CN108728803B - Circulating pulse scanning axial magnetic field generating device - Google Patents
Circulating pulse scanning axial magnetic field generating device Download PDFInfo
- Publication number
- CN108728803B CN108728803B CN201810917140.3A CN201810917140A CN108728803B CN 108728803 B CN108728803 B CN 108728803B CN 201810917140 A CN201810917140 A CN 201810917140A CN 108728803 B CN108728803 B CN 108728803B
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- China
- Prior art keywords
- armature
- shaft
- magnetic field
- solenoids
- generating device
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- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 9
- 239000012535 impurity Substances 0.000 abstract description 4
- 230000002452 interceptive effect Effects 0.000 abstract description 2
- 238000003860 storage Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
The invention discloses a circulating pulse scanning axial magnetic field generating device which comprises a power supply assembly, a motor, a speed reducer, an armature assembly and magnetic poles, wherein an output shaft of the motor is connected with an input shaft of the speed reducer, the armature assembly comprises an armature body and an armature shaft, the output shaft of the speed reducer is connected with the armature shaft, a plurality of first electrodes are circumferentially arranged on the armature body, a second electrode is arranged on the armature shaft, the magnetic poles comprise a bracket and a plurality of solenoids, a plurality of accommodating grooves are circumferentially arranged on the bracket, the solenoids are arranged in the accommodating grooves, the armature shaft is electrically connected with the power supply assembly, the first electrodes are electrically connected with one ends of the solenoids, the other ends of the solenoids are electrically connected with the power supply assembly, and the first electrodes are in one-to-one correspondence with the solenoids. The arc source magnetic field generated by the invention has no external impurity force interfering the axial movement force of the charged particles, so that the movement of the arc spots is improved, and the plated film is finer.
Description
Technical Field
The invention relates to the technical field of magnetic field generating equipment, in particular to a circulating pulse scanning axial magnetic field generating device.
Background
Arc vacuum ion plating machines have been widely used in industrial production as vacuum coating production equipment. The arc vacuum ion plating machine is generally provided with a magnetic field generating device which can generate a vacuum arc source magnetic field so as to improve the movement track and speed of an arc spot.
However, the electromagnetic fields generated in the conventional magnetic field generating device are provided with radial or circumferential magnetic fields, which can lose axial ion flux, arc cathodes manufactured in the magnetic fields can lead to the loss of deposition rate of a coating film reaching 30% -50%, and the decrease of the binding force of the film, and the phenomenon is caused by the loss of etching and bombardment heating and the reduction of the energy of the film forming due to the decrease of the ion arrival ratio.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art, and provides a circulating pulse scanning axial magnetic field generating device which generates an arc source magnetic field without external impurity force interfering with the axial movement force of charged particles, so that the movement of arc spots is improved, and a plated film layer is finer.
In order to solve the technical problems, the technical scheme of the invention is as follows:
the utility model provides a circulation pulse scans axial magnetic field generating device, includes power supply unit, motor, speed reducer, armature subassembly and magnetic pole, the output shaft of motor is connected with the input shaft of speed reducer, the armature subassembly includes armature body and armature shaft, the armature shaft rotates and sets up in the armature body, the output shaft of speed reducer is connected with the armature shaft, a plurality of first electrodes are installed to armature body circumference, be equipped with a second electrode on the armature shaft, the second electrode rotates along with the armature shaft, the magnetic pole includes a support and a plurality of solenoid, a plurality of storage tanks have been seted up to the support circumference, the solenoid is installed in the storage tank, just the axis of storage tank and the mutual coincide of solenoid's axis, solenoid and storage tank are one-to-one, the armature shaft is connected with power supply unit electricity, first electrode is connected with the one end electricity of solenoid through the wire, the other end and the power supply unit electricity of solenoid are connected, first electrode and solenoid are one-to-one.
