CN109825801A - Mask plate turnover device - Google Patents
Mask plate turnover device Download PDFInfo
- Publication number
- CN109825801A CN109825801A CN201910250965.9A CN201910250965A CN109825801A CN 109825801 A CN109825801 A CN 109825801A CN 201910250965 A CN201910250965 A CN 201910250965A CN 109825801 A CN109825801 A CN 109825801A
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- mask plate
- accommodating chamber
- cabinet
- turnover device
- card slot
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Abstract
The invention discloses a kind of mask plate turnover devices, and for loading and transporting mask plate, including cabinet and positioning holding member, the load port that cabinet has accommodating chamber and communicates with the accommodating chamber, the load port is suitable for the mask plate and is packed into the accommodating chamber；Positioning holding member is located in the accommodating chamber, and the mask plate is vertically fixed and held in the accommodating chamber.The mask plate turnover device provided according to embodiments of the present invention; mask plate can be vertically fixed and held in accommodating chamber by positioning holding member; since mask plate is vertically arranged, so, in transport or transport process; it can prevent due to jolting or other pressure cause the center of mask substrate to sink; ensure that the precision of mask substrate is unaffected, meanwhile, mask plate is located in the box body; play the role of insulation blocking to mask plate using cabinet, prevents from receiving impact in transport process or hitting causing to damage.
Description
Technical field
The present invention relates to mask plate technical field more particularly to a kind of mask plate turnover devices.
Background technique
In Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) manufacturing technology, vapor deposition system
The mask plate of journey is vital component, which is used to control the position of organic material deposition on the glass substrate,
To form organic pattern of different shapes on the glass substrate.
The mask substrate that mask plate generally comprises exposure mask sheet frame and is located on exposure mask sheet frame, in vapor deposition processing procedure, it is fixed to need
Phase cleans mask plate, and certain damage can all be caused to mask plate by cleaning mask plate every time, influences the precision of mask plate, and exposure mask
Plate may be with regard to needing to scrap after cleaning certain number (such as 20 times), it can be seen that, mask plate is one be deposited in processing procedure
The important consumptive material of kind.
Since mask plate needs to manufacture using special alloy (Invar36 alloy) material, also, mask substrate also needs
It is machined to micron-sized thickness, a standard in the industry is will be lower than 30 microns, in addition it is also necessary to this micron-sized
Processing forms vapor deposition hole in mask substrate, and according to the resolution requirement of display equipment, the dimension precision requirement in hole is deposited very
Height causes difficulty of processing high, and mask plate is as a kind of consumptive material as a result, and the price is very expensive, comparable to the price of silver,
The price of a piece of mask plate is generally up to hundreds of thousands of to up to a million.
However, mask plate during transportation, since road moderately gusty air, mask substrate thickness are very thin, mask plate total
The various factors such as body weight big (since exposure mask sheet frame is the massive structure of casting and forming), cause mask plate and hold in transit
Easy damaged in turn results in great loss.
Summary of the invention
The present invention is directed to solve at least some of the technical problems in related technologies.For this purpose, of the invention
Purpose is to propose a kind of mask plate turnover device.
To achieve the above object, mask plate turnover device according to an embodiment of the present invention, for loading and transporting mask plate,
Include:
Cabinet, the load port that the cabinet has accommodating chamber and communicates with the accommodating chamber, the load port are suitable for described
Mask plate is packed into the accommodating chamber；
Positioning holding member, the positioning holding member are located in the accommodating chamber, and the mask plate is vertically fixed and protected
It holds in the accommodating chamber.
The mask plate turnover device provided according to embodiments of the present invention, can be vertically solid by positioning holding member by mask plate
Determine and is maintained in accommodating chamber, since mask plate is vertically arranged, so, in transport or transport process, can prevent due to jolting
Or other pressure cause the center of mask substrate to sink, it is ensured that the precision of mask substrate is unaffected, meanwhile, mask plate is located at case
In vivo, play the role of insulation blocking to mask plate using cabinet, prevent from receiving impact in transport process or hitting causing to damage.
