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CN108008606B - Stripping liquid for photosensitive dry film and production method and application thereof - Google Patents

Stripping liquid for photosensitive dry film and production method and application thereof Download PDF

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Publication number
CN108008606B
CN108008606B CN201711420013.4A CN201711420013A CN108008606B CN 108008606 B CN108008606 B CN 108008606B CN 201711420013 A CN201711420013 A CN 201711420013A CN 108008606 B CN108008606 B CN 108008606B
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film
stripping
dry film
stripping liquid
alkali
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CN108008606A (en
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秦重虎
李艳
马志锋
徐威
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Yichang Nanbo Display Co ltd
CSG Holding Co Ltd
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Yichang Nanbo Display Co ltd
CSG Holding Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • G03F7/422Stripping or agents therefor using liquids only
    • G03F7/425Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

本发明公开了一种用于感光干膜的剥膜液及其生产方法和应用,该剥膜液包括无机碱、有机碱、溶剂和添加剂和水;其中碱当量为0.4‑1.25mol/L,且无机碱的含量为0.5‑2g/L,有机碱加入体积占剥膜液的2‑5%。本发明以有机碱为剥膜主成分同干膜聚合物发生反应,同时掺入一定量的无机碱成分在剥膜过程中补充OH的浓度;选用高沸点的醇醚类溶剂能更好的起到渗透并膨润干膜的作用。添加剂芳香唑类螯合物是一种与金属有特定亲和力的成膜物质,因而保证导电薄膜层表面在剥膜过程中不会发生氧化侵蚀。其配置简单安全、在正常喷淋冲压作业条件下剥离干膜的能力很强,生产效率及良率高。

Figure 201711420013

The invention discloses a film stripping liquid for photosensitive dry film and its production method and application. The film stripping liquid comprises inorganic base, organic base, solvent, additives and water; wherein the base equivalent is 0.4-1.25mol/L, And the content of inorganic alkali is 0.5-2g/L, and the volume of organic alkali added accounts for 2-5% of the film stripping solution. In the present invention, the organic base is used as the main component of film stripping to react with the dry film polymer, and a certain amount of inorganic alkali components are mixed at the same time to supplement the concentration of OH during the film stripping process; It can penetrate and swell the dry film. The additive aromatic azole chelate is a film-forming substance with a specific affinity for metals, thus ensuring that the surface of the conductive thin film layer will not be oxidatively eroded during the film stripping process. Its configuration is simple and safe, the ability to peel off dry film under normal spray stamping conditions is strong, and the production efficiency and yield are high.

