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CN109613307B - Gauging fixture - Google Patents

Gauging fixture Download PDF

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Publication number
CN109613307B
CN109613307B CN201810863955.8A CN201810863955A CN109613307B CN 109613307 B CN109613307 B CN 109613307B CN 201810863955 A CN201810863955 A CN 201810863955A CN 109613307 B CN109613307 B CN 109613307B
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CN
China
Prior art keywords
diameter portion
probe
bearing body
electrode side
inspection
Prior art date
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Active
Application number
CN201810863955.8A
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Chinese (zh)
Other versions
CN109613307A (en
Inventor
木津卓也
李俊华
何幼峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEDECO Precision Testing Equipment (Zhejiang) Co.,Ltd.
Original Assignee
Japan Electric Machinery (zhejiang) Richard Co Ltd
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Publication date
Application filed by Japan Electric Machinery (zhejiang) Richard Co Ltd filed Critical Japan Electric Machinery (zhejiang) Richard Co Ltd
Priority to CN201810863955.8A priority Critical patent/CN109613307B/en
Publication of CN109613307A publication Critical patent/CN109613307A/en
Application granted granted Critical
Publication of CN109613307B publication Critical patent/CN109613307B/en
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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A kind of gauging fixture facilitates the contact precision of the checkpoint of the front end for ensuring probe and check object and extends the service life of probe.Gauging fixture of the invention includes: to check side bearing body, has the bearing surface abutted with check object;Electrode side supporting mass, with the inspection side bearing body interval;And the probe of multiple flexibility, its penetrating electrode side bearing body and inspection side bearing body, cardinal extremity is connect with electrode, front end is prominent to contact with the check object from the bearing surface, the electrode side supporting mass has the electrode side support plate of multiple orientation arrangements along the inspection side bearing body and the electrode side supporting mass, multiple electrode side support plates are respectively provided with for the perforative first through hole of the probe, first through hole near the electrode side support plate for checking side bearing body has large diameter portion and small diameter portion, the small diameter portion is than the large-diameter portion far from the inspection side bearing body, and the diameter of the small diameter portion is smaller than the diameter of the large-diameter portion.

Description

Gauging fixture
Technical field
The present invention relates to a kind of gauging fixtures, more particularly, to carry out galvanoscopic inspection to check objects such as circuit substrates Look into fixture.
Background technique
In the past, there are numerous solder joints to miniaturized electronic product (such as mobile phone, laptop etc.) is used Check objects such as circuit substrate when carrying out the electrical inspections such as short circuit, open circuit, usually using having more threadiness in check device The gauging fixture of probe.
Above-mentioned gauging fixture usually has structure as shown in Figure 3, that is to say, that, comprising: have and is abutted with check object Bearing surface PLX (sometimes referred to as putting surface) inspection side bearing body 10X;Match with the inspection side bearing body 10X interval The electrode side supporting mass 20X set;The connecting elements that the inspection side bearing body 10X is connect with the electrode side supporting mass 20X 30X;It is contacted with the electrode side supporting mass 20X and the same connecting elements that the electrode side supporting mass 20X is arranged in is opposite Side electrode mounting portion (not shown);And through the electrode side supporting mass 20X and inspection side bearing body 10X, Front end can be contacted from the inspection side bearing body 10X protrusion with check object, rear end is prominent from the electrode side supporting mass 20X The multiple flexible probe 40X contacted out and with electrode.
In addition, in above-mentioned gauging fixture, as shown in figure 3, electrode side supporting mass 20X usually has multiple edge inspections collateral Hold body 10X and electrode side supporting mass 20X orientation (up and down direction in figure) arrangement electrode side support plate 21X, 22X, 23X, multiple electrodes collateral board 21X, 22X, 23X are respectively provided with for the perforative through-hole of probe.
When stating gauging fixture in use and checking check object, needs to make check object and check side bearing body 10X (bearing surface PLX) is abutted, so that before the multiple probe 40X for checking side bearing body 10X (bearing surface PLX) exposing The inspection point contact at end and check object.
