CN109596243B - Fabrication method of sapphire fiber Fa-Per sensor based on femtosecond laser etching - Google Patents
Fabrication method of sapphire fiber Fa-Per sensor based on femtosecond laser etching Download PDFInfo
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- 239000010980 sapphire Substances 0.000 title claims abstract description 85
- 239000000835 fiber Substances 0.000 title claims abstract description 60
- 238000010329 laser etching Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims description 27
- 239000013307 optical fiber Substances 0.000 claims abstract description 148
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 30
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- 238000005530 etching Methods 0.000 claims description 8
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- 230000005540 biological transmission Effects 0.000 claims description 5
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- 238000009529 body temperature measurement Methods 0.000 description 3
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- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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Abstract
本发明公开了一种基于飞秒激光刻蚀的蓝宝石光纤法珀传感器及其制作方法，该传感器结构包括蓝宝石光纤(1)、石英光纤(5)及连接这两种光纤的异质光纤熔接点(6)，所述蓝宝石光纤(1)尾端具有通过飞秒激光刻蚀加工的法珀微腔(2)，法珀微腔(2)所具有的第一反射面(3)和第二反射面(4)产生的两束反射光发生干涉且产生干涉信号(11)；当所处的环境温度发生变化时，所述法珀微腔(2)的腔长和材料折射率发生变化，两束反射光之间的光程差随之发生变化，从而导致干涉信号(11)的变化；通过解调干涉信号得到法珀光程差，进而得到被测温度。本发明具有理论创新性，尺寸小、环境适应力强的特点，可用于狭窄测量环境下的高温精确传感。
The invention discloses a sapphire optical fiber Faber sensor based on femtosecond laser etching and a manufacturing method thereof. The sensor structure comprises a sapphire optical fiber (1), a quartz optical fiber (5) and a heterogeneous optical fiber fusion point connecting the two optical fibers (6), the tail end of the sapphire fiber (1) has a Fa-Pere microcavity (2) processed by femtosecond laser etching, and the Fa-Pert microcavity (2) has a first reflection surface (3) and a second reflection surface (3) and a second The two beams of reflected light generated by the reflection surface (4) interfere and generate an interference signal (11); when the ambient temperature changes, the cavity length and the refractive index of the material of the Fa-Per microcavity (2) change, and the two The optical path difference between the beams of reflected light changes accordingly, resulting in the change of the interference signal (11); the Fa-Per optical path difference is obtained by demodulating the interference signal, and then the measured temperature is obtained. The invention has the characteristics of theoretical innovation, small size and strong environmental adaptability, and can be used for high-temperature accurate sensing in a narrow measurement environment.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to a manufacturing method of a miniaturized sapphire optical fiber high-temperature sensor manufactured based on a femtosecond laser precision etching process.
Background
The high-temperature sensing technology based on the sapphire optical fiber plays an important role in the field of high-temperature monitoring due to the characteristics of oxidation resistance, high precision, electromagnetic interference resistance, miniaturization and the like.
In recent years, various types of sapphire optical fiber sensors have been proposed to achieve extremely high temperature (1000 ℃ or higher) measurement, such as a fiber grating type, a black body radiation type, and a fiber fabry-perot type. Wherein: (1) the sapphire fiber grating sensor is limited by the larger numerical aperture of the sapphire fiber, the mode interference is serious, and the measurement precision is lower than that of other methods. (2) The blackbody radiation type sapphire optical fiber sensor has good temperature measurement precision in a high-temperature region (600 plus 1600 ℃) based on the Planck blackbody radiation law, but the temperature measurement range is limited because the radiation power of a low-temperature section is obviously reduced, the signal-to-noise ratio is attenuated at the maximum speed below 600 ℃, and the temperature measurement range is only used for monitoring the temperature of the high-temperature section. (3) The sapphire optical fiber Fabry-Perot sensor has an extremely wide measuring range, can be flexibly designed according to requirements, is manufactured by adopting a traditional grinding process and a laser etching technology, can be produced in batches, and is low in cost, so that the sapphire optical fiber Fabry-Perot sensor has a wide application range.
