CN109085812A - Gas flow monitors system and monitoring and master-slave switching method - Google Patents
Gas flow monitors system and monitoring and master-slave switching method Download PDFInfo
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- CN109085812A CN109085812A CN201810984779.3A CN201810984779A CN109085812A CN 109085812 A CN109085812 A CN 109085812A CN 201810984779 A CN201810984779 A CN 201810984779A CN 109085812 A CN109085812 A CN 109085812A
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- 238000000034 method Methods 0.000 title claims abstract description 50
- 238000012544 monitoring process Methods 0.000 title claims abstract description 38
- 230000008569 process Effects 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 238000001514 detection method Methods 0.000 claims description 18
- 230000002159 abnormal effect Effects 0.000 claims description 15
- 230000005856 abnormality Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 68
- 238000009423 ventilation Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Abstract
The present invention provides a kind of gas flow monitoring system and monitoring method and master-slave switching method using gas flow monitoring system, the gas flow monitoring system includes: at least one primary pipeline and a spare duct, one end of the primary pipeline and spare duct is respectively connected to an extraneous gas supply system, and the other end of the primary pipeline and spare duct is respectively connected to manufacture process cavity；One primary mass flow controller, at least one primary pneumatic on-off valve and primary switch valve are installed on the primary pipeline, one spare mass flow controller and at least one spare pneumatic on-off valve are installed on the spare duct, a backup circuit breaker valve is installed between the spare duct and each primary pipeline.
Description
Technical field
The present invention relates to fluid control technology field more particularly to a kind of gas flow monitoring system, using the gas stream
Measure the monitoring method of monitoring system and the master-slave switching method using gas flow monitoring system.
Background technique
MFC, that is, Mass Flow Controller (mass flow controller) is the device for controlling gas flow,
It is widely used in Dry Etch (dry etching) and CVD (chemical vapor deposition, chemical vapor deposition) equipment
On.MFC and piping connection basic structure are as shown in Figure 1.Gas flow system shown in FIG. 1 includes a manufacture process cavity 110, the system
Journey cavity 110 is separately connected by FRC (Frame Rate Control, a frame rate control) flow proportional controller 120
It, can in each pipeline to three pipelines (including the first primary pipeline 131, the second primary pipeline 132 and the primary pipeline 133 of third)
With a kind of gas (such as first gas, second gas and third gas) of circulating, and quality is installed on each pipeline
Flow controller (i.e. MFC equipment) 140.In addition, in each mass flow controller (the i.e. first primary mass flow controller
141, the second primary mass flow controller 142 and the primary mass flow controller 143 of third) both ends install pneumatically open respectively
Valve 150 is closed, such as the first primary pneumatic on-off valve 151 and the are installed in the both ends of the first primary mass flow controller 141 respectively
The both ends of four primary pneumatic on-off valves 154, the second primary mass flow controller 142 are installed by the second primary pneumatic on-off valve respectively
152 and the 5th primary pneumatic on-off valve 155, the primary gas of third is installed at the both ends of the primary mass flow controller 143 of third respectively
Dynamic switch valve 153 and the 6th primary pneumatic on-off valve 156.In addition, also installing pressure gauge 160, primary respectively on each pipeline
Pressure regulator valve 170 and primary pipeline switch valve 180.Wherein, first pressure meter 161, first is installed primary on first primary pipeline 131
Pressure regulator valve 171 and the first primary pipeline switch valve 181.Second pressure meter 162, second is installed primary on second primary pipeline 132
Pressure regulator valve 172 and the second primary pipeline switch valve 182.Third pressure gauge 163, third are installed primary on the primary pipeline 133 of third
Pressure regulator valve 173 and the primary pipeline switch valve 183 of third.
With using the time to increase, the flow control of MFC equipment 140 will appear offset, need the essence to MFC equipment 140
Degree is confirmed and is calibrated.