In addition, mask plate turnover device according to the above embodiment of the present invention can also have following additional technology special
Sign:
According to one embodiment of present invention, the positioning holding member is multiple, and multiple positioning holding members are described in
The width direction of accommodating chamber is successively spaced setting.
According to one embodiment of present invention, each positioning holding member includes:
First orbit portion, first orbit portion are located at the roof of the accommodating chamber, and first orbit portion has along institute
State the first card slot that the length direction of accommodating chamber extends；
Second orbit portion, second orbit portion are located at the bottom wall of the accommodating chamber and opposite with first orbit portion,
Second orbit portion has the second card slot that the length direction along the accommodating chamber extends；
First card slot is suitable for fixing the upper edge of the mask plate, and second card slot is suitable for fixing the mask plate
Lower edge.
According to one embodiment of present invention, further includes:
Guide part, the guide part are located at the accommodating chamber, to guide the mask plate to enter to the positioning holding member.
According to one embodiment of present invention, the guide part includes:
First idler wheel, first idler wheel are located in first card slot and pivotable along a horizontal axis；
Second idler wheel, second idler wheel are located in second card slot and pivotable along a horizontal axis.
According to one embodiment of present invention, the guide part include first idler wheel and the second idler wheel be it is multiple,
Multiple first idler wheels are arranged along the extending direction interval of first card slot, and multiple second idler wheels are along second card
The extending direction interval of slot is arranged.
According to one embodiment of present invention, the cabinet includes cabinet outer layer, cabinet internal layer and is located at outside the cabinet
Layer cabinet internal layer between cabinet middle layer, the cabinet outer layer be metal material, the cabinet internal layer be plastic material or
Metal material, the cabinet middle layer are damping, buffering material.
According to one embodiment of present invention, the metal material is stainless steel, iron, aluminium, any one in zinc, described
Plastic material is any one in PP material, PE material, PPC material and acrylic material, and the damping, buffering material is EV
Foam or sponge.
It according to one embodiment of present invention, further include door body, the door body and the cabinet pivotable connection, to open
Or close the load port.
According to one embodiment of present invention, the bottom of the cabinet is equipped with castor.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
The structure shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of mask plate of embodiment of the present invention turnover device (load port closing)；
Fig. 2 is the structural schematic diagram of mask plate of embodiment of the present invention turnover device (load port opening)；
Fig. 3 is the cross-sectional view of mask plate turnover device of the embodiment of the present invention；
Fig. 4 is the structural schematic diagram under mask plate turnover device use state of the embodiment of the present invention.
Appended drawing reference:
Cabinet 10；
Cabinet outer layer 101；
Cabinet middle layer 102；
Cabinet internal layer 103；
Accommodating chamber P10；
Load port P101；
First orbit portion 20；
First card slot 201；
Second orbit portion 21；
Second card slot 211；
First idler wheel 30；
Second idler wheel 31；
Door body 40；
Castor 50；
Mask plate 60；
Exposure mask sheet frame 601；
Mask substrate 602.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention, based on this
Embodiment in invention, every other reality obtained by those of ordinary skill in the art without making creative efforts
Example is applied, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " " axial direction ", " circumferential direction ", " radial direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more,
Unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can be machine
Tool connection, is also possible to be electrically connected；It can be directly connected, two members can also be can be indirectly connected through an intermediary
Connection inside part.For the ordinary skill in the art, above-mentioned term can be understood in this hair as the case may be
Concrete meaning in bright.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
The mask plate turnover device of the present invention is described in detail embodiment with reference to the accompanying drawings.
Referring to figs. 1 to 4, the mask plate turnover device provided according to embodiments of the present invention, for loading and transporting
Mask plate 60, including cabinet 10 and positioning holding member.