Because the sapphire optical fiber is manufactured in a crystal growth mode and is limited in length, remote sensing is generally realized internationally in a mode of welding the sapphire optical fiber and the quartz optical fiber, namely the sapphire optical fiber is used in a high-temperature area, and the quartz optical fiber is used in a normal-temperature area to lengthen the transmission distance. In the heterogeneous optical fiber coupling process, in order to achieve the coupling efficiency as high as possible, the sapphire optical fiber and the quartz optical fiber end face need to be polished to reduce the scattering loss of the fusion point.
Disclosure of Invention
Aiming at the defects of large size and low response speed of the traditional sapphire optical fiber sensor, the invention provides a manufacturing method of a sapphire optical fiber Fabry-Perot sensor based on femtosecond laser etching.
The invention relates to a method for manufacturing a sapphire optical fiber Fabry-Perot sensor based on femtosecond laser etching, which comprises a sapphire optical fiber 1, a quartz optical fiber 5 and a heterogeneous optical fiber fusion point 6 for connecting the two optical fibers, wherein the tail end of the sapphire optical fiber 1 is provided with a Fabry-Perot microcavity 2 processed by femtosecond laser etching, and two beams of reflected light generated by a first reflecting surface 3 and a second reflecting surface 4 of the Fabry-Perot microcavity 2 interfere with each other to generate an interference signal 11; when the ambient temperature changes, the cavity length and the material refractive index of the Fabry-Perot microcavity 2 change, and the optical path difference between the two beams of reflected light changes, so that the interference signal 11 changes; obtaining a Fabry-Perot optical path difference by demodulating the interference signal, and further obtaining the measured temperature; the manufacturing method specifically comprises the following steps:
step one, preparing a sapphire optical fiber with polished double end faces as a sensor material, and specifically operating the steps of:
cutting a sapphire optical fiber with the diameter of 100 micrometers into a section with the length of 15 centimeters, fixing the section through an optical fiber grinding machine spindle, exposing one end of the section out of the end face of the fixed ceramic ferrule by 0.2-0.5 millimeter, and adjusting the angle between the central shaft of the optical fiber grinding machine spindle and a grinding disc to be vertical to each other by 90 degrees; before polishing, selecting 10um fineness diamond grinding paper to shape and process the end face of the optical fiber: firstly, wetting a grinding disc by using water, and rotationally adsorbing grinding paper onto the grinding disc; checking the attaching degree between the grinding paper and the grinding disc, and processing after flattening and no bubble; controlling the spindle of the grinding machine to lift and fall through a five-dimensional displacement angle adjusting frame until the end face of the optical fiber is attached to grinding paper, enabling the ceramic ferrule to be in no contact with the grinding paper, turning on a rotary disc switch of the grinding machine, adjusting the rotating speed to be 50 revolutions per minute, and processing the end face of the optical fiber for the first time; roughly polishing the end face of the optical fiber to be flat, observing the end face of the optical fiber under a microscope, and finding that the end face is in a nearly circular hexagon and the surface is smooth and free of defects; sequentially changing the polishing paper into 7 microns, 3 microns and 1 micron, and polishing the end face of the optical fiber in the same steps; after finishing grinding and shaping, finally, carrying out high-precision polishing and grinding on the end face of the optical fiber, replacing the grinding paper with diamond polishing paper with the fineness of 0.3 mu m, spraying clean water on the contact part of the optical fiber and the grinding paper in the grinding process, keeping the optical fiber wet, adjusting the rotating speed to 30 revolutions per minute, and grinding for 15 minutes;
step two, utilize heterogeneous optical fiber fusion technique to construct sensor system, namely pass through the optical fiber fusion splicer with the one end of the sapphire optical fiber of bi-polar face polishing and quartz fiber and carry out manual butt fusion, constitute a complete transmission waveguide, concrete operation includes:
the quartz optical fiber is cut flat by an optical fiber cutter, the end face of the quartz optical fiber and the end face of the sapphire optical fiber are adjusted to be coaxial under a microscope of an optical fiber fusion splicer, the distance between the end faces is controlled to be 10-20 mu m, the advancing distance of an optical fiber clamping motor of the fusion splicer is set to be 30-35 mu m, and heterogeneous optical fibers are fused; after welding, one end of the quartz fiber is connected with the fiber coupler through a fiber jumper, the input end of the coupler is connected to the LED light source, and the receiving end of the coupler is connected to the micro spectrometer;
step three, performing femtosecond laser calibration and sapphire fiber Fabry-Perot microcavity etching, and specifically operating the steps of:
fixing a sapphire optical fiber on a clean glass slide, fixing the glass slide on a femtosecond laser processing platform, firstly adjusting the optical path collimation of a femtosecond laser, testing the processing precision of the femtosecond laser, and selecting a processing focal plane; controlling the processing platform to enable the focus of the femtosecond laser focusing objective lens to fall on the outer surface of the glass slide close to the objective lens, observing a clear image on the surface of the glass slide on a visible light microscope with the same optical path, and proving that the focus is aligned; moving the processing platform in the horizontal and vertical directions until the image surface is clear, proving that the processing platform is adjusted vertically, overlapping the outer surface of the glass slide with the focal plane of a focusing objective of a femtosecond laser, starting the femtosecond laser, selecting 500KHz for repetition frequency, 4W for power selection and 100ms for starting time, and performing trial processing on the sample wafer; shutting down, observing the surface of the sample wafer: if a black small hole with the diameter of 10-20 mu m is processed on the outer surface of the glass slide, the processing focus position is correctly selected; if the diameter of the processing hole is too large, or no burnt black hole appears on the sample wafer, the focal plane is found by fine adjustment of the position again; after the focusing is finished, the femtosecond laser focuses on the surface of the glass slide; controlling the electric control displacement table to move, displacing the blank glass slide from the position to the clamped end face of the sapphire optical fiber, and adjusting the position to be placed in a centering way; after moving, the focus of the femtosecond laser still aligns on the outer surface of the glass slide, a sapphire optical fiber to be processed is arranged between the objective lens and the glass slide, the electric control displacement platform is adjusted, the sample wafer is vertically retreated by the distance of the diameter of the sapphire optical fiber, and when the sample wafer under the microscope does not shake any more, the position is finely adjusted until an image presented under the microscope is clear; at the moment, a bright line is arranged at the position, closest to the objective lens, of the sapphire optical fiber, and the processing focal length is aligned to the edge of the outermost edge of the sapphire optical fiber; turning on a femtosecond laser, setting the repetition frequency of the femtosecond laser to be 500kHz, setting the power to be 2W, starting to process the sapphire optical fiber Fabry-Perot sensor, setting a processing platform to vertically displace according to a program, processing the optical fiber into strip edges when the optical fiber passes through a focus, and repeatedly processing the strip edges, wherein the width of each strip edge is determined by the diameter of a light spot; after a strip edge is processed, horizontally moving the processing platform, continuously processing to finish the processing of a shallow groove with the width of 70 mu m, then vertically pushing for 5 mu m, and repeating the processing procedures; the sapphire optical fiber Fabry-Perot sensor is sequentially and deeply pushed until the processing depth reaches about 50 mu m, so that the prototype of the sapphire optical fiber Fabry-Perot sensor is processed, and then the section left after half of a cylinder is cut off in the precision etching processing of the optical fiber, namely the first reflecting surface is polished; the sapphire optical fiber is adjusted to rotate by 90 degrees, the end face normal direction is parallel to the emergent light direction of the femtosecond laser, the processing platform is adjusted, a second reflecting surface to be polished is moved to the focal plane of the femtosecond laser, the femtosecond laser is opened, the repetition frequency of the femtosecond laser is set to be 50MHz, the power is set to be 2W, the second reflecting surface processed is polished, the sensor is connected to a demodulation system through an optical fiber jumper, the signal change is observed until interference fringes appear in a signal spectrum, the processing is stopped, and the sensor is manufactured completely.
Compared with the prior art, the sapphire optical fiber high-temperature sensor based on femtosecond laser etching and the manufacturing method thereof have the following positive effects:
1. the invention is manufactured by directly etching the optical fiber by femtosecond laser without other accessories, and has simple structure, reliable performance and economy; the sensor has the characteristics of small size and strong environmental adaptability, and can be used for high-temperature accurate sensing in a narrow measurement environment.
2. The temperature sensing principle of the invention is that the thermo-optic effect and the thermal expansion effect of the optical fiber are utilized to realize the change of the interference optical path difference and realize the conversion from the temperature to the interference optical path difference; compared with the traditional Fabry-Perot or Mach Zehnder temperature sensing, the invention has theoretical innovation.
