CN107561008A - A kind of device for VUV diffusing reflection plate BRDF feature measurements - Google Patents
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Abstract
本发明提供了一种用于真空紫外漫反射板BRDF特性测量的测量装置，包括：依次设置于光路中的标准光源、真空紫外单色分光单元、真空紫外准直光学单元、真空仓内二维旋转机构、真空紫外探测单元和控制单元。采用本发明能够对真空紫外漫反射板的双向反射分布函数进行精确测量，波段范围120nm～200nm，测量角度范围为±60°：真空度：≤1×10‑3Pa，测量不确定度：≤6％(k＝2)；本发明能够及时发现真空紫外载荷设计过程中存在的缺陷，减少其研制过程中的反复，节省研制经费，缩短研制周期，避免影响整体进度的顺利开展；同时有效保证了真空紫外空间载荷获取数据的准确性，对获取准确测量数据有着重大意义。
The invention provides a measuring device for measuring BRDF characteristics of a vacuum ultraviolet diffuse reflector, comprising: a standard light source arranged in the optical path in sequence, a vacuum ultraviolet monochromatic spectroscopic unit, a vacuum ultraviolet collimating optical unit, and a two-dimensional Rotary mechanism, vacuum ultraviolet detection unit and control unit. The invention can accurately measure the two-way reflection distribution function of the vacuum ultraviolet diffuse reflection plate, the wave band range is 120nm-200nm, and the measurement angle range is ±60°: vacuum degree: ≤1× 10-3 Pa, measurement uncertainty: ≤ 6% (k=2); the present invention can timely discover the defects existing in the vacuum ultraviolet load design process, reduce repetitions in the development process, save development funds, shorten the development cycle, and avoid affecting the smooth development of the overall progress; at the same time, effectively guarantee It ensures the accuracy of the data acquired by the vacuum ultraviolet space payload, which is of great significance for obtaining accurate measurement data.
Description
技术领域technical field
本发明涉及光学测试技术领域，特别涉及一种用于真空紫外漫反射板BRDF特性测量的装置。The invention relates to the technical field of optical testing, in particular to a device for measuring BRDF characteristics of a vacuum ultraviolet diffuse reflection plate.
背景技术Background technique
真空紫外空间载荷在我国深空探测、远程精确打击等技术领域得到广泛应用，为国家气象预测、军事计划等重大工程服务。在真空紫外空间载荷的地面标定及实时校准中，都需要用到真空紫外漫反射板，真空紫外漫反射板作为这空紫外空间载荷中的核心部件，在真空紫外类空间载荷中得到广泛应用，包括真空紫外成像光谱仪、真空紫外光谱辐射计、电离层光度计等。前期研制的真空紫外空间载荷波段范围通常只能达到160nm，160nm以下波段还未涉及，同时所用的真空紫外漫反射板的BRDF测量，最短也只能到160nm，160nm以下的BRDF测量尚无能力实现。应详细描述现有技术只对200nm以上进行测量Vacuum ultraviolet space payloads have been widely used in my country's deep space exploration, long-range precision strikes and other technical fields, serving major projects such as national weather forecasting and military planning. In the ground calibration and real-time calibration of the vacuum ultraviolet space payload, the vacuum ultraviolet diffuse reflector is required. As the core component of the vacuum ultraviolet space payload, the vacuum ultraviolet diffuse reflector is widely used in the vacuum ultraviolet space payload. Including vacuum ultraviolet imaging spectrometer, vacuum ultraviolet spectroradiometer, ionospheric photometer, etc. The VUV space load band range developed in the early stage usually only reaches 160nm, and the band below 160nm has not been involved yet. At the same time, the BRDF measurement of the vacuum UV diffuse reflector used can only reach 160nm at the shortest, and the BRDF measurement below 160nm has not yet been able to achieve. . It should be described in detail that the existing technology only measures above 200nm
真空紫外漫反射板的双向反射分布函数(BRDF)作为真空紫外漫反射板的一项关键指标，直接决定着真空紫外空间载荷的校准及标定精度，因此对其进行精确测量具有重要的应用意义。现有测量方法无法满足120nm～160nm波段的真空紫外漫反射板BRDF测量要求，而120nm～160nm波段是现阶段及今后应用的主要波段，对该波段进行BRDF测量变得尤为重要；同时，前期的BRDF测量装置未采用锁相放大技术、探测器前端未设计前置光阑，因而测量准确度不高，对后期的数据反演引入较大误差。The bidirectional reflectance distribution function (BRDF) of the vacuum ultraviolet diffuse reflector, as a key index of the vacuum ultraviolet diffuse reflector, directly determines the calibration and calibration accuracy of the vacuum ultraviolet space load, so its accurate measurement has important application significance. The existing measurement methods cannot meet the BRDF measurement requirements of vacuum ultraviolet diffuse reflectors in the 120nm-160nm band, and the 120nm-160nm band is the main band for current and future applications, and it is particularly important to measure BRDF for this band; at the same time, the previous The BRDF measurement device does not use lock-in amplification technology, and the front end of the detector is not designed with a pre-diaphragm, so the measurement accuracy is not high, and large errors are introduced to the later data inversion.
