CN100411063C - A kind of tin dioxide/tin coaxial nano cable and its preparation method and application - Google Patents
A kind of tin dioxide/tin coaxial nano cable and its preparation method and application Download PDFInfo
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Abstract
本发明公开了一种二氧化锡/锡同轴纳米电缆及其制备方法和应用,该电缆内芯是锡纳米线,电缆外壳是二氧化锡纳米管,内芯和外壳为同轴结构,电缆的直径为20~30nm,长度为500~900微米。该制备方法如下:在耐高温内管中放入反应源,反应源附近放置单晶硅片,将单晶硅片放置于耐高温材料上,把耐高温内管放入耐高温外管内,然后放入加热炉中,抽真空,再通入惰性气体,使炉温上升到550~750℃,保温后冷却,即制得二氧化锡/锡同轴纳米电缆。本发明可在生物医药、微器件制备与电路连接、微器件通讯等领域应用。本发明制备工艺简单,成本低廉,可实现大批量生产。
The invention discloses a tin dioxide/tin coaxial nano-cable and its preparation method and application. The inner core of the cable is a tin nano-wire, the outer shell of the cable is a tin dioxide nano-tube, the inner core and the outer shell are coaxial structures, and the cable The diameter is 20-30nm and the length is 500-900 microns. The preparation method is as follows: put the reaction source in the high-temperature-resistant inner tube, place a single-crystal silicon wafer near the reaction source, place the single-crystal silicon wafer on the high-temperature-resistant material, put the high-temperature-resistant inner tube into the high-temperature-resistant outer tube, and then Put it into a heating furnace, vacuumize it, and then pass in an inert gas to raise the temperature of the furnace to 550-750°C, keep it warm and then cool it down to obtain a tin dioxide/tin coaxial nano-cable. The invention can be applied in the fields of biomedicine, micro-device preparation and circuit connection, micro-device communication and the like. The preparation process of the invention is simple, the cost is low, and mass production can be realized.
Description
技术领域 technical field
本发明涉及纳米电缆技术,特别涉及一种二氧化锡/锡同轴纳米电缆及其制备方法和应用。The invention relates to nano-cable technology, in particular to a tin dioxide/tin coaxial nano-cable and its preparation method and application.
背景技术 Background technique
自人类第一个晶体管问世以来,其尺寸每18个月缩小两倍,到如今的“奔四”仅有100多纳米;预计到2010年晶体管的尺寸将只有几十个纳米,那么这种超高密度集成线路的元件之间用什么连接呢?这是世界科学界共同面临的一道难题。现阶段技术已经难以突破超微极限,各国科学家都寄希望于纳米技术的应用。目前,科学家声称已经有能力制造出比人类最微细的血管还细的纳米电缆。这就意味着,科学家可以使纳米电缆在人体血管中任意穿行,达到任何指定的地点而不会阻碍血管中正常的血液、氧气与营养流动。科学家还观察到,纳米电缆中电子的传输不同于普通的导体,其传输速度快,能耗更小。它的诞生还可能为下一代光导纤维的产生奠定基础。Since the advent of the first human transistor, its size has shrunk by two times every 18 months, and today's "Penten 4" is only more than 100 nanometers; What connection is used between the components of the high-density integrated circuit? This is a difficult problem faced by the world's scientific community. At this stage, it is difficult for technology to break through the ultrafine limit, and scientists from all over the world are pinning their hopes on the application of nanotechnology. Scientists now claim to have the ability to create nanocables thinner than the tiniest of human blood vessels. This means that scientists can make nano-cables travel freely in human blood vessels and reach any designated location without hindering the normal flow of blood, oxygen and nutrients in blood vessels. Scientists also observed that the transport of electrons in nanocables is different from that of ordinary conductors, with faster transport and less energy consumption. Its birth may also lay the foundation for the generation of next-generation optical fibers.