3. By optimizing the optical path structure of the Fabry-Perot sensor, the invention overcomes the defects of complex mode of the large-numerical-aperture optical fiber and the influence of mode interference, and the structural theory has universal applicability.
Drawings
FIG. 1 is a schematic drawing of a polished microscope (photograph) of the end face of a sapphire fiber at different finenesses;
FIG. 2 is a microscopic (photograph) view of the fusion point of a sapphire fiber and a multimode silica fiber;
FIG. 3 is a fringe pattern etched at different powers in the femtosecond laser etching process of the sapphire optical fiber based on femtosecond laser etching according to the present invention;
FIG. 4 is a schematic structural diagram of a femtosecond laser etching-based sapphire optical fiber high-temperature sensor according to the invention;
FIG. 5 is a schematic diagram of optical path transmission of a femtosecond laser etching-based sapphire optical fiber high-temperature sensor according to the present invention;
FIG. 6 is a schematic view of a sensing system composed of a femtosecond laser etching-based sapphire optical fiber high-temperature sensor according to a first embodiment of the invention;
reference numerals: 1. sapphire optical fiber, 2 Fabry-Perot microcavity, 3, first reflecting surface, 4, second reflecting surface, 5, quartz optical fiber, 6, heterogeneous optical fiber fusion point, 7, optical fiber jumper wire, 8, 2X 1 optical fiber coupler, 9, LED light source, 10, original signal, 11, interference signal, 12 and spectrometer.
Detailed Description
The technical solution of the present invention will be described in further detail with reference to examples.
The first embodiment is as follows:
referring to fig. 4 and 6, an original signal 10 from a 850nm LED broadband light source 9 is guided into the fabry-perot microcavity 2 through an optical fiber jumper 7, a multimode silica fiber 5, a heterogeneous fiber fusion point 6, and a sapphire fiber 1, and light of an interference signal 11 is received by a spectrometer 12 through the sapphire fiber 1, the heterogeneous fiber fusion point 6, the silica fiber 5, and the optical fiber jumper 7 in sequence. The high temperature sensor is arranged in the tubular cavity of the high temperature muffle 13, a temperature variable is applied to the sensor by adjusting the temperature in the muffle cavity, and the measurement range is 100-. The change of the temperature causes the optical refractive index and the material expansion and contraction of the Fabry-Perot microcavity 2, the change of the Fabry-Perot optical path difference is caused, and the optical path difference of the sensor under the measurement environment temperature can be obtained by calculating interference spectrum information received by the spectrometer 12. Since the optical path difference of the sensor has a fixed relation delta 2n (T) L (T) with the refractive index of the sapphire wafer and the thermal expansion length of the wafer, the sensing real-time temperature can be obtained by reverse extrapolation.
A method for manufacturing a sapphire optical fiber Fabry-Perot sensor based on femtosecond laser etching specifically comprises the following steps:
the method comprises the following steps: and preparing a sapphire optical fiber with polished double end faces as a sensor material.
Cutting a sapphire optical fiber with the diameter of 100 micrometers into a section with the length of 15 centimeters, fixing the section by using an optical fiber grinder spindle, exposing one end of the section out of the end face of the fixed ceramic ferrule by 0.2-0.5 millimeter, and adjusting the angle between the central shaft of the optical fiber grinder spindle and the grinding disc to be vertical to each other by 90 degrees. Because the sapphire optical fiber has high hardness, before the sapphire optical fiber is polished, diamond grinding paper with fineness of 10 mu m is selected to carry out shaping processing on the end face of the optical fiber. The grinding disc is wetted by water, and the grinding paper is rotationally adsorbed on the grinding disc. And (5) checking the attaching degree between the grinding paper and the grinding disc, and processing the paper in a smooth and bubble-free manner. And controlling the spindle of the grinding machine to lift and fall through the five-dimensional displacement angle adjusting frame until the end face of the optical fiber is attached to the grinding paper, but the ceramic ferrule is not in contact with the grinding paper. And opening a rotary disc switch of the grinding machine, adjusting the rotating speed to be 50 revolutions per minute, and processing the end face of the optical fiber for the first time. Roughly polishing the end face of the optical fiber to be flat, observing the end face of the optical fiber under a microscope, and finding that the end face is in a nearly circular hexagon and the surface is smooth and free of defects.
