CN107916401A - Crucible and evaporation coating device is deposited - Google Patents

Abstract

Evaporation coating technique field of the present invention, proposes a kind of evaporation crucible, which includes crucible crucible body, crucible lid and dottle pin ring；Crucible crucible body has the first joint face of annular；Crucible lid has the second joint face of annular；Dottle pin ring is arranged to the annular being adapted with the first joint face and the second joint face, and dottle pin ring is between the first joint face and the second joint face.The evaporation crucible is isolated crucible lid with crucible crucible body by dottle pin ring, is easy to control the temperature difference between crucible lid and crucible crucible body.

Description

Evaporation crucible and evaporation device

technical field

The invention relates to the technical field of evaporation, in particular to an evaporation crucible and an evaporation device.

Background technique

In the OLED display panel, the OLED light-emitting structure is a similar sandwich structure formed by a series of organic material films sandwiched between two film electrodes. The manufacture of organic material thin films usually adopts the method of vacuum thermal evaporation, specifically: put the organic material in a crucible, and then heat the crucible in a vacuum environment, so that the organic material in the crucible is vaporized and ejected upwards, and deposited at the temperature above On the lower glass substrate, an organic thin film with a thickness of nanometers is formed on the glass substrate.

At present, the commonly used crucible has a barrel shape, and the barrel-shaped evaporation source is called a point evaporation source; there is also a long groove-shaped crucible called a line evaporation source. Referring to the crucible for line evaporation source shown in Fig. 1, Fig. 2 and Fig. 3, the crucible includes a crucible body 1 and a crucible cover 2 arranged in upper and lower parts. The ends are snug and locked. Since the upper and lower parts are close to each other, the heat conduction is better, even if the upper and lower parts are heated by different heaters, it is not easy to increase and control the temperature difference between the upper and lower parts. Furthermore, during the evaporation process, the vapor of the organic material will enter the gap between the upper and lower parts. After the crucible is cooled, the vapor of the organic material will also cool and form a solid state, which will stick the upper and lower parts together. It is difficult to separate the upper and lower parts. Parts are separated.

Therefore, it is necessary to study an evaporation crucible and an evaporation device.

The above information disclosed in this Background section is only for enhancement of understanding of the background of the invention and therefore it may contain information that does not form the prior art that is already known in the art to a person of ordinary skill in the art.

Contents of the invention

The object of the present invention is to overcome at least one deficiency of the above-mentioned prior art, and provide an evaporation crucible and an evaporation device that are easy to control the temperature difference.

Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

According to one aspect of the present disclosure, there is provided an evaporation crucible, comprising:

The crucible body has an annular first connecting surface;

The crucible lid has an annular second connecting surface;

The spacer ring is arranged in a ring shape suitable for the first connection surface and the second connection surface, and the spacer ring is located between the first connection surface and the second connection surface.

In an exemplary embodiment of the present disclosure, at least one hole is provided on a surface of the spacer ring that is in contact with the first connecting surface.

In an exemplary embodiment of the present disclosure, the hole is a through hole connecting the crucible body and the crucible cover.

In an exemplary embodiment of the present disclosure, the shape of the cross section of the through hole parallel to the first connecting surface is one or more of polygon and circle.

In an exemplary embodiment of the present disclosure, the hole is a first blind hole.

In an exemplary embodiment of the present disclosure, at least one second blind hole is provided on a surface of the spacer ring that is in contact with the second connecting surface.

In an exemplary embodiment of the present disclosure, the shape of the section of the first blind hole parallel to the first connection surface is one or more of polygon and circle; the second blind hole The shape of the section parallel to the second connection surface is one or more of polygon and circle.

In an exemplary embodiment of the present disclosure, at least one of the first blind hole and the second blind hole is configured in a ring shape adapted to the spacer ring.

In an exemplary embodiment of the present disclosure, the portion of the spacer ring in contact with the first connection surface is set as a plane, and the portion of the spacer ring in contact with the second connection surface is set for the plane.

According to one aspect of the present disclosure, an evaporation device is provided, comprising:

The evaporation crucible described in any one of the above.

