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CN108051400A - A kind of scanning laser interference-type optical fiber sound wave lock phase detection system and method - Google Patents

A kind of scanning laser interference-type optical fiber sound wave lock phase detection system and method Download PDF

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CN108051400A
CN108051400A CN201711233282.XA CN201711233282A CN108051400A CN 108051400 A CN108051400 A CN 108051400A CN 201711233282 A CN201711233282 A CN 201711233282A CN 108051400 A CN108051400 A CN 108051400A
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陈珂
于清旭
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Dalian University of Technology
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Abstract

本发明提供了一种扫描激光干涉型光纤声波锁相探测系统及方法,属于微量气体检测技术领域。该系统包括光声激发光源、光调制器、光声池、光纤传声器、宽带扫描激光光源、光纤环形器、高速波长查询模块、锁相环、方波信号发生器、数字信号处理器和计算机。本发明对宽带扫描激光光源和高速波长查询模块进行同步波长扫描控制和同步光谱采样控制,将基于光纤扫描激光干涉仪的法布里‑珀罗腔长高速同步解调技术与锁相放大技术结合,实现对微弱光声信号的高灵敏与高稳定探测。本发明能够大幅度提高光声光谱微量气体检测的精度和极限灵敏度,为光声光谱微量气体检测提供了一种极具竞争力的技术方案。

The invention provides a scanning laser interference optical fiber acoustic wave phase-locked detection system and method, belonging to the technical field of trace gas detection. The system includes a photoacoustic excitation light source, an optical modulator, a photoacoustic cell, a fiber optic microphone, a broadband scanning laser source, a fiber optic circulator, a high-speed wavelength query module, a phase-locked loop, a square wave signal generator, a digital signal processor and a computer. The invention performs synchronous wavelength scanning control and synchronous spectrum sampling control on the broadband scanning laser light source and the high-speed wavelength query module, and combines the Fabry-Perot cavity length high-speed synchronous demodulation technology based on the fiber scanning laser interferometer with the lock-in amplification technology , to achieve high sensitivity and high stability detection of weak photoacoustic signals. The invention can greatly improve the precision and limit sensitivity of photoacoustic spectrum trace gas detection, and provides a highly competitive technical solution for photoacoustic spectrum trace gas detection.

Description

一种扫描激光干涉型光纤声波锁相探测系统及方法A scanning laser interference type optical fiber acoustic wave phase-locked detection system and method

技术领域technical field

本发明属于微量气体检测技术领域,涉及一种扫描激光干涉型光纤声波锁相探测系统及方法。The invention belongs to the technical field of trace gas detection, and relates to a scanning laser interference type optical fiber acoustic wave phase-locked detection system and method.

背景技术Background technique

光声光谱微量气体检测技术以其具有的高灵敏度、小采样体积等显著优势,已在环境污染气体监测、变压器油中溶解气分析和煤矿易燃易爆气体监测等领域中展现出广阔的应用前景。Photoacoustic spectroscopy trace gas detection technology has shown a wide range of applications in the fields of environmental pollution gas monitoring, dissolved gas analysis in transformer oil, and flammable and explosive gas monitoring in coal mines due to its significant advantages such as high sensitivity and small sampling volume. prospect.

