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CN109326496B - Electric scanning type X-ray tube - Google Patents

Electric scanning type X-ray tube Download PDF

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Publication number
CN109326496B
CN109326496B CN201811319806.1A CN201811319806A CN109326496B CN 109326496 B CN109326496 B CN 109326496B CN 201811319806 A CN201811319806 A CN 201811319806A CN 109326496 B CN109326496 B CN 109326496B
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China
Prior art keywords
ray tube
assembly
deflection
electron beam
focusing
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CN201811319806.1A
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CN109326496A (en
Inventor
叶华伟
曹红光
王啸
方奇
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Maimo Vacuum Technology Wuxi Co ltd
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Maimo Vacuum Technology Wuxi Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/24Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/14Arrangements for concentrating, focusing, or directing the cathode ray

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  • X-Ray Techniques (AREA)

Abstract

The invention discloses an electric scanning type X-ray tube, and belongs to the technical field of X-rays. The electrically scanned X-ray tube includes a cathode assembly, an electrical focus deflection assembly, and an anode assembly. The cathode assembly is used for generating and pre-focusing the electron beam; the electric focusing deflection assembly focuses and deflects the electron beam to different degrees, and finally, the electron beam impacts different positions on the target disk of the anode assembly to generate X-rays, thereby realizing a multi-focus X-ray source. When an object is irradiated, a plurality of groups of narrow-beam X-rays can be adopted, so that the influence of scattered radiation is effectively reduced, and the contrast and definition of an image are improved; and ensures uniform optical size in the whole view angle and uniform spatial resolution of the image. If the electric scanning type X-ray tube is applied to a CT system, the X-ray tube adopts a multi-focus X-ray source to sample radiation in the Z direction, so that the problem of cone-core beam artifact can be effectively solved.

