CN109817518B - Phosphor expanding device for heating raw materials of light-emitting diode - Google Patents
Phosphor expanding device for heating raw materials of light-emitting diode Download PDFInfo
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- CN109817518B CN109817518B CN201910049551.XA CN201910049551A CN109817518B CN 109817518 B CN109817518 B CN 109817518B CN 201910049551 A CN201910049551 A CN 201910049551A CN 109817518 B CN109817518 B CN 109817518B
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 33
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 239000002994 raw material Substances 0.000 title abstract description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 14
- 239000011574 phosphorus Substances 0.000 claims abstract description 14
- 229920001971 elastomer Polymers 0.000 claims abstract description 6
- 238000003860 storage Methods 0.000 claims abstract description 6
- 239000011521 glass Substances 0.000 claims description 12
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 229920001821 foam rubber Polymers 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 3
- 230000009471 action Effects 0.000 abstract description 11
- 238000009792 diffusion process Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910019213 POCl3 Inorganic materials 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- Resistance Heating (AREA)
Abstract
The invention discloses a phosphor expanding device for heating raw materials of a light-emitting diode, which comprises a bottom plate, a chute, a casing and a working box, wherein rubber pads are fixedly connected at four corners of the lower surface of the bottom plate, the casing is fixedly connected at one side edge of the upper surface of the bottom plate through screw nuts, a heating copper pipe is fixedly connected at the lower surface of a storage box, a heater is electrically connected with the lower surface of the heating copper pipe, a power supply is arranged right below the heater and is fixed at the lower surface of the casing through screw nuts, the working box is fixed at the upper surface of the chute through a fixing plate and screw nuts, a switch is arranged on the outer side surface of the working box, a fixer is fixed in the working box, a warning lamp is fixed on the upper surface of a working table, a connecting rod and the fixer are taken out, and the diode is placed in, and then putting the diode into a working box, and heating the diode by the action of the heater and the heating copper pipe to diffuse phosphorus for the diode.
Description
Technical Field
The invention relates to a phosphor diffusion device, in particular to a phosphor diffusion device for heating raw materials of a light-emitting diode, and belongs to the technical field of diode application.
Background
The diode is divided into germanium diode (Ge tube) and silicon diode (Si tube) according to the semiconductor material used, and may be divided into detector diode, rectifier diode, voltage regulator diode, switch diode, isolation diode, schottky diode, light emitting diode, silicon power switch diode, rotary diode, etc. according to different applications, it may be divided into point contact diode, surface contact diode and planar diode according to the tube core structure, the point contact diode is pressed on the surface of the clean semiconductor wafer by a thin metal wire, and pulse current is applied to make one end of the contact wire and the wafer firmly sintered together to form a "PN junction", because of point contact, it only allows small current (not more than dozens of milliamperes) and is suitable for high frequency small current circuit, such as the detection of radio receiver, etc., the area of the "PN junction" of the surface contact diode is large, the planar diode is a specially-made silicon diode which can not only pass larger current, but also has stable and reliable performance, and is mainly used in a switch, a pulse and a high-frequency circuit, and the positive terminal A is called as an anode and the negative terminal K of the diode; called the cathode, the current can only move from the anode to the cathode, and some beginners are liable to generate such a wrong recognition: "one 'half of a semiconductor is one' half; while diodes also have only one and a half' of the current flowing (which is wrong), all diodes are semiconductors; "a diode is a device which is composed of a semiconductor and can flow current in any direction, and a precise device is required for phosphor diffusion of the diode.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides the phosphor diffusion device for heating the raw material of the light-emitting diode, which has the advantages of strong practicability, convenience in use and the like, and solves the problem of low efficiency in phosphor diffusion.
