CN108464818A - miniature L ED probe - Google Patents

Abstract

The invention discloses a micro LED probe. The micro-LED probe includes a probe head and a connecting portion connected to the probe head; the probe head includes an active panel, a driving circuit and a micro-LED array; the driving circuit is integrated on the active panel, including multiple The micro-LED array is located on the side of the drive circuit away from the active panel, including a plurality of micro-LEDs arranged in a matrix; the drive unit corresponds to the micro-LED one by one, and each drive unit is used to drive the corresponding micro-LED; The drive unit includes an excitation subunit and a detection subunit, the excitation subunit is used to drive the corresponding micro LED to emit the first visible light in the excitation phase, and the detection sub unit is used to drive the micro LED to detect the second visible light in the detection phase. The technical scheme of the invention realizes direct stimulation and monitoring of nerve cells, real-time imaging of the activity of nerve cells, and obtains a three-dimensional view effect of nerve cells.

Description

A tiny LED probe

technical field

Embodiments of the present invention relate to nerve diagnosis and treatment technology, and in particular to a micro LED probe.

Background technique

Miniature neural probes are important tools for neuroscience. Neural probes are currently used in the medical field mainly for brain diseases such as epilepsy, migraine, Alzheimer's, dementia and other neurological diseases. In recent years, under the background of the continuous development and improvement of microelectronics technology and optogenetics, the research of neural probes has also achieved rapid progress and development. By implanting neural probes in different areas of the brain to record and stimulate specific sites in the brain, it is possible to detect, process and interpret neural data at the cellular level, thereby helping medical staff to understand neurological diseases and make reasonable countermeasures .

However, although the existing neural probes can stimulate and monitor the nerve cells in the brain, the brain needs to be dissected to observe the light signals emitted by the fluorescent substances in the nerve cells. Without dissection, the activity of nerve cells cannot be displayed intuitively in real time, which hinders medical personnel from further understanding of neurological diseases.

Contents of the invention

The invention provides a micro-LED probe to directly stimulate and monitor nerve cells, and can image the activity of nerve cells in real time without dissecting the human body.

In the first aspect, an embodiment of the present invention provides a micro LED probe, the micro LED probe includes a probe head and a connecting portion connected to the probe head;

The probe head includes an active panel, a driving circuit, and a micro LED array; the driving circuit is integrated on the active panel, and includes a plurality of driving units arranged in an array, and the micro LED array is located on the drive The side of the circuit away from the active panel includes a plurality of micro-LEDs arranged in a matrix; the driving units correspond to the micro-LEDs one by one, and each of the driving units is used to drive the corresponding micro-LEDs;

The drive unit includes an excitation subunit and a detection subunit, the excitation subunit is used to drive the corresponding micro LED to emit the first visible light in the excitation phase, and the detection sub unit is used to drive the micro LED to detect The second visible light; wherein, the second visible light is the visible light emitted by the object to be measured under the excitation of the first visible light.

Specifically, the excitation subunit includes a first transistor, a second transistor, a third transistor and a first capacitor;

The gate of the first transistor is electrically connected to the first control terminal of the excitation subunit, the first pole of the first transistor is electrically connected to the input terminal of the excitation subunit, and the first electrode of the first transistor is electrically connected to the input terminal of the excitation subunit. The two poles are electrically connected to the gate of the second transistor and the first pole of the first capacitor; the first pole of the second transistor and the second pole of the first capacitor are electrically connected to the first voltage line , the second pole of the second transistor is electrically connected to the anode of the micro-LED; the cathode of the micro-LED is electrically connected to the first pole of the third transistor, and the gate of the third transistor is electrically connected to the anode of the micro-LED Exciting the second control terminal of the sub-unit to be electrically connected, and the second pole is grounded;

The detection subunit includes a fourth transistor, a fifth transistor, a first resistor and a storage element;

The gates of the fourth transistor and the fifth transistor are electrically connected to the third control terminal and the fourth control terminal of the detection subunit respectively, the first pole of the fourth transistor is electrically connected to the second voltage line, and the first electrode of the fourth transistor is electrically connected to the second voltage line. The two poles are electrically connected to the first end of the first resistor, and the second end of the first resistor is electrically connected to the cathode of the micro LED; the first pole and the second pole of the storage element are respectively connected to the micro LED The anode and cathode of the micro LED are electrically connected; the anode of the micro LED is electrically connected to the first pole of the fifth transistor, and the second pole of the fifth transistor is grounded.