Description

Electric scanning type X-ray tube
Technical Field
The invention relates to the technical field of X rays, in particular to an electric scanning type X-ray tube.
Background
The X-ray tube is used for generating X-rays, and plays an important role in the fields of medical diagnosis, safety inspection, nondestructive inspection, and the like. The basic principle of the X-ray tube is that hot electrons heated and excited by a cathode filament impact a target disk under the action of an accelerating electric field of a cathode and an anode. About 1% of the energy is converted to X-rays and the remaining about 99% is converted to heat, resulting in a rapid temperature rise at the impacted site. In the X-ray tube with the fixed anode, electrons continuously strike at the same position, the local temperature rise is fast, and the continuous loading power is very low; the rotary anode X-ray tube adopts a method that an anode bearing drives an anode target disk to rotate at high speed in a vacuum tube shell, and heat is dispersed to the whole target disk. Under high vacuum condition, the heat on the target disk is transferred to the vacuum tube shell mainly through heat radiation, and then the heat is taken away by the cooling liquid flowing through the tube shell.
The rotary anode X-ray tube can be continuously loaded with a much higher power than the stationary anode X-ray tube. However, the rotary anode X-ray tube is limited in operation by the limited heat radiation transmission efficiency, on one hand, when the rotary anode X-ray tube is loaded for a long time under high power, the ball at the target disc or anode bearing is easy to overheat, and the phenomenon of tube core ignition or bearing clamping is caused, so that the service life of the rotary anode X-ray tube is influenced; on the other hand, a large amount of waiting time is needed between two paying-off processes, and the working efficiency of the whole system where the paying-off process is located is affected.
When an object is irradiated, the X-ray is transmitted through the object to be measured, and partial rays deflect due to Compton effect, so that scattered radiation is generated, and the partial scattered radiation is overlapped to the X-ray image, so that the contrast and definition of the image are reduced; when the traditional X-ray tube is used for radiation imaging, the effective optical focal spot size at the edge of the visual field angle is increased, and the spatial resolution is easily reduced; in addition, taking CT (Computed Tomography, X-ray computed tomography) system applications as an example, cone-beam artefacts become more apparent as the cone-beam angle in the Z-direction (i.e. the direction of travel of the scanning bed) increases. The essential cause of cone beam artefacts is undersampling. CT image reconstruction is based on line integration of the attenuation coefficients of the object under test. As shown in fig. 1, it is assumed that two different objects, one being an object whose attenuation coefficient is uniform and the other being a strongly varying object whose average attenuation coefficient is the same as that of the first object. For cone-beam CT systems based on conventional single-source X-ray tubes, the projection data are the same, resulting in cone-beam artifacts.
Disclosure of Invention
The invention aims to provide an electric scanning type X-ray tube so as to solve the problems in the background technology.
In order to solve the above technical problems, the present invention provides an electric scanning type X-ray tube, comprising:
a cathode assembly for generating an electron beam and pre-focusing;
An electric focusing deflection assembly for deflecting and focusing the electron beam;
And an anode assembly for receiving the electron beam and generating X-rays.
Optionally, the electric focusing deflection assembly comprises an electric quadrupole lens group and a deflection polar plate group; and an electron beam generated by the cathode assembly sequentially passes through the electric quadrupole lens group and the deflection polar plate group.
Optionally, the electro-quadrupole lens set comprises two electro-quadrupole lenses; the four-electrode lens consists of four electrodes, the potentials of the two electrodes are the same, and the potentials of the two adjacent electrodes are opposite.
Optionally, the vertical deflection component and the horizontal deflection component are both composed of two polar plates, the deflection polar plate group is composed of the vertical deflection component and the horizontal deflection component, and each component is composed of two polar plates applying opposite electric potentials.
Alternatively, two polar plates in the horizontal deflection assembly employ a single-folded plate deflector.
Optionally, the cathode assembly includes an electron emission source, a focusing electrode, and an insulating ceramic; wherein the electron emission source is located in the focusing electrode, and a pin of the electron emission source is connected out through the insulating ceramic.
Alternatively, the electron emission source is formed of a tungsten plate through an etching or stamping process.
Optionally, the anode assembly comprises an accelerating anode, a target disk and a tube shell; the cathode component is arranged in the accelerating anode, and the accelerating anode and the cathode component are sealed and insulated through insulating ceramics; the target disc is arranged at the bottom of the tube shell, and a window is formed in the surface of the tube shell.
Optionally, the tube shell is grounded, and water-based cooling liquid is adopted for cooling.
Optionally, the water-based cooling liquid comprises glycol, deionized water, preservative and antirust agent.
In the present invention, an electrically scanned X-ray tube is provided that includes a cathode assembly, an electrical focus deflection assembly, and an anode assembly. The cathode assembly is used for generating and pre-focusing an electron beam; the electric focusing deflection assembly deflects and focuses the electron beam, and finally, the electron beam impinges on a target disk of the anode assembly to emit X rays. The electric focusing deflection assembly deflects the electron beam in different degrees in the horizontal and vertical directions, thereby striking different positions on the target disk and generating X-rays to realize a multi-focus X-ray source. When the radiation image of the object to be detected is carried out, a plurality of groups of narrow beam X-rays are adopted, so that the influence of scattered radiation is effectively reduced, and the contrast and definition of the image are improved; and ensures uniform optical size in the whole view angle and uniform spatial resolution of the image. If the electric scanning type X-ray tube is applied to a CT system, the X-ray tube adopts a multi-focus X-ray source to sample radiation in the Z direction, so that the problem of cone-core beam artifact can be effectively solved.