In above-mentioned gauging fixture, in order to avoid the contact force of the checkpoint of check object and probe 40X when Inspection It is excessive and lead to checkpoint breakage etc., it needs to enable probe 40X in the row for checking side bearing body 10X and electrode side supporting mass 20X Appropriate flexible deformation on column direction, on the other hand, in order to ensure the probe 40X in Inspection front end can accurately with inspection The inspection point contact of object needs in the direction orthogonal with the orientation of side bearing body 10X and electrode side supporting mass 20X is checked The movement of upper appropriate limitation probe 40X, therefore, the through-hole for probe 40X observation of electrode side supporting mass 20X usually has such as figure Shown in specific shape.
But, find in actual use, near check side bearing body 10X electrode side support plate 21X through hole, Probe 40X is easier to generate abrasion, leads to the reduced service life of probe 40X.
Therefore, how to extend probe while the contact precision of the checkpoint of the front end and check object that ensure probe Service life is at urgent problem to be solved.
Summary of the invention
The present invention is to complete in view of the above problems, its purpose is to provide gauging fixture, helps ensuring probe Front end and check object checkpoint contact precision while extend probe service life.
To achieve the above object, the present invention provides a kind of gauging fixture, comprising: checks side bearing body, the inspection side bearing Body has the bearing surface abutted with check object;Electrode side supporting mass, the electrode side supporting mass and the inspection side bearing body every The standard width of a room in an old-style house every;The inspection side bearing body is connect by connecting elements, the connecting elements with the electrode side supporting mass;And it multiple scratches Property probe, the probe penetrating electrode side bearing body and check side bearing body, the cardinal extremity of the probe connect with electrode, the probe Front end is prominent to contact with the check object from the bearing surface, and the electrode side supporting mass has multiple along the inspection side The electrode side support plate of the orientation arrangement of supporting mass and the electrode side supporting mass, multiple electrode side support plate difference With the perforative first through hole of the probe is supplied, the first through hole near the electrode side support plate for checking side bearing body has Large diameter portion and small diameter portion, the small diameter portion than the large-diameter portion far from the inspection side bearing body, and the diameter ratio of the small diameter portion The diameter of the large-diameter portion is small.
Gauging fixture according to the present invention, the first through hole near the electrode side support plate for checking side bearing body have major diameter Portion and small diameter portion, the small diameter portion is more separate than large-diameter portion to check side bearing body, and the diameter of small diameter portion is smaller than the diameter of large-diameter portion, because This, and it is previous similar, on the direction orthogonal with the orientation of side bearing body and electrode side supporting mass is checked, can utilize near Check that the small diameter portion of the first through hole of the electrode side support plate of side bearing body suitably limits the movement of probe, before ensuring probe The contact precision at end and the checkpoint of check object, on the other hand, near the of the electrode side support plate for checking side bearing body At the large-diameter portion of one through-hole, due to being relatively large in diameter for first through hole, even if because being located at for probe checks side bearing body and electricity Part between the side bearing body of pole is unsupported and causes the amplitude of deformation of the probe of the part larger, it helps avoids probe Abrasion is generated due to the contact with first through hole, also, in the first through hole near the electrode side support plate for checking side bearing body Small diameter portion at, because of the cardinal extremity than large-diameter portion close to probe, and the cardinal extremity is usually checking side bearing body and electrode side supporting mass Orientation on be supported, the amplitude of deformation of probe is smaller, therefore, can reduce probe and lead with first through hole relative motion The abrasion of cause, to extend the service life of probe.
In gauging fixture of the invention, the preferably described inspection side bearing body is multiple with arranging along the orientation Check that collateral board, multiple collateral boards of inspection are respectively provided with for perforative second through-hole of the probe, near the electricity Second through-hole of the collateral board of inspection of pole side bearing body has large diameter portion and small diameter portion, and the large-diameter portion is more separate than the small diameter portion The electrode side supporting mass, and the diameter of the large-diameter portion is bigger than the diameter of the small diameter portion.
Gauging fixture according to the present invention, the second through-hole near the collateral board of inspection of electrode side supporting mass have major diameter Portion and small diameter portion, the large-diameter portion is than small diameter portion far from electrode side supporting mass, and the diameter of large-diameter portion is bigger than the diameter of small diameter portion, because This can be using near electrode side bearing on the direction orthogonal with the orientation of side bearing body and electrode side supporting mass is checked The small diameter portion of second through-hole of the collateral board of inspection of body suitably limit the movement of probe, with further ensure that probe front end and The contact precision of the checkpoint of check object.