Common MFC detection method is according to equation for ideal gases theory on shop equipment at present: PV=nRT.Work as processing procedure
The volume V and temperature T of chamber toward the gas that cavity is passed through firm discharge according to the variation of chamber pressure it is known that can calculate logical
Enter the amount of gas, then divided by duration of ventilation, to calculate average flow rate.Then, by the average flow rate and MFC setting flow into
Row compares, and calculates MFC deviation ratio.
However, the resultant error that this method actual measurement comes out is bigger.Gas exigent for flow accuracy,
The method is simultaneously unreliable.Certainly, MFC equipment production firm can accurately confirm precision, but must remove MFC equipment
Come, this is only suitable only for carrying out in laboratory using specific process.And this method is to the MFC being mounted on shop equipment
It is completely infeasible.
Therefore, it is desirable to provide a kind of gas flow monitoring system.
Summary of the invention
The object of the present invention is to provide a kind of gas flows to monitor system, by original gas flow system
Increase by a spare duct, usually the valve of spare duct keeps normally off, and it is accurate with the precision for defaulting MFC equipment, work as progress
When MFC equipment detects, which can be used as standard and is referred to, and when normal pipeline has exception, can open in time
Spare duct, to reduce entire gas flow system exception downtime.
The present invention provides a kind of gas flows to monitor system, and the monitoring system includes: at least one primary pipeline and one
One end of spare duct, the primary pipeline and spare duct is respectively connected to an extraneous gas supply system, the primary pipe
The other end of road and spare duct is respectively connected to manufacture process cavity；The primary mass flow control of installation one on the primary pipeline
Device, at least one primary pneumatic on-off valve and primary switch valve install a spare mass flow controller on the spare duct
At least one spare pneumatic on-off valve installs a backup circuit breaker valve between the spare duct and each primary pipeline.
In one embodiment of this invention, it is also separately installed on the primary pipeline and on the spare duct primary
Pressure regulator valve and spare pressure regulator valve；The primary pressure regulator valve and the spare pressure regulator valve, which are used to adjust, flows through the primary quality stream
The pressure of the gas of amount controller and the spare mass flow controller.
In one embodiment of this invention, it is also separately installed on the primary pipeline and on the spare duct primary
Pipeline switch valve and spare duct switch valve, the primary pipeline switch valve and the spare duct switch valve are respectively used to permit
Perhaps/forbid the gas exported from the gas supply system to flow into primary pipeline and spare duct.
In one embodiment of this invention, pressure gauge is also equipped on the primary pipeline, the pressure gauge is for surveying
Amount flows out from the gas supply system and flows into the pressure of the gas of the primary pipeline.
In one embodiment of this invention, when the quantity of the primary pipeline is at least two, in the primary pipeline
Flow proportional controller is installed between the manufacture process cavity, the flow proportional controller is also connected to the spare duct；
The flow proportional controller is used to control each primary pipeline or the spare duct flows into the manufacture process cavity
The ratio of gas flow.
In addition, the present invention also provides a kind of monitoring method using above-mentioned gas flow monitoring system, the monitoring method
The following steps are included: the spare duct switch valve being mounted on spare duct is set to off closed state by (a), so that spare quality
Flow controller is in stand-by state；(b) flow control is carried out to the primary mass flow controller of the need detection in primary pipeline
Accuracy detection processed, to obtain the primary pipeline average flow rate value that need to be detected；(c) the primary quality stream that need to be detected will be connected to
Primary switch valve on the corresponding primary pipeline of amount controller is closed；(d) by be connected to the primary quality stream that need to be detected
The connected corresponding backup circuit breaker valve of the corresponding primary pipeline of amount controller is opened；(e) by spare duct switch valve and spare pneumatic
Switch valve is opened；(f) flow control accuracy detection is carried out to spare mass flow controller, to obtain spare duct average flow rate
Value；(g) the primary pipeline average flow rate that need to be detected is compared with the spare duct average flow rate value, when the two
When difference is more than a threshold value, then judge that the mass flow controller that need to be detected is abnormality.
