CN109817554A - A kind of gaseous diffuser - Google Patents
A kind of gaseous diffuser Download PDFInfo
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- CN109817554A CN109817554A CN201910095476.0A CN201910095476A CN109817554A CN 109817554 A CN109817554 A CN 109817554A CN 201910095476 A CN201910095476 A CN 201910095476A CN 109817554 A CN109817554 A CN 109817554A
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- 230000008021 deposition Effects 0.000 claims abstract description 198
- 238000005452 bending Methods 0.000 claims abstract description 28
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 238000000151 deposition Methods 0.000 description 123
- 239000010408 film Substances 0.000 description 22
- 239000012044 organic layer Substances 0.000 description 22
- 239000010410 layer Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229920000052 poly(p-xylylene) Polymers 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 2
- 229920001621 AMOLED Polymers 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- Electroluminescent Light Sources (AREA)
Abstract
The present invention provides a kind of gaseous diffuser, which includes: the first deposition region, corresponding with the position of first flattened region；Second deposition region, it is corresponding with the position of second flattened region；First deposition region and second deposition region are equipped with multiple second deposition holes；Third deposition region, it is corresponding with the bending position in region；The third deposition region is equipped with the first hole column and the second hole column being staggered, and the first hole column include multiple third deposition holes；The second hole column include multiple 4th deposition holes；The area of the third deposition hole is greater than the area of the 4th deposition hole, and the area of the third deposition hole is not less than the area of second deposition hole.Gaseous diffuser of the invention can be avoided the problem of cracked, film layer is broken when display panel folds, improve the service life of display panel.
Description
[technical field]
The present invention relates to field of display technology, more particularly to a kind of gaseous diffuser.
[background technique]
Compared with liquid crystal display, active matrix organic light-emitting diode (AMOLED) has high comparison, big visual angle, response
The advantages that speed is fast, so as to cause the concern and exploitation of people.
With the expansion of OLED (Organic Light-Emitting Diode, OLED) application field, more and more
Application field needs OLED Flexible Displays, namely shows after bending to OLED.
Existing gaseous diffuser makes OLED display panel, when OLED bending number increases, is easier to split
The problems such as line, film layer fracture, package failure, main cause is that the inorganic film deformation when being folded outward in thin-film package is too big, by
The brittleness and stress of inorganic film itself are easy to happen crackle, film layer fracture etc., reduce its service life.
Therefore, it is necessary to a kind of gaseous diffuser be provided, to solve the problems of prior art.
[summary of the invention]
The purpose of the present invention is to provide a kind of gaseous diffusers, can be improved the service life of display panel.
In order to solve the above technical problems, the present invention provides a kind of gaseous diffuser, the gaseous diffuser is aobvious for making
Show the organic layer of encapsulating film in panel, wherein the display panel includes the first flattened region, bending region and the second clear area
Domain, the bending region is between first flattened region and second flattened region, the encapsulation in the bending region
Layer has buffer structure, and the gaseous diffuser includes:
First deposition region, it is corresponding with the position of first flattened region；
Second deposition region, it is corresponding with the position of second flattened region；First deposition region and described second
Deposition region is equipped with multiple second deposition holes；
Third deposition region, it is corresponding with the bending position in region；The third deposition region is equipped with and is staggered
First hole column and the second hole column, the first hole column include multiple third deposition holes；The second hole column include multiple four heavy
Product hole；The area of the third deposition hole is greater than the area of the 4th deposition hole, and the area of the third deposition hole is not less than
The area of second deposition hole.
Gaseous diffuser of the invention, including third deposition region, it is corresponding with the bending position in region；The third
Deposition region is equipped with the first hole column and the second hole column being staggered, and the first hole column include multiple third deposition holes；It is described
Second hole column include multiple 4th deposition holes；The area of the third deposition hole is greater than the area of the 4th deposition hole, described
The area of third deposition hole is not less than the area of second deposition hole；Due in different heavy of third deposition region setting area
Product hole column, so that buffer structure is formed when making organic layer, to avoid when folding since inorganic film can not be discharged
The problems such as parameters such as stress are cracked, film layer is broken, improves the service life of display panel.
