CN107534006A - Improved Spring Pads for Film Rack Conveyors - Google Patents

Abstract

This invention discloses a membrane carriage conveyor that provides enhanced prevention of membrane carriage runout within the conveyor. Furthermore, the runout-prevention structure also enhances the alignment of the membrane carriage during loading into the conveyor. In some embodiments, such a structure achieves a tighter tolerance fit between the membrane carriage thickness and the registration groove, thereby reducing clearance between the membrane carriage and the registration groove and associated particle generation.

Description

Improved Spring Pads for Film Rack Conveyors

Related applications

This application claims the benefit of US Provisional Patent Application No. 62/133,131 filed March 13, 2015, the disclosure of which is incorporated herein by reference in its entirety.

technical field

The present invention relates generally to wafer conveyors, and more particularly to film rack or tape rack conveyors.

Background technique

Membrane or tape racks typically consist of a stainless steel frame with a membrane extending across the frame. The film has an adhesive on one side thereof. After processing, circular semiconductor wafers are typically placed on the membrane. After being positioned on the film, the semiconductor wafer can be separated into individual pieces (eg, chips), shipped for further processing, or stored. The semiconductor processing industry is using larger and thinner wafers that present handling, shipping and storage disposal challenges due to their greater fragility. To this end, conventional film rack wafer carriers can be modified to handle film racks with such larger and thinner wafers.

Film rack conveyors are widely used in the semiconductor manufacturing industry to convey film racks. A variety of rack conveyors provide a safe and efficient way to transfer and store up to 25 wafers or singulated die mounted to a rack. Replaceable top cover pads allow re-use of the conveyor. The film rack conveyor is suitable for transporting film racks with diameters of 300mm, 200mm and 150mm.

Racks loaded in conventional rack conveyors are known to "jump" during impact events. For example, when a rack conveyor is dropped in a corner, the significant weight of the racks within it can cause momentary deformations in the shape of the polymer, and the inertial forces of the racks contained therein can cause the racks to snap out of their designated registration slots. disengage and contact adjacent film racks and wafers or conveyors on them, resulting in damage to the corresponding wafers.

Referring to Figure 5, a known membrane holder 40 is depicted. Membrane frame 40 includes a frame 42 that defines an outer edge 44 . An adhesive membrane 46 spans the shelf 42 and a wafer 48 is adhered to the adhesive membrane 46 . When a film rack becomes disengaged during an impact event, wafers on the disengaged film rack may contact other wafers, racks 42, or portions of the conveyor, resulting in damage to the wafers.

A film frame conveyor that more reliably maintains film frames in designated registration positions during shock events would be welcome.

Contents of the invention

Various embodiments of the present invention provide enhanced prevention of rack bounce within the rack conveyor. In addition, the anti-bounce structure also enhances the alignment of the film racks during loading onto the conveyor. Furthermore, in certain embodiments, such structures enable a tighter tolerance fit between the thickness of the membrane frame and the registration groove, thereby reducing the play between the membrane frame and the registration groove and the attendant Particles are generated.

Each wafer is supported on a metal or polymer wafer support ring or frame. The wafer support ring is received in and retained by spring pads located at the top and/or bottom of the film rack conveyor. The spring pads exert radial force on the membrane holders to secure each membrane holder in the corresponding registration groove, thereby reducing the movement of the membrane holder in the registration groove during the transfer, and reducing the transfer of particles or particles during the transfer. produce. In some embodiments, the spring pads are removable and/or replaceable, and may include snap features to facilitate coupling the spring pads to the conveyor. Additional features of the frame conveyor include: a positive snap latch for securing the closure of the conveyor; a non-positive latch and a stackable design for reducing storage space and conveying costs; and Rounded corners and sloped sides to reduce water retention during cleaning. The frame conveyor can use ESD safe materials. Radio Frequency Identification (RFID) and laser marking options are also available.

Description of drawings

Fig. 1 is an assembly view of the film frame conveyor and the permanent film frame in the embodiment of the present invention.

2A is a schematic illustration of a film rack loaded into a container of the film rack conveyor of FIG. 1 .

Figure 2B is a perspective view of a membrane rack container loaded with a membrane rack.

FIG. 3 is a perspective view of the film rack conveyor of FIG. 1 .

