CN108008085A - The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device - Google Patents
The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device Download PDFInfo
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- CN108008085A CN108008085A CN201711434446.5A CN201711434446A CN108008085A CN 108008085 A CN108008085 A CN 108008085A CN 201711434446 A CN201711434446 A CN 201711434446A CN 108008085 A CN108008085 A CN 108008085A
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- 239000007789 gas Substances 0.000 title claims abstract description 64
- 239000002341 toxic gas Substances 0.000 title claims abstract description 53
- 238000012806 monitoring device Methods 0.000 title claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 44
- 239000003463 adsorbent Substances 0.000 claims abstract description 41
- 230000008878 coupling Effects 0.000 claims abstract description 24
- 238000010168 coupling process Methods 0.000 claims abstract description 24
- 238000005859 coupling reaction Methods 0.000 claims abstract description 24
- 229910000831 Steel Inorganic materials 0.000 claims description 16
- 239000010959 steel Substances 0.000 claims description 16
- 230000003993 interaction Effects 0.000 claims description 5
- 230000037361 pathway Effects 0.000 claims description 3
- 238000009394 selective breeding Methods 0.000 claims description 3
- 230000008859 change Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002250 absorbent Substances 0.000 description 4
- 230000002745 absorbent Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 108010022579 ATP dependent 26S protease Proteins 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0063—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a threshold to release an alarm or displaying means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0022—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Respiratory Apparatuses And Protective Means (AREA)
Abstract
The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device, including detection of poison gas device (7), air driven pump (9), pneumatic operated valve (3,4,5), four-way pipe (6), coupling (1,2,8) and hose (13)；One end of 3 pneumatic operated valves (3,4,5) is respectively with forming gas passage at cabinet exhaust ports coupling (2), processing equipment exhaust ports coupling (1) and adsorbent media container bottom adsorbent media 90%；The other end is commonly connected on four-way pipe (6)；Another path of four-way pipe (6) is sequentially connected forms gas passage with coupling (8) at detection of poison gas device (7), air driven pump (9), equipment air inlet；Start air driven pump (2) work, control make one in 3 pneumatic operated valves to open, at three one in position at gas sample through being extracted, flow through detection of poison gas device (7), the Concentration Testing of gas sample is detected, and is finally discharged at equipment air inlet.
Description
Technical field
The invention belongs to dry process spy's tail-gas processing technology field, equipment in more particularly to a kind of tail gas treatment device
The monitoring device in 90% service life of poison gas concentration and adsorbent media in exhaust outlet poison gas concentration, equipment cabinet.
Background technology
Dry type tail gas treatment device is used primarily in the industries such as semiconductor semiconductor, photovoltaic, LCD, in above-mentioned row
In the production technology of industry, the substantial amounts of, special gas of broad categories can be used, these gases usually have hypertoxic, inflammable, tool corruption
The features such as corrosion, therefore, when handling these gases, the demand for security to processing is very high, not only to consider the place of equipment
Reason ability, need to also detect in equipment leakage, have corresponding real-time monitoring means on 2 points of equipment life；
At present, in dry type spy's tail-gas processing equipment：
Disposal ability detection means to equipment is mainly in the exhaust outlet installation color indicator detection exhaust of equipment
Whether contain object gas, if so, then indicator color can change, illustrate that equipment disposal ability cannot be up to standard；
Processing means to equipment leakage are that the factory service end of the cabinet exhaust outlet of equipment and user links together, so that
So that equipment solid is in a negative pressure state；
Color mainly is filled by going out separately installed one in absorbent container 90% to the means of equipment life detection
The cylindrical transparent form of indicator, when indicator color changes, illustrates that adsorbent 90% has been used, the service life will
Expire；
The above method has following shortcoming：
1. indicator can only judge to contain specific gas in tail gas, it is impossible to pass through the specific dense of color change reactions gas
Degree；
2. often the service life of equipment is considerably longer than indicator, and the not obvious failure of indicator indicates, often
