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CN108957201A - Electronic component testing device - Google Patents

Electronic component testing device Download PDF

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Publication number
CN108957201A
CN108957201A CN201710356017.4A CN201710356017A CN108957201A CN 108957201 A CN108957201 A CN 108957201A CN 201710356017 A CN201710356017 A CN 201710356017A CN 108957201 A CN108957201 A CN 108957201A
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CN
China
Prior art keywords
jacking
electronic component
translation
guide
testing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201710356017.4A
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Chinese (zh)
Inventor
林源记
谢志宏
林世芳
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Arktek Co ltd
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Arktek Co ltd
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Application filed by Arktek Co ltd filed Critical Arktek Co ltd
Priority to CN201710356017.4A priority Critical patent/CN108957201A/en
Publication of CN108957201A publication Critical patent/CN108957201A/en
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The invention relates to an electronic element testing device, which comprises a machine body, a testing module, a bearing table and a lifting guide piece. The test module is arranged on the machine body. The bearing table can be arranged on the machine body along a first direction in a displacement mode relative to the test module, and the bearing table is provided with a matching part. The lifting guide piece can be movably arranged on the machine body along a second direction perpendicular to the first direction, the lifting guide piece is provided with a guide part, the guide part is provided with a first end and a second end, the first end and the second end are positioned on different positions of the first direction, and when the guide part is overlapped with the matching part in the second direction, the matching part is matched with and guided by the guide part and moves along the first direction.

Description

电子元件测试装置Electronic component testing device

技术领域technical field

本发明与电子元件测试装置有关。The present invention relates to electronic component testing devices.

背景技术Background technique

按,在半导体产业的电子元件制程中,电子元件在出厂前必须经过测试手续确认其机能正常。一般的测试机台具有测试模块、取置模块、承载治具及驱动源。取置模块能将电子元件取置于承载治具上,承载治具供置放电子元件,测试模块对电子元件进行测试。其测试时,驱动源驱动承载治具垂直顶升并向测试模块位移靠近以与测试模块的测试端子接触而进行测试。然,一般的测试模块的承载治具仅能置放单一颗、单一种类的电子元件,取置模块每次也仅能取置单一颗电子元件,测试效率不彰。此外,当需测试不同的电子元件时,还必须更换不同的承载治具才能承载不同型态的电子元件,使用上的便利性有待改善。Press, in the manufacturing process of electronic components in the semiconductor industry, electronic components must go through testing procedures to confirm their normal functions before leaving the factory. A general test machine has a test module, a pick-and-place module, a carrying fixture and a driving source. The pick-and-place module can pick and place the electronic components on the carrying jig, which is used for placing the electronic components, and the test module tests the electronic components. During the test, the driving source drives the carrying fixture to lift up vertically and move towards the test module so as to contact the test terminal of the test module for testing. However, the load-carrying fixture of a general test module can only place a single electronic component of a single type, and the pick-and-place module can only pick and place a single electronic component each time, so the test efficiency is not good. In addition, when different electronic components need to be tested, different carrying fixtures must be replaced to carry different types of electronic components, and the convenience in use needs to be improved.

此外,测试模块与电子元件接触时必须具有特定的接触力以确保测试的稳定性。因此,一般的测试机台多是配置垂直延伸的驱动源,驱动源对承载治具施以垂直方向的驱动力,使承载治具产生垂直方向的位移动作。通过驱动源的驱动力驱动承载治具沿与其驱动力量方向相同之方向接触测试模块。由此可见,在此配置下,驱动源为驱动承载治具升降因而必须沿垂直方向延伸。如此一来,测试机台于垂直方向上的体积无法减缩,导致测试机台也难以做垂直方向上层叠使用,因而无法作多测试区的配置,导致测试效率难以有效提升。In addition, the test module must have a specific contact force when in contact with the electronic components to ensure the stability of the test. Therefore, a general test machine is mostly configured with a vertically extending driving source, which applies a vertical driving force to the carrying fixture, causing the carrying fixture to produce a vertical displacement action. The driving force of the driving source drives the carrying fixture to contact the test module in the same direction as the driving force. It can be seen that, under this configuration, the driving source is to drive the carrying jig up and down, so it must extend along the vertical direction. As a result, the volume of the test machine in the vertical direction cannot be reduced, making it difficult to stack the test machines in the vertical direction, thus making it impossible to configure multiple test areas, making it difficult to effectively improve the test efficiency.

发明内容Contents of the invention

本发明实施例提供一种电子元件测试装置,其主要目的是改善一般测试机台难以满足多测试区的配置,无法有效提升测试效率的缺失。An embodiment of the present invention provides an electronic component testing device, the main purpose of which is to improve the lack of common testing machines that are difficult to meet the configuration of multiple testing areas and cannot effectively improve testing efficiency.

为达前述目的,本发明实施例为一种电子元件测试装置,包含机体、测试模块、承载台及升降导引件。测试模块设置于机体。承载台可相对测试模块沿第一方向位移地设置于机体上,且承载台具有配合部。升降导引件可沿垂直于第一方向的第二方向移动地设置于机体,升降导引件具有导引部,导引部具有第一端及第二端,第一端及第二端位于第一方向的不同位置上,当导引部于第二方向上与配合部重叠时,配合部相对于导引部配合导引而沿第一方向位移。To achieve the aforementioned purpose, an embodiment of the present invention is an electronic component testing device, which includes a body, a testing module, a carrying platform, and a lifting guide. The test module is arranged on the body. The bearing platform can be displaceably arranged on the body relative to the test module along the first direction, and the bearing platform has a matching part. The lifting guide is arranged on the machine body so as to be movable along a second direction perpendicular to the first direction. The lifting guide has a guide portion, the guide portion has a first end and a second end, and the first end and the second end are located at At different positions in the first direction, when the guide part overlaps with the matching part in the second direction, the matching part is guided relative to the guide part and displaced along the first direction.