In one embodiment of this invention, in step (g), the threshold value is 5%.
In one embodiment of this invention, after step (g), further comprise: (h) is by backup circuit breaker valve and cushion gas
Dynamic switch valve is closed；(i) the primary pneumatic on-off valve that will be turned off in step (e) is opened；(j) it will have been closed in step (c)
The primary switch valve closed is opened.
In addition, the present invention also provides a kind of master-slave switching method using above-mentioned gas flow monitoring system, the master
Standby switching method is the following steps are included: (1) closes the primary switch valve on abnormal primary pipeline；(2) will with it is described different
The connected corresponding backup circuit breaker valve of normal primary pipeline is opened；(3) the primary gas on the abnormal primary pipeline will be connected to
The signal wire disassembly of dynamic switch valve；(4) signal wire under disassembly is mounted on spare pneumatic on-off valve, is set outside one with receiving
Standby standby usage switching control instruction.
It is an advantage of the current invention that the gas flow monitoring system is standby by increasing by one in original gas flow system
With pipeline, usually the valve of spare duct keeps normally off, accurate with the precision for defaulting MFC equipment, when progress MFC equipment inspection
When survey, which can be used as standard and is referred to, and so as to reduce detection error rate, efficiently control MFC equipment
Precision.When normal pipeline has exception, spare duct can be opened in time, is delayed with reducing entire gas flow system exception
The machine time.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those skilled in the art, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of structural schematic diagram of gas flow system in the prior art.
Fig. 2 is the structural schematic diagram of the gas flow monitoring system in one embodiment of the invention.
The step of Fig. 3 is monitoring method of one of the one embodiment of the invention using gas flow monitoring system stream
Cheng Tu.
Fig. 4 is master-slave switching method of one of the one embodiment of the invention using gas flow monitoring system
Flow chart of steps.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description.Obviously, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those skilled in the art's every other implementation obtained without creative efforts
Example, shall fall within the protection scope of the present invention.
Description and claims of this specification and term " first " in above-mentioned attached drawing, " second ", " third " etc.
(if present) is to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be appreciated that this
The object of sample description is interchangeable under appropriate circumstances.In addition, term " includes " and " having " and their any deformation, meaning
Figure, which is to cover, non-exclusive includes.
In patent document, the attached drawing that is discussed herein below and for describing each embodiment of principle disclosed by the invention only
For illustrating, and should not be construed as limiting the scope of the present disclosure.Those skilled in the art will appreciate that original of the invention
Reason can be implemented in any system suitably arranged.It will be explained in illustrative embodiments, these realities be shown in the attached drawings
The example for applying mode.In addition, terminal accoding to exemplary embodiment will be described in detail with reference to the attached drawings.Identical attached drawing mark in attached drawing
Number refer to identical element.
Term used in description of the invention is only used to describe particular implementation, and is not intended to show of the invention
Concept.Unless have clearly different meanings in context, it is otherwise, used in the singular to express the table for covering plural form
It reaches.In the description of the present invention, it should be appreciated that there are this hairs for the terms meant for illustration such as " comprising ", " having " and " containing "
A possibility that feature for being disclosed in bright specification, number, step, movement or combinations thereof, and be not intended to exclude may be present or can
A possibility that adding other one or more features, number, step, movement or combinations thereof.Same reference numerals in attached drawing refer to
For same section.
The embodiment of the present invention provides a kind of gas flow monitoring system.It will be described in detail respectively below.
It is shown in Figure 2, in one embodiment of this invention, provide a kind of gas flow monitoring system.The monitoring system
System includes: at least one primary pipeline 130 and a spare duct 230.In the present embodiment, the quantity of the primary pipeline 130 is
Three, the respectively first primary pipeline 131, the second primary pipeline 132 and the primary pipeline 133 of third.