It can cause the judgement of mistake or the waste of indicator；
3. such a determination methods need to visually be judged, that is, manual patrol is needed, timeliness is excessively poor；
4. equipment passively links together with factory factory service end, will inside equipment cabinet body when factory service end breaks down
In normal pressure state, the security of equipment is greatly reduced；
5. staff does not know whether equipment is in leak condition, it may open and set in the state of equipment leakage
It is standby, and then security incident occurs；
6. since equipment passively links together with factory service end, and then occur at the same time in factory service end failure and equipment leakage
When, without emergency plan, leaked gas will be discharged into working region, cause environment, personnel and infringement and the later stage
The expense of cleaning, if security incident occurs, loss is immeasurable；
7. the connection of form and container need to do encapsulation process, there is risk of leakage；
8. color indicator is easily influenced be subject to environment and causes sensitivity to change, so as to influence its indicated work
Energy；
9. such a determination methods need to visually be judged, that is, manual patrol is needed, timeliness is excessively poor；
10. usual viewing window position (position in media container according to bottom 10%) is close from the ground, easily make it contaminated
So as to observe inner case well or need to frequently do cleaning；
11. when replacing or do fixed-end forces, form is easily damaged, increase processing/use cost；
12. being indicated generally at, agent is sensitiveer, and the time of day of tail gas can not be reflected when color change occurs, i.e., without
Method knows the feature such as concentration of exhaust gas at this time by it.
The content of the invention
In view of the deficiencies of the prior art, the present invention is intended to provide in a kind of tail gas treatment device diverse location poison gas concentration
Monitoring device, can more obtain the poison gas concentration of equipment diverse location in real time and more accurately.
The technical scheme is that in a kind of tail gas treatment device diverse location poison gas concentration monitoring device, including
Detection of poison gas device, air driven pump, pneumatic operated valve, four-way pipe, the coupling of processing equipment exhaust ports, cabinet exhaust ports steel pipe connect
Coupling and hose at head, equipment air inlet；The pneumatic operated valve is 3, and one end of 3 pneumatic operated valves is arranged with cabinet respectively
Gas is formed at gas port at coupling, the coupling of processing equipment exhaust ports and adsorbent media container bottom adsorbent media 90%
Body carrying path；The other end is commonly connected on four-way pipe；Another path of four-way pipe is connected to the air inlet of detection of poison gas device
Mouthful；The exhaust outlet of detection of poison gas device and the air inlet of air driven pump connect；The exhaust outlet of air driven pump is connected at equipment air inlet
Coupling；Hose is used for being flexible coupling for each oral area；Start pneumatic pump work, make one in 3 pneumatic operated valves to open by control
Open, in tail gas treatment device at cabinet exhaust outlet, processing equipment exhaust outlet and adsorbent media container bottom adsorbent media 90% this
Gas sample at one in three flows through detection of poison gas device, the detection of detection of poison gas device is extracted gas sample through being extracted
Concentration, then the gas passage through air driven pump be discharged at equipment air inlet.
Further, apparatus of the present invention further include flowmeter；The flowmeter is arranged on four-way pipe and detection of poison gas device
Between gas passage on, with control and monitor through pneumatic operated valve enter detection of poison gas device gas flow.
Further, apparatus of the present invention further include steel pipe, and steel pipe one end is inserted into adsorbent media container bottom absorption matchmaker
It is situated between at 90%, the other end stretches out adsorbent media container and is connected to pneumatic operated valve by pipe, more stably to obtain adsorbent media container
Gas sample at bottom adsorbent media 90%.
Also further, the port that above-mentioned steel pipe is inserted at adsorbent media container bottom adsorbent media 90% is netted knot
Structure, to prevent adsorbent media from entering and block steel pipe.
Also further, apparatus of the present invention further include controller, and controller is connected with pneumatic operated valve, to control in pneumatic operated valve
Another two is closed during one unlatching.
Also further, apparatus of the present invention further include the human-computer interaction interface being connected with controller, to pass through artificial selection
Control any one unlatching in pneumatic operated valve.