In the gauging fixture of above structure, preferably it is described check that collateral board sets in the orientation there are two, In two collateral boards of inspection, the second through-hole of the collateral board of inspection far from the electrode side supporting mass has major diameter Portion and small diameter portion, the small diameter portion than the large-diameter portion far from the electrode side supporting mass, and described in the diameter ratio of the small diameter portion The diameter of large-diameter portion is small.
Gauging fixture according to the present invention, in the side orthogonal with the orientation of side bearing body and electrode side supporting mass is checked Upwards, the small diameter portion of the second through-hole of the collateral board of inspection far from electrode side supporting mass can be utilized to probe close to its front end The movement of part limited, therefore, further help to ensure that the contact of the front end of probe and the checkpoint of check object Precision.
In gauging fixture of the invention, the periphery of the preferably described probe is equipped with sheath.
Gauging fixture according to the present invention can avoid probe from directly contacting and wear with exterior object, help using sheath In the service life for extending probe.
In the gauging fixture of above structure, the preferably described sheath be only set to the probe be located at the small diameter portion and institute Near the part for stating the peripheral side of large-diameter portion.
Gauging fixture according to the present invention can preferably extend the use longevity of probe using less sheath usage amount Life facilitates the manufacturing cost for reducing gauging fixture.
In the gauging fixture of above structure, the preferably described sheath be only set to the probe first part and second Point, the first part refers to the part positioned at the peripheral side of the small diameter portion and the large-diameter portion, and the second part refers to The small diameter portion that second through-hole of board more collateral than the inspection near the electrode side supporting mass has slightly by the part of lower section, And the path that the second through-hole of the outer diameter of sheath board more collateral than the inspection near the electrode side supporting mass has The diameter in portion is big.
According to the gauging fixture of above structure, it can preferably extend the use longevity of probe using less sheath usage amount Life facilitates the manufacturing cost for reducing gauging fixture, also, by the sheath of the second part set on probe and near electrode side The outer peripheral edge for the small diameter portion that second through-hole of the collateral board of inspection of supporting mass has abuts, can be accurately to probe from checking side The bearing surface of supporting mass amount outstanding is controlled, and whereby, is helped avoid prominent from the bearing surface for checking side bearing body because of probe Amount out is unstable and causes to check unstable.
In gauging fixture of the invention, preferably near the collateral board of the inspection of the electrode side supporting mass second Through-hole is only made of the large-diameter portion and the small diameter portion.
According to the gauging fixture of above structure, facilitate the knot for simplifying the collateral board of inspection near electrode side supporting mass Structure reduces processing cost.
In gauging fixture of the invention, the preferably described probe is obliquely installed relative to the orientation.
Gauging fixture according to the present invention facilitates probe and is checking side bearing in the inspection point contact with check object Flexible deformation in the orientation of body and electrode side supporting mass avoids checkpoint breakage etc..
In gauging fixture of the invention, preferably in the large-diameter portion close to the side setting for checking side bearing body There is chamfering.
Gauging fixture according to the present invention, in the major diameter of the first through hole near the electrode side support plate for checking side bearing body At portion, it is more conducive to avoid checking that the amplitude of deformation of the part between side bearing body and electrode side supporting mass is big because of being located at for probe And it is contacted with first through hole, thus the case where generating abrasion.
(invention effect)
According to the present invention, there is large-diameter portion and path near the first through hole for the electrode side support plate for checking side bearing body Portion, the small diameter portion is than large-diameter portion far from side bearing body is checked, and the diameter of small diameter portion is smaller than the diameter of large-diameter portion, therefore, with It is past similar, it, can be using near inspection side on the direction orthogonal with the orientation of side bearing body and electrode side supporting mass is checked The small diameter portion of the first through hole of the electrode side support plate of supporting mass suitably limits the movement of probe, to ensure front end and the inspection of probe The contact precision of the checkpoint of elephant is checked, on the other hand, in the first through hole near the electrode side support plate for checking side bearing body Large-diameter portion at, due to being relatively large in diameter for first through hole, though because probe be located at check side bearing body and electrode it is collateral It is unsupported and cause the amplitude of deformation of the probe of the part larger to hold the part between body, it helps avoid probe because with The contact of one through-hole and generate abrasion, also, near check side bearing body electrode side support plate first through hole path At portion, because of the cardinal extremity than large-diameter portion close to probe, and the cardinal extremity is usually in the arrangement for checking side bearing body and electrode side supporting mass It is supported on direction, the amplitude of deformation of probe is smaller, therefore, can reduce and grind caused by probe and first through hole relative motion Damage, to extend the service life of probe.
