CN109814254A - A laser scanning galvanometer device and a swinging method of the scanning mirror - Google Patents
A laser scanning galvanometer device and a swinging method of the scanning mirror Download PDFInfo
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- CN109814254A CN109814254A CN201910251277.4A CN201910251277A CN109814254A CN 109814254 A CN109814254 A CN 109814254A CN 201910251277 A CN201910251277 A CN 201910251277A CN 109814254 A CN109814254 A CN 109814254A
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- galvanometer
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Abstract
本发明实施例公开了一种激光扫描振镜装置及扫描镜的摆动方法，所述激光扫描振镜装置包括振镜、安装板和设置在安装板上的振镜架、磁场产生装置、传感器、用于限制振镜的摆动幅度的弹性件、电控模块，振镜架包括支撑架、摆动件和第一永磁体，支撑架设置在安装板的一端，摆动件可转动地设置在支撑架上，第一永磁体设置在摆动件的另一端，磁场产生装置和传感器分别与第一永磁体相邻设置，磁场产生装置的磁性和第一永磁体的磁性相斥并驱动摆动件摆动，传感器感应第一永磁体的摆动并形成电信号传输给电控模块，弹性件和摆动件连接并在摆动件的外力作用下产生形变并生成相应力，实现了对摆动的惯性力的限制，从而实现了平稳运行。
The embodiment of the present invention discloses a laser scanning galvanometer device and a method for swinging the scanning mirror. The laser scanning galvanometer device includes a galvanometer, a mounting plate, a galvanometer frame arranged on the mounting plate, a magnetic field generating device, a sensor, An elastic member and an electronic control module for limiting the swinging amplitude of the galvanometer. The galvanometer frame includes a support frame, a swing member and a first permanent magnet. The support frame is arranged at one end of the mounting plate, and the swing member is rotatably arranged on the support frame. , the first permanent magnet is arranged on the other end of the swing piece, the magnetic field generating device and the sensor are respectively arranged adjacent to the first permanent magnet, the magnetism of the magnetic field generating device and the magnetism of the first permanent magnet repel and drive the swing piece to swing, and the sensor senses The swing of the first permanent magnet forms an electrical signal to transmit to the electronic control module. The elastic member is connected to the swing member and deforms and generates a corresponding force under the action of the external force of the swing member. Smooth operation.
Description
Technical field
The present embodiments relate to laser technology fields, and in particular to the pendulum of a kind of laser scanning galvanometer device and scanning mirror
Dynamic method.
Background technique
Laser scanning galvanometer device is used in a kind of scanning galvanometer of laser industry, is mainly used for laser radar, laser is beaten
Mark, body laser inner carving, light of stage control, laser boring etc., at present laser scanner technique mostly use greatly reciprocally swinging galvanometer and
The multifaceted prism of rotary motion, wherein galvanometer galvanometer system is most widely used high-velocity scanning galvanometer, galvanometer vibration
The mentality of designing of mirror system follows the design method of ammeter completely, plane mirror instead of indicator, and the signal popped one's head in by
The direct current signal of -5V-the 5V or -10V-+10V of computer control replaces, anti-by the servo motor driving plane moved back and forth
Mirror is penetrated to complete scheduled movement, and passes through the movement position of sensor circuit Real-time Feedback plane mirror.
The servo motor of existing laser galvanometer system leads to the presence of driving plane mirror swing since volume weight is big
In the process, inertia force is big, so as to cause jiggly problem is run.
Summary of the invention
For this purpose, the embodiment of the present invention provides the swinging method of a kind of laser scanning galvanometer device and scanning mirror, it is existing to solve
Have the shortcomings that the servo motor of laser galvanometer device due to volume weight is big, calorific value is high, vulnerable to interference and it is temperature sensitive and
Caused inertia force is big, runs jiggly problem.