在光声光谱测量中,气室中的气体分子吸收光能发生无辐射跃迁产生热量变化,引起气体振动产生声波。对于极低浓度微量气体检测,光声信号通常仅有微帕量级。根据光声光谱学的原理,光声测量的灵敏度正比于声波探测器的灵敏度。为提高系统检测极限,文献Wang Q,Wang J,Li L,et al.An all-optical photoacoustic spectrometer fortrace gas detection[J].Sensors and Actuators B:Chemical,2011,153(1):214-218设计了一种基于光纤法布里-珀罗干涉仪的小型化传声器,并将其应用于光声光谱微量乙炔气体测量。声波敏感膜片的内反射面和光纤端面之间的空气间隙构成法布里-珀罗腔,声波作用在膜片表面使腔长产生周期性变化。该方案采用强度解调法,当探测激光的中心波长锁定在Q点且声波强度较小时,法布里-珀罗干涉仪工作在线性区,即输出光强随声波作用发生周期性变化。光探测器将光强度信号转换为电信号后,输入到锁相放大器,提高光声信号检测的信噪比。然而,温度等环境因素会引起腔长的漂移,为保证解调系统始终处于线性工作区,激光波长必须随之动态调整,增加了系统的复杂程度。此外,这种强度解调法普遍存在易受光源功率波动和光路损耗影响而产生的测量误差增大等问题。文献Zhang Y,Shibru H,Cooper K L,et al.Miniature fiber-optic multicavity Fabry–Perotinterferometric biosensor[J].Optics letters,2005,30(9):1021-1023采用基于波长查询仪的扫描激光干涉型解调法对法布里-珀罗腔长进行解调,这种基于光谱测量的相位解调算法不受光源功率波动和光路损耗的影响,可对光纤法布里-珀罗传感器进行高精度和高稳定性测量。然而,目前的波长查询仪不能与锁相放大器进行匹配,无法应用于光声光谱微弱信号探测中。因而,设计一种基于光纤法布里-珀罗传声器的高信噪比、高稳定的光声锁相探测系统在光声光谱微量气体检测中具有重要的应用价值。In photoacoustic spectroscopy, gas molecules in the gas cell absorb light energy and undergo non-radiative transitions to generate heat changes, which cause gas vibrations to generate sound waves. For extremely low concentration trace gas detection, the photoacoustic signal is usually only on the order of micropascals. According to the principle of photoacoustic spectroscopy, the sensitivity of photoacoustic measurements is proportional to the sensitivity of the acoustic wave detector. In order to improve the detection limit of the system, the literature Wang Q, Wang J, Li L, et al.An all-optical photoacoustic spectrometer fortrace gas detection[J].Sensors and Actuators B:Chemical,2011,153(1):214-218 design A miniaturized microphone based on fiber optic Fabry-Perot interferometer was developed and applied to the measurement of trace acetylene gas by photoacoustic spectroscopy. The air gap between the internal reflection surface of the acoustic wave-sensitive diaphragm and the end face of the optical fiber constitutes a Fabry-Perot cavity, and the acoustic wave acts on the surface of the diaphragm to make the cavity length change periodically. This scheme adopts the intensity demodulation method. When the central wavelength of the detection laser is locked at the Q point and the acoustic wave intensity is small, the Fabry-Perot interferometer works in the linear region, that is, the output light intensity changes periodically with the action of the acoustic wave. After the light detector converts the light intensity signal into an electrical signal, it is input to the lock-in amplifier to improve the signal-to-noise ratio of photoacoustic signal detection. However, environmental factors such as temperature will cause the drift of the cavity length. In order to ensure that the demodulation system is always in the linear working area, the laser wavelength must be dynamically adjusted accordingly, which increases the complexity of the system. In addition, this intensity demodulation method generally has problems such as increased measurement errors caused by light source power fluctuations and optical path loss. Literature Zhang Y, Shibru H, Cooper K L, et al. Miniature fiber-optic multicavity Fabry–Perotinterferometric biosensor [J]. Optics letters, 2005, 30(9): 1021-1023 Using a scanning laser interferometric solution based on a wavelength interrogator The adjustment method demodulates the Fabry-Perot cavity length. This phase demodulation algorithm based on spectral measurement is not affected by light source power fluctuations and optical path loss, and can perform high-precision and High stability measurement. However, the current wavelength interrogator cannot be matched with the lock-in amplifier, and cannot be applied to the detection of weak signals in photoacoustic spectroscopy. Therefore, designing a photoacoustic phase-locked detection system with high signal-to-noise ratio and high stability based on fiber optic Fabry-Perot microphone has important application value in the detection of trace gases in photoacoustic spectroscopy.

发明内容Contents of the invention

本发明的目的在于提出一种用于光声光谱的扫描激光干涉型光纤声波锁相探测系统及方法,旨在解决基于光纤法布里-珀罗传声器的全光学光声光谱仪中存在的光声信号解调稳定性较差和精度较低等问题,进一步提高微量气体探测的检测灵敏度,为光声光谱在微量气体检测中的应用拓展更大的空间。The object of the present invention is to propose a scanning laser interference optical fiber acoustic wave phase-locked detection system and method for photoacoustic spectroscopy, aiming to solve the photoacoustic problems existing in the all-optical photoacoustic spectrometer based on fiber optic Fabry-Perot microphones. Problems such as poor signal demodulation stability and low precision further improve the detection sensitivity of trace gas detection and expand a larger space for the application of photoacoustic spectroscopy in trace gas detection.

