CN108039405A - A kind of piezoelectric element, piezoelectric transducer and speed and displacement detector - Google Patents
A kind of piezoelectric element, piezoelectric transducer and speed and displacement detector Download PDFInfo
- Publication number
- CN108039405A CN108039405A CN201810026290.5A CN201810026290A CN108039405A CN 108039405 A CN108039405 A CN 108039405A CN 201810026290 A CN201810026290 A CN 201810026290A CN 108039405 A CN108039405 A CN 108039405A
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- piezoelectric
- piezoelectric element
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- flexible base
- transducer
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 35
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 239000000523 sample Substances 0.000 claims abstract description 5
- 239000012528 membrane Substances 0.000 claims description 11
- 239000002033 PVDF binder Substances 0.000 claims description 8
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 8
- 239000010408 film Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 18
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/308—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The present invention relates to a kind of piezoelectric element, piezoelectric transducer and speed and displacement detector.Piezoelectric element includes piezoelectric patches, and piezoelectric patches includes the insulating layer of the outer surface covering of piezoelectric thin film layer, the electrode layer that piezoelectric thin film layer upper and lower surface is set and each electrode layer；Each electrode layer draws signal wire.Piezoelectric transducer includes piezoelectric element and compliant mechanism, compliant mechanism includes the pedestal as transducer probe assembly and the flexible base board for being embedded in pedestal both sides, piezoelectric element pastes at least any flexible base board surface, and the bottom of piezoelectric element is alignd with one end of flexible base board, top is alignd with the edge of pedestal.Speed and displacement detector include piezoelectric transducer, wherein the anode of the cathode of a signal wire connection charge amplifier and current amplifier, another signal wire connection charge amplifier and current amplifier.The piezoelectric element and piezoelectric transducer can meet displacement and linear velocity high accuracy, the high frequency sound measurement demand of volume requirement harshness.
Description
Technical field
The invention belongs to sense and technical field of measurement and test, more particularly to a kind of piezoelectric element, piezoelectric transducer and speed and
Displacement detector.
Background technology
Piezoelectric membrane, such as known PVDF piezoelectric patches, known piezoelectric fabric etc., because of its excellent flexible
Matter, is largely used to manufacture sensor.The basic principle of piezoelectric transducer is the direct piezoelectric effect based on piezoelectric, i.e. external force
Or displacement promotes piezoelectric patches to produce strain, and then electric charge is produced on piezoelectric patches surface.The advantages of piezoelectric transducer is precision height, frequency
Height is rung, dynamic is particularly suitable for and measures.
Currently known piezoelectric patches is largely used to the measurement of wind speed, strain, power and vibration acceleration.For example, the patent No.
201310634131.0 devise the PVDF sonacs for air-flow detection；Patent 201310712358.2 utilizes piezoelectricity
PVDF thin film carries out concrete stress measurement；The PVDF arrays tactile that the patent No. 200810243318.7 proposes measurement pulse passes
Sensor.
It is laser displacement sensor, capacitance displacement, electricity that currently known position, which moves the most of sensors of high-acruracy survey,
Eddy current sensor etc..Laser displacement sensor volume is larger, although capacitance gage and current vortex sensor volume can accomplish
Centimetres, but these sensors still cannot be used for the displacement measurement of very narrow space, such as small-sized multiple degrees of freedom essence
Close locating platform is very harsh to the volume of sensor and installation.In addition, for high accuracy (sub-micron and nanometer scale), high frequency
The price for ringing the displacement measurement of (thousand hertz), traditional laser displacement sensor, capacitance gage etc. is very expensive.
On the other hand, currently known tachometric survey generally uses grating or other modes, but for the survey of linear velocity
Amount, corresponding sensor is less, high frequency sound, high-precision wire tachometric survey especially for reciprocating motion, currently known to swash
Light doppler sensor price is very expensive, and measuring system is complicated.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of piezoelectric element, piezoelectric transducer and speed and displacement detecting
Device, the piezoelectric element and piezoelectric transducer can meet the displacement and linear velocity high accuracy, high frequency sound measurement of volume requirement harshness
Demand.
The technical solution that the present invention solves above-mentioned technical problem is as follows：
A kind of piezoelectric element based on piezoelectric membrane, including piezoelectric patches, the piezoelectric patches include piezoelectric thin film layer, the pressure
The insulating layer of the outer surface covering of electrode layer and each electrode layer that thin film layer upper and lower surface is set；Each electrode
Layer draws a signal wire.
The beneficial effects of the invention are as follows：The charge leakage of piezoelectric patches is reduced, improves measurement accuracy.
Further, the piezoelectric patches is triangular shaped, and is flexible piezoelectric piece, and the insulating layer is flexible insulating layer.
It is using the above-mentioned further beneficial effect of scheme：It ensure that position moves the high-sensitivity measurement with linear velocity.
Further, the piezoelectric thin film layer is PVDF piezoelectric membranes.
