CN108873168A - A kind of silicon substrate optical waveguide polarization mode splitter - Google Patents
A kind of silicon substrate optical waveguide polarization mode splitter Download PDFInfo
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- CN108873168A CN108873168A CN201810797172.4A CN201810797172A CN108873168A CN 108873168 A CN108873168 A CN 108873168A CN 201810797172 A CN201810797172 A CN 201810797172A CN 108873168 A CN108873168 A CN 108873168A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 117
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 51
- 239000010703 silicon Substances 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 title claims abstract description 51
- 230000010287 polarization Effects 0.000 title claims abstract description 37
- 230000010363 phase shift Effects 0.000 claims abstract description 10
- 230000008878 coupling Effects 0.000 claims abstract description 9
- 238000010168 coupling process Methods 0.000 claims abstract description 9
- 238000005859 coupling reaction Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 230000008033 biological extinction Effects 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000012538 light obscuration Methods 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000012792 core layer Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/1209—Multimode
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention discloses a kind of silicon substrate optical waveguide polarization mode splitter, solve the problems, such as that existing apparatus extinction ratio is poor, power consumption is high, loss is big.The separator includes：First, second multi-mode interference coupler, silicon substrate optical waveguide；First multi-mode interference coupler exports the first optical signal, the second optical signal for receiving the optical signal comprising TE and TM mode after light splitting；Silicon substrate optical waveguide includes the first, second waveguide arm, has wide waveguide in first wave guide arm；For first optical signal through first wave guide arm, wide waveguide is used for TE mode, TM modal cutoff, and output TE mode and TM modal phase difference are 180 degree phase shift light；Second optical signal exports reference optical signal through second waveguide arm；Second multi-mode interference coupler exports TE mode light, TM mode light by two output ports for coupling to the phase shift light, reference optical signal respectively.The present invention realizes pure passive structures design, and structure is simply easy to produce.
Description
Technical field
The present invention relates to optical communication field more particularly to a kind of silicon substrate optical waveguide polarization mode splitters.
Background technique
Based on polarization separation multiplexing coherent detection technology in next-generation optical communication network with good application prospect,
The scheme that orthogonal polarization mode separation may be implemented at present is broadly divided into two classes：PBS prism based on coating technique and pass through electricity
The MZI of light modulation changes the separation of refractive index implementation pattern.TE/TM modal cutoff is realized by PBS prism, the disadvantage is that the body of prism
Product is larger, it is difficult to it is used in integrated optical device, meanwhile, PBS prism is higher to the angle requirement of incident ray, and no person can cause
Polarization extinction ratio is deteriorated.MZI based on Electro-optical Modulation can effectively realize TE/ by changing the refractive index of one of brachium
TM modal cutoff, but will increase power consumption, the complexity of lifting system using Electro-optical Modulation, while requiring electric field strength control
Accurately, the service life of device can be reduced by frequently changing waveguide crystal structure.
Summary of the invention
The present invention provides a kind of silicon substrate optical waveguide polarization mode splitter, and solution existing apparatus extinction ratio is poor, power consumption is high, damage
Consume big problem.
A kind of silicon substrate optical waveguide polarization mode splitter includes：First multi-mode interference coupler, the coupling of the second multiple-mode interfence
Device, silicon substrate optical waveguide；First multi-mode interference coupler exports after light splitting for receiving the optical signal comprising TE and TM mode
First optical signal, the second optical signal；The silicon substrate optical waveguide includes the first, second waveguide arm, has width in the first wave guide arm
Waveguide；First optical signal is used for TE mode, TM modal cutoff, exports TE mould through the first wave guide arm, the width waveguide
Formula and TM modal phase difference are the phase shift light of 180 degree to the input port of second multi-mode interference coupler；Second light
Signal exports another input port of reference optical signal to second multi-mode interference coupler through the second waveguide arm；It is described
Second multi-mode interference coupler is distinguished defeated for coupling to the phase shift light, reference optical signal by two output ports
TE mode light, TM mode light out.
Further, the length of the wide waveguide is：
Wherein, L is the length of the wide waveguide, and N=1,2,3 ... ..., λ are the wavelength of the optical signal, and B is TE/TM mould
Birefringent difference of the formula in the silicon substrate optical waveguide.
Preferably, the length of the wide waveguide is 3400~3450 microns.
As the embodiment that advanced optimizes of the present invention, on the basis of wide waveguide length, it is preferable that described first, the
The width of two multi-mode interference couplers is 39~43 microns, and length is 3500~3650 microns, first, second waveguide arm
Length is 6500 microns.
It is further preferred that the width of the wide waveguide is not less than 17 microns.
Further, the first wave guide arm is to having discontinuity structure, the second waveguide at the wide waveguide transition
It include the discontinuity structure on arm.
