CN109916909A - The detection method and its device of optical element surface pattern and subsurface defect information - Google Patents
The detection method and its device of optical element surface pattern and subsurface defect information Download PDFInfo
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Abstract
本发明涉及一种光学元件表面形貌及亚表面缺陷信息的检测方法及其装置。其利用波长信息测量距离，由光源射出一束宽光谱的复色光（呈白色），通过色散镜头发生光谱色散，形成不同波长的单色光，每一个波长的焦点都对应一个距离值；测量光射到物体表面被反射回来，只有满足共焦条件的单色光，可以通过小孔被光谱仪感测到，通过计算被感测的焦点的波长，换算获得距离值。利用两个光谱仪分别接收待测元件的表面以及内部缺陷的光波信息，从而同时得到光学元件的表面信息和内部缺陷的位置以及深度信息等。
The invention relates to a method and a device for detecting the surface topography and subsurface defect information of an optical element. It uses wavelength information to measure the distance, emits a broad spectrum of polychromatic light (white) from the light source, and generates spectral dispersion through a dispersive lens to form monochromatic light of different wavelengths, and the focus of each wavelength corresponds to a distance value; measuring light When it hits the surface of the object and is reflected back, only the monochromatic light that meets the confocal condition can be sensed by the spectrometer through the small hole, and the distance value can be obtained by calculating the wavelength of the sensed focus. Two spectrometers are used to receive the light wave information of the surface of the component to be tested and the internal defects respectively, so as to obtain the surface information of the optical component and the position and depth information of the internal defects at the same time.
Description
Technical field
The present invention relates to a kind of optical element surface pattern and the detection methods and its device of subsurface defect information.
Background technique
Requirement with the promotion and continuous development of high power solid-state laser system capacity, for optical element quality
It is higher and higher.Both at home and abroad in element damage mechanism a large number of studies show that, in optical element grinding, polishing etc. in process
The subsurface defect of generation be cause optical element antibody Monoclonal ability decline an important factor for one of.Therefore how to be effectively detected
It is effectively controlled each with assessment optical element different depth size, the subsurface defect of shape characteristic so that tutorial element is processed
It highly necessary asks in the road that the subsurface defect that process links generate has become the manufacture of high threshold resisting laser damage optics member.Currently, main
Use two class method detecting element subsurface defects: a kind of destructiveness side for subsurface defect to be directly exposed to observation
Method damages detection, such as hit hole method, harsh method, the processing of the magnetorheological angle of wedge；Another kind of is nondestructive, i.e., lossless inspection
It surveys, such as scattering method, micro- (TIRM) technology of total internal reflection, Confocal laser endomicroscopy.Traditional existing technology is directed to optics
The detection of the subsurface defect of element is simultaneously not perfect, such as the position of element internal flaw, depth information etc..Therefore, how
The depth information of effectively detection subsurface defect becomes an important directions of optical detection.
Summary of the invention
The present invention provides the detection method and its device of a kind of optical element surface pattern and subsurface defect information, benefit
Distance is measured with wavelength information, the polychromatic light (white) of a beam of broad spectrum is projected by light source, spectrum is occurred by dispersion camera lens
Dispersion forms the monochromatic light of different wave length.The focus of each wavelength corresponds to a distance value；Light emission is measured to body surface
It is reflected back, only meets the monochromatic light of confocal condition, can be sensed by aperture by spectrometer, it is sensed by calculating
Focus wavelength, conversion obtain distance value, receive surface and the internal flaw of element under test respectively using two spectrometers
Light-wave information, to obtain the surface information of optical element and the position of internal flaw and depth information etc. simultaneously.