发明内容Contents of the invention
为了解决现有技术无法满足120nm～160nm波段真空紫外漫反射板BRDF测量和160nm～200nm测量准确度偏低的问题，提出了一种用于真空紫外漫反射板BRDF特性测量的装置。In order to solve the problem that the existing technology cannot satisfy the BRDF measurement of the vacuum ultraviolet diffuse reflector in the 120nm-160nm band and the low accuracy of the 160nm-200nm measurement, a device for measuring the BRDF characteristics of the vacuum ultraviolet diffuse reflector is proposed.
本发明的技术解决方案：Technical solution of the present invention:
一种用于真空紫外漫反射板BRDF特性测量的装置，包括：依次设置于光路中的标准光源、真空紫外单色分光单元、真空紫外准直光学单元、真空仓内二维旋转机构和真空紫外探测单元；A device for measuring BRDF characteristics of a vacuum ultraviolet diffuse reflector, comprising: a standard light source, a vacuum ultraviolet monochromatic spectroscopic unit, a vacuum ultraviolet collimation optical unit, a two-dimensional rotating mechanism in a vacuum chamber, and a vacuum ultraviolet detection unit;
光由所述标准光源发出，经真空紫外单色分光单元实现单色光输出，后经真空紫外准直光学单元以准直光的形式照射到被测漫反射板中心位置，真空仓内二维旋转机构带动真空紫外探测单元实现不同角度的旋转，真空紫外探测单元对经过漫反射板反射后的光谱辐亮度值进行测量。The light is emitted by the standard light source, the monochromatic light output is realized by the vacuum ultraviolet monochromatic spectroscopic unit, and then irradiated to the center of the diffuse reflection plate under test in the form of collimated light by the vacuum ultraviolet collimation optical unit. The rotating mechanism drives the vacuum ultraviolet detection unit to rotate at different angles, and the vacuum ultraviolet detection unit measures the spectral radiance value reflected by the diffuse reflection plate.
所述标准光源系统为真空紫外氘灯，波段范围覆盖120nm～200nm。The standard light source system is a vacuum ultraviolet deuterium lamp, and the wavelength range covers 120nm-200nm.
所述真空紫外单色分光单元为真空紫外单色仪，适用波段范围为105nm～1300nm，光谱分辨率为0.04nm，波长重复精度为±0.005nm，系统F数为4.7，焦距为670mm。The vacuum ultraviolet monochromatic spectroscopic unit is a vacuum ultraviolet monochromator, the applicable wavelength range is 105nm-1300nm, the spectral resolution is 0.04nm, the wavelength repeatability is ±0.005nm, the system F number is 4.7, and the focal length is 670mm.
所述真空紫外准直光学单元为透射式光学系统，包括一片球面镜，球面镜第一面曲率半径为425mm，球面镜第二面曲率半径为-452mm，球面镜第一面与第二面之间的距离为10mm，光学系统的设计参数为：焦距520mm，通光口径60mm，所用材料为氟化镁或氟化钙材料。The vacuum ultraviolet collimating optical unit is a transmissive optical system, comprising a spherical mirror, the radius of curvature of the first surface of the spherical mirror is 425mm, the radius of curvature of the second surface of the spherical mirror is -452mm, and the distance between the first surface and the second surface of the spherical mirror is 10mm, the design parameters of the optical system are: focal length 520mm, aperture 60mm, the material used is magnesium fluoride or calcium fluoride.