As a preferred scheme, the armature assembly further comprises an insulating sleeve, a shaft sleeve and two insulating clamping plates, wherein the insulating sleeve and the shaft sleeve are arranged between the armature shaft and the armature body, the insulating sleeve is sleeved outside the armature shaft, the shaft sleeve is sleeved outside the insulating sleeve, a clamping groove is formed in the side walls of the insulating sleeve and the shaft sleeve, the insulating clamping plates and the second electrode are arranged in the clamping groove, and the second electrode is arranged between the two insulating clamping plates.
As a preferable scheme, the armature assembly further comprises an armature shell and a bearing, wherein the bearing is sleeved at two ends of the armature shaft, the armature shell comprises a shell and end covers, the shell is sleeved outside the armature body, the end covers are covered at two sides of the shell, the end covers are sleeved outside the bearing, and an insulating sleeve is arranged between the bearing and the end covers.
As a preferable scheme, the circulating pulse scanning axial magnetic field generating device further comprises a ring force spring, and the ring force spring is arranged between the shell and the armature body.
As a preferable scheme, the circulating pulse scanning axial magnetic field generating device further comprises an end insulating sleeve, wherein the end insulating sleeve is sleeved between the armature body and the shaft sleeve, one side surface of the end insulating sleeve abuts against the inner side surface of the end cover, and the other side surface of the end insulating sleeve abuts against the outer side surface of the first electrode.
As a preferable scheme, the power supply assembly comprises a power supply, a transformer, an ammeter and a voltmeter, wherein one end of the ammeter is electrically connected with the positive electrode of the power supply, the other end of the ammeter is electrically connected with one end of the transformer, the other end of the transformer is electrically connected with the armature assembly/magnetic pole, the voltmeter is connected with the ammeter and the transformer in parallel, and the negative electrode of the power supply is electrically connected with the magnetic pole/armature assembly.
Preferably, the first electrode is made of copper, and the second electrode is made of copper or graphite.
As a preferable scheme, the coil material of the solenoid is copper wires, the diameter of the copper wires is 0.5mm, and the number of turns of the solenoid is 800.
As a preferable scheme, the rotating speed of the armature shaft is 1-600r/min.
The beneficial effects of the invention are as follows: the scanning pulse axial magnetic field which changes along the circumference is generated by the cooperation of the power supply assembly, the motor, the speed reducer, the armature assembly and the magnetic poles, and the magnetic field enables the arc spot to continuously make selective dragging motion at different phase angles in the circumferential direction, so that the magnetic field does not interfere with external impurity force of the axial motion force of charged particles, the motion of the arc spot is improved, and the plated film layer is finer.
Drawings
FIG. 1 is a schematic diagram of an assembled structure of an embodiment of the present invention;
FIG. 2 is a cross-sectional view of the armature assembly of the present invention;
FIG. 3 is a cross-sectional view at A-A in FIG. 2;
FIG. 4 is a schematic diagram of the magnetic field direction, the electric field direction and the charged particle movement direction of the solenoid of the present invention.
In the figure: the power supply assembly comprises a 1-power supply assembly, a 11-power supply, a 12-ammeter, a 13-transformer, a 14-voltmeter, a 2-motor, a 3-speed reducer, a 4-armature assembly, a 41-armature body, a 42-armature shaft, a 43-insulating sleeve, a 44-shaft sleeve, a 45-insulating clamping plate, a 46-shell, a 47-end cover, a 48-bearing, a 49-end insulating sleeve, a 5-magnetic pole, a 51-support, a 52-solenoid, a 6-first electrode, a 7-second electrode, an 8-insulating sleeve and a 9-annular force spring.
Detailed Description
The structural and operational principles of the present invention will be described in further detail below with reference to the accompanying drawings.
