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CN109640593B - A micro-rib array heat dissipation device and method equipped with a synthetic jet exciter - Google Patents

A micro-rib array heat dissipation device and method equipped with a synthetic jet exciter Download PDF

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CN109640593B
CN109640593B CN201811638293.0A CN201811638293A CN109640593B CN 109640593 B CN109640593 B CN 109640593B CN 201811638293 A CN201811638293 A CN 201811638293A CN 109640593 B CN109640593 B CN 109640593B
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synthetic jet
heat sink
rib array
heat
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CN109640593A (en
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吴昌聚
邱云龙
李昊歌
陈伟芳
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Zhejiang University ZJU
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Abstract

本发明公开了一种配备合成射流激励器的微肋阵散热装置及方法,该装置通过在微肋阵热沉顶部安装合成射流激励器并在微肋阵热沉顶部盖板上布置微孔,使得合成射流激励器在工作时,能够通过微孔周期性地吸入、喷出流体,形成合成射流。合成射流激励器产生的合成射流能够改善微肋阵内的流动环境,最终实现强化微肋阵热沉散热性能的效果。这种热沉结构的优点在于结构紧凑,强化散热效果好,对微肋阵热沉前后的压力降影响较小,并且可通过调节合成射流激励器的输入参数,实时调控热沉散热强度,为现代化高性能电子器件的散热问题以及温度控制提供一条新的路径。

Figure 201811638293

The invention discloses a micro-rib array heat dissipation device and method equipped with a synthetic jet exciter. The device adopts a synthetic jet exciter on the top of a micro-rib array heat sink and arranges micro-holes on the top cover of the micro-rib array heat sink. When the synthetic jet exciter is working, the fluid can be periodically inhaled and ejected through the micro-holes to form a synthetic jet. The synthetic jet generated by the synthetic jet exciter can improve the flow environment in the micro-fin array, and finally achieve the effect of enhancing the heat dissipation performance of the micro-fin array heat sink. The advantages of this heat sink structure are that it is compact in structure, has good heat dissipation effect, and has little effect on the pressure drop before and after the micro-rib array heat sink. Thermal issues and temperature control in modern high-performance electronics offer a new avenue.

Figure 201811638293

Description

一种配备合成射流激励器的微肋阵散热装置及方法A micro-rib array heat dissipation device and method equipped with a synthetic jet exciter

技术领域technical field

本发明属于高热流密度的散热领域,具体涉及一种配备合成射流激励器的微肋阵散热装置及方法。The invention belongs to the field of heat dissipation with high heat flux density, and in particular relates to a micro-rib array heat dissipation device and method equipped with a synthetic jet exciter.

背景技术Background technique

在电子产品小型化、高性能化的发展趋势下,电子产品的热流密度呈现出迅速增长的趋势,这对电子产品的热设计提出了极高的要求,一些传统的被动式散热技术,已经无法满足极高热流密度情形下的散热需要,而新一代配备现代高效驱动、扰动技术的主动式强化散热技术,由于其具有极好的散热性能,并且具备可控性强等显著优点,已成为电子散热技术领域的研究重点。但目前现有的散热装置一般结构比较复杂,散热效果也不尽如人意。Under the development trend of miniaturization and high performance of electronic products, the heat flux density of electronic products shows a trend of rapid growth, which puts forward extremely high requirements for the thermal design of electronic products. Some traditional passive cooling technologies can no longer meet the requirements. The need for heat dissipation in the case of extremely high heat flux density, and the new generation of active enhanced heat dissipation technology equipped with modern high-efficiency drive and disturbance technology, due to its excellent heat dissipation performance and strong controllability and other significant advantages, has become an electronic heat dissipation technology. Research focus in the field of technology. However, the current existing heat dissipation devices generally have complex structures, and the heat dissipation effect is not satisfactory.

发明内容SUMMARY OF THE INVENTION

为了解决现代高性能电子产品的高热流密度问题,弥补传统被动式散热技术的不足,本发明提供了一种配备合成射流激励器的微肋阵散热装置及方法。In order to solve the problem of high heat flux density of modern high-performance electronic products and make up for the deficiency of traditional passive heat dissipation technology, the present invention provides a micro-rib array heat dissipation device and method equipped with a synthetic jet exciter.