In order to solve the problems existing in the prior art, the technical scheme is that optical element surface pattern and sub-surface
The detection method of defect information, it is characterised in that: the step of the detection method are as follows:
Step 1: aperture S is passed through by the polychromatic light that light source projects a beam of broad spectrum and changes ordinary light source after polarizing film
For the linearly polarized light with direction of vibration perpendicular to XOY plane, it is radiated in dispersion lens group；
Step 2: light is radiated on object under test after the convergence of dispersion camera lens, the monochromatic light meeting that wavelength is by dispersion camera lens
Gather on the surface of object, the monochromatic light for being by wavelength is focused in the subsurface defect of interior of articles, light by surface and
Subsurface defect scattering, rear orientation light will be again by dispersion camera lens；
Step 3: through the scattering light of dispersion shots after in the reflection of 45 ° of spectroscope, glancing incidence enters diaphragm,
Diaphragm is the rectangular spatial filter with larger ratio, and length direction scatters light perpendicular to XOY plane, by diaphragm rear surface
With bigger degree of polarization；
Step 4: it converges to a length of scattering light of body surface upper ripple and passes through polarization splitting prism post-concentration on aperture S ', arrive
Up to spectrometer one；
Step 5: converging to a length of scatter light polarization state of subsurface defect upper ripple and change, by polarization splitting prism,
Middle a part converges on aperture S ' by transmission, reaches spectrometer one, and another part converges to small by polarization splitting prism
On the S ' ' of hole, spectrometer two is reached；
Step 6: is there is peak value with place in the spectrum of spectrometer one, since surface scattering signal is scattered much stronger than subsurface defect
Signal, therefore the wavelength of surface converging light is obtained, the location information on surface is determined according to the relationship between wavelength and convergent point；
Step 7: the spectrum of spectrometer two, which converges at the wavelength of subsurface defect light, there is peak value, according to wavelength and convergent point
Between relationship obtain the position of subsurface defect；
Step 8: the depth information of subsurface defect is obtained by surface position information and subsurface defect location information；
Step 9: in same detection position there are when multiple defects, multiple peak values will spectrally occur in spectrometer two, determine
The subsurface defect of inspection positions is distributed；
Step 10: by detection system on optical element surface two-dimension translational, obtain surface position information on different location and
Subsurface defect information three-dimensional is rebuild, and the surface topography and subsurface defect information of optical element are obtained.
Polychromatic light in the step one is in white light.
For detecting the detection device of optical element surface pattern and subsurface defect information, white light point light source, polarizing film,
Spectroscope, dispersion lens group, diaphragm, polarization splitting prism, spectrometer one, spectrometer two, computer；
White light point light source, polarizing film, spectroscope and the dispersion lens group is set in turn on optical axis, and Amici prism is set to
Spectroscopical side is provided with centered on the plane of incidence before Amici prism, the narrow rectangular aperture on surface normal, light
Spectrometer one and spectrometer two are respectively arranged in two perpendicular optical paths of Amici prism, spectrometer one and spectrometer two and computer
Connection.
Spectroscopical angle is set as 45 °.
Compared with prior art, advantages of the present invention is as follows:
1, the present invention can obtain the surface information of element under test and the depth information of subsurface defect simultaneously, and measurement efficiency is high,
The big visual field, high-velocity scanning may be implemented；
2, the present invention can detecte all optical materials (flexible, transparent, specular surface), there is very high measurement capability；
3, measurement accuracy of the present invention is high.
Detailed description of the invention
Fig. 1 is detection device schematic diagram of the invention；
Fig. 2 is the left view of diaphragm；
In figure: 1. white light point light sources；2. polarizing film；3. spectroscope；4. dispersion lens group；5. object under test；6. diaphragm；7. light splitting
Prism；8. spectrometer one；9. spectrometer two；10. computer.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The detection method step of optical element surface pattern and subsurface defect depth information are as follows:
Step 1: aperture S is passed through by the polychromatic light that light source projects a beam of broad spectrum and changes ordinary light source after polarizing film 2
For the linearly polarized light with direction of vibration perpendicular to XOY plane, it is radiated in dispersion lens group；
Step 2: by dispersion camera lens spectral dispersion occurs for light, so that white light is dispersed into the monochromatic light of different wave length, it is each
The focus of a wavelength all corresponds to a fixed distance value；Then light is radiated on object under test after overconvergence, dispersion mirror
The monochromatic light that wavelength is by head is focused on the surface of object, and the monochromatic light for being by wavelength is focused in subsurface defect, light
It is scattered by surface and subsurface defect, rear orientation light will be again by dispersion camera lens.