As the replacement of above-mentioned artificial selection control pneumatic operated valve, apparatus of the present invention further include the man-machine friendship being connected with controller
Mutual interface, controller set each opening 20 seconds in pneumatic operated valve, and 3 pneumatic operated valves are opened in turn, and are shown in human-computer interaction interface
Show pneumatic operated valve state.
Further, the controller of apparatus of the present invention is also connected with detection of poison gas device, receives the detection of detection of poison gas device
The gas concentration signal of acquisition.
Further, controller noted above has gas concentration early warning and alarm setting.
Further, the Guan Weiwen hoses between above-mentioned steel pipe and pneumatic operated valve, freely stretch within the specific limits.
Gas sample is extracted at equipment exhaust outlet, cabinet exhaust outlet, absorbent container 90% with air hose respectively, it is soft
The pipe other end connects three pneumatic control valves respectively, the ports of export of three pneumatic operated valves connect respectively three of a four-way pipe into
Mouthful, four-way pipe another outlet connection detection of poison gas device import, detection of poison gas device the port of export connection air driven pump into
Mouth end, the port of export of air driven pump are linked to tail gas treatment device air inlet, control three pneumatic operated valves to be opened per 20s by control system
Open one, while two other is closed, so as to fulfill with a detection of poison gas device at the same time the exhaust outlet to equipment,
It is detected at cabinet exhaust outlet and absorbent container 90%；
Compared with prior art, benefit of the invention is that：
1st, without having to worry about the color indicator service life the problem of, what system used is all mechanical components, more stable, more reliable
And it can realize automation；
2nd, the monitoring to system processing power is more reliable, the misgivings that no color indicator exhausts or fails etc.；
3rd, due to using gas real-time monitoring device, completely solving problems with：
A) sensitivity, the accuracy critical function of device, will not be influenced because of the change of environment；
B), the gas relevant parameter detected will directly be changed into after electric signal and feeds back to PLC device by monitoring device, nothing
Need manually make an inspection tour at any time, alarm will be sent automatically after exceeded, more in time, safer；
C), detection device can be contrasted with the concentration of real-time display gas, the intuitively environmentally friendly government decree with national regulation,
The alarm output signal of monitoring device can be also adjusted to the standard of national requirements for environmental protection at the same time, when concentration is higher than setting value,
System will send alarm command, allow user to understand equipment disposal ability in real time；
D), due to device can direct detection gas concentration, can more accurately judge to inhale by the numerical value that device detects
Whether attached medium has been consumed 90% really, more efficient, more accurate；
4th, a whole set of structure is all by equipment active control, even if breaking down, equipment can also enter contingency mode, Bu Huifa
Raw security incident；
5th, staff can the human-computer interaction interface of slave device or the alarm condition of equipment be directly viewable whether equipment has
Leakage occurs, so as to avoid the generation of security incident from root；
6th, steel pipe and container are connected as being welded to connect, and greatly reduce risk of leakage；
7th, the detection at 90% 3 position of the disposal ability of equipment, cabinet exhaust detection and absorbent container only needs to use
One detection of poison gas device, it is more efficient, more economical.
Brief description of the drawings
From the detailed description to the embodiment of the present invention below in conjunction with the accompanying drawings, of the invention these and/or other side and
Advantage will become clearer and be easier to understand, wherein：
Attached drawing 1 is the apparatus structure schematic diagram of the embodiment of the present invention.
Embodiment
In order to make those skilled in the art more fully understand the present invention, with reference to the accompanying drawings and detailed description to this hair
It is bright to be described in further detail.Here it is to be noted that it in the accompanying drawings, identical reference numeral, which is assigned, substantially to be had
The part of same or like 26S Proteasome Structure and Function, and will omit on their repeated description.