Beneficial effect of the present invention includes：The silicon substrate optical waveguide polarization mode splitter that the present invention realizes, utilizes silica-based waveguides
The birefringent feature of TE/TM mode realize the modal cutoff of TE mode, TM mode in conjunction with MZI mode-interference function, have compared with
Good separating effect, extinction ratio are high, while described device is that pure passive structures design, low in energy consumption, structure simply, be easily achieved,
Waveguide cross-sectional dimensions and optical fiber are close, and the coupling loss between optical fiber and chip is smaller.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes a part of the invention, this hair
Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings：
Fig. 1 is a kind of silicon substrate optical waveguide polarization mode splitter embodiment；
Fig. 2 (a) is a kind of optical field distribution embodiment of silicon substrate optical waveguide polarization mode splitter TE mode input light；
Fig. 2 (b) is a kind of optical field distribution embodiment of silicon substrate optical waveguide polarization mode splitter TM mode input light；
Fig. 3 (a) is a kind of silicon substrate optical waveguide polarization mode splitter TE mode Output optical power embodiment；
Fig. 3 (b) is a kind of silicon substrate optical waveguide polarization mode splitter TM mode Output optical power embodiment.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with the specific embodiment of the invention and
Technical solution of the present invention is clearly and completely described in corresponding attached drawing.Obviously, described embodiment is only the present invention one
Section Example, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
Herein described " silicon substrate optical waveguide ", refers to the SiO 2 waveguide prepared on silica-base material.
The technical solution provided below in conjunction with attached drawing, each embodiment that the present invention will be described in detail.
Fig. 1 is a kind of silicon substrate optical waveguide polarization mode splitter embodiment, and embodiment provided by the invention utilizes silicon substrate wave
The birefringent feature for the TE/TM mode led realizes TE/TM modal cutoff in conjunction with the function of MZI mode-interference.A kind of silicon substrate light
Wave-guide polarization mode splitter includes：First multi-mode interference coupler 11, the second multi-mode interference coupler 12, silicon substrate optical waveguide
13, first wave guide arm 15, second waveguide arm 14.
First multi-mode interference coupler exports the first light for receiving the optical signal comprising TE and TM mode after light splitting
Signal, the second optical signal；The silicon substrate optical waveguide includes the first, second waveguide arm, has wide waveguide in the first wave guide arm；
First optical signal is used for TE mode, TM modal cutoff, exports TE mode and TM through the first wave guide arm, the width waveguide
Modal phase difference be 180 degree phase shift light to second multi-mode interference coupler input port；The second optical signal warp
The second waveguide arm exports another input port of reference optical signal to second multi-mode interference coupler；More than described second
Mode interference coupler exports TE mould by two output ports for coupling to the phase shift light, reference optical signal respectively
Formula light, TM mode light.
It should be noted that first optical signal and the second optical signal phase differ 90 degree, amplitude is identical, i.e., described the
One multi-mode interference coupler is three-dB coupler；Second multi-mode interference coupler is three-dB coupler.
Further, the length of the wide waveguide is：
B=Bg+Bs
Bs=(σx-σy)*(C1-C2)
Bg=nTM0-nTE0
Wherein, L is the length of the wide waveguide, and N=1,2,3 ... ..., λ are the wavelength of the optical signal, and B is TE/TM mould
Birefringent difference of the formula in the silicon substrate optical waveguide, Bs are that the birefringent poor, Bg as caused by stress is as caused by geometry
Birefringent difference, σx、σyRespectively optical waveguide is in stress horizontal, in vertical direction, C1、C2The respectively photoelasticity of silica-base material
Constant, nTE0、nTM0The optical waveguide effective refractive index of the TE mode, TM mode that are respectively determined by the optical waveguide geometry.
Preferably, the width of the wide waveguide is not less than 17um (micron).The selection of the width duct width will consider TE/
The birefringence effect of TM mode, according to theory analysis and test, in the range of the wide 0~20um of duct width, with wave
The increase of width is led, birefringent difference of the TE/TM mode in silicon substrate optical waveguide increases, and gradually gentle, the TE/TM mould
Birefringent difference of the formula in silicon substrate optical waveguide is basically unchanged in the wide duct width from 17um or more, it is contemplated that design and production
Tolerance, therefore select wide duct width 19um.
It should be noted that the width of the width waveguide is also possible to other numerical value (such as 20um) for being greater than 17um, or take
Any number of 17~20um range.
It should be noted that it is described width waveguide to TE mode, TM mode carry out modal cutoff the reason of be due to TE mode,
TM mode has birefringence effect in wide waveguide.
Preferably, the width of first, second multi-mode interference coupler be 39~43um, length be 3500~
3650um, the length of first, second waveguide arm are 6500um, and the length of the wide waveguide is 3400~3450um.