It can be seen from the above technical solution that the present invention has at least one of the following advantages and positive effects:

In the vapor deposition crucible and vapor deposition device of the present invention, a spacer ring is arranged between the connecting surface of the crucible body and the crucible cover body. On the one hand, the crucible body and the crucible cover can be separated by the spacer ring, reducing the heat transfer between the crucible body and the crucible cover, so that it is easy to increase the temperature difference between the crucible body and the crucible cover, and it is also easy to control The temperature difference between the crucible body and the crucible lid; on the other hand, the gap between the spacer ring and the crucible body is smaller than the gap between the crucible body and the crucible lid in the prior art, and the spacer ring and the crucible The gap of the cover body is also smaller than the gap between the crucible body and the crucible cover body in the prior art, therefore, the sealing between the crucible body and the crucible cover body can be increased by the spacer ring, and the vapor of the organic material is also reduced. It is not easy to enter the gap between the spacer ring and the crucible body and the crucible lid, so that it is easier to separate the crucible lid from the crucible body than in the prior art.

Description of drawings

The above and other features and advantages of the present invention will become more apparent by describing in detail example embodiments thereof with reference to the accompanying drawings.

Fig. 1 is a schematic cross-sectional view of a crucible for a centerline evaporation source in the prior art;

Fig. 2 is a left side sectional schematic diagram of Fig. 1;

Fig. 3 is a top view schematic diagram of Fig. 1;

Fig. 4 is a schematic cross-sectional view of an exemplary embodiment of the evaporation crucible of the present invention;

Fig. 5 is a schematic structural view of the spacer ring in Fig. 4;

6 is a schematic cross-sectional view of an example embodiment of the spacer ring of FIG. 4;

7 is a schematic cross-sectional view of another example embodiment of the spacer ring in FIG. 4;

8 is a schematic cross-sectional view of yet another example embodiment of the spacer ring in FIG. 4;

Fig. 9 is a structural schematic diagram of an exemplary embodiment of the cross-sectional shape of the hole on the spacer ring in Fig. 4;

FIG. 10 is a structural schematic diagram of another exemplary embodiment of the cross-sectional shape of the hole on the spacer ring in FIG. 4 .

The reference signs of the main components in the figure are explained as follows:

1. Crucible body;

11. The first connecting plate;

2. Crucible cover;

21. The second connecting plate;

3. Spacer ring;

31. Through hole;

32. The first blind hole;

33. The second blind hole;

34. Annular groove;

4. Locking bolts;

5. Lock nut;

6. Nozzle.

Detailed ways

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.

Referring to the schematic cross-sectional view of the evaporation crucible of the present invention shown in FIG. 4; the evaporation crucible may include a crucible body 1, a crucible cover body 2, a spacer ring 3, etc.; the crucible body 1 has a ring-shaped first connecting surface; The crucible lid 2 has an annular second connection surface; the spacer ring 3 can be arranged as a ring suitable for the first connection surface and the second connection surface, and the spacer ring 3 is located between the first connection surface and the second connection surface. Between the second connection surfaces, at least one hole is provided on the side of the spacer ring 3 that is in contact with the first connection surface.

The crucible body 1 has an annular first connecting surface, and the crucible cover 2 has an annular second connecting surface. The crucible body 1 needs to be connected with the crucible cover body 2 in one circle, therefore, the first connection surface is ring-shaped, and similarly, the second connection surface is also ring-shaped. In this exemplary embodiment, the opening of the crucible body 1 may be provided with a rectangular ring-shaped first connecting plate 11, and the first connecting plate 11 may extend to the outside of the crucible body 1, and the upper portion of the first connecting plate 11 The surface is the first connecting surface. The opening of the crucible cover 2 can be provided with a rectangular ring-shaped second connecting plate 21, and the second connecting plate 21 extends to the outside of the crucible cover 2, and the lower surface of the second connecting plate 21 is the second connecting surface. Both the first connecting plate 11 and the second connecting plate 21 are provided with through holes 31, and after the locking bolt 4 passes through the two through holes 31, the first connecting plate 11 and the second connecting plate 21 are fixed together by the locking nut 5 , so that the crucible lid 2 and the crucible body 1 are fixed together. The nozzle 6 can be arranged on the crucible cover 2, and there can be multiple nozzles 6, and the vapor of the organic material is sprayed out through the nozzle 6, and then deposited on the lower temperature glass substrate above. The contact surface between the crucible cover 2 and the crucible body 1 can be increased through the first connecting plate 11 and the second connecting plate 21 , and it is convenient to install and fix the locking structure.

The spacer ring 3 is arranged in a ring shape suitable for the first connection surface and the second connection surface, and the spacer ring 3 is located between the first connection surface and the second connection surface. In this exemplary embodiment, refer to the schematic structural diagram of the spacer ring 3 shown in FIG. 5 ; the spacer ring 3 is also arranged in a rectangular ring shape compatible with the first connecting plate 11 and the second connecting plate 21 . The crucible body 1 and the crucible lid 2 can be isolated by the spacer ring 3, and the heat transfer between the crucible body 1 and the crucible lid 2 can be reduced, thereby easily increasing the temperature difference between the crucible body 1 and the crucible lid 2 , it is also easy to control the temperature difference between the crucible body 1 and the crucible lid 2 . In addition, those skilled in the art can understand that the specific structure of the spacer ring 3 is not limited to the above-mentioned rectangular ring shape, and can be set according to the specific shapes of the crucible body 1 and the crucible lid body 2 .

