CN100426069C - Pressure defoaming furnace and application method thereof - Google Patents
Pressure defoaming furnace and application method thereof Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 110
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 239000007789 gas Substances 0.000 claims description 110
- 239000000758 substrate Substances 0.000 claims description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000003570 air Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000002912 waste gas Substances 0.000 abstract description 4
- 238000007872 degassing Methods 0.000 description 29
- 230000007246 mechanism Effects 0.000 description 8
- 238000009423 ventilation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
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Abstract
Description
技术领域 technical field
本发明是关于一种加压脱泡系统及其应用方法,尤指一种适用于去除面板气泡用的加压脱泡系统及其应用方法。The invention relates to a pressurized defoaming system and its application method, especially to a pressurized defoaming system suitable for removing air bubbles on a panel and its application method.
背景技术 Background technique
目前面板工艺设备中,一般皆设有独立运作的加压脱泡炉,其主要目的是用以去除偏光膜贴合面板后残留的气泡。于传统作法中,是将盛满面板的卡匣置入独立运作的加压脱泡炉内,再进行加压加热并保持一段工艺时间。当达到工艺所需时间后,必须先排除炉内高压高温的空气,才能打开炉门换取另一批卡匣,以继续进行下一批面板去除气泡的工艺。At present, in the panel process equipment, there is generally an independently operated pressurized defoaming furnace, the main purpose of which is to remove the residual air bubbles after the polarizing film is pasted on the panel. In the traditional method, the cassette filled with panels is put into an independently operated pressurized defoaming furnace, and then pressurized and heated for a period of time. When the time required for the process is reached, the high-pressure and high-temperature air in the furnace must be removed before the furnace door can be opened to exchange for another batch of cassettes, so as to continue the process of removing air bubbles for the next batch of panels.
请参见图1所示,图1为一传统独立运作的加压脱泡炉101的操作系统100示意图。其中,公知操作系统100中,可包括一加压脱泡炉101、一可承载三个面板卡匣A、B、C的承载机构102、以及一运送各个卡匣的自动输送机构103。首先,由自动输送机构103可分别将内含有未经处理面板的卡匣自出口110送入操作系统100中,接着,再将卡匣一一置入可承载卡匣的承载机构102,并且将该已装载三个卡匣A、B、C的承载机构102送入加压脱泡炉101中,以进行面板去除气泡的加压加热工艺。当达到一预设的工艺时间后,必须先排除炉内高压高温的空气,才能由承载机构102将卡匣一一送出加压脱泡炉101。最后,是利用自动输送机构103将分别内含有已处理面板的卡匣自出口120输出操作系统100。如此,才能进行下一批面板的循环作业。Please refer to FIG. 1 , which is a schematic diagram of an
显然地,对于下一批的面板处理,传统的操作系统100必须得重新加压加温,才能于加压脱泡炉101中再进行循环性的工艺步骤。由于新世代的面板日趋大型化,相对地需要大型的加压炉体以供面板尺寸需求,然而传统作法中随着每次加压加热的供给,不仅耗费相当多的能源,且亦增长炉体加压加热的工艺时间。Apparently, for the next batch of panels to be processed, the
因此,目前亟需一种节省能源且缩短工艺时间的加压脱泡系统,以解决上述传统加压脱泡炉的操作系统所存在的问题。Therefore, there is an urgent need for a pressurized degassing system that saves energy and shortens the process time to solve the above-mentioned problems in the operating system of the traditional pressurized degassing furnace.
发明内容 Contents of the invention
本发明的目的在于提供一种加压脱泡系统。The object of the present invention is to provide a pressure defoaming system.
本发明的又一目的在于提供一种去除面板气泡的工艺方法。Another object of the present invention is to provide a process for removing air bubbles on the panel.
为实现上述目的,本发明提供的加压脱泡系统和工艺方法可以概述如下。In order to achieve the above purpose, the pressurized degassing system and process method provided by the present invention can be summarized as follows.