Further, the wide waveguide has discontinuity, includes to the wide waveguide transition in the first wave guide arm
Discontinuity structure.The discontinuity of the width waveguide is that the wide waveguide left and right edges have triangular structure, second wave
Also comprising the discontinuity structure in the wide waveguide in guide arm, being presented as on the second waveguide arm has described wide waveguide or so
The diamond structure of two triangular structures in edge splicing.
Silicon substrate optical waveguide polarization mode splitter provided in an embodiment of the present invention is using silicon substrate optical waveguide in different width
Under the conditions of, since waveguide core layer is under the geometry of cross section and stress, TE/TM mode has different effective refractive indexs
The characteristics of, it is optimized by duct width to the one of brachium of MZI and length, to realize TE/TM mode
Separation.The embodiment of the present invention has preferable modal cutoff effect, and is designed using pure passive structures, low in energy consumption, structure is simple,
It is easily achieved, waveguide cross-sectional dimensions and optical fiber are close, and the coupling loss between optical fiber and chip is smaller.
Fig. 2 (a) is a kind of optical field distribution embodiment of silicon substrate optical waveguide polarization mode splitter TE mode input light, this hair
Bright embodiment provides a kind of TE mode input light of silicon substrate optical waveguide polarization mode splitter.
A kind of silicon substrate optical waveguide polarization mode splitter includes：First multi-mode interference coupler, the coupling of the second multiple-mode interfence
Device, silicon substrate optical waveguide, first wave guide arm, second waveguide arm.
First multi-mode interference coupler receives the optical signal comprising TE mode by first input port, defeated after light splitting
First optical signal, the second optical signal out；First optical signal is coupled through the first wave guide arm to second multiple-mode interfence
The input port of device；Second optical signal is through the second waveguide arm to another input of second multi-mode interference coupler
Port；After second multi-mode interference coupler couples input light, the TE mode is exported by the first output port
Light.
Fig. 2 (b) is a kind of optical field distribution embodiment of silicon substrate optical waveguide polarization mode splitter TM mode input light, this hair
Bright embodiment provides a kind of optical field distribution of the TM mode input light of silicon substrate optical waveguide polarization mode splitter.
First multi-mode interference coupler receives the optical signal comprising TM mode by first input port, defeated after light splitting
First optical signal, the second optical signal out；First optical signal is coupled through the first wave guide arm to second multiple-mode interfence
The input port of device；Second optical signal is through the second waveguide arm to another input of second multi-mode interference coupler
Port；After second multi-mode interference coupler couples input light, the TM mode is exported by second output terminal mouth
Light.
It should be noted that the optical signal comprising TE mode, TM mode of input can pass through first multimode
The first input port of interference coupler inputs, can also be defeated by the second input port of first multi-mode interference coupler
Enter, is not specially limited here.
Fig. 3 (a) is a kind of silicon substrate optical waveguide polarization mode splitter TE mode Output optical power embodiment, and the present invention is implemented
Example provides a kind of extinction ratio of silicon substrate optical waveguide polarization mode splitter TE mode output light as a result, Fig. 3 (b) is a kind of silicon substrate light
Wave-guide polarization mode splitter TM mode Output optical power embodiment, the embodiment of the present invention provide a kind of silicon substrate optical waveguide polarization mould
The extinction ratio result of formula separator TM mode output light.
First multi-mode interference coupler exports the first light for receiving the optical signal comprising TE and TM mode after light splitting
Signal, the second optical signal；The silicon substrate optical waveguide includes the first, second waveguide arm, has wide waveguide in the first wave guide arm；
First optical signal is used for TE mode, TM modal cutoff, exports TE mode and TM through the first wave guide arm, the width waveguide
Modal phase difference be 180 degree phase shift light to second multi-mode interference coupler input port；The second optical signal warp
The second waveguide arm exports another input port of reference optical signal to second multi-mode interference coupler；More than described second
Mode interference coupler exports TE mould by two output ports for coupling to the phase shift light, reference optical signal respectively
Formula light, TM mode light.
When the wavelength of optical signal described in C-band is 1.52um, 1.53m, 1.54um, 1.55um, 1.56um, 1.57um, press
According to input light TE mode light power normalization, the TE mode light of the first output port output of second multi-mode interference coupler
Power be each about 0dB, the power of the TE mode light of the second output terminal mouth output of two multi-mode interference coupler is -30
It between~-20dB, and is reduced as the wavelength of optical signal increases, the polarised light extinction ratio of the TE modal cutoff is greater than
20dB。
When the wavelength of optical signal described in C-band is 1.52um, 1.53m, 1.54um, 1.55um, 1.56um, 1.57um, press
According to input light TM mode light power normalization, the TM mode light of the second output terminal mouth output of second multi-mode interference coupler
Power be each about 0dB, the power of the TM mode light of the first output port output of two multi-mode interference coupler is -30
It between~-20dB, and is reduced as the wavelength of optical signal increases, the polarised light extinction ratio of the TM modal cutoff is greater than
20dB。
Silicon substrate optical waveguide polarization mode splitter provided in an embodiment of the present invention, utilizes silica-based waveguides, i.e. silicon-on-insulator
TE/TM mode birefringent feature, realize TE/TM modal cutoff, polarization extinction ratio be greater than 20dB.