纳米电缆是指芯部为半导体或导体的纳米丝,外包敷异质纳米壳体(导体或非导体),外部的壳体和芯部是共轴的,因此称为同轴纳米电缆。由于这类材料所具有的特殊性能,在未来的纳米结构器件中占有重要的地位,特别是在生物医药、微器件制备与电路连接、微通讯器件制造等方面会起到举足轻重的作用。目前,国内已制备出了聚乙烯醇/银纳米电缆,硫化锌-氧化锌纳米电缆等,但合成方法往往需要高温、激光、溶液合成等苛刻的条件。Nano-cable refers to the nano-wire whose core is a semiconductor or conductor, and is coated with a heterogeneous nano-shell (conductor or non-conductor), and the outer shell and core are coaxial, so it is called a coaxial nano-cable. Due to the special properties of this type of material, it will play an important role in future nanostructure devices, especially in biomedicine, micro-device preparation and circuit connection, and micro-communication device manufacturing. At present, polyvinyl alcohol/silver nano-cables and zinc sulfide-zinc oxide nano-cables have been prepared in China, but the synthesis methods often require harsh conditions such as high temperature, laser, and solution synthesis.
发明内容 Contents of the invention
为了解决上述现有技术存在的不足之处,本发明的首要目的在于提供一种制备工艺简单,应用范围较广的二氧化锡/锡同轴纳米电缆。In order to solve the disadvantages of the above-mentioned prior art, the primary purpose of the present invention is to provide a tin dioxide/tin coaxial nano-cable with simple preparation process and wide application range.
本发明的另一目的在于提供一种利用热蒸发法合成上述二氧化锡/锡同轴纳米电缆的制备方法,具有操作简单,成本低廉,耗时少,适合大批量生产的优点。Another object of the present invention is to provide a preparation method for synthesizing the above-mentioned tin dioxide/tin coaxial nano-cable by thermal evaporation, which has the advantages of simple operation, low cost, less time-consuming and suitable for mass production.
本发明的再一目的在于提供上述二氧化锡/锡同轴纳米电缆的应用。Another object of the present invention is to provide the application of the above-mentioned tin dioxide/tin coaxial nano-cable.
本发明的目的通过下述技术方案实现:一种二氧化锡/锡同轴纳米电缆,其内芯是直径为10~15nm的锡纳米线,外壳是厚为5~7.5nm的二氧化锡纳米管,内芯和外壳为同轴结构,共同构成二氧化锡/锡同轴纳米电缆,内芯与外壳紧密结合在一起,两者之间不存在空隙;整个二氧化锡/锡同轴纳米电缆的直径为20~30nm,长度为500~900微米。The object of the present invention is achieved through the following technical solutions: a tin dioxide/tin coaxial nano-cable, the inner core of which is a tin nanowire with a diameter of 10-15 nm, and the outer shell is a tin dioxide nano-wire with a thickness of 5-7.5 nm. The tube, the inner core and the outer shell are coaxial structures, which together constitute a tin dioxide/tin coaxial nanocable, and the inner core and the outer shell are tightly combined, and there is no gap between the two; the entire tin dioxide/tin coaxial nanocable The diameter is 20-30nm and the length is 500-900 microns.