本发明的原理如下:将基于光纤扫描激光干涉仪的法布里-珀罗腔长绝对测量技术与锁相放大技术结合,实现对微弱光声信号的高灵敏、高稳定和大动态范围探测。光声池中待测气体分子被激发产生的声波作用于光纤传声器使法布里-珀罗腔长产生周期性变化,扫描激光干涉产生的光频域谱的频率和相位随之变化,对扫描激光干涉谱的快速腔长解调即可恢复出声波信号。锁相环产生高频触发信号对高速波长查询模块进行同步采样控制,实现法布里-珀罗腔长解调信号的频率与光调制频率完全相同;数字信号处理器将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比。The principle of the present invention is as follows: the Fabry-Perot cavity length absolute measurement technology based on the fiber-optic scanning laser interferometer is combined with the lock-in amplification technology to realize high sensitivity, high stability and large dynamic range detection of weak photoacoustic signals. The acoustic wave generated by the excitation of gas molecules to be measured in the photoacoustic cell acts on the fiber optic microphone to cause periodic changes in the length of the Fabry-Perot cavity, and the frequency and phase of the optical frequency domain spectrum generated by scanning laser interference change accordingly. The acoustic signal can be recovered by fast cavity length demodulation of the laser interference spectrum. The phase-locked loop generates a high-frequency trigger signal to perform synchronous sampling control on the high-speed wavelength query module, so that the frequency of the Fabry-Perot cavity length demodulation signal is exactly the same as the optical modulation frequency; the digital signal processor converts the Fabry-Perot The measured value of the cavity length is cross-correlated with the reference signal of the same frequency to realize the phase-locked amplification function and improve the signal-to-noise ratio of photoacoustic signal detection.

本发明的技术方案:Technical scheme of the present invention:

一种扫描激光干涉型光纤声波锁相探测系统,包括光声激发光源1、光调制器2、光声池3、光纤传声器4、宽带扫描激光光源5、光纤环形器6、高速波长查询模块7、锁相环8、方波信号发生器9、数字信号处理器10和计算机11;A scanning laser interference optical fiber acoustic wave phase-locked detection system, including a photoacoustic excitation light source 1, an optical modulator 2, a photoacoustic cell 3, a fiber optic microphone 4, a broadband scanning laser light source 5, a fiber optic circulator 6, and a high-speed wavelength query module 7 , phase-locked loop 8, square wave signal generator 9, digital signal processor 10 and computer 11;

所述的光声激发光源1与光声池3之间设置光调制器2,光声激发光源1发出的激发光经光调制器2调制后入射到光声池3;所述的光纤传声器4安装在光声池3上,用于探测光声池3内气体分子吸收产生的声波信号;所述的光调制器2的输出方波信号传输至锁相环8,所述的锁相环8的输出信号分别输入到方波信号发生器9和数字信号处理器10;所述的数字信号处理器10为锁相环8提供反馈信号;所述的数字信号处理器10控制方波信号发生器9产生的方波信号分别传输至宽带扫描激光光源5和高速波长查询模块7;所述的宽带扫描激光光源5发射的宽带扫描激光经光纤环形器6后入射到光纤传声器4;所述的光纤传声器4的反射光再经光纤环形器6入射到高速波长查询模块7;所述的数字信号处理器10读取高速波长查询模块7的光谱数据后,实现锁相放大功能;所述的计算机11与数字信号处理器10相连,用于设置数字信号处理器10的工作参数并对数字信号处理器10输出的光声信号测量幅值进行采集、处理和显示。A light modulator 2 is arranged between the photoacoustic excitation light source 1 and the photoacoustic cell 3, and the excitation light emitted by the photoacoustic excitation light source 1 is modulated by the light modulator 2 and then enters the photoacoustic cell 3; the optical fiber microphone 4 Installed on the photoacoustic cell 3, used to detect the acoustic wave signal generated by the absorption of gas molecules in the photoacoustic cell 3; the output square wave signal of the optical modulator 2 is transmitted to the phase-locked loop 8, and the phase-locked loop 8 The output signal is input to square wave signal generator 9 and digital signal processor 10 respectively; Described digital signal processor 10 provides feedback signal for phase-locked loop 8; Described digital signal processor 10 controls square wave signal generator The square wave signals generated by 9 are transmitted to the broadband scanning laser light source 5 and the high-speed wavelength query module 7 respectively; the broadband scanning laser light emitted by the broadband scanning laser light source 5 is incident on the fiber optic microphone 4 after the optical fiber circulator 6; the optical fiber The reflected light of the microphone 4 is incident to the high-speed wavelength query module 7 through the optical fiber circulator 6; after the described digital signal processor 10 reads the spectral data of the high-speed wavelength query module 7, the lock-in amplification function is realized; the computer 11 It is connected with the digital signal processor 10 and is used for setting the working parameters of the digital signal processor 10 and collecting, processing and displaying the measured amplitude of the photoacoustic signal output by the digital signal processor 10 .