Drawings
FIG. 1 is a schematic illustration of a projection of an object by a conventional cone-beam CT system based on a single-source X-ray tube;
Fig. 2 (a) and 2 (b) are schematic structural views of an electric scanning type X-ray tube according to a first embodiment of the present invention;
FIG. 3 is a schematic diagram of an electro-quadrupole lens according to an embodiment of the present invention;
FIG. 4 is a schematic view of a vertical deflection assembly and a horizontal deflection assembly according to a first embodiment of the present invention;
fig. 5 is a schematic structural diagram of an electro-quadrupole lens according to a second embodiment of the present invention.
Detailed Description
An X-ray tube of the present invention is described in further detail below with reference to the drawings and specific examples. Advantages and features of the invention will become more apparent from the following description and from the claims. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
Example 1
The first embodiment provides an electric scanning type X-ray tube, and the structure of the electric scanning type X-ray tube is shown in fig. 2 (a). The electrically scanned X-ray tube includes a cathode assembly, an electrical focus deflection assembly, and an anode assembly. The cathode assembly is used for generating and pre-focusing an electron beam; the electron beam enters the drift channel, is deflected and focused under the action of the electric focusing deflection assembly, finally impinges on the target disk of the anode assembly, and emits X rays.
Specifically, referring to fig. 2 (a) and 2 (b) simultaneously, the cathode assembly includes an electron emission source 1, a focusing electrode 2, and an insulating ceramic 3; wherein the electron emission source 1 is positioned in the focusing electrode 2, and the electron beam emitted from the electron emission source 1 is subjected to a focusing electric field generated by the focusing electrode to generate primary focusing. Pins of the electron emission source 1 are led out of the vacuum tube shell through the insulating ceramic 3. Further, the electron emission source 1 is a flat filament made of tungsten, and the flat filament is formed by a tungsten flat plate through an etching process or a stamping process; the electron emission source 1 may use a dispenser cathode, a lanthanum hexaboride cathode, or the like.
Specifically, the electric focusing deflection assembly comprises an electric quadrupole lens group and a deflection polar plate group. And an electron beam generated by the cathode assembly sequentially passes through the electric quadrupole lens group and the deflection polar plate group. Further, the quadrupole lens group comprises two quadrupole lenses 4; the electro-quadrupole lens 4 consists of four electrodes (electrode 41, electrode 42, electrode 43, electrode 44). The potential of the passing electron beam is taken as a reference, the potentials of the two electrodes are the same, and the potentials of the two adjacent electrodes are opposite. As shown in fig. 3, the electrode 41 and the electrode 43 are at the same potential, and a positive voltage is applied thereto; the electrodes 42 and 44 are at the same potential, and a negative voltage is applied thereto, and four electrodes generate an electric field as indicated by the dotted arrow in fig. 3, and the electron beam passing through the quadrupole lens is affected by the electric field, diverges in the horizontal direction, and converges in the vertical direction. In the described electro-scanning X-ray tube there are two electro-quadrupole lenses 4, one of which is rotated 90 ° relative to the other, so that the potentials of the electrodes at the same position of the two electro-quadrupole lenses are opposite. Assuming that the quadrupole lens shown in fig. 3 is the first quadrupole lens before in the quadrupole lens group, the electron beam passing through the quadrupole lens group diverges and converges in the horizontal direction, and converges and diverges in the vertical direction. The principle is as follows: if the focal length of the first quadrupole lens is F 1, the focal length of the second quadrupole lens is F 2, and the distance between the two quadrupole lenses is s, the focal length F h of the quadrupole lens set in the horizontal direction is approximately:
the focal length F v in the vertical direction is approximately:
The focal lengths F 1 and F 2 of the two quadrupolar lenses can be adjusted by changing the electric potential applied by the electrodes of the quadrupolar lenses, so that the focal length F h of the quadrupolar lens group in the horizontal direction and the focal length F v of the quadrupolar lens group in the vertical direction are adjusted. In the process of scanning the whole target disk by the electron beam, the travelling distance of the electron beam is different due to different deflection angles. The conventional focusing system generates different focusing effects at different positions of the target disc due to the fixed focal length thereof. The electrode potential of the electric quadrupole lens set can be dynamically adjusted to achieve the focusing effect on the whole target disc. In addition, the size of the focus can be adjusted according to different requirements. The quadrupole lens shown in fig. 3 may also be arranged at the back, so that the electron beam passing through the quadrupole lens set converges first and diverges then in the horizontal direction, and diverges then converges first and diverges then in the vertical direction. In the first embodiment, when the deflection polar plate group is not applied with voltage, the electron beam is focused at the center point of the target disk when the inter-electrode voltage of the two quadrupole lenses is about 25 kV. When the electron beam deflects under the action of the deflection polar plate, the interelectrode voltage of the two quadrupole lenses is reduced to increase the focal length due to the longer travelling distance, so that the electron beam is still focused on the target disk.