制备上述二氧化锡/锡同轴纳米电缆的方法包括如下步骤:在一个耐高温内管中放入反应源,并在内管中离反应源0.5~2.0cm的地方放置单晶硅片作为衬底,将单晶硅片置于耐高温材料上,然后把耐高温内管放入耐高温外管的内部,把耐高温外管放入加热炉中,然后加热炉抽真空15~60分钟,再通入惰性气体25~60sccm(每分钟标准毫升),使炉内真空度达到100~500 Torr(1Torr=1/760标准大气压=133Pa),炉温上升到550~750℃,并保温550~750℃持续2~4小时后,停止加热,使炉温冷却至室温,即制得二氧化锡/锡同轴纳米电缆。The method for preparing the above-mentioned tin dioxide/tin coaxial nano-cable includes the following steps: putting a reaction source in a high-temperature-resistant inner tube, and placing a single crystal silicon wafer as a lining in the inner tube at a place 0.5 to 2.0 cm away from the reaction source At the bottom, place the monocrystalline silicon wafer on the high-temperature resistant material, then put the high-temperature-resistant inner tube into the high-temperature-resistant outer tube, put the high-temperature-resistant outer tube into the heating furnace, and then vacuumize the heating furnace for 15 to 60 minutes. Then pass in an inert gas of 25-60 sccm (standard milliliters per minute), so that the vacuum degree in the furnace reaches 100-500 Torr (1Torr=1/760 standard atmospheric pressure=133Pa), the furnace temperature rises to 550-750°C, and the temperature is kept at 550-500°C. After continuing at 750°C for 2-4 hours, stop the heating, and cool the furnace down to room temperature to obtain a tin dioxide/tin coaxial nano-cable.
为了更好地实现本发明,所述反应源为纯度为99.99%的氧化亚锡粉末;所述耐高温内管的内径为1~3cm,耐高温外管的内径为5~10cm;所述耐高温材料为陶瓷片,所述单晶硅片表面喷了厚为10~50纳米左右的金银合金;所述单晶硅片面积为(2×2)~(6×6)mm2;所述耐高温内管和耐高温外管均可为石英管。所述加热炉的热偶位置与反应源所处的位置在一竖直直线上,所述惰性气体可以为氩气、氦气、氖气、氪气或氙气等。In order to better realize the present invention, the reaction source is stannous oxide powder with a purity of 99.99%; the inner diameter of the high-temperature-resistant inner tube is 1-3 cm, and the inner diameter of the high-temperature-resistant outer tube is 5-10 cm; The high-temperature material is a ceramic sheet, and the surface of the single crystal silicon sheet is sprayed with a gold-silver alloy with a thickness of about 10 to 50 nanometers; the area of the single crystal silicon sheet is (2×2) to (6×6) mm 2 ; Both the high temperature resistant inner tube and the high temperature resistant outer tube can be quartz tubes. The position of the thermocouple of the heating furnace and the position of the reaction source are on a vertical line, and the inert gas can be argon, helium, neon, krypton or xenon.
由上述方法制备的二氧化锡/锡同轴纳米电缆可广泛应用于生物医药、微器件制备与电路连接、微器件通讯等领域中。The tin dioxide/tin coaxial nano cable prepared by the above method can be widely used in the fields of biomedicine, micro-device preparation and circuit connection, micro-device communication and the like.
本发明与现有技术相比具有如下优点和有益效果:本发明首次利用热蒸发法合成了二氧化锡/锡同轴纳米电缆,该方法操作简单可靠,成本低廉,耗时少。本发明合成的二氧化锡/锡同轴纳米电缆的直径为20~30纳米左右,长度达500~900微米,在微器件制备领域足以胜任许多电路连接或通讯角色。与国内已制备出的聚乙烯醇/银纳米电缆(300纳米厚),硫化锌-氧化锌纳米电缆(460纳米厚)等电缆相比,本发明电缆的尺度更小,适用性更好;而且合成工艺简单,不需要高温、激光、溶液合成等苛刻的条件,更有利于集成化大批量生产。Compared with the prior art, the present invention has the following advantages and beneficial effects: for the first time, the present invention synthesizes tin dioxide/tin coaxial nano-cables by thermal evaporation, and the method is simple and reliable in operation, low in cost and less time-consuming. The tin dioxide/tin coaxial nano-cable synthesized by the invention has a diameter of about 20-30 nanometers and a length of 500-900 microns, which is sufficient for many circuit connections or communication roles in the field of micro-device preparation. Compared with cables such as polyvinyl alcohol/silver nano-cables (300 nanometers thick) and zinc sulfide-zinc oxide nano-cables (460 nanometers thick) that have been prepared in China, the scale of the cable of the present invention is smaller and the applicability is better; and The synthesis process is simple, does not require harsh conditions such as high temperature, laser, and solution synthesis, and is more conducive to integrated mass production.