Embodiment 1
The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device, as shown in Figure 1, including processing equipment
Exhaust ports coupling 1, cabinet exhaust ports coupling 2, detection of poison gas device 7, coupling 8 at equipment air inlet,
Air driven pump 9, pneumatic operated valve 3,4,5, four-way pipe 6, flowmeter 10, steel pipe 11, controller, PVC hose 13, bellows 12；
The pneumatic operated valve is 3, one end of 3 pneumatic operated valves 3,4,5 respectively with cabinet exhaust ports coupling 1,
Gases transportation pathway is formed at processing equipment exhaust ports coupling 2 and adsorbent media container bottom adsorbent media 90%, its
Middle needs illustrate, pneumatic operated valve and the company that gases transportation pathway is formed at adsorbent media container bottom adsorbent media 90%
Connected bellows 12 and steel pipe 11 is completed jointly, 11 one end of steel pipe is inserted into adsorbent media container bottom adsorbent media 90%
Place, the other end stretches out adsorbent media container and is connected to pneumatic operated valve by bellows 12, more stably to obtain adsorbent media container
Gas sample at bottom adsorbent media 90%, and steel pipe 11 is inserted at adsorbent media container bottom adsorbent media 90%
Port is net structure, to prevent adsorbent media from entering and block steel pipe 11；The other end is commonly connected on four-way pipe 6；
Another path of four-way pipe 6 is connected to 10 import of flowmeter；
The air inlet of the outlet of flowmeter 10 connection detection of poison gas device 7, flowmeter 10 are used to control and monitor through pneumatic operated valve
Into the gas flow of detection of poison gas device 7；
The gas outlet of detection of poison gas device 7 is connected with the air inlet of air driven pump 9；
The exhaust outlet of air driven pump 9 is connected to the coupling 8 at equipment air inlet；
PVC hose 13 is used for being flexible coupling for each oral area；
Controller is connected with pneumatic operated valve 3,4,5, and another two is closed during controlling one in pneumatic operated valve 3,4,5 to open, this
The controller of embodiment sets each opening 20 seconds in pneumatic operated valve 3,4,5, and 3 pneumatic operated valves are opened in turn, and in human-computer interaction
3,4,5 state of interface display pneumatic operated valve；
Controller is also connected with detection of poison gas device 7 at the same time, is received detection of poison gas device 2 and is detected the gas concentration letter obtained
Number, and controller has gas concentration early warning and alarm setting, to exceed default normal concentration when the gas concentration of detection, sends out
Go out early warning and alarm signal, remind manual intervention processing.
Therefore, when starting the work of air driven pump 2, controller controls one in 3 pneumatic operated valves to open two other closing,
Cabinet exhaust outlet corresponding with the pneumatic operated valve of unlatching in tail gas treatment device, or reason equipment exhaust outlet, or adsorbent media container bottom
The gas sample of portion's adsorbent media 90% is extracted, and flows through detection of poison gas device 7 through flowmeter 10, detection of poison gas device 7 detects
The concentration of gas sample is extracted, the gas passage then through air driven pump 2 is discharged at equipment air inlet, is come back to inside equipment
Carry out processing and avoid pollution environment, because each pneumatic operated valve is opened 20 seconds and opened in turn, so as to fulfill processing equipment difference position
The poison gas concentration at the place of putting is monitored in real time in turn.
Various embodiments of the present invention are described above, described above is exemplary, and non-exclusive, and
It is not limited to disclosed each embodiment.In the case of without departing from the scope and spirit of illustrated each embodiment, for this skill
Many modifications and changes will be apparent from for the those of ordinary skill in art field.Therefore, protection scope of the present invention should
Scope of the claims should be subject to.
Claims (10)
1. the poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device, it is characterised in that filled including detection of poison gas
Put (7), air driven pump (9), pneumatic operated valve (3,4,5), four-way pipe (6), processing equipment exhaust ports coupling (1), cabinet exhaust
Coupling (2), coupling (8) and hose (13) at equipment air inlet at mouthful；
The pneumatic operated valve is 3, one end of 3 pneumatic operated valves (3,4,5) respectively with cabinet exhaust ports coupling (2),
Gases transportation pathway is formed at processing equipment exhaust ports coupling (1) and adsorbent media container bottom adsorbent media 90%；
The other end is commonly connected on four-way pipe (6)；
Another path of four-way pipe (6) is connected to the air inlet of detection of poison gas device (7)；
The exhaust outlet of detection of poison gas device (7) is connected with the air inlet of air driven pump (9)；
The exhaust outlet of air driven pump (9) is connected to coupling (8) at equipment air inlet；
Hose (13) is used for being flexible coupling for each oral area；
Start air driven pump (2) work, make one in 3 pneumatic operated valves to open by control, cabinet is vented in tail gas treatment device
Mouthful, at processing equipment exhaust outlet and adsorbent media container bottom adsorbent media 90% one in this three at gas sample through being taken out
Take, flow through detection of poison gas device (7), detection of poison gas device (7) detects the concentration for being extracted gas sample, then through air driven pump
(2) gas passage is discharged at equipment air inlet.