Specifically, the deflection polar plate group is composed of a vertical deflection component 5 and a horizontal deflection component 6, as shown in fig. 4, the vertical deflection component 5 is composed of an upper polar plate 51 and a lower polar plate 52, and the horizontal deflection component 6 is composed of a left polar plate 61 and a right polar plate 62. With reference to the passing electron beam potential, opposite potentials are applied to two plates in the vertical deflection assembly 5, and opposite potentials are applied to two plates in the horizontal deflection assembly 6, so that a deflection electric field is generated, and the electron beam passing therethrough deflects in the vertical direction and the horizontal direction. Preferably, the two polar plates in the horizontal deflection assembly 6 adopt single folded plate deflectors, so that the deflection sensitivity can be effectively improved. In the first embodiment, in order to horizontally deflect the electron beam by ±100mm, the inter-electrode voltage of the horizontal deflection assembly is about 40kV; to deflect the electron beam vertically + -30 mm, the inter-electrode voltage of the vertical deflection plates is approximately 14kV. The deflection voltages of the horizontal deflection assembly and the vertical deflection assembly are adjusted, so that the electron beams deflect to different degrees in the horizontal direction and the vertical direction, and therefore, the electron beams strike different positions on the target disk and generate X rays, and the multi-focus X-ray source is realized. And the electron beam scans the whole target disk, so that heat is uniformly distributed to the whole target disk, and the local overhigh temperature is avoided. The anode bearing is replaced by a scanning mode, the service life is prolonged compared with a traditional rotary anode X-ray tube, and noise is reduced. When the radiation image of the object to be detected is carried out, a plurality of groups of narrow beam X-rays are adopted, so that the influence of scattered radiation is effectively reduced, and the contrast and definition of the image are improved; and ensures uniform optical size in the whole view angle and uniform spatial resolution of the image. If the electric scanning type X-ray tube is applied to a CT system, the X-ray tube adopts a multi-focus X-ray source to sample radiation in the Z direction, so that the problem of cone-core beam artifact can be effectively solved.
Specifically, the anode assembly comprises an accelerating anode 7, a target disk 8 and a tube shell 9; the cathode assembly is arranged in the accelerating anode 7, and the cathode assembly and the accelerating anode are sealed and insulated by insulating ceramic 10; the target disk 8 is arranged at the bottom of the tube shell 9, and a window 11 is formed in the surface of the tube shell 9. The electron beam is deflected and focused by the electric focusing deflection assembly, and impinges on a certain position of the target disk 8, and X-rays generated during the impingement are emitted from the window 11. Further, the focusing electrode 2 adopts a concave plane or an approximately conical plane structure forming 30-90 degrees with the traveling direction of the electron beam as shown in fig. 2 (a) and 2 (b), so as to ensure that parallel electron beams or converging electron beams are generated. The accelerating anode 7 is provided with an aperture to ensure the electron beam to pass through, and adopts a shape design similar to a cone angle as shown in fig. 2 (a) and 2 (b), so that the equipotential surface distortion caused by the opening is corrected. The focusing electrode 2 and the accelerating anode 7 are matched with each other, and the electrostatic lens formed by the focusing electrode and the accelerating anode counteracts the divergence effect of space charge force in the electron beam to form parallel electron beams or converging electron beams, and simultaneously ensures that the electron beams generate dispersion as small as possible. Further, the target disk 8 has an inclination angle of 3 ° to 50 °, so that the actual focal area can be increased and the optical focal size can be reduced. As shown in fig. 2b, the window 11 is provided with M rows and N columns (M, N are positive integers) of collimation holes to restrict the X-rays, so as to form a narrow beam of X-rays. The size and depth of the collimation holes depend on the size and the distance between the focuses, and X-rays emitted by the corresponding focuses are passed and restrained, and X-rays emitted by adjacent focuses are filtered. Through collocation of the electric focusing deflection system and the collimation holes and selection of the corresponding target disc size, the planar arrays with different areas, different focus numbers and different forms (such as a circular array or a square array) can be realized. In the first embodiment, the length of the target disc is 200mm, the width of the target disc is 60mm, the target angle is 20 °, the length and width of the optical focal point are 1mm, and the focal distance is 2mm. The tube housing has about 100×10 collimation holes corresponding to focal positions. An area of about 200mm x 20mm is ultimately formed, comprising an array of about 100x 10 focal points. The pipe shell 9 is grounded and is cooled by adopting water-based cooling liquid; the water-based cooling liquid comprises the components of glycol, deionized water, preservative and antirust agent. The water-based cooling liquid has better cooling effect than insulating oil, thereby realizing higher heat dissipation efficiency and being capable of bearing longer continuous scanning time.
Example two
The second embodiment provides an electric scanning type X-ray tube, which comprises a cathode assembly, an electric focusing deflection assembly and an anode assembly. The difference from the first embodiment is that in the second embodiment, the electric focus deflection assembly includes two electric quadrupole lenses 4 and a horizontal deflection assembly 6. Wherein the first or second electro-quadrupole lens simultaneously focuses and deflects the electron beam vertically. Based on the original focusing voltage, a positive voltage is additionally applied to the electrode 41, and a negative voltage is additionally applied to the electrode 43, see fig. 5, to form an electric field in the direction indicated by the dotted arrow. The electron beam passing therethrough will deflect in a vertical direction towards the electrode 41. If the opposite voltage setting is adopted, the electron beam is deflected towards the electrode 42. In this way the vertical deflection unit is replaced, thereby shortening the length of the whole X-ray tube.
Example III
Another embodiment provides an X-ray tube comprising a cathode assembly, an electrofocusing deflection assembly, and an anode assembly. The difference from the first embodiment is that in the third embodiment, the electric focus deflection assembly includes two electric quadrupole lenses 4 and a horizontal deflection assembly 6. The third embodiment provides an electric scanning type X-ray tube, which omits a vertical deflection assembly to realize the electric scanning linear array X-ray tube.
The above description is only illustrative of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.