本实施例通过沿第二方向位移的升降导引件带动承载台沿第一方向位移,不须增加第一方向上的空间设置带动承载台位移的部件,据此可以大幅降低电子元件测试装置于第一方向上的体积占据,而能使电子元件测试装置能于第一方向上重叠使用,满足多测试区的配置,并能在相同的空间下大幅提高测试效率。In this embodiment, the lifting guide that moves along the second direction drives the loading table to move along the first direction, and there is no need to increase the space in the first direction to install components that drive the loading table displacement, thereby greatly reducing the time required for the electronic component testing device. The volume occupied in the first direction enables the electronic component testing device to be overlapped and used in the first direction, satisfying the configuration of multiple test areas, and greatly improving the test efficiency in the same space.

附图说明Description of drawings

图1为本发明电子元件测试装置一实施例的立体外观图。FIG. 1 is a three-dimensional appearance view of an embodiment of an electronic component testing device of the present invention.

图2为本发明电子元件测试装置一实施例的另一视角立体外观图。FIG. 2 is another perspective perspective view of an embodiment of the electronic component testing device of the present invention.

图3为本发明电子元件测试装置一实施例的立体剖视图。3 is a three-dimensional cross-sectional view of an embodiment of the electronic component testing device of the present invention.

图4为接续图3例的动作示意图。FIG. 4 is a schematic diagram of operations following the example in FIG. 3 .

图5为本发明电子元件测试装置一实施例的承载台改变位置的立体外观图。FIG. 5 is a three-dimensional appearance view of the changing position of the carrying platform of an embodiment of the electronic component testing device of the present invention.

图6为图5例的侧视图。Fig. 6 is a side view of the example in Fig. 5 .

图7为图5例的立体剖视图。FIG. 7 is a perspective cross-sectional view of the example in FIG. 5 .

图8为接续图7的动作示意图。FIG. 8 is a schematic diagram of operations continued from FIG. 7 .

图9为图8实施例状态的立体外观图。Fig. 9 is a three-dimensional appearance view of the state of the embodiment in Fig. 8 .

图10为图9例的外观侧视图。Fig. 10 is a side view of the appearance of the example in Fig. 9 .

其中附图标记为:Wherein reference sign is:

10机体 11第一承架10 body 11 first support frame

12第二承架 20测试主机12 second support frame 20 test host

21操控面板 30测试模块21 control panel 30 test module

31测试面 40承载台31 test surface 40 carrying platform

41基板 411导柱41 Substrate 411 Guide post

42升降板 43侧板42 lifting plate 43 side plate

44配合部 44A第一配合部44 Fitting part 44A First fitting part

44B第二配合部 50升降导引件44B Second matching part 50 Lifting guide

51导引部 51A第一导引部51 guide part 51A first guide part

51B第二导引部 511平移段51B second guide part 511 translation section

511A第一平移段 511B第二平移段511A first translation section 511B second translation section

512顶升段 512A第一顶升段512 jacking section 512A first jacking section

512B第二顶升段 60第一平移导引单元512B second jacking section 60 first translation guide unit

61第一滑轨 62第一滑块61 The first slide rail 62 The first slider

63第一驱动源 631第一缸体63 The first driving source 631 The first cylinder block

632第一伸缩杆 70第二平移导引单元632 the first telescopic rod 70 the second translation guide unit

71第二滑轨 72第二滑块71 Second slide rail 72 Second slider

73第二驱动源 731第二缸体73 The second drive source 731 The second cylinder block

732第二伸缩杆 D1第一方向732 Second telescopic rod D1 First direction

D2第二方向 T托盘D2 second direction T tray

E1第一端 E2第二端E1 first end E2 second end

C连结板 θ顶升角C connecting plate θ jacking angle

θ1第一顶升角 θ2第二顶升角θ1 first jacking angle θ2 second jacking angle

具体实施方式Detailed ways

请配合参考图1,图1为本发明电子元件测试装置的一实施例的立体外观图。于一实施例中,电子元件测试装置包含机体10、测试模块30、承载台40以及升降导引件50。测试模块30、承载台40以及升降导引件50设置于机体10。承载台40用以承载托盘(Tray)T并可相对测试模块30沿第一方向D1位移。升降导引件50沿垂直第一方向D1的第二方向D2移动,并带动承载台40搭载托盘T沿第一方向D1位移以能靠近测试模块30受测试模块30测试。藉此,通过升降导引件50与承载台40的不同位移方向配置,降低整体装置于第一方向D1上的高度,进而同时降低整体体积的占据,提高配置电子元件测试装置的空间使用率。Please refer to FIG. 1 . FIG. 1 is a three-dimensional appearance view of an embodiment of an electronic component testing device of the present invention. In one embodiment, the electronic component testing device includes a body 10 , a testing module 30 , a carrying platform 40 and a lifting guide 50 . The test module 30 , the carrying platform 40 and the lifting guide 50 are disposed on the machine body 10 . The carrying platform 40 is used for carrying the tray (Tray) T and can be displaced along the first direction D1 relative to the testing module 30 . The lifting guide 50 moves along the second direction D2 perpendicular to the first direction D1, and drives the carrier table 40 to displace the tray T along the first direction D1 so as to be close to the test module 30 and be tested by the test module 30 . Thereby, the height of the whole device in the first direction D1 is reduced by disposing the lifting guide 50 and the carrying table 40 in different displacement directions, thereby reducing the overall volume occupation and improving the space utilization rate for disposing the electronic component testing device.

参阅图1,于一实施例中,机体10具有第一承架11及第二承架12,第一承架11与第二承架12位于第二方向D2上的不同位置上。Referring to FIG. 1 , in one embodiment, the machine body 10 has a first bracket 11 and a second bracket 12 , and the first bracket 11 and the second bracket 12 are located at different positions in the second direction D2.

参阅图1及图2,于一实施例中,电子元件测试装置更包含测试主机20,测试主机20可以设置于机体10的第一承架11上并与测试模块30电性连接,也可以是独立于机体10外与测试模块30电性连接。测试主机20更可以包含操控面板21,操控面板21设置于第一承架11远离第二承架12的一端以供操作者操控测试主机20。1 and 2, in one embodiment, the electronic component testing device further includes a test host 20, the test host 20 can be arranged on the first bracket 11 of the body 10 and electrically connected with the test module 30, or can be It is independent from the body 10 and is electrically connected to the test module 30 . The test host 20 can further include a control panel 21 , which is disposed on the end of the first rack 11 away from the second rack 12 for the operator to control the test host 20 .