附图说明 Description of drawings
图1为本发明用热蒸发法制备二氧化锡/锡同轴纳米电缆的装置图。Fig. 1 is the apparatus figure of the present invention to prepare tin dioxide/tin coaxial nano-cable by thermal evaporation method.
图2为本发明二氧化锡/锡同轴纳米电缆的场发射电境照片。Fig. 2 is a photo of the field emission electric field of the tin dioxide/tin coaxial nano-cable of the present invention.
图3为本发明二氧化锡/锡同轴纳米电缆的X射线衍射分析图谱。Fig. 3 is an X-ray diffraction analysis spectrum of the tin dioxide/tin coaxial nano-cable of the present invention.
图4为本发明二氧化锡/锡同轴纳米电缆在常温下的拉曼图谱。Fig. 4 is a Raman spectrum of the tin dioxide/tin coaxial nanocable of the present invention at room temperature.
图5(a)为本发明电缆的透射电子显微镜照片,图5(b)为内芯与外壳相接处的高分辨照片;图5(c)为外壳的电子衍射照片;图5(d)为内芯的电子衍射照片。Fig. 5 (a) is the transmission electron micrograph of the cable of the present invention, and Fig. 5 (b) is the high-resolution photo of inner core and shell junction; Fig. 5 (c) is the electron diffraction photo of shell; Fig. 5 (d) An electron diffraction photo of the inner core.
具体实施方式 Detailed ways
下面结合实施例和附图对本发明作进一步详细的描述,但本发明的实施方式不限于此。The present invention will be further described in detail below with reference to the examples and drawings, but the implementation of the present invention is not limited thereto.
实施例1Example 1
如图1所示(其中4为加热部件),在一个一端开口的内径为2cm的小石英管(耐高温内管)7中放入纯度为99.99%的氧化亚锡粉末6作为反应源,这些反应源附近放置陶瓷片9,在这种陶瓷片9上离反应源1.0cm的地方放置喷了厚为20纳米左右的金银合金、面积为5×5mm2的单晶硅片8作为衬底,然后把这个小石英管(耐高温内管)7放入内径为8cm的大石英管(耐高温外管)3的内部,接下来把这个大石英管(耐高温外管)3放入加热炉2中,使加热炉2的热电偶1(热偶位置)与反应源所处的位置在一竖直直线上。整个系统(即加热炉2)开始抽真空20分钟,通入氩气5为30sccm,使加热炉内真空度达到200Torr,使炉温(热电偶处温度)从室温(25℃)迅速上升到650℃,保温650℃为2.5小时后,停止加热,使炉温自然冷却至室温(25℃),拿出衬底,经场发射电子显微镜放大观察到衬底上有二氧化锡/锡同轴纳米电缆生成。As shown in Figure 1 (wherein 4 is heating element), put into the stannous oxide powder 6 that purity is 99.99% as reaction source in the small quartz tube (high temperature resistance inner pipe) 7 of 2cm in the internal diameter of an opening at one end, these A ceramic sheet 9 is placed near the reaction source, and a single
如图2所示,为本发明二氧化锡/锡同轴纳米电缆的场发射电境照片。整个二氧化锡/锡同轴纳米电缆的直径为20~30nm,长度达500~900微米。As shown in Fig. 2, it is a photo of the field emission electric field of the tin dioxide/tin coaxial nano-cable of the present invention. The whole tin dioxide/tin coaxial nano-cable has a diameter of 20-30nm and a length of 500-900 microns.
如图3、图4所示分别为本发明二氧化锡/锡同轴纳米电缆的X射线衍射分析图谱、及在常温下(25℃)的拉曼图谱。根据这两种测试手段,可以确认这种同轴纳米电缆是由二氧化锡和锡两种材料构成的。As shown in Fig. 3 and Fig. 4, the X-ray diffraction analysis spectrum and the Raman spectrum at normal temperature (25° C.) of the tin dioxide/tin coaxial nano-cable of the present invention are respectively shown. According to these two test methods, it can be confirmed that the coaxial nano-cable is composed of tin dioxide and tin.