Detailed description of the invention
Fig. 1 is the overall structure figure for schematically illustrating the check device of the gauging fixture with embodiment of the present invention.
Fig. 2 is the figure for schematically illustrating the gauging fixture of embodiment of the present invention, and indicates the inspection folder of the top in Fig. 1 Tool.
Fig. 3 is the perspective view of gauging fixture used by schematically illustrating existing check device.
(symbol description)
1 check device
100 gauging fixtures
10 check side bearing body
11,12 collateral board is checked
111,121 second through-hole
20 electrode side supporting masses
21,22,23 electrode side support plate
211,212,213 first through hole
2111 large-diameter portions
2112 small diameter portions
30 connecting elements
40 probes
50 sheaths
60 electrode mounting portions
200 mobile mechanisms
201 jig-attachment parts
300 clamping devices
400 control units
500 display units
OB check object
PL bearing surface
Specific embodiment
In the following, the check device of the gauging fixture with embodiment of the present invention is illustrated combined with Figure 1 and Figure 2, In, Fig. 1 is the overall structure figure for schematically illustrating the check device of the gauging fixture with embodiment of the present invention, and Fig. 2 is signal It indicates the figure of the gauging fixture of embodiment of the present invention, and indicates the gauging fixture of the top in Fig. 1.
As shown in Figure 1, check device 1 includes: gauging fixture 100;Mobile mechanism 200, the mobile mechanism 200 is for making to examine It is mobile to look into fixture 100, and the mobile mechanism 200 has jig-attachment part 201, which presss from both sides for installation check Have 100 (specifically supporting to following electrode mounting portions 60 of gauging fixture 100);Carrying mechanism (not shown), the carrying Mechanism is for carrying the check objects such as circuit substrate OB;Clamping device 300, the clamping device 300 press from both sides check object OB It holds, so that check object OB is in the state that can be examined;Control unit 400, the control unit 400 is to mobile mechanism 200, carrying Mechanism and clamping device 300 are controlled;And display unit 500, the display unit 500 show the knot checked check object OB Fruit.
In the present embodiment, as shown in Figure 1, check device includes upper and lower two gauging fixtures 100, due to the two inspections Look into that fixture 100 is symmetrical above and below, thus below by taking the gauging fixture 100 of the top in Fig. 1 as an example to the structure of gauging fixture 100 into Row explanation.
As shown in Fig. 2, gauging fixture 100 is mounted in the check device 1 for being checked check object OB, packet Include: electrode mounting portion 60, which is connect in a manner of it can load and unload with following electrode side supporting masses 20, and is arranged In the opposite side the same check object OB of electrode side supporting mass 20, and electrode (not shown) is installed;Check side bearing body 10, The inspection side bearing body has the bearing surface PL abutted with check object OB;Electrode side supporting mass 20, the electrode side supporting mass 20 With inspection 10 interval of side bearing body;Connecting elements 30, the connecting elements 30 will check side bearing body 10 and electrode side bearing Body 20 connects;And the probe 40 of multiple (one is shown schematically only shown in figure) flexibility, 40 penetrating electrode of probe are collateral It holds body 20 and checks that side bearing body 10, the cardinal extremity (lower end in Fig. 2) of the probe 40 are connect with electrode, the front end of the probe 40 (upper end in Fig. 2) is prominent to contact with check object OB from bearing surface PL.