At least one hole is provided on the surface of the spacer ring 3 that is in contact with the first connection surface. Referring to the structural diagram of an example embodiment of the spacer ring 3 shown in FIG. 6 ; the hole may be a through hole 31 connecting the crucible body 1 and the crucible lid 2 . In this example embodiment, the through holes 31 are provided in plural. The through hole 31 can reduce the contact surface between the spacer ring 3 and the crucible body 1 and the spacer ring 3 and the crucible lid 2, and when the vapor of the organic material enters the spacer ring 3 and the crucible body 1 and the spacer ring 3 and the crucible After the gap between the lids 2, at the position with holes, the solidified organic material will not stick the spacer ring 3 and the crucible body 1 and the spacer ring 3 and the crucible lid 2 together, so it is easy to seal the spacer The ring 3 is separated from the crucible body 1 and the spacer ring 3 is separated from the crucible lid 2 , so that the crucible lid 2 is easily separated from the crucible body 1 . The through hole 31 is a through hole 31 whose central axis is perpendicular to the first connecting surface and the second connecting surface, and the through hole 31 is convenient for processing. In addition, the through hole 31 may also be arranged in a curved shape or an inclined shape, which all belong to the protection scope of the present invention.

Referring to the structural diagram of another example embodiment of the spacer ring 3 shown in FIG. 7 ; the hole can be set as a first blind hole 32 . In this example embodiment, a plurality of first blind holes 32 may be provided. Of course, the shape of the cross-section of the first blind hole 32 parallel to the first connection surface may also be one or more of various polygons, circles, and irregular shapes. There is no special limitation here. Through the first blind hole 32, the contact surface between the spacer ring 3 and the crucible body 1 can be reduced, and the crucible lid 2 and the crucible body 1 can be easily separated.

Further, at least one second blind hole 33 may be provided on the surface of the spacer ring 3 that is in contact with the second connecting surface. In this example embodiment, a plurality of second blind holes 33 may be provided. Of course, the shape of the cross-section of the second blind hole 33 parallel to the second connection surface can also be one or more of various polygons, circles, and irregular shapes. There is no special limitation here. The contact surface between the spacer ring 3 and the crucible cover 2 can be reduced through the second blind hole 33 , and it is also easy to separate the crucible cover 2 from the crucible body 1 .

Referring to the schematic structural diagram of another exemplary embodiment of the spacer ring 3 shown in FIG. . In this example embodiment, the first blind hole 32 and the second blind hole 33 are set to one, that is, the first blind hole 32 can be set as an annular groove 34 compatible with the spacer ring 3, and the second blind hole 33 can also be set as an annular groove 34 compatible with the spacer ring 3 .

Referring to the structural schematic diagram of an exemplary embodiment of the cross-sectional shape of the hole on the spacer ring 3 shown in FIG. 9 ; the cross-sectional shape of the hole parallel to the first connecting surface is a regular hexagon. Referring to the structural schematic diagram of another exemplary embodiment of the cross-sectional shape of the hole on the spacer ring 3 shown in FIG. 10 ; the cross-sectional shape of the hole parallel to the first connecting surface is a square. Certainly, those skilled in the art can understand that, the shape of the section parallel to the first connection surface of the through hole 31, the first blind hole 32 and the second blind hole 33 can also be various polygons, circles, grooves, etc. One or more of shapes and irregular shapes. Examples are not given here.

The portion of the spacer ring 3 that is in contact with the first connection surface and the portion that is in contact with the second connection surface are both set as planes. In this exemplary embodiment, the first connecting plate 11 is arranged in a flat plate shape, and the first connecting surface is a plane; the second connecting plate 21 is also arranged in a flat plate shape, and the second connecting surface is also a plane; the spacer ring 3 The part in contact with the first connection surface is set as a plane, and the part of the spacer ring 3 in contact with the second connection surface is also set as a plane. In addition, in other exemplary embodiments of the present invention, the first connecting surface can be set in a stepped shape, and the second connecting surface can also be set in a stepped shape matching the first connecting surface. At this time, the spacer ring 3 can be set as A planar shape that fits one step surface can also be set as a stepped shape that fits the entire step.