One end of the primary pipeline 130 and spare duct 230 is respectively connected to an extraneous gas supply system 190, institute
The other end for stating primary pipeline 130 and spare duct 230 is respectively connected to a manufacture process cavity 110.The gas supply system 190
The gas of different types, such as SO3, CL2, HCL, HF corrosive gas can be provided, and without being limited thereto.The manufacture process cavity
110 be manufacture process cavity commonly used in the art, is used to provide required mix for dry etch process or chemical vapor deposition process
Close gas.
One primary mass flow controller 140, at least one primary pneumatic on-off valve are installed on the primary pipeline 130
150 and primary switch valve 290, a spare mass flow controller 240 and at least one spare is installed on the spare duct 230
Pneumatic on-off valve 250 installs a backup circuit breaker valve 260 between the spare duct 230 and each primary pipeline 130.
In the present embodiment, the quantity of the primary pneumatic on-off valve 150 and the spare pneumatic on-off valve 250 on each pipeline is equal
It is two, and is separately positioned on the both ends of primary mass flow controller 140 and spare mass flow controller 240, for more
It is effectively prevented outside air and enters manufacture process cavity 110, and prevent the gas in manufacture process cavity 110 from leaking.
In the present embodiment, a primary mass flow controller 140 is installed on each primary pipeline 130, i.e., it is main first
With the first primary mass flow controller 141 is installed on pipeline 131, the second primary quality is installed on the second primary pipeline 132
Flow controller 142 installs the primary mass flow controller 143 of third on the primary pipeline 133 of third.In the first primary quality
The both ends of flow controller 141 are equipped with the first primary pneumatic on-off valve 151 and the 4th primary pneumatic on-off valve 154, second
The both ends of primary mass flow controller 142 are equipped with the second primary pneumatic on-off valve 152 and the 5th primary pneumatic on-off valve
155, the primary pneumatic on-off valve 153 of third and the 5th primary gas are installed at the both ends of the primary mass flow controller 143 of third
Dynamic switch valve 155.It is standby that first spare pneumatic on-off valve 251 and second is installed at the both ends of spare mass flow controller 240
With pneumatic on-off valve 252.In addition, the first primary switch valve 291 is installed on the first primary pipeline 131, in the second primary pipeline
Second primary switch valve 292 is installed on 132, the primary switch valve 293 of third is installed on the primary pipeline 133 of third.
A backup circuit breaker valve 260 is installed between the spare duct 230 and each primary pipeline, i.e., in spare pipe
First backup circuit breaker valve 261 is installed between road 230 and the first primary pipeline 131, in spare duct 230 and the second primary pipeline
Second backup circuit breaker valve 262 is installed, third is spare opens for installation between spare duct 230 and the primary pipeline 133 of third between 132
Close valve 263.
In the present embodiment, primary tune is separately installed on the primary pipeline 130 and also on the spare duct 230
Pressure valve 170 and spare pressure regulator valve 270.The primary pressure regulator valve 170 and the spare pressure regulator valve 270 be used to adjust flow through it is described
The pressure of the gas of primary mass flow controller 140 and the spare mass flow controller 240.
Primary 180 He of pipeline switch valve is separately installed on the primary pipeline 130 and also on the spare duct 230
Spare duct switch valve 280, the primary pipeline switch valve 180 and the spare duct switch valve 280 are respectively used to permission/taboo
The gas only exported from the gas supply system 190 flows into primary pipeline 130 and spare duct 230.
That is, being equipped with the first primary pressure regulator valve 171 and the first primary pipeline switch on the first primary pipeline 131
Valve 181.Second primary pressure regulator valve 172 and the second primary pipeline switch valve 182 are installed on the second primary pipeline 132.?
The primary pressure regulator valve 173 of third and the primary pipeline switch valve 183 of third are installed on three primary pipelines 133.