[Detailed description of the invention]
Fig. 1 is the top view of display panel；
Fig. 2 is the first top view of the gaseous diffuser of the embodiment of the present invention one；
Fig. 3 is second of top view of the gaseous diffuser of the embodiment of the present invention one；
Fig. 4 is the structural schematic diagram of the corresponding display panel of gaseous diffuser of the embodiment of the present invention one；
Fig. 5 is the first structural schematic diagram that region is bent in Fig. 4；
Fig. 6 is second of structural schematic diagram that region is bent in Fig. 4；
Fig. 7 is the first top view of the gaseous diffuser of the embodiment of the present invention two；
Fig. 8 is second of top view of the gaseous diffuser of the embodiment of the present invention two；
Fig. 9 is the structural schematic diagram of the corresponding display panel of gaseous diffuser of the embodiment of the present invention two；
Figure 10 is the first structural schematic diagram that region is bent in Fig. 8；
Figure 11 is second of structural schematic diagram that region is bent in Fig. 8.
[specific embodiment]
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the present invention with reference to additional schema
Example.The direction term that the present invention is previously mentioned, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outside", " side "
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is to be given the same reference numerals in the figure.
Please refer to the top view that Fig. 1 to 6, Fig. 1 is display panel.
As shown in Figure 1, display panel is flat including the first flattened region 101, bending region 103 and second under depression angle
Main plot domain 102, the bending region 103 is between first flattened region 101 and second flattened region 102.When
When display panel is in bending state, one end of display panel is connect with by flexible connector with driving chip.
As shown in Fig. 2, the gaseous diffuser 200 of the present embodiment is used to make the organic layer of encapsulating film in display panel, gas
Body diffuser 200 includes the first deposition region 201, the second deposition region 202 and third deposition region 203.
First deposition region 201 is corresponding with the position of first flattened region 101.
Second deposition region 202 is corresponding with the position of second flattened region 102；First deposition region, 201 He
Second deposition region 202 is equipped with multiple second deposition holes 22.
Third deposition region 203 is corresponding with the bending position in region 103；Wherein the third deposition region 203 is set
There are the first hole being staggered column and the second hole column, the first hole column include that multiple third deposition holes 23 namely the first hole arrange
In third deposition hole 23 be located at same row；The second hole column include multiple 4th deposition holes 24；Namely second Kong Liezhong
4th deposition hole 24 is located at same row, and the area of the third deposition hole 23 is greater than the area of the 4th deposition hole 24, and institute
The area for stating third deposition hole 23 is greater than the area of second deposition hole 22.
In one embodiment, the shape of second deposition hole 22, the third deposition hole 23, the 4th deposition hole 24
Shape is all round, diameter of the diameter greater than the 4th deposition hole 24 of the third deposition hole 23, the third deposition hole 23
Diameter be greater than second deposition hole 22 diameter.
In another embodiment, as shown in figure 3, the shape of second deposition hole 22 and the third deposition hole 23 is equal
For circle, the shape of the 4th deposition hole 24 is ellipse, and the length of the long axis of the 4th deposition hole 24 is less than or equal to institute
The diameter of third deposition hole 23 is stated, the length of the short axle of the 4th deposition hole 24 is less than the diameter of the third deposition hole 23,
The diameter of the third deposition hole 23 is greater than the diameter of second deposition hole 22.
Furthermore gaseous diffuser 200 may also include that peripheral edge margin (not shown), the peripheral edge margin are gas diffusion
The region of 200 surrounding of device, positioned at the outermost of gaseous diffuser 200, first deposition region 201, second crystallizing field
Domain 202 and the third deposition region 203 are respectively positioned in the peripheral edge margin.Namely peripheral edge margin is located at the first deposition region
201, it outside the second deposition region 202 and third deposition region 203, is surrounded by the first deposition hole 21 of surrounding in Fig. 2 or 3
Region.The peripheral edge margin is equipped with multiple first deposition holes 21.