Figure 201711420013

Description

Stripping liquid for photosensitive dry film and production method and application thereof
Technical Field
The invention belongs to the field of touch screen production, relates to a membrane stripping liquid used in a flexible capacitive touch screen yellow light production process, and particularly relates to a membrane stripping liquid used for a photosensitive dry film, and a production method and application thereof.
Background
The photosensitive dry film is a key material for processing micro patterns and manufacturing microelectronic devices and printed circuit boards as an ultraviolet light induced anti-acid etching material, and is widely applied to the field of photoelectric display industry. The photosensitive dry film currently used in production is generally negative, i.e., the exposed part will undergo high molecular crosslinking polymerization to form a resist layer. And finally stripping and removing the film of the dry film of the exposure polymerization part in a yellow light process, and finally finishing the manufacture of the peripheral wires and the transparent electrode patterns of the touch screen.
CN101177657 discloses a film removing liquid additive for printed circuit boards and a production method thereof, CN101166397 discloses a method for stripping photosensitive films of flexible printed circuit boards; CN105676603A discloses a printed circuit board membrane removing liquid and a preparation method and a use method thereof; the above solutions relate to the field mainly in the printed circuit board industry, and are different for the substrate material objects to which the dry film is attached.
CN106707702 discloses a stripping solution for copper-plated alloy indium tin oxide conductive films and a preparation method thereof, wherein organic alkali is easy to form alkali mist to volatilize in the heating circulating spraying process, and in addition, the air oxygen atmosphere of an air draft and spraying system exists in a groove body in the production operation process, the following side reactions can occur to cause corrosion to a copper layer or other metal layers:
Cu+OH-+O2→[Cu(OH)4]2-+H2O。
at present, most manufacturers take NaOH or KOH solution with certain concentration as stripping liquid medicine to strip the dry film, and compared with the prior art, the method can save certain cost. The dry film with high photosensitive fineness can not be peeled off due to large foaming amount in the process of peeling the dry film by NaOH or KOH solution, the reverse-adhered substrate film surface causes poor residue due to large viscosity of alkali liquor in the peeling process, white spots possibly cause poor cleaning difficulty, and the conductive film is easy to corrode. The production efficiency and yield are low.
Disclosure of Invention
The invention aims to solve the technical problem of providing a stripping liquid for a photosensitive dry film and a production method and application thereof; the film stripping speed is high, the efficiency is high, and other surfaces cannot be damaged.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows: the utility model provides a shell membrane liquid for sensitization dry film which characterized in that: comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.4-1.25mol/L, the content of inorganic alkali is 0.5-2g/L, and the adding volume of the organic alkali accounts for 2-5% of the stripping liquid.
Further, the inorganic base is one or more of sodium hydroxide, potassium hydroxide and ammonia water.
Further, the organic base is one or more of ethanolamine, ethylenediamine, triethylene tetramine and polyethylene polyamine.
Further, the solvent is one or more of diethylene glycol monobutyl ether, propylene glycol butyl ether, cyclohexanediol monomethyl ether and N-methylpyrrolidone, and the volume percentage of the solvent is 1.0-5.0%
Further, the additive is aromatic azole or sugar alcohol chelate, and the content of the additive is 0.5-5g/L
In a preferred scheme, the inorganic base in the stripping liquid is potassium hydroxide, the using amount of the inorganic base is 0.8g/L, the organic base is ethanolamine and ethylenediamine, and the volume percentage of the ethanolamine and the ethylenediamine is 2.5%; the solvent is diethylene glycol monobutyl ether, the volume percentage is 1.5%, and the additive is aromatic azole chelate: 2g/L, and the balance of water.
The method for preparing the stripping liquid comprises the steps of taking the raw materials according to the proportion, and uniformly mixing to obtain the stripping liquid for the photosensitive dry film. The mixing equipment is an acid and alkali resistant PE liquid preparation tank.
The invention also relates to application of the stripping liquid in a process for producing a flexible touch screen.
Further, the stripping production conditions are temperature: 45-50 ℃, spray pressure: 0.5-2.0Kg/cm2The dry film peeling point is that when the dry film is peeled: 20-40 s.
The invention also relates to application of the film stripping liquid in a roll-to-roll yellow light film stripping process. The yellow light production process comprises the steps of sputtering indium tin oxide thin film, copper and copper alloy on a flexible PET substrate, then pressing a dry film, exposing, developing, etching (etching copper and ITO conductive patterns), and stripping the film; and then pressing a dry film, exposing, developing for the second time, etching and stripping the film to complete the manufacture of the electrode pattern of the touch screen. The traditional stripping liquid is generally prepared by caustic soda, and is particularly widely applied to the manufacturing industries of PCBs, FPCs and the like. However, the high-concentration caustic soda easily causes damage to the metal surface and is easy to foam during production to cause peeling of dry film winding equipment rollers and other mechanisms, so that the potential safety hazard of production and low yield are serious.