In the present embodiment, pressure gauge 160 is also equipped on the primary pipeline 130, i.e., the first primary pipeline 131 is pacified
Equipped with first pressure meter 161, the second primary pipeline 132 is equipped with second pressure meter 162, and the primary pipeline 133 of third is equipped with
Three pressure gauges 163.The pressure gauge 160 is flowed out from the gas supply system 190 and is flowed into described primary for measuring
The pressure of the gas of pipeline 130.
When the quantity of the primary pipeline 130 is at least two, in the primary pipeline 130 and the manufacture process cavity
Flow proportional controller 120 is installed, the flow proportional controller 120 is also connected to the spare duct 230 between 110.?
That is the first primary pipeline 131, the second primary pipeline 132, the primary pipeline 133 of the third and described standby
Manufacture process cavity 110 is connected to by same flow proportional controller 120 with pipeline 230.The flow proportional controller 120 is used
The ratio of the gas flow of the manufacture process cavity 110 is flowed into each primary pipeline 130 of control or the spare duct 230
Example.
The working principle of gas flow monitoring system further described below.
In the present embodiment, be by taking the first primary mass flow controller 141 of the first primary pipeline 131 as an example, certainly,
In other parts embodiment, second or the primary mass flow controller of third (142,143) or even the four, the 5th can be
Primary mass flow controller, it is without being limited thereto.
Firstly, first the spare duct switch valve 280 of spare duct 230 is closed, in this way, defaulting on the spare duct 230
Spare mass flow controller 240 precision it is accurate.
Then, the first primary mass flow controller 141 of the first primary pipeline 131 is detected.Used inspection
Survey mode is the detection method of this field routine, i.e., according to equation for ideal gases theory: PV=nRT, according to the change of chamber pressure
Change, the amount for being passed through gas can be calculated, then divided by duration of ventilation, controlled to obtain the first primary mass flow controller 141
The average flow rate of first primary pipeline 131 of system.
Then, the first primary switch valve 291 being mounted on the first primary pipeline 131 is turned off manually.Also that is, will be connected to
Primary switch valve on the corresponding primary pipeline of the primary mass flow controller that need to be detected is closed.
Then, the first backup circuit breaker valve being connected between the first primary pipeline 131 and spare duct 230 then is opened manually
261。
Then, spare duct switch valve 280 and two spare pneumatic on-off valves 250 are opened.Wherein, spare jettron
The unlatching of valve 250 is to tear the signal wire being connected on the first primary pneumatic on-off valve 151 and the 4th primary pneumatic on-off valve 154 open
It unloads, and is mounted on the first spare pneumatic on-off valve 251 and the second spare pneumatic on-off valve 252, so that first is spare
Pneumatic on-off valve 251 and the second spare pneumatic on-off valve 252 can receive the control instruction of an external equipment (not shown).
After spare duct switch valve 280 and spare pneumatic on-off valve 250 are opened, spare mass flow can be controlled
Device 240 carries out flow control accuracy detection.Calculate the amount for being passed through gas according to the variation of chamber pressure, then when divided by ventilation
Between method, to obtain the average flow rate for the spare duct 230 that spare mass flow controller 240 is controlled.
Finally, the need to detect first primary 131 average flow rate of pipeline is compared with 230 average flow rate value of spare duct
Compared with, when the difference of the two be more than a threshold value when, then judge the mass flow controller that need to be detected be abnormality.In this implementation
In example, the threshold value is 5%.When the difference of the two is more than 5%, then it is assumed that the first primary mass flow controller 141 is different
Often.Then, relevant staff can replace the first abnormal primary mass flow controller 141.
Certainly, in other parts embodiment, other primary mass flow controllers can also be detected.
Therefore, gas flow monitoring system of the present invention in original gas flow system by increasing by a spare pipe
Road, usually the switch valve of the spare duct keeps normally off, accurate with the precision for defaulting MFC equipment, when progress MFC equipment inspection
When survey, which can be used as standard and is referred to, and so as to reduce detection error rate, effectively guarantee MFC equipment
Precision.