再请配合参阅图1及图3,测试模块30具有一测试面31并设置于机体10的第二承架12上,测试模块30与测试主机20电性连接,以使测试主机20可以控制测试模块30进行测试并接收测试结果。测试模块30的测试面31具有多个测试端子,托盘T内容置多个电子元件,测试模块30以测试面31的测试端子接触托盘T内的电子元件进行测试,并能在测试后将电子元件的测试结果传送至测试主机20。Please refer to Fig. 1 and Fig. 3 again, the test module 30 has a test surface 31 and is arranged on the second support frame 12 of the body 10, the test module 30 is electrically connected with the test host 20, so that the test host 20 can control the test Module 30 conducts the test and receives the test results. The test surface 31 of the test module 30 has a plurality of test terminals, and a plurality of electronic components are housed in the tray T, and the test module 30 is tested with the test terminals of the test surface 31 contacting the electronic components in the tray T, and the electronic components can be placed after the test. The test results are sent to the test host 20.

接着请配合参阅图3,承载台40用以搭载托盘T以沿第一方向D1位移靠近测试模块30受测试模块30测试。且承载台40也可以同时可沿第二方向D2位移地设置于机体10上。藉此使承载台40可位移至与测试模块30在第二方向D2上不同的位置上。如此一来,承载台40可以为移至使托盘T的位置完全脱离测试模块30的位置,以便于托盘T的取置。Next, please refer to FIG. 3 , the carrying platform 40 is used to carry the tray T to be displaced along the first direction D1 to approach the testing module 30 to be tested by the testing module 30 . Moreover, the carrying platform 40 can also be displaceably disposed on the body 10 along the second direction D2 at the same time. In this way, the carrying platform 40 can be displaced to a position different from that of the testing module 30 in the second direction D2. In this way, the carrying platform 40 can be moved to a position where the position of the tray T is completely separated from the testing module 30 , so that the tray T can be removed and placed.

而当欲进行测试时,承载台40位移至与测试模块30于第二方向D2相同的位置上,如图4至6。于此,承载台40具有配合部44。升降导引件50可沿垂直第一方向D1的第二方向D2移动地设置于机体10,升降导引件50具有导引部51。当升降导引件50沿第二方向D2位移时,承载台40的配合部44受导引部51导引而沿第一方向D1位移。And when the test is to be performed, the carrying platform 40 is moved to the same position as the test module 30 in the second direction D2, as shown in FIGS. 4 to 6 . Here, the carrying platform 40 has a matching portion 44 . The lifting guide 50 is movably disposed on the machine body 10 along the second direction D2 perpendicular to the first direction D1 , and the lifting guide 50 has a guiding portion 51 . When the lifting guide 50 is displaced along the second direction D2 , the matching portion 44 of the carrying platform 40 is guided by the guiding portion 51 to be displaced along the first direction D1 .

于一实施例中,配合参阅图4至图6,承载台40设置于与测试模块30相同的第二方向D2位置上,但不以此为限。承载台40包含基板41、升降板42、二侧板43以及配合部44。基板41上设置有导柱411,导柱411沿第一方向D1延伸。升降板42可移动地穿套于导柱411并能沿第一方向D1滑移。二侧板43分别固定设置于升降板42的两侧,以与升降板42同步升降。配合部44设置于侧板43上,以与侧板43同步动作。于一实施例中,配合部44为凸轮。于此,承载台40的升降板42与侧板43及配合部44同步相对测试模块30沿第一方向D1位移。于一实施例中,二侧板43上皆设置有配合部44。In one embodiment, referring to FIG. 4 to FIG. 6 , the carrying platform 40 is disposed at the same position in the second direction D2 as the testing module 30 , but not limited thereto. The carrying platform 40 includes a base plate 41 , a lifting plate 42 , two side plates 43 and a matching portion 44 . A guide post 411 is disposed on the substrate 41 , and the guide post 411 extends along the first direction D1. The lifting plate 42 is movably sheathed on the guide post 411 and can slide along the first direction D1. The two side plates 43 are respectively fixed on the two sides of the lifting plate 42 to be lifted and lowered synchronously with the lifting plate 42 . The matching portion 44 is disposed on the side plate 43 to act synchronously with the side plate 43 . In one embodiment, the matching portion 44 is a cam. Here, the lifting plate 42 of the loading platform 40 is displaced along the first direction D1 with respect to the testing module 30 synchronously with the side plate 43 and the matching portion 44 . In one embodiment, the matching portions 44 are disposed on the two side plates 43 .

再请配合参阅图6,升降导引件50可沿第二方向D2移动地设置于机体10,升降导引件50沿第二方向D2移动以导引承载台40沿第一方向D1位移靠近或远离测试模块30。于一实施例中,升降导引件50具有导引部51,导引部51为连续延伸的导槽。进一步地,导引部51具有第一端E1及第二端E2,第一端E1与第二端E2位于不同的第一方向D1位置上,且第一端E1与第二端E2也位于不同的第二方向D2位置上。当升降导引件50沿第二方向D2位移,且位移至升降导引件50的导引部51于第二方向D2上的位置与配合部44重叠时,升降导引件50的导引部51由第一端E1率先接触配合部44,使配合部44容置入导引部51以受到导引部51的导引。Please refer to FIG. 6 again, the lifting guide 50 is arranged on the machine body 10 so as to be movable along the second direction D2, and the lifting guide 50 moves along the second direction D2 to guide the carrier platform 40 to move close to or along the first direction D1. away from the test module 30 . In one embodiment, the lifting guide 50 has a guide portion 51 , and the guide portion 51 is a continuously extending guide groove. Further, the guide part 51 has a first end E1 and a second end E2, the first end E1 and the second end E2 are located at different positions in the first direction D1, and the first end E1 and the second end E2 are also located at different positions. on the position of the second direction D2. When the lifting guide 50 is displaced along the second direction D2, and is displaced to the position where the guiding portion 51 of the lifting guide 50 overlaps with the matching portion 44 in the second direction D2, the guiding portion of the lifting guide 50 51 first contacts the matching portion 44 from the first end E1 , so that the matching portion 44 is accommodated into the guiding portion 51 to be guided by the guiding portion 51 .