The invention takes organic base as a main component for stripping the film to react with a dry film polymer, and simultaneously, a certain amount of inorganic base component is added to supplement OH in the process of stripping the film-Concentration (base equivalent). The selected alcohol ether solvent with high boiling point can better play the role of permeating and swelling the dry film. The aromatic azole chelate additive is a film forming substance with specific affinity with metal, thereby ensuring that the surface of a conductive film layer (such as copper and copper alloy) can not be oxidized and corroded in the film stripping process. The components of the stripping liquid can be well dissolved with water, the preparation is simple and safe, the capability of stripping a dry film under the normal spraying and stamping operation condition is strong, and the production efficiency and the yield are high. The method is designed for peeling the dry film on the surface of the flexible conductive film, is particularly suitable for flexible roll-to-roll yellow light film peeling production and application, and realizes the step of peeling the dry film.
In order to improve the volatilization state of the stripping liquid and inhibit the oxidation of a metal layer, the invention adopts a proper amount of inorganic base and organic base as the alkali components of the stripping liquid, and adds alcohol ether solvents which can be mutually soluble with the organic base and have higher boiling points to solve the relevant problems. On one hand, the equivalent weight of the stripping liquid alkali in the production process can not be reduced too fast; on the other hand, increasing the viscosity of the solution system or adding a high boiling point alcohol ether solvent will reduce the risk of oxygen-absorbing corrosion of the metal layer, and will also achieve the film stripping effect of the fine line pattern portion better and more efficiently. By using the stripping liquid, the components have good intersolubility with water, the conductive indium tin oxide, copper metal and other films cannot be damaged, stripping residues are decomposed uniformly and finely, no surface residue is left after stripping and washing, the production capacity can be improved, and dry film residues decomposed in the stripping process cannot cause the rewinding of rollers and the reverse sticky film surface. The membrane stripping condition can be carried out under normal production conditions, and the preparation and production processes are safe and efficient. The stripping liquid can not attack metal film layers such as copper and the like and indium tin oxide conductive film layers in the operation modes of heating and circulating spraying, has the technical characteristics of high stripping speed, high efficiency, long effective period of use and the like, and the effective period of use can reach 7-15 days.
The stripping solution can also be applied to stripping a dry film on the surface of a conductive film (the thickness of the conductive layer of a printed circuit board is generally 10-15 microns) with a 10-100 nanometer thickness layer without corroding the surface layer of the film, and can well realize fine circuits: the surface dry film with the line width and the line distance (L/S) of 15 mu m/15 mu m is stripped, and the production efficiency of stripping the film is higher.
Drawings
FIG. 1 is a graph showing the change of the reflectivity of the surface of a copper layer after the film stripping liquid of the invention is continuously sprayed for stripping for 5 min.
FIG. 2 is a diagram showing the film stripping effect of the stripping liquid of the present invention on the surface of the copper circuit layer.
Detailed Description
The invention will be further elucidated with reference to the following examples. These examples are to be construed as merely illustrative and not limitative of the remainder of the disclosure. After reading the description of the invention, one skilled in the art can make various changes and modifications to the invention, and such equivalent changes and modifications also fall into the scope of the invention defined by the claims.
Example 1: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.52mol/L, specifically, the inorganic alkali is sodium hydroxide, and the content is 0.5 g/L; the organic alkali is ethanolamine and ethylenediamine, and the volume percentage content is respectively 2% and 2%; the solvent is N-methyl pyrrolidone, and the volume percentage content is 1%; the additive is aromatic azole chelate, and the adding amount is 0.5 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 2: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 1.14mol/L, specifically, the inorganic alkali is sodium hydroxide, and the content is 2 g/L; the organic alkali is ethanolamine, and the volume percentage content is 5 percent respectively; the solvent is diethylene glycol monobutyl ether, and the volume percentage content is 5%; the additive is aromatic azole chelate, and the adding amount is 5 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 3: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.58mol/L, specifically, the inorganic alkali is potassium hydroxide, and the content is 2 g/L; the organic alkali is ethanolamine and polyethylene polyamine, and the volume percentage content is respectively 2.5 percent and 2.5 percent; the solvent is propylene glycol butyl ether and cyclohexanediol monomethyl ether, and the volume percentage content is 1 percent and 3 percent respectively; the additive is sugar alcohol chelate, and the adding amount is 3 