一种扫描激光干涉型光纤声波锁相探测方法,将基于光纤扫描激光干涉仪的法布里-珀罗腔长高速同步解调技术与锁相放大技术结合,实现对微弱光声信号的高灵敏度与高稳定性探测;A scanning laser interference type optical fiber acoustic phase-locked detection method, which combines the Fabry-Perot cavity length high-speed synchronous demodulation technology based on optical fiber scanning laser interferometer with phase-locked amplification technology to achieve high sensitivity to weak photoacoustic signals with high stability detection;

具体步骤如下:Specific steps are as follows:

首先光调制器2对来自光声激发光源1的激发光进行强度调制后,入射到光声池3中;光声池3中的气体分子吸收光能后发生无辐射跃迁,跃迁产生的热能使气体发生周期性运动并形成声波;然后声波作用于光纤传声器4,使法布里-珀罗腔长随之发生周期性变化;同时,锁相环8对光调制器2输出的方波信号进行相位锁定,产生同频信号与倍频信号,其中同频信号输入到数字信号处理器10作为锁相放大器的参考信号,倍频信号则为方波信号发生器9提供主时钟,数字信号处理器10控制方波信号发生器9产生的TTL触发信号分别对宽带扫描激光光源5和高速波长查询模块7进行同步波长扫描控制和同步光谱采样控制;宽带扫描激光光源5发射的宽带波长扫描激光经光纤环形器6后入射到光纤传声器4;从光纤传声器4反射的干涉光再经光纤环形器6入射到高速波长查询模块7,高速波长查询模块7采集入射光的光谱信号;数字信号处理器10通过高速通信接口读取高速波长查询模块7的光谱数据后,对光谱进行滤波和光谱域-频域变换等预处理后采用快速相位解调法,实现法布里-珀罗腔长的动态测量;进而,数字信号处理器10将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比;计算机11设置数字信号处理器10的工作参数,最后计算机11对数字信号处理器10输出的光声信号测量值进行采集、处理和显示。First, the light modulator 2 modulates the intensity of the excitation light from the photoacoustic excitation light source 1, and then it is incident into the photoacoustic cell 3; the gas molecules in the photoacoustic cell 3 undergo a non-radiative transition after absorbing light energy, and the heat energy generated by the transition makes The gas moves periodically and forms sound waves; then the sound waves act on the fiber optic microphone 4, causing the Fabry-Perot cavity length to change periodically; Phase locking, producing the same-frequency signal and frequency-multiplied signal, wherein the same-frequency signal is input to the digital signal processor 10 as the reference signal of the lock-in amplifier, and the frequency-multiplied signal provides the main clock for the square wave signal generator 9, and the digital signal processor 10 controls the TTL trigger signal produced by the square wave signal generator 9 to perform synchronous wavelength scanning control and synchronous spectrum sampling control on the broadband scanning laser source 5 and the high-speed wavelength query module 7 respectively; the broadband wavelength scanning laser emitted by the broadband scanning laser source 5 passes through the optical fiber After the circulator 6 is incident on the fiber optic microphone 4; the interference light reflected from the fiber optic microphone 4 is incident on the high-speed wavelength query module 7 through the fiber optic circulator 6, and the high-speed wavelength query module 7 collects the spectral signal of the incident light; the digital signal processor 10 passes After the high-speed communication interface reads the spectral data of the high-speed wavelength query module 7, the spectrum is preprocessed by filtering and spectral domain-frequency domain conversion, and then the fast phase demodulation method is adopted to realize the dynamic measurement of the Fabry-Perot cavity length; Furthermore, the digital signal processor 10 performs cross-correlation calculations with the measured value of the Fabry-Perot cavity length and the reference signal of the same frequency to realize the lock-in amplification function and improve the signal-to-noise ratio of the photoacoustic signal detection; the computer 11 sets the digital signal The working parameters of the processor 10, and finally the computer 11 collects, processes and displays the measured value of the photoacoustic signal output by the digital signal processor 10.

所述的光声激发光源1是用于气体检测的窄线宽激光器。The photoacoustic excitation light source 1 is a narrow linewidth laser for gas detection.

所述的光调制器2是光学斩波器。The optical modulator 2 is an optical chopper.

所述的光声池3是非共振光声池或者一阶纵向共振光声池。The photoacoustic cell 3 is a non-resonant photoacoustic cell or a first-order longitudinal resonant photoacoustic cell.