Specifically, the storage element is a second capacitor.

Specifically, the micro LED probe further includes a first cladding layer, and the first cladding layer covers the area of the micro LED probe except the micro LED with equal thickness.

Specifically, the material of the first cladding layer is Parylene C.

Alternatively, the micro LED probe further includes a second cladding layer and a third cladding layer, the second cladding layer covers the area of the probe head except the micro LED with equal thickness, and the first cladding layer The three covering layers cover the connecting portion with equal thickness.

Specifically, the micro LED has a size of 5 μm.

Specifically, the thickness of the probe head is 10 μm.

Specifically, the micro LED probe includes a substrate, and the substrate includes a first subsection and a second subsection, the first subsection is the substrate of the active panel, and the second subsection is The substrate of the connection part; the material of the substrate is a flexible material.

Specifically, the flexible material is Parylene C.

In the technical solution of the embodiment of the present invention, by arranging an active panel, a driving circuit, and a micro-LED array in the probe head, the micro-LED emits the first visible light during the excitation stage and stimulates the fluorescent substance in the brain nerve cells to emit the second visible light. In the detection stage, the visible light emitted by the micro-LED matches the second visible light emitted by the fluorescent substance, so that the detection subunit receives the second visible light emitted by the fluorescent substance and converts the photoelectric signal, and converts the second visible light emitted by the fluorescent substance into an electrical signal. The image is transmitted to an external device for display, thereby realizing direct stimulation and monitoring of nerve cells, and real-time imaging of the activity of nerve cells without dissecting the human body. In addition, since each micro-LED is independently controlled by the corresponding drive unit, it can stimulate single or multiple nerve cells, and then obtain a three-dimensional view effect of nerve cells.

Description of drawings

Fig. 1 is a cross-sectional view of a micro LED probe provided by an embodiment of the present invention;

2 is a top view of a micro LED probe provided by an embodiment of the present invention;

Fig. 3 is a schematic structural diagram of a driving unit provided by an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a readout circuit provided by an embodiment of the present invention.

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

Figure 1 is a cross-sectional view of a micro-LED probe provided by an embodiment of the present invention, and Figure 2 is a top view of a micro-LED probe provided by an embodiment of the present invention. This embodiment is applicable to visually observe cells when the human body is not dissected The scene of the activity status. As shown in FIGS. 1 and 2 , the micro LED probe includes a probe head 100 and a connecting portion 200 connected to the probe head 100 . The probe head 100 includes an active panel 110, a driving circuit 120 and a micro LED array 130; the driving circuit 120 is integrated on the active panel 110, including a plurality of driving units 121 arranged in an array, and the micro LED array 130 is located in the driving circuit 120 The side away from the active panel 110 includes a plurality of micro-LEDs 131 arranged in a matrix; the driving units 121 correspond to the micro-LEDs 131 one by one, and each driving unit 121 is used to drive the corresponding micro-LEDs 131 . The driving unit 121 includes an excitation subunit and a detection subunit, the excitation subunit is used to drive the corresponding micro-LED 131 to emit the first visible light in the excitation phase, and the detection sub-unit is used to drive the micro-LED 131 to detect the second visible light in the detection phase; wherein, the second visible light is the visible light emitted by the object to be measured under the excitation of the first visible light.

Specifically, the micro-LEDs in the micro-LED array 130 can be arranged in a matrix, including x rows and y columns, and there are x×y micro-LEDs 131 in total, where x and y are any integers greater than or equal to 1, and x and y can be Equal or unequal. Correspondingly, the driving circuit 120 may include x×y driving units 121 , and each driving unit 121 corresponds to one micro LED 131 . Exemplarily, as shown in FIG. 2 , the micro-LED array 130 includes 5×5 micro-LEDs 131 arranged in an array, the driving circuit 120 includes 5×5 driving units 121, and each driving unit 121 corresponds to a micro-LED 131 respectively, and Each driving unit 121 drives its corresponding micro LED 131 to emit light. FIG. 2 is only an exemplary illustration of the micro-LED array 130 , rather than a limitation. The number of rows and columns of the micro-LED array 130 is not limited to those shown in FIG. 2 .