一种配备合成射流激励器的微肋阵散热装置,包括热沉基板、微肋阵结构、顶部盖板、合成射流激励器;所述的热沉基板与电子器件的发热部分直接或者间接相连;所述的微肋阵结构位于热沉基板上方;所述的顶部盖板位于微肋阵结构上方,顶部盖板与热沉基板之间通有流体;所述的合成射流激励器为底部敞口结构,位于顶部盖板上方与顶部盖板装配形成合成射流腔体,所述的顶部盖板上开设有微孔阵列。A micro-rib array heat dissipation device equipped with a synthetic jet exciter, comprising a heat sink substrate, a micro-rib array structure, a top cover, and a synthetic jet exciter; the heat sink substrate is directly or indirectly connected with a heating part of an electronic device; The micro-rib array structure is located above the heat sink substrate; the top cover plate is located above the micro-rib array structure, and fluid is communicated between the top cover plate and the heat sink substrate; the synthetic jet exciter is open at the bottom The structure is located above the top cover plate and assembled with the top cover plate to form a synthetic jet cavity, and the top cover plate is provided with a micropore array.

上述技术方案中,所述的微肋阵结构的排列方式可以采用顺排、叉排、组合排列或无序排列,微肋阵结构中各肋片的横截面形状可以为矩形、圆形、三角形、或菱形等,横截面尺寸随肋片高度发生变化。In the above technical scheme, the arrangement of the micro-rib array structure can be in order, fork, combined or disordered, and the cross-sectional shape of each rib in the micro-rib array structure can be rectangular, circular, triangular. , or rhombus, etc., the cross-sectional size changes with the height of the rib.

所述的微孔阵列的排列方式通常与微肋阵结构一致,各微孔的横截面形状为矩形、圆形、三角形、或菱形等,微孔的大小随孔深发生变化,形成锥形孔。The arrangement of the micro-hole array is usually consistent with the micro-rib array structure, the cross-sectional shape of each micro-hole is rectangle, circle, triangle, or diamond, etc., and the size of the micro-hole changes with the depth of the hole, forming a conical hole. .

所述的合成射流腔体可以为长方体、圆柱体、或其他任意形状。The synthetic jet cavity can be a cuboid, a cylinder, or any other shape.

所述的合成射流激励器的驱动方式可以是火花、压电、等离子体驱动等。The driving manner of the synthetic jet exciter may be spark, piezoelectric, plasma driving, and the like.

应用上述的装置进行散热的方法,如下:将热沉基板与电子器件的发热部分直接或间接相连,在顶部盖板与热沉基板之间通入流体,热沉基板通过热传导接收来自电子器件发热部分的热量,并传递至微肋阵结构;微肋阵结构通过对流换热效应将热量传递给上游来流,启动合成射流激励器进入主动模式;在主动模式下,无需改变来流条件,通过调节合成射流激励器的输入参数,可实时对微肋阵热沉的散热性能进行调控,具体为调节合成射流激励器的输入参数使得合成射流腔体内的压力呈现周期性升降,这种压力变化使得合成射流激励器周期性地通过顶部盖板上的微孔阵列吸入、喷出流体,形成合成射流;合成射流与来自上游的流体之间产生相互作用,改善流动结构并提高微肋阵结构表面与热沉基板上表面的对流换热效果,从而实现散热性能的强化。The method of applying the above-mentioned device for heat dissipation is as follows: the heat sink substrate is directly or indirectly connected to the heating part of the electronic device, a fluid is passed between the top cover plate and the heat sink substrate, and the heat sink substrate receives heat from the electronic device through thermal conduction. Part of the heat is transferred to the micro-rib array structure; the micro-rib array structure transfers the heat to the upstream flow through the convective heat transfer effect, and the synthetic jet exciter is activated to enter the active mode; in the active mode, there is no need to change the incoming flow conditions. Adjusting the input parameters of the synthetic jet exciter can control the heat dissipation performance of the micro-rib array heat sink in real time. Specifically, adjusting the input parameters of the synthetic jet exciter makes the pressure in the synthetic jet cavity rise and fall periodically. This pressure change makes The synthetic jet exciter periodically sucks and ejects fluid through the micro-hole array on the top cover to form a synthetic jet; the interaction between the synthetic jet and the fluid from the upstream improves the flow structure and enhances the surface of the micro-rib array structure. The convection heat transfer effect on the upper surface of the heat sink substrate, thereby enhancing the heat dissipation performance.