Wherein, in order to further increase packaging effect, namely it is convex convenient for being formed positioned at the organic layer of the periphery of display panel
It rises, for example the organic layer in Fig. 4 in the first flattened region 101 and the second flattened region 102 forms protrusion, second deposition hole
22 area is less than the area of first deposition hole 21；It is heavy that the area of the third deposition hole 23 is less than or equal to described first
The area in product hole 21.In one embodiment, when the shape of first deposition hole 21 is also circle, the third deposition hole 23
Diameter be less than or equal to first deposition hole 21 diameter.It should be understood that the diameter of first deposition hole 21 at this time
Greater than the diameter of second deposition hole 22.
Wherein, in order to further increase packaging effect, the diameter of the third deposition hole 23 is less than or equal to described first
The diameter of deposition hole 21.
Wherein, in order to further increase packaging effect, the two neighboring third deposition hole 23 and the 4th deposition hole
Spacing between 24 is equal.
It will of course be understood that, first deposition hole 21, second deposition hole 22, the third deposition hole 23 with
And the 4th the shape of deposition hole 24 be not limited to the above shape, can also be other shapes.
As shown in figure 4, the cross section structure of display panel includes flexible substrate 11, anode 12 and pixel defining layer 13, has
Machine luminescent layer 14 and cathode 15 additionally include encapsulating film, encapsulating film may include the first organic layer 16, the first inorganic layer 17 and
Second organic layer 18.Namely the display panel is organic LED display panel.
As shown in Figs. 4-6, gaseous diffuser 200 through this embodiment made on above-mentioned display panel in first have
Machine layer 16, so that in the 103 concave-convex fluctuating of corresponding first organic layer 16 of bending region, wherein position corresponding with third deposition hole 23
It sets to form bulge-structure 161, position corresponding with the 4th deposition hole 24 forms recess portion, wherein the monomer of the first organic layer 16 includes
At least one of parylene C, parylene N, parylene D, parylene HT.
Using film-forming process such as PECVD, ALD, PVD, the first inorganic layer 17 is deposited on the first organic layer 16, first is inorganic
The material of layer 17 is SINx, Al2O3、SiO2Deng.
Again gaseous diffuser 200 through this embodiment made on above-mentioned display panel in the second organic layer 18 so that
In bending region 103, corresponding first organic layer 18 is concave-convex rises and falls, wherein position corresponding with third deposition hole 23 forms protrusion
Structure 181, position corresponding with the 4th deposition hole 24 forms recess portion, wherein the monomer of the second organic layer 18 includes parylene
C, at least one of parylene N, parylene D, parylene HT.
Wherein, in conjunction with Fig. 6, when display panel bending (inside) according to the first predetermined manner, due to the third
The area of deposition hole is greater than the area of second deposition hole, and the area of the 4th deposition hole is less than the face of the third deposition hole
Product avoids the occurrence of so that organic layer forms concaveconvex structure (namely buffer structure) to play buffer function in the process of bending
The problems such as crackle, film layer fracture, improve the service life of display panel.
When being bent to above-mentioned display panel according to the first predetermined manner, since the flexibility of inorganic film is poor, pass through bending
The waveform organic layer that long height rises and falls in region, the inorganic layer of Lai Lachang thereon effectively discharge stress, avoid inorganic film
Cracked under the action of extraneous stress, film layer fracture the problems such as, reduce and bend influence to inorganic film, improve aobvious
Show the service life of panel, furthermore also improves the bending effect and performance of display panel.
Fig. 7 is please referred to, Fig. 7 is the structural schematic diagram of the gaseous diffuser of the embodiment of the present invention two.
The gaseous diffuser of the present embodiment and the difference of a upper embodiment are that the area of the third deposition hole 23 is equal to
The area of second deposition hole 22.
