CN109817694A - Organic light emitting display panel and production method, display device - Google Patents
Organic light emitting display panel and production method, display device Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H10K59/805—Electrodes
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- H10K59/80522—Cathodes combined with auxiliary electrodes
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Abstract
本发明公开了有机发光显示面板及其制作方法、显示装置。具体的，本发明提出了一种制作有机发光显示面板的方法，包括：提供衬底，在衬底上形成阴极层；在阴极层远离衬底的一侧形成感光活性层，感光活性层的亲疏水性可在光照条件下发生改变；对感光活性层进行亲水光照处理，并通过第一构图工艺在感光活性层中形成阵列排布的多个开口，多个开口在衬底上的正投影位于像素界定层区域内；对感光活性层中除去预定区域之外的区域进行疏水光照处理；在感光活性层远离阴极层的一侧沉积金属，金属形成在感光活性层经亲水光照处理处以形成辅助阴极，辅助阴极和阴极层通过开口相连。该方法可简便地制得性能良好的辅助阴极，提高有机发光显示面板的使用性能。
The invention discloses an organic light-emitting display panel, a manufacturing method thereof, and a display device. Specifically, the present invention provides a method for manufacturing an organic light-emitting display panel, which includes: providing a substrate, forming a cathode layer on the substrate; forming a photosensitive active layer on the side of the cathode layer away from the substrate, the photosensitive active layer is The water quality can be changed under illumination conditions; the photosensitive active layer is subjected to hydrophilic illumination treatment, and a plurality of openings arranged in an array are formed in the photosensitive active layer through the first patterning process, and the orthographic projections of the plurality of openings on the substrate are located in the substrate. In the area of the pixel defining layer; hydrophobic light treatment is performed on the area of the photosensitive active layer except the predetermined area; metal is deposited on the side of the photosensitive active layer away from the cathode layer, and the metal is formed at the place where the photosensitive active layer is treated with hydrophilic light to form auxiliary The cathode, the auxiliary cathode and the cathode layer are connected through the opening. The method can easily prepare an auxiliary cathode with good performance and improve the performance of the organic light emitting display panel.
Description
Technical field
The present invention relates to field of display technology, and in particular, to organic light emitting display panel and production method, display dress
It sets.
Background technique
Organic electroluminescent (OLED) display technology is because of its self-luminous, wide viewing angle, contrast are high, compared with low power consumption, high anti-
Answer thin speed, ultra lightweight, soft display, screen capable of crimping, the advantages that thermal adaptability is strong, manufacture craft is simple, it has also become
The research hotspot of photoelectric display technical field.Top emitting AMOLED (passive type organic electroluminescent LED) can be solved effectively
The problem of aperture opening ratio as brought by complicated TFT (thin film field-effect pipe) compensation circuit reduces and brightness of display screen reduces, together
When by that can also be carried out to the colour gamut of AMOLED display screen using microcavity effect present in top emitting AMOLED device architecture
Improve, improves display effect.Part must be projected as top emitting AMOLED, the light transmittance and electrical conductivity of transparent cathode are to pass
Important factor.Common cathode material such as aluminium, magnesium-aluminium, silver all only have preferable light transmittance, but cathode in very thin Shi Caineng
Layer is excessively thin to will lead to open circuit or metal oxidation, cannot form effectively Ohmic contact, cause brightness of display screen uneven；And it uses saturating
When the materials such as the higher tin indium oxide of lightness, indium zinc oxide make cathode, the resistance of cathode is larger, can generate biggish voltage
Drop, and with the increase of size of display panels, the voltage drop of cathode is significant, so as to cause the brightness irregularities of display.Therefore,
It needs to increase conductivity by way of auxiliary cathode is arranged.
However, current organic light emitting display panel and preparation method thereof, display device, still have much room for improvement.
Summary of the invention
The present invention be based on inventor couple on the fact that and problem discovery and understanding make:
Inventors have found that making the auxiliary cathode in top emitting AMOLED (passive type organic electroluminescent LED) at present
Method, generally existing complex manufacturing technology is easy to damage cathode and the problems such as higher cost.Current top emitting
AMOLED technique, in order to avoid light transmittance of the auxiliary cathode to top emitting impacts, auxiliary cathode is usually positioned only at pixel
The corresponding region of layer is defined, therefore, when making auxiliary cathode, a kind of method is the first gold in one flood of cathode layer disposed thereon
Belong to, then by photoetching process by the metal pattern of flood, removal is deposited on the metal of luminescent layer corresponding region, even auxiliary
Cathode is only formed in the corresponding region of pixel defining layer, and this method is easy to damage cathode layer when carrying out photoetching process,
It is bad in turn result in the display such as stain；Another method is to form auxiliary yin using high-precision mask plate and by evaporation process
Pole, although this method is not necessarily to auxiliary cathode can be enabled to be only formed in the corresponding region of pixel defining layer by photoetching process,
High-precision mask plate higher cost used in this method, and will be scrapped after using several times, further improve production cost.
Therefore, if a kind of method that can propose new production auxiliary cathode, without by above-mentioned photoetching process or without using upper
State fine mask version, so that it may only form auxiliary cathode in the corresponding region of pixel defining layer, manufacture craft will be simplified, improve production
Product yield, reduction production cost etc., will largely solve the above problems.
