 is installed on the front cover wall of the vacuum cover 15;

The long-wave infrared device 7 to be tested is connected to the measurement system outside the vacuum cover 15 through a coaxial shielded wire 8 and a measurement lead 9 .

The cold end platform 6 is fixedly installed with a red copper sheet-type fixture for fixing the long-wave infrared device 7 to be cooled.

The pulse tube refrigerator is a pulse tube refrigerator with an operating temperature of 30-45K.

The vacuum radiation shield 13 is a gold-plated radiation shield.

The pulse tube refrigerator provided by the invention directly cools the electron optical device of the long-wave infrared detection device, which has the advantages of simple structure, small input power, less cold loss, low working temperature, convenient operation, and low cost.

Description of drawings

Fig. 1 is the structural representation of the cooling long-wave infrared device that adopts single-stage coaxial pulse tube refrigerator in the present invention;

Fig. 2 is the structural representation of the cooling long-wave infrared device that adopts single-stage parallel pulse tube refrigerator in the present invention;

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Example 1:

Fig. 1 is the structural representation of the cooling long-wave infrared device that adopts single-stage coaxial pulse tube refrigerator in the present invention; The regenerator tube 4 and pulse tube 10 of the single-stage coaxial pulse tube refrigerator adopt coaxial structure, i.e. regenerator The tube 4 is coaxially sleeved on the outer wall of the pulse tube 10, and the interior of the regenerator tube 4 is filled with tightly pressed stainless steel wire mesh sheets; a linear compressor 1 passes through the connecting tube and passes through the hot end flange 3 and the pulse tube refrigerator. The regenerator tube 4 is connected; the phase adjustment mechanism 20 at the hot end of the refrigerator composed of the two-way inlet valve 2, the inertia tube 11 and the gas storage 12 is connected with the regenerator tube 4 of the pulse tube refrigerator through the hot end flange 3; the pulse tube refrigeration The cold head 5 of the machine is connected with a cold end platform 6 made of red copper through a heat-conducting silicone grease sheet or soft metal sheet (such as an indium sheet) having a high thermal conductivity; a radiation shield 13 is installed on the cold end platform 6; to be cooled The long-wave infrared device 7 is installed on the cold end platform 6 (the cooling long-wave infrared device 7 can be sleeved in a red copper sheet fixture of any shape, so as to increase the heat exchange around the cooled long-wave infrared device 7 and reduce the cooling long-wave infrared device 7). temperature difference between the infrared device 7 and the cold end platform 6); the cold end platform 6 is placed in the radiation shield 13 with high reflectivity installed thereon; a vacuum cover 15 is also arranged on the hot end flange 3 The front end of the vacuum cover 15 is equipped with an infrared filter 14 for transmitting infrared light; the long-wave infrared device 7 is connected with the measurement system outside the vacuum cover 15 by a coaxial shielded wire 8 and a measurement lead 9; Vacuum cover 15 (evacuated through a vacuum system connected thereto); the single-stage coaxial pulse tube refrigerator operates at a refrigeration temperature of about 30-45K.

The method for cooling long-wave infrared devices provided by the invention by using a coaxial pulse tube refrigerator has the advantages of simple structure, small cold loss, low working temperature, convenient operation and the like.

Example 2:

Fig. 2 is a schematic structural diagram of a cooling long-wave infrared device using a single-stage parallel pulse tube refrigerator according to the present invention. The regenerator tube 4 and the pulse tube 10 of the single-stage parallel pulse tube refrigerator adopt a parallel structure, that is, the regenerator tube 4 and the pulse tube 10 are in a U-shaped arrangement, and the interior of the regenerator tube is filled with tightly pressed stainless steel wire mesh sheets; a linear compressor 1 is connected to the regenerator tube 4 of the pulse tube refrigerator through the connecting pipe and the hot end flange 3 ; A refrigerator hot-end phase adjustment mechanism 20 composed of a two-way inlet valve 2, an inertia tube 11 and an air storehouse 12 is connected to each other through a hot-end flange 3 and the pulse tube 10 of the pulse tube refrigerator; The head 5 is connected to the cold-end platform 6 made of red copper through a heat-conducting silicone grease sheet or a soft metal sheet (such as an indium sheet) with a high thermal conductivity; radiation cover); the long-wave infrared device 7 is installed on the cold end platform 6 (the cooling long-wave infrared device 7 can be enclosed in any shape of red copper sheet type fixture, to increase the exchange rate around the cooled long-wave infrared device 7 heat, reduce the temperature difference between the cooling long-wave infrared device 7 and the cold end platform 6); the cold end platform 7 is placed in the radiation protection cover 13 with high reflectivity installed thereon; on the hot end flange 3 A vacuum cover 15 is also provided: the vacuum cover 15 is provided with a window for transmitting infrared light; the long-wave infrared device 7 is connected with the measurement system outside the vacuum cover 15 by a coaxial shielded wire 8 and a measurement lead 9 ; The vacuum cover 15 is evacuated through the vacuum system communicated with it; the front end of the vacuum cover 15 is equipped with an infrared filter 14; the single-stage coaxial pulse tube refrigerator is at a refrigeration temperature of about 30-45K run.