It is shown in Figure 3, in one embodiment of this invention, system is monitored using gas flow the present invention also provides a kind of
Monitoring method, the monitoring method the following steps are included:
Step S310: the spare duct switch valve being mounted on spare duct is set to off closed state, so that spare matter
Amount flow controller is in stand-by state.
In this way, the precision for defaulting the spare mass flow controller 240 on the spare duct is accurately high.
Step S320: flow control accuracy inspection is carried out to the primary mass flow controller of the need detection in primary pipeline
It surveys, to obtain the primary pipeline average flow rate value that need to be detected.
Flow control accuracy detection mode is the detection method of this field routine, i.e., according to equation for ideal gases theory: PV
=nRT can calculate the amount for being passed through gas according to the variation of chamber pressure, then divided by duration of ventilation, need to be detected with acquisition
The first primary pipeline 131 that primary mass flow controller (such as first primary mass flow controller 141) is controlled is put down
Equal flow.
Step S330: will be primary on the corresponding primary pipeline for being connected to the primary mass flow controller that need to be detected
Switch valve is closed.
Step S340: by what is be connected to the corresponding primary pipeline for being connected to the primary mass flow controller that need to be detected
Corresponding backup circuit breaker valve is opened.
In the present embodiment, the first primary 141 institute of mass flow controller that spare duct 230 will be connected to He need to be detected
Corresponding primary pipeline 131 between the first backup circuit breaker valve 261 open.
Step S350: spare duct switch valve and spare pneumatic on-off valve are opened.
In the present embodiment, spare duct switch valve 280 and two spare pneumatic on-off valves 250 are opened.Wherein, spare
The unlatching of pneumatic on-off valve 250 will be connected on the first primary pneumatic on-off valve 151 and the 4th primary pneumatic on-off valve 154
Under signal wire disassembly, and it is mounted on the first spare pneumatic on-off valve 251 and the second spare pneumatic on-off valve 252, so that
First spare pneumatic on-off valve 251 and the second spare pneumatic on-off valve 252 can receive the control instruction of an external equipment.
Step S360: carrying out flow control accuracy detection to spare mass flow controller, average to obtain spare duct
Flow value.
The amount for being passed through gas is calculated according to the variation of chamber pressure, then divided by the method for duration of ventilation, it is spare to obtain
The average flow rate for the spare duct 230 that mass flow controller 240 is controlled.
Step S370: the primary pipeline average flow rate that need to be detected is compared with the spare duct average flow rate value
Compared with, when the difference of the two be more than a threshold value when, then judge the mass flow controller that need to be detected be abnormality.
In the present embodiment, by the need to detect first primary 131 average flow rate of pipeline and 230 average flow rate value of spare duct
It is compared, when the difference of the two is more than a threshold value, then judges that the first mass flow controller 141 that need to be detected is abnormal
State.Wherein, the threshold value is 5%.When the difference of the two is more than 5%, then it is assumed that the first primary mass flow controller 141
For exception.Then, relevant staff can replace the first abnormal primary mass flow controller 141.It should be noted
It is, if the threshold value sets excessively high, not asked yet by timely discovery when be easy to causeing the precision of mass flow controller poor
Topic.If threshold value sets too low, the high problem of rate of false alarm may cause, and relevant staff will do it unnecessary replacement
MFC equipment operation.Therefore, it is preferable for setting 5% for the threshold value.
After step s 370, further comprise: step S380 closes backup circuit breaker valve and spare pneumatic on-off valve.
Step S390 opens the primary pneumatic on-off valve being turned off in step 350.Step S3110 will have been closed in step S330
The primary switch valve closed is opened.Implementation through the above steps can restore to detecting primary mass flow controller precision
State before.
Referring to fig. 4, in another embodiment of the invention, a kind of standby usage switching side of gas flow monitoring system is provided
Method, the master-slave switching method the following steps are included:
Step S410: the primary switch valve on abnormal primary pipeline is closed.