Claims (7)

1. An electronically scanned X-ray tube, comprising:
a cathode assembly for generating an electron beam and pre-focusing;
An electric focusing deflection assembly for deflecting and focusing the electron beam;
An anode assembly for receiving an electron beam and generating X-rays;
the electric focusing deflection assembly comprises an electric quadrupole lens group and a deflection polar plate group; the electron beam generated by the cathode assembly sequentially passes through the electric quadrupole lens group and the deflection polar plate group;
the four-electrode lens group comprises two four-electrode lenses; the four-electrode lens consists of four electrodes, the potentials of the two electrodes are the same, and the potentials of the two adjacent electrodes are opposite;
the deflection polar plate group consists of a vertical deflection component and a horizontal deflection component, and each component consists of two polar plates applying opposite electric potentials.
2. The electrically scanned X-ray tube of claim 1, wherein two plates in the horizontal deflection assembly employ a single-flap deflector.
3. The electrically scanned X-ray tube of claim 1, wherein the cathode assembly comprises an electron emission source, a focusing electrode, and an insulating ceramic; wherein the electron emission source is located in the focusing electrode, and a pin of the electron emission source is connected out through the insulating ceramic.
4. The electrically scanned X-ray tube of claim 3, wherein the electron emission source is formed from a tungsten plate by an etching or stamping process.
5. The electrically scanned X-ray tube of claim 1, wherein the anode assembly comprises an accelerating anode, a target disk, and a tube housing; the cathode component is arranged in the accelerating anode, and the accelerating anode and the cathode component are sealed and insulated through insulating ceramics; the target disc is arranged at the bottom of the tube shell, and a window is formed in the surface of the tube shell.
6. The tube of claim 5, wherein the tube housing is grounded and cooled with a water-based coolant.
7. The electrically scanned X-ray tube of claim 6, wherein the water-based cooling fluid comprises glycol, deionized water, a preservative, and a rust inhibitor.
CN201811319806.1A 2018-11-07 2018-11-07 Electric scanning type X-ray tube Active CN109326496B (en)

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CN119324145A (en) * 2024-11-01 2025-01-17 北京航星机器制造有限公司 Preparation method of X-ray tube with controllable focus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590379A (en) * 1980-09-16 1986-05-20 Martin Frederick W Achromatic deflector and quadrupole lens
JP2007165236A (en) * 2005-12-16 2007-06-28 Hitachi Medical Corp Microfocus x-ray tube and x-ray apparatus using the same
CN209071270U (en) * 2018-11-07 2019-07-05 麦默真空技术无锡有限公司 A kind of X-ray tube of electric scanning formula

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101275149B1 (en) * 2011-10-17 2013-06-17 선문대학교 산학협력단 X-ray tube having line-focused electron beam spot

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590379A (en) * 1980-09-16 1986-05-20 Martin Frederick W Achromatic deflector and quadrupole lens
JP2007165236A (en) * 2005-12-16 2007-06-28 Hitachi Medical Corp Microfocus x-ray tube and x-ray apparatus using the same
CN209071270U (en) * 2018-11-07 2019-07-05 麦默真空技术无锡有限公司 A kind of X-ray tube of electric scanning formula

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