其中加压脱泡系统包括有:Among them, the pressure defoaming system includes:
复数个炉体,用以容置复数个面板;a plurality of furnace bodies for accommodating a plurality of panels;
复数个并联的连接管,用以分别连接至该复数个炉体,且每一连接管皆具有一连接气阀;以及A plurality of connecting pipes connected in parallel are used to respectively connect to the plurality of furnace bodies, and each connecting pipe has a connecting gas valve; and
一具有一集气阀的集气管,用以连接该复数个连接管;a gas collecting pipe with a gas collecting valve for connecting the plurality of connecting pipes;
其中,该复数个炉体至少包括一第n炉体与一第n+1炉体,该复数个并联的连接管至少包括一第n连接管与一第n+1连接管,该第n连接管用以连接于该第n炉体,该第n+1连接管用以连接于该第n+1炉体,该第n连接管与该第n+1连接管由该集气管相连通,且n为大于零的整数。Wherein, the plurality of furnace bodies at least include an nth furnace body and an n+1th furnace body, and the plurality of parallel connecting pipes at least include an nth connecting pipe and an n+1th connecting pipe, and the nth connecting pipe The pipe is used to connect to the nth furnace body, the n+1th connecting pipe is used to connect to the n+1th furnace body, the nth connecting pipe and the n+1th connecting pipe are connected by the gas collecting pipe, and n is an integer greater than zero.
所述的系统,还包括有至少一机械手臂,用以将该复数个面板置入该炉体中。The system also includes at least one mechanical arm for putting the plurality of panels into the furnace body.
所述的系统,其中该复数个面板容置于至少一面板卡匣。The system, wherein the plurality of panels are accommodated in at least one panel cassette.
所述的系统,其中该复数个面板容置于同一面板卡匣或不同面板卡匣,且该面板卡匣置入于该炉体。Said system, wherein the plurality of panels are housed in the same panel cassette or different panel cassettes, and the panel cassettes are placed in the furnace body.
所述的系统,其中该面板为一玻璃基板、一塑料基板、或一硅基板。Said system, wherein the panel is a glass substrate, a plastic substrate, or a silicon substrate.
所述的系统,其中该炉体为一密闭腔室。Said system, wherein the furnace body is a closed chamber.
本发明的去除面板气泡的工艺方法,包括以下步骤:The process method of removing panel air bubbles of the present invention comprises the following steps:
(a)提供一去除面板气泡的系统,且该系统包括有:至少一第一炉体及第二炉体、至少一并联的第一连接管及第二连接管、以及一具有一集气阀的集气管,其中,该并联的连接管分别连接至该复数个炉体,每一连接管具有一连接气阀;且该集气管连接该复数个连接管以连通该复数个炉体;(a) Provide a system for removing air bubbles in panels, and the system includes: at least one first furnace body and second furnace body, at least one parallel first connecting pipe and second connecting pipe, and a gas collecting valve The gas collecting pipe, wherein, the parallel connecting pipes are respectively connected to the plurality of furnace bodies, each connecting pipe has a connecting gas valve; and the gas collecting pipe is connected to the plurality of connecting pipes to communicate with the plurality of furnace bodies;
(b)置入至少一面板于该第一炉体中;(b) placing at least one panel in the first furnace body;
(c)通入一高压气体至该第一炉体中,以及加热该第一炉体至一预设温度并维持一预设压力;(c) passing a high-pressure gas into the first furnace body, and heating the first furnace body to a preset temperature and maintaining a preset pressure;
(d)于该第一炉体的一预设工艺时间后,由该集气管使该第一炉体与该第二炉体相连通;(d) After a preset process time of the first furnace body, the first furnace body is communicated with the second furnace body through the gas collecting pipe;
(e)关闭该连接第二炉体的连接气阀,以加压加温该第二炉体至该预设压力及该预设温度,并且开启该集气阀以排除该第一炉体的剩余气体;以及(e) close the connecting gas valve connected to the second furnace body to pressurize and heat the second furnace body to the preset pressure and the preset temperature, and open the gas collecting valve to eliminate the gas from the first furnace body residual gas; and
(f)取出该第一炉体的面板。(f) Taking out the panel of the first furnace body.