As shown in fig. 1 to 3, the circulating pulse scanning axial magnetic field generating device comprises a power supply assembly 1, a motor 2, a speed reducer 3, an armature assembly 4 and magnetic poles 5, wherein the power supply assembly 1 comprises a power supply 11, a transformer 13, an ammeter 12 and a voltmeter 14, one end of the ammeter 12 is electrically connected with the positive pole of the power supply 11, the other end of the ammeter 12 is electrically connected with one end of the transformer 13, the voltmeter 14 is connected with the ammeter 12 and the transformer 13 in parallel, an output shaft of the motor 2 is connected with an input shaft of the speed reducer 3, the armature assembly 4 comprises an armature body 41 and an armature shaft 42, the armature shaft 42 is rotatably arranged in the armature body 41, the output shaft of the speed reducer 3 is connected with the armature shaft 42, a plurality of first electrodes 6 are circumferentially arranged on the armature shaft 42, a second electrode 7 is circumferentially arranged on the armature shaft 42, the magnetic poles 5 comprise a bracket and a plurality of solenoids, the bracket circumferentially is provided with a plurality of accommodating grooves, the plurality of the accommodating grooves are circumferentially arranged on the other end of the bracket, the plurality of the solenoids are correspondingly arranged in the corresponding to the other end of the electric solenoids, and are in a circular shape, and are in a corresponding relation with the other end of the electric solenoids, and the other end of the electric solenoids are respectively connected with the electric wire 1 through the corresponding electric brackets, and the electric pole 6, and the electric poles are in a corresponding electric wire shape.
As a preferred scheme, the armature assembly 4 further comprises an insulating sleeve 43, a shaft sleeve 44 and two insulating clamping plates 45, the insulating sleeve 43 and the shaft sleeve 44 are arranged between the armature shaft 42 and the armature body 41, the insulating sleeve 43 is sleeved outside the armature shaft 42, the shaft sleeve 44 is sleeved outside the insulating sleeve 43, a clamping groove is formed in the side walls of the insulating sleeve 43 and the shaft sleeve 44, the insulating clamping plates 45 and the second electrode 7 are arranged in the clamping groove, and the second electrode 7 is arranged between the two insulating clamping plates 45.
As a preferable scheme, the armature assembly 4 further comprises an armature shell and a bearing 48, the bearing 48 is sleeved at two ends of the armature shaft 42, the armature shell comprises a housing 46 and end covers 47, the housing 46 is sleeved outside the armature body 41, the end covers 47 are covered at two sides of the housing 46, the end covers 47 are sleeved outside the bearing 48, and an insulating sleeve 8 is arranged between the bearing 48 and the end covers 47.
As a preferred solution, the cyclic pulse scanning axial magnetic field generating device further comprises a ring force spring 9, wherein the ring force spring 9 is arranged between the housing 46 and the armature body 41.
As a preferable scheme, the circulating pulse scanning axial magnetic field generating device further comprises an end insulating sleeve 49, the end insulating sleeve 49 is sleeved between the armature body 41 and the shaft sleeve 44, one side surface of the end insulating sleeve 49 is propped against the inner side surface of the end cover 47, the other side surface of the end insulating sleeve 49 is propped against the outer side surface of the first electrode 6, and the arrangement of the insulating sleeve 43, the insulating sleeve 8, the insulating clamping plate 45 and the end insulating sleeve 49 ensures that current generated by friction between the second electrode 7 and the first electrode 6 cannot leak out, so that the working stability of the circulating pulse scanning axial magnetic field generating device is ensured.
Preferably, the first electrode 6 is made of copper, and the second electrode 7 is made of copper or graphite.
As a preferable scheme, the coil material of the solenoid is copper wires, the diameter of the copper wires is 0.5mm, and the number of turns of the solenoid is 800.
The negative electrode of the power supply 11 may be electrically connected to a solenoid, the other end of the transformer 13 may be electrically connected to the armature shaft 42, and the current value of the power supply may be 0-1A, and the voltage value may be less than 36V.