于此,配合参阅图8至图10,当升降导引件50持续沿第二方向D2位移时,升降导引件50的导引部51持续改变相对配合部44的位置,且导引部51相对配合部44的位置系由第一端E1逐渐向第二端E2改变。当导引部51以由第一端E1位置相对配合部44改变成为以第二端E2位置相对配合部44时,配合部44受到第一端E1及第二端E2于第一方向D1上的位置改变而对应改变位置,且使得配合部44连同侧板43及升降板42改变第一方向D1上的位置并逐渐靠近测试模块30以受测试模块30进行测试。Here, with reference to FIG. 8 to FIG. 10 , when the lifting guide 50 continues to move along the second direction D2, the guiding portion 51 of the lifting guide 50 continues to change its position relative to the matching portion 44, and the guiding portion 51 The position of the relative matching portion 44 gradually changes from the first end E1 to the second end E2. When the guide portion 51 changes from the position of the first end E1 relative to the mating portion 44 to the position of the second end E2 relative to the mating portion 44, the mating portion 44 is supported by the first end E1 and the second end E2 in the first direction D1. The position is changed correspondingly, and the matching portion 44 together with the side plate 43 and the lifting plate 42 changes its position in the first direction D1 and gradually approaches the testing module 30 so that the tested module 30 can be tested.

参阅图6及图10,进一步地,于一实施例中,导引部51至少包含顶升段512,顶升段512的两端位于不同的第一方向D1位置上,且顶升段512与第二方向D2之间具有顶升角θ。导引部51也可以包含多个顶升段512依序连接,当导引部51包含多个顶升段512时,各顶升段512分别与第二方向D2之间具有顶升角θ,且越靠近测试模块30于第一方向D1上位置的顶升段512的顶升角θ越小。藉此使承载台40能以低速高推力的状态接触测试模块30。Referring to Fig. 6 and Fig. 10, further, in one embodiment, the guide part 51 includes at least a jacking section 512, the two ends of the jacking section 512 are located at different positions in the first direction D1, and the jacking section 512 and There is a jacking angle θ between the second directions D2. The guide part 51 may also include a plurality of jacking sections 512 connected in sequence. When the guide part 51 includes a plurality of jacking sections 512, each jacking section 512 has a jacking angle θ with the second direction D2 respectively, And the closer the position of the test module 30 in the first direction D1 is to the smaller the jacking angle θ of the jacking section 512 is. In this way, the carrying platform 40 can contact the testing module 30 at a low-speed and high-thrust state.

于一实施例中,参阅图6及图10,导引部51可以更包含平移段511,导引部51可以由平移段511及顶升段512搭配组合构成。于此,导引部51包含依序衔接的第一平移段511A、第一顶升段512A、第二顶升段512B以及第二平移段511B。第一平移段511A沿第二方向D2延伸,第一顶升段512A与第二方向D2具有第一顶升角θ1,第二顶升段512B与第二方向D2具有第二顶升角θ2,第二平移段511B沿第二方向D2延伸。第一顶升角θ1大于第二顶升角θ2。第一平移段511A、第一顶升段512A、第二顶升段512B以及第二平移段511B于第二方向D2上不重叠。In an embodiment, referring to FIG. 6 and FIG. 10 , the guide part 51 may further include a translation section 511 , and the guide part 51 may be composed of a translation section 511 and a jacking section 512 in combination. Here, the guiding part 51 includes a first translation section 511A, a first jacking section 512A, a second jacking section 512B, and a second translation section 511B connected in sequence. The first translation section 511A extends along the second direction D2, the first jacking section 512A has a first jacking angle θ1 with the second direction D2, and the second jacking section 512B has a second jacking angle θ2 with the second direction D2, The second translation segment 511B extends along the second direction D2. The first jacking angle θ1 is greater than the second jacking angle θ2. The first translation section 511A, the first lifting section 512A, the second lifting section 512B and the second translation section 511B do not overlap in the second direction D2.

藉此,参阅图6及图10,配合部44对应容置于第一平移段511A,且对升降导引件50施以第二方向D2的力量时,由于施予升降导引件50的力量方向与第一平移段511A的延伸方向吻合,第一平移段511A对于升降导引件50产生的阻力最小,意即,施加于升降导引件50的第二方向D2的力量耗能少,因此能快速且确实地带动升降导引件50沿第二方向D2位移,据此快速导正承载台40位于正确的受导引位置。Thus, referring to FIG. 6 and FIG. 10 , the matching portion 44 is correspondingly accommodated in the first translation section 511A, and when a force in the second direction D2 is applied to the lifting guide 50 , due to the force applied to the lifting guide 50 The direction coincides with the extension direction of the first translation section 511A, and the first translation section 511A produces the least resistance to the lifting guide 50, that is, the force in the second direction D2 applied to the lifting guide 50 consumes less energy, so The lifting guide 50 can be quickly and reliably driven to move along the second direction D2, and accordingly the carrying platform 40 can be quickly aligned at the correct guided position.

接着,当配合部44由平移段511进入第一顶升段512A时,第一顶升段512A与第二方向D2具有顶升角θ的型态使得配合部44被导引而能改变于第一方向D1上的位置。而由于第一顶升段512A相较于第二顶升段512B及第二平移段511B与第二方向D2具有较大的顶升角θ,因此,相较之下,在升降导引件50沿第二方向D2位移相同的距离前提下,配合部44于第一顶升段512A中能被导引而于第一方向D1上产生较大的顶升距离。因此,承载台40的配合部44于第一顶升段512A的导引范围内能快速地带动承载台40顶升靠近测试模块30。Next, when the matching portion 44 enters the first jacking section 512A from the translation section 511, the first jacking section 512A and the second direction D2 have a jacking angle θ so that the matching section 44 is guided to change to the first jacking section 512A. A position on D1 in one direction. And because the first jacking section 512A has a larger jacking angle θ with the second direction D2 than the second jacking section 512B and the second translation section 511B, therefore, in comparison, the lifting guide 50 Under the premise of the same displacement along the second direction D2, the matching portion 44 can be guided in the first lifting section 512A to generate a larger lifting distance in the first direction D1. Therefore, within the guiding range of the first lifting section 512A, the matching portion 44 of the carrying platform 40 can quickly drive the carrying platform 40 to be lifted close to the testing module 30 .