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 4: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.56mol/L, specifically, the inorganic alkali is potassium hydroxide, and the content is 1 g/L; the organic alkali is ethanolamine and ethylenediamine, and the volume percentage content is 1.5 percent and 1 percent respectively; the solvent is diethylene glycol monobutyl ether and propylene glycol butyl ether, and the volume percentage content is 1.5 percent and 1 percent respectively; the additive is aromatic azole chelate, and the adding amount is 2.5 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 5: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.47mol/L, specifically, the inorganic alkali is sodium hydroxide and ammonia water, and the contents are 0.5g/L and 0.5g/L respectively; the organic alkali is ethylenediamine, triethylene tetramine and polyethylene polyamine, and the volume percentage content is 1.5%, 0.5% and 0.5% respectively; the solvent is diethylene glycol monobutyl ether and propylene glycol butyl ether, and the volume percentage content is 1.5 percent and 1 percent respectively; the additive is aromatic azole chelate, and the addition amount is 2 g/L; injecting pure water to supplement the water to 100 percent, and fully and uniformly stirring the mixture in an acid and alkali resistant PE liquid preparation tank according to the figure 1 to obtain the photosensitive dry film stripping liquid.
Example 6: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.62mol/L, specifically, the inorganic alkali is sodium hydroxide, and the content is respectively 2 g/L; the organic alkali is ethanolamine, ethylenediamine and polyethylene polyamine, and the volume percentage content is respectively 1%, 0.5% and 2%; the solvent is cyclohexanediol monomethyl ether and N-methyl pyrrolidone, and the volume percentage content is 3.5 percent and 0.5 percent respectively; the additive is sugar alcohol chelate, and the adding amount is 5 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 7: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.56mol/L, specifically, the inorganic alkali is sodium hydroxide, and the content is 1.25g/L respectively; the organic alkali is ethanolamine and ethylenediamine, and the volume percentage content is respectively 2 percent and 0.5 percent; the solvent is diethylene glycol monobutyl ether, and the volume percentage content is 3.0 percent respectively; the additive is aromatic azole chelate, and the adding amount is 3 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 8: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; wherein the alkali equivalent is 0.54mol/L, specifically, the inorganic alkali is sodium hydroxide, and the content is 1.0g/L respectively; the organic alkali is ethanolamine and triethylene tetramine, and the volume percentage content is respectively 2% and 1.5%; the solvent is cyclohexanediol monomethyl ether, and the volume percentage content is 3.5 percent respectively; the additive is aromatic azole chelate, and the addition amount is 2 g/L; and (3) injecting pure water to supplement the solution to 100%, and fully and uniformly stirring the solution in an acid and alkali resistant PE liquid preparation tank to obtain the photosensitive dry film stripping solution.
Example 9: a stripping liquid for a photosensitive dry film comprises inorganic base, organic base, solvent, additive and water; the inorganic alkali in the stripping liquid is potassium hydroxide with the dosage of 0.8g/L, the organic alkali is ethanolamine and ethylenediamine, and the volume percentage of the ethanolamine and the ethylenediamine is 2.5 percent; the solvent is diethylene glycol monobutyl ether, the volume percentage is 1.5%, and the additive is aromatic azole chelate: 2g/L, and the balance of water.
1. For the stripping solutions in examples 1 to 8, in the roll-to-roll production process of a Sensor (copper wire type touch screen), the films are stripped according to the following process conditions, and the production effects are shown in table 1 below:
Figure BDA0001522836970000051
TABLE 1
2. 2000m film-stripping production by roll-to-roll equipment2After the material, the peel ability and appearance are shown in table 2:
Figure BDA0001522836970000052
TABLE 2
3. The stripping solution prepared in example 2 was used to test the attack resistance of the metal copper layer to the chemical solution, and the surface sheet resistance of the copper layer and the change in the resistance of the copper wire of the touch panel are shown in the following tables 3 and 4, respectively: the sheet resistance of the copper surface and the resistance change rate of the copper wire line of the touch screen are very small, and the metal copper layer is not corroded to cause the abnormity of resistance increase, so that the production requirement of the copper wire touch screen can be completely met.
Figure BDA0001522836970000053
TABLE 3
TABLE 4
4. And continuously spraying and stripping the film for 5min by roll-to-roll production equipment, wherein the change condition of the surface reflectivity of the copper layer is shown in figure 1, and the reflection and the color before and after stripping are basically unchanged, so that the conclusion shows that the conventional film stripping production process can completely meet the requirement of production quality.
5. FIG. 2 is a diagram showing the stripping effect of the stripping solution of the present invention on the surface of copper wiring layer
Figure BDA0001522836970000061
The film stripping effect, the dry film stripping capability and the circuit layer are not corroded. The Film stripping liquid medicine has no attack on a metal copper layer, the sheet resistance and the line resistance change rate are very small, and the Film surface appearance effect after stripping is very good.

