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CN109166899B - Display substrate, manufacturing method thereof and display device - Google Patents

Display substrate, manufacturing method thereof and display device Download PDF

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Publication number
CN109166899B
CN109166899B CN201811025591.2A CN201811025591A CN109166899B CN 109166899 B CN109166899 B CN 109166899B CN 201811025591 A CN201811025591 A CN 201811025591A CN 109166899 B CN109166899 B CN 109166899B
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boundary
conductive
display substrate
pattern
area
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CN109166899A (en
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彭俊林
罗道源
杨增乾
冯耀耀
孙剑秋
刘增利
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BOE Technology Group Co Ltd
Hefei Xinsheng Optoelectronics Technology Co Ltd
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Hefei Xinsheng Optoelectronics Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

本发明提供了一种显示基板及其制作方法、显示装置,属于显示技术领域。其中,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述显示基板包括薄膜晶体管和覆盖所述薄膜晶体管的钝化层,所述钝化层上设置有有机膜,所述有机膜包括至少对应所述第一区域的镂空部。通过本发明的技术方案,能够提高显示基板的良率。

Figure 201811025591

This invention provides a display substrate, its manufacturing method, and a display device, belonging to the field of display technology. The display substrate includes a routing area comprising a first region at the intersection of gate lines and data lines, and a second region excluding the first region. The display substrate includes thin-film transistors and a passivation layer covering the thin-film transistors. An organic film is disposed on the passivation layer, and the organic film includes at least a cutout corresponding to the first region. The technical solution of this invention can improve the yield of the display substrate.

Figure 201811025591

Description

显示基板及其制作方法、显示装置Display substrate, manufacturing method thereof, and display device

技术领域technical field

本发明涉及显示技术领域,特别是指一种显示基板及其制作方法、显示装置。The present invention relates to the field of display technology, and in particular, to a display substrate, a manufacturing method thereof, and a display device.

背景技术Background technique

现有技术在制作显示基板时,形成覆盖薄膜晶体管的钝化层后,会在钝化层上形成一层有机膜,并在有机膜上形成像素电极。有机膜的厚度比较大,达到微米级别。通过有机膜可以提高显示基板的薄膜晶体管与像素电极之间的距离,降低显示基板的寄生电容,从而降低显示基板的功耗。In the prior art, when a display substrate is fabricated, after a passivation layer covering the thin film transistor is formed, an organic film is formed on the passivation layer, and a pixel electrode is formed on the organic film. The thickness of the organic film is relatively large, reaching the micron level. Through the organic film, the distance between the thin film transistor of the display substrate and the pixel electrode can be increased, the parasitic capacitance of the display substrate can be reduced, and the power consumption of the display substrate can be reduced.

但是在显示基板的走线区域,栅线和数据线交叉位置处的有机膜上容易积聚电荷,一旦积聚过多,便形成电荷释放从而产生ESD(Electro-Static discharge,静电释放)现象,使得显示基板的整体良率下降。However, in the wiring area of the display substrate, the organic film at the intersection of the gate line and the data line is prone to accumulating charges. Once the accumulation is too much, the charge will be released and the ESD (Electro-Static discharge, electrostatic discharge) phenomenon will occur, making the display The overall yield of the substrate decreases.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题是提供一种显示基板及其制作方法、显示装置,能够提高显示基板的良率。The technical problem to be solved by the present invention is to provide a display substrate, a manufacturing method thereof, and a display device, which can improve the yield of the display substrate.

为解决上述技术问题,本发明的实施例提供技术方案如下:In order to solve the above-mentioned technical problems, the embodiments of the present invention provide the following technical solutions:

一方面,提供一种显示基板,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述显示基板包括薄膜晶体管和覆盖所述薄膜晶体管的钝化层,所述钝化层上设置有有机膜,所述有机膜包括至少对应所述第一区域的镂空部。In one aspect, a display substrate is provided, a wiring area of the display substrate includes a first area at the intersection of a gate line and a data line and a second area other than the first area, the display substrate includes a thin film A transistor and a passivation layer covering the thin film transistor, an organic film is arranged on the passivation layer, and the organic film includes a hollow portion corresponding to at least the first region.