It in the present embodiment, is so that the first primary pipeline is exception as an example.It certainly, can also be in other parts embodiment
It is other primary pipelines.It should be noted that detecting the first primary mass flow on primary pipeline 130 or primary pipeline 130
Controller 141 is that abnormal mode can be using monitoring method or detection commonly used in the art described in above-described embodiment
Method, details are not described herein.
It, can be main by first on the first abnormal primary pipeline 131 when it is abnormal for finding the first primary pipeline 131
It is closed with switch valve 291.
Step S420: the corresponding backup circuit breaker valve being connected to the abnormal primary pipeline is opened.
Then, corresponding backup circuit breaker valve is opened, backup circuit breaker valve setting is in spare duct and corresponding primary pipe
Between road.
Step S430: the signal wire for being connected to the primary pneumatic on-off valve on the abnormal primary pipeline is dismantled.
For example, in this step, the first of the first primary 141 both ends of mass flow controller will be arranged in and primary pneumatically opened
The signal wire closed on valve 151 and the 4th primary pneumatic on-off valve 154 disassembles.
Step S440: the signal wire under disassembly is mounted on spare pneumatic on-off valve, to receive the master of an external equipment
Spare switching control instruction.
It is standby that two signal lines disassembled in step S430 are mounted on the first spare pneumatic on-off valve 251 and second
With on pneumatic on-off valve 252.In this way, the first spare pneumatic on-off valve 251 and the second spare pneumatic on-off valve 252 can receive outside
The standby usage switching control of portion's equipment instructs, to open the first spare pneumatic on-off valve when receiving switching control instruction
251 and the second spare pneumatic on-off valve 252, i.e., spare duct is used from using the first primary pipeline to switch to, it is entire to guarantee
Gas flow monitors the normal work of system, also reduces the time of unit exception delay machine in this way.
Gas flow monitoring system is by increasing by a spare duct in original gas flow system, usually pipeline valve
Door keeps normally off, accurate with the precision for defaulting MFC equipment, and when carrying out the detection of MFC equipment, which can be used as mark
Standard is referred to, and when normal pipeline has exception, spare duct can be opened in time, to reduce entire gas flow system
Abnormal downtime.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (9)
1. a kind of gas flow monitors system, which is characterized in that the monitoring system includes: that at least one primary pipeline and one are spare
One end of pipeline, the primary pipeline and spare duct is respectively connected to an extraneous gas supply system, the primary pipeline and
The other end of spare duct is respectively connected to manufacture process cavity；On the primary pipeline install a primary mass flow controller,
At least one primary pneumatic on-off valve and primary switch valve install a spare mass flow controller and extremely on the spare duct
A few spare pneumatic on-off valve, installs a backup circuit breaker valve between the spare duct and each primary pipeline.
2. gas flow according to claim 1 monitors system, which is characterized in that on the primary pipeline and described standby
With being also separately installed with primary pressure regulator valve and spare pressure regulator valve on pipeline；The primary pressure regulator valve and the spare pressure regulator valve are used
The pressure of the gas of the primary mass flow controller and the spare mass flow controller is flowed through in adjusting.
3. gas flow according to claim 1 monitors system, which is characterized in that on the primary pipeline and described standby
With being also separately installed with primary pipeline switch valve and spare duct switch valve on pipeline, the primary pipeline switch valve and described standby
The gas that Enable/Disable exported from the gas supply system, which is respectively used to, with pipeline switch valve flows into primary pipeline and spare
Pipeline.
4. gas flow according to claim 1 monitors system, which is characterized in that be also equipped on the primary pipeline
Pressure gauge, the pressure gauge is for measuring the gas that the primary pipeline is flowed out and flowed into from the gas supply system
Pressure.