The driving unit 121 is electrically connected to the micro-LED 131. For example, the electrical connection between the micro-LED array 130 and the driving unit 121 in the driving circuit 120 can be realized through the pad 150, so that the driving sub-circuit in the driving unit 121 can drive the corresponding micro LED. LED131 emits light.

Specifically, the driving unit 121 includes an excitation subunit and a detection subunit. The excitation subunit and the corresponding micro LED form an excitation circuit. Driven by the excitation subunit, the micro LED can realize forward conduction. The detection sub-unit and the corresponding micro-LED constitute a detection circuit, and driven by the detection sub-unit, the micro-LED can achieve reverse breakdown conduction.

Specifically, during the working process of the micro LED probe, the driving unit 121 can be divided into an excitation phase and a detection phase. In the excitation phase, the excitation subunit receives the external excitation signal and the first control signal, and when the first control signal is valid, the excitation subunit applies the excitation signal to the anode of the corresponding micro-LED to make the micro-LED emit the first visible light. It should be noted that the wavelength of the first visible light emitted by the micro-LED should be able to meet the wavelength requirement for the object to be measured (generally a fluorescent substance) in human cells to emit light. For example, the fluorescent substance of cells inside the brain tissue emits light after being stimulated by visible light with a wavelength in the range of 420mm-450mm, then in the excitation stage, the wavelength range of the first visible light emitted by the micro-LEDs in the micro-LED array 130 is 420mm-450mm. Therefore, when the micro-LED emits the first visible light, the fluorescent substance that stimulates the cells inside the brain tissue emits the second visible light. In this embodiment, the active panel 110 is used to integrate the micro-LED probes, and the micro-LED array 130 can be controlled to emit light through an active driving method. At this time, the micro-LED array 130 can control whether the excitation subunit The excitation signal is applied to the micro-LED to make the micro-LED emit the first visible light, so that the effective control of the stimulation of the fluorescent substance in the nerve cells of the brain can be realized, and the monitoring of the activity of the nerve cells can be realized.

In the detection stage, the detection subunit receives the second external control signal. When the second control signal is valid, the detection subunit reversely breaks down the corresponding micro LED under the active driving of the active panel 110 and emits light. . When the wavelength of the light emitted by the micro-LED matches the wavelength of the second visible light emitted by the fluorescent substance, the detection subunit receives the second visible light emitted by the fluorescent substance and converts it into an electrical signal, and stores the electrical signal. The connection part 200 connected with the probe head 100 is sent to a device outside the brain, so that an image is formed in the device, reflecting the activity of nerve cells, thereby realizing direct stimulation and monitoring of nerve cells, without dissecting the human body Under the circumstances, the activity of nerve cells can be imaged in real time.

It should be noted that in both the excitation stage and the detection stage, the micro-LED emits light, and the wavelength of the light can not only meet the wavelength requirements of the fluorescent substance in human cells, but also need to match the wavelength of the second visible light emitted by the fluorescent substance. , Therefore, the wavelength range of the excitation signal (for example, the first visible light) that excites the fluorescent substance to emit light, and the wavelength range of the detection signal (for example, the light emitted by the micro LED in the detection stage) that detects the second visible light emitted by the fluorescent substance, two The ones have overlapping wavelength parts, and the wavelength range of the micro-LEDs to emit light includes the above-mentioned overlapping wavelength parts, so that the micro-LEDs can not only excite the fluorescent substance to emit the second visible light, but also detect the second visible light emitted by the fluorescent substance. LEDs have different roles in different stages.