In addition, as shown in Fig. 2, electrode side supporting mass 20 (is three in the example in the figures, but does not limit to multiple In this) along the electrode side for orientation (up and down direction in Fig. 2) arrangement for checking side bearing body 10 and electrode side supporting mass 20 Support plate 21,22,23, the collateral board 21,22,23 of multiple electrodes be respectively provided with for the perforative first through hole of probe 40 211,212, 213, the first through hole 211 near the electrode side support plate 21 for checking side bearing body 10 has large-diameter portion 2111 and small diameter portion 2112, the small diameter portion 2112 is more separate than large-diameter portion 2111 to check side bearing body 10, and the diameter of small diameter portion 2112 compares large-diameter portion 2111 diameter is small.
In addition, as shown in Fig. 2, the first through hole 212,213 of electrode side support plate 22,23 is also respectively provided with large-diameter portion and small Diameter portion, also, the large-diameter portion of the first through hole 212 of electrode side support plate 22 than small diameter portion by check side bearing body 10, similarly, The large-diameter portion of the first through hole 213 of electrode side support plate 23 is than small diameter portion by checking side bearing body 10.
In addition, as shown in Fig. 2, checking that side bearing body 10 is multiple (in the example of diagram with arranging along above-mentioned orientation It is two in son, however, it is not limited to this) check collateral board 11,12, it is multiple to check that collateral board 11,12 is respectively provided with for institute Perforative second through-hole 111,121 of probe is stated, near the second through-hole 121 tool of the collateral board 12 of inspection of electrode side supporting mass 20 Have large-diameter portion 1211 and small diameter portion 1212, the large-diameter portion 1211 than small diameter portion 1212 far from electrode side supporting mass 20, and large-diameter portion 1211 diameter is bigger than the diameter of small diameter portion 1212.
In addition, as shown in Fig. 2, being checked in collateral board 11,12 multiple, the inspection far from electrode side supporting mass 20 is collateral Second through-hole 111 of board 11 has large-diameter portion 1111 and small diameter portion 1112, and the small diameter portion 1112 is than large-diameter portion 1111 far from electricity Pole side bearing body 20, and the diameter of small diameter portion 1112 is smaller than the diameter of large-diameter portion 1111.
In addition, as shown in Fig. 2, connecting elements 30 in extends along above-mentioned orientation it is rod-shaped, and be equipped with it is multiple, but connection It the shape and quantity of structure and suitably sets as needed, is preferably provided to not influence flexible deformation of the probe 40 in inspection.
In addition, as shown in Fig. 2, probe 40 is obliquely installed relative to above-mentioned orientation, also, set in the periphery of probe 40 There is sheath 50.
Herein, the outer diameter of sheath 50 respectively has than multiple through-holes 211,212,213 for checking collateral board 11,12,13 Small diameter portion diameter it is slightly smaller, but than checking that the diameter of small diameter portion that the second through-hole 121 of collateral board 12 has is slightly larger.And And the small diameter portion 2,112 1 that sheath 50 has from the first through hole 211 near the electrode side support plate 21 for checking side bearing body 10 Directly extend to the small diameter portion 1212 that has than the second through-hole 121 of the collateral board 12 of inspection near electrode side supporting mass 20 slightly by The part of lower section.
According to the present embodiment, have near the first through hole 211 for the electrode side support plate 21 for checking side bearing body 10 big Diameter portion 2111 and small diameter portion 2112, the small diameter portion 2112 is more separate than large-diameter portion 2111 to check side bearing body 10, and small diameter portion 2112 Diameter it is smaller than the diameter of large-diameter portion 2111, it is therefore, and previous similar, with check side bearing body 10 and electrode side supporting mass 20 The orthogonal direction of orientation on, the first through hole 211 near the electrode side support plate 21 for checking side bearing body 10 can be utilized The suitably limitation probe 40 of small diameter portion 2112 movement, to ensure the front end of probe 40 and the contact of the checkpoint of check object OB Precision, on the other hand, in the large-diameter portion 2112 of the first through hole 211 near the electrode side support plate 21 for checking side bearing body 10 Place, due to being relatively large in diameter for first through hole 211, even if because being located at for probe 40 checks side bearing body 10 and electrode side bearing Part between body 20 is unsupported and causes the amplitude of deformation of the probe 40 of the part larger, it helps avoid probe 40 because With the contact of first through hole 211 and generate abrasion, also, near check side bearing body 10 electrode side support plate 21 first At the small diameter portion 2112 of through-hole 211, because of the cardinal extremity than large-diameter portion 2111 close to probe 40, and the cardinal extremity is checking side bearing body 10 Be supported in orientation with electrode side supporting mass 20, the amplitude of deformation of probe 40 is smaller, therefore, can reduce probe 40 with It is worn caused by 211 relative motion of first through hole, to extend the service life of probe 40.