本发明的有益效果在于:第一,采用合成射流激励器作为扰动装置,结构紧凑,扰流效果好;第二,无需改变来流条件,仅需通过调节合成射流激励器的工作参数即可实时对热沉结构的散热性能进行调节,凸显了配备合成射流激励器的热沉结构可控性强的特点;第三,采用微肋阵结构作为基础热沉结构,散热效果好,易于加工。The beneficial effects of the present invention are as follows: first, the synthetic jet exciter is used as the disturbance device, which has a compact structure and a good effect of disturbing the flow; second, it does not need to change the incoming flow conditions, and only needs to adjust the working parameters of the synthetic jet exciter. Adjusting the heat dissipation performance of the heat sink structure highlights the strong controllability of the heat sink structure equipped with the synthetic jet exciter; thirdly, the micro-rib array structure is used as the basic heat sink structure, which has good heat dissipation effect and is easy to process.

附图说明Description of drawings

图1是配备合成射流激励器的微肋阵散热装置的结构示意图;Fig. 1 is the structural schematic diagram of the micro-rib array heat sink equipped with synthetic jet exciter;

图2是合成射流激励器结构三视图;Fig. 2 is three views of the structure of the synthetic jet exciter;

图3是微肋阵热沉结构示意图;Figure 3 is a schematic diagram of the structure of the micro-rib array heat sink;

图4是微肋阵热沉顶部盖板结构示意图;Figure 4 is a schematic diagram of the structure of the top cover plate of the micro-rib array heat sink;

图5是合成射流激励器腔体结构说明图;FIG. 5 is an explanatory diagram of the cavity structure of the synthetic jet exciter;

附图标记说明:1.热沉基板;2.微肋阵结构;3.顶部盖板;4.合成射流激励器;5.微孔阵列;6.合成射流腔体。Description of reference numerals: 1. Heat sink substrate; 2. Micro-rib array structure; 3. Top cover plate; 4. Synthetic jet actuator; 5. Microwell array; 6. Synthetic jet cavity.

具体实施方式Detailed ways

下面结合附图和实施例对本发明作进一步的说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.

如图1所示,一种配备合成射流激励器的微肋阵散热装置,它包括热沉基板1、微肋阵结构2、顶部盖板3、合成射流激励器4;热沉基板1直接或间接与热源相连;微肋阵结构2位于热沉基板1上方;顶部盖板3位于微肋阵结构2上方;合成射流激励器4底部为敞口结构,位于顶部盖板3上方与顶部盖板3装配形成合成射流腔体6。As shown in Figure 1, a micro-rib array heat dissipation device equipped with a synthetic jet exciter includes a heat sink substrate 1, a micro-rib array structure 2, a top cover 3, and a synthetic jet exciter 4; the heat sink substrate 1 directly or Indirectly connected to the heat source; the micro-rib array structure 2 is located above the heat sink substrate 1; the top cover plate 3 is located above the micro-rib array structure 2; the bottom of the synthetic jet exciter 4 is an open structure, located above the top cover plate 3 and the top cover plate 3 Assemble to form a synthetic jet cavity 6 .

如图3所示,所述的热沉基板1与电子器件的发热部分直接或通过热管等装置间接相连,从而通过热传导接收来自电子器件发热部分的热量,并传递至微肋阵结构2。As shown in FIG. 3 , the heat sink substrate 1 is directly or indirectly connected to the heating part of the electronic device or indirectly through a heat pipe and other devices, so as to receive the heat from the heating part of the electronic device through thermal conduction and transfer it to the micro-rib array structure 2 .