本发明电缆的透射电子显微镜照片,内芯与外壳相接处的高分辨照片,外壳的电子衍射照片,内芯的电子衍射照片如图5中(a)、(b)、(c)、(d)所示。通过分析,可知本发明合成的二氧化锡/锡同轴纳米电缆的内芯是直径为10~15nm的锡纳米线,外壳是厚为5~7.5nm的二氧化锡纳米管,内芯和外壳是同轴结构,紧密结合在一起,内芯和外壳之间没有任何空隙。The transmission electron microscope photo of the cable of the present invention, the high-resolution photo of the junction between the inner core and the outer shell, the electron diffraction photo of the outer shell, and the electron diffraction photo of the inner core as shown in (a), (b), (c), ( d) as shown. By analysis, it can be seen that the inner core of the synthesized tin dioxide/tin coaxial nano-cable of the present invention is a tin nanowire with a diameter of 10~15nm, and the outer shell is a thick tin dioxide nanotube with a thickness of 5~7.5nm. It is a coaxial structure, tightly combined, without any gap between the inner core and the outer shell.
通过上述表征手段,可知本发明合成的同轴纳米电缆的材料的外壳是由二氧化锡纳米管构成,内芯是由锡纳米线构成。其整体尺度,内芯尺度,外壳尺度也均一目了然。Through the above characterization means, it can be seen that the outer shell of the material of the coaxial nanocable synthesized by the present invention is composed of tin dioxide nanotubes, and the inner core is composed of tin nanowires. Its overall size, inner core size, and shell size are also clear at a glance.
实施例2Example 2
在一个一端开口的内径为3cm的小石英管(耐高温内管)中放入纯度为99.99%的氧化亚锡粉末作为反应源,这些反应源附近放置陶瓷片,在这种陶瓷片上离反应源2.0cm的地方放置喷了厚为50纳米左右的金银合金、面积为6×6mm2的单晶硅片作为衬底,然后把这个小石英管(耐高温内管)放入内径为10cm的大石英管(耐高温外管)的内部,接下来把这个大石英管(耐高温外管)放入加热炉中,使加热炉的热电偶(热偶位置)与反应源所处的位置在一竖直直线上。整个系统(即加热炉)开始抽真空15分钟,通入氦气为25sccm(每分钟标准毫升),使炉内真空度达到100Torr(1Torr=1/760标准大气压=133Pa),使炉温(热电偶处温度)从室温(25℃)迅速上升到550℃,保温550℃为4小时后,停止加热,使炉温自然冷却至室温(25℃),拿出衬底,经场发射电子显微镜放大观察到衬底上有二氧化锡/锡同轴纳米电缆生成。Put the stannous oxide powder that purity is 99.99% as reaction source in the small quartz tube (high temperature resistant inner tube) of 3cm in the internal diameter of an end opening, place ceramic sheets near these reaction sources, on this ceramic sheet from reaction source Place a single crystal silicon wafer sprayed with a gold-silver alloy with a thickness of about 50 nanometers and an area of 6× 6mm2 at a place of 2.0cm as a substrate, and then put this small quartz tube (high temperature resistant inner tube) into a 10cm inner diameter The inside of the large quartz tube (high temperature resistant outer tube), then put this large quartz tube (high temperature resistant outer tube) into the heating furnace, so that the thermocouple (thermocouple position) of the heating furnace and the position of the reaction source are in the on a vertical line. The whole system (i.e. heating furnace) starts to vacuumize for 15 minutes, and feeds helium gas at 25 sccm (standard milliliter per minute), so that the vacuum in the furnace reaches 100 Torr (1 Torr=1/760 standard atmospheric pressure=133Pa), and the temperature of the furnace (thermoelectric Occasional temperature) rises rapidly from room temperature (25°C) to 550°C, and after holding at 550°C for 4 hours, stop heating, let the furnace temperature cool down to room temperature (25°C), take out the substrate, and magnify it with a field emission electron microscope The formation of tin dioxide/tin coaxial nanocables on the substrate was observed.