To achieve the goals above, the embodiment of the present invention provides the following technical solutions:
A kind of laser scanning galvanometer device, the laser scanning galvanometer dress are provided according to a first aspect of the embodiments of the present invention
Set including galvanometer, mounting plate and setting galvanometer frame on a mounting board, magnetic field generation device, sensor, for limiting galvanometer
The elastic component of amplitude of fluctuation, electronic control module, galvanometer frame include support frame, swing component and the first permanent magnet, and support frame setting is being pacified
One end of loading board, swing component are rotatably arranged on support frame, and galvanometer is arranged on one end of swing component, and the first permanent magnet is set
The other end in swing component is set, magnetic field generation device and sensor are disposed adjacent with the first permanent magnet respectively, magnetic field generation device
It is connect respectively with electronic control module with sensor, the magnetism of magnetic field generation device and the magnetism of the first permanent magnet repel each other and drives swing
Part is swung, and the swing of the first permanent magnet of sensor sensing simultaneously forms electric signal transmission to electronic control module, elastic component and swing component company
It connects and generates deformation under the external force of swing component and generate corresponding force.
Further, support frame as described above includes two plates being arranged above and below and two branch being arranged between two plates
Strut, two support rods are separately positioned on the both ends of two plates, and the swing component is rotatably provided on two plates.
Further, the both ends of the plate to middle part width is gradually increased to form a lug boss, and lug boss is equipped with
The bearing interference fit in bearing block simultaneously and in bearing block is protruded into bearing block, the end of the swing component.
Further, the swing component include the first mounting portion, the second mounting portion and third mounting portion, the first mounting portion with
Galvanometer connection, the second mounting portion are rotatably arranged on galvanometer frame, third mounting portion and the connection of the first permanent magnet.
Further, the lower part of the first permanent magnet is arranged in the sensor, and the sensor is magnetoresistive sensor.
Further, the elastic component is two springs, and two springs are separately positioned on the two sides of swing component, two springs
One end connected respectively with swing component, the other end of two springs is separately fixed on mounting plate.
Further, the elastic component is two PET polyester films or two elastic sheet metals, support frame as described above further include
Two linking arms and two interconnecting pieces, one end of two linking arms are separately positioned on two support rods, two interconnecting piece difference
It is arranged on the other end of two linking arms, one end of two PET polyester films or two elastic sheet metals is respectively and swing component
Connection, the other end of two PET polyester films are separately fixed on two interconnecting pieces.
Further, the magnetic field generation device is electromagnetic spool device.
Further, the magnetic field generation device is rotary magnetic field generator, and the magnetic field generation device includes motor
With the second permanent magnet in the rotary shaft that motor is arranged in, motor is connected with electronic control module, the magnetism and first of the second permanent magnet
The magnetism of permanent magnet is repelled each other, and the second permanent magnet is generated by the rotary shaft of motor rotates and drive the first permanent magnet and swing component to put
It is dynamic.
A kind of swinging method of scanning mirror, the swing side of the scanning mirror are provided according to a second aspect of the embodiments of the present invention
Method uses laser scanning galvanometer device described above, comprising:
Magnetic field generation device generates the magnetic field of mechanical periodicity according to the preset periodic electrical signal of electronic control module；
The cooperation that the magnetism in magnetic field and the magnetism of the first permanent magnet are repelled each other drives galvanometer to transport in the electromagnetic field of mechanical periodicity
It is dynamic；
Meanwhile elastic component limits the maximum displacement of galvanometer and also provides the reset force opposite with the direction of motion, in electromagnetism
Field is combined under driving with reset force, galvanometer reciprocally swinging；
Meanwhile first permanent magnet just swing back and forth on a sensor, sensor output electrical signals period and magnetic field generate dress
It is identical to set the preset electric signal period.
The embodiment of the present invention has the advantages that
The swinging method of a kind of laser scanning galvanometer device and scanning mirror provided in an embodiment of the present invention, since magnetic field generates
Device drives swing component to move back and forth using non-contacting mode, so that galvanometer be driven to move back and forth, sensor is using non-contact
Mode measure the real time position of the first permanent magnet, so that the real time scan angle of galvanometer is obtained, simultaneously because elastic component and pendulum
Moving part connection simultaneously generates deformation under the external force of swing component and generates corresponding force, realizes the limit to the inertia force of swing
System, to realize stable effect.
Detailed description of the invention
It, below will be to embodiment party in order to illustrate more clearly of embodiments of the present invention or technical solution in the prior art
Formula or attached drawing needed to be used in the description of the prior art are briefly described.It should be evident that the accompanying drawings in the following description is only
It is merely exemplary, it for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer, which is extended, obtains other implementation attached drawings.