如图3所示,所述的微肋阵结构2可设计为顺排、叉排、组合排列、无序排列等多种排列方式,微肋阵结构中各肋片的横截面形状可设计为矩形、圆形、三角形、菱形等多种形状,肋片的横截面尺寸可随肋片高度发生变化;在顶部盖板与热沉基板之间通有流体,微肋阵接收来自于热沉基板1的热量,并通过对流换热效应将热量传递给来自于上游的低温流体。As shown in FIG. 3 , the micro-rib array structure 2 can be designed in a variety of arrangement ways, such as sequential arrangement, fork arrangement, combination arrangement, and disorder arrangement. The cross-sectional shape of each fin in the micro-rib array structure can be designed as Rectangular, circular, triangular, diamond and other shapes, the cross-sectional size of the fins can change with the height of the fins; a fluid flows between the top cover plate and the heat sink substrate, and the micro-rib array receives from the heat sink substrate 1, and transfer the heat to the low temperature fluid from the upstream through the convective heat transfer effect.

如图4所示,所述的顶部盖板3,其表面布置有微孔阵列5,微孔阵列可设计为顺排、叉排、组合排列、无序排列等多种排列方式,微孔的横截面形状可设计为矩形、圆形、三角形、菱形等多种形状,微孔的大小可随孔深发生变化,形成锥形孔。As shown in FIG. 4 , the top cover plate 3 has a microwell array 5 arranged on its surface. The cross-sectional shape can be designed into various shapes such as rectangle, circle, triangle, rhombus, etc. The size of the micropore can change with the depth of the hole to form a tapered hole.

如图2、5所示,所述的合成射流激励器4,其敞口部分与顶部盖板3装配之后形成合成射流腔体6;合成射流激励器4的合成射流腔体6可设计为长方体、圆柱体、异形体等多种形状;合成射流激励器4可使用电火花、压电、等离子体等多种方式进行驱动,只要能调节合成射流腔体内压力即可。As shown in Figures 2 and 5, the synthetic jet exciter 4, its open part is assembled with the top cover plate 3 to form a synthetic jet cavity 6; the synthetic jet cavity 6 of the synthetic jet exciter 4 can be designed as a rectangular parallelepiped , cylinder, special-shaped body and other shapes; the synthetic jet exciter 4 can be driven by various methods such as electric spark, piezoelectric, plasma, etc., as long as the pressure in the synthetic jet cavity can be adjusted.

上述配备合成射流激励器的微肋阵散热装置的工作方法为:热沉基板1与电子器件的发热部分直接或通过热管等装置间接相连,从而通过热传导接收来自电子器件发热部分的热量,并传递至微肋阵结构2;微肋阵结构2接收来自于热沉基板1的热量,并通过对流换热效应将热量传递给来自于上游的低温流体;启动合成射流激励器进入主动模式;在主动模式下,无需改变来流条件,仅通过调节合成射流激励器的输入参数,即可实时对微肋阵热沉的散热性能进行调控,具体为合成射流激励器腔体6内的压力会随着激励器输入参数的变化相应地变化,这种压力变化使得合成射流激励器4能够周期性地通过顶部盖板3上的微孔吸入、喷出流体,形成合成射流;合成射流与来自上游的流体之间产生相互作用,改善了微肋阵热沉内部的流动结构,提高了微肋阵表面与热沉基板上表面的对流换热效果,从而实现散热性能的强化。The working method of the above-mentioned micro-rib array heat sink equipped with a synthetic jet exciter is as follows: the heat sink substrate 1 is directly connected with the heating part of the electronic device or indirectly through a device such as a heat pipe, so as to receive the heat from the heating part of the electronic device through thermal conduction, and transmit the heat. to the micro-rib array structure 2; the micro-rib array structure 2 receives the heat from the heat sink substrate 1, and transfers the heat to the low-temperature fluid from the upstream through the convection heat transfer effect; start the synthetic jet actuator to enter the active mode; in the active mode In the mode, the heat dissipation performance of the micro-rib array heat sink can be adjusted in real time only by adjusting the input parameters of the synthetic jet exciter without changing the incoming flow conditions. Specifically, the pressure in the cavity 6 of the synthetic jet exciter will vary with The change of the input parameters of the exciter changes accordingly, and this pressure change enables the synthetic jet exciter 4 to periodically inhale and eject fluid through the micro-holes on the top cover 3 to form a synthetic jet; the synthetic jet and the fluid from the upstream There is an interaction between them, which improves the flow structure inside the micro-fin array heat sink, and improves the convection heat transfer effect between the surface of the micro-fin array and the upper surface of the heat sink substrate, thereby realizing the enhancement of heat dissipation performance.

