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CN107934926A - A kind of preparation method of two selenizings molybdenum nanotube - Google Patents

A kind of preparation method of two selenizings molybdenum nanotube Download PDF

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CN107934926A
CN107934926A CN201711443092.0A CN201711443092A CN107934926A CN 107934926 A CN107934926 A CN 107934926A CN 201711443092 A CN201711443092 A CN 201711443092A CN 107934926 A CN107934926 A CN 107934926A
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CN107934926B (en
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胡柱东
林海敏
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Foshan University
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    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B19/00Selenium; Tellurium; Compounds thereof
    • C01B19/007Tellurides or selenides of metals
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Abstract

本发明公开了一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:1)将六羰基钼铺装在陶瓷坩埚底部,后将多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于管式炉中,在气体保护下低温升华沉积,继续升温热解;2)真空管式炉降至室温后将模板开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后升温,使单质硒与金属钼直接反应;3)用稀酸溶液去除多孔氧化铝模板和多余的硒,后进行抽滤处理,烘干,得成品。本发明方法步骤简单,无环境污染,无需复杂的设备,所制备得的二硒化钼纳米管粉体材料的尺寸可控性强,结晶性好,纳米管管壁形貌均匀,从而大大提高该二硒化钼纳米管粉体材料成品的综合性能。本发明具有广泛的适用性,有利于大规模工业化生产。The invention discloses a method for preparing molybdenum diselenide nanotubes, which comprises the following process steps: 1) laying molybdenum hexacarbonyl on the bottom of a ceramic crucible, and then placing the opening of a porous anodized aluminum template downward on the molybdenum hexacarbonyl Above, seal the crucible and place it in a tube furnace, sublimation deposition at low temperature under gas protection, and continue to heat up pyrolysis; 2) After the vacuum tube furnace drops to room temperature, place the template opening downwards in a ceramic crucible filled with selenium powder, After sealing the crucible, the temperature is raised to make the elemental selenium react directly with metal molybdenum; 3) remove the porous alumina template and excess selenium with dilute acid solution, and then carry out suction filtration and drying to obtain the finished product. The method of the invention has simple steps, no environmental pollution, and no need for complicated equipment. The prepared molybdenum diselenide nanotube powder material has strong size controllability, good crystallinity, and uniform nanotube wall shape, thereby greatly improving The comprehensive performance of the finished product of the molybdenum diselenide nanotube powder material. The invention has wide applicability and is beneficial to large-scale industrial production.

Description

一种二硒化钼纳米管的制备方法A kind of preparation method of molybdenum diselenide nanotube

技术领域technical field

本发明涉及半导体纳米材料领域,特别涉及一种半导体纳米管的制备方法。The invention relates to the field of semiconductor nanomaterials, in particular to a method for preparing semiconductor nanotubes.

背景技术Background technique

二维半导体材料因其本身固有的较大的带隙使大家对其的研究越来越多。但对于石墨烯来说,虽然因其显著的载流子迁移率使其在电子学方面有很大的研究价值,但是由于带隙的缺失,其在光电子学方面的应用受到很大的限制。二硒化钼是一种过渡金属硒化物,具有带隙的二维层状结构,它是由六角形X-M-X构成的三明治单元堆叠而成,金属元素与硒族元素通过共价键结合成单个三明治单元,而不同的单元通过微弱的范德瓦尔斯力结合。这种独特的能带结构决定其具有丰富的电子态,使得它们非常适合电子学、光子学等领域的应用。另外,二硒化钼单层片呈立体多孔结构,具有良好的结构刚性,可显著提高器件的热学和力学等性能。因此,二硒化钼二维晶体将在太阳电池、光催化剂、光电晶体管、发光二极管和光调制器等领域都具有广阔的应用前景。目前的研究报道,主要是关注多层二硒化钼的制备及性能研究,关于一维材料的研究较少,尤其是制备方法。Two-dimensional semiconductor materials have been studied more and more because of their inherent large band gap. But for graphene, although it has great research value in electronics because of its remarkable carrier mobility, its application in optoelectronics is greatly limited due to the lack of band gap. Molybdenum diselenide is a transition metal selenide with a two-dimensional layered structure with a band gap. It is stacked by sandwich units composed of hexagonal X-M-X. Metal elements and selenium elements are combined into a single sandwich by covalent bonds unit, and different units are joined by weak van der Waals forces. This unique energy band structure determines that they have abundant electronic states, making them very suitable for applications in electronics, photonics and other fields. In addition, the molybdenum diselenide single-layer sheet has a three-dimensional porous structure and has good structural rigidity, which can significantly improve the thermal and mechanical properties of the device. Therefore, two-dimensional molybdenum diselenide crystals will have broad application prospects in the fields of solar cells, photocatalysts, phototransistors, light-emitting diodes, and light modulators. The current research reports mainly focus on the preparation and performance research of multilayer molybdenum diselenide, and there are few studies on one-dimensional materials, especially the preparation method.