The armature shaft 42 rotates at a rotating speed of 1-600r/min through the cooperation of the power supply assembly 1, the motor 2 and the speed reducer 3, the second electrode 7 rotates along with the armature shaft 42 and is tangent to the plurality of first electrodes 6 one by one, so that current is generated to enable corresponding solenoids in the magnetic poles 5 to generate axial magnetic fields consistent with the electric field direction as shown in fig. 4, the axial magnetic fields enable charged particles to axially move, and the magnetic fields generated by the circulating pulse scanning axial magnetic field generating device are consistent with the electric field direction, so that the magnetic fields only have directional constraint action on the charged particles, and the charged particles can smoothly flow out according to the magnetic force line direction, namely the circulating pulse scanning axial magnetic field generating device can not only realize magnetic constraint on plasmas, but also apply work on the charged particles in the plasmas.
The invention has the beneficial effects that: the power supply assembly 1, the motor 2, the speed reducer 3, the armature assembly 4 and the magnetic pole 5 are matched to generate a scanning pulse axial magnetic field which changes along the circumference, and the magnetic field enables the arc spot to be in continuous selective dragging motion at different phase angles in the circumferential direction, so that the magnetic field does not interfere with external impurity force of the axial motion force of charged particles, the motion of the arc spot is improved, and the plated film is finer.
In the foregoing, only the preferred embodiment of the present invention is described, and any minor modifications, equivalent changes and modifications made to the above embodiments according to the technical solutions of the present invention fall within the scope of the technical solutions of the present invention.
Claims (8)
1. The utility model provides a circulation pulse scans axial magnetic field generating device which characterized in that: the motor comprises a power supply assembly, a motor, a speed reducer, an armature assembly and magnetic poles, wherein an output shaft of the motor is connected with an input shaft of the speed reducer, the armature assembly comprises an armature body and an armature shaft, the armature shaft is rotatably arranged in the armature body, the output shaft of the speed reducer is connected with the armature shaft, a plurality of first electrodes are circumferentially arranged on the armature body, a second electrode is arranged on the armature shaft and rotates along with the armature shaft and is tangent to the plurality of first electrodes one by one, the magnetic poles comprise a bracket and a plurality of solenoids, a plurality of accommodating grooves are circumferentially arranged on the bracket, the solenoids are arranged in the accommodating grooves, the axes of the accommodating grooves and the axes of the solenoids are mutually overlapped, the solenoids are in one-to-one correspondence with the accommodating grooves, the armature shaft is electrically connected with the power supply assembly, the first electrodes are electrically connected with one ends of the solenoids through wires, and the other ends of the solenoids are electrically connected with the power supply assembly, and the first electrodes are in one-to-one correspondence with the solenoids; the armature assembly further comprises an insulating sleeve, a shaft sleeve and two insulating clamping plates, wherein the insulating sleeve and the shaft sleeve are arranged between the armature shaft and the armature body, the insulating sleeve is sleeved outside the armature shaft, the shaft sleeve is sleeved outside the insulating sleeve, a clamping groove is formed in the side walls of the insulating sleeve and the shaft sleeve, the insulating clamping plates and the second electrode are arranged in the clamping groove, and the second electrode is arranged between the two insulating clamping plates.
2. The cyclic pulse scanning axial magnetic field generating device according to claim 1, wherein: the armature assembly further comprises an armature shell and bearings, the bearings are sleeved at two ends of the armature shaft, the armature shell comprises a shell and end covers, the shell is sleeved outside the armature body, the end covers are covered on two sides of the shell, the end covers are sleeved outside the bearings, and an insulating sleeve is arranged between the bearings and the end covers.
3. A cyclic pulse scanning axial magnetic field generating device according to claim 2, characterized in that: the ring force spring is arranged between the shell and the armature body.
4. A cyclic pulse scanning axial magnetic field generating device according to claim 3, characterized in that: the end insulating sleeve is sleeved between the armature body and the shaft sleeve, one side face of the end insulating sleeve abuts against the inner side face of the end cover, and the other side face of the end insulating sleeve abuts against the outer side face of the first electrode.