所述的光纤传声器4是基于光纤法布里-珀罗干涉仪结构的膜片式传声器,对低频声波信号具有较高响应度。The fiber optic microphone 4 is a diaphragm microphone based on a fiber optic Fabry-Perot interferometer structure, and has a relatively high responsivity to low-frequency sound waves.

所述的宽带扫描激光光源5是一种扫描激光光源,谱宽大于20nm。The broadband scanning laser light source 5 is a scanning laser light source with a spectral width greater than 20nm.

所述的高速波长查询模块7是一种具有光波长高精度和快速标定功能的模块,工作于外部触发同步采样模式,采样频率是光调制频率的M/N倍,其中M和N是整数,且M/N大于2。The high-speed wavelength query module 7 is a module with high-precision optical wavelength and fast calibration functions. It works in an external trigger synchronous sampling mode, and the sampling frequency is M/N times the optical modulation frequency, where M and N are integers. And M/N is greater than 2.

所述的方波信号发生器9产生占空比为50%的TTL信号,输出频率范围10Hz-200Hz。The square wave signal generator 9 generates a TTL signal with a duty cycle of 50%, and an output frequency range of 10Hz-200Hz.

所述的宽带扫描激光光源5的波长扫描范围为1528-1563nm,扫描速度为200Hz。The wavelength scanning range of the broadband scanning laser light source 5 is 1528-1563 nm, and the scanning speed is 200 Hz.

所述的高速波长查询模块7的采样速率为200Hz,光谱测量范围为1528nm-1563nm。The sampling rate of the high-speed wavelength query module 7 is 200 Hz, and the spectral measurement range is 1528nm-1563nm.

本发明的有益效果:基于光纤扫描激光干涉仪的法布里-珀罗腔长动态测量技术采用区别于强度解调的相位解调法,可对低频光声信号进行高精度和高稳定性探测。通过对高速光谱采样的同步控制,结合锁相放大技术,能够大幅度提高光声光谱微量气体检测的精度和极限灵敏度。本发明为光声光谱超低浓度微量气体检测提供了一种极具竞争力的技术方案。Beneficial effects of the present invention: The Fabry-Perot cavity length dynamic measurement technology based on the fiber scanning laser interferometer adopts the phase demodulation method different from the intensity demodulation method, and can detect low-frequency photoacoustic signals with high precision and high stability . Through the synchronous control of high-speed spectral sampling, combined with lock-in amplification technology, the precision and limit sensitivity of photoacoustic spectroscopy trace gas detection can be greatly improved. The invention provides a very competitive technical solution for the ultra-low concentration trace gas detection by photoacoustic spectroscopy.

附图说明Description of drawings

图1是本发明的系统结构示意图。Fig. 1 is a schematic diagram of the system structure of the present invention.

图2是高速波长查询模块同步测量的法布里-珀罗干涉光谱图。Fig. 2 is a Fabry-Perot interference spectrum diagram synchronously measured by the high-speed wavelength query module.

图3是扫描激光干涉仪同步测量的光声信号。Figure 3 is the photoacoustic signal measured synchronously by the scanning laser interferometer.

图4是信号处理器中锁相放大模块输出的光声信号幅值。Fig. 4 is the amplitude of the photoacoustic signal output by the lock-in amplifier module in the signal processor.

图中:1光声激发光源;2光调制器;3光声池;4光纤传声器;In the figure: 1 photoacoustic excitation light source; 2 optical modulator; 3 photoacoustic cell; 4 fiber optic microphone;

5宽带扫描激光光源;6光纤环形器;7高速波长查询模块;5 broadband scanning laser light source; 6 fiber optic circulator; 7 high-speed wavelength query module;

8锁相环;9方波信号发生器;10数字信号处理器;11计算机。8 phase-locked loop; 9 square wave signal generator; 10 digital signal processor; 11 computer.

具体实施方式Detailed ways

以下结合技术方案和附图详细叙述本发明的具体实施方式。The specific embodiments of the present invention will be described in detail below in conjunction with the technical solutions and accompanying drawings.

本发明的系统结构示意图如图1所示,主要包括光声激发光源1、光调制器2、光声池3、光纤传声器4、宽带扫描激光光源5、光纤环形器6、高速波长查询模块7、锁相环8、方波信号发生器9、数字信号处理器10和计算机11。The schematic diagram of the system structure of the present invention is shown in Figure 1, mainly including a photoacoustic excitation light source 1, an optical modulator 2, a photoacoustic cell 3, a fiber optic microphone 4, a broadband scanning laser light source 5, a fiber optic circulator 6, and a high-speed wavelength query module 7 , phase locked loop 8, square wave signal generator 9, digital signal processor 10 and computer 11.