发明内容Contents of the invention

本发明的目的在于针对上述现有技术的不足,提供一种二硒化钼纳米管的制备方法,其所得二硒化钼纳米管粉体材料具有广泛的适用性,综合性能优异,可应用于电子学器件。The object of the present invention is to provide a method for preparing molybdenum diselenide nanotubes in view of the deficiencies in the prior art above. Electronic devices.

本发明所采取的技术方案是:一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:The technical solution adopted by the present invention is: a preparation method of molybdenum diselenide nanotubes, which comprises the following process steps:

1)以六羰基钼作为原料,多孔阳极氧化铝作为模板,将原料铺装在陶瓷坩埚底部,后将多孔阳极氧化铝模板开口向下置于原料上方,密封坩埚后置于真空管式炉中,在气体保护下加热,低温升华,使六羰基钼在多孔阳极氧化铝模板中升华并沉积,继续升温,使六羰基钼沉积在多孔阳极氧化铝模板中热分解,得金属钼沉积;1) Using molybdenum hexacarbonyl as raw material and porous anodized alumina as a template, the raw material is paved on the bottom of the ceramic crucible, and then the porous anodized aluminum template is placed on the raw material with the opening downward, and the crucible is sealed and placed in a vacuum tube furnace. Heating under gas protection, sublimation at low temperature, sublimates and deposits molybdenum hexacarbonyl in the porous anodized aluminum template, and continues to raise the temperature to thermally decompose the molybdenum hexacarbonyl deposited in the porous anodized aluminum template to obtain metal molybdenum deposition;

2)待步骤1)的真空管式炉降至室温后,取出氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在气体保护下升温,使单质硒与金属钼直接反应,停止加热,坩埚随炉冷却至室温;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the alumina template, place its opening downwards in a ceramic crucible filled with selenium powder, place it in a vacuum tube furnace after sealing the crucible, and place it under gas protection Lower the temperature to make the elemental selenium react directly with metal molybdenum, stop heating, and cool the crucible to room temperature with the furnace;

3)用稀酸溶液去除多孔氧化铝模板和多余的硒,去离子水清洗,后进行抽滤处理,烘干,得成品。3) Remove the porous alumina template and excess selenium with a dilute acid solution, wash with deionized water, perform suction filtration, and dry to obtain a finished product.

作为上述方案的进一步改进,步骤1)中所述的多孔阳极氧化铝模板的孔径在10~200nm范围内。具体地,本发明对多孔阳极氧化铝模板孔径的限定可使纳米管的形貌可控性更强。As a further improvement of the above solution, the pore diameter of the porous anodized alumina template described in step 1) is in the range of 10-200 nm. Specifically, the limitation of the pore size of the porous anodized aluminum template in the present invention can make the shape of the nanotubes more controllable.

作为上述方案的进一步改进,步骤1)中所述的低温升华的温度为50~150℃,升华时间为30~200min。本发明通过低温升华直接得到沉积物,其对升华温度及保温时长的限定可使六羰基钼沉积更充分。As a further improvement of the above scheme, the temperature of the low-temperature sublimation described in step 1) is 50-150° C., and the sublimation time is 30-200 min. The present invention directly obtains deposits through low-temperature sublimation, and the limitation of sublimation temperature and holding time can make molybdenum hexacarbonyl deposit more fully.