所述真空仓内二维旋转机构包括悬臂机构和平移机构，悬臂机构顶端安装真空紫外探测系统，并能够带动真空紫外探测系统实现360°的旋转运动；平移机构实现对被测漫反射板的移入和移出，移动行程为30mm左右，以满足现有大部分真空紫外漫反射板的测量尺寸要求。The two-dimensional rotating mechanism in the vacuum chamber includes a cantilever mechanism and a translation mechanism, and a vacuum ultraviolet detection system is installed on the top of the cantilever mechanism, and can drive the vacuum ultraviolet detection system to realize a 360° rotational movement; the translation mechanism realizes moving into the measured diffuse reflection plate And move out, the moving stroke is about 30mm, to meet the measurement size requirements of most existing vacuum ultraviolet diffuse reflectors.
所述真空紫外探测单元包括：适用于真空紫外波段的光电倍增管、锁相放大器和前置光阑，光束经过前置光阑进入光电倍增管后，由光电倍增管探测响应输出电信号，电信号进入锁相放大器进行放大运算，得到被测有效信号。The vacuum ultraviolet detection unit includes: a photomultiplier tube suitable for the vacuum ultraviolet band, a lock-in amplifier and a pre-diaphragm. The signal enters the lock-in amplifier for amplification operation to obtain the effective signal under test.
进一步的还包括控制单元，用以改变真空紫外单色分光单元波长、控制真空仓内二维旋转机构的旋转，并采集真空紫外探测单元的测量数据，处理测量数据得到被测漫反射板的BRDF测量值。It further includes a control unit, which is used to change the wavelength of the vacuum ultraviolet monochromatic spectroscopic unit, control the rotation of the two-dimensional rotating mechanism in the vacuum chamber, collect the measurement data of the vacuum ultraviolet detection unit, and process the measurement data to obtain the BRDF of the diffuse reflection plate under test. Measurements.
本发明与现有技术相比的有益效果：The beneficial effect of the present invention compared with prior art:
采用本发明的真空紫外漫反射板BRDF测量装置发射前即在地面实验室进行测量，能够及时发现真空紫外载荷设计过程中存在的缺陷，减少其研制过程中的反复，节省研制经费，缩短研制周期，避免影响整体进度的顺利开展；同时，由于该测量装置覆盖真空紫外波段，有效保证了真空紫外空间载荷获取数据的准确性，对获取准确测量数据有着重大意义。The vacuum ultraviolet diffuse reflector BRDF measurement device of the present invention is used to measure in the ground laboratory before launching, so that the defects in the vacuum ultraviolet load design process can be found in time, the repetition in the development process can be reduced, the development cost can be saved, and the development cycle can be shortened. , to avoid affecting the smooth progress of the overall progress; at the same time, since the measurement device covers the vacuum ultraviolet band, it effectively ensures the accuracy of the data acquired by the vacuum ultraviolet space payload, which is of great significance for obtaining accurate measurement data.
通过该真空紫外漫反射板BRDF测量装置，可以在120nm～200nm宽波段范围对真空紫外漫反射板的双向反射分布函数(BRDF)进行精确测量，真空紫外漫反射板BRDF测量装置的波段范围120nm～200nm，测量角度范围为±60°：真空度：≤1×10-3Pa，测量不确定度：≤6％(k＝2)。Through the vacuum ultraviolet diffuse reflector BRDF measurement device, the bidirectional reflectance distribution function (BRDF) of the vacuum ultraviolet diffuse reflector can be accurately measured in the wide band range of 120nm to 200nm. 200nm, the measurement angle range is ±60°: vacuum degree: ≤1×10 -3 Pa, measurement uncertainty: ≤6% (k=2).
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1为本发明的真空紫外漫反射板BRDF测量装置的结构示意图。Fig. 1 is a structural schematic diagram of a BRDF measurement device for a vacuum ultraviolet diffuse reflector of the present invention.
附图标记说明：Explanation of reference signs:
1.标准光源、2.真空紫外单色分光单元、3.真空紫外准直光学单元、4.真空仓内二维旋转机构、5.真空紫外探测单元、6.综合控制单元、7.斩波器、8.真空紫外漫反射板。1. Standard light source, 2. Vacuum ultraviolet monochromatic spectroscopic unit, 3. Vacuum ultraviolet collimation optical unit, 4. Two-dimensional rotating mechanism in vacuum chamber, 5. Vacuum ultraviolet detection unit, 6. Integrated control unit, 7. Chopper Device, 8. Vacuum ultraviolet diffuse reflection plate.