Specifically, the load port P101 that cabinet 10 has accommodating chamber P10 and communicates with the accommodating chamber P10, the loading
Mouth P101 is suitable for the mask plate 60 and is packed into the accommodating chamber P10.Positioning holding member is located in the accommodating chamber P10, by institute
Mask plate 60 is stated vertically to be fixed and held in the accommodating chamber P10.
That is, mask plate 60 can be packed into accommodating chamber P10 from load port P101, when mask plate 60 is packed into receipts
When in cavity P10, positioning holding member can be fixed on the positioning mask plate 60, and mask plate 60 is made to keep upright state.
It should be noted that the mask substrate that mask plate 60 generally comprises exposure mask sheet frame 601 and is located on exposure mask sheet frame 601
602, mask substrate 602 is on exposure mask sheet frame 601 and is in tensioning state, and then keeps the flatness and precision of mask substrate 602.
In the related technology, mask plate is directly positioned horizontally in non-dynamic in the no dedicated transloading equipment of transhipment, mask plate in transhipment
In power motorcycle or other power cars.However, mask plate is when horizontal positioned, if the mask substrate on exposure mask sheet frame is jolted
Or vibration influence, the central part of mask substrate can be to sinking, in addition, multi-disc mask plate stacks, mask plate in bulk transport
Mask substrate on frame is also easy to be under pressure and causes etc., cause as a result, mask substrate flatness and precision by
To influence.
The mask plate turnover device provided according to embodiments of the present invention, can be vertical by positioning holding member by mask plate 60
Be fixed and held in accommodating chamber P10, since mask plate 60 is vertically arranged, so, in transport or transport process, can prevent by
In jolting or other pressure cause the center of mask substrate 602 to sink, it is ensured that the precision of mask substrate 602 is unaffected, meanwhile,
Mask plate 60 is located in cabinet 10, plays the role of insulation blocking to mask plate 60 using cabinet 10, prevents from receiving in transport process
It causes to damage to impact or shock.
Optionally, positioning holding member be it is multiple, multiple positioning holding members along the accommodating chamber P10 width direction according to
Minor tick setting, wherein width direction is the left and right directions in Fig. 2.
That is, being equipped with multiple positioning holding members in accommodating chamber P10, multiple positioning holding members are spaced in left-right direction
Setting, in this way, each positioning holding member can fix a mask plate 60, multiple positioning holding members can then fix multiple exposure masks
Plate 60, and in accommodating chamber P10, each mask plate 60 keeps erectting shape arranged for interval these mask plates 60 in left-right direction
State, and then realize and load multiple mask plates 60, and keep to collide between multiple mask plates 60.
Shown in referring to Figure 2 to Figure 4, in some embodiments of the invention, each positioning holding member includes the first rail
Road portion 20 and the second orbit portion 21, wherein the first orbit portion 20 is located at the roof of the accommodating chamber P10, first orbit portion
20 have the first card slot 201 that the length direction along the accommodating chamber P10 extends.Second orbit portion 21 is located at the accommodating chamber
The bottom wall of P10 and opposite with first orbit portion 20, second orbit portion 21 has along the length side of the accommodating chamber P10
To the second card slot 211 of extension.First card slot 201 is suitable for fixing the upper edge of the mask plate 60, and second card slot 211 is suitable
In the lower edge for fixing the mask plate 60.In Fig. 1 example, the first orbit portion 20 and the second about 21 orbit portion are opposite, the
The first card slot 201 on one orbit portion 20 it is opening down, the second card slot 211 on the second orbit portion 21 it is opening up, and
And first card slot 201 and the second card slot 211 all extend to load port P101.
When mask plate 60 loads, the upright state of mask plate 60 can be packed into from load port P101, also, by exposure mask
The upper edge of plate 60 is inserted into the first card slot 201, and the lower edge of mask plate 60 is inserted into the second card slot 211, then, is used
Length direction of the power by mask plate 60 along accommodating chamber P10 pushes away, so that in the receiving to accommodating chamber P10 completely of mask plate 60.At this point, the
One card slot 201 positions the upper edge of mask plate 60 and fixes, and the second card slot 211 positions the lower edge of mask plate 60 and fixes, and covers
Diaphragm plate 60 can keep vertically being fixed in accommodating chamber P10, and structure is simple, position and fix reliably, also, mask plate 60 loads
It is convenient.