It should also be noted that the connection part 200 is electrically connected with the drive circuit 120 in the probe head 100, and the drive circuit 120 can be electrically connected with external devices through the connection part 200 to realize the power supply to the drive circuit 120. The electrical signal stored in the unit is sent to the external device through the connection part 200, so that it forms an image in the external device, so as to observe the activity of the nerve cells in the brain. As shown in FIG. 2 , the connection part 200 includes a plurality of connection ends 121 for connecting the probe head 100 to external devices. Specifically, the connection part 200 includes a connection end 121 for connecting the probe head 100 to an external power source, which can continuously provide power for the driving circuit 120 on the probe head 100 . In addition, the drive unit 120 transmits the electrical signal stored in the detection sub-unit to an external device through the connection part 200 , therefore, the connection part 200 also includes a connection terminal 121 for transmitting the signal.

A plurality of driving units 121 of the driving circuit 120 can respectively drive a plurality of micro-LEDs 131 in the micro-LED array 130, and can independently drive corresponding micro-LEDs 131, so any micro-LED 131 in the micro-LED array 130 can be arbitrarily selected to emit light. The fluorescent substances in the nerve cells of the brain can stimulate single or multiple nerve cells, and then obtain a three-dimensional view of the nerve cells. In addition, the driving circuit 120 can be integrated on the active panel 110 through a Complementary Metal Oxide Semiconductor (COMS) process to achieve a highly integrated monolithic effect of the driving circuit 120 and the micro LED array 130 .

In the manufacturing process of the micro-LED 131 , the substrate of the micro-LED array 130 can be removed by laser lift-off technology after the electrodes are fabricated. Exemplarily, the substrate can be a sapphire substrate. The stripping operation of the above-mentioned substrate makes it possible for the micro-LED 131 in the micro-LED array 130 to emit light after the micro-LED 131 emits light, so that the light emitted by the micro-LED 131 can directly enter the brain tissue to avoid the absorption of light by the substrate of the micro-LED array 130, so that the light source can penetrate deep into the brain. Inside the tissue, so as to stimulate the fluorescent substance inside the brain tissue and make the fluorescent substance glow. Among them, the fluorescent substances inside the brain tissue may be present in the cells themselves, or artificially placed into the cells.

Exemplarily, the micro-LED probes provided by the present invention can be used for experiments in transgenic mice, using optogenetic technology to express ChR2 in transgenic mice as a fluorescent substance, and using optogenetic technology to insert micro-LED probes into the brains of transgenic mice In tissue, ChR2 fluorescence is stimulated in specific cells in selected brain regions. In the excitation stage, when the wavelength of the first visible light emitted by the micro-LED array 130 driven by the excitation subunit (via active driving mode) reaches the excitation wavelength of the fluorescent substance ChR2, the ChR2 fluorescent substance will be excited to emit the second visible light Enter the detection stage at this time, the wavelength of the light emitted by the micro-LED array 130 under the driving of the detection subunit (by active driving mode) matches the wavelength of the second visible light emitted by the ChR2 fluorescent substance, and the detection subunit receives The second visible light emitted by the ChR2 fluorescent substance is converted into an electrical signal for storage, and sent to the device outside the brain through the connection part 200 connected with the probe head 100, thereby forming a Images to observe the activity of nerve cells. Because the exciter subunit and the detection subunit share the same micro LED 131 to emit light, the micro LED probe can be detected periodically. In one cycle, it is divided into an excitation phase and a detection phase, so that the micro LED emits light in different periods and produces different effects.

In the technical solution of this embodiment, by arranging an active panel, a driving circuit, and a micro LED array in the probe head, the micro LED emits the first visible light during the excitation stage and stimulates the fluorescent substance in the brain nerve cells to emit the second visible light. The visible light emitted by the stage matches the second visible light emitted by the fluorescent substance, so that the detection subunit receives the second visible light emitted by the fluorescent substance and converts the photoelectric signal, converts the second visible light emitted by the fluorescent substance into an electrical signal, and transmits it to the outside The image is displayed in the device, so as to realize the direct stimulation and monitoring of nerve cells, and the activity of nerve cells can be imaged in real time without dissecting the human body. In addition, since each micro-LED is independently controlled by the corresponding drive unit, it can stimulate single or multiple nerve cells, and then obtain a three-dimensional view effect of nerve cells.