4A is a cross-sectional view of the film rack conveyor of FIG. 1 .

4B is a perspective cross-sectional view of the film frame conveyor and film frame of FIG. 1 .

Figure 5 is a plan view of a prior art film holder.

Figure 6 is a perspective view of a spring rack pad in an embodiment of the present invention.

6A is an enlarged perspective view of the spring rack pad of FIG. 6 in an embodiment of the present invention.

Figure 7 is a perspective view of a spring rack pad in an embodiment of the present invention.

8 is a cross-sectional view of either of the spring holders of FIGS. 6 or 7 .

8A is a perspective view of the inside of the top cover of the film rack conveyor of FIG. 1 illustrating attachment posts for receiving spring racks.

8B is a view of FIG. 8A with the spring holder received therein.

Figure 9 is a perspective cross-sectional view of a film rack conveyor in an embodiment of the present invention.

Figure 10 is an enlarged perspective cross-sectional view of the side comb structure of Figure 9 in an embodiment of the present invention.

Figure 11 is an enlarged perspective cross-sectional view of the bottom comb structure of Figure 9 in an embodiment of the present invention.

12 is a schematic cross-sectional view of a film rack conveyor with an upper spring rack pad and a lower spring rack pad in an embodiment of the present invention.

13 is a schematic cross-sectional view of a film rack conveyor with an upper spring rack pad and a pair of lower spring rack pads in an embodiment of the present invention.

Detailed ways

1 to 4 depict a film rack conveyor 20 in an embodiment of the invention. The film rack conveyor 20 includes a container 22 and a cover 24 forming a closure over the container portion to define an interior chamber 26 for storing a plurality of film racks 28 . The container 22 includes sides 32 that may include guides 34 ( FIG. 2 ) for guiding the membrane holder 28 into the container 22 . Spring rack pad 36 is coupled to at least one of container 22 and lid 24 . In one embodiment, the rack pad 36 is removably mounted to a grooved rail 38 on the container 22 or lid 24 . As shown, the film holder 28 is directed in a direction A into the interior chamber 26 of the container 22 and then the lid 24 is moved in the same direction A to couple with the container 22 .

Referring to Figures 6 to 8, the form of the spring mount 36 in an embodiment of the present invention is depicted. Spring mount 36 is specifically referred to as spring mount 36a ( FIG. 6 ) and spring mount 36b ( FIG. 7 ), and is generally or collectively referred to as spring mount 36 . The spring frame 36 includes opposing rails or side walls 52 , 54 extending in a front/rear direction 56 and connected to end walls 55 , 57 to form a rectangular frame 59 . The rails support main pad portions 58 between which a plurality of spring pad elements 60 span. Each spring pad element 60 defines a registration slot 62 . Each of a plurality of registration grooves 62 extends in a transverse direction 64 orthogonal to the front/rear direction 56, the registration grooves 64 being adapted to capture the outer edge 44 of the film frame 40 to limit the front/rear direction of the film frame 40. Movement in the rearward direction 56 .

In various embodiments, the first comb structure 72 includes a plurality of first comb-like protrusions 74 extending from the first opposing sidewall 52 of the spring carrier pad 36 in a vertical direction 76 . extend. (The vertical direction 76 is orthogonal to the front/rear direction 56 and orthogonal to the lateral direction 64 .) The plurality of first comb protrusions 74 are spaced apart from each other to define a plurality of first comb gaps 78 . Each protrusion has a straight portion 79 and a tapered portion 80 . Adjacent ones of the plurality of first comb-shaped protrusions 74 are adapted to engage and receive the outer edge of the membrane frame 40, and each of the plurality of first comb-shaped gaps 78 is defined in a first comb-shaped protrusion. Between adjacent ones of the first comb-like protrusions 74 of the structure 72 , a plurality of comb-like gaps 78 are adapted to capture the outer edge 44 of the membrane holder 40 to limit movement of the outer edge 44 in the front/rear direction 56 . Furthermore, each of the plurality of registration slots 62 is aligned with a corresponding one of the plurality of first comb gaps 78 in the lateral direction 64 .