It is understood that the embodiment of above-mentioned positioning holding member is not considered as limiting the invention, positioning is kept
The specific structure of part is not particularly limited, as long as can fix mask plate 60 and mask plate 60 is made to keep upright state i.e.
It can.As another example, positioning holding member include along accommodating chamber P10 length direction extend first partition and second every
Plate, first partition and second partition are opposite to be located at accommodating chamber P10, limits between first partition and second partition and mask plate 60
Compatible spatia, mask plate 60 can be erect and be placed in spatia.
It further include guide part in one embodiment of the invention, the guide part is set with continued reference to shown in Fig. 2 to Fig. 4
In the accommodating chamber P10, to guide the mask plate 60 to enter to the positioning holding member.
That is, being equipped with guide part in accommodating chamber P10, which enters to positioning for channelling mask plate 60 and protects
It in gripping member, such as can be entered to channelling mask plate 60 in first card slot 201 and the second card slot 211, in this way, being convenient to mask plate
60 loading, and it is more laborsaving, reduce labor intensity.
In one embodiment of the invention, guide part includes the first idler wheel 30 and the second idler wheel 31, first idler wheel
30 be located at it is in first card slot 201 and pivotable along a horizontal axis；Second idler wheel 31 is located at second card slot 211
Interior and pivotable along a horizontal axis, in Fig. 1 example, the shaft of the first idler wheel 30 is threaded through the two sidewalls of the first card slot 201,
The shaft of second idler wheel 31 is threaded through the two sidewalls of the second card slot 211.
When mask plate 60 loads, mask plate 60 is packed into from load port P101, the upper edge of mask plate 60 and the first card
The first idler wheel 30 in slot 201 offsets, and the lower edge of mask plate 60 offsets with the second idler wheel 31 in the second card slot 211, firmly will
Mask plate 60 is pushed away along the length direction of accommodating chamber P10, in the upper edge of mask plate 60 and lower edge respectively in 30 He of the first idler wheel
It is slided on second idler wheel 31, the first idler wheel 30 and the rotation of the second idler wheel 31, in this way, resistance when mask plate 60 can be made to slide
It is smaller, more easily mask plate 60 can be pushed into accommodating chamber P10.
It is understood that the embodiment of above-mentioned guide part is not considered as limiting the invention, guide part can root
According to needing to select guide part in the prior art, as long as can be fixed by mask plate 60 and mask plate 60 be made to keep upright state
?.As another example, guide part includes the first roll shaft and the second roll shaft, and the both ends of the first roll shaft are threaded through the first card slot
201 two sidewalls, the both ends of the second roll shaft are threaded through the two sidewalls of the second card slot 211.
Advantageously, guide part includes first idler wheel 30 and the second idler wheel 31 is multiple, multiple first idler wheels
30 are arranged along the extending direction interval of first card slot 201, multiple prolonging along second card slot 211 of second idler wheel 31
The setting of direction interval is stretched, in this way, multiple first idler wheels 30 and multiple second idler wheels 31, can make mask plate 60 be packed into more
It is smoothly reliable.
Referring to shown in Fig. 3, in some embodiments of the invention, cabinet 10 includes cabinet outer layer 101, cabinet internal layer 103
And the cabinet middle layer 102 between the cabinet outer layer 101 and cabinet internal layer 103, the cabinet outer layer 101 are metal material
Material, the cabinet internal layer 103 are plastic material or metal material, and the cabinet middle layer 102 is damping, buffering material.