采用本发明的装置与传统的微肋阵散热装置相比,在微孔峰值速度为3m/s的条件下,全局平均对流换热系数可提高80%以上,而压降增长量仅为30%。通过仿真分析可知,在合成射流激励器的影响下,一方面,微肋阵散热装置内部前排微肋片与后排微肋片之间流动滞止区域内的整体动量水平有了明显的提高;另一方面,合成射流对微肋片下游表面的流动分离现象具有明显的抑制作用,在这两种作用的综合影响下,流动滞止区与主流区之间的动量交换更为频繁,对流换热更为充分,并且由于合成射流微孔位置布置在流动滞止区域内,合成射流对主流的影响有限,从而使得整体压降损失的增长量较小。此外,与传统的连续式或者间歇式射流强化技术相比,合成射流具有结构紧凑、调控方便、维护简单等诸多优势,这使得合成射流在微结构散热领域具有十分突出的优越性与广阔的应用前景。Compared with the traditional micro-rib array heat dissipation device, the device of the present invention can increase the global average convective heat transfer coefficient by more than 80% under the condition that the peak velocity of the micro-pore is 3m/s, while the increase of the pressure drop is only 30%. . Through the simulation analysis, it can be seen that under the influence of the synthetic jet exciter, on the one hand, the overall momentum level in the flow stagnation area between the front row of micro-fins and the rear row of micro-fins inside the micro-fin array heat sink has been significantly improved. On the other hand, the synthetic jet has an obvious inhibitory effect on the flow separation phenomenon on the downstream surface of the micro-fins. Under the combined influence of these two effects, the momentum exchange between the flow stagnation area and the main flow area is more frequent, and the convection The heat exchange is more sufficient, and the synthetic jet has a limited influence on the main flow due to the arrangement of the micropores of the synthetic jet in the flow stagnation area, so that the increase in the overall pressure drop loss is small. In addition, compared with the traditional continuous or intermittent jet enhancement technology, the synthetic jet has many advantages such as compact structure, convenient control, and simple maintenance, which makes the synthetic jet have outstanding advantages and broad applications in the field of microstructure heat dissipation. prospect.

Claims (1)

1. A heat dissipation method of a micro-rib array equipped with a synthetic jet actuator is characterized in that: the device is realized by utilizing a micro-rib array heat dissipation device provided with a synthetic jet actuator, and the device comprises a heat sink substrate, a micro-rib array structure, a top cover plate and the synthetic jet actuator; the heat sink substrate is directly or indirectly connected with a heating part of the electronic device; the micro rib array structure is positioned above the heat sink substrate; the top cover plate is positioned above the micro-rib array structure, and fluid is communicated between the top cover plate and the heat sink substrate; the synthetic jet actuator is of a bottom opening structure, is positioned above the top cover plate and is assembled with the top cover plate to form a synthetic jet cavity, and the top cover plate is provided with a micropore array; the method comprises the following steps: fluid is introduced between the top cover plate and the heat sink substrate, and the heat sink substrate receives heat from a heating part of the electronic device through heat conduction and transfers the heat to the micro-rib array structure; the micro-rib array structure transfers heat to upstream incoming flow through a convection heat transfer effect, and a synthetic jet actuator is started to enter an active mode; in an active mode, the heat dissipation performance of the micro-rib array heat sink can be regulated and controlled in real time by regulating input parameters of the synthetic jet actuator without changing inflow conditions, specifically, the pressure in the synthetic jet cavity is periodically raised and lowered by regulating the input parameters of the synthetic jet actuator, and the synthetic jet actuator periodically sucks and ejects fluid through the micro-pore array on the top cover plate by the pressure change to form synthetic jet; interaction occurs between the synthetic jet and fluid from upstream.
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