Structure depicted in this specification, ratio, size etc., only to cooperate the revealed content of specification, for
Those skilled in the art understands and reads, and is not intended to limit the invention enforceable qualifications, therefore does not have technical
Essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the function of the invention that can be generated
Under effect and the purpose that can reach, should all still it fall in the range of disclosed technology contents obtain and can cover.
Fig. 1 is a kind of overlooking structure diagram for laser scanning galvanometer device that the embodiment of the present invention 1 provides；
Fig. 2 is a kind of schematic cross-sectional view for laser scanning galvanometer device that the embodiment of the present invention 1 provides；
Fig. 3 is a kind of side schematic cross-sectional view for laser scanning galvanometer device that the embodiment of the present invention 2 provides；
Fig. 4 is a kind of overlooking structure diagram for laser scanning galvanometer device that the embodiment of the present invention 3 provides.
In figure: 1- galvanometer；2- mounting plate；3- galvanometer frame；31- support frame；311- plate；3111- lug boss；312- support
Bar；32- swing component；The first mounting portion of 321-；The second mounting portion of 322-；323- third mounting portion；The first permanent magnet of 33-；4- magnetic
Field generation device；41- motor；The second permanent magnet of 42-；5- sensor；51- code-disc；52- reading head；6- elastic component；The automatically controlled mould of 7-
Block.
Specific embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book is understood other advantages and efficacy of the present invention easily, it is clear that described embodiment is the present invention one
Section Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
The term of cited such as "upper", "lower", "left", "right", " centre ", is merely convenient to describe in this specification
Be illustrated, rather than to limit the scope of the invention, relativeness is altered or modified, and is changing technology without essence
It inside holds, when being also considered as the enforceable scope of the present invention.
Embodiment 1
It as depicted in figs. 1 and 2, is a kind of laser scanning galvanometer device provided in this embodiment, the laser scanning galvanometer
Device include galvanometer 1, mounting plate 2 and the galvanometer frame 3 being arranged on mounting plate 2, magnetic field generation device 4, sensor 5, for limiting
The elastic component 6 of the amplitude of fluctuation of damping mirror 1, electronic control module 7, galvanometer frame 3 include support frame 31, swing component 32 and the first permanent magnet
33, one end of mounting plate 2 is arranged in support frame 31, and swing component 32 is rotatably arranged on support frame 31, and the setting of galvanometer 1 is being put
On one end of moving part 32, the other end of swing component 32 is arranged in the first permanent magnet 33, and the first permanent magnet 33 can be permanent magnet, gold
Category or other components that can be moved in periodic magnetic field.In the present embodiment, magnetic field generation device 4 is electromagnetic coil, certainly
It can be magnetic generation circuit, mutual inductor circuit, inductive circuit or any combination thereof.Magnetic field generation device 4 and sensor 5 divide
It is not disposed adjacent with the first permanent magnet 33, magnetic field generation device 4 and sensor 5 are connect with electronic control module 7 respectively, electronic control module 7
The lower part of mounting plate 2 is set, and in the present embodiment, mounting plate 2 is circuit board.The magnetism of magnetic field generation device 4 and first is forever
The magnetism of magnet 33 repels each other and swing component 32 is driven to swing, and sensor 5 incudes the swing of the first permanent magnet 33 and forms electric signal
It is transferred to electronic control module 7, elastic component 6 and the connection of swing component 32 and generates deformation under the external force of swing component 32 and generate phase
Stress, elastic component 6 are two springs, and two springs are separately positioned on the two sides of swing component 32, one end of two springs respectively and
Swing component 32 connects, and the other end of two springs is separately fixed on mounting plate 2, and mounting plate 2 is equipped with and fixes consolidating for two springs
Reservation.Working principle are as follows: magnetic field generation device 4 generates the magnetic of mechanical periodicity according to the preset periodic electrical signal of electronic control module 7
?；The cooperation that the magnetism in magnetic field and the magnetism of the first permanent magnet 33 are repelled each other drives galvanometer 1 to move in the electromagnetic field of mechanical periodicity；
Meanwhile elastic component 6 limits the maximum displacement of galvanometer 1 and also provides the reset force opposite with the direction of motion, in electromagnetic field and multiple
Under the joint driving of position power, 1 reciprocally swinging of galvanometer；Meanwhile first permanent magnet 33 swing back and forth above sensor 5, sensor 5
It is identical as the preset electric signal period of magnetic field generation device 4 to export the electric signal period.