In the present embodiment, cabinet outer layer 101 uses metal material, and intensity with higher can prevent external force with shock resistance
Impact causes internal mask plate 60 to damage.And cabinet middle layer 102 uses damping, buffering material, can play damping, buffering
Effect further prevents 60 external impacts of mask plate and damages.Cabinet internal layer 103 uses plastic material or metal material, has
Certain intensity, support form internal accommodating chamber P10, and not perishable, good water-proof effect.
Optionally, metal material is stainless steel, iron, aluminium, any one in zinc, and the plastic material is PP material, PE
Any one in material, PPC material and acrylic material, the damping, buffering material are EV foam or sponge.
Referring to Fig.1, further include door body 40 in one embodiment of the invention shown in Fig. 2 and Fig. 4, the door body 40 with
10 pivotable connection of cabinet, to open or close the load port P101, in this way, can be beaten when mask plate 60 loads
Load port P101 is opened, it, can be with after mask plate 60 is packed into accommodating chamber P10 in order to be packed into mask plate 60 to accommodating chamber P10
Load port P101 is closed, so that mask plate 60 is closed in accommodating chamber P10, it is completely isolated with external environment, it plays preferably
Protective effect.
Referring to Fig.1, shown in Fig. 2 and Fig. 4, in some embodiments of the invention, the bottom of cabinet 10 is equipped with castor 50.?
In the transhipment of mask plate 60, if it is the turnover of short distance, needed for being directly transferred to using the castor 50 of the bottom of the cabinet 10
Position, and if it is remote transport, then the cabinet 10 can be placed on haulage vehicle, in this way, utilizing 50 side of castor
Convenient for the movement of cabinet 10, and then it is convenient to the transhipment of mask plate 60.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
The above description is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all at this
Under the inventive concept of invention, using equivalent structure transformation made by description of the invention and accompanying drawing content, or directly/use indirectly
It is included in other related technical areas in scope of patent protection of the invention.
Claims (10)
1. a kind of mask plate turnover device, for loading and transporting mask plate characterized by comprising
Cabinet, the load port that the cabinet has accommodating chamber and communicates with the accommodating chamber, the load port are suitable for the exposure mask
Plate is packed into the accommodating chamber；
Positioning holding member, the positioning holding member are located in the accommodating chamber, the mask plate are vertically fixed and held at
In the accommodating chamber.
2. mask plate turnover device according to claim 1, which is characterized in that the positioning holding member be it is multiple, it is multiple
The positioning holding member is successively spaced setting along the width direction of the accommodating chamber.
3. mask plate turnover device according to claim 1, which is characterized in that each positioning holding member includes:
First orbit portion, first orbit portion are located at the roof of the accommodating chamber, and first orbit portion has along the receipts
The first card slot that the length direction of cavity extends；
Second orbit portion, second orbit portion is located at the bottom wall of the accommodating chamber and opposite with first orbit portion, described
Second orbit portion has the second card slot that the length direction along the accommodating chamber extends；
First card slot is suitable for fixing the upper edge of the mask plate, and second card slot is suitable for fixing under the mask plate
Edge.
4. mask plate turnover device according to claim 3, which is characterized in that further include:
Guide part, the guide part are located at the accommodating chamber, to guide the mask plate to enter to the positioning holding member.
5. mask plate turnover device according to claim 4, which is characterized in that the guide part includes:
First idler wheel, first idler wheel are located in first card slot and pivotable along a horizontal axis；
Second idler wheel, second idler wheel are located in second card slot and pivotable along a horizontal axis.
6. mask plate turnover device according to claim 5, which is characterized in that the guide part includes first idler wheel
And second idler wheel be it is multiple, multiple first idler wheels are arranged along the extending direction interval of first card slot, multiple described
Second idler wheel is arranged along the extending direction interval of second card slot.
7. mask plate turnover device according to claim 5, which is characterized in that the cabinet includes cabinet outer layer, cabinet
Internal layer and the cabinet middle layer between the cabinet outer layer and cabinet internal layer, the cabinet outer layer is metal material, described
Cabinet internal layer is plastic material or metal material, and the cabinet middle layer is damping, buffering material.