In addition, according to the present embodiment, near the second through-hole 121 tool of the collateral board 12 of inspection of electrode side supporting mass 20 Have large-diameter portion 1211 and small diameter portion 1212, the large-diameter portion 1211 than small diameter portion 1212 far from electrode side supporting mass 20, and large-diameter portion 1211 diameter is bigger than the diameter of small diameter portion 1212, therefore, in the arrangement with inspection side bearing body 10 and electrode side supporting mass 20 On the orthogonal direction in direction, the path of the second through-hole 121 of the collateral board 12 of inspection near electrode side supporting mass 20 can be utilized The movement of the suitably limitation probe 40 of portion 1212, to further ensure that the front end of probe 40 and the contact of the checkpoint of check object OB Precision.
In addition, according to the present embodiment, orthogonal with the orientation of side bearing body 10 and electrode side supporting mass 20 is checked Direction on, can be right using the small diameter portion 1112 of the second through-hole 111 of the collateral board 11 of inspection far from electrode side supporting mass 20 The movement of the part close to its front end of probe 40 is limited, and therefore, further helps to ensure that front end and the inspection of probe 40 Check the contact precision of the checkpoint as OB.
In addition, according to the present embodiment, probe 40 can be avoided directly to contact and wear with exterior object using sheath 50, had Help extend the service life of probe 40.
In addition, according to the present embodiment, near electrode side supporting mass 20 the collateral board 12 of inspection the second through-hole 121 only It is made of large-diameter portion 1211 and small diameter portion 1212, therefore, helps to simplify near the collateral board of the inspection of electrode side supporting mass 20 12 structure reduces processing cost.
In addition, according to the present embodiment, probe 40 is obliquely installed relative to above-mentioned orientation, therefore, facilitate probe 40 in the inspection point contact with check object OB in the orientation for checking side bearing body 10 and electrode side supporting mass 20 bullet Property deformation, avoid checkpoint breakage etc..
The present invention is exemplarily described above in conjunction with attached drawing, it is clear that specific implementation of the invention is not by above-mentioned reality Apply the limitation of mode.
For example, in the above-described embodiment, check device includes upper and lower two gauging fixtures, and however, it is not limited to this, inspection Looking into device can also only include a gauging fixture.
In addition, in the above-described embodiment, gauging fixture 100 includes electrode mounting portion 60, and however, it is not limited to this, can also Electrode mounting portion 60 is set to the main body of check device 1.
In addition, in the above-described embodiment, in the first through hole near the electrode side support plate 21 for checking side bearing body 10 In 211, chamfering can also be set in the side (upside in Fig. 2) of the close inspection side bearing body 10 of large-diameter portion 2111, whereby, At the large-diameter portion of the first through hole for the electrode side support plate for checking side bearing body, it is more conducive to avoid being located at inspection because of probe The amplitude of deformation for the part looked between side bearing body and electrode side supporting mass is big and contacts with first through hole, to generate abrasion Situation.
In addition, in the above-described embodiment, probe 40 is relative to the row for checking side bearing body 10 and electrode side supporting mass 20 Column direction is obliquely installed, and however, it is not limited to this, and the set-up mode of probe 40 can appropriate adjustment as needed.