作为上述方案的进一步改进,步骤1)中所述热分解的温度为200~420℃,热分解时间为30~100min。具体地,本发明热解温度和热解时间的限定可有效提高金属钼在氧化铝模板中的结晶度。As a further improvement of the above solution, the thermal decomposition temperature in step 1) is 200-420° C., and the thermal decomposition time is 30-100 min. Specifically, the limitation of the pyrolysis temperature and pyrolysis time in the present invention can effectively improve the crystallinity of metal molybdenum in the alumina template.

作为上述方案的进一步改进,步骤2)中所述单质硒与金属钼的反应温度为500~750℃,反应时间为30~120min。具体地,本发明对二硒化钼反应温度及时间的限定可使反应更充分。As a further improvement of the above scheme, the reaction temperature of elemental selenium and metal molybdenum in step 2) is 500-750° C., and the reaction time is 30-120 min. Specifically, the limitation of the reaction temperature and time of molybdenum diselenide in the present invention can make the reaction more complete.

作为上述方案的进一步改进,步骤3)中所述的稀酸溶液为浓度为0.1~3mol/L的磷酸溶液。具体地,稀酸溶液的进一步限定可更高效地去除氧化铝模板。As a further improvement of the above solution, the dilute acid solution in step 3) is a phosphoric acid solution with a concentration of 0.1-3 mol/L. Specifically, further confinement of the dilute acid solution allows for more efficient removal of the alumina template.

作为上述方案的进一步改进,步骤1)和步骤2)中所述的气体为氩气或者氮气,气体纯度为99.999%,所述气体保护的气体流速为10~500SCCM。As a further improvement of the above scheme, the gas described in step 1) and step 2) is argon or nitrogen, the gas purity is 99.999%, and the gas flow rate of the gas protection is 10-500 SCCM.

本发明的有益效果是:本发明方法步骤简单,实现了金属钼与硒粉在受限空间里直接反应制备而成二硒化钼纳米管粉体材料,其无环境污染,无需复杂的设备,所制备得的二硒化钼纳米管粉体材料的尺寸可控性强,结晶性好,纳米管管壁形貌均匀,从而大大提高该二硒化钼纳米管粉体材料成品的综合性能。本发明具有广泛的适用性,有利于大规模工业化生产。The beneficial effects of the present invention are: the method of the present invention has simple steps, realizes the direct reaction of metal molybdenum and selenium powder in a confined space to prepare a molybdenum diselenide nanotube powder material, which has no environmental pollution and does not require complicated equipment. The prepared molybdenum diselenide nanotube powder material has strong size controllability, good crystallinity, and uniform nanotube wall shape, thereby greatly improving the comprehensive performance of the finished product of the molybdenum diselenide nanotube powder material. The invention has wide applicability and is beneficial to large-scale industrial production.

具体实施方式Detailed ways

下面结合实施例对本发明进行具体描述,以便于所属技术领域的人员对本发明的理解。有必要在此特别指出的是,实施例只是用于对本发明做进一步说明,不能理解为对本发明保护范围的限制,所属领域技术熟练人员,根据上述发明内容对本发明作出的非本质性的改进和调整,应仍属于本发明的保护范围。同时下述所提及的原料未详细说明的,均为市售产品;未详细提及的工艺步骤或制备方法为均为本领域技术人员所知晓的工艺步骤或制备方法。The present invention will be specifically described below in conjunction with the embodiments, so that those skilled in the art can understand the present invention. It is necessary to point out here that the embodiments are only used to further illustrate the present invention, and cannot be interpreted as limiting the protection scope of the present invention. Those skilled in the art can make non-essential improvements and improvements to the present invention according to the above-mentioned content of the invention. Adjustment should still belong to the protection scope of the present invention. At the same time, if the raw materials mentioned below are not specified in detail, they are all commercially available products; the process steps or preparation methods not mentioned in detail are all process steps or preparation methods known to those skilled in the art.

实施例1Example 1

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氩气清洗炉管中的空气。在100SCCM的氩气保护下,升温至100℃并保温60min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed it with 100 SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 100SCCM argon gas, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氩气保护下升温至250℃并保温60min,继续升温至650℃并保温90min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM argon gas, heat up to 250°C and keep it for 60 minutes, continue to heat up to 650°C and keep it for 90 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例1二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of molybdenum diselenide nanotube powder material in Example 1.