Step 3: after spectral dispersion occurs, in space then the light of all directions need to be radiated at object through overconvergence
Body surface face, and the convergence of rays in other directions can also generate the polarization in this direction on a surface of an, thus when scattering light into
It is incident neither S light is also not P light when entering polarization splitting prism (PBS) 7, but both direction is all important, for incidence
For angle, since S light is different with the reflectivity of P light, so the direction of vibration of light can change after synthesis.For this reason, it may be necessary to
Add a narrow rectangular aperture 6 centered on the plane of incidence, on surface normal before PBS；Pass through the scattering of dispersion shots
For light after in the reflection of 45 ° of spectroscope, glancing incidence enters diaphragm 6, and diaphragm 6 is the rectangular space filtering with larger ratio
Device, length direction have bigger degree of polarization perpendicular to XOY plane, by diaphragm rear surface scattering light；
Step 4: light on a surface of an is irradiated since perfection focuses on the surface of object, so dissipating on body surface
Penetrating light can keep original polarization state to be just focused on aperture S ' after polarization splitting prism, reach spectrometer one；
Step 5: converging to a length of scatter light polarization state of subsurface defect upper ripple can change, by polarization splitting prism,
A portion converges on aperture S ' by transmission, reaches spectrometer one, another part is converged to by polarization splitting prism
On aperture S ' ', spectrometer two is reached；
Step 6: reach spectrometer one has two parts light, and a part is to converge to a length of scattering light of body surface upper ripple,
A part is to converge to a length of scattering light of subsurface defect upper ripple, and the spectrum of spectrometer one peak value is occurring with place, due to table
Area scattering signal is much stronger than subsurface defect scattered signal, the wavelength of available surface converging light, according to wavelength and convergent point
Between relationship determine the location information on surface, but the peak value that is much smaller than of peak value so that being not readily available；
Step 7: is only there is peak value at the wavelength for converging to subsurface defect light in the spectrum of spectrometer two, can basis
Relationship between wavelength and convergent point obtains the position of subsurface defect；
Step 8: by the depth information of surface position information and the available subsurface defect of subsurface defect location information；
Step 9: in same detection position there are when multiple defects, multiple peak values will spectrally occur in spectrometer two, can be with
Determine the subsurface defect distribution of inspection positions.
Step 10: by detection system on optical element surface two-dimension translational, the surface location that will be obtained on different location
Information and subsurface defect information three-dimensional are rebuild, the surface topography and subsurface defect information of available optical element.
Above-mentioned polychromatic light is in white light.
The present invention also can detect some special objects, if the defect of interior of articles is not a point but certain area
A fritter, for example interior of articles has a minute bubbles, our adopting said methods can also measure the surface profile letter of bubble
Breath.Polychromatic light becomes the linearly polarized light with certain direction of vibration, is radiated on Amici prism, then light after polarizing film
For line through overconvergence, monochromatic light is just radiated at body surface, monochromatic light and the upper and lower surface for being radiated at bubble respectively；Light reflection
It goes back after polarization splitting prism, body surface information is obtained by the identification of spectrometer 1；With by spectrometer 29 identification and it is right
Different distance values is answered, further according to refractive index, then the depth of available interior of articles defect.What is measured spectrally will appear height
Low different several wave crests, according to different wave crests and a corresponding range, then because the difference of refractive index can draw out one
Then grayscale image judges the range size of defect according to bright dark situations different on grayscale image.Bright place, which then represents to be scattered back, to be come
Light it is very strong, the inhomogeneities of internal flaw is also very strong, and dark place then represents that light is weaker, and inhomogeneities is also weaker, according to
Inhomogeneities then may determine that the position of defect.
For detect be directed to optical element surface pattern and subsurface defect depth information detection device (referring to Fig. 1 and
Fig. 2) include white light point light source 1,2 spectroscope 3 of polarizing film, dispersion lens group 4, diaphragm 6, polarization splitting prism 7, spectrometer 1,
Spectrometer 29, computer 10；
White light point light source 1, polarizing film 2, spectroscope 3 and the dispersion lens group 4 is set in turn on optical axis, Amici prism 7
It is set to the side of spectroscope 3, is provided with centered on the plane of incidence before Amici prism 7, the narrow square on surface normal
Shape diaphragm 6, spectrometer 1 and spectrometer 29 are respectively arranged in 7 two perpendicular optical paths of Amici prism, spectrometer 1 and light
Spectrometer 29 is final and computer 10 connects.