所述的工艺方法,其中于步骤(d)还包括:于该第一炉体的一预设工艺时间后,开启一连接于该第一炉体的第一连接管上的连接气阀及一连接于该第二炉体的第二连接管上的连接气阀,以由该集气管使该第一炉体与一第二炉体相连通。The process method, wherein step (d) further includes: after a preset process time of the first furnace body, opening a connecting gas valve connected to the first connecting pipe of the first furnace body and a The connecting gas valve connected to the second connecting pipe of the second furnace body is used to communicate the first furnace body with a second furnace body through the gas collecting pipe.
所述的工艺方法,其中该系统还包含第三炉体。Said process method, wherein the system further includes a third furnace body.
所述的工艺方法,其中步骤(e)还包括步骤:Described processing method, wherein step (e) also comprises the step:
(e1)于该第二炉体的该预设工艺时间后,由该集气管使该第二炉体与该第三炉体相连通;(e1) After the preset process time of the second furnace body, the gas collecting pipe connects the second furnace body with the third furnace body;
(e2)关闭该第三炉体连接的第三连接管上的连接气阀,以加压加温该第三炉体至该预设压力温度,并且开启该集气阀以排除该第二炉体的剩余气体;以及(e2) Close the connecting gas valve on the third connecting pipe connected to the third furnace body to pressurize and heat the third furnace body to the preset pressure temperature, and open the gas collecting valve to discharge the second furnace residual gas from the body; and
(e3)取出该第二炉体的面板。(e3) Taking out the panel of the second furnace body.
所述的工艺方法,其中步骤(e1)还包括:开启该连接于该第二炉体的第二连接管上的连接气阀及一连接于第三炉体的第三连接管上的连接气阀,并由该集气管使该第二炉体与该第三炉体相连通。The process method, wherein step (e1) further includes: opening the connecting gas valve connected to the second connecting pipe of the second furnace body and the connecting gas valve connected to the third connecting pipe of the third furnace body; Valve, and the second furnace body communicates with the third furnace body through the gas collecting pipe.
所述的工艺方法,其中该高压气体为空气、氮气、或氩气。The process method, wherein the high-pressure gas is air, nitrogen, or argon.
所述的工艺方法,其中该预设温度介于40℃至60℃。The process method, wherein the preset temperature is between 40°C and 60°C.
所述的工艺方法,其中该预设压力介于3kg/cm2至8kg/cm2。The process method, wherein the preset pressure is between 3kg/cm 2 and 8kg/cm 2 .
所述的工艺方法,其中该预设工艺时间介于15至25分钟。The process method, wherein the preset process time is between 15 and 25 minutes.
所述的工艺方法,其中该系统还包括有至少一机械手臂,用以将该至少一面板置入该炉体中。In the process method, the system further includes at least one mechanical arm for placing the at least one panel into the furnace body.
所述的工艺方法,其中该复数个面板容置于至少一面板卡匣。In the process method, the plurality of panels are contained in at least one panel cassette.
所述的工艺方法,其中该复数个面板卡匣容置于同一面板卡匣或不同面板卡匣,且该面板卡匣置入于该炉体中。The process method, wherein the plurality of panel cassettes are housed in the same panel cassette or different panel cassettes, and the panel cassettes are placed in the furnace body.
所述的工艺方法,其中该面板为一玻璃基板、一塑料基板、或一硅基板。Said process method, wherein the panel is a glass substrate, a plastic substrate, or a silicon substrate.
所述的工艺方法,其中该炉体为一密闭腔室。Said process method, wherein the furnace body is a closed chamber.