接着,当配合部44由第一顶升段512A进入第二顶升段512B时,由于第二顶升角θ2小于第一顶升角θ1,因此,第二顶升段512B带动承载台40向测试模块30位移的速度降低。藉此使承载台40上的托盘T降低速度以接触测试模块30,于此同时,也由于第二顶升角θ2的减小,施加于升降导引件50的力量相对于配合部44位于第一顶升段512A时所受的阻力降低,因此又可以提高承载台40向测试模块30接触时的推力,使承载台40以慢速、高推力的状态接触测试模块30,以确保托盘T内的电子元件可以确实地与测试模块30的测试端子接触测试,提高测试的稳定性。Next, when the matching portion 44 enters the second lifting section 512B from the first lifting section 512A, since the second lifting angle θ2 is smaller than the first lifting angle θ1, the second lifting section 512B drives the carrying platform 40 to The speed at which the test module 30 is displaced is reduced. In this way, the speed of the tray T on the loading platform 40 is reduced to contact the test module 30. At the same time, due to the reduction of the second jacking angle θ2, the force applied to the lifting guide 50 is located at the first position relative to the matching portion 44. The resistance suffered by the first lifting section 512A is reduced, so the thrust force when the bearing platform 40 contacts the test module 30 can be increased, so that the bearing platform 40 contacts the test module 30 at a slow speed and with a high thrust, so as to ensure that the inner space of the tray T is stable. The electronic components can be reliably tested in contact with the test terminals of the test module 30, which improves the stability of the test.

接着,参阅图8至图10,配合部44由第二顶升段512B进入第二平移段511B,当配合部44进入第二平移段511B时,第二平移段511B沿第二方向D1延伸的结构使得承载台40保持于相同的高度,而配合部44则能远离第二顶升段51B,确保配合部44不轻易返回第二顶升段51B,而能使承载台40更稳定地处在受测位置。Next, referring to Fig. 8 to Fig. 10, the matching part 44 enters the second translation section 511B from the second jacking section 512B, when the matching part 44 enters the second translation section 511B, the second translation section 511B extends along the second direction D1 The structure keeps the carrying platform 40 at the same height, while the matching portion 44 can be kept away from the second jacking section 51B, ensuring that the matching portion 44 will not easily return to the second jacking section 51B, so that the carrying platform 40 can be positioned more stably. Tested location.

由上述说明可知,于本发明电子元件测试装置的一实施例中,带动搭载托盘T的承载台40沿第一方向D1位移的机构不须于第一方向D1上延伸配置,而可以沿垂直第一方向D1的第二方向D2配置。如此一来,本实施例的整体机构不受限于承载台40的位移动作而增加整体机构于第一方向D1上的高度。藉此提高本实施例电子元件测试装置于空间上配置使用的自由度。As can be seen from the above description, in one embodiment of the electronic component testing device of the present invention, the mechanism that drives the carrier platform 40 carrying the tray T to move along the first direction D1 does not need to be extended in the first direction D1, but can be arranged along the vertical second direction. The one direction D1 is arranged in the second direction D2. In this way, the overall mechanism of this embodiment is not limited to the displacement action of the carrying platform 40 and the height of the overall mechanism in the first direction D1 is increased. In this way, the degree of freedom in spatial configuration and use of the electronic component testing device of this embodiment is improved.

进一步地,为便于承载台40上托盘T的取放,请配合参阅图3及图4,更包含第一平移导引单元60。第一平移导引单元60设置于机体10,承载台40连接于第一平移导引单元60并能沿第二方向D2位移。于一实施例中,第一平移导引单元60包含第一滑轨61及第一滑块62,第一滑轨61固定设置于承载台40上并沿第二方向D2延伸,第一滑轨61可移动地穿套于第一滑块62,且第一滑块62固定于机体10上。Further, in order to facilitate the picking and placing of the tray T on the carrier platform 40 , please refer to FIG. 3 and FIG. 4 , which further includes a first translation guiding unit 60 . The first translation guiding unit 60 is disposed on the machine body 10 , and the carrying platform 40 is connected to the first translation guiding unit 60 and can be displaced along the second direction D2 . In one embodiment, the first translation guiding unit 60 includes a first slide rail 61 and a first slide block 62, the first slide rail 61 is fixedly arranged on the carrying platform 40 and extends along the second direction D2, the first slide rail 61 is movably fitted on the first sliding block 62 , and the first sliding block 62 is fixed on the machine body 10 .

藉此,承载台40能通过第一滑轨61与第一滑块62的配合导引而沿第二方向D2位移至与测试模块30在第二方向D2上不重叠的位置。如此一来,承载台40于第一方向D1上也不与测试模块30重叠,则承载台40的第一方向D1上成为开放的状态,托盘T便能由第一方向D1置于承载台40上,据此提高取置托盘T于承载台40上的便利性。Thereby, the supporting platform 40 can be displaced along the second direction D2 to a position not overlapping with the testing module 30 in the second direction D2 through the cooperative guidance of the first sliding rail 61 and the first sliding block 62 . In this way, the carrying platform 40 does not overlap with the test module 30 in the first direction D1, and the carrying platform 40 becomes an open state in the first direction D1, and the tray T can be placed on the carrying platform 40 from the first direction D1. Therefore, the convenience of taking and placing the tray T on the carrier platform 40 is improved accordingly.