A kind of piezoelectric transducer based on piezoelectric membrane, including above-mentioned piezoelectric element and compliant mechanism, compliant mechanism include
Pedestal and the flexible base board for being embedded in pedestal both sides as transducer probe assembly, the piezoelectric element pastes at least any described
The surface of flexible base board, and the bottom of the piezoelectric element is alignd with one end of the flexible base board, top and the pedestal
Align at edge.
The beneficial effects of the invention are as follows：Transmission and the sensing of displacement and speed are realized using the deformation of compliant mechanism.
Further, two supporting blocks are further included, each supporting block is rigidly connected with one end of each flexible base board respectively.
It is using the above-mentioned further beneficial effect of scheme：Make during measurement supporting structure with respect to measurand be it is static,
The measurement with speed is moved so as to fulfill position.
Present invention also offers a kind of speed and displacement detector based on piezoelectric membrane, including above-mentioned piezoelectric sensing
Device, wherein the cathode of a signal wire connection charge amplifier and current amplifier, another signal wire connects charge amplifier
With the anode of current amplifier.
The beneficial effects of the invention are as follows：The present invention is a kind of to be passed using flexible piezoelectric piece and compliant mechanism come the piezoelectricity that forms
Sensor, its outstanding feature are that flexible piezoelectric piece is triangular shaped, and charge amplifier is known charge amplifying circuit, it is exported
Voltage is used to measure displacement；Current amplifier is known current amplification circuit, its voltage exported is used for measuring speed, so that
Ensure that position moves and the measurement of linear velocity, suitable for the occasion that volume and installation space are very narrow and small, and measurement accuracy and
Frequency response is high, has the value promoted the use of.
Brief description of the drawings
Fig. 1 is piezoelectric element structure diagram of the present invention；
Fig. 2 is sensor structure figure of the present invention；
Fig. 3 is five kinds of piezoelectric element layout type schematic diagrames of sensor of the present invention；
Fig. 4 is the speed and displacement detector structure chart of the present invention；
Fig. 5 is one embodiment that measuring method of the present invention is used for precisely locating platform displacement and tachometric survey；
Fig. 6 is one embodiment that inventive sensor is used for vibration displacement and tachometric survey.
In figure：1- piezoelectric patches, 2- insulating layers, 3- signal wires, 4- supporting structures, 5- charge amplifiers, 6- current amplifiers,
7- flexible base boards, 8- pedestals, 9- piezoelectric thin film layers, 10- electrode layers, 11- precisely locating platforms, 12- shake tables.
Embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the present invention.
As shown in Figure 1, the present invention relates to a kind of piezoelectric element based on piezoelectric membrane, including piezoelectric patches 1, the piezoelectric patches
1 includes piezoelectric thin film layer 9, the electrode layer 10 that 9 upper and lower surface of the piezoelectric thin film layer is set and each electrode layer 10
The insulating layer 2 of outer surface covering；Each electrode layer 10 draws a signal wire 3.
The piezoelectric patches 1 is triangular shaped, and is flexible piezoelectric piece, and the insulating layer is flexible insulating layer.The pressure
Thin film layer 9 is PVDF piezoelectric membranes.
As shown in Figure 2 and Figure 3, a kind of piezoelectric transducer based on piezoelectric membrane, including above-mentioned piezoelectric element and flexible machine
Structure, compliant mechanism include the pedestal 8 and the flexible base board 7 for being embedded in 8 both sides of pedestal, the piezoelectric element as transducer probe assembly
Paste at least any 7 surface of flexible base board, and the bottom of the piezoelectric element is alignd with one end of flexible base board 7, top with
The edge alignment of pedestal 8.
Two supporting blocks are further included, each supporting block is rigidly connected with one end of each flexible base board respectively.
As shown in figure 4, a kind of speed and displacement detector based on piezoelectric membrane, including above-mentioned piezoelectric transducer, its
In signal wire 3 connect the cathode of charge amplifier 5 and current amplifier 6, another signal wire 3 connects charge amplifier 5
With the anode of current amplifier 6.Wherein described charge amplifier 5 is known charge amplifying circuit, its output voltage is used to survey
Measure displacement；The current amplifier 6 is known current amplification circuit, its voltage exported is used for measuring speed.The flexibility
Mechanism is fixed for both ends, is made of flexible base board 7 and pedestal 8, and the moving displacement and speed of the pedestal are measurand.Institute
7 surface of flexible base board that piezoelectric element is pasted onto the compliant mechanism is stated, the bottom of piezoelectric element is consolidated with the flexible base board 7
Fixed end is alignd, and the top of the piezoelectric element is alignd with the edge of the pedestal 8 of the compliant mechanism.When the base of the compliant mechanism
When moving displacement occurs for seat 8, the flexible base board 7 produces bending, and then strain is produced inside flexible base board, causes the pressure
Electric device produces electric charge, realizes measured sensing.The supporting structure 4 is the structural support main body of the sensor, is measured
Shi Suoshu supporting structures 4 are static with respect to measurand.