Claims (6)

1.一种用于感光干膜的剥膜液,其特征在于:由无机碱、有机碱、溶剂和添加剂和水制成;其中碱当量为0.4-1.25mol/L,且无机碱的含量为0.5-2g/L,无机碱为氢氧化钠、氢氧化钾、氨水中的一种或多种;有机碱加入体积占剥膜液的2-5%,有机碱为乙醇胺、乙二胺、三乙烯四胺、多乙烯多胺中的多种;溶剂为二乙二醇单丁基醚、丙二醇丁醚、环己二醇单甲醚、N-甲基吡咯烷酮中的一种或多种,其体积百分占比为1.0-5.0% ;添加剂为芳香唑类或糖醇类螯合物,其含量为0.5-5g/L 。1. a film stripping liquid for photosensitive dry film is characterized in that: it is made of inorganic alkali, organic alkali, solvent and additive and water; wherein alkali equivalent is 0.4-1.25mol/L, and the content of inorganic alkali is 0.5-2g/L, inorganic bases are one or more of sodium hydroxide, potassium hydroxide, ammonia water; the volume of organic bases added accounts for 2-5% of the stripping solution, and the organic bases are ethanolamine, ethylenediamine, triamine A variety of ethylene tetraamine and polyethylene polyamine; the solvent is one or more of diethylene glycol monobutyl ether, propylene glycol butyl ether, cyclohexanediol monomethyl ether, and N-methylpyrrolidone, which The volume percentage is 1.0-5.0%; the additive is aromatic azole or sugar alcohol chelate, and its content is 0.5-5g/L. 2.根据权利要求1所述的剥膜液,其特征在于:该剥膜液中的无机碱为氢氧化钾,用量为0.8g/L,有机碱为乙醇胺和乙二胺,两者的体积百分数均为2.5%;溶剂为二乙二醇单丁基醚,体积百分数为1.5%,添加剂为芳香唑类螯合物:2g/L,其余组分为水。2. film stripping liquid according to claim 1 is characterized in that: the inorganic base in this film stripping liquid is potassium hydroxide, and the consumption is 0.8g/L, and the organic base is ethanolamine and ethylenediamine, and the volume of both The percentages are all 2.5%; the solvent is diethylene glycol monobutyl ether, the volume percentage is 1.5%, the additive is aromatic azole chelate: 2g/L, and the remaining components are water. 3.制备权利要求1-2任意一项所述的剥膜液的方法,其特征在于,包括以下步骤:3. the method for preparing the stripping liquid described in any one of claim 1-2, is characterized in that, comprises the following steps: 将各原料按配比取用后,混合均匀,即可得到用于感光干膜的剥膜液。After the raw materials are taken according to the proportions and mixed evenly, the film stripping solution for the photosensitive dry film can be obtained. 4.权利要求1-2任意一项所述的剥膜液在生产柔性触摸屏工艺中的应用。4. The application of the stripping liquid according to any one of claims 1 to 2 in the process of producing a flexible touch screen. 5.根据权利要求4所述的应用,其特征在于:剥膜生产条件为温度:45-50℃,喷淋压力:0.5-2.0Kg/cm2,干膜剥离点即剥离干膜时为:20-40s。5. The application according to claim 4, characterized in that: the film stripping production conditions are temperature: 45-50°C, spray pressure: 0.5-2.0Kg/cm 2 , and the dry film peeling point is when the dry film is peeled off: 20-40s. 6.权利要求1-2任意一项所述的剥膜液在卷对卷黄光剥膜制程中的应用。6. The application of the stripping liquid according to any one of claims 1-2 in a roll-to-roll yellow light stripping process.
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CN113563888A (en) * 2021-08-24 2021-10-29 信丰正天伟电子科技有限公司 Stripping liquid and preparation method thereof
CN113741159B (en) * 2021-08-27 2024-05-17 漳州思美科新材料有限公司 PI film stripping liquid, preparation method thereof and stripping method
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CN118745574B (en) * 2024-07-05 2025-06-27 深圳市天熙科技开发有限公司 Film stripping liquid capable of improving film stripping efficiency and preparation method thereof

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CN101166397A (en) * 2006-10-18 2008-04-23 比亚迪股份有限公司 A method for removing sensitization film in flexible printed circuit board
CN101398639A (en) * 2007-09-28 2009-04-01 三星电子株式会社 Composition for stripping and stripping method
CN104102097A (en) * 2013-04-09 2014-10-15 东友精细化工有限公司 Corrosion Resistant Agent And Stripping Agent Composition
CN105116696A (en) * 2015-10-10 2015-12-02 蓝思科技(长沙)有限公司 Photoresist stripper and application thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101166397A (en) * 2006-10-18 2008-04-23 比亚迪股份有限公司 A method for removing sensitization film in flexible printed circuit board
CN101398639A (en) * 2007-09-28 2009-04-01 三星电子株式会社 Composition for stripping and stripping method
CN104102097A (en) * 2013-04-09 2014-10-15 东友精细化工有限公司 Corrosion Resistant Agent And Stripping Agent Composition
CN105116696A (en) * 2015-10-10 2015-12-02 蓝思科技(长沙)有限公司 Photoresist stripper and application thereof

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