In one embodiment, the shape of second deposition hole 22, the third deposition hole 23, the 4th deposition hole 24
Shape is all round, diameter of the diameter greater than the 4th deposition hole 24 of the third deposition hole 23, the third deposition hole 23
Diameter be equal to second deposition hole 22 diameter.
In another embodiment, as shown in figure 8, first deposition hole 21, second deposition hole 22, the third
The shape of deposition hole 23 is all circle, and the shape of the 4th deposition hole 24 is ellipse, the diameter etc. of the third deposition hole 23
It is less than or equal to the third deposition hole in the length of the diameter of second deposition hole 22, the long axis of the 4th deposition hole 24
23 diameter, the length of the short axle of the 4th deposition hole 24 are less than the diameter of the third deposition hole 23.
Wherein, in order to further increase packaging effect, namely it is convex convenient for being formed positioned at the organic layer of the periphery of display panel
It rises, the area of the third deposition hole 23 is less than the area of first deposition hole 21.In one embodiment, the third is heavy
The diameter in product hole 23 is less than the diameter of first deposition hole 21.
As shown in Figs. 9 to 11, gaseous diffuser 200 through this embodiment made on above-mentioned display panel in first have
Machine layer 16, so that in the 103 concave-convex fluctuating of corresponding first organic layer 16 of bending region, wherein position corresponding with the 4th deposition hole 24
It sets to form recess structure 162.
Gaseous diffuser 200 through this embodiment made on above-mentioned display panel in the second organic layer 18 so that
The 103 concave-convex fluctuating of corresponding first organic layer 18 of region is bent, wherein position corresponding with the 4th deposition hole 24 forms recess portion knot
Structure 182.
Wherein, in conjunction with Figure 11, when display panel bending (outside) according to the second predetermined manner, due to the third
The area of deposition hole is equal to the area of second deposition hole, and the area of the 4th deposition hole is less than the face of the third deposition hole
Product is avoided the occurrence of and is split to play buffer function in the process of bending so that organic layer forms concaveconvex structure (buffer structure)
The problems such as line, film layer fracture, improve the service life of display panel.
When being bent to above-mentioned display panel according to the second predetermined manner, since the flexibility of inorganic film is poor, pass through bending
The waveform organic layer that long height rises and falls in region, the inorganic layer of Lai Lachang thereon effectively discharge stress, avoid inorganic film
Cracked under the action of extraneous stress, film layer fracture the problems such as, reduce and bend influence to inorganic film, improve aobvious
Show the service life of panel, furthermore also improves the bending effect and performance of display panel.
Gaseous diffuser of the invention, including third deposition region, it is corresponding with the bending position in region；The third
Deposition region is equipped with the first hole column and the second hole column being staggered, and the first hole column include multiple third deposition holes；It is described
Second hole column include multiple 4th deposition holes；The area of the third deposition hole is greater than the area of the 4th deposition hole, described
The area of third deposition hole is not less than the area of second deposition hole；Due in different heavy of third deposition region setting area
Product hole column, so that buffer structure is formed when making organic layer, to avoid when folding since answering for inorganic film can not be discharged
The problems such as parameters such as power are cracked, film layer is broken, improves the service life of display panel.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of gaseous diffuser, which is characterized in that the gaseous diffuser is used to make the organic of encapsulating film in display panel
Layer, wherein the display panel includes that the first flattened region, bending region and the second flattened region, the bending region are located at institute
It states between the first flattened region and second flattened region, the encapsulated layer in the bending region has buffer structure, the gas
Body diffuser includes:
First deposition region, it is corresponding with the position of first flattened region；
Second deposition region, it is corresponding with the position of second flattened region；First deposition region and second deposition
Region is equipped with multiple second deposition holes；
Third deposition region, it is corresponding with the bending position in region；The third deposition region is equipped with first to be staggered
Hole column and the second hole column, the first hole column include multiple third deposition holes；The second hole column include multiple 4th deposition holes；
The area of the third deposition hole is greater than the area of the 4th deposition hole, and the area of the third deposition hole is not less than described the
The area of two deposition holes.