On the basis of the above technical solution, FIG. 3 is a schematic structural diagram of a driving unit provided by an embodiment of the present invention. As shown in FIG. 3 , the excitation subunit includes a first transistor T1 , a second transistor T2 , a third transistor T3 and a first capacitor C1 .

The gate of the first transistor T1 is electrically connected to the first control terminal ctrl1 of the excitation subunit, the first pole of the first transistor T1 is electrically connected to the input terminal in of the excitation subunit, and the second pole of the first transistor T1 is electrically connected to the second The gate of the transistor T2 is electrically connected to the first pole of the first capacitor C1; the first pole of the second transistor T2 and the second pole of the first capacitor C1 are electrically connected to the first voltage line VDD1, and the second pole of the second transistor T2 The pole is electrically connected to the anode of the micro LED; the cathode of the micro LED is electrically connected to the first pole of the third transistor T3, the gate of the third transistor T3 is electrically connected to the second control terminal ctrl2 of the excitation subunit, and the second pole is grounded.

The detection subunit includes a fourth transistor T4, a fifth transistor T5, a first resistor R1 and a storage element C.

The gates of the fourth transistor T4 and the fifth transistor T5 are electrically connected to the third control terminal ctrl3 and the fourth control terminal ctrl4 of the detection subunit respectively, the first pole of the fourth transistor T4 is electrically connected to the second voltage line VDD2, and the first pole of the fourth transistor T4 is electrically connected to the second voltage line VDD2. The two poles are electrically connected to the first end a of the first resistor R1, and the second end b of the first resistor R2 is electrically connected to the cathode of the micro LED; the first pole e and the second pole f of the storage element C are respectively connected to the micro LED The anode and the cathode are electrically connected; the anode of the micro LED is electrically connected to the first pole of the fifth transistor T5, and the second pole of the fifth transistor T5 is grounded.

In the excitation phase, the first control terminal ctrl1 and the second control terminal ctrl2 of the excitation subunit control the first transistor T1 and the third transistor T3 to turn on, and the first pole of the first transistor T1 receives input from the input terminal in of the excitation subunit The signal is transmitted to the gate of the second transistor T2. When the signal input from the input terminal in of the excitation subunit can cause the micro LED to emit the first visible light signal, the second transistor T2 is controlled to be turned on, so that the voltage of the first voltage line VDD1 is applied to the anode of the micro LED, generally Under normal circumstances, the voltage of the first voltage line VDD1 is greater than zero, and the cathode of the micro-LED is grounded through the third transistor T3. Therefore, when the second transistor T2 is turned on, the micro-LED emits the first visible light. The first visible light emitted by the micro LED stimulates the fluorescent substances in the cells inside the brain tissue to emit the second visible light.

In the detection phase, the third control terminal ctrl3 and the fourth control terminal ctrl4 of the detection subunit control the fourth transistor T4 and the fifth transistor T5 to be turned on, and the fourth transistor T4 inputs the voltage of the second voltage line VDD2, and passes through the first resistor R1 It is loaded on the cathode of the micro LED, and the anode of the micro LED is grounded through the fifth transistor T5. The micro-LED can be a single-photon avalanche diode. Under the action of an external electric field, the free carrier electrons and holes in the micro-LED will drift under the action of the electric field and move to the two electrodes of the micro-LED respectively. A photocurrent is formed on the circuit to generate a certain voltage drop, thereby detecting an optical signal. In general, the voltage of the second voltage line VDD2 is greater than zero. In the detection stage, the micro-LED reversely breaks down, and the photocurrent generated by the light signal of the micro-LED can be multiplied and amplified, so that the micro-LED can be used in low light power applications. occasion. After the detection subunit receives the second visible light emitted by the fluorescent substance, the micro LED absorbs the energy of the second visible light, converts the second visible light into photocurrent, forms an electrical signal, and stores the electrical signal on the storage element C. Further, the electrical signal stored in the storage element C can be transmitted to an external device through a correspondingly provided readout circuit, and the readout circuit is formed at the connection part.