更进一步地,请配合参阅图3及图4,为提高承载台40的位移精准度及效率,以满足高效率的测试,第一平移导引单元60更可以包含第一驱动源63,第一驱动源63可以是压缸,但不以此为限。在第一驱动源63为压缸时,第一驱动源63包含第一缸体631及第一伸缩杆632。第一缸体631固定设置于机体10,第一伸缩杆632可沿第二方向D2伸缩位移地设置于第一缸体631内,第一伸缩杆632的一端伸出第一缸体631并固定于基板41。藉此,当第一缸体631运作时,第一缸体631的第一伸缩杆632沿第二方向D2位移伸缩,于此,第一伸缩杆632便能带动基板41及其上的升降板42、侧板43、配合部44沿第二方向D2移动。此外,第一驱动源63可与测试主机20控制连接,如此一来,测试主机20便能控制第一驱动源63达成精准且自动化的运作。Furthermore, please refer to FIG. 3 and FIG. 4 together. In order to improve the displacement accuracy and efficiency of the carrying platform 40 to meet high-efficiency testing, the first translation guide unit 60 may further include a first driving source 63, the first The driving source 63 may be a cylinder, but not limited thereto. When the first driving source 63 is a cylinder, the first driving source 63 includes a first cylinder body 631 and a first telescopic rod 632 . The first cylinder body 631 is fixedly arranged on the machine body 10, and the first telescopic rod 632 is arranged in the first cylinder body 631 so as to be telescopically displaceable along the second direction D2. One end of the first telescopic rod 632 extends out of the first cylinder body 631 and is fixed. on the substrate 41 . In this way, when the first cylinder 631 is in operation, the first telescopic rod 632 of the first cylinder 631 moves and expands along the second direction D2. Here, the first telescopic rod 632 can drive the base plate 41 and the lifting plate on it. 42. The side plate 43 and the matching portion 44 move along the second direction D2. In addition, the first driving source 63 can be controlled and connected to the test host 20, so that the test host 20 can control the first drive source 63 to achieve precise and automatic operation.

第一驱动源63可以沿第二方向D2延伸地设置于机体10上,藉此,驱动第一平移导引单元60的第一驱动源63于第一方向D1上占据的空间不会大于承载台40本身占据的空间。意即,第一平移导引单元60不因设置第一驱动源63而增加于第一方向D1上所占据的空间。The first driving source 63 can be extended on the body 10 along the second direction D2, whereby the space occupied by the first driving source 63 for driving the first translation guide unit 60 in the first direction D1 will not be larger than that of the carrying platform. 40 space occupied by itself. That is, the space occupied by the first translation guiding unit 60 in the first direction D1 is not increased due to the arrangement of the first driving source 63 .

此外,为了提高升降导引件50的运作便利性及顺畅性,请配合参阅图7及图8,更包含第二平移导引单元70。第二平移导引单元70设置于机体10,升降导引件50连接于第二平移导引单元70并能沿第二方向D2位移。于一实施例中,第二平移导引单元70包含第二滑轨71及第二滑块72,第二滑轨71沿第二方向D2延伸,第二滑块72可移动地套覆于第二滑轨71,且升降导引件50连接于第二滑块72。In addition, in order to improve the convenience and smoothness of the operation of the lifting guide 50 , please refer to FIG. 7 and FIG. 8 , which further includes a second translation guide unit 70 . The second translation guiding unit 70 is disposed on the machine body 10 , and the lifting guide 50 is connected to the second translation guiding unit 70 and can be displaced along the second direction D2. In one embodiment, the second translation guiding unit 70 includes a second sliding rail 71 and a second sliding block 72, the second sliding rail 71 extends along the second direction D2, and the second sliding block 72 is movably covered on the second sliding block 72. Two sliding rails 71 , and the lifting guide 50 is connected to the second sliding block 72 .

藉此,升降导引件50能通过第二滑块72与第二滑轨71的配合沿第二方向D2位移,提高升降导引件50的位移顺畅度及效率。更进一步地,第二平移导引单元70更可以包含第二驱动源73,第二驱动源73可以是压缸,但不以此为限。Thereby, the lifting guide 50 can be displaced along the second direction D2 through the cooperation of the second sliding block 72 and the second sliding rail 71 , thereby improving the smoothness and efficiency of the displacement of the lifting guide 50 . Furthermore, the second translation guiding unit 70 may further include a second driving source 73, and the second driving source 73 may be a cylinder, but not limited thereto.

配合参阅图7及图8,在第二驱动源73为压缸时,第二驱动源73可与测试主机20控制连接,如此一来,测试主机20便能控制第二驱动源73达成精准且自动化的运作。在第二驱动源73为压缸时,第二驱动源73包含第二缸体731及第二伸缩杆732。且为配合承载台40的二侧板43的配合部44,承载台40的两侧分别设置升降导引件50,且二升降导引件50之间以一连结板C连结。于此,第二缸体731固定设置于机体10,第二伸缩杆732可沿第二方向D2伸缩位移地设置于第二缸体731内,第二伸缩杆732的一端伸出第二缸体731并固定于连结板C。藉此,当第二缸体731运作时,第二缸体731的第二伸缩杆732沿第二方向D2位移伸缩,于此,第二伸缩杆732便能带动连结板C及二升降导引件50沿第二方向D2移动。With reference to Fig. 7 and Fig. 8, when the second driving source 73 is a pressure cylinder, the second driving source 73 can be connected with the control of the test host 20, so that the test host 20 can control the second drive source 73 to achieve precise and accurate Automated operation. When the second driving source 73 is a cylinder, the second driving source 73 includes a second cylinder body 731 and a second telescopic rod 732 . And in order to cooperate with the matching portion 44 of the two side plates 43 of the carrying platform 40, the two sides of the carrying platform 40 are respectively provided with lifting guides 50, and the two lifting guides 50 are connected by a connecting plate C. Here, the second cylinder body 731 is fixedly arranged on the machine body 10, and the second telescopic rod 732 is disposed in the second cylinder body 731 so as to be telescopically displaceable along the second direction D2, and one end of the second telescopic rod 732 extends out of the second cylinder body 731 and fixed on the connecting plate C. In this way, when the second cylinder 731 is in operation, the second telescopic rod 732 of the second cylinder 731 moves and expands along the second direction D2. Here, the second telescopic rod 732 can drive the connecting plate C and the two lifting guides The member 50 moves along the second direction D2.

同样地,参阅图7及图8,第二驱动源73系沿第二方向D2延伸地设置于机体10上。藉此,驱动第二平移导引单元70的第二驱动源73于第一方向D1上占据的空间不会大于承载台40本身占据的空间。意即,第二平移导引单元70不因设置驱动源73而增加于第一方向D1上所占据的空间。如此一来,本实施例电子元件测试装置能尽可能地减小于第一方向D1上所占据的空间,藉此,在多个电子元件测试装置同时使用时,便能将电子元件测试装置于第一方向D1上重叠配置,而能在最小的空间需求前提下提供更多的电子元件测试装置,提高测试效率。Similarly, referring to FIG. 7 and FIG. 8 , the second driving source 73 is disposed on the machine body 10 extending along the second direction D2 . Thereby, the space occupied by the second driving source 73 driving the second translation guiding unit 70 in the first direction D1 will not be larger than the space occupied by the carrying platform 40 itself. That is, the space occupied by the second translation guiding unit 70 in the first direction D1 is not increased due to the arrangement of the driving source 73 . In this way, the electronic component testing device of this embodiment can reduce the space occupied in the first direction D1 as much as possible, so that when multiple electronic component testing devices are used at the same time, the electronic component testing device can be placed on the The overlapping arrangement in the first direction D1 can provide more electronic component testing devices under the premise of minimum space requirement, and improve the testing efficiency.