进一步地,所述第一区域的边界与所述镂空部的边界之间的最小间距大于预设阈值。Further, the minimum distance between the boundary of the first region and the boundary of the hollow portion is greater than a preset threshold.

进一步地,所述预设阈值为350um。Further, the preset threshold is 350um.

进一步地,所述镂空部的边界与所述第一区域的边界之间设置有静电引导图形。Further, an electrostatic guiding pattern is provided between the boundary of the hollow portion and the boundary of the first region.

进一步地,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,靠近所述第一边界和所述第二边界的静电引导图形包括与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。Further, the hollow portion includes an adjacent first border and a second border, an included angle between the first border and the second border is a right angle, and is close to the first border and the second border The electrostatic guiding pattern includes a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a conductive connection portion connecting the first conductive pattern and the second conductive pattern, The conductive connection portion is arc-shaped; or the conductive connection portion includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by adjacent conductive line segments is an obtuse angle; or the conductive connection portion and the first conductive line segment are formed. The included angle formed by the pattern is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle.

本发明实施例还提供了一种显示装置,包括如上所述的显示基板。Embodiments of the present invention also provide a display device, including the above-mentioned display substrate.

本发明实施例还提供了一种显示基板的制作方法,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述制作方法包括:An embodiment of the present invention further provides a method for fabricating a display substrate, wherein a wiring area of the display substrate includes a first area at the intersection of gate lines and data lines and a second area other than the first area, The manufacturing method includes:

形成薄膜晶体管和覆盖所述薄膜晶体管的钝化层;forming a thin film transistor and a passivation layer covering the thin film transistor;

在所述钝化层上形成有机膜,所述有机膜包括至少对应所述第一区域的镂空部。An organic film is formed on the passivation layer, and the organic film includes at least a hollow portion corresponding to the first region.

进一步地,所述在所述钝化层上形成有机膜包括:Further, forming the organic film on the passivation layer includes:

在所述钝化层上形成一层感光的有机材料;forming a layer of photosensitive organic material on the passivation layer;

利用掩模板对所述有机材料进行曝光,所述掩模板包括至少对应所述第一区域的不透光图形和除所述不透光图形之外的透光图形;Expose the organic material by using a mask, and the mask includes at least an opaque pattern corresponding to the first region and a light transmissive pattern other than the opaque pattern;

显影后去除被所述不透光图形遮挡的有机材料。After developing, the organic material blocked by the opaque pattern is removed.

进一步地,所述方法还包括:Further, the method also includes:

在所述镂空部的边界与所述第一区域的边界之间形成静电引导图形。An electrostatic guiding pattern is formed between the boundary of the hollow portion and the boundary of the first region.

进一步地,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,形成靠近所述第一边界和所述第二边界的所述静电引导图形包括:Further, the hollow portion includes an adjacent first border and a second border, and the included angle between the first border and the second border is a right angle, forming a shape close to the first border and the second border. The electrostatic guiding pattern of the boundary includes:

形成与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。forming a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a conductive connection portion connecting the first conductive pattern and the second conductive pattern, the conductive connection or the conductive connecting portion includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by the adjacent conductive line segments is an obtuse angle; or the conductive connecting portion and the first conductive pattern are formed The included angle is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle.

本发明的实施例具有以下有益效果:Embodiments of the present invention have the following beneficial effects:

上述方案中,显示基板的走线区域中,在栅线和数据线交叉位置处不设置有机膜,这样降低了栅线和数据线交叉位置处积聚电荷的几率,能够减少显示基板在走线区域发生ESD的概率,从而提高显示基板的良率。In the above solution, in the wiring area of the display substrate, no organic film is provided at the intersection of the gate line and the data line, which reduces the probability of accumulating charges at the intersection of the gate line and the data line, and can reduce the display substrate in the wiring area. The probability of ESD occurs, thereby improving the yield of the display substrate.