In one aspect of the invention, the invention proposes a kind of methods for making organic light emitting display panel.According to this
The embodiment of invention has the multiple sub-pixels defined by pixel defining layer this method comprises: providing substrate on the substrate
Area, and in the substrate there is the side of the pixel defining layer to form the luminescent layer being filled in inside the sub-pixel area, with
And cathode layer, the cathode layer cover the luminescent layer and the pixel defining layer；In the cathode layer far from the substrate
Side form photoreceptor activity layer, the hydrophilic and hydrophobic of the photoreceptor activity layer can change under illumination condition；To the sense
Photoactive layer carries out hydrophilic lighting process, and by the first patterning processes, array arrangement is formed in the photoreceptor activity layer
Multiple openings, the orthographic projection of multiple openings over the substrate are located in the pixel defining layer region；To described photosensitive
The region except presumptive area is removed in active layer carries out hydrophobic lighting process, the positive throwing of the presumptive area over the substrate
Shadow covers the orthographic projection of the opening over the substrate, and is located in the pixel defining layer region；In the photoreceptor activity
Side deposited metal of the layer far from the cathode layer, the metal are formed in the photoreceptor activity layer by the hydrophilic illumination
At reason, it is connected with forming auxiliary cathode, the auxiliary cathode and the cathode layer by the opening.This method passes through as a result,
Photoreceptor activity layer is formed in cathode layer surface, and enables the photoreceptor activity layer of luminescent layer corresponding region that there is hydrophobicity, enables pixel circle
The photoreceptor activity layer of given layer corresponding region has hydrophily, and then can be easily only heavy on the surface of hydrophily photoreceptor activity layer
Product metal, forms auxiliary cathode, simplifies production technology, avoids the damage during making auxiliary cathode to cathode layer,
And lower production costs, the brightness uniformity of the organic light emitting display panel of production is preferable, and power consumption is lower, and service performance is good.
According to an embodiment of the invention, first patterning processes include: in the photoreceptor activity layer far from the cathode
The side of layer forms first exposure mask with mask open, and the orthographic projection of the mask open over the substrate is located at the picture
Element defines in layer region；Processing is performed etching to the photoreceptor activity layer based on first exposure mask, to form multiple run through
The opening of the photoreceptor activity layer；Remove first exposure mask.This method can be easily in photoreceptor activity layer as a result,
Multiple openings are formed, the opening of formation further improves institute convenient for the electrical connection of the auxiliary cathode and cathode layer that are subsequently formed
The service performance of the organic light emitting display panel of production.
According to an embodiment of the invention, described dredge the region removed except presumptive area in the photoreceptor activity layer
Water lighting process includes: that the presumptive area in the photoreceptor activity layer forms the second exposure mask；To the photoreceptor activity layer
Carry out the hydrophobic lighting process；Remove second exposure mask.Thus, it is possible to which the photoreceptor activity layer of presumptive area is easily enabled to become
For hydrophobicity, the effect of adherency cathode layer is lost, when subsequent deposition metal forms auxiliary cathode, auxiliary cathode is only formed in hydrophilic
Property photoreceptor activity layer (have the function of adhere to cathode) surface.
According to an embodiment of the invention, the width of the orthographic projection of the presumptive area over the substrate is not more than 26 μm.
The size of presumptive area is in above range as a result, it is ensured that the auxiliary cathode of formation is only positioned at pixel defining layer and corresponds to area
Domain further improves the service performance of prepared organic light emitting display panel.
According to an embodiment of the invention, the photoreceptor activity layer is to be formed by transparent material, and the transparent material exists
There is hydrophily under ultraviolet light, there is hydrophobicity under visible light illumination.Thus, it is possible to easily pass through visible light or purple
The variation of the hydrophilic and hydrophobic of photoreceptor activity layer is realized in outer light irradiation, and the transparent photoreceptor activity layer will not influence luminescent layer
Light transmittance.
According to an embodiment of the invention, the material for forming the photoreceptor activity layer includes the compound with structure shown in formula I:
Ring-closure reaction can occur under ultraviolet light with the compound of the structure as a result, become hydrophily, and can
Ring-opening reaction can occur under light-exposed irradiation, become hydrophobicity, thus the photoreceptor activity layer can easily realize hydrophilic and hydrophobic
Variation is conducive to subsequent and forms auxiliary cathode in the corresponding region of hydrophilic photoreceptor activity layer；And with the structure
Containing more fluorine-based in compound, after polarity is larger, therefore the first exposure mask of utilization described in front forms opening, removing
When exposure mask, developer solution will not damage the photoreceptor activity layer, further improve made organic light emitting display panel
Service performance.
According to an embodiment of the invention, the photoreceptor activity layer is formed by opaque material, the auxiliary yin is formed
After pole, the method further includes: the removal photoreceptor activity layer corresponding with the sub-pixel area.Thus, it is possible to keep away
Exempting from photoreceptor activity layer influences the light transmittance of top emitting, and remaining opaque photoreceptor activity layer has interception, can be with
As black matrix, the light extraction efficiency of luminescent layer can be improved, while colour gamut can be improved.
In another aspect of this invention, the invention proposes a kind of organic light emitting display panels.Implementation according to the present invention
The example organic light emitting display panel is prepared by the described in any item methods of claim 1-7.The organic light emission as a result,
There is display panel organic light emitting display panel made by the method for mentioned-above production organic light emitting display panel to be had
The whole features and advantage having, details are not described herein.Generally speaking, each position brightness of the organic light emitting display panel compared with
To be uniform, and power consumption is lower, and service performance is good.