下面对于以上概述进行较详细地论述:The above overview is discussed in more detail below:
本发明的加压脱泡系统包括有复数个用以容置至少一面板的炉体、复数个用以分别连接至炉体的并联的连接管、以及一用以连接该复数个连接管的集气管。其中,每一连接管皆具有一连接气阀,且集气管具有一集气阀。The pressurized degassing system of the present invention includes a plurality of furnace bodies for accommodating at least one panel, a plurality of parallel connection pipes for respectively connecting to the furnace body, and a collection for connecting the plurality of connection pipes trachea. Wherein, each connecting pipe has a connecting air valve, and the air collecting pipe has an air collecting valve.
于本发明的加压脱泡系统中,复数个炉体至少包括一第n炉体与一第n+1炉体,复数个并联的连接管至少包括一第n连接管与一第n+1连接管。其中,第n连接管是用以连接于第n炉体,第n+1连接管是用以连接于第n+1炉体,且第n连接管是藉由集气管而连通于第n+1连接管。在此,本发明所提及的n是为大于零的整数。In the pressurized degassing system of the present invention, the plurality of furnace bodies at least include an nth furnace body and an n+1th furnace body, and the plurality of parallel connecting pipes at least include an nth connecting pipe and an n+1th Connecting pipe. Wherein, the nth connecting pipe is used to connect to the nth furnace body, the n+1th connecting pipe is used to connect to the n+1th furnace body, and the nth connecting pipe is connected to the n+th 1 connecting tube. Here, n mentioned in the present invention is an integer greater than zero.
由此,相较于传统上各自独立运作的加压炉体,本发明的加压脱泡系统可利用并联连接管的改良,重复使用工艺气体以减少炉体高压气体的使用及加压加热的时间,且因各个炉体间循环性的操作下,不仅节省面板卡匣的置换时间,亦可提升整体的工艺效能。Therefore, compared with the traditional pressurized furnaces that operate independently, the pressurized degassing system of the present invention can utilize the improvement of parallel connection pipes to reuse process gas to reduce the use of high-pressure gas in the furnace and the cost of pressurization and heating. Time, and due to the cyclical operation between each furnace body, it not only saves the replacement time of the panel cassette, but also improves the overall process efficiency.
为了简化传统的卡匣承载及输送机构,以节省设备的使用空间及缩短卡匣的置换时间,且更易于维修保养,本发明去除面板气泡的系统可还包括至少一机械手臂,以将至少一面板置入炉体中。当然,本发明可配合公知的面板卡匣承载及输送机构,以将承载有面板的卡匣送入本发明加压脱泡系统中。In order to simplify the traditional cassette carrying and conveying mechanism, to save the use space of the equipment and shorten the replacement time of the cassette, and to make maintenance easier, the system for removing air bubbles from the panel of the present invention may further include at least one mechanical arm to move at least one The panel is inserted into the furnace body. Certainly, the present invention can cooperate with the known panel cassette carrying and conveying mechanism to send the cassette carrying the panel into the pressurized defoaming system of the present invention.
本发明所提及的面板置入炉体的方式可无限制,较佳可直接置入炉体内、或可将面板容置于至少一面板卡匣后再置入炉体内。且,在此本发明炉体中所置放的面板卡匣亦不限制其数量,较佳可将面板容置于同一面板卡匣、或不同面板卡匣。The method of putting the panel into the furnace body mentioned in the present invention is not limited, and preferably can be directly placed into the furnace body, or the panel can be accommodated in at least one panel cassette and then placed into the furnace body. Moreover, the number of the panel cassettes placed in the furnace body of the present invention is not limited. Preferably, the panels can be accommodated in the same panel cassette or different panel cassettes.