具体实施方式detailed description
下面参照附图来说明本发明的实施例。在本发明的一个附图或一种实施方式中描述的元素和特征可以与一个或者更多个其他附图或实施方式中示出的元素和特征相结合。应当注意，为了清楚目的，附图和说明中省略了与本发明无关的、本领域普通技术人员已知的部件和处理的表示和描述。Embodiments of the present invention will be described below with reference to the drawings. Elements and features described in one drawing or one embodiment of the present invention may be combined with elements and features shown in one or more other drawings or embodiments. It should be noted that representation and description of components and processes that are not relevant to the present invention and known to those of ordinary skill in the art are omitted from the drawings and descriptions for the purpose of clarity.
本发明提供了一种真空紫外漫反射板BRDF测量装置，包括：依次设置于光路中的标准光源1、真空紫外单色分光单元2、真空紫外准直光学单元3、真空仓内二维旋转机构4、真空紫外探测单元5以及控制单元6。其中真空紫外准直光学单元3、真空仓内二维旋转机构4和真空紫外探测单元放置于清洁真空仓内。The invention provides a BRDF measuring device for a vacuum ultraviolet diffuse reflector, comprising: a standard light source 1, a vacuum ultraviolet monochromatic spectroscopic unit 2, a vacuum ultraviolet collimation optical unit 3, and a two-dimensional rotating mechanism in a vacuum chamber arranged in sequence in the optical path 4. The vacuum ultraviolet detection unit 5 and the control unit 6 . Wherein the vacuum ultraviolet collimation optical unit 3, the two-dimensional rotating mechanism 4 in the vacuum chamber and the vacuum ultraviolet detection unit are placed in the clean vacuum chamber.
具体的，上述标准光源1为高稳定性标准光源系统，用以提供高稳定性入射光能量，包括真空紫外氘灯，波段范围覆盖120nm～200nm。满足波段范围要求；通过高稳定性标准光源提供整个波段范围内的辐射光源。Specifically, the above-mentioned standard light source 1 is a high-stability standard light source system for providing high-stability incident light energy, including a vacuum ultraviolet deuterium lamp, and the wavelength range covers 120nm-200nm. Satisfy the requirements of the band range; provide the radiation light source in the whole band range through the high stability standard light source.
具体的，真空紫外单色分光单元2，用以生成不同波长的真空紫外单色辐射，主要由真空紫外单色仪组成。真空紫外单色仪的适用波段范围为105nm～1300nm，光谱分辨率为0.04nm，波长重复精度为±0.005nm，系统F数为4.7，焦距为670mm。Specifically, the vacuum ultraviolet monochromatic spectroscopic unit 2 is used to generate vacuum ultraviolet monochromatic radiation of different wavelengths, and is mainly composed of a vacuum ultraviolet monochromator. The applicable wavelength range of the vacuum ultraviolet monochromator is 105nm to 1300nm, the spectral resolution is 0.04nm, the wavelength repeatability is ±0.005nm, the system F number is 4.7, and the focal length is 670mm.
具体的，真空紫外准直光学单元3，用以将经过单色分光系统分光的单色辐射以准直光的形式输出，照射到被测真空紫外漫反射板中心，所述真空紫外准直光学单元3由透射式光学系统组成，透射式光学系统包括一片球面镜，球面镜第一面曲率半径为425mm，球面镜第二面曲率半径为-452mm，球面镜第一面与第二面之间的距离为10mm，光学系统的设计参数为：焦距520mm，通光口径60mm，所用材料为氟化镁或氟化钙材料。进行光学及支撑件结构设计时，需要选择低放气率及低挥发率的材料，避免对真空仓内光学系统的污染，以满足真空条件下的使用要求，保证出射光束具有良好的准直特性，满足系统校准要求。Specifically, the vacuum ultraviolet collimating optical unit 3 is used to output the monochromatic radiation split by the monochromatic spectroscopic system in the form of collimated light, and irradiate the center of the vacuum ultraviolet diffuse reflection plate to be measured. Unit 3 is composed of a transmissive optical system. The transmissive optical system includes a spherical mirror. The radius of curvature of the first surface of the spherical mirror is 425mm, the radius of curvature of the second surface of the spherical mirror is -452mm, and the distance between the first surface and the second surface of the spherical mirror is 10mm. , the design parameters of the optical system are: the focal length is 520mm, the aperture is 60mm, and the material used is magnesium fluoride or calcium fluoride. When designing the structure of optics and supports, it is necessary to choose materials with low outgassing rate and low volatilization rate to avoid pollution to the optical system in the vacuum chamber, so as to meet the requirements of use under vacuum conditions and ensure that the outgoing beam has good collimation characteristics , to meet the system calibration requirements.