In still another aspect of the invention, the invention proposes a kind of organic light emitting display panels.Implementation according to the present invention
Example, which includes: substrate, has the multiple sub-pixels defined by pixel defining layer on the substrate
There is the side of the pixel defining layer to be provided with the luminescent layer being filled in inside the sub-pixel area for area, the substrate, and
Cathode layer, the cathode layer cover the luminescent layer and the pixel defining layer；Auxiliary cathode defines structure, the auxiliary yin
Structure setting is defined in side of the cathode layer far from the substrate in pole, and it is by photoreceptor activity that the auxiliary cathode, which defines structure,
What material was formed, the auxiliary cathode defines multiple openings that structure has array arrangement, and multiple openings are in the substrate
On orthographic projection be located in the pixel defining layer region；Auxiliary cathode, the auxiliary cathode are arranged in auxiliary cathode circle
Determine side of the structure far from the cathode layer, the orthographic projection of the auxiliary cathode over the substrate is located at the pixel defining layer
In region, and the auxiliary cathode is connected with the cathode layer by the opening.The organic light emitting display panel is each as a result,
A position brightness is more uniform, and power consumption is lower, and service performance is good.
According to an embodiment of the invention, the auxiliary cathode, which defines structure, to be formed by transparent photoreceptor activity material,
The auxiliary cathode defines structure and covers the cathode layer, and has the opening in the corresponding position of the pixel defining layer.
The service performance of the organic light emitting display panel is further improved as a result,.
According to an embodiment of the invention, the auxiliary cathode, which defines structure, to be formed by opaque photoreceptor activity material
, the auxiliary cathode defines the orthographic projection of structure over the substrate and is located in the pixel defining layer region.This is not as a result,
Transparent auxiliary cathode defines structure with interception, can be used as black matrix, the light extraction efficiency of luminescent layer can be improved, simultaneously
Colour gamut can be improved.
In another aspect of this invention, the invention proposes a kind of display devices.According to an embodiment of the invention, described aobvious
Showing device includes the described in any item organic light emitting display panels of claim 9-11.The organic light emitting display panel is aobvious as a result,
Showing device have the advantages that whole feature possessed by mentioned-above organic light emitting display panel and, details are not described herein.Always
For, the display brightness of the display device is uniform, and display performance is good, and power consumption is lower.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 shows the method flow diagram of preparation organic light emitting display panel according to an embodiment of the invention；
Fig. 2 shows the method flow diagram of preparation organic light emitting display panel in accordance with another embodiment of the present invention；
Fig. 3 shows the variation of hydrophilic-hydrophobic property schematic diagram of photoreceptor activity material according to an embodiment of the invention；
Fig. 4 shows the method flow diagram of the preparation organic light emitting display panel of another embodiment according to the present invention；
Fig. 5 shows the method flow diagram of the preparation organic light emitting display panel of another embodiment according to the present invention；
Fig. 6 shows the method flow diagram of the preparation organic light emitting display panel of another embodiment according to the present invention；
Fig. 7 shows the method flow diagram of the preparation organic light emitting display panel of another embodiment according to the present invention；
Fig. 8 shows the method flow diagram of the preparation organic light emitting display panel of another embodiment according to the present invention；
Fig. 9 shows the structural schematic diagram of organic light emitting display panel according to an embodiment of the invention；And
Figure 10 shows the structural schematic diagram of organic light emitting display panel in accordance with another embodiment of the present invention.
Description of symbols:
100: substrate；110: pixel defining layer；120: sub-pixel area；130: luminescent layer；140: cathode layer；150: anode
Layer；200: photoreceptor activity layer；210: opening；220: hydrophobic photoreceptor activity layer part；230: hydrophilic photoreceptor activity layer
Part；300: auxiliary cathode；400: auxiliary cathode defines structure；10: the first exposure masks；11: mask open；20: the second exposure masks；
1000: organic light emitting display panel.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In one aspect of the invention, the invention proposes a kind of methods for making organic light emitting display panel.According to this
The embodiment of invention, this method enable the photosensitive work of luminescent layer corresponding region by forming photoreceptor activity layer in cathode layer surface
Property layer have hydrophobicity, enable pixel defining layer corresponding region photoreceptor activity layer have hydrophily, and then can easily only exist
The surface deposited metal of hydrophily photoreceptor activity layer only forms auxiliary cathode in the corresponding region of pixel defining layer, simplifies
Production technology is avoided when making auxiliary cathode in existing method using photoetching process damage caused by cathode layer, and is adopted
The problems such as production cost caused by high-precision mask plate is higher, improves product yield, reduces production cost, and make
The brightness uniformity of organic light emitting display panel is preferable, and power consumption is lower, and service performance is good.
According to an embodiment of the invention, with reference to Fig. 1, this method comprises:
S100: substrate is provided, luminescent layer and cathode layer is formed on the substrate
In this step, substrate is provided, there are the multiple sub-pixel areas defined by pixel defining layer on substrate, and serving as a contrast
There is the side of pixel defining layer to form the luminescent layer and cathode layer being filled in inside sub-pixel area at bottom, and cathode layer covers institute
Luminescent layer and pixel defining layer.