实施例3Example 3
在一个一端开口的内径为1cm的小石英管(耐高温内管)中放入纯度为99.99%的氧化亚锡粉末作为反应源,这些反应源附近放置陶瓷片,在这种陶瓷片上离反应源0.5cm的地方放置喷了厚为10纳米左右的金银合金、面积为2×2mm2的单晶硅片作为衬底,然后把这个小石英管(耐高温内管)放入内径为5cm的大石英管(耐高温外管)的内部,接下来把这个大石英管(耐高温外管)放入加热炉中,使加热炉的热电偶(热偶位置)与反应源所处的位置在一竖直直线上。整个系统(即加热炉)开始抽真空60分钟,通入氩气为60sccm,使炉内真空度达到500Torr,使炉温(热电偶处温度)从室温(25℃)迅速上升到750℃,保温750℃为2小时后,停止加热,使炉温自然冷却至室温(25℃),拿出衬底,经场发射电子显微镜放大观察到衬底上有二氧化锡/锡同轴纳米电缆生成。Put the stannous oxide powder that purity is 99.99% in the small quartz tube (high temperature resistant inner tube) of 1cm in the inner diameter of an open end as reaction source, place ceramic sheets near these reaction sources, on this ceramic sheet from reaction source Place a single crystal silicon wafer sprayed with a gold-silver alloy with a thickness of about 10 nanometers and an area of 2× 2mm2 at a place of 0.5cm as a substrate, and then put this small quartz tube (high temperature resistant inner tube) into a 5cm inner diameter The inside of the large quartz tube (high temperature resistant outer tube), then put this large quartz tube (high temperature resistant outer tube) into the heating furnace, so that the thermocouple (thermocouple position) of the heating furnace and the position of the reaction source are in the on a vertical line. The whole system (that is, the heating furnace) starts to be vacuumed for 60 minutes, and the argon gas is introduced to 60 sccm, so that the vacuum degree in the furnace reaches 500 Torr, and the furnace temperature (the temperature at the thermocouple) rises rapidly from room temperature (25°C) to 750°C, and the heat preservation After 2 hours at 750° C., stop heating, allow the furnace to cool naturally to room temperature (25° C.), take out the substrate, and observe the generation of tin dioxide/tin coaxial nanocables on the substrate through magnification with a field emission electron microscope.
上述实施例为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.
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| JPH08217445A (en) * | 1995-02-20 | 1996-08-27 | Ishihara Sangyo Kaisha Ltd | Acicular conductive tin oxide fine powder and its production |
| US6200674B1 (en) * | 1998-03-13 | 2001-03-13 | Nanogram Corporation | Tin oxide particles |
| CN1475798A (en) * | 2003-07-10 | 2004-02-18 | �Ϻ���ͨ��ѧ | Manufacturing method of tin dioxide nano sensor device |
| CN1588569A (en) * | 2004-10-09 | 2005-03-02 | 北京科技大学 | Method for producing high yield zinc oxide nano cable |
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| JPH08217445A (en) * | 1995-02-20 | 1996-08-27 | Ishihara Sangyo Kaisha Ltd | Acicular conductive tin oxide fine powder and its production |
| US6200674B1 (en) * | 1998-03-13 | 2001-03-13 | Nanogram Corporation | Tin oxide particles |
| CN1475798A (en) * | 2003-07-10 | 2004-02-18 | �Ϻ���ͨ��ѧ | Manufacturing method of tin dioxide nano sensor device |
| CN1588569A (en) * | 2004-10-09 | 2005-03-02 | 北京科技大学 | Method for producing high yield zinc oxide nano cable |
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