本发明亦提供一种去除面板气泡的工艺方法,其包括的步骤有提供一加压脱泡系统;置入至少一面板于第一炉体中;通入一高压气体至第一炉体中,且加热第一炉体至一预设温度并维持一预设压力;于第一炉体的一预设工艺时间后,由集气管使第一炉体与第二炉体相连通;关闭连接第二炉体的连接气阀,以加压加温第二炉体至预设压力及预设温度,且开启集气阀以排除第一炉体的剩余气体;以及取出第一炉体的面板。The present invention also provides a process for removing bubbles from panels, which includes the steps of providing a pressurized defoaming system; placing at least one panel in the first furnace body; passing a high-pressure gas into the first furnace body, And heat the first furnace body to a preset temperature and maintain a preset pressure; after a preset process time of the first furnace body, the first furnace body is connected to the second furnace body through the gas collecting pipe; The connecting gas valve of the second furnace body is used to pressurize and heat the second furnace body to a preset pressure and preset temperature, and open the gas collecting valve to eliminate the remaining gas of the first furnace body; and take out the panel of the first furnace body.
上述提到的加压脱泡系统包括有:至少一第一炉体及第二炉体、至少一并联的第一连接管及第二连接管、以及一具有一集气阀的集气管。其中,并联的连接管是分别连接至各个炉体,且每一连接管具有一连接气阀,使每一炉体可独立控制对外的连通。再者,本发明的集气管是用以连接各个并联的连接管,以便连接各个炉体。The above-mentioned pressurized degassing system includes: at least a first furnace body and a second furnace body, at least a first connecting pipe and a second connecting pipe connected in parallel, and a gas collecting pipe with a gas collecting valve. Wherein, the parallel connecting pipes are respectively connected to each furnace body, and each connecting pipe has a connecting gas valve, so that each furnace body can independently control the external communication. Furthermore, the gas collecting pipe of the present invention is used to connect each parallel connecting pipe so as to connect each furnace body.
由此,相较于传统加压炉体各自独立的操作方式,本发明的加压脱泡系统可利用并联的连接管而重复使用工艺气体,其不仅再利用了传统工艺中欲排放的废气以节省能源,并且更能缩短加压加热的工艺时间,以提升整体的工艺效率。Therefore, compared with the independent operation mode of the traditional pressurized furnace body, the pressurized degassing system of the present invention can utilize the parallel connecting pipes to reuse the process gas, which not only reuses the waste gas to be discharged in the traditional process to Energy is saved, and the process time of pressurization and heating can be shortened to improve the overall process efficiency.
再者,于本发明去除面板气泡的工艺方法中,通入一气体的步骤可为公知任何通入一高压气体至加压脱泡炉体的方法,且较佳可由本发明的集气管导入一高压气体、或可于每一炉体中还增设一独立的通气管以独立供应每个炉体所需的高压气体。Furthermore, in the process method of removing panel air bubbles of the present invention, the step of introducing a gas can be any known method of introducing a high-pressure gas to the pressurized degassing furnace body, and preferably can be introduced into a gas collecting pipe of the present invention. High-pressure gas, or an independent ventilation pipe can be added in each furnace body to independently supply the high-pressure gas required by each furnace body.
于本发明一较佳具体例中,本发明的各个炉体皆设有一通气管,以分别提供一高压气体至各个炉体中。并且,本发明是由并联的连接管线且搭配集气管的连通,将一工艺后的废气再利用地移转至另一待加压加温的炉体内,而剩余的工艺废气是利用集气管排除。In a preferred embodiment of the present invention, each furnace body of the present invention is provided with a vent pipe to respectively provide a high-pressure gas to each furnace body. Moreover, the present invention uses parallel connecting pipelines and the communication with the gas collecting pipe to transfer the waste gas after a process to another furnace body to be pressurized and heated, and the remaining process waste gas is discharged by using the gas collecting pipe. .