(II) technical scheme
In order to realize the purposes of strong practicability and convenient use, the invention provides the following technical scheme:
a phosphor diffusion device for heating raw materials of a light-emitting diode, which comprises a bottom plate, a chute, a machine shell and a working box, the four corners of the lower surface of the bottom plate are fixedly connected with rubber pads, the edge of one side of the upper surface of the bottom plate is fixedly connected with the casing through screws and nuts, the lower surface of the storage box is fixedly connected with a heating copper pipe, the lower surface of the heating copper pipe is electrically connected with a heater, a power supply is arranged right below the heater, the power supply is fixed on the lower surface of the casing through a screw nut, the work box is fixed on the upper surface of the chute through a fixing plate and the screw nut, the outside surface of work box is provided with the switch, and the fixer is fixed in the inside of work box, the last fixed surface of workstation has the warning light, and the basal surface of workstation is fixed with the pump machine through screw nut, the workstation with the chute is integrated into one piece.
Preferably, the casing is kept away from a side fixedly connected with display screen control panel of bottom plate, the casing is close to a side of bottom plate is connected with the workstation, the casing is close to a side bottom intercommunication of bottom plate has the valve, valve one end is connected with the conveyer pipe, and the inside bin of casing with the conveyer pipe passes through the valve communicates with each other.
Preferably, a temperature sensor is fixedly connected to the inner side surface of the casing, a box is connected to one end of the conveying pipe, which is far away from the casing, a communication pipe is connected to one side surface of the box, and the other end of the communication pipe is communicated with the inside of the work box.
Preferably, the intercommunicating pore has been seted up on the surface of fixer, the bottom of fixer is connected with the glass cover, the side of glass cover is provided with miniature camera, miniature camera is fixed in the inboard surface of work box through screw nut, be provided with the foam-rubber cushion under the glass cover, the bottom of foam-rubber cushion is connected with the support column.
Preferably, the one end that the workstation was kept away from to the work box is connected with the connecting rod through the fixer, the one end that the work box was kept away from to the connecting rod is connected with the pressure plate piece, the pressure plate piece block is in the centre of folded sheet to be connected with the folded sheet through the spring, the lower fixed surface of folded sheet has the protective housing, the protective housing is the L type, just the protective housing is kept away from the one end fixedly connected with retainer plate of work box.
Preferably, the power supply is electrically connected with the pump, the warning lamp, the display screen control panel, the miniature camera, the heater and the temperature sensor.
Preferably, the display screen control panel is electrically connected with the pump, the miniature camera, the heater and the temperature sensor, and the heater is electrically connected with the heating copper pipe.
Preferably, the spongy cushion is connected with the supporting column through threads.
(III) advantageous effects
Compared with the prior art, the invention provides the device for heating the phosphor by the raw material of the light-emitting diode, which has the following beneficial effects:
1. this device is expanded to emitting diode raw and other materials heating phosphorus through taking out connecting rod and fixer, puts the diode into the fixer and fixes, puts into the work box afterwards, at this moment opens the heater, heats it by the effect of heater and heating copper pipe.
2. This device is expanded to emitting diode raw and other materials heating phosphorus can show at display screen control panel through the effect of temperature sensor with miniature camera head, is convenient for observe it, and the phosphorus can be diffused through the conveyer pipe afterwards, arrives in the box, expands the phosphorus to the diode through the pump machine with the effect of communicating pipe, intercommunicating pore, it can to close the valve after the phosphorus that expands finishes.