Because 10um abrasive paper grinds the precision and is lower, observes under high power microscope after the fiber end face processing, can have multichannel strip arris. Insufficient end face finish can adversely affect both sensor signal quality and fusion quality of the foreign optical fiber. Thus, after obtaining a flat fiber end face by rough grinding, the end face is polished with a higher degree of fineness. And sequentially replacing the polishing paper with 7 mu m, 3 mu m and 1 mu m, and polishing the end face of the optical fiber by the same steps. And after finishing grinding and shaping, finally, carrying out high-precision polishing and grinding on the end face of the optical fiber, and replacing the grinding paper with diamond polishing paper with the fineness of 0.3 mu m. And (3) spraying cleaning water to the contact part of the optical fiber and the grinding paper in the grinding process, keeping the optical fiber wet, adjusting the rotating speed to be 30 revolutions per minute, and grinding for 15 minutes.
Step two: the heterogeneous optical fiber fusion constructs a sensor system.
And manually welding one end of the sapphire optical fiber with the quartz optical fiber through an optical fiber welding machine to form a complete transmission waveguide. And (3) flattening the end face of the quartz optical fiber by using an optical fiber cutter, and adjusting the end face of the quartz optical fiber and the end face of the sapphire optical fiber to be coaxial under a microscope of an optical fiber fusion splicer, wherein the distance between the end faces is controlled to be 10-20 mu m. Adjusting parameters of the fusion splicer for carrying out heterogeneous optical fiber fusion splicing, setting the advancing distance of an optical fiber clamping motor of the fusion splicer to be 30-35 mu m, and carrying out heterogeneous optical fiber fusion splicing. After the welding is finished, one end of the quartz optical fiber is connected with the optical fiber coupler through an optical fiber jumper, the input end of the coupler is connected to the LED light source, and the receiving end of the coupler is connected to the micro spectrometer. So far, a complete sensing system is initially established.
Step three: femtosecond laser calibration and sapphire fiber Fabry-Perot microcavity etching process.
Sapphire fibers were mounted on a clean glass slide that was mounted on a femtosecond laser processing platform. The processing platform is formed by combining a three-dimensional nanometer electric control displacement control platform and an angle adjusting frame, and can play a role in controlling the position and the angle of the processing platform. Firstly, adjusting the light path collimation of the femtosecond laser, testing the processing precision of the femtosecond laser, and selecting a proper processing focal plane. And controlling the processing platform to enable the focus of the femtosecond laser focusing objective lens to fall on the outer surface of the glass slide close to the objective lens. When the microscope is observed on a visible light microscope with the same optical path, a clear image on the surface of the glass slide can be observed, and the focusing is proved to be aligned. And moving the processing platform in the horizontal and vertical directions, wherein the image planes are clear, so that the processing platform is adjusted vertically, and the outer surface of the glass slide is superposed with the focal plane of the focusing objective of the femtosecond laser. And starting the femtosecond laser, wherein the repetition frequency is 500KHz, the power is 4W, and the starting time is 100ms, and the sample wafer is subjected to trial processing. And (5) shutting down the machine and observing the surface of the sample wafer. If the outer surface of the glass slide is processed with a black hole with the diameter of 10-20 μm, the processing focus position is correctly selected. If the diameter of the processing hole is too large, or no burning black hole appears on the sample wafer, the focal plane needs to be found by fine adjustment again.
After completion of the focusing, we have focused the femtosecond laser onto the slide surface. And controlling the electric control displacement platform to move, displacing the blank glass slide from the position to the end face of the clamped sapphire optical fiber, and adjusting the position to be centered. During the moving process, the sample wafer is ensured to move horizontally on the focal plane of the laser, and the vertical distance between the overload glass slide and the laser is not changed during the whole moving process. After the movement, the focus of the femtosecond laser is still aligned on the outer surface of the glass slide, but the sapphire optical fiber to be processed is added between the objective lens and the glass slide. Due to the near cylindrical structure of the sapphire fiber, a blurred image appears on the observation microscope. At the moment, the electric control displacement platform is adjusted to vertically retreat the sample wafer by the diameter of the sapphire optical fiber, and when the sample wafer under the microscope does not vibrate any more, the position is finely adjusted until the image displayed under the microscope is clear. At the moment, a bright line is arranged at the position, closest to the objective lens, of the sapphire optical fiber, and the processing focal length is aligned to the edge of the outermost edge of the sapphire optical fiber.