2. poison gas concentration monitoring device as claimed in claim 1, it is characterised in that further include flowmeter (10)；The flow
Meter (10) be arranged on the gas passage between four-way pipe (6) and detection of poison gas device (7), with control and monitor through pneumatic operated valve into
Enter the gas flow of detection of poison gas device (7).
3. poison gas concentration monitoring device as claimed in claim 2, it is characterised in that further include steel pipe (11), steel pipe (11) one
End is inserted at adsorbent media container bottom adsorbent media 90%, and the other end stretches out adsorbent media container and is connected to by pipe (12)
Pneumatic operated valve, more stably to obtain the gas sample at adsorbent media container bottom adsorbent media 90%.
4. poison gas concentration monitoring device as claimed in claim 3, it is characterised in that the steel pipe (11) is inserted into adsorbent media
Port at container bottom adsorbent media 90% is net structure, to prevent adsorbent media from entering and block steel pipe (11).
5. poison gas concentration monitoring device as claimed in claim 4, it is characterised in that further include controller, controller with it is pneumatic
Valve (3,4,5) connects, and another two is closed during controlling one in pneumatic operated valve (3,4,5) to open.
6. poison gas concentration monitoring device as claimed in claim 5, it is characterised in that further include the man-machine friendship being connected with controller
Mutual interface, to control any one unlatching in pneumatic operated valve (3,4,5) by artificial selection.
7. poison gas concentration monitoring device as claimed in claim 5, it is characterised in that further include the man-machine friendship being connected with controller
Mutual interface, controller set each opening 20 seconds in pneumatic operated valve (3,4,5), and 3 pneumatic operated valves are opened in turn, and in human-computer interaction
Interface display pneumatic operated valve (3,4,5) state.
8. poison gas concentration monitoring device as claimed in claim 7, it is characterised in that controller also with detection of poison gas device (7)
Connection, receives the gas concentration signal that detection of poison gas device (2) detection obtains.
9. poison gas concentration monitoring device as claimed in claim 8, it is characterised in that the controller have gas concentration early warning and
Alarm setting.
10. poison gas concentration monitoring device as claimed in claim 1, it is characterised in that the pipe (12) is line hose, certain
In the range of freely stretch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434446.5A CN108008085A (en) | 2017-12-26 | 2017-12-26 | The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711434446.5A CN108008085A (en) | 2017-12-26 | 2017-12-26 | The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device |
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| Publication Number | Publication Date |
|---|---|
| CN108008085A true CN108008085A (en) | 2018-05-08 |
Family
ID=62061514
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711434446.5A Pending CN108008085A (en) | 2017-12-26 | 2017-12-26 | The poison gas concentration monitoring device of diverse location in a kind of tail gas treatment device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109458556A (en) * | 2018-12-26 | 2019-03-12 | 南京信创电子设备有限公司 | A kind of intelligent portable special gas safe transport cabinet |
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| CN205850594U (en) * | 2016-07-15 | 2017-01-04 | 江苏艾尼尔建设集团有限公司 | A kind of workshop air purifier |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109458556A (en) * | 2018-12-26 | 2019-03-12 | 南京信创电子设备有限公司 | A kind of intelligent portable special gas safe transport cabinet |
| CN109458556B (en) * | 2018-12-26 | 2024-03-26 | 南京信创电子设备有限公司 | An intelligent portable special gas safety transfer cabinet |
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Application publication date: 20180508 |