进一步地,前述第一驱动源63及第二驱动源73皆不以压缸为限。通过齿轮、齿条的配合带动,通过螺杆、螺帽的配合带动,或是通过皮带与马达的配合带动,都是本领域具有通常知识者可以预期的其他实施态样。Further, neither the first driving source 63 nor the second driving source 73 is limited to the cylinder. Driven through the cooperation of gears and racks, through the cooperation of screws and nuts, or through the cooperation of belts and motors, are all other implementations that can be expected by those skilled in the art.

请配合参阅图6及图10,于一实施例中,承载台40的各侧板43上分别设置第一配合部44A及第二配合部44B,第一配合部44A与第二配合部44B于第一方向D1及第二方向D2上皆不重叠。于此,升降导引件50具有第一导引部51A及第二导引部51B,第二导引部51B的平移段511的范围于第二方向D2上与第一导引部51A的全部重叠。如此一来,第一配合部44A进入第一导引部51A的时间点与第二配合部44B进入第二导引部51B的时间点具有时间差。于此例中,在第一配合部44A尚未进入第一导引部51A前,第二配合部44B就先进入第二导引部51B的平移段511。如此一来,第二配合部44B即能配合第二导引部51B的平移段511使承载台40位于正确的受导引位置,并能在升降导引件50持续位移的状况下,确保第一配合部44A能顺畅且正确地进入第一导引部51A,最后,通过第一配合部44A及第二配合部44B分别容置于第一导引部51A及第二导引部51B,而能确实地带动承载台40位移。Please refer to FIG. 6 and FIG. 10 , in one embodiment, a first matching portion 44A and a second matching portion 44B are respectively provided on each side plate 43 of the carrying platform 40, and the first matching portion 44A and the second matching portion 44B are placed on Neither the first direction D1 nor the second direction D2 overlap. Here, the lifting guide 50 has a first guide portion 51A and a second guide portion 51B, and the range of the translation section 511 of the second guide portion 51B is in the second direction D2 with the whole of the first guide portion 51A. overlapping. In this way, there is a time difference between the time point when the first matching portion 44A enters the first guiding portion 51A and the time point when the second matching portion 44B enters the second guiding portion 51B. In this example, before the first matching portion 44A enters the first guiding portion 51A, the second matching portion 44B first enters the translation section 511 of the second guiding portion 51B. In this way, the second matching part 44B can cooperate with the translation section 511 of the second guiding part 51B to make the carrying platform 40 be located at the correct guided position, and can ensure that the second matching part 44B is in the condition of continuous displacement of the lifting guide part 50 . A fitting part 44A can enter the first guiding part 51A smoothly and correctly, and finally, the first fitting part 44A and the second fitting part 44B are accommodated in the first guiding part 51A and the second guiding part 51B respectively, and It can definitely drive the displacement of the carrying platform 40 .

综合以上,上述电子元件测试装置的实施例中,承载台40系承载托盘T以带动托盘T位移至受测位置进行测试,承载台40的每次位移是搭载托盘T中的多个电子元件,电子元件测试装置于每次的测试工作可以一次测试多个电子元件,能大幅提升测试效率。Based on the above, in the embodiment of the above-mentioned electronic component testing device, the carrying platform 40 is carrying the tray T to drive the displacement of the tray T to the tested position for testing. Each displacement of the carrying platform 40 is to carry a plurality of electronic components in the tray T, The electronic component testing device can test multiple electronic components at one time in each test work, which can greatly improve the test efficiency.

此外,当电子组件的型态不同时,不须更换承载台40,而只要选用具有相同外型的托盘T搭载电子组件,承载台40便能顺利搭载托盘T以带动托盘T完成测试,藉此提高使用的便利性。In addition, when the types of electronic components are different, there is no need to replace the carrying platform 40, but as long as the electronic components are loaded on the tray T with the same appearance, the carrying platform 40 can successfully carry the tray T to drive the tray T to complete the test, thereby Improve the convenience of use.

再者,电子元件测试装置中带动承载台40沿第一方向D1位移的驱动位移方向系沿垂直第一方向D1的第二方向D2,藉此使电子元件测试装置能减缩于第一方向D1上的体积,而使得电子元件测试装置得以于第一方向D1上堆栈配置,提高在相同的空间里能配置的电子元件测试装置数量,并进而提高单位空间的测试量。Furthermore, in the electronic component testing device, the driving displacement direction for driving the carrying table 40 to displace along the first direction D1 is along the second direction D2 perpendicular to the first direction D1, so that the electronic component testing device can be reduced in the first direction D1 The volume allows the electronic component testing devices to be stacked in the first direction D1, increasing the number of electronic component testing devices that can be configured in the same space, and further increasing the testing capacity per unit space.

除此之外,在运作的稳定性方面来说,由于承载台40系沿第一方向D1位移地接触测试模块30以受测试模块30测试,在承载台40与测试模块30接触时必须承受第一方向D1上的力量,而并非沿第一方向D1延伸的导引部51则可以在承载台40受到第一方向D1上的力量时提供支撑及缓冲的力量,确保承载台40可以在测试时保持稳定。In addition, in terms of operational stability, since the bearing platform 40 contacts the testing module 30 in a displacement manner along the first direction D1 to be tested by the testing module 30, when the bearing platform 40 is in contact with the testing module 30, it must bear the first The force in one direction D1, instead of the guide part 51 extending along the first direction D1, can provide support and cushioning force when the carrying platform 40 is subjected to the force in the first direction D1, so as to ensure that the carrying platform 40 can be tested keep it steady.