4 is a schematic structural diagram of a readout circuit provided by an embodiment of the present invention. The readout circuit is electrically connected to both ends of the storage element C in the detection subunit, and reads the electrical signal on the storage element C. FIG. The readout circuit adopts a column-parallel readout method to speed up the readout speed of the readout circuit.

Exemplarily, as shown in FIG. 3 , the storage element C may be a second capacitor C2. The first resistor R1 is connected in series with the micro-LED. When the micro-LED breaks down reversely, the current increases sharply. At this moment, the first resistor R1 can play a role of limiting the current so as to prevent the circuit from being damaged.

It should be noted that the voltage values of the first voltage line VDD1 and the second voltage line VDD2 are related to the luminance of the micro-LED, and the wavelength of the micro-LED is related to the emission wavelength of the fluorescent substance. Therefore, according to the emission wavelength of the fluorescent substance and Micro LED parameters to choose the appropriate voltage value.

On the basis of the above-mentioned embodiments, the micro LED probe may further include a first cladding layer, and the first cladding layer covers the area of the micro LED probe except the micro LED with equal thickness.

Specifically, the first covering layer can cover the probe head and the connecting part as a whole. The first cladding layer is a biocompatible material, which makes the micro-LED probes have high biocompatibility and strong affinity, and the micro-LED probes can keep floating freely in the brain tissue, so that the micro-LED probes can be selected. specific cells in defined brain regions without causing much damage. Exemplarily, the material of the first cladding layer is Parylene C. In addition, during the working process of the micro-LED probes, the micro-LEDs in the micro-LED array need to emit light. Therefore, when the first coating layer covers the micro-LED probes, the micro-LEDs need to be excluded to avoid blocking the micro-LEDs from emitting light.

An embodiment juxtaposed with the above-mentioned embodiment is that the micro LED probe can include a second coating layer and a third coating layer, and the second coating layer is equally thick and covers the area of the probe head except the micro LED, The third covering layer covers the connecting portion with equal thickness.

Specifically, the materials of the second coating layer and the third coating layer are biocompatible materials, which may be the same or different. The process of coating the micro-LED probe can be divided into two steps. First, the probe head is coated with the second coating layer. The coating process is consistent with the process of coating the micro-LED probe with the first coating layer. , it is necessary to expose the micro-LEDs to avoid blocking the light from the micro-LEDs; and then use the third coating layer to cover the connection part.

It should be noted that the first coating layer is used to cover the micro LED probe as a whole, or the second coating layer and the third coating layer are used to respectively cover the probe head and the connection part, as long as each coating The material of the layer is a biocompatible material, which can make the micro-LED probe have high biocompatibility and strong affinity, and the micro-LED probe can keep floating freely in the brain tissue, so that the selected specific cells in defined brain regions without causing much damage.

Based on the above embodiments, the size of the micro LED can be 5 μm. The thickness of the probe tip may be 10 μm.

Specifically, the smaller the size of the micro-LED, the higher the integration degree. In this embodiment, the size of the micro-LED is 5 μm, which is close to the subcellular size, so more micro-LEDs can be integrated on the micro-LED array of the same size, thereby achieving high resolution of the micro-LED probe. Likewise, the thinner the thickness of the probe head, the better the biocompatibility and affinity of the microLED probe. After selecting the size of the micro-LED, the thickness of the first cladding layer or the second cladding layer and the third cladding layer should be as thin as possible after satisfying the biocompatibility and affinity of the micro-LED probe, for example, The thickness of the probe head is 10 μm, which can take into account the monolithic structure and high biocompatibility and affinity of the micro-LED probe.

On the basis of the above-mentioned embodiments, the micro LED probe includes a substrate, and the substrate includes a first sub-section and a second sub-section, the first sub-section is the substrate of the active panel, and the second sub-section is the connection part. Substrate; the material of the substrate may be a flexible material.