附图说明Description of drawings

图1为现有显示基板的走线区域的示意图;FIG. 1 is a schematic diagram of a wiring area of a conventional display substrate;

图2为现有显示基板发生ESD的示意图;FIG. 2 is a schematic diagram of ESD occurring on a conventional display substrate;

图3为本发明一实施例显示基板的走线区域的示意图;3 is a schematic diagram of a wiring area of a display substrate according to an embodiment of the present invention;

图4为本发明另一实施例显示基板的走线区域的示意图。FIG. 4 is a schematic diagram of a wiring area of a display substrate according to another embodiment of the present invention.

附图标记reference number

1栅线1 gate line

2数据线2 data lines

3有机膜3Organic film

4发生ESD的位置4 Locations where ESD occurs

5镂空部5 Cutouts

51第一边界51 First Frontier

52第二边界52 Second Frontier

6静电引导图形6 Electrostatic Boot Graphics

61第一导电线段61 The first conductive line segment

62第二导电线段62 second conductive line segment

63第三导电线段63 Third Conductive Segment

具体实施方式Detailed ways

为使本发明的实施例要解决的技术问题、技术方案和优点更加清楚,下面将结合附图及具体实施例进行详细描述。In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given in conjunction with the accompanying drawings and specific embodiments.

图1为现有显示基板的走线区域的示意图,如图1所示,走线区域设置有栅线1和数据线2,其中,在栅线1和数据线2的交叉位置处覆盖有有机膜3,由于栅线1和数据线2的交叉位置处存在段差,在有机膜3的涂覆过程中由于段差影响,极易在栅线1和数据线2的交叉位置处产生电荷积聚,一旦积聚过多,便形成电荷释放从而产生ESD现象,如图2所示,4为发生ESD的位置,发生ESD的位置一般位于有机膜3的涂覆方向上,ESD现象将导致显示基板的良率的降低。FIG. 1 is a schematic diagram of a wiring area of an existing display substrate. As shown in FIG. 1 , the wiring area is provided with gate lines 1 and data lines 2 , wherein the intersections of the gate lines 1 and the data lines 2 are covered with organic Film 3, due to the level difference at the intersection of the gate line 1 and the data line 2, during the coating process of the organic film 3 due to the influence of the level difference, it is easy to generate charge accumulation at the intersection of the gate line 1 and the data line 2. Once If there is too much accumulation, the charge will be released and the ESD phenomenon will occur. As shown in Figure 2, 4 is the position where ESD occurs. The position where ESD occurs is generally located in the coating direction of the organic film 3. The ESD phenomenon will lead to the yield of the display substrate. decrease.

为了解决上述问题,本发明的实施例提供一种显示基板及其制作方法、显示装置,能够提高显示基板的良率。In order to solve the above problems, embodiments of the present invention provide a display substrate, a manufacturing method thereof, and a display device, which can improve the yield of the display substrate.

本发明实施例提供一种显示基板,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述显示基板包括薄膜晶体管和覆盖所述薄膜晶体管的钝化层,所述钝化层上设置有有机膜,所述有机膜包括至少对应所述第一区域的镂空部。An embodiment of the present invention provides a display substrate, wherein a wiring area of the display substrate includes a first area at the intersection of a gate line and a data line and a second area other than the first area, the display substrate includes A thin film transistor and a passivation layer covering the thin film transistor, an organic film is provided on the passivation layer, and the organic film includes at least a hollow portion corresponding to the first region.

本实施例中,显示基板的走线区域中,在栅线和数据线交叉位置处不设置有机膜,这样降低了栅线和数据线交叉位置处积聚电荷的几率,能够减少显示基板在走线区域发生ESD的概率,从而提高显示基板的良率。In this embodiment, in the wiring area of the display substrate, no organic film is provided at the intersection of the gate line and the data line, which reduces the probability of accumulating charge at the intersection of the gate line and the data line, and can reduce the traces on the display substrate. The probability of ESD occurs in the area, thereby improving the yield of the display substrate.