光声激发光源1经光调制器2进行光强度调制后,入射到光声池3中;光声池3中的气体分子吸收光能后,发生无辐射跃迁产生的热能使气体发生周期性运动并形成声波;声压作用于光纤传声器4的膜片表面,使法布里-珀罗腔长发生周期性变化;锁相环8对光调制器2输出的方波信号进行相位锁定,产生同频信号与倍频信号,其中同频信号输入到数字信号处理器10作为锁相放大器的参考信号,倍频信号则为方波信号发生器9提供主时钟,数字信号处理器10控制方波信号发生器9产生的TTL触发信号分别对宽带扫描激光光源5和高速波长查询模块7进行同步波长扫描控制和同步光谱采样控制;宽带扫描激光光源5发射的宽带扫描激光经光纤环形器6后入射到光纤传声器4;从光纤传声器4反射的干涉光再经光纤环形器6入射到高速波长查询模块7,高速波长查询模块7采集法布里-珀罗干涉光谱;数字信号处理器10通过高速通信接口读取高速波长查询模块7的光谱数据后,对光谱进行滤波和光谱域-频域变换等预处理后采用快速相位解调法,实现法布里-珀罗腔长的动态绝对测量;数字信号处理器10将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比。计算机11设置数字信号处理器10的工作参数,并采集数字信号处理器10输出的光声信号测量幅值后做进一步的信号处理并显示。After the photoacoustic excitation light source 1 is modulated by the light modulator 2, it is incident into the photoacoustic cell 3; after the gas molecules in the photoacoustic cell 3 absorb the light energy, the heat energy generated by the non-radiative transition causes the gas to move periodically and form sound waves; the sound pressure acts on the diaphragm surface of the fiber optic microphone 4, causing periodic changes in the length of the Fabry-Perot cavity; frequency signal and frequency multiplied signal, wherein the same frequency signal is input to the digital signal processor 10 as the reference signal of the lock-in amplifier, and the frequency multiplied signal provides the main clock for the square wave signal generator 9, and the digital signal processor 10 controls the square wave signal The TTL trigger signal generated by the generator 9 performs synchronous wavelength scanning control and synchronous spectrum sampling control on the broadband scanning laser source 5 and the high-speed wavelength query module 7 respectively; the broadband scanning laser emitted by the broadband scanning laser source 5 is incident on the optical fiber circulator 6 The fiber optic microphone 4; the interference light reflected from the fiber optic microphone 4 enters the high-speed wavelength query module 7 through the fiber optic circulator 6, and the high-speed wavelength query module 7 collects the Fabry-Perot interference spectrum; the digital signal processor 10 passes through the high-speed communication interface After reading the spectral data of the high-speed wavelength query module 7, the spectrum is preprocessed by filtering and spectral domain-frequency domain transformation, and then the fast phase demodulation method is adopted to realize the dynamic absolute measurement of the Fabry-Perot cavity length; the digital signal The processor 10 performs a cross-correlation operation on the measured value of the Fabry-Perot cavity length and a reference signal of the same frequency to realize the phase-locked amplification function and improve the signal-to-noise ratio of photoacoustic signal detection. The computer 11 sets the working parameters of the digital signal processor 10, collects the photoacoustic signal output by the digital signal processor 10 to measure the amplitude, performs further signal processing and displays it.

其中,光声激发光源1是用于气体检测的窄线宽激光器。光调制器2是光学斩波器。光声池3是非共振光声池或者一阶纵向共振光声池。方波信号发生器9产生占空比为50%的TTL信号,输出频率范围10Hz-200Hz。Wherein, the photoacoustic excitation light source 1 is a narrow linewidth laser for gas detection. The optical modulator 2 is an optical chopper. The photoacoustic cell 3 is a non-resonant photoacoustic cell or a first-order longitudinal resonant photoacoustic cell. The square wave signal generator 9 generates a TTL signal with a duty cycle of 50%, and an output frequency range of 10Hz-200Hz.