5. The cyclic pulse scanning axial magnetic field generating device according to claim 1, wherein: the power supply assembly comprises a power supply, a transformer, an ammeter and a voltmeter, one end of the ammeter is electrically connected with the positive electrode of the power supply, the other end of the ammeter is electrically connected with one end of the transformer, the other end of the transformer is electrically connected with the armature assembly or the magnetic pole, the voltmeter is connected with the ammeter and the transformer in parallel, and the negative electrode of the power supply is electrically connected with the magnetic pole or the armature assembly.
6. The cyclic pulse scanning axial magnetic field generating device according to claim 1, wherein: the first electrode is made of copper, and the second electrode is made of copper or graphite.
7. The cyclic pulse scanning axial magnetic field generating device according to claim 1, wherein: the coil material of the solenoid is copper wire, the diameter of the copper wire is 0.5mm, and the number of turns of the solenoid is 800.
8. The cyclic pulse scanning axial magnetic field generating device according to claim 1, wherein: the rotating speed of the armature shaft is 1-600r/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810917140.3A CN108728803B (en) | 2018-08-13 | 2018-08-13 | Circulating pulse scanning axial magnetic field generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810917140.3A CN108728803B (en) | 2018-08-13 | 2018-08-13 | Circulating pulse scanning axial magnetic field generating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108728803A CN108728803A (en) | 2018-11-02 |
| CN108728803B true CN108728803B (en) | 2024-08-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810917140.3A Active CN108728803B (en) | 2018-08-13 | 2018-08-13 | Circulating pulse scanning axial magnetic field generating device |
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| Country | Link |
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| CN (1) | CN108728803B (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208803135U (en) * | 2018-08-13 | 2019-04-30 | 东莞市典雅五金制品有限公司 | A kind of axial field generator for magnetic of cycle pulse scanning |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1522443A (en) * | 1977-04-05 | 1978-08-23 | Butler O | Electromagnetic solenoid actuators |
| JPH10140345A (en) * | 1996-11-14 | 1998-05-26 | Hitachi Ltd | Sputtering electrode and magnetron sputtering device |
| DE19828704A1 (en) * | 1998-06-26 | 1999-12-30 | Thomson Tubes Electroniques Gm | Plasma accelerator for space vehicles, increasing ion thruster motor efficiency |
| JP2000239841A (en) * | 1999-02-24 | 2000-09-05 | Ulvac Japan Ltd | Method and device for sputtering |
| US6670875B2 (en) * | 2000-02-24 | 2003-12-30 | Delphi Technologies, Inc. | Magnetically-efficient solenoid for a linear actuator |
| CN101054659A (en) * | 2007-05-15 | 2007-10-17 | 扬州大学 | Magnetron sputtering coating method under multi-stage acceleration mode |
| CN101363115B (en) * | 2008-03-21 | 2011-11-23 | 中国科学院金属研究所 | Rotating magnetron arc ion plating arc source |
| CN102534523B (en) * | 2010-12-15 | 2013-12-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Magnetron source, magnetron sputtering device and magnetron sputtering method |
| CN102758186B (en) * | 2011-04-26 | 2014-07-09 | 中国科学院金属研究所 | Electric arc ion plating apparatus |
| CN103540900B (en) * | 2013-10-22 | 2016-01-13 | 中国科学院金属研究所 | A kind of magnetron arc ion plating composite deposition technique and deposition apparatus |
| CN103643213B (en) * | 2013-11-28 | 2016-03-30 | 中国科学院金属研究所 | A kind of rotating transverse magnetic field coupling axial magnetic field assistant electric arc ion plating apparatus |
| EP3149745A1 (en) * | 2014-05-29 | 2017-04-05 | Brilliant Light Power, Inc. | Electrical power generation systems and methods regarding same |
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2018
- 2018-08-13 CN CN201810917140.3A patent/CN108728803B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208803135U (en) * | 2018-08-13 | 2019-04-30 | 东莞市典雅五金制品有限公司 | A kind of axial field generator for magnetic of cycle pulse scanning |
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| Publication number | Publication date |
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| CN108728803A (en) | 2018-11-02 |
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