It should be noted that the terms "include", "comprise" or its any other variant are intended to the packet of nonexcludability
Contain, so that the process, method, commodity or the equipment that include a series of elements not only include those elements, but also including
Other elements that are not explicitly listed, or further include for this process, method, commodity or the intrinsic element of equipment.
In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including the element
Process, method, there is also other identical elements in commodity or equipment.
The above description is only an embodiment of the present invention, is not intended to restrict the invention.For those skilled in the art
For, the invention may be variously modified and varied.All any modifications made within the spirit and principles of the present invention are equal
Replacement, improvement etc., should be included within scope of the presently claimed invention.
Claims (8)
1. a kind of silicon substrate optical waveguide polarization mode splitter, which is characterized in that include：First multi-mode interference coupler, more than second
Mode interference coupler, silicon substrate optical waveguide；
First multi-mode interference coupler exports the first light letter for receiving the optical signal comprising TE and TM mode after light splitting
Number, the second optical signal；
The silicon substrate optical waveguide includes the first, second waveguide arm, has wide waveguide in the first wave guide arm；
First optical signal is used for TE mode, TM modal cutoff, exports TE mode through the first wave guide arm, the width waveguide
With TM modal phase difference be 180 degree phase shift light to second multi-mode interference coupler input port；
Second optical signal is another through second waveguide arm output reference optical signal to second multi-mode interference coupler
One input port；
Second multi-mode interference coupler passes through two output ends for coupling to the phase shift light, reference optical signal
Mouth exports TE mode light, TM mode light respectively.
2. silicon substrate optical waveguide polarization mode splitter as described in claim 1, which is characterized in that the length of the width waveguide
For：
B=Bg+Bs
Bs=(σx-σy)*(C1-C2)
Bg=nTM0-nTE0
Wherein, L is the length of the wide waveguide, and N=1,2,3 ... ..., λ are the wavelength of the optical signal, and B is that TE/TM mode exists
Birefringent difference in the silicon substrate optical waveguide, Bs are that the birefringent poor, Bg as caused by stress is two-fold as caused by geometry
Penetrate difference, σx、σyRespectively optical waveguide is in stress horizontal, in vertical direction, C1、C2The respectively photoelastic constant of silica-base material,
nTE0、nTM0The optical waveguide effective refractive index of the TE mode, TM mode that are respectively determined by the optical waveguide geometry.
3. silicon substrate optical waveguide polarization mode splitter as described in claim 1, which is characterized in that it is described width waveguide length be
3400~3450 microns.
4. the silicon substrate optical waveguide polarization mode splitter as described in claims 1 to 3 any one, which is characterized in that described
One, the width of the second multi-mode interference coupler is 39~43 microns, and length is 3500~3650 microns.
5. the silicon substrate optical waveguide polarization mode splitter as described in claims 1 to 3 any one, which is characterized in that described
One, the length of second waveguide arm is 6500 microns.
6. the silicon substrate optical waveguide polarization mode splitter as described in claims 1 to 3 any one, which is characterized in that the width
The width of waveguide is not less than 17 microns.
7. the silicon substrate optical waveguide polarization mode splitter as described in claims 1 to 3 any one, which is characterized in that described
There is discontinuity structure at wide waveguide transition, includes the discontinuity structure on the second waveguide arm.
8. the silicon substrate optical waveguide polarization mode splitter as described in claims 1 to 3 any one, which is characterized in that the width
The width of waveguide is 19 microns.
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| CN201810797172.4A CN108873168A (en) | 2018-07-19 | 2018-07-19 | A kind of silicon substrate optical waveguide polarization mode splitter |
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| CN201810797172.4A CN108873168A (en) | 2018-07-19 | 2018-07-19 | A kind of silicon substrate optical waveguide polarization mode splitter |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110376753A (en) * | 2019-07-04 | 2019-10-25 | 浙江大学 | A kind of high-performance polarization beam apparatus and its design method |
| CN112558221A (en) * | 2020-12-08 | 2021-03-26 | 北京量子信息科学研究院 | Method, device and system for improving polarization extinction ratio |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110376753A (en) * | 2019-07-04 | 2019-10-25 | 浙江大学 | A kind of high-performance polarization beam apparatus and its design method |
| CN112558221A (en) * | 2020-12-08 | 2021-03-26 | 北京量子信息科学研究院 | Method, device and system for improving polarization extinction ratio |
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