Further, the present invention also provides an evaporation device, which includes the above-mentioned evaporation crucible. The specific structure of the evaporation crucible has been described in detail above, and will not be repeated here.

In the vapor deposition device and the vapor deposition crucible of the present invention, a spacer ring 3 is arranged between the connecting surface of the crucible body 1 and the crucible lid body 2, and the spacer ring 3 is in contact with the first connecting surface of the crucible body 1. One side is provided with at least one hole. On the one hand, the crucible body 1 and the crucible lid 2 can be isolated by the spacer ring 3, reducing the heat transfer between the crucible body 1 and the crucible lid 2, thereby easily increasing the distance between the crucible body 1 and the crucible lid 2. It is also easy to control the temperature difference between the crucible body 1 and the crucible lid 2; On the contact surface with the crucible body 1, after the steam of the organic material enters the gap between the spacer ring 3 and the crucible body 1, at the position where there is a hole, the solidified organic material will not separate the spacer ring 3 and the crucible body. The crucible body 1 sticks together, and it is easy to separate the spacer ring 3 from the crucible body 1, thereby easily separating the crucible lid body 2 from the crucible body 1; on the other hand, the hole on the spacer ring 3 is air, and the air The heat transfer between the crucible body 1 and the crucible lid 2 can be further reduced, it is easier to increase the temperature difference between the crucible body 1 and the crucible lid 2, and it is also easier to control the temperature difference between the crucible body 1 and the crucible lid 2. the temperature difference between.

The features, structures or characteristics described above may be combined in any suitable manner in one or more embodiments and, where possible, the features discussed in the various embodiments are interchangeable. In the foregoing description, numerous specific details were provided in order to give a thorough understanding of embodiments of the invention. Those skilled in the art will appreciate, however, that the technical solutions of the present invention may be practiced without one or more of the specific details, or that other methods, components, materials, etc. may be employed. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of the invention.

Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification only for convenience, for example, according to the description in the accompanying drawings directions for the example described above. It will be appreciated that if the illustrated device is turned over so that it is upside down, then elements described as being "upper" will become elements that are "lower". When a structure is "on" another structure, it may mean that a structure is integrally formed on another structure, or that a structure is "directly" placed on another structure, or that a structure is "indirectly" placed on another structure through another structure. other structures.

In this specification, the terms "a", "an", "the", "said" and "at least one" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising", "including" and "Having" is used to indicate an open-ended inclusive meaning and means that there may be additional elements/components/etc. in addition to the listed elements/components/etc.; the terms "first", "second " and "Third" etc. are used only as marks, not as restrictions on the number of their objects.

It should be understood that the invention is not limited in its application to the detailed construction and arrangement of components set forth in this specification. The invention is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications fall within the scope of the present invention. It shall be understood that the invention disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute alternative aspects of the invention. The embodiments described in this specification illustrate the best modes known for carrying out the invention and will enable others skilled in the art to utilize the invention.

Claims (10)

1. An evaporation crucible, characterized in that, comprising: The crucible body has an annular first connection surface; The crucible lid has an annular second connecting surface; The spacer ring is arranged in a ring shape suitable for the first connection surface and the second connection surface, and the spacer ring is located between the first connection surface and the second connection surface. 2 . The evaporation crucible according to claim 1 , wherein at least one hole is provided on the surface of the spacer ring that is in contact with the first connection surface. 3 . 3. The evaporation crucible according to claim 2, wherein the hole is a through hole connecting the crucible body and the crucible cover. 4 . The evaporation crucible according to claim 3 , wherein the shape of the cross section of the through hole parallel to the first connection surface is one or more of polygon and circle. 5. The evaporation crucible according to claim 2, wherein the hole is a first blind hole. 6 . The evaporation crucible according to claim 5 , wherein at least one second blind hole is provided on the surface of the spacer ring that is in contact with the second connecting surface. 7. The evaporation crucible according to claim 6, characterized in that, the shape of the section of the first blind hole parallel to the first connection surface is one or more of polygon and circle; The shape of the section of the second blind hole parallel to the second connection surface is one or more of polygon and circle. 8 . The evaporation crucible according to claim 6 , wherein at least one of the first blind hole and the second blind hole is configured as a ring shape adapted to the spacer ring. 9. The evaporation crucible according to any one of claims 1-8, characterized in that, the part of the spacer ring in contact with the first connecting surface is set as a plane, and the part of the spacer ring in contact with the first connection surface The contact part of the second connection surface is set as a plane. 10. An evaporation device, characterized in that, comprising: The evaporation crucible according to any one of claims 1-9.