另外,本发明去除面板气泡的工艺方法,其中步骤(d)可还包括:于该第一炉体的一预设工艺时间后,开启一连接于第一炉体的第一连接管上的连接气阀及一连接于第二炉体的第二连接管上的连接气阀,以由集气管使第一炉体与第二炉体相连通。In addition, in the process of removing air bubbles in the panel of the present invention, the step (d) may further include: after a preset process time of the first furnace body, open a connection connected to the first connecting pipe of the first furnace body The gas valve and a connecting gas valve connected to the second connecting pipe of the second furnace body are used to communicate the first furnace body with the second furnace body through the gas collecting pipe.
为了更减少能源使用量,本发明的加压脱泡系统可选择性地还包含有第三炉体,且当第二炉体达到预设工艺时间后,可由集气管使第二炉体与第三炉体相连通。接着,可关闭一连接于第三炉体的第三连接管上的连接气阀,以使第三炉体加压加温至预设压力温度,并且开启集气阀以排除第二炉体中所剩余的气体。最后,即可取出第二炉体中已去除气泡的面板。其中,上述连通第二炉体与第三炉体的步骤可还包括:开启一连接于第二炉体的第二连接管上的连接气阀及一连接于第三炉体的第三连接管上的连接气阀,并由集气管可使第二炉体与第三炉体相连通。In order to reduce energy consumption, the pressurized degassing system of the present invention may optionally include a third furnace body, and when the second furnace body reaches the preset process time, the gas collecting pipe can connect the second furnace body and the first furnace body The three furnace bodies are connected. Then, a connecting gas valve connected to the third connecting pipe of the third furnace body can be closed, so that the third furnace body can be pressurized and heated to a preset pressure temperature, and the gas collection valve can be opened to discharge the gas in the second furnace body. remaining gas. Finally, the de-bubbled panel in the second furnace body can be taken out. Wherein, the above-mentioned step of connecting the second furnace body and the third furnace body may further include: opening a connecting gas valve connected to the second connecting pipe of the second furnace body and a third connecting pipe connected to the third furnace body Connect the gas valve on the upper part, and the second furnace body can communicate with the third furnace body through the gas collecting pipe.
再者,本发明去除面板气泡工艺方法中所使用的高压气体可为任一种气体,较佳可为空气、氮气、或氩气。且,本发明工艺方法中所提及的预设温度、预设压力、或预设工艺时间并无任何限制,其可依据工艺条件的需求(例如:面板数量、反应炉体的体积与数量等)而相互配合调整。Furthermore, the high-pressure gas used in the process of removing bubbles from the panel of the present invention can be any gas, preferably air, nitrogen, or argon. Moreover, the preset temperature, preset pressure, or preset process time mentioned in the process method of the present invention are not subject to any restrictions, which can be based on the requirements of process conditions (for example: the number of panels, the volume and quantity of the reaction furnace body, etc.) ) and adjust with each other.
一较佳态样中,本发明工艺中所适用的温度可介于40℃至60℃,且更佳工艺的预设温度可为50℃左右。另一较佳态样中,本发明工艺方法的预设压力可介于3kg/cm2至8kg/cm2,且更佳工艺的预设压力可为5kg/cm2左右。再一较佳态样中,本发明工艺中所提及的预设工艺时间可介于15至25分钟,且更佳可约为20分钟。In a preferred aspect, the applicable temperature in the process of the present invention can be between 40°C and 60°C, and the preset temperature of the more preferable process can be about 50°C. In another preferred aspect, the preset pressure of the process of the present invention can be between 3kg/cm 2 and 8kg/cm 2 , and more preferably the preset pressure of the process can be about 5kg/cm 2 . In yet another preferred aspect, the preset process time mentioned in the process of the present invention may range from 15 to 25 minutes, and more preferably may be about 20 minutes.
此外,本发明中所使用的面板可无限制,较佳可为一玻璃基板、一塑料基板、或一硅基板,且更佳可为一平面显示器用的基板。于本发明中所提及的炉体可无限制,较佳为一可加压或可加热的密闭腔室。In addition, the panel used in the present invention is not limited, preferably a glass substrate, a plastic substrate, or a silicon substrate, and more preferably a substrate for a flat panel display. The furnace body mentioned in the present invention is not limited, and is preferably a pressurized or heatable sealed chamber.