8. mask plate turnover device according to claim 7, which is characterized in that the metal material be stainless steel, iron,
Any one in aluminium, zinc, the plastic material are any one in PP material, PE material, PPC material and acrylic material
Kind, the damping, buffering material is EV foam or sponge.
9. mask plate turnover device according to claim 1, which is characterized in that further include door body, the door body with it is described
Cabinet pivotable connection, to open or close the load port.
10. mask plate turnover device according to any one of claim 1 to 9, which is characterized in that the bottom of the cabinet
Equipped with castor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250965.9A CN109825801A (en) | 2019-03-29 | 2019-03-29 | Mask plate turnover device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910250965.9A CN109825801A (en) | 2019-03-29 | 2019-03-29 | Mask plate turnover device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109825801A true CN109825801A (en) | 2019-05-31 |
Family
ID=66874565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910250965.9A Pending CN109825801A (en) | 2019-03-29 | 2019-03-29 | Mask plate turnover device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109825801A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7639392B2 (en) | 2020-02-28 | 2025-03-05 | 大日本印刷株式会社 | Case for storing frames, method for removing frames stored in the case, method for storing frames in the case, and frame storage body |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060011584A (en) * | 2004-07-30 | 2006-02-03 | 엘지.필립스 엘시디 주식회사 | Packing device for liquid crystal display module |
| JP2006124034A (en) * | 2004-09-29 | 2006-05-18 | Hoya Corp | Member for supporting thin-film coated board, container for storing the thin-film coated board, mask blank storing body, transfer mask storing body and method for transporting the thin-film coated board |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| JP2011131940A (en) * | 2011-03-22 | 2011-07-07 | Hoya Corp | Substrate-storing body container, film coated glass substrate-storing body, mask blank-storing body, and transfer mask-storing body |
| CN107826408A (en) * | 2017-12-18 | 2018-03-23 | 南京灿华光电设备有限公司 | A kind of conveying arrangement that can prevent OLED display from damaging |
| CN208576917U (en) * | 2018-06-29 | 2019-03-05 | 庄粉香 | A kind of fruit picking storage bin |
| CN209873080U (en) * | 2019-03-29 | 2019-12-31 | 唐军 | Mask plate turnover device |
-
2019
- 2019-03-29 CN CN201910250965.9A patent/CN109825801A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20060011584A (en) * | 2004-07-30 | 2006-02-03 | 엘지.필립스 엘시디 주식회사 | Packing device for liquid crystal display module |
| JP2006124034A (en) * | 2004-09-29 | 2006-05-18 | Hoya Corp | Member for supporting thin-film coated board, container for storing the thin-film coated board, mask blank storing body, transfer mask storing body and method for transporting the thin-film coated board |
| CN102056360A (en) * | 2009-10-27 | 2011-05-11 | 株式会社日立高新技术 | Organic el device manufacturing apparatus and method, film-forming apparatus and method |
| JP2011131940A (en) * | 2011-03-22 | 2011-07-07 | Hoya Corp | Substrate-storing body container, film coated glass substrate-storing body, mask blank-storing body, and transfer mask-storing body |
| CN107826408A (en) * | 2017-12-18 | 2018-03-23 | 南京灿华光电设备有限公司 | A kind of conveying arrangement that can prevent OLED display from damaging |
| CN208576917U (en) * | 2018-06-29 | 2019-03-05 | 庄粉香 | A kind of fruit picking storage bin |
| CN209873080U (en) * | 2019-03-29 | 2019-12-31 | 唐军 | Mask plate turnover device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7639392B2 (en) | 2020-02-28 | 2025-03-05 | 大日本印刷株式会社 | Case for storing frames, method for removing frames stored in the case, method for storing frames in the case, and frame storage body |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190531 |
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| RJ01 | Rejection of invention patent application after publication |