Drawings
FIG. 1 is a schematic view of the subjective structure of the present invention;
FIG. 2 is a schematic side view of the present invention;
FIG. 3 is a schematic view of the internal structure of the work box of the present invention;
FIG. 4 is a schematic view of the internal structure of the housing of the present invention;
in the figure: 1. a base plate; 2. a rubber pad; 3. a stationary ring; 4. a protective shell; 5. folding the board; 6. pressing plates; 7. a connecting rod; 8. a work box; 9. a switch; 10. a pump machine; 11. a warning light; 12. a work table; 13. a housing; 14. a display screen control panel; 15. a delivery pipe; 16. a communicating pipe; 17. a box body; 18. a spring; 19. a chute; 20. a valve; 21. a holder; 22. a communicating hole; 23. a miniature camera; 24. a glass cover; 25. a sponge cushion; 26. a support pillar; 27. a heater; 28. a storage tank; 29. heating the copper pipe; 30. a temperature sensor; 31. a power source.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
As shown in fig. 1, a light emitting diode raw material heating phosphor expanding device comprises a bottom plate 1, a chute 19, a casing 13 and a work box 8, wherein rubber pads 2 are fixedly connected to four corners of the lower surface of the bottom plate 1, the casing 13 is fixedly connected to one side edge of the upper surface of the bottom plate 1 through screws and nuts, a heating copper pipe 29 is fixedly connected to the lower surface of a storage box 28, a heater 27 is electrically connected to the lower surface of the heating copper pipe 29, a power supply 31 is arranged under the heater 27, the power supply 31 is fixed to the lower surface of the casing 13 through screws and nuts, the work box 8 is fixed to the upper surface of the chute 19 through a fixing plate and screws and nuts, a switch 9 is arranged on the outer side surface of the work box 8, a fixer 21 is fixed inside the work box 8, and a warning lamp 11 is fixed on the upper surface of, the pump 10 is fixed on the bottom surface of the working platform 12 through screws and nuts, and the working platform 12 and the chute 19 are integrally formed.
Through the technical scheme, the bottom plate 1 can be fixed at the plane position through the action of the rubber pad 2, the bottom plate 1 is prevented from moving randomly due to the action of external force, the heater 27 provides a heat source for the heating copper pipe 29, and the heat conductivity of the copper pipe is excellent, so that the temperature can be rapidly increased, and the working efficiency of the device is improved.
Example 2
As shown in fig. 1-4, a device is expanded to emitting diode raw and other materials heating phosphorus, casing 13 is kept away from a side fixedly connected with display screen control panel 14 of bottom plate 1, casing 13 is close to a side of bottom plate 1 is connected with workstation 12, casing 13 is close to a side bottom intercommunication of bottom plate 1 has valve 20, valve 20 one end is connected with conveyer pipe 15, and the inside bin 28 of casing 13 with conveyer pipe 15 passes through valve 20 communicates with each other, the inside side surface fixedly connected with temperature sensor 30 of casing 13, conveyer pipe 15 is kept away from the one end of casing 13 is connected with box 17, a side of box 17 is connected with communicating pipe 16, just the other end of communicating pipe 16 with the inside of work box 8 communicates with each other.
Through the technical scheme, the temperature inside the casing 13 can be monitored in real time under the action of the temperature sensor 30, so that the damage to other electric appliances caused by overhigh temperature inside the casing 13 is avoided, and the service life of the device is greatly prolonged.
Example 3
As shown in fig. 1-4, a phosphor diffusion device for heating raw material of light emitting diode, a communicating hole 22 is opened on the surface of the fixer 21, the bottom end of the fixer 21 is connected with a glass cover 24, the side surface of the glass cover 24 is provided with a miniature camera 23, the miniature camera 23 is fixed on the inner side surface of the working box 8 through screws and nuts, a spongy cushion 25 is arranged right below the glass cover 24, the bottom end of the spongy cushion 25 is connected with a supporting column 26, one end of the working box 8 far away from the working platform 12 is connected with a connecting rod 7 through a fixer 21, one end of the connecting rod 7 far away from the working box 8 is connected with a pressing plate block 6, the pressing plate block 6 is clamped in the middle of the folding plate 5, and is connected with a folding plate 5 through a spring 18, a protective shell 4 is fixed on the lower surface of the folding plate 5, protective housing 4 is the L type, just protective housing 4 keeps away from the one end fixedly connected with retainer plate 3 of work box 8.
Through foretell technical scheme, through miniature camera 23's effect, can observe the operating condition inside the glass cover 24 in real time, guarantee the integrality of diode in the operation that the phosphorus expands, and through the effect of spring 18, but greatly reduced, at the during operation, the injury that vibrations brought for the diode has reduced manufacturing cost.