本发明的加压脱泡系统可应用于一面板的工艺设备中,其主要是利用高温及高压空气以去除面板贴合偏光膜后残留的气泡,而使偏光膜更能密实地贴合于面板本身。The pressurized defoaming system of the present invention can be applied to the process equipment of a panel, which mainly uses high temperature and high pressure air to remove the residual air bubbles after the panel is attached to the polarizing film, so that the polarizing film can be more closely attached to the panel itself.
附图说明 Description of drawings
图1为公知一加压脱泡炉的操作系统的示意图。Fig. 1 is a schematic diagram of the operating system of a known pressurized degassing furnace.
图2为本发明一较佳实施例的加压脱泡系统的示意图。Fig. 2 is a schematic diagram of a pressurized degassing system in a preferred embodiment of the present invention.
图3为本发明一较佳实施例的加压脱泡系统的管线示意图。Fig. 3 is a schematic pipeline diagram of a pressurized degassing system according to a preferred embodiment of the present invention.
具体实施方式 Detailed ways
实施例1Example 1
请参阅图2,图2为本发明一较佳具体实施例的加压脱泡系统200的示意图。图中所示,本实施例的加压脱泡系统200包含有三个加压脱泡炉体A1、B1、C1;以及一用以承载及输送面板卡匣260的机械手臂210。于本实施例中,加压脱泡系统200是由机械手臂210将一面板卡匣260置入每个加压脱泡炉体A1、B1、C1中,且炉体中所含有的卡匣数目可不限于本例所述的卡匣数目。Please refer to FIG. 2 . FIG. 2 is a schematic diagram of a
请参考图3,图3为本实施例加压脱泡系统200的管线示意图。由图中所示,本例的加压脱泡系统200包含有一第一炉体A1、一第二炉体B1、一第三炉体C1、一连接于第一炉体A1的第一连接管220、一连接于第二炉体B1的第二连接管230、一连接于第三炉体C1的第三连接管240、一用以连通各个连接管的集气管250、一并联的通气管线270、以及一用以提供高压气体的气瓶280。其中,并联的通气管线270是分别连接各个炉体A1、B1、C1,且与气瓶280相连通,而每个炉体A1、B1、C1分别具有一通气阀271、272、273,以独立供给每个炉体所需的高压气体。如图3所示,气瓶280包含有一气瓶供应阀281,以作为气体输出的总关开。此外,每一连接管220、230、240上分别具有一连接气阀221、231、241,且集气管250亦具有一用以控制总系统气体进出的集气阀251。于本实施例中,每个炉体A1、B1、C1内分别含有一面板卡匣(图未示),且每个卡匣可容置有复数个待处理的面板。Please refer to FIG. 3 , which is a schematic diagram of pipelines of the
在此将采用上述本实施例的加压脱泡系统200来说明本例去除面板气泡的工艺方法,请一并参照图2与图3的图示。此外,本发明去除面板气泡的工艺方法并非仅限定于下述内容。Here, the
首先,本例的加压脱泡系统200是由一机械手臂210分别将一盛满面板的面板卡匣260送入各个加压脱泡炉体A1、B1、C1,且加压脱泡系统200内每个连接管220、230、240上的连接气阀221、231、241及通气阀271、272、273,皆属于关闭状态。First of all, the
当第一炉体A1置入一面板卡匣260后,打开气瓶供应阀281与第一炉体A1的通气阀271,以将一高压空气送入第一炉体A1后即关闭通气阀271。接着将炉体A1加热约至50℃并保持约5kg/cm2的炉内压力。待炉体A1进行约20分钟面板去除气泡的处理后,开启第一炉体A1的连接气阀221与第二炉体B1的连接气阀231,并由集气管250使第一炉体A1相连通于第二炉体B1,以将第一炉体A1中一半的高温高压空气移转至第二炉体B1。接着,再关闭第二炉体B1的连接气阀231,并且开启第二炉体B1的通气阀272,以补足第二炉体B1内所需的气体后即关闭通气阀272。再将第二炉体B1升压升温至一50℃、5kg/cm2的工艺环境,进行第二批面板的压合;并且同时开启集气阀251以排除第一炉体A1中残余一半的高温高压空气,即能取出第一炉体A1中已去除气泡的面板。After the first furnace body A1 is put into a