Known precisely locating platform 11 as shown in Figure 5, the inside of the precisely locating platform 11 is a large amount of exist it is described soft
Property mechanism, the piezoelectric element need to be only pasted onto 7 surface of flexible base board of the compliant mechanism by when application, wherein a signal
Line 3 connects the cathode of charge amplifier 5 and current amplifier 6, and another signal wire 3 connects charge amplifier 5 and Current amplifier
The anode of device 6.Wherein described charge amplifier 5 is known charge amplifying circuit, its output voltage is used to measure displacement；It is described
Current amplifier 6 is known current amplification circuit, its voltage exported is used for measuring speed.The pedestal 8 of the compliant mechanism
Moving displacement be approximately equal to precisely locating platform 11 output terminal displacement, the pedestal is measured by the piezoelectric element
8 displacement and speed, you can obtain the moving displacement and movement velocity of precisely locating platform, which is highly suitable for pair
The measurement occasion of volume and requirements of installation space harshness.
Specifically, preferably, the piezoelectric patches 1 is known piezoelectric polymer thin-film, i.e. PVDF piezoelectric membranes.
Specifically, the same piezoelectric patches 1 of two panels is pasted at the same time in the upper and lower surface of the flexible base board 7, form difference and survey
Amount pattern, improves measurement accuracy.
As shown in fig. 6, be the embodiment of the present invention for being used to measure vibration displacement and linear velocity on shake table 12,
Including above-mentioned piezoelectric transducer, wherein the cathode of a signal wire connection charge amplifier and current amplifier, another signal
Line connects the anode of charge amplifier and current amplifier.During measurement, by the pedestal 8 of the sensor, i.e. transducer probe assembly glues
It is attached in measurand, wherein a signal wire 3 connects the cathode of charge amplifier 5 and current amplifier 6, another signal wire
The anode of 3 connection charge amplifiers 5 and current amplifier 6.Wherein described charge amplifier 5 is known charge amplifying circuit,
Its output voltage is used to measure displacement；The current amplifier 6 is known current amplification circuit, its voltage exported is used to survey
Measure speed.When measurand is subjected to displacement, the flexible base board 7 the present invention relates to sensor occurs bending and deformation, and causes to paste
The piezoelectric element on 7 surface of flexible base board produces strain, realizes the measurement of vibration displacement and speed.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent replacement, improvement and so on, should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of piezoelectric element, it is characterised in that including piezoelectric patches, it is thin that the piezoelectric patches includes piezoelectric thin film layer, the piezoelectricity
The insulating layer of the outer surface covering of electrode layer and each electrode layer that film layer upper and lower surface is set；Each electrode
Layer draws a signal wire.
2. piezoelectric element according to claim 1, it is characterised in that the piezoelectric patches is triangular shaped, and is flexibility
Piezoelectric patches, the insulating layer are flexible insulating layer.
3. piezoelectric element according to claim 1 or 2, it is characterised in that the piezoelectric thin film layer is PVDF piezoelectric membranes.
4. a kind of piezoelectric transducer, it is characterised in that including claims 1 to 3 any one of them piezoelectric element and flexible machine
Structure, the compliant mechanism include the pedestal and the flexible base board for being embedded in pedestal both sides, the piezoelectricity member as transducer probe assembly
Part pastes the surface of at least any flexible base board, and the bottom of the piezoelectric element and one end pair of the flexible base board
Together, top is alignd with the edge of the pedestal.
5. piezoelectric transducer according to claim 4, it is characterised in that further include two supporting blocks, each supporting block point
One end not with each flexible base board is rigidly connected.
6. a kind of speed and displacement detector, it is characterised in that including the piezoelectric transducer described in claim 4 or 5, wherein
The cathode of a piece signal wire connection charge amplifier and current amplifier, another signal wire connection charge amplifier and electric current are put
The anode of big device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810026290.5A CN108039405B (en) | 2018-01-11 | 2018-01-11 | Piezoelectric element, piezoelectric sensor, speed and displacement detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810026290.5A CN108039405B (en) | 2018-01-11 | 2018-01-11 | Piezoelectric element, piezoelectric sensor, speed and displacement detection device |
Publications (2)
| Publication Number | Publication Date |
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| CN108039405A true CN108039405A (en) | 2018-05-15 |
| CN108039405B CN108039405B (en) | 2023-10-20 |
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| CN201810026290.5A Active CN108039405B (en) | 2018-01-11 | 2018-01-11 | Piezoelectric element, piezoelectric sensor, speed and displacement detection device |
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| CN105300572A (en) * | 2015-11-20 | 2016-02-03 | 浙江大学 | Piezoelectric-type flexible three-dimensional tactile sensing array and preparation method of same |
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| CN107356359A (en) * | 2017-09-19 | 2017-11-17 | 沈阳建筑大学 | A kind of PVDF piezoelectric membranes Impact monitoring sensor |
| CN208014745U (en) * | 2018-01-11 | 2018-10-26 | 中国工程物理研究院总体工程研究所 | A kind of piezoelectric element, piezoelectric transducer and speed and displacement detector |
| CN110044522A (en) * | 2019-03-25 | 2019-07-23 | 北京航空航天大学 | A method of it is homogenized using neural fusion piezoelectric pressure detection touch screen piezoelectric response |
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2018
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| Publication number | Publication date |
|---|---|
| CN108039405B (en) | 2023-10-20 |
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