The embodiment of the present invention has pixel defining layer 110, pixel defining layer on substrate 100 with reference to (a) in Fig. 2
110 limit multiple sub-pixel areas 120 (being only one shown in figure) on substrate 100.Specifically, the type of substrate 100
It is not particularly limited, such as substrate may include multilayered structure, such as may include glass substrate, and may include being formed in
The structures such as plural layers transistor (TFT) and capacitor on substrate, and can also include being arranged in plural layers transistor
(TFT) planarization layer of isostructural top for example, substrate 100 may include glass substrate, and is successively set on glass base
Buffer layer (Buffer), active layer (p-Si), gate insulating layer (GI), the grid (Gate), interlayer insulating film of plate side
(ILD), source-drain electrode (SD) and planarization layer (PLN), such as the substrate can also include two grids, it can including successively
First grid insulating layer (the GI of setting1), first grid (Gate1), active layer (p-Si), second grid insulating layer (GI2),
Two grid (Gate2) etc..
According to an embodiment of the invention, with reference to (a) in Fig. 2, substrate 100 have the side of pixel defining layer 110 according to
It is secondary to be formed with anode layer 150 and luminescent layer 130, and anode layer 150 and luminescent layer 130 are formed in sub-pixel area 120.Tool
Body, luminescent layer 130 is formed by luminescent material, and the color for being formed in the luminescent material in multiple sub-pixel areas 120 can be with
Difference, such as can be respectively red illuminating material, green luminescent material and blue emitting material etc..Specifically, luminescent layer
130 be also possible to be formed by same luminescent material, such as white light emitting material is formed, it is subsequent can by having colour
The organic light emitting display panel of cover board and this method production of optical filter is used cooperatively, and realizes colored display.Specifically, can be with
Luminescent layer is simply forming by the method for inkjet printing.
According to an embodiment of the invention, with reference to (a) in Fig. 2, in luminescent layer 130 and pixel defining layer 110 far from lining
The side at bottom 100 forms a flood cathode layer 140.In top emitting AMOLED, in order to keep higher top emitting light transmittance, yin
The thinner thickness of pole layer 140, and light transmission rate is preferable.Specifically, cathode layer 140 can be by transparent tin indium oxide, oxidation
What the materials such as indium zinc were formed.As previously mentioned, making cathode layer using materials such as the higher tin indium oxide of transparency, indium zinc oxides
When, the resistance of cathode layer is larger, can generate biggish voltage drop, and with the increase of size of display panels, the electricity of cathode layer
Pressure drop is significant, so as to cause the brightness irregularities of display.Therefore, it is necessary to increase conductivity by way of auxiliary cathode is arranged.
S200: photoreceptor activity layer is formed
In this step, the cathode layer prepared in step in front forms photoreceptor activity layer, the sense far from the side of substrate
The hydrophilic and hydrophobic of photoactive layer can change under illumination condition.According to an embodiment of the invention, with reference to (b) in Fig. 2,
Cathode layer 140 forms photoreceptor activity layer 200 far from the side of substrate 100, specifically, can be in cathode layer 140 far from substrate 100
Side be deposited one layer of photoreceptor activity material, to form photoreceptor activity layer 200.
According to an embodiment of the invention, the specific type of photoreceptor activity material is not particularly limited, as long as can be in illumination item
The variation that hydrophilic and hydrophobic occurs under part, specifically, illumination condition can be ultraviolet light, or visible light shines
It penetrates.Thus, it is possible to easily realize the variation of the hydrophilic and hydrophobic of photoreceptor activity layer by visible light or ultraviolet light.With this
The surface of the variation of the hydrophilic and hydrophobic of photoreceptor activity material, the photoreceptor activity layer of formation can also change, and photoreceptor activity layer is parent
When aqueous and the adhesive force of the substances such as metal is stronger, when photoreceptor activity layer becomes hydrophobicity, loses adhewsive action, i.e., other
The more difficult surface for being attached to hydrophobic photoreceptor activity layer of substance, thus, subsequent when deposited metal forms auxiliary cathode, metal
Only it is deposited on the surface with hydrophilic photoreceptor activity layer.Specifically, photoreceptor activity material can have I institute of formula with reference to Fig. 3
Ring-closure reaction can occur under ultraviolet light, become hydrophily for the structure shown, the compound with the structure, and visible
Ring-opening reaction can occur under light irradiation, become hydrophobicity, therefore, this method can be easily only in the corresponding area of pixel defining layer
Domain forms auxiliary cathode, improves product yield, reduces production cost.Also, contain in the compound with above structure
More is fluorine-based, and polarity is larger, and when forming opening subsequently through the first patterning processes, developer solution will not make the photoreceptor activity layer
At damage, and the photoreceptor activity layer of transparent material formation will not influence the light transmittance of luminescent layer, further improve made
The service performance of the organic light emitting display panel of work.
According to an embodiment of the invention, photoreceptor activity layer can be and be formed by transparent material, it is also possible to by opaque
What material was formed.Specifically, will not influence the light transmittance of top emitting when photoreceptor activity layer is formed by transparent material；When photosensitive work
Property layer when being formed by opaque material, the photosensitive work of sub-pixel area corresponding region can also be removed by subsequent etching processing
Property layer.It according to an embodiment of the invention, the thickness of the photoreceptor activity layer formed can be 1nm-1 μm, such as can be 10nm, it can
Think 50nm, can be 100nm, can be 200nm, can be 500nm etc..The thickness of photoreceptor activity layer 200 is in above range
When, there is good service performance.