进一步地,所述第一区域的边界与所述镂空部的边界之间的最小间距大于预设阈值。应尽可能使得有机膜的设置区域远离第一区域,有机膜的设置区域与第一区域的距离越远,则发生ESD的概率的越低。Further, the minimum distance between the boundary of the first region and the boundary of the hollow portion is greater than a preset threshold. The disposition area of the organic film should be kept as far away from the first area as possible. The farther the distance between the disposition area of the organic film and the first area, the lower the probability of ESD.

优选地,所述预设阈值为350um,即有机膜的设置区域的边界与第一区域的边界之间的最小间距大于350um,这样能够使得有机膜的设置区域与第一区域的距离比较远,大大降低发生ESD的概率。Preferably, the preset threshold is 350um, that is, the minimum distance between the boundary of the setting area of the organic film and the boundary of the first area is greater than 350um, so that the distance between the setting area of the organic film and the first area is relatively long, Greatly reduces the probability of ESD.

为了进一步地减少走线区域积聚的电荷,在所述镂空部的边界与所述第一区域的边界之间设置有静电引导图形,静电引导图形采用导电材料制作,与显示基板上的接地点或者与显示基板外的预设接地点连接,能够导走走线区域积聚的电荷,消除有机膜涂覆过程中或者其他硬件波动所带来的积聚电荷的情况,进一步降低走线区域发生ESD的概率。In order to further reduce the charge accumulated in the wiring area, an electrostatic guiding pattern is arranged between the boundary of the hollow portion and the boundary of the first area. The electrostatic guiding pattern is made of conductive material, and is connected with the grounding point or Connecting to the preset ground point outside the display substrate can lead away the accumulated charge in the trace area, eliminate the accumulation of charge during the organic film coating process or other hardware fluctuations, and further reduce the probability of ESD in the trace area. .

一具体实施例中,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,靠近所述第一边界和所述第二边界的静电引导图形包括与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。In a specific embodiment, the hollow portion includes an adjacent first border and a second border, an included angle between the first border and the second border is a right angle, and is close to the first border and the second border. The electrostatic guiding pattern of the second boundary includes a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a conductive pattern connecting the first conductive pattern and the second conductive pattern connection part, the conductive connection part is arc-shaped; or the conductive connection part includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by the adjacent conductive line segments is an obtuse angle; or the conductive connection part and the The included angle formed by the first conductive pattern is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle.

由于在尖角区域发生ESD的概率较高,因此,将静电引导图形设计为不包括直角和锐角,从而可以有效地导走静电,消除有机膜涂覆过程中或者其他硬件波动所带来的积聚电荷的情况,降低走线区域发生ESD的概率。Due to the high probability of ESD in sharp corner areas, the electrostatic guiding pattern is designed to exclude right and sharp corners, which can effectively conduct static electricity and eliminate the accumulation caused by the organic film coating process or other hardware fluctuations In the case of electric charge, the probability of ESD occurring in the trace area is reduced.

下面结合附图以及具体的实施例对本发明的显示基板进行进一步介绍:The display substrate of the present invention will be further introduced below in conjunction with the accompanying drawings and specific embodiments:

如图3所示,显示基板的走线区域设置有栅线1和数据线2,显示基板包括栅线1和数据线2交叉位置处的第一区域和除所述第一区域之外的第二区域,另外,显示基板上还设置有有机膜3,有机膜3包括对应第一区域的镂空部5,其中,对应的意思即为第一区域在显示基板上的正投影落入镂空部5在显示基板上的正投影内。其中,镂空部5的边界与第一区域的边界之间的间距d均大于350um,这样能够使得有机膜的设置区域与第一区域的距离比较远,大大降低发生ESD的概率。As shown in FIG. 3 , a gate line 1 and a data line 2 are arranged in the wiring area of the display substrate, and the display substrate includes a first area at the intersection of the gate line 1 and the data line 2 and a second area other than the first area. Two regions, in addition, an organic film 3 is also provided on the display substrate, and the organic film 3 includes a hollow portion 5 corresponding to the first region, wherein the corresponding meaning is that the orthographic projection of the first region on the display substrate falls into the hollow portion 5 in orthographic projection on the display substrate. The distance d between the boundary of the hollow part 5 and the boundary of the first region is greater than 350um, which can make the distance between the installation region of the organic film and the first region relatively far, and greatly reduce the probability of ESD.