And (3) turning on the femtosecond laser, setting the repetition frequency of the femtosecond laser to be 500kHz and the power to be 2W, and starting to process the sapphire optical fiber Fabry-Perot sensor. And arranging a processing platform to vertically displace according to a program, and processing the optical fiber into a strip edge when the optical fiber passes through the focus. And repeatedly processing the strip edges, wherein the width of each strip edge is determined by the diameter of the light spot. In actual processing, the width of the strip edge is slightly smaller than the diameter of the light spot. And after one edge is machined, horizontally moving the machining platform, and continuing machining. Shallow trench processing of 70 μm width was completed. Then, the process was repeated while vertically advancing by 5 μm. And (5) sequentially and deeply propelling until the processing depth reaches about 50 um. So far, the sapphire optical fiber Fabry-Perot sensor prototype is processed, and then two semicircular end faces of the optical fiber are polished. Two semi-circular end faces, one of which is a polished reflecting surface, are cut in half during the machining process, but the remaining half still maintains a smooth finish. The center of gravity of the polishing work is the remaining cross section after half of the cylinder is cut off by the precision etching process, i.e., the second reflecting surface.
The sapphire optical fiber is adjusted to rotate by 90 degrees, and the normal direction of the end face is parallel to the emergent light direction of the femtosecond laser. And adjusting the processing platform, and moving the second reflecting surface to be polished to the focal plane of the femtosecond laser. And (5) turning on the femtosecond laser, setting the repetition frequency of the femtosecond laser to be 50MHz and the power to be 2W, and starting to polish the processed second reflecting surface. Attention is paid to avoid processing many times at two semicircle reflecting surface junctions, prevents to cause the destruction to the first reflecting surface that polishes. And cleaning the scraps produced in the processing process by using an ultrasonic cleaning machine. The sensor is connected to a demodulation system through an optical fiber jumper to observe signal change. And stopping processing until the signal spectrum has interference fringes, and finishing the manufacturing of the sensor.
When the sensor works, the end of the quartz optical fiber 5 is connected with the output end of the 2 x 1 optical fiber coupler 8 through the optical fiber jumper 7, and the spectrometer 12 is connected. The input end of the optical fiber coupler is connected with an 850nm LED light source 9 to provide an original light signal for the sensor, and the return end of the coupler is connected with a micro spectrometer 10. Original Gaussian light source signals 10 emitted from an 850nm LED light source 9 sequentially pass through a 2-1 optical fiber coupler 8, enter an optical fiber jumper 7, a quartz optical fiber 5, a heterogeneous optical fiber fusion point (6) and a sapphire optical fiber 1, enter a Fabry-Perot microcavity 2 processed by femtosecond laser etching, and interfere with each other. The interference signal 11 carries temperature information, passes through the heterogeneous optical fiber fusion point 6, the quartz optical fiber 5, the optical fiber jumper 7 and the 2 x 1 optical fiber coupler 8 in sequence from the sapphire optical fiber 1, and is received by the micro spectrometer 12. When the ambient temperature of the sensor changes, the cavity length and the material refractive index of the Fabry-Perot microcavity 2 change, and the optical path difference between the two beams of reflected light changes, so that the interference signal 11 changes. The Fabry-Perot optical path difference information can be obtained by demodulating the interference signal. And then reversely pushing back the temperature information of the sapphire optical fiber Fabry-Perot sensor.
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| CN112729601B (en) * | 2020-12-08 | 2023-04-21 | 北京信息科技大学 | A Sapphire F-P Optical Fiber Temperature Sensor Prepared by Femtosecond Laser |
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| CN114101901B (en) * | 2021-12-06 | 2024-01-05 | 苏州晶生新材料有限公司 | Processing technology capable of integrating micro-nano optical structure |
| CN119805662B (en) * | 2024-12-02 | 2025-09-26 | 中北大学 | Laser welding-based integrated high-temperature optical fiber sensor coupling packaging device and method |
| CN120018004A (en) * | 2025-04-17 | 2025-05-16 | 国网江苏省电力有限公司电力科学研究院 | An all-quartz double-membrane optical microphone made of microstructured optical fiber and its preparation method |
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