The angle of above-mentioned spectroscope 3 is 45 °.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (4)
1. the detection method of optical element surface pattern and subsurface defect information, it is characterised in that: the step of the detection method
Suddenly are as follows:
Step 1: aperture S is passed through by the polychromatic light that light source projects a beam of broad spectrum and changes ordinary light source after polarizing film
For the linearly polarized light with direction of vibration perpendicular to XOY plane, it is radiated in dispersion lens group；
Step 2: light is radiated on object under test after the convergence of dispersion camera lens, the monochromatic light meeting that wavelength is by dispersion camera lens
Gather on the surface of object, the monochromatic light for being by wavelength is focused in the subsurface defect of interior of articles, light by surface and
Subsurface defect scattering, rear orientation light will be again by dispersion camera lens；
Step 3: through the scattering light of dispersion shots after in the reflection of 45 ° of spectroscope, glancing incidence enters diaphragm,
Diaphragm is the rectangular spatial filter with larger ratio, and length direction scatters light perpendicular to XOY plane, by diaphragm rear surface
With bigger degree of polarization；
Step 4: it converges to a length of scattering light of body surface upper ripple and passes through polarization splitting prism post-concentration on aperture S ', arrive
Up to spectrometer one；
Step 5: converging to a length of scatter light polarization state of subsurface defect upper ripple and change, by polarization splitting prism,
Middle a part converges on aperture S ' by transmission, reaches spectrometer one, and another part converges to small by polarization splitting prism
On the S ' ' of hole, spectrometer two is reached；
Step 6: is there is peak value with place in the spectrum of spectrometer one, since surface scattering signal is scattered much stronger than subsurface defect
Signal, therefore the wavelength of surface converging light is obtained, the location information on surface is determined according to the relationship between wavelength and convergent point；
Step 7: the spectrum of spectrometer two, which converges at the wavelength of subsurface defect light, there is peak value, according to wavelength and convergent point
Between relationship obtain the position of subsurface defect；
Step 8: the depth information of subsurface defect is obtained by surface position information and subsurface defect location information；
Step 9: in same detection position there are when multiple defects, multiple peak values will spectrally occur in spectrometer two, determine
The subsurface defect of inspection positions is distributed；
Step 10: by detection system on optical element surface two-dimension translational, obtain surface position information on different location and
Subsurface defect information three-dimensional is rebuild, and the surface topography and subsurface defect information of optical element are obtained.
2. the detection method of a kind of optical element surface pattern according to claim 1 and subsurface defect information, special
Sign is: the polychromatic light in the step one is in white light.
3. it is according to claim 1 for detecting the detection device of optical element surface pattern and subsurface defect information,
It is characterized by: the device includes white light point light source (1), polarizing film (2), spectroscope (3), dispersion lens group (4), diaphragm
(6), polarization splitting prism (7), spectrometer one (8), spectrometer two (9), computer (10)；
White light point light source (1), polarizing film (2), spectroscope (3) and the dispersion lens group (4) is set in turn on optical axis, point
Light prism (7) is set to the side of spectroscope (3), and Amici prism is provided with centered on the plane of incidence before (7), is located at surface
Narrow rectangular aperture (6) on normal, spectrometer one (8) and spectrometer two (9) be respectively arranged at Amici prism (7) two it is perpendicular
In optical path, spectrometer one (8) is connect with spectrometer two (9) with computer (10).
4. the detection for being used to detect optical element surface pattern and subsurface defect information according to claim 3
Device, it is characterised in that: the angle of the spectroscope (3) is set as 45 °.
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| CN113533351B (en) * | 2021-08-20 | 2023-12-22 | 合肥御微半导体技术有限公司 | A panel defect detection device and detection method |
| CN113533351A (en) * | 2021-08-20 | 2021-10-22 | 合肥御微半导体技术有限公司 | Panel defect detection device and detection method |
| CN114279342A (en) * | 2021-12-29 | 2022-04-05 | 青岛国科虹成光电技术有限公司 | Chromatic dispersion compensation nature chromatogram confocal measuring apparatu |
| CN114324369B (en) * | 2022-03-11 | 2022-06-07 | 北京新研创能科技有限公司 | Bipolar plate surface scratch detection system and method |
| CN114324369A (en) * | 2022-03-11 | 2022-04-12 | 北京新研创能科技有限公司 | Bipolar plate surface scratch detection system and method |
| CN115078371A (en) * | 2022-03-25 | 2022-09-20 | 上海洛丁森工业自动化设备有限公司 | Workpiece surface detection device, pipeline surface detection system and application thereof |
| CN115015265A (en) * | 2022-05-11 | 2022-09-06 | 南京大学 | Nanoscale subsurface infrared imaging method |
| CN115342749A (en) * | 2022-08-24 | 2022-11-15 | 中国科学院长春光学精密机械与物理研究所 | One-dimensional surface topography measurement system and its measurement method |
| CN116087225A (en) * | 2022-12-21 | 2023-05-09 | 航天科工微电子系统研究院有限公司 | A device and method for detecting subsurface defect distribution of an optical element |
| CN118501173A (en) * | 2024-05-14 | 2024-08-16 | 大连理工大学 | Device and method for detecting subsurface damage signal of fused quartz hemispherical harmonic oscillator |
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