S300: hydrophilic lighting process is carried out, and forms multiple openings by the first patterning processes
In this step, hydrophilic lighting process is carried out to the photoreceptor activity layer prepared in preceding step, and passes through the first structure
Figure technique, forms multiple openings of array arrangement in photoreceptor activity layer, and the orthographic projection of multiple openings on substrate is located at pixel
It defines in layer region.According to an embodiment of the invention, first being carried out at hydrophilic illumination to the photoreceptor activity layer prepared in preceding step
Reason, such as ultraviolet lighting processing is carried out, make photoreceptor activity layer that there is hydrophily, the adhesive force of photoreceptor activity layer is stronger at this time, just
In forming multiple openings in photoreceptor activity layer subsequently through the first patterning processes.According to an embodiment of the invention, with reference in Fig. 2
(c), orthographic projection on substrate 100 is located at the opening 210 (referring to opening 210A shown in figure and opening 210B) of formation
In 110 region of pixel defining layer.According to an embodiment of the invention, the first patterning processes further comprise with reference to Fig. 4:
S310: the first exposure mask is formed
In this step, first exposure mask with mask open is formed far from the side of cathode layer in photoreceptor activity layer.Root
According to the embodiment of the present invention, with reference to (e) in Fig. 5, is formed to have far from the side of cathode layer 140 in photoreceptor activity layer 200 and be covered
First exposure mask 10 of film opening 11, mask open 11 are located in 110 region of pixel defining layer in the orthographic projection on substrate 100.Tool
Body, the size of mask open 11 is not particularly limited, as long as being no more than the corresponding region of pixel defining layer 11.Specifically
, it can be then exposed development in side coating photoresist of the photoreceptor activity layer 200 far from cathode layer 140, form first
Exposure mask 10.As previously mentioned, having carried out hydrophilic lighting process, thus its to photoreceptor activity layer in advance before forming the first exposure mask
With hydrophily, adhesive force is stronger, and the first exposure mask can preferably be combined with the photoreceptor activity layer.
S320: processing is performed etching
In this step, processing is performed etching to photoreceptor activity layer based on the first exposure mask formed in preceding step, so as to
Form multiple openings through photoreceptor activity layer.According to an embodiment of the invention, being based on the first exposure mask with reference to (f) in Fig. 5
10, processing is performed etching to photoreceptor activity layer 200, to form multiple openings 210 through photoreceptor activity layer 200.Specifically,
Dry etching processing or wet etching treatment can be carried out to photoreceptor activity layer, to form opening 210.As previously mentioned, into
Before the first patterning processes of row, hydrophilic lighting process has been carried out to photoreceptor activity layer 200 in advance, has made it have hydrophily, thus,
The binding force of the photoreceptor activity layer 200 and the first exposure mask 10 is stronger, therefore can be based on the first exposure mask 10 to photoreceptor activity layer 200
Carry out wet etching treatment.Specifically, can be carried out in atmosphere of inert gases when carrying out dry etching processing, to avoid
Oxygen in air etc. damages the cathode layer 140 at opening 210.
S320: the first exposure mask of removal
In this step, the first exposure mask is removed.According to an embodiment of the invention, can be using developer solution to mentioned-above
The first exposure mask that photoresist is formed carries out development treatment, makes it dissolve removal.As previously mentioned, being formed according to an embodiment of the present invention
The photoreceptor activity material polarity of photoreceptor activity layer is larger, thus developer solution will not be to the photosensitive work when removing the first exposure mask
Property layer damages.Specifically, with reference to (c) in Fig. 5, after removing the first exposure mask, formation can be open 210.
The above method can easily form multiple openings in photoreceptor activity layer as a result, and the opening of formation is convenient for subsequent
The auxiliary cathode of formation and the electrical connection of cathode layer further improve the usability of made organic light emitting display panel
Energy.
S400: hydrophobic lighting process is carried out
In this step, in the photoreceptor activity layer with multiple openings formed in preceding step, presumptive area is removed
Except region carry out hydrophobic lighting process, wherein the orthographic projection covering opening of presumptive area on substrate is on substrate just
Projection, and be located in pixel defining layer region, i.e., presumptive area can be the region of open circumferential, and presumptive area is on substrate
Orthographic projection be no more than pixel defining layer region.According to an embodiment of the invention, hydrophobic lighting process can be radiation of visible light,
Photoreceptor activity layer part by hydrophobic lighting process, has become hydrophobicity from hydrophily before, thus this becomes hydrophobicity
Photoreceptor activity layer part lose adhewsive action, the i.e. poor adhesive force of the hydrophobic photoreceptor activity layer surface in the part, other objects
Matter is not easy to be attached to its surface, thus when subsequent deposition metal forms auxiliary cathode, auxiliary cathode is only formed in hydrophilic
Photoreceptor activity layer (there is adhesive force) surface.It, can be only in the corresponding region of pixel defining layer to pass through primary depositing technique
Auxiliary cathode, and the high-precision mask plate without using price costly are formed, production technology has been saved.According to the present invention
Embodiment, with reference to Fig. 6, this method be may further include:
S410: the second exposure mask is formed
In this step, the presumptive area in front in the photoreceptor activity layer forms the second exposure mask.According to the present invention
Embodiment, with reference to (g) in Fig. 7, presumptive area in photoreceptor activity layer 200 forms the second exposure mask 20, and presumptive area is not
Less than the size of opening, and orthographic projection of the presumptive area (i.e. the second exposure mask 20) on substrate 100 is no more than pixel defining layer 110
Region.Specifically, the width (the width L with reference to shown in Fig. 7 (g)) of the orthographic projection of presumptive area on substrate can not
Greater than 26 μm, such as 25 μm can be not more than, 23 μm can be not more than, can be not more than is 20-26 μm etc..Fate as a result,
The size in domain is in above range, it is ensured that the auxiliary cathode being subsequently formed is only positioned at pixel defining layer corresponding region, into one
Step improves the service performance of prepared organic light emitting display panel.It should be noted that the presumptive area is subsequent
In preparation process, deposition forms the region of auxiliary cathode, as previously mentioned, corresponding in order to avoid auxiliary cathode is formed in sub-pixel area
When region to luminescent layer go out light impact, auxiliary cathode needs to be positioned only at the region where pixel defining layer, before institute
The width of the orthographic projection of the presumptive area stated on substrate is not more than 26 μm, i.e., the width of finally formed auxiliary cathode is not more than
26 μm, that is, the auxiliary cathode formed is no more than pixel defining layer region.With specific reference to (g), (h) and (i) shown in Fig. 7
, the width in presumptive area cross-wise direction shown in the figure can be not more than 26 μm.Thus, it is possible to guarantee subsequent preparation
The auxiliary cathode formed in technique is only positioned at the corresponding region of pixel defining layer.Specifically, can be separate in photoreceptor activity layer 200
Then the side coating photoresist of cathode layer 140 is exposed development, form the second exposure mask 20.