Specifically, the substrate includes a first sub-portion as the substrate of the active panel 110 and a second sub-portion as the substrate of the connection part 200 . As shown in FIG. 2 , the active panel 110 should include a first subsection of the substrate and traces (not shown in the figure) on the first subsection. The connection part 200 includes a connection end 201 led out from the connection wire of the probe head 100 and a second sub-part of the substrate. Exemplarily, the second subsection of the substrate may be an extension of the first subsection. The connection end 201 and the lead wire connected to the connection end 201 are printed on the second sub-section of the substrate, the connection end 201 and the lead wire connected to the connection end 201 are fixed, and the probe head 100 realizes electrical connection with the external device through the connection end 201. connect. The probe head 100 and the connection part 200 of the micro LED probe share a substrate, which can simplify the structure.

In addition, the substrate material can be made of flexible materials, so that the micro-LED probes can reduce the traction force on the brain tissue, increase biocompatibility and affinity, and reduce human rejection, thereby increasing the range of use of the micro-LED probes. Exemplarily, the flexible material of the active panel 110 may be Parylene C.

Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention, and the present invention The scope is determined by the scope of the appended claims.

Claims (10)

1. a kind of miniature LED probes, which is characterized in that the interconnecting piece being connect including probe and with the probe；

The probe includes active panel, driving circuit and Minitype LED array；The driving circuit is integrated in described active On panel, including multiple driving units being arranged in array, the Minitype LED array is located at the driving circuit to be had far from described The side of source panel, including multiple miniature LED in matrix arrangement；The driving unit is corresponded with the miniature LED, often A driving unit is for driving the corresponding miniature LED；

The driving unit includes excitation subelement and detection subelement, and the excitation subelement is used in excitation phase driving pair The miniature LED is answered to send out the first visible light, the detection subelement is used in the detection phase driving miniature LED detections the Two visible lights；Wherein, second visible light is the visible light that object under test is sent out under the excitation of first visible light.

2. miniature LED probes according to claim 1, which is characterized in that

The excitation subelement includes the first transistor, second transistor, third transistor and the first capacitance；

The grid of the first transistor is electrically connected with the first control terminal of the excitation subelement, and the of the first transistor One pole is electrically connected with the input terminal of the excitation subelement, the grid of the second pole and the second transistor of the first transistor Pole and the electrical connection of the first pole of first capacitance；First pole of the second transistor and the second pole of first capacitance with First voltage line is electrically connected, and the second pole of the second transistor is electrically connected with the anode of the miniature LED；The miniature LED Cathode be electrically connected with the first pole of the third transistor, the grid of the third transistor and the of the excitation subelement Two control terminals are electrically connected, the second pole ground connection；

The detection subelement includes the 4th transistor, the 5th transistor, first resistor and memory element；

Third control terminal and fourth of the grid of 4th transistor and the 5th transistor respectively with the detection subelement is controlled End processed electrical connection, the first pole of the 4th transistor are electrically connected with second voltage line, and the of the second pole and the first resistor One end is electrically connected, and the second end of the first resistor is electrically connected with the cathode of the miniature LED；First pole of the memory element It is electrically connected respectively with the anode and cathode of the miniature LED with the second pole；The anode of the miniature LED and the 5th transistor The first pole electrical connection, the 5th transistor the second pole ground connection.

3. miniature LED probes according to claim 2, which is characterized in that the memory element is the second capacitance.

4. miniature LED probes according to claim 1, which is characterized in that further include the first clad, first cladding Layer uniform thickness coats region of the miniature LED probes in addition to the miniature LED.

5. miniature LED probes according to claim 4, which is characterized in that the material of first clad is poly- to two Toluene Parylene C.

6. miniature LED probes according to claim 1, which is characterized in that further include the second clad and third cladding Layer, the second clad uniform thickness coat region of the probe in addition to the miniature LED, the third clad uniform thickness Coat the interconnecting piece.

7. miniature LED probes according to claim 1, which is characterized in that the size of the miniature LED is 5 μm.

8. miniature LED probes according to claim 1, which is characterized in that the thickness of the probe is 10 μm.

9. miniature LED probes according to claim 1, which is characterized in that further include substrate, the substrate includes the first son Portion and the second sub-portion, first sub-portion are the substrate of the active panel, and second sub-portion is the substrate of the interconnecting piece； The material of the substrate is flexible material.

10. miniature LED probes according to claim 9, which is characterized in that the flexible material is Parylene C.