具体的，上述真空仓内二维旋转机构4用以改变真空紫外探测系统与被测真空紫外漫反射板法线的夹角，得到不同反射角度的光谱辐亮度值；同时实现被测真空紫外漫反射板的移入和移出。真空仓内二维旋转机构4由悬臂机构、平移机构等组成。悬臂机构顶端安装真空紫外探测单元，并能够带动真空紫外探测单元实现360°的旋转运动；平移机构实现对被测漫反射板的移入和移出，移动行程为30mm。Specifically, the above-mentioned two-dimensional rotating mechanism 4 in the vacuum chamber is used to change the angle between the vacuum ultraviolet detection system and the normal line of the measured vacuum ultraviolet diffuse reflector to obtain spectral radiance values at different reflection angles; Moving in and out of the reflector. The two-dimensional rotating mechanism 4 in the vacuum chamber is composed of a cantilever mechanism, a translation mechanism and the like. The vacuum ultraviolet detection unit is installed on the top of the cantilever mechanism, and can drive the vacuum ultraviolet detection unit to achieve 360°rotational movement; the translation mechanism realizes the moving in and out of the diffuse reflection plate under test, and the moving stroke is 30mm.
具体的，上述真空紫外探测单元5，用以实现对准直光经过被测真空紫外漫反射板反射后不同空间角度的光谱辐亮度进行测量。所述真空紫外探测单元5包括：Specifically, the above-mentioned vacuum ultraviolet detection unit 5 is used to measure the spectral radiance of the collimated light at different spatial angles after being reflected by the vacuum ultraviolet diffuse reflector to be measured. The vacuum ultraviolet detection unit 5 includes:
适用于真空紫外波段的光电倍增管、锁相放大器、前置光阑等。按照光路传输的前后顺序，光束经过前置光阑进入光电倍增管，由光电倍增管探测响应输出电信号，电信号进入锁相放大器进行放大运算，得到被测有效信号。前置光阑可以有效屏蔽测量环境中的杂散光，降低杂散辐射对测量结果的干扰；光电倍增管可以有效放大被测信号值，相比于其它如硅探测器等，信号值可以放大106；锁相放大器利用和被测信号具有相同频率和相位关系的参考信号作为比较基准，只对被测信号本身和那些与参考信号同频的分量有响应，能大幅抑制无用噪声，改善信噪比，是弱光信号检测的有效方法。Suitable for photomultiplier tubes, lock-in amplifiers, pre-diaphragms, etc. in the vacuum ultraviolet band. According to the sequence of optical transmission, the light beam enters the photomultiplier tube through the front aperture, and the photomultiplier tube detects and responds to the output electrical signal, and the electrical signal enters the lock-in amplifier for amplification operation to obtain the effective signal to be measured. The front aperture can effectively shield the stray light in the measurement environment and reduce the interference of stray radiation on the measurement results; the photomultiplier tube can effectively amplify the measured signal value. Compared with other silicon detectors, the signal value can be amplified by 106 ;The lock-in amplifier uses the reference signal with the same frequency and phase relationship as the measured signal as a comparison reference, and only responds to the measured signal itself and those components with the same frequency as the reference signal, which can greatly suppress useless noise and improve the signal-to-noise ratio , is an effective method for weak light signal detection.