S400: hydrophobic lighting process is carried out
In this step, hydrophobic lighting process is carried out to the photoreceptor activity layer for being provided with the second exposure mask in preceding step.Root
According to the embodiment of the present invention, with reference to (h) in Fig. 7, the second exposure mask 20 can carry out masking protection to presumptive area, thus into
After the hydrophobic lighting process of row, the photoreceptor activity layer in the region of only not set second exposure mask 20 has become hydrophobicity, with reference to Fig. 7
(h) hydrophobic photoreceptor activity layer part 230 shown in, and the photoreceptor activity layer region for being provided with the second exposure mask 20 is still
Hydrophily, the hydrophilic photoreceptor activity layer part 220 with reference to shown in Fig. 7 (h).As a result, by the second exposure mask 20
Shape and position are designed, and can easily control position and the size of the close and distant water area on photoreceptor activity layer 200,
And then (auxiliary cathode is only deposited on hydrophilic sense for the region that can control the auxiliary cathode of subsequent deposition metal formation and size
Photoactive layer part 220).
S420: the second exposure mask of removal
In this step, mentioned-above second exposure mask is removed.According to an embodiment of the invention, developer solution pair can be used
The second exposure mask that mentioned-above photoresist is formed carries out development treatment, makes it dissolve removal.Specifically, with reference in Fig. 7
(i), after removing the second exposure mask, photoreceptor activity layer includes hydrophilic photoreceptor activity layer part 220 and hydrophobic photoreceptor activity
Layer part 230.
This method can easily enable the photoreceptor activity layer removed except presumptive area become hydrophobicity as a result, lose viscous
Attached effect, when subsequent deposition metal forms auxiliary cathode, auxiliary cathode layer only forms the photosensitive work of hydrophily in predetermined areas
Property layer surface.
S500: deposited metal forms auxiliary cathode
In this step, in side deposited metal of the photoreceptor activity layer far from cathode layer, to form auxiliary cathode.According to this
The embodiment of invention, with reference to (d) in Fig. 2, in side deposited metal of the photoreceptor activity layer 200 far from cathode layer 140, metal shape
Pass through at hydrophilic lighting process (the hydrophilic photoreceptor activity layer part 220 i.e. in figure) in photoreceptor activity layer 200, to be formed
Auxiliary cathode 300, auxiliary cathode 300 and cathode layer 140 are connected by the (not shown) that is open.This method can letter as a result,
Just auxiliary cathode 300 only is formed in the corresponding region of pixel defining layer, and auxiliary cathode 300 can preferably and cathode layer
140 electrical connections, reduce the voltage drop and power consumption of made organic light emitting display panel, improve the uniformity of display brightness.
According to some embodiments of the present invention, as previously mentioned, when photoreceptor activity layer is formed by transparent material, step in front
After middle formation auxiliary cathode, without removing remaining photoreceptor activity layer, which does not influence having for production
The top emitting light transmittance of machine light emitting display panel, preparation process are relatively simple.