为了进一步地减少走线区域积聚的电荷,如图4所示,在所述镂空部5的边界与所述第一区域的边界之间设置有静电引导图形6,静电引导图形6可以与显示基板上的接地点或者显示基板之外的接地点连接,能够导走走线区域积聚的电荷。如图4所示,镂空部5包括相邻的第一边界51和第二边界52,所述第一边界51和所述第二边界52之间的夹角为直角,静电引导图形6包括有依次首尾相接的第一导电线段61、第二导电线段62和第三导电线段63,其中,第一导电线段61和第三导电线段63分别与第一边界51和第二边界52平行,第一导电线段61与第二导电线段62之间的夹角为钝角,第三导电线段63与第二导电线段62之间的夹角为钝角,由于尖角区域发生ESD的概率较高,因此,将静电引导图形6设计为不包括直角和锐角,并沿镂空部5的边界延伸,既可以有效导走有机膜边缘处积聚的电荷,还可以有效降低走线区域发生ESD的概率。In order to further reduce the charge accumulated in the wiring area, as shown in FIG. 4 , an electrostatic guiding pattern 6 is provided between the boundary of the hollow portion 5 and the boundary of the first area, and the electrostatic guiding pattern 6 may be connected with the display substrate. The ground point on the display board or the ground point connection outside the display substrate can conduct the charge accumulated in the trace area. As shown in FIG. 4 , the hollow portion 5 includes adjacent first borders 51 and second borders 52 , the included angle between the first border 51 and the second border 52 is a right angle, and the electrostatic guiding pattern 6 includes a The first conductive line segment 61, the second conductive line segment 62 and the third conductive line segment 63 are connected end to end in sequence, wherein the first conductive line segment 61 and the third conductive line segment 63 are respectively parallel to the first boundary 51 and the second boundary 52, The angle between a conductive line segment 61 and the second conductive line segment 62 is an obtuse angle, and the angle between the third conductive line segment 63 and the second conductive line segment 62 is an obtuse angle. Since the probability of ESD occurring in the sharp corner area is high, therefore, The electrostatic guiding pattern 6 is designed not to include right angles and acute angles, and extends along the boundary of the hollow portion 5, which can not only effectively guide the charges accumulated at the edge of the organic film, but also effectively reduce the probability of ESD occurring in the wiring area.

本实施例中,通过对显示基板的结构进行设计,在栅线和数据线的交叉位置处不设置有机膜,使得有机膜远离栅线和数据线的交叉位置处,并设计静电引导图形及时导走电荷,能够大大降低显示基板走线区域发生ESD的概率,从而提升显示基板的产品良率。In this embodiment, by designing the structure of the display substrate, no organic film is provided at the intersection of the gate line and the data line, so that the organic film is far away from the intersection of the gate line and the data line, and the electrostatic guiding pattern is designed to guide in time. By removing the charge, the probability of ESD occurring in the wiring area of the display substrate can be greatly reduced, thereby improving the product yield of the display substrate.

本发明实施例还提供了一种显示装置,包括如上所述的显示基板。所述显示装置可以为:电视、显示器、数码相框、手机、平板电脑等任何具有显示功能的产品或部件,其中,所述显示装置还包括柔性电路板、印刷电路板和背板。Embodiments of the present invention also provide a display device, including the above-mentioned display substrate. The display device can be any product or component with a display function, such as a TV, a monitor, a digital photo frame, a mobile phone, a tablet computer, etc., wherein the display device further includes a flexible circuit board, a printed circuit board and a backplane.