The method for cooling long-wave infrared devices provided by the invention by using a parallel pulse tube refrigerator has the advantages of simple structure, small cold loss, low working temperature, convenient operation and the like.

Claims (8)

1. An electro-optical device for direct cooling of long-wave infrared detection devices by a pulse tube refrigerator, comprising: A single-stage coaxial structure pulse tube refrigerator; A linear compressor (1); the linear compressor (1) is connected to the regenerator tube (4) of the pulse tube refrigerator through a connecting pipe and a hot end flange (3); a vacuum cover (15) mounted on said hot end flange (3); and The hot end phase adjustment mechanism (20) of the refrigerator is composed of a two-way inlet valve (2), an inertia tube (11) and an air bank (12); the hot end phase adjustment mechanism (20) of the refrigerator passes through the hot end flange ( 3) It is connected to the cool accumulator (4) of the pulse tube refrigerant; The cold head (5) of the pulse tube refrigerator is connected to the cold end platform (6) in order to fix the long-wave infrared device (7) to be fixed by a thermally conductive silicone grease sheet or soft metal sheet with a high thermal conductivity; A radiation shield (13) is installed on the cold end platform (6); The wall of the vacuum cover (15) is respectively provided with a test window (16) connected to the measurement system and a vacuuming channel connected with the vacuum system; an infrared filter is installed on the front cover wall of the vacuum cover (15). slices (14); The long-wave infrared device (7) to be tested is connected with the measurement system arranged outside the vacuum cover (15) through a coaxial shielded wire (8) and a measurement lead wire (9). 2. The electron optical device for directly cooling the long-wave infrared detection device by the pulse tube refrigerator according to claim 1, characterized in that, the cold-end platform (6) is fixedly installed with a long-wave infrared device (7) to be cooled Copper sheet fixings. 3. The electron optical device for directly cooling long-wave infrared detectors by a pulse tube refrigerator according to claim 1, wherein the pulse tube refrigerator is a pulse tube refrigerator with an operating temperature of 30-45K. 4. The electron optical device for directly cooling long-wave infrared detection devices by a pulse tube refrigerator according to claim 1, characterized in that the radiation protection cover (13) is a gold-plated radiation protection cover. 5. An electro-optical device for direct cooling of long-wave infrared detection devices by a pulse tube refrigerator, comprising: A single-stage parallel structure pulse tube refrigerator; A linear compressor (1); the linear compressor (1) is connected to the regenerator tube (4) of the pulse tube refrigerator through a connecting pipe and a hot end flange (3); a vacuum cover (15) mounted on said hot end flange (3); and The hot end phase adjustment mechanism (20) of the refrigerator is composed of a two-way inlet valve (2), an inertia tube (11) and an air bank (12); the hot end phase adjustment mechanism (20) of the refrigerator passes through the hot end flange ( 3) Link to each other with the pulse tube (10) of the pulse tube refrigerator; The cold head (5) of the pulse tube refrigerator is connected to the cold end platform (6) in order to fix the long-wave infrared device (7) to be fixed by a thermally conductive silicone grease sheet or soft metal sheet with a high thermal conductivity; A radiation shield (13) is installed on the cold end platform (6); The wall of the vacuum cover (15) is respectively provided with a test window (16) connected to the measurement system and a vacuuming channel connected with the vacuum system; an infrared filter is installed on the front cover wall of the vacuum cover (15). slices (14); The long-wave infrared device (7) to be tested is connected with the measurement system arranged outside the vacuum cover (15) through a coaxial shielded wire (8) and a measurement lead wire (9). 6. The electron optical device for directly cooling the long-wave infrared detection device by the pulse tube refrigerator according to claim 5, characterized in that, the cold end platform (6) is fixedly installed with a long-wave infrared device (7) to be cooled Copper sheet fixings. 7. The electron optical device for directly cooling long-wave infrared detectors by a pulse tube refrigerator according to claim 5, wherein the pulse tube refrigerator is a pulse tube refrigerator with an operating temperature of 30-45K. 8. The electro-optical device for direct cooling of long-wave infrared detection devices by a pulse tube refrigerator according to claim 5, characterized in that the radiation protection cover (13) is a gold-plated radiation protection cover.

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