光纤传声器4是基于光纤法布里-珀罗干涉仪结构的膜片式传声器,对低频声波信号具有较高响应度。宽带扫描激光光源5的波长扫描范围为1528-1563nm,最高扫描速度为200Hz。高速波长查询模块7是近红外高速波长查询模块,最高采样速率为200Hz,光谱测量范围为1528nm-1563nm。The fiber optic microphone 4 is a diaphragm microphone based on a fiber optic Fabry-Perot interferometer structure, and has high responsivity to low-frequency acoustic signals. The wavelength scanning range of the broadband scanning laser light source 5 is 1528-1563 nm, and the maximum scanning speed is 200 Hz. The high-speed wavelength query module 7 is a near-infrared high-speed wavelength query module with a maximum sampling rate of 200Hz and a spectral measurement range of 1528nm-1563nm.

图2是高速波长查询模块同步测量的法布里-珀罗干涉光谱图。通过高速相位解调法计算出法布里-珀罗腔的静态长度约600μm。Fig. 2 is a Fabry-Perot interference spectrum diagram synchronously measured by the high-speed wavelength query module. The static length of the Fabry-Perot cavity is calculated to be about 600 μm by the high-speed phase demodulation method.

图3是扫描激光干涉仪同步测量的光声信号。斩波频率设置为20Hz,波长扫描和查询频率设置为160Hz。光声池中低浓度乙炔气体分子吸收强度调制激发光后产生光声信号,声压作用使腔长发生变化,扫描激光干涉仪解调腔长值并做带通滤波处理。Figure 3 is the photoacoustic signal measured synchronously by the scanning laser interferometer. The chopping frequency was set to 20Hz, and the wavelength scanning and query frequency was set to 160Hz. The low-concentration acetylene gas molecules in the photoacoustic cell absorb the intensity and modulate the excitation light to generate a photoacoustic signal. The cavity length changes due to the sound pressure. The scanning laser interferometer demodulates the cavity length value and performs band-pass filtering.

图4是信号处理器中锁相放大模块输出的光声信号幅值。扫描激光干涉仪解调的腔长经锁相放大后,得到高信噪比的光声信号幅值。Fig. 4 is the amplitude of the photoacoustic signal output by the lock-in amplifier module in the signal processor. After the cavity length demodulated by the scanning laser interferometer is phase-locked and amplified, the amplitude of the photoacoustic signal with a high signal-to-noise ratio is obtained.

以上所述仅为本发明的优选实施例,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (9)