本发明实施例还提供了一种显示基板的制作方法,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述制作方法包括:An embodiment of the present invention further provides a method for fabricating a display substrate, wherein a wiring area of the display substrate includes a first area at the intersection of gate lines and data lines and a second area other than the first area, The manufacturing method includes:

形成薄膜晶体管和覆盖所述薄膜晶体管的钝化层;forming a thin film transistor and a passivation layer covering the thin film transistor;

在所述钝化层上形成有机膜,所述有机膜包括至少对应所述第一区域的镂空部。An organic film is formed on the passivation layer, and the organic film includes at least a hollow portion corresponding to the first region.

本实施例中,显示基板的走线区域中,在栅线和数据线交叉位置处不设置有机膜,这样降低了栅线和数据线交叉位置处积聚电荷的几率,能够减少显示基板在走线区域发生ESD的概率,从而提高显示基板的良率。In this embodiment, in the wiring area of the display substrate, no organic film is provided at the intersection of the gate line and the data line, which reduces the probability of accumulating charge at the intersection of the gate line and the data line, and can reduce the traces on the display substrate. The probability of ESD occurs in the area, thereby improving the yield of the display substrate.

其中,可以通过对制作有机膜的掩模板的图形进行改进,从而改变有机膜的形状。在有机膜采用负性感光材料制成时,掩模板包括至少对应所述第一区域的不透光图形和除所述不透光图形之外的透光图形,所述在所述钝化层上形成有机膜包括:Among them, the shape of the organic film can be changed by improving the pattern of the mask plate for making the organic film. When the organic film is made of a negative photosensitive material, the mask includes at least an opaque pattern corresponding to the first region and a light transmissive pattern other than the opaque pattern, and the passivation layer The organic film formed on includes:

在所述钝化层上形成一层感光的有机材料(负性感光材料);forming a layer of photosensitive organic material (negative photosensitive material) on the passivation layer;

利用掩模板对所述有机材料进行曝光,所述掩模板包括至少对应所述第一区域的不透光图形和除所述不透光图形之外的透光图形;Expose the organic material by using a mask, and the mask includes at least an opaque pattern corresponding to the first region and a light transmissive pattern other than the opaque pattern;

显影后去除被所述不透光图形遮挡的有机材料。After developing, the organic material blocked by the opaque pattern is removed.

当然,有机膜并不局限于采用负性感光材料制成,还可以采用正性感光材料制成,在有机膜采用正性感光材料制成时,掩模板包括至少对应所述第一区域的透光图形和除所述透光图形之外的不透光图形,所述在所述钝化层上形成有机膜包括:Of course, the organic film is not limited to being made of a negative photosensitive material, but can also be made of a positive photosensitive material. When the organic film is made of a positive photosensitive material, the mask plate includes at least a transparent layer corresponding to the first region. A light pattern and an opaque pattern other than the light-transmitting pattern, the forming an organic film on the passivation layer includes:

在所述钝化层上形成一层感光的有机材料(正性感光材料);forming a layer of photosensitive organic material (positive photosensitive material) on the passivation layer;

利用掩模板对所述有机材料进行曝光,所述掩模板包括至少对应所述第一区域的透光图形和除所述透光图形之外的不透光图形;Expose the organic material by using a mask, the mask comprising at least a light-transmitting pattern corresponding to the first region and an opaque pattern other than the light-transmitting pattern;

显影后保留被所述不透光图形遮挡的有机材料,去除被曝光的有机材料。After developing, the organic material blocked by the opaque pattern is retained, and the exposed organic material is removed.

进一步地,所述方法还包括:Further, the method also includes:

在所述镂空部的边界与所述第一区域的边界之间形成静电引导图形。An electrostatic guiding pattern is formed between the boundary of the hollow portion and the boundary of the first region.