Preferably, support frame 31 includes two plates 311 being arranged above and below and be arranged between two plates 311 two
Support rod 312, two support rods 312 are separately positioned on the both ends of two plates 311, and the swing component 32 is rotatably provided in two
On a plate 311.Certainly, plate 311 may be one, and the lower end of two support rods 312 is arranged on mounting plate 2.
Preferably, the both ends of plate 311 to middle part width is gradually increased to form a lug boss 3111, on lug boss 3111
Equipped with bearing block, the bearing interference fit in bearing block simultaneously and in bearing block is protruded into the end of the swing component 32.
Preferably, swing component 32 includes the first mounting portion 321, the second mounting portion 322 and third mounting portion 323, the first peace
Dress portion 321 is connect with galvanometer 1, and the second mounting portion 322 is rotatably arranged on galvanometer frame 3, and third mounting portion 323 and first is forever
Magnet 33 connects.
Preferably, the lower part of the first permanent magnet 33 is arranged in sensor 5, and sensor 5 is magnetoresistive sensor.Certainly, it senses
Device 5 or photoelectric sensor, capacitance sensor, displacement sensor or any combination thereof.
Embodiment 2
The present embodiment 2 is substantially the same manner as Example 1, the difference is that, magnetic field generation device 4 is the generation of rotary magnetic field
Device, as shown in figure 3, the magnetic field generation device 4 that the present embodiment 2 provides includes motor 41 and is arranged in the rotary shaft of motor 41
Second permanent magnet 42, motor 41 and electronic control module 7 connect, the magnetism and the magnetic phase of the first permanent magnet 33 of the second permanent magnet 42
Reprimand, the second permanent magnet is generated by the rotary shaft of motor rotates and drives the first permanent magnet and swing component 32 to swing.Sensor 5 is
Encoder, sensor 5 include code-disc 51 and reading head 52, and code-disc 51 is installed in the shaft of swing component 32 and androgynous rotation, reads
It is arranged on one end of mounting plate 2 for several 52, reading head 52 and electronic control module 7 connect and read the rotation data of code-disc 51.
Embodiment 3
The present embodiment 3 is substantially the same manner as Example 1, the difference is that, as shown in figure 4, elastic component 6 is two PET poly-
Ester film or two elastic sheet metals, support frame as described above 31 further include two linking arms 313 and two interconnecting pieces 314, two companies
The one end for connecing arm 313 is separately positioned on two support rods 312, and two interconnecting pieces 314 are separately positioned on two linking arms 313
On the other end, one end of two PET polyester films or two elastic sheet metals is connected with swing component 32 respectively, two PET polyester
The other end of film is separately fixed on two interconnecting pieces 314.PET polyester film is a kind of colorless and transparent, glossiness film,
Elastic sheet metal good mechanical performance, PET polyester film and elastic sheet metal rigidity, hardness and toughness are high.
Although above having used general explanation and specific embodiment, the present invention is described in detail, at this
On the basis of invention, it can be made some modifications or improvements, this will be apparent to those skilled in the art.Therefore,
These modifications or improvements without departing from theon the basis of the spirit of the present invention are fallen within the scope of the claimed invention.
Claims (10)
1. a kind of laser scanning galvanometer device, which is characterized in that the laser scanning galvanometer device includes galvanometer (1), mounting plate
(2) and be arranged galvanometer frame (3) on mounting plate (2), magnetic field generation device (4), sensor (5), for limiting galvanometer (1)
The elastic component (6) of amplitude of fluctuation, electronic control module (7), galvanometer frame (3) include support frame (31), swing component (32) and the first permanent magnetism
Body (33), support frame (31) are arranged in one end of mounting plate (2), and swing component (32) is rotatably arranged on support frame (31),
Galvanometer (1) is arranged on one end of swing component (32), and the other end in swing component (32) is arranged in the first permanent magnet (33), and is produced from magnetic field
Generating apparatus (4) and sensor (5) are disposed adjacent with the first permanent magnet (33) respectively, magnetic field generation device (4) and sensor (5) point
It is not connect with electronic control module (7), the magnetism of magnetic field generation device (4) and the magnetism of the first permanent magnet (33) repel each other and drives swing
Part (32) is swung, and sensor (5), which incudes the swing of the first permanent magnet (33) and forms electric signal transmission, gives electronic control module (7), bullet
Property part (6) and swing component (32) connection and generated under the external force of swing component (32) and deformation and generate corresponding force.
2. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that support frame as described above (31) includes two
A plate (311) being arranged above and below and two support rods (312) being arranged between two plates (311), two support rods
(312) both ends of two plates (311) are separately positioned on, the swing component (32) is rotatably provided on two plates (311).
3. a kind of laser scanning galvanometer device according to claim 2, which is characterized in that the both ends of the plate (311)
It is gradually increased to form a lug boss (3111) to middle part width, lug boss (3111) is equipped with bearing block, the swing component
(32) the bearing interference fit in bearing block simultaneously and in bearing block is protruded into end.
4. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that the swing component (32) includes the
One mounting portion (321), the second mounting portion (322) and third mounting portion (323), the first mounting portion (321) are connect with galvanometer (1),
Second mounting portion (322) is rotatably arranged on galvanometer frame (3), third mounting portion (323) and the first permanent magnet (33) connection.
5. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that sensor (5) setting exists
The lower part of first permanent magnet (33), the sensor (5) are magnetoresistive sensor.
6. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that the elastic component (6) is two
Spring, two springs are separately positioned on the two sides of swing component (32), and one end of two springs is connected with swing component (32) respectively, and two
The other end of a spring is separately fixed on mounting plate (2).
7. a kind of laser scanning galvanometer device according to claim 2, which is characterized in that the elastic component (6) is two
PET polyester film or two elastic sheet metals, support frame as described above (31) further include two linking arms (313) and two interconnecting pieces
(314), one end of two linking arms (313) is separately positioned on two support rods (312), and two interconnecting pieces (314) set respectively
Set on the other end of two linking arms (313), one end of two PET polyester films or two elastic sheet metals respectively and swing
Part (32) connection, the other end of two PET polyester films are separately fixed on two interconnecting pieces (314).
8. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that the magnetic field generation device (4)
For electromagnetic spool device.
9. a kind of laser scanning galvanometer device according to claim 1, which is characterized in that the magnetic field generation device (4)
For rotary magnetic field generator, the magnetic field generation device (4) includes motor (41) and is arranged in the rotary shaft of motor (41)
The second permanent magnet (42), motor (41) and electronic control module (7) connection, the second permanent magnet (42) magnetism with the first permanent magnet
(33) magnetism is repelled each other, and the second permanent magnet is generated by the rotary shaft of motor to be rotated and drive the first permanent magnet and swing component (32)
It swings.
10. a kind of swinging method of scanning mirror, which is characterized in that the swinging method of the scanning mirror is appointed using claim 1-9
Laser scanning galvanometer device described in one, comprising:
Magnetic field generation device (4) generates the magnetic field of mechanical periodicity according to the preset periodic electrical signal of electronic control module (7)；
The cooperation that the magnetism in magnetic field and the magnetism of the first permanent magnet (33) are repelled each other drives galvanometer (1) in the electromagnetic field of mechanical periodicity
Movement；
Meanwhile elastic component (6) limits the maximum displacement of galvanometer (1) and also provides the reset force opposite with the direction of motion, in electricity
Magnetic field is combined under driving with reset force, galvanometer (1) reciprocally swinging；
Meanwhile first permanent magnet (33) swing back and forth above the sensor (5), sensor (5) exports electric signal period and magnetic field
Generation device (4) the preset electric signal period is identical.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910251277.4A CN109814254A (en) | 2019-03-29 | 2019-03-29 | A laser scanning galvanometer device and a swinging method of the scanning mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910251277.4A CN109814254A (en) | 2019-03-29 | 2019-03-29 | A laser scanning galvanometer device and a swinging method of the scanning mirror |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110471045A (en) * | 2019-09-11 | 2019-11-19 | 深圳市镭神智能系统有限公司 | A kind of twin shaft galvanometer |
| CN110726984A (en) * | 2019-11-05 | 2020-01-24 | 深圳市镭神智能系统有限公司 | Galvanometer and laser radar |
| CN110788479A (en) * | 2019-11-26 | 2020-02-14 | 苏州钋镭自动化科技有限公司 | Use mirror system that shakes on handheld welding |
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Application publication date: 20190528 |