1. a kind of scanning laser interference-type optical fiber sound wave locks phase detection system, which is characterized in that including photo-acoustic excitation light source (1), Optical modulator (2), photoacoustic cell (3), fiber microphone (4), broadband scanning laser light source (5), optical fiber circulator (6), fast wave Long enquiry module (7), phaselocked loop (8), square wave signal generator (9), digital signal processor (10) and computer (11);
Optical modulator (2) is set between the photo-acoustic excitation light source (1) and photoacoustic cell (3), and photo-acoustic excitation light source (1) is sent Photoacoustic cell (3) is incided into after the optically modulated device of exciting light (2) modulation;The fiber microphone (4) is mounted on photoacoustic cell (3) On, for detecting the acoustic signals that the interior gas molecules sorb of photoacoustic cell (3) generates;The output square wave of the optical modulator (2) Signal transmission to phaselocked loop (8), the output signal of the phaselocked loop (8) is separately input to square wave signal generator (9) sum number Word signal processor (10);The digital signal processor (10) provides feedback signal for phaselocked loop (8);The number letter The square-wave signal that number processor (10) control square wave signal generator (9) generates is transmitted separately to broadband scanning laser light source (5) With high speed wavelength enquiry module (7);The broadband scanning laser of broadband scanning laser light source (5) transmitting is through optical fiber circulator (6) fiber microphone (4) is incided into after;The reflected light of the fiber microphone (4) incides into height through optical fiber circulator (6) again Fast wavelength enquiry module (7);The digital signal processor (10) reads the spectroscopic data of high speed wavelength enquiry module (7) Afterwards, lock phase enlarging function is realized;The computer (11) is connected with digital signal processor (10), for setting digital signal The running parameter of processor (10) is simultaneously acquired the photoacoustic signal measurement amplitude of digital signal processor (10) output, handles And display.
2. a kind of scanning laser interference-type optical fiber sound wave locks phase detection method, which is characterized in that will be done based on optical fiber scanning laser The long high speed combined synchronous demodulation technique of Fabry-Perot-type cavity of interferometer is combined with phase lock amplifying technology, is realized to faint photoacoustic signal It is highly sensitive to be detected with high stability;
It is as follows:
After optical modulator (2) carries out intensity modulated to the exciting light for coming from photo-acoustic excitation light source (1) first, photoacoustic cell is incided into (3) in;Radiationless transition occurs after gas molecules sorb luminous energy in photoacoustic cell (3), the thermal energy that transition generates makes gas Cycle movement simultaneously forms sound wave;Then sound wave effect makes Fabry-Perot-type cavity length that week occur therewith in fiber microphone (4) Phase property changes;Meanwhile the square-wave signal that phaselocked loop (8) exports optical modulator (2) carries out PGC demodulation, generate homogenous frequency signal with Frequency-doubled signal, wherein homogenous frequency signal are input to reference signal of the digital signal processor (10) as lock-in amplifier, frequency multiplication letter Master clock number then is provided for square wave signal generator (9), digital signal processor (10) control square wave signal generator (9) generates TTL trigger signals length scanning control is synchronized to broadband scanning laser light source (5) and high speed wavelength enquiry module (7) respectively System and synchronous spectrum controlling of sampling;The broad band wavelength scanning laser of broadband scanning laser light source (5) transmitting is through optical fiber circulator (6) After incide into fiber microphone (4);The interference light reflected from fiber microphone (4) incides at a high speed again through optical fiber circulator (6) Wavelength enquiry module (7), high speed wavelength enquiry module (7) gather the spectral signal of incident light;Digital signal processor (10) is logical After crossing the spectroscopic data that high-speed communication interface reads high speed wavelength enquiry module (7), spectrum is filtered and spectral domain-frequency domain Using fast phase demodulation method after the pretreatments such as conversion, the dynamic measurement of Fabry-Perot-type cavity length is realized;And then digital signal The reference signal of the long measured value of Fabry-Perot-type cavity and same frequency is carried out computing cross-correlation by processor (10), realizes that lock is mutually put Big function improves the signal-to-noise ratio of photoacoustic signal detection;Computer (11) sets the running parameter of digital signal processor (10), most The photoacoustic signal measured value that computer (11) exports digital signal processor (10) afterwards is acquired, handles and shows.
A kind of 3. scanning laser interference-type optical fiber sound wave lock phase detection method according to claim 2, which is characterized in that institute The photo-acoustic excitation light source (1) stated is the narrow linewidth laser for gas detection;The optical modulator (2) is optics copped wave Device;The photoacoustic cell (3) is non-resonance photoacoustic cell or single order longitudinal resonance photoacoustic cell;The fiber microphone (4) is Diaphragm type microphone based on optical fibre Fabry-perot interferometer structure has compared with high-responsivity low-frequency sound wave signal;It is described Square wave signal generator (9) generate duty cycle be 50% TTL signal, reference frequency output 10Hz-200Hz.
4. a kind of scanning laser interference-type optical fiber sound wave lock phase detection system according to Claims 2 or 3, feature exist In the broadband scanning laser light source (5) is a kind of scanning laser light source, and spectrum width is more than 20nm.
5. a kind of scanning laser interference-type optical fiber sound wave lock phase detection system according to Claims 2 or 3, feature exist In the high speed wavelength enquiry module (7) is a kind of module with optical wavelength high-precision and Fast Calibration, is worked in External trigger synchronized sampling pattern, sample frequency are M/N times of light modulation frequency, and wherein M and N are integers, and M/N is more than 2.
A kind of 6. scanning laser interference-type optical fiber sound wave lock phase detection system according to claim 4, which is characterized in that institute The high speed wavelength enquiry module (7) stated is a kind of module with optical wavelength high-precision and Fast Calibration, works in outside Synchronized sampling pattern is triggered, sample frequency is M/N times of light modulation frequency, and wherein M and N are integers, and M/N is more than 2;Described The sampling rate of high speed wavelength enquiry module (7) is 200Hz, spectral measurement ranges 1528nm-1563nm.
7. a kind of scanning laser interference-type optical fiber sound wave lock phase detection system according to claim 2,3 or 6, feature exist In the wavelength scanning range of the broadband scanning laser light source (5) is 1528-1563nm, sweep speed 200Hz.
A kind of 8. scanning laser interference-type optical fiber sound wave lock phase detection system according to claim 4, which is characterized in that institute The wavelength scanning range for the broadband scanning laser light source (5) stated is 1528-1563nm, sweep speed 200Hz.
A kind of 9. scanning laser interference-type optical fiber sound wave lock phase detection system according to claim 5, which is characterized in that institute The wavelength scanning range for the broadband scanning laser light source (5) stated is 1528-1563nm, sweep speed 200Hz.
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CN119915730A (en) * 2025-01-20 2025-05-02 中国科学技术大学 A method and device for generating high signal-to-noise ratio spectrum

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