Other embodiments according to the present invention, photoreceptor activity layer are when being formed by opaque material, in front in step
It is formed after auxiliary cathode, with reference to Fig. 8, this method further comprises:
S600: removal photoreceptor activity layer corresponding with sub-pixel area
In this step, photoreceptor activity layer corresponding with sub-pixel area is removed.According to an embodiment of the invention, in the step
In, photoreceptor activity layer corresponding with sub-pixel area can be only removed, can also be with auxiliary cathode for " exposure mask ", removal is in addition to setting
All photoreceptor activity layers except photoreceptor activity layer between auxiliary cathode and cathode layer, as long as guaranteeing that sub-pixel area (shines
Layer) the photoreceptor activity layer in corresponding region is removed.Thus, it is possible to which opaque photoreceptor activity layer is avoided to influence top emitting
Light transmittance, and remaining opaque photoreceptor activity layer have interception, can be used as black matrix, it might even be possible to replace
It is existing to be arranged in the outermost polaroid of organic luminous panel, the light extraction efficiency of luminescent layer can be improved, while color can be improved
Domain.It should be noted that existing organic light emitting display panel, in order to mitigate the interference of panel surface reflected light and show
Show the problems such as panel contrast is poor, it is usually inclined in the outermost of organic light emitting display panel (i.e. towards extraneous side) setting
Mating plate, to obstruct the reflection of ambient light, it is ensured that screen keeps higher contrast etc., and still, which is normally located at
In entire organic light emitting display panel, in other words, the luminous layer surface of subpixel area also has a polaroid, thus can this partially
Mating plate can impact the light extraction efficiency of luminescent layer, and organic light emitting display panel according to an embodiment of the present invention, and setting exists
The opaque photoreceptor activity layer of pixel defining layer corresponding region, can serve as black matrix, it can mitigate the reflection of ambient light,
Improve colour gamut, because polaroid is arranged without the outermost in organic light emitting display panel, has not only saved production and risen this, but also avoided
Luminescent layer goes out light loss, improves light extraction efficiency, and can also improve colour gamut.
In summary, this method is by forming photoreceptor activity layer in cathode layer surface, and enables the sense of luminescent layer corresponding region
Photoactive layer has hydrophobicity, enables the photoreceptor activity layer of pixel defining layer corresponding region have hydrophily, and then can be easily
Only in the surface deposited metal of hydrophily photoreceptor activity layer, auxiliary cathode is formed, production technology is simplified, avoids production auxiliary
To the damage of cathode layer during cathode, and lower production costs, the brightness uniformity of the organic light emitting display panel of production
Preferably, power consumption is lower, and service performance is good.
In another aspect of this invention, the invention proposes a kind of organic light emitting display panels.Implementation according to the present invention
Example, which prepared by mentioned-above method.Before the organic light emitting display panel has as a result,
Whole feature possessed by organic light emitting display panel made by the method for production organic light emitting display panel described in face with
And advantage, details are not described herein.Generally speaking, each position brightness of the organic light emitting display panel is more uniform, and power consumption
Lower, service performance is good.
In still another aspect of the invention, the invention proposes a kind of organic light emitting display panels.Implementation according to the present invention
Example, which, which can be, is prepared by mentioned-above method.The organic light emitting display panel has as a result,
Have all special possessed by organic light emitting display panel made by the method for mentioned-above production organic light emitting display panel
Sign and advantage, details are not described herein.According to an embodiment of the invention, with reference to Fig. 9, the organic light emitting display panel 1000 packet
Include: substrate 100, auxiliary cathode define structure 400 and auxiliary cathode 300, wherein have on substrate 100 by pixel defining layer
The 110 multiple sub-pixel areas 120 defined, substrate 100 are disposed with the side of pixel defining layer 110 and are filled in sub- picture
The anode layer 150 and luminescent layer 130 and cathode layer 140 in plain area 120, cathode layer 140 cover luminescent layer 130 and pixel circle
Given layer 110, auxiliary cathode define structure 400 and cathode layer 140 are arranged in far from 100 side, and auxiliary cathode, which defines structure 400, is
It is formed by photoreceptor activity material, auxiliary cathode defines multiple openings (not marking in figure) that structure 400 has array arrangement, more
A opening is located in 110 region of pixel defining layer in the orthographic projection on substrate 100, and auxiliary cathode 300 is arranged in auxiliary cathode circle
Fixed 400 sides far from cathode layer 140, orthographic projection of the auxiliary cathode 300 on substrate 100 are located at 110 region of pixel defining layer
It is interior, and auxiliary cathode 300 is connected with cathode layer 140 by opening.Each position brightness of the organic light emitting display panel as a result,
More uniformly, and power consumption is lower, and service performance is good.
According to some embodiments of the present invention, with reference to Fig. 9, auxiliary cathode defines structure 400 by transparent photoreceptor activity material
When material is formed, auxiliary cathode defines 400 covered cathode layer 140 of structure, and has in the corresponding position of pixel defining layer 110 and open
Mouthful.The service performance of the organic light emitting display panel is further improved as a result,.
Other embodiments according to the present invention, auxiliary cathode define structure 400 by opaque photoreceptor activity material shape
Cheng Shi, with reference to Figure 10, auxiliary cathode defines structure 400 and is located in 110 region of pixel defining layer in the orthographic projection on substrate 100.
The opaque auxiliary cathode defines structure 400 with interception as a result, can be used as black matrix, it might even be possible to replace existing
Some polaroids can be improved the light extraction efficiency of luminescent layer, while can improve colour gamut.
In another aspect of this invention, the invention proposes a kind of display devices.It is shown described in embodiment according to the present invention
Showing device includes mentioned-above organic light emitting display panel.The organic light emitting display panel display device has front as a result,
Whole feature and advantage possessed by the organic light emitting display panel, details are not described herein.Generally speaking, which fills
The display brightness set is uniform, and display performance is good, and power consumption is lower.
In the description of the present invention, the orientation or positional relationship of instruction is to be based on the orientation or positional relationship shown in the drawings,
It is merely for convenience of the description present invention rather than requires the present invention that must be constructed and operated in a specific orientation, therefore cannot understand
For limitation of the present invention.