通过锁相放大技术，实现对微弱信号的探测，得到经过漫反射板反射后的光谱辐亮度值。根据测量波段120nm～200nm的要求，选用适用于该波段并具有高增益、高稳定性的光电倍增管作为探测元件，并根据选定的光电倍增管的响应频率等特性，设计与锁相放大器配合的斩波器的旋转频率，同时设计前置光阑，降低测量环境中杂散光对探测信号的干扰，通过这一系列措施保障真空紫外BRDF测量的信噪比和准确度，将测量波段范围扩展到120nm。Through the lock-in amplification technology, the detection of weak signals is realized, and the spectral radiance value reflected by the diffuse reflector is obtained. According to the requirements of the measurement band 120nm ~ 200nm, a photomultiplier tube suitable for this band with high gain and high stability is selected as the detection element, and according to the response frequency and other characteristics of the selected photomultiplier tube, it is designed to cooperate with the lock-in amplifier The rotation frequency of the chopper should be fixed, and the front aperture should be designed to reduce the interference of stray light in the measurement environment on the detection signal. Through this series of measures, the signal-to-noise ratio and accuracy of vacuum ultraviolet BRDF measurement can be guaranteed, and the measurement band range can be expanded. to 120nm.
具体的，上述控制单元包括：Specifically, the above-mentioned control unit includes:
工业控制计算机、数据采集电路、综合控制器及系统软件等，综合控制单元用来对各个分系统进行控制与数据采集，包括对真空紫外单色分光系统的波长改变、真空紫外探测系统的数据采集和捕获等，并根据软件中的数学模型进行分析处理，输出BRDF测量结果，并提供对整个系统的供电。Industrial control computer, data acquisition circuit, integrated controller and system software, etc. The integrated control unit is used to control and collect data of each subsystem, including the wavelength change of the vacuum ultraviolet monochromatic spectroscopic system and the data acquisition of the vacuum ultraviolet detection system And capture, etc., and analyze and process according to the mathematical model in the software, output BRDF measurement results, and provide power to the entire system.
光由所述标准光源(1)发出，后经真空紫外单色分光单元(2)实现单色光输出，后经真空紫外准直光学单元(3)以准直光的形式照射到被测漫反射板中心位置，真空仓内二维旋转机构(4)带动真空紫外探测单元(5)实现不同角度的旋转，真空紫外探测单元(5)对经过漫反射板反射后的光谱辐亮度值进行测量，由综合控制单元(6)控制真空仓内二维旋转机构(4)的旋转，并采集真空紫外探测系统(5)的测量数据，并经过相应数学模型计算，得到被测漫反射板的BRDF测量值。The light is emitted by the standard light source (1), and then passed through the vacuum ultraviolet monochromatic spectroscopic unit (2) to realize monochromatic light output, and then irradiated to the measured diffuse in the form of collimated light through the vacuum ultraviolet collimating optical unit (3). At the center of the reflection plate, the two-dimensional rotating mechanism (4) in the vacuum chamber drives the vacuum ultraviolet detection unit (5) to rotate at different angles, and the vacuum ultraviolet detection unit (5) measures the spectral radiance value reflected by the diffuse reflection plate , the integrated control unit (6) controls the rotation of the two-dimensional rotating mechanism (4) in the vacuum chamber, and collects the measurement data of the vacuum ultraviolet detection system (5), and calculates the corresponding mathematical model to obtain the BRDF of the measured diffuse reflection plate Measurements.
虽然已经详细说明了本发明及其优点，但是应当理解在不超出由所附的权利要求所限定的本发明的精神和范围的情况下可以进行各种改变、替代和变换。而且，本申请的范围不仅限于说明书所描述的过程、设备、手段、方法和步骤的具体实施例。本领域内的普通技术人员从本发明的公开内容将容易理解，根据本发明可以使用执行与在此所述的相应实施例基本相同的功能或者获得与其基本相同的结果的、现有和将来要被开发的过程、设备、手段、方法或者步骤。因此，所附的权利要求旨在它们的范围内包括这样的过程、设备、手段、方法或者步骤。Although the present invention and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made hereto without departing from the spirit and scope of the invention as defined by the appended claims. Moreover, the scope of the present application is not limited to the specific embodiments of the procedures, devices, means, methods and steps described in the specification. Those of ordinary skill in the art will readily appreciate from the disclosure of the present invention that existing and future devices that perform substantially the same function or obtain substantially the same results as the corresponding embodiments described herein can be used in accordance with the present invention. The developed process, device, means, method or steps. Accordingly, the appended claims are intended to include within their scope such processes, means, means, methods or steps.
本发明未详细说明部分为本领域技术人员公知技术。Parts not described in detail in the present invention are well-known technologies for those skilled in the art.
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