2. gaseous diffuser according to claim 1, which is characterized in that
When the display panel is bent according to the first predetermined manner, the area of the third deposition hole is greater than second deposition
The area in hole.
3. gaseous diffuser according to claim 2, which is characterized in that second deposition hole, the third deposition hole
And the shape of the 4th deposition hole is all circle, the diameter of the third deposition hole is greater than the straight of the 4th deposition hole
Diameter, the diameter of the third deposition hole are greater than the diameter of second deposition hole.
4. gaseous diffuser according to claim 2, which is characterized in that second deposition hole and the third deposition hole
Shape be circle, the shape of the 4th deposition hole is ellipse, and the length of the long axis of the 4th deposition hole is less than or waits
In the diameter of the third deposition hole, the length of the short axle of the 4th deposition hole is less than the diameter of the third deposition hole, institute
The diameter for stating third deposition hole is greater than the diameter of second deposition hole.
5. gaseous diffuser according to claim 2, which is characterized in that the gaseous diffuser further include: peripheral edge margin；
The peripheral edge margin is located at outside first deposition region, second deposition region and the third deposition region,
The peripheral edge margin is equipped with multiple first deposition holes；The area of the third deposition hole is less than or equal to first deposition hole
Area.
6. gaseous diffuser according to claim 1, which is characterized in that
When the display panel is bent according to the second predetermined manner, the area of the third deposition hole is equal to second deposition
The area in hole.
7. gaseous diffuser according to claim 6, which is characterized in that second deposition hole, the third deposition hole
And the shape of the 4th deposition hole is all circle, the diameter of the third deposition hole is greater than the straight of the 4th deposition hole
Diameter, the diameter of the third deposition hole are equal to the diameter of second deposition hole.
8. gaseous diffuser according to claim 6, which is characterized in that second deposition hole and the third deposition hole
Shape be all it is round, the shape of the 4th deposition hole is ellipse, and it is heavy that the diameter of the third deposition hole is equal to described second
The diameter in product hole, the length of the long axis of the 4th deposition hole are less than or equal to the diameter of the third deposition hole, and the described 4th
The length of the short axle of deposition hole is less than the diameter of the third deposition hole.
9. gaseous diffuser according to claim 6, which is characterized in that the gaseous diffuser further include: peripheral edge margin；
The peripheral edge margin is located at outside first deposition region, second deposition region and the third deposition region,
The peripheral edge margin is equipped with multiple first deposition holes；The area of the third deposition hole is less than the area of first deposition hole.
10. gaseous diffuser according to claim 1, which is characterized in that
Spacing between the two neighboring third deposition hole and the 4th deposition hole is equal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910095476.0A CN109817554B (en) | 2019-01-31 | 2019-01-31 | Gas diffuser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910095476.0A CN109817554B (en) | 2019-01-31 | 2019-01-31 | Gas diffuser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109817554A true CN109817554A (en) | 2019-05-28 |
| CN109817554B CN109817554B (en) | 2020-12-25 |
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ID=66606163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910095476.0A Active CN109817554B (en) | 2019-01-31 | 2019-01-31 | Gas diffuser |
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| KR20160127294A (en) * | 2015-04-24 | 2016-11-03 | 주식회사 원익아이피에스 | Substrate processing apparatus |
| CN109075024A (en) * | 2016-04-15 | 2018-12-21 | 应用材料公司 | Micro-volume deposition chambers |
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2019
- 2019-01-31 CN CN201910095476.0A patent/CN109817554B/en active Active
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| US20110201134A1 (en) * | 2002-05-22 | 2011-08-18 | Applied Materials, Inc. | Capacitively coupled plasma reactor with magnetic plasma control |
| CN1696768A (en) * | 2004-05-12 | 2005-11-16 | 应用材料股份有限公司 | Plasma Uniformity Control Using Gas Diffusion Plate Channel Design |
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| CN109817554B (en) | 2020-12-25 |
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