In the description of this specification, the description of reference term " one embodiment ", " another embodiment " etc. means to tie
The embodiment particular features, structures, materials, or characteristics described are closed to be included at least one embodiment of the present invention.At this
In specification, the schematic representation of the above terms does not necessarily have to refer to the same embodiment or example.Moreover, the tool of description
Body characteristics, structure, material or feature may be combined in any suitable manner in any one or more of the embodiments or examples.This
Outside, without conflicting with each other, those skilled in the art by different embodiments described in this specification or can show
The feature of example and different embodiments or examples is combined.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, modifies, replacement and variant.
Claims (12)
1. a kind of method for making organic light emitting display panel characterized by comprising
Substrate is provided, there are the multiple sub-pixel areas defined by pixel defining layer on the substrate, and have in the substrate
The side of the pixel defining layer forms the luminescent layer and cathode layer being filled in inside the sub-pixel area, the cathode layer
Cover the luminescent layer and the pixel defining layer；
Photoreceptor activity layer is formed far from the side of the substrate in the cathode layer, and the hydrophilic and hydrophobic of the photoreceptor activity layer can be
It changes under illumination condition；
Hydrophilic lighting process is carried out to the photoreceptor activity layer, and by the first patterning processes, the shape in the photoreceptor activity layer
At multiple openings of array arrangement, the orthographic projection of multiple openings over the substrate is located at the pixel defining layer region
It is interior；
Hydrophobic lighting process is carried out to the region removed except presumptive area in the photoreceptor activity layer, the presumptive area is in institute
It states the orthographic projection on substrate and covers the orthographic projection of the opening over the substrate, and be located in the pixel defining layer region；
In side deposited metal of the photoreceptor activity layer far from the cathode layer, the metal is formed in the photoreceptor activity layer
At the hydrophilic lighting process, pass through the opening phase to form auxiliary cathode, the auxiliary cathode and the cathode layer
Even.
2. the method according to claim 1, wherein first patterning processes include:
First exposure mask with mask open is formed far from the side of the cathode layer in the photoreceptor activity layer, the exposure mask is opened
The orthographic projection of mouth over the substrate is located in the pixel defining layer region；
Processing is performed etching to the photoreceptor activity layer based on first exposure mask, it is multiple through the photoreceptor activity to be formed
The opening of layer；
Remove first exposure mask.
3. the method according to claim 1, wherein it is described in the photoreceptor activity layer remove presumptive area it
Outer region carries out hydrophobic lighting process
The presumptive area in the photoreceptor activity layer forms the second exposure mask；
The hydrophobic lighting process is carried out to the photoreceptor activity layer；
Remove second exposure mask.
4. the method according to claim 1, wherein the width of the orthographic projection of the presumptive area over the substrate
Degree is not more than 26 μm.
5. the method according to claim 1, wherein the photoreceptor activity layer be formed by transparent material, and
The transparent material has hydrophily under ultraviolet light, has hydrophobicity under visible light illumination.
6. according to the method described in claim 5, it is characterized in that, the material for forming the photoreceptor activity layer includes having formula I
The compound of structure:
7. the method according to claim 1, wherein the photoreceptor activity layer is formed by opaque material,
It is formed after the auxiliary cathode, the method further includes:
Remove the photoreceptor activity layer corresponding with the sub-pixel area.
8. a kind of organic light emitting display panel, which is characterized in that the organic light emitting display panel is appointed by claim 1-7
The preparation of method described in one.
9. a kind of organic light emitting display panel characterized by comprising
Substrate, has the multiple sub-pixel areas defined by pixel defining layer on the substrate, and the substrate has the pixel
The side for defining layer is provided with the luminescent layer and cathode layer being filled in inside the sub-pixel area, and the cathode layer covers institute
State luminescent layer and the pixel defining layer；
Auxiliary cathode defines structure, and the auxiliary cathode defines structure setting in side of the cathode layer far from the substrate,
The auxiliary cathode, which defines structure, to be formed by photoreceptor activity material, and the auxiliary cathode defines structure with array arrangement
Multiple openings, the orthographic projection of multiple openings over the substrate are located in the pixel defining layer region；
Auxiliary cathode, the auxiliary cathode is arranged in the auxiliary cathode and defines side of the structure far from the cathode layer, described
The orthographic projection of auxiliary cathode over the substrate is located in the pixel defining layer region, and the auxiliary cathode and the cathode
Layer is connected by the opening.
10. organic light emitting display panel according to claim 9, which is characterized in that the auxiliary cathode, which defines structure, is
It is formed by transparent photoreceptor activity material, the auxiliary cathode defines structure and covers the cathode layer, and in pixel circle
The corresponding position of given layer has the opening.
11. organic light emitting display panel according to claim 9, which is characterized in that the auxiliary cathode, which defines structure, is
It is formed by opaque photoreceptor activity material, the auxiliary cathode defines the orthographic projection of structure over the substrate positioned at described
In pixel defining layer region.
12. a kind of display device, which is characterized in that the display device includes the described in any item organic hairs of claim 9-11
Light display panel.
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| CN201910234364.9A CN109817694B (en) | 2019-03-26 | 2019-03-26 | Organic light-emitting display panel, manufacturing method, and display device |
| PCT/CN2020/075818 WO2020192313A1 (en) | 2019-03-26 | 2020-02-19 | Organic light-emitting display panel and manufacturing method thereof, and display device |
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| WO2020192313A1 (en) | 2020-10-01 |
| CN109817694B (en) | 2021-09-07 |
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