Example 4
As shown in fig. 1-4, a phosphor diffusion device heated by led raw material, the power supply 31 is electrically connected to the pump 10, the warning light 11, the display control panel 14, the micro camera 23, the heater 27 and the temperature sensor 30, the display control panel 14 is electrically connected to the pump 10, the micro camera 23, the heater 27 and the temperature sensor 30, the heater 27 is electrically connected to the heating copper tube 29, and the sponge pad 25 is connected to the supporting post 26 by a screw thread.
Through foretell technical scheme, through the effect of display screen control panel 14, can demonstrate the picture that miniature camera 23 was shot is looked over for the staff, is convenient for carry out work on next step, and the temperature that temperature sensor 30 detected also can pass through the effect of display screen control panel shows, avoids the high temperature of device, and damages equipment, and through the effect of foam-rubber cushion 25, can provide fine protection to the diode that carries out processing, avoids at the in-process of processing, shakes the bits of broken glass with the diode, then can significantly reduce the required manufacturing cost of diode at the in-process that the phosphorus expands like this.
The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.
Specifically, the material of the micro camera 23 is a high temperature resistant material, so that the micro camera cannot be damaged by the temperature heated by the heater 27, the temperature sensor 30 is a platinum thermal resistance temperature sensor 30, the specific type of the temperature sensor 30 can be set according to the requirement, and when phosphorus is expanded, phosphorus oxychloride POCl3 is put into the storage box 28, and the copper pipe 29 and the heater 27 are heated under the action of heating to be decomposed into SiO2 and P.
When the device is used, the pressing plate 6 is pressed downwards, the connecting rod 7 and the fixer 21 are taken out, the diode is placed in the fixer 21 to be fixed, then the diode is placed in the working box 8, the heater 27 is turned on at the moment, the diode is heated under the action of the heater 27 and the heating copper pipe 29, the diode can be displayed on the display screen control panel 14 under the action of the temperature sensor 30 and the micro camera 23 to be convenient to observe, then phosphorus can be diffused through the conveying pipe 15 to reach the box body 17, phosphorus can be diffused for the diode under the action of the pump 10, the communicating pipe 16 and the communicating hole 22, and the valve 20 is closed after the phosphorus diffusion is finished.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a device is expanded to emitting diode raw and other materials heating phosphorus, is including bottom plate (1), chute (19), casing (13) and work box (8), its characterized in that: the improved energy-saving cabinet is characterized in that rubber pads (2) are fixedly connected to four corners of the lower surface of the bottom plate (1), one side edge of the upper surface of the bottom plate (1) is fixedly connected with the casing (13) through screw nuts, a heating copper pipe (29) is fixedly connected to the lower surface of the storage box (28), a heater (27) is electrically connected to the lower surface of the heating copper pipe (29), a power supply (31) is arranged under the heater (27), the power supply (31) is fixed to the lower surface of the casing (13) through screw nuts, the working box (8) is fixed to the upper surface of the chute (19) through a fixing plate and screw nuts, a switch (9) is arranged on the outer side surface of the working box (8), a fixer (21) is fixed inside the working box (8), a warning lamp (11) is fixed to the upper surface of the working table (12), and a pump (10) is fixed to the bottom surface of, the working table (12) and the chute (19) are integrally formed.
2. The apparatus as claimed in claim 1, wherein the phosphor heating apparatus comprises: casing (13) are kept away from a side fixedly connected with display screen control panel (14) of bottom plate (1), casing (13) are close to a side of bottom plate (1) is connected with workstation (12), casing (13) are close to a side bottom intercommunication of bottom plate (1) has valve (20), valve (20) one end is connected with conveyer pipe (15), and casing (13) inside bin (28) with conveyer pipe (15) pass through valve (20) communicate with each other.
3. The apparatus as claimed in claim 2, wherein: the temperature sensor (30) is fixedly connected to the inner side surface of the machine shell (13), one end, far away from the machine shell (13), of the conveying pipe (15) is connected with a box body (17), one side surface of the box body (17) is connected with a communicating pipe (16), and the other end of the communicating pipe (16) is communicated with the inside of the working box (8).