为了进一步地减少走线区域积聚的电荷,在所述镂空部的边界与所述第一区域的边界之间设置有静电引导图形,静电引导图形采用导电材料制作,与显示基板上的接地点或者与显示基板外的预设接地点连接,能够导走走线区域积聚的电荷,消除有机膜涂覆过程中或者其他硬件波动所带来的积聚电荷的情况,进一步降低走线区域发生ESD的概率。In order to further reduce the charge accumulated in the wiring area, an electrostatic guiding pattern is arranged between the boundary of the hollow portion and the boundary of the first area. The electrostatic guiding pattern is made of conductive material, and is connected with the grounding point or Connecting to the preset ground point outside the display substrate can lead away the accumulated charge in the trace area, eliminate the accumulation of charge during the organic film coating process or other hardware fluctuations, and further reduce the probability of ESD in the trace area. .

一具体实施例中,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,形成靠近所述第一边界和所述第二边界的所述静电引导图形包括:In a specific embodiment, the hollow portion includes an adjacent first border and a second border, and an included angle between the first border and the second border is a right angle, forming a shape close to the first border and the second border. The electrostatic guiding pattern of the second boundary includes:

形成与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。forming a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a conductive connection portion connecting the first conductive pattern and the second conductive pattern, the conductive connection or the conductive connecting portion includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by the adjacent conductive line segments is an obtuse angle; or the conductive connecting portion and the first conductive pattern are formed The included angle is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle.

由于在尖角区域发生ESD的概率较高,因此,将静电引导图形设计为不包括直角和锐角,从而可以有效地导走静电,消除有机膜涂覆过程中或者其他硬件波动所带来的积聚电荷的情况,降低走线区域发生ESD的概率。Due to the high probability of ESD in sharp corner areas, the electrostatic guiding pattern is designed to exclude right and sharp corners, which can effectively conduct static electricity and eliminate the accumulation caused by the organic film coating process or other hardware fluctuations In the case of electric charge, the probability of ESD occurring in the trace area is reduced.

除非另外定义,本公开使用的技术术语或者科学术语应当为本发明所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述对象的绝对位置改变后,则该相对位置关系也可能相应地改变。Unless otherwise defined, technical or scientific terms used in this disclosure should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used in this disclosure, "first," "second," and similar terms do not denote any order, quantity, or importance, but are merely used to distinguish the various components. "Comprises" or "comprising" and similar words mean that the elements or things appearing before the word encompass the elements or things recited after the word and their equivalents, but do not exclude other elements or things. Words like "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to represent the relative positional relationship, and when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

可以理解,当诸如层、膜、区域或基板之类的元件被称作位于另一元件“上”或“下”时,该元件可以“直接”位于另一元件“上”或“下”,或者可以存在中间元件。It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element, Or intermediate elements may be present.

以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明所述原理的前提下,还可以作出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are the preferred embodiments of the present invention. It should be pointed out that for those skilled in the art, without departing from the principles of the present invention, several improvements and modifications can be made. It should be regarded as the protection scope of the present invention.

Claims (8)