实施例2Example 2

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为10nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氩气清洗炉管中的空气。在100SCCM的氩气保护下,升温至50℃并保温200min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore size of 10nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and pass it into 100SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 100SCCM argon gas, raise the temperature to 50°C and keep it for 200min, then continue to raise the temperature to 300°C and keep it for 40min to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氩气保护下升温至220℃并保温60min,继续升温至550℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM argon gas, heat up to 220°C and keep it for 60 minutes, continue to heat up to 550°C and keep it for 120 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例2二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 2.

实施例3Example 3

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为200nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氩气清洗炉管中的空气。在100SCCM的氩气保护下,升温至150℃并保温30min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore size of 200nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed it with 100 SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 100SCCM argon gas, raise the temperature to 150°C and keep it for 30 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氩气保护下升温至220℃并保温60min,继续升温至550℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM argon gas, heat up to 220°C and keep it for 60 minutes, continue to heat up to 550°C and keep it for 120 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.1mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例3二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.1mol/L, wash it with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 3.

实施例4Example 4

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氮气清洗炉管中的空气。在100SCCM的氮气保护下,升温至100℃并保温60min,后继续升温至200℃并保温100min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed in 100 SCCM of nitrogen Purge air from furnace tubes. Under the protection of nitrogen at 100SCCM, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 200°C and keep it for 100 minutes to get molybdenum metal deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氮气保护下升温至220℃并保温60min,继续升温至550℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM nitrogen, raise the temperature to 220°C and keep it for 60 minutes, continue to raise the temperature to 550°C and keep it for 120 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例4二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 3mol/L, wash with deionized water, perform suction filtration, and dry , to obtain the finished product of molybdenum diselenide nanotube powder material in Example 4.

实施例5Example 5

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氩气清洗炉管中的空气。在100SCCM的氩气保护下,升温至100℃并保温60min,后继续升温至420℃并保温30min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed it with 100 SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 100SCCM argon gas, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 420°C and keep it for 30 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氩气保护下升温至300℃并保温60min,继续升温至550℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM argon gas, heat up to 300°C and keep it for 60 minutes, continue to heat up to 550°C and keep it for 120 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例5二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 5.

实施例6Example 6

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入100SCCM的氩气清洗炉管中的空气。在100SCCM的氩气保护下,升温至100℃并保温60min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and feed it with 100 SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 100SCCM argon gas, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在100SCCM的氩气保护下升温至300℃并保温60min,继续升温至550℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 100SCCM argon gas, heat up to 300°C and keep it for 60 minutes, continue to heat up to 550°C and keep it for 120 minutes, then stop heating;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例6二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 6.

实施例7Example 7

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入10SCCM的氩气清洗炉管中的空气。在10SCCM的氩气保护下,升温至100℃并保温60min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and pass it into 10SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of 10SCCM argon gas, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在10SCCM的氩气保护下升温至220℃并保温120min,继续升温至500℃并保温120min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 10SCCM of argon gas, the temperature was raised to 220°C and kept for 120min, then the temperature was raised to 500°C and kept for 120min, and then the heating was stopped;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例7二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 7.

实施例8Example 8

一种二硒化钼纳米管的制备方法,其包括如下工艺步骤:A preparation method for molybdenum diselenide nanotubes, comprising the following process steps:

1)将5g六羰基钼铺装在陶瓷坩埚底部,将孔径为40nm的多孔阳极氧化铝模板开口向下置于六羰基钼上方,密封坩埚后置于真空管式炉中,并通入500SCCM的氩气清洗炉管中的空气。在500SCCM的氩气保护下,升温至100℃并保温60min,后继续升温至300℃并保温40min,得金属钼沉积,停止加热;1) Spread 5g of molybdenum hexacarbonyl on the bottom of a ceramic crucible, place a porous anodized aluminum template with a pore diameter of 40nm downwards on top of the molybdenum hexacarbonyl, seal the crucible and place it in a vacuum tube furnace, and pass it into 500SCCM of argon Gas cleaning of the air in the furnace tubes. Under the protection of argon gas at 500SCCM, raise the temperature to 100°C and keep it for 60 minutes, then continue to raise the temperature to 300°C and keep it for 40 minutes to get metal molybdenum deposition, stop heating;