4. The apparatus as claimed in claim 3, wherein: intercommunicating pore (22) have been seted up on the surface of fixer (21), the bottom of fixer (21) is connected with glass cover (24), the side of glass cover (24) is provided with miniature camera (23), miniature camera (23) are fixed in the inboard surface of work box (8) through screw nut, be provided with foam-rubber cushion (25) under glass cover (24), the bottom connection of foam-rubber cushion (25) has support column (26).
5. The apparatus as claimed in claim 1, wherein the phosphor heating apparatus comprises: the one end that workstation (12) were kept away from in work box (8) is connected with connecting rod (7) through fixer (21), the one end that work box (8) were kept away from in connecting rod (7) is connected with pressure plate block (6), pressure plate block (6) block is connected in the centre of folded sheet (5) to be connected with folded sheet (5) through spring (18), the lower fixed surface of folded sheet (5) has protective housing (4), protective housing (4) are the L type, just protective housing (4) are kept away from the one end fixedly connected with retainer plate (3) of work box (8).
6. The apparatus as claimed in claim 4, wherein: the power supply (31) is electrically connected with the pump (10), the warning lamp (11), the display screen control panel (14), the miniature camera (23), the heater (27) and the temperature sensor (30).
7. The apparatus as claimed in claim 6, wherein: the display screen control panel (14) is electrically connected with the pump (10), the miniature camera (23), the heater (27) and the temperature sensor (30), and the heater (27) is electrically connected with the heating copper pipe (29).
8. The apparatus as claimed in claim 4, wherein: the spongy cushion (25) is connected with the supporting column (26) through threads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910049551.XA CN109817518B (en) | 2019-01-18 | 2019-01-18 | Phosphor expanding device for heating raw materials of light-emitting diode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910049551.XA CN109817518B (en) | 2019-01-18 | 2019-01-18 | Phosphor expanding device for heating raw materials of light-emitting diode |
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| Publication Number | Publication Date |
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| CN109817518A CN109817518A (en) | 2019-05-28 |
| CN109817518B true CN109817518B (en) | 2020-03-10 |
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| CN201910049551.XA Expired - Fee Related CN109817518B (en) | 2019-01-18 | 2019-01-18 | Phosphor expanding device for heating raw materials of light-emitting diode |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101128911A (en) * | 2005-02-28 | 2008-02-20 | 爱普斯碧德股份有限公司 | Systems and processes for high density, low energy plasma enhanced vapor phase epitaxy |
| CN102094247A (en) * | 2010-09-29 | 2011-06-15 | 常州天合光能有限公司 | Two-end gas intake device for phosphorous diffusion furnace tube |
| US9041048B2 (en) * | 2008-09-02 | 2015-05-26 | Lg Innotek Co., Ltd. | Semiconductor light emitting device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4819505B2 (en) * | 2006-01-10 | 2011-11-24 | シンコー リミテッド | Diffuser |
| KR101234783B1 (en) * | 2006-07-13 | 2013-02-20 | 삼성전자주식회사 | Nitride-based semiconducter light emitting device and method of manufacturing the same |
| US8039289B2 (en) * | 2009-04-16 | 2011-10-18 | Tp Solar, Inc. | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing |
| CN103224237B (en) * | 2013-05-23 | 2014-12-17 | 苏州金瑞晨科技有限公司 | Preparation method and device of phosphorus-doped nano silicon material |
| CN108010988A (en) * | 2017-11-13 | 2018-05-08 | 江苏爱多能源科技有限公司 | A kind of low voltage control crystal silicon chip phosphorus diffusion system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101128911A (en) * | 2005-02-28 | 2008-02-20 | 爱普斯碧德股份有限公司 | Systems and processes for high density, low energy plasma enhanced vapor phase epitaxy |
| US9041048B2 (en) * | 2008-09-02 | 2015-05-26 | Lg Innotek Co., Ltd. | Semiconductor light emitting device |
| CN102094247A (en) * | 2010-09-29 | 2011-06-15 | 常州天合光能有限公司 | Two-end gas intake device for phosphorous diffusion furnace tube |
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