虽然本发明已以实施例公开如上,然其并非用以限定本发明,任何所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作些许的修改与变化。因此,只要这些修改与变化是在后附的申请专利范围及与其同等的范围内,本发明也将涵盖这些修改与变化。Although the present invention has been disclosed above with the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some modifications and changes without departing from the spirit and scope of the present invention. Therefore, as long as these modifications and changes are within the scope of the appended patent application and its equivalent scope, the present invention will also cover these modifications and changes.

Claims (11)

1.一种电子元件测试装置,其特征在于,包含:1. An electronic component testing device, characterized in that, comprising: 一机体;a body; 一测试模块,设置于该机体;A test module is set on the body; 一承载台,可相对该测试模块沿一第一方向位移地设置于该机体上,且该承载台具有一配合部;以及a bearing platform, which can be displaceably arranged on the machine body along a first direction relative to the test module, and the bearing platform has a matching portion; and 一升降导引件,可沿垂直于该第一方向的一第二方向移动地设置于该机体,该升降导引件具有一导引部,该导引部具有一第一端及一第二端,该第一端及该第二端位于该第一方向的不同位置上,当该导引部于该第二方向上与该配合部重叠时,该配合部相对于该导引部配合导引而沿该第一方向位移。An elevating guide part is arranged on the machine body so as to move along a second direction perpendicular to the first direction, the elevating guide part has a guide part, and the guide part has a first end and a second end end, the first end and the second end are located at different positions in the first direction, when the guide part overlaps with the matching part in the second direction, the matching part guides with respect to the guide part. resulting in a displacement along the first direction. 2.如权利要求1所述的电子元件测试装置,其特征在于,更包含一测试主机,设置于该机体,该测试主机与该测试模块电性连接。2 . The electronic component testing device as claimed in claim 1 , further comprising a test host disposed on the body, and the test host is electrically connected to the test module. 3 . 3.如权利要求1所述的电子元件测试装置,其特征在于,更包含一第一平移导引单元,设置于该机体,该承载台连接于该第一平移导引单元并能沿该第二方向位移。3. The electronic component testing device according to claim 1, further comprising a first translation guide unit disposed on the body, the carrying platform is connected to the first translation guide unit and can move along the first translation guide unit displacement in two directions. 4.如权利要求1所述的电子元件测试装置,其特征在于,更包含一第二平移导引单元,设置于该机体,该升降导引件连接于该第二平移导引单元并能沿该第二方向位移。4. The electronic component testing device according to claim 1, further comprising a second translation guide unit disposed on the body, the lifting guide connected to the second translation guide unit and capable of moving along the The second direction is displaced. 5.如权利要求4所述的电子元件测试装置,其特征在于,更包含一第二驱动源,设置于该机体上,该第二驱动源连接该第二平移导引单元以驱动该第二平移导引单元带动该升降导引件沿该第二方向位移。5. The electronic component testing device as claimed in claim 4, further comprising a second driving source disposed on the body, the second driving source connected to the second translation guide unit to drive the second The translation guiding unit drives the lifting guide to displace along the second direction. 6.如权利要求1所述的电子元件测试装置,其特征在于,该配合部为凸轮,该导引部为槽导。6. The electronic component testing device according to claim 1, wherein the matching portion is a cam, and the guiding portion is a groove guide. 7.如权利要求1所述的电子元件测试装置,其特征在于,该导引部包含一顶升段,该顶升段倾斜延伸并与该第二方向具有一顶升角。7 . The electronic component testing device as claimed in claim 1 , wherein the guiding part comprises a jacking section, and the jacking section extends obliquely and has a jacking angle with the second direction. 8.如权利要求7所述的电子元件测试装置,其特征在于,该导引部包含多个顶升段,该多个顶升段位于不同的第一方向位置上,且该多个顶升段分别与该第二方向具有一顶升角,越靠近测试模块于第一方向上位置的顶升段的顶升角越小。8. The electronic component testing device according to claim 7, wherein the guide part comprises a plurality of jacking sections, the plurality of jacking sections are located at different positions in the first direction, and the plurality of jacking sections The segments respectively have a jacking angle with the second direction, and the jacking angles of the jacking segments closer to the position of the test module in the first direction are smaller. 9.如权利要求7所述的电子元件测试装置,其特征在于,该导引部更包含一平移段,该平移段连接该顶升段,该平移段沿该第二方向延伸,且该平移段与该顶升段位于不同的第二方向位置上,该第一端位于该平移段,该第二端位于该顶升段。9. The electronic component testing device according to claim 7, wherein the guiding part further comprises a translation section, the translation section is connected to the jacking section, the translation section extends along the second direction, and the translation section The segment and the jacking segment are located at different positions in the second direction, the first end is located at the translation segment, and the second end is located at the jacking segment. 10.如权利要求9所述的电子元件测试装置,其特征在于,该配合部包含一第一配合部及一第二配合部,该升降导引件包含一第一导引部及一第二导引部,当该升降导引件于该第二方向上与该承载台重叠时,该第一配合部容置于该第一导引部内,该第二配合部容置于该第二导引部内。10. The electronic component testing device according to claim 9, wherein the matching portion includes a first matching portion and a second matching portion, and the lifting guide includes a first guiding portion and a second guiding portion guide part, when the lifting guide overlaps with the carrying platform in the second direction, the first matching part is accommodated in the first guiding part, and the second matching part is accommodated in the second guiding part In the Ministry of Citation. 11.如权利要求10所述的电子元件测试装置,其中,该第二导引部的平移段的范围于该第二方向上与该第一导引部的全部重叠。11 . The electronic component testing device as claimed in claim 10 , wherein the range of the translation section of the second guiding part overlaps with the whole of the first guiding part in the second direction.
CN201710356017.4A 2017-05-19 2017-05-19 Electronic component testing device Withdrawn CN108957201A (en)

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US6307388B1 (en) * 2000-02-23 2001-10-23 Unisys Corporation Electromechanical apparatus for testing IC chips using first and second sets of substrates which are pressed together
JP2001264386A (en) * 2000-03-16 2001-09-26 Nippon Eng Kk Loader/unloader device for burn-in board
TW200632346A (en) * 2005-02-15 2006-09-16 Advantest Corp Burn-in apparatus
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