因此,第二炉体B1可节省约50%的能量,而免去传统作法必须重新加压加热的耗能过程。此外,第一炉体A1可再由机械手臂210将下一批面板卡匣送入该炉体中以接续进行去除气泡的处理。Therefore, the second furnace body B1 can save about 50% of energy, and avoid the energy-consuming process of repressurization and heating in the traditional method. In addition, the first furnace body A1 can send the next batch of panel cassettes into the furnace body by the
当第二炉体B1中卡匣内的面板压合完毕后,第二炉体B1仍旧是由并联的管线而与第三炉体C1相连通,并且将第二炉体B1中一半的高温高压空气移转至第三炉体C1。其流程是相同于第一炉体A1与第二炉体B1的连通方式,且第三炉体C1加压加热的工艺条件与上述条件相同,其中补足第三炉体C1内所需的气体是利用一通气阀273的开启。于本实施例中,第三炉体C1工艺后的高温高压气体是提供回第一炉体A1中,而形成一循环性的操作系统。请注意,本发明中提供一高压气体至每一炉体的方法,并不限于本实施例所述的内容,其可采用如同本例中由并联的通气管线而独立供给至每个炉体的方式,或者利用集气管作为气体进出的管线,甚至是公知任何输入一高压气体至加压脱泡炉体的方法皆可适用。After the panels in the cassette in the second furnace body B1 are pressed together, the second furnace body B1 is still connected to the third furnace body C1 by parallel pipelines, and half of the high temperature and high pressure in the second furnace body B1 The air is transferred to the third furnace body C1. Its flow process is the same as the communication mode between the first body of furnace A1 and the second body of furnace B1, and the process conditions of pressurized heating of the third body of furnace C1 are the same as the above-mentioned conditions, wherein the gas required to make up the third body of furnace C1 is The opening of a
本例的加压脱泡系统200所含有的三个加压脱泡炉体A1、B1、C1可依据工艺时间的长短,彼此交替互换反应后的高温高压气体,以节省加压加热所需的能源。于本实施例中,每个炉体的工艺时间约为20分钟时,当三个炉体同时操作时,则每隔约13分钟即可处理1个面板卡匣。The three pressurized degassing furnaces A1, B1, and C1 contained in the
本例中所提及的面板是为一TFT液晶显示器用的面板,其主要是利用压力与温度去除偏光膜黏合面板后所产生的气泡,以增强偏光膜与面板基材的黏合度。请注意,本发明所适用的面板不仅是本例所述的TFT液晶显示器用的面板,还可适用于其它种类的平面显示面板。The panel mentioned in this example is a panel for a TFT liquid crystal display, which mainly uses pressure and temperature to remove air bubbles generated after the polarizing film is bonded to the panel, so as to enhance the adhesion between the polarizing film and the panel substrate. Please note that the applicable panel of the present invention is not only the panel for TFT liquid crystal display described in this example, but also applicable to other types of flat display panels.
上述实施例仅为了方便说明而举例而已,本发明所主张的权利范围自应以申请专利范围所述为准,而非仅限于上述实施例。The above-mentioned embodiments are only examples for convenience of description, and the scope of rights claimed by the present invention should be based on the scope of the patent application, rather than limited to the above-mentioned embodiments.
Claims (20)
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