5. gas flow according to claim 1 monitors system, which is characterized in that when the quantity of the primary pipeline is extremely
When two few, flow proportional controller, the flow proportional control are installed between the primary pipeline and the manufacture process cavity
Device is also connected to the spare duct；The flow proportional controller is for controlling each primary pipeline or the spare pipe
Road flows into the ratio of the gas flow of the manufacture process cavity.
6. a kind of monitoring method using gas flow described in claim 1 monitoring system, which is characterized in that the monitoring side
Method the following steps are included:
(a) the spare duct switch valve being mounted on spare duct is set to off closed state, so that spare mass flow controls
Device is in stand-by state；
(b) flow control accuracy detection is carried out to the primary mass flow controller of the need detection in primary pipeline, is needed with obtaining
The primary pipeline average flow rate value of detection；
(c) the primary switch valve on the corresponding primary pipeline for being connected to the primary mass flow controller that need to be detected is closed
It closes；
(d) it corresponding spare is opened what is be connected to the corresponding primary pipeline for being connected to the primary mass flow controller that need to be detected
Valve is closed to open；
(e) spare duct switch valve and spare pneumatic on-off valve are opened；
(f) flow control accuracy detection is carried out to spare mass flow controller, to obtain spare duct average flow rate value；
(g) the primary pipeline average flow rate that need to be detected is compared with the spare duct average flow rate value, works as the two
Difference be more than a threshold value when, then judge the mass flow controller that need to be detected be abnormality.
7. monitoring method according to claim 6, which is characterized in that in step (g), the threshold value is 5%.
8. monitoring method according to claim 6, which is characterized in that after step (g), further comprise:
(h) backup circuit breaker valve and spare pneumatic on-off valve are closed；
(i) the primary pneumatic on-off valve that will be turned off in step (e) is opened；
(j) the primary switch valve that will be turned off in step (c) is opened.
9. a kind of master-slave switching method using gas flow described in claim 1 monitoring system, which is characterized in that described
Master-slave switching method the following steps are included:
(1) the primary switch valve on abnormal primary pipeline is closed；
(2) the corresponding backup circuit breaker valve being connected to the abnormal primary pipeline is opened；
(3) signal wire for being connected to the primary pneumatic on-off valve on the abnormal primary pipeline is dismantled；
(4) signal wire under disassembly is mounted on spare pneumatic on-off valve, switches control to receive the standby usage of an external equipment
System instruction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810984779.3A CN109085812A (en) | 2018-08-28 | 2018-08-28 | Gas flow monitors system and monitoring and master-slave switching method |
| PCT/CN2019/078369 WO2020042594A1 (en) | 2018-08-28 | 2019-03-15 | Gas flow monitoring system and method, and method for switching between main and backup pipes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810984779.3A CN109085812A (en) | 2018-08-28 | 2018-08-28 | Gas flow monitors system and monitoring and master-slave switching method |
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| CN109085812A true CN109085812A (en) | 2018-12-25 |
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| CN201810984779.3A Pending CN109085812A (en) | 2018-08-28 | 2018-08-28 | Gas flow monitors system and monitoring and master-slave switching method |
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| CN (1) | CN109085812A (en) |
| WO (1) | WO2020042594A1 (en) |
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| WO2020042594A1 (en) * | 2018-08-28 | 2020-03-05 | 武汉华星光电技术有限公司 | Gas flow monitoring system and method, and method for switching between main and backup pipes |
| CN113496803A (en) * | 2020-04-07 | 2021-10-12 | 沈阳和新套管有限公司 | All-weather high-precision insulating gas on-line monitoring converter transformer bushing and monitoring method thereof |
| CN113655817A (en) * | 2021-10-20 | 2021-11-16 | 广东奥迪威传感科技股份有限公司 | Flow control method, device, equipment and storage medium |
| WO2024113765A1 (en) * | 2022-11-29 | 2024-06-06 | 上海新漫传感科技有限公司 | Detector protection system and method and computer-readable medium |
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