In addition, in the above-described embodiment, sheath 50 is equipped in the periphery of probe 40, and the sheath 50 is from collateral near checking The small diameter portion 2112 that holding the first through hole 211 of the electrode side support plate 21 of body 10 has is extended to than near electrode side bearing The small diameter portion 1212 that second through-hole 121 of the collateral board 12 of inspection of body 20 has is not limited to slightly by the part of lower section This.For example, sheath can also be only set near the part for the peripheral side for being located at small diameter portion 2112 and large-diameter portion 2111 of probe 40, by This, can preferably extend the service life of probe using less sheath usage amount, facilitate the manufacture for reducing gauging fixture Cost.Also, also can be used with flowering structure: sheath is only set to first part and the second part of probe 40, wherein first part Refer to the part positioned at the peripheral side of small diameter portion 2112 and large-diameter portion 2111, second part refers to than near electrode side supporting mass 20 The collateral board 12 of inspection the small diameter portion 1212 that has of the second through-hole 121 slightly by the part of lower section, whereby, use less shield Set usage amount can preferably extend the service life of probe, facilitate the manufacturing cost for reducing gauging fixture, also, by setting In the small diameter portion that the sheath of the second part of probe and the second through-hole of the collateral board of inspection near electrode side supporting mass have Outer peripheral edge abut, can accurately to probe from check side bearing body bearing surface amount outstanding control, whereby, facilitate Avoid because probe from check side bearing body bearing surface amount outstanding it is unstable due to cause to check it is unstable.

Claims (10)

1. a kind of gauging fixture characterized by comprising
Check that side bearing body, the inspection side bearing body have the bearing surface abutted with check object;
Electrode side supporting mass, the electrode side supporting mass and the inspection side bearing body interval;
The inspection side bearing body is connect by connecting elements, the connecting elements with the electrode side supporting mass;And
The probe of multiple flexibility, the probe penetrating electrode side bearing body and inspection side bearing body, the cardinal extremity and electrode of the probe connect It connecing, the front end of the probe is prominent to contact with the check object from the bearing surface,
The electrode side supporting mass has multiple orientation rows along the inspection side bearing body and the electrode side supporting mass The electrode side support plate of column,
Multiple electrode side support plates are respectively provided with for the perforative first through hole of the probe, near the inspection side bearing body The first through hole of the electrode side support plate only there is large diameter portion and small diameter portion, the small diameter portion is than the large-diameter portion far from described Check side bearing body, and the diameter of the small diameter portion is smaller than the diameter of the large-diameter portion, also, the small diameter portion is near described It checks and is open at the surface far from the inspection side bearing body of the electrode side support plate of side bearing body.
2. gauging fixture as described in claim 1, which is characterized in that
It is described to check that side bearing body has the collateral board of multiple inspections arranged along the orientation,
Multiple collateral boards of inspection are respectively provided with for perforative second through-hole of the probe, near the electrode side supporting mass The collateral board of the inspection the second through-hole have large diameter portion and small diameter portion, the large-diameter portion is than the small diameter portion far from the electricity Pole side bearing body, and the diameter of the large-diameter portion is bigger than the diameter of the small diameter portion.
3. gauging fixture as claimed in claim 2, which is characterized in that
There are two the collateral board of inspection is set in the orientation,
In two collateral boards of inspection, the second through-hole of the collateral board of the inspection far from the electrode side supporting mass With large diameter portion and small diameter portion, the small diameter portion is than the large-diameter portion far from the electrode side supporting mass, and the small diameter portion is straight Diameter is smaller than the diameter of the large-diameter portion.
4. gauging fixture as described in claim 1, which is characterized in that
The periphery of the probe is equipped with sheath.
5. gauging fixture as claimed in claim 4, which is characterized in that
The sheath is only set near the part for the peripheral side for being located at the small diameter portion and the large-diameter portion of the probe.
6. gauging fixture as claimed in claim 2, which is characterized in that
The periphery of the probe is equipped with sheath.
7. gauging fixture as claimed in claim 6, which is characterized in that
The sheath is only set to first part and the second part of the probe, and the first part refers to positioned at the small diameter portion With the part of the peripheral side of the large-diameter portion, the second part refers to than near the inspection side of the electrode side supporting mass The part of the small diameter portion that second through-hole of support plate has on the lower, and the outer diameter ratio of the sheath is near the electrode side bearing The diameter for the small diameter portion that second through-hole of the collateral board of the inspection of body has is big.
8. gauging fixture as claimed in claim 2, which is characterized in that
Near the electrode side supporting mass the collateral board of the inspection the second through-hole only by the large-diameter portion and the path Portion is constituted.
9. gauging fixture as described in claim 1, which is characterized in that
The probe is obliquely installed relative to the orientation.
10. gauging fixture as described in claim 1, which is characterized in that
The side for checking side bearing body is provided with chamfering in the large-diameter portion.
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