2)待步骤1)的真空管式炉降至室温后,取出多孔阳极氧化铝模板,并将其开口向下置于装有硒粉的陶瓷坩埚中,密封坩埚后置于真空管式炉中,在500SCCM的氩气保护下升温至220℃并保温60min,继续升温至750℃并保温30min,停止加热;2) After the vacuum tube furnace in step 1) is down to room temperature, take out the porous anodized aluminum template, place its opening downwards in a ceramic crucible filled with selenium powder, seal the crucible and place it in a vacuum tube furnace, Under the protection of 500SCCM argon gas, the temperature was raised to 220°C and kept for 60 minutes, then the temperature was raised to 750°C and kept for 30 minutes, and then the heating was stopped;

3)待步骤2)陶瓷坩埚温度降至室温时,取出样品,用浓度为0.3mol/L的磷酸溶液去除多孔氧化铝模板和多余的硒粉,去离子水清洗,后进行抽滤处理,烘干,得实施例8二硒化钼纳米管粉体材料成品。3) When the temperature of the ceramic crucible in step 2) drops to room temperature, take out the sample, remove the porous alumina template and excess selenium powder with a phosphoric acid solution with a concentration of 0.3mol/L, wash with deionized water, and then carry out suction filtration and drying Dry to obtain the finished product of the molybdenum diselenide nanotube powder material of Example 8.

实施例9Example 9

将上述实施例1~8所制备得的二硒化钼纳米管粉体材料成品分别用扫描电镜观察,观察得其均形成管壁形貌均匀、直径均一的一维管状结构,其结晶性好,纳米管形貌可控性强。The finished molybdenum diselenide nanotube powder materials prepared in the above-mentioned Examples 1 to 8 were respectively observed with a scanning electron microscope, and it was observed that they all formed a one-dimensional tubular structure with uniform tube wall morphology and uniform diameter, and their crystallinity was good. , the shape of nanotubes is highly controllable.

上述实施例为本发明的优选实施例,凡与本发明类似的工艺及所作的等效变化,均应属于本发明的保护范畴。The above-mentioned embodiments are preferred embodiments of the present invention, and all processes similar to those of the present invention and equivalent changes should all belong to the protection category of the present invention.

Claims (7)

1. a kind of preparation method of two selenizings molybdenum nanotube, it is characterised in that comprise the technical steps that:
1) using hexacarbonylmolybdenum as raw material, porous anodic aluminium oxide mats formation raw material in ceramic crucible bottom as template, after will Open Side Down is placed in above raw material for porous anodic alumina template, and sealed crucible is placed in vacuum tube furnace, in gas shield Lower heating, low-temperature distillation, makes hexacarbonylmolybdenum be deposited in porous anodic alumina template, continues to heat up, and makes to be deposited on porous sun Hexacarbonylmolybdenum thermal decomposition in the alumina formwork of pole, obtains metal molybdenum deposition;
2) treat that the vacuum tube furnace of step 1) is cooled to room temperature, take out porous anodic alumina template, and Open Side Down puts by it In the ceramic crucible equipped with selenium powder, sealed crucible is placed in vacuum tube furnace, is heated up under gas shield, make elemental selenium with Metal molybdenum is directly reacted, and stops heating after completion of the reaction, and crucible cools to room temperature with the furnace;
3) porous alumina formwork and unnecessary selenium are removed with dilute acid soln, deionized water cleaning, after carry out suction filtration processing, dry It is dry, obtain finished product.
A kind of 2. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Described in step 1) Porous anodic alumina template aperture in the range of 10~200nm.
A kind of 3. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Described in step 1) Low-temperature distillation temperature be 50~150 DEG C, sublimation time is 30~200min.
A kind of 4. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Described in step 1) The temperature of thermal decomposition is 200~420 DEG C, and thermal decomposition time is 30~100min.
A kind of 5. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Described in step 2) The reaction temperature of elemental selenium and metal molybdenum is 500~750 DEG C, and the reaction time is 30~120min.
A kind of 6. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Described in step 3) Dilute acid soln be phosphoric acid solution that concentration is 0.1~3mol/L.
A kind of 7. preparation method of two selenizings molybdenum nanotube according to claim 1, it is characterised in that:Step 1) and step 2) gas described in is argon gas or nitrogen, gas purity 99.999%, the gas flow rate of the gas shield for 10~ 500SCCM。
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