1.一种显示基板,其特征在于,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述显示基板包括薄膜晶体管和覆盖所述薄膜晶体管的钝化层,所述钝化层上设置有有机膜,所述有机膜包括至少对应所述第一区域的镂空部,所述镂空部的边界与所述第一区域的边界之间设置有静电引导图形。1. A display substrate, characterized in that a wiring area of the display substrate comprises a first area at the intersection of a gate line and a data line and a second area other than the first area, the display substrate It includes a thin film transistor and a passivation layer covering the thin film transistor. An organic film is arranged on the passivation layer. An electrostatic guiding pattern is arranged between the boundaries of the first area. 2.根据权利要求1所述的显示基板,其特征在于,所述第一区域的边界与所述镂空部的边界之间的最小间距大于预设阈值。2 . The display substrate of claim 1 , wherein a minimum distance between the boundary of the first region and the boundary of the hollow portion is greater than a predetermined threshold. 3 . 3.根据权利要求2所述的显示基板,其特征在于,所述预设阈值为350um。3. The display substrate according to claim 2, wherein the preset threshold is 350um. 4.根据权利要求1所述的显示基板,其特征在于,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,靠近所述第一边界和所述第二边界的静电引导图形包括与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。4 . The display substrate according to claim 1 , wherein the hollow portion comprises an adjacent first boundary and a second boundary, and an included angle between the first boundary and the second boundary is a right angle. 5 . , the electrostatic guiding patterns near the first boundary and the second boundary include a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a connection to the first conductive pattern The conductive connection part of the pattern and the second conductive pattern, the conductive connection part is arc-shaped; or the conductive connection part includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by the adjacent conductive line segments is an obtuse angle ; or the included angle formed by the conductive connection portion and the first conductive pattern is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle. 5.一种显示装置,其特征在于,包括如权利要求1-4中任一项所述的显示基板。5. A display device, comprising the display substrate according to any one of claims 1-4. 6.一种显示基板的制作方法,其特征在于,所述显示基板的走线区域包括栅线和数据线交叉位置处的第一区域和除所述第一区域之外的第二区域,所述制作方法包括:6. A method for manufacturing a display substrate, wherein a wiring area of the display substrate comprises a first area at the intersection of a gate line and a data line and a second area other than the first area, so The production method includes: 形成薄膜晶体管和覆盖所述薄膜晶体管的钝化层;forming a thin film transistor and a passivation layer covering the thin film transistor; 在所述钝化层上形成有机膜,所述有机膜包括至少对应所述第一区域的镂空部;在所述镂空部的边界与所述第一区域的边界之间形成静电引导图形。An organic film is formed on the passivation layer, and the organic film includes a hollow part corresponding to at least the first region; an electrostatic guiding pattern is formed between the boundary of the hollow part and the boundary of the first region. 7.根据权利要求6所述的显示基板的制作方法,其特征在于,所述在所述钝化层上形成有机膜包括:7. The method for manufacturing a display substrate according to claim 6, wherein the forming an organic film on the passivation layer comprises: 在所述钝化层上形成一层感光的有机材料;forming a layer of photosensitive organic material on the passivation layer; 利用掩模板对所述有机材料进行曝光,所述掩模板包括至少对应所述第一区域的不透光图形和除所述不透光图形之外的透光图形;Expose the organic material by using a mask, and the mask includes at least an opaque pattern corresponding to the first region and a light transmissive pattern other than the opaque pattern; 显影后去除被所述不透光图形遮挡的有机材料。After developing, the organic material blocked by the opaque pattern is removed. 8.根据权利要求6所述的显示基板的制作方法,其特征在于,所述镂空部包括相邻的第一边界和第二边界,所述第一边界和所述第二边界之间的夹角为直角,形成靠近所述第一边界和所述第二边界的所述静电引导图形包括:8 . The method for manufacturing a display substrate according to claim 6 , wherein the hollow portion comprises adjacent first borders and second borders, and a sandwich between the first border and the second border is sandwiched between the first border and the second border. 9 . The angle is a right angle, and forming the electrostatic guiding pattern close to the first boundary and the second boundary includes: 形成与所述第一边界平行的第一导电图形、与所述第二边界平行的第二导电图形以及连接所述第一导电图形和所述第二导电图形的导电连接部,所述导电连接部为弧形;或所述导电连接部包括多个依次首尾相接的导电线段,相邻导电线段所成的夹角为钝角;或所述导电连接部与所述第一导电图形所成的夹角为钝角,所述导电连接部与所述第二导电图形所成的夹角为钝角。forming a first conductive pattern parallel to the first boundary, a second conductive pattern parallel to the second boundary, and a conductive connection portion connecting the first conductive pattern and the second conductive pattern, the conductive connection or the conductive connecting portion includes a plurality of conductive line segments connected end to end in sequence, and the included angle formed by the adjacent conductive line segments is an obtuse angle; or the conductive connecting portion and the first conductive pattern are formed The included angle is an obtuse angle, and the included angle formed by the conductive connection portion and the second conductive pattern is an obtuse angle.
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