In some embodiments, the second comb structure 82 includes a plurality of second comb-like protrusions 84 extending from the second opposing sidewall 54 of the spring carrier pad 36 in the vertical direction 76 . The plurality of second comb-shaped protrusions 84 are spaced apart from each other to define a plurality of second comb-shaped gaps 88 . Adjacent ones of the plurality of second comb-like protrusions 84 are adapted to engage and receive the outer edge 44 of the membrane frame 40, and each of the plurality of second comb-like gaps 88 is defined in the second comb-like structure 82. Between adjacent ones of the plurality of second comb-shaped protrusions 84 , each of the plurality of second comb-shaped gaps 88 is adapted to clamp the outer edge 44 of the film frame 40 to limit the outer edge 44 in the front/rear direction. 56 on the move. Furthermore, each of the plurality of registration slots 62 is aligned with a corresponding one of the plurality of second comb gaps 88 in the lateral direction 64 .

In various embodiments, as best seen in FIG. 6A , at least a portion of the plurality of first comb-like protrusions 74 and/or the plurality of second comb-like protrusions 84 each include a proximal end 92 and a distal end 94, And defines a tapered profile 96 that protrudes in the transverse direction 64 . The tapered profile 96 may be symmetrical about a protrusion axis 98 ( FIG. 6A ) extending in the vertical direction 76 , with the tapered profile 96 sloping toward the protrusion axis 98 from the proximal end 92 to the distal end 94 . In one embodiment, at least a portion of tapered profile 96 is arcuate (not depicted).

In one embodiment, the main pad portion 58 defines a plurality of through slots 102, each of the plurality of through slots 102 (FIG. 7) is disposed between adjacent spring pad elements 60, each spring pad element 60 has a corresponding registration groove 62 .

Referring to FIGS. 8-9 , the spring cage pad 36 is attached to the cover 24 by an interference fit with a tapered post 104 that is integral with and extends from an inner surface 106 of the cover 24 . The posts form slots 105 such that the rails therein are tight enough to frictionally secure the spring carrier pads to the top cover. The top cover 24 and container 22 have ribs 107 defining slots 108 for receiving and constraining the membrane holder.

Referring to Figures 9 to 11, other comb structures are disclosed in embodiments of the present invention. In one embodiment, at least one base comb structure 110 is disposed on the base 112 of the container 22, the base comb structure 110 comprising a plurality of base combs extending in the vertical direction 76 from the base of the container 22 into the interior chamber 26. shaped protrusion 114 . The plurality of base comb protrusions 114 are spaced apart from each other to define a plurality of base comb gaps 118 . Adjacent ones of the plurality of base comb protrusions 114 are adapted to engage and receive the outer edge 44 of the membrane frame 40, and each of the plurality of base comb gaps 118 is defined at the base of the base comb structure 110. between adjacent ones of the comb-shaped protrusions 114 .

A plurality of base comb gaps 118 are adapted to capture the outer edge 44 of the film holder 40 to limit movement of the outer edge 44 in the front/rear direction 56 . Additionally, each of the plurality of registration slots 62 of the spring mount pad 36 is planarly aligned with a corresponding one of the plurality of base comb gaps 118 . That is, each of the substrate comb gaps 118 is centered on a plane that is also centered on one of the registration grooves 62 that is orthogonal to the front/rear direction 56 . In one embodiment, at least a portion of the plurality of base comb protrusions 114 includes the tapered profile depicted in FIG. 6A .

In one embodiment, a registration rail 116 protrudes from the base and extends in the front/rear direction 56, the registration rail defining a rail height 122 above the base 112 of the container 22 in the vertical direction 76, wherein a plurality of bases The proximal end 124 (i.e., the "bottom" of the gap 118) of each of the comb gaps 118 defines a gap offset 126 relative to the base 112 that is less than the rail height 122 (FIG. 11), and where more Each of the base comb protrusions 114 defines a protrusion height 132 relative to the distal end 128 of the base 112 that is greater than the rail height 122 .

Functionally, the membrane holder 40 inserted into the base comb 112 will rest on the registration rails 116 because the rail height 122 is greater than the gap offset 126 relative to the base 112 . This relieves some of the stress from the substrate comb 110 and provides a more accurate registration of the film rack 40 within the film rack conveyor 20 .

In some embodiments, at least one side comb structure 140 is disposed on side 32 of container 22 , side comb structure 140 comprising a plurality of side comb protrusions 142 extending into interior chamber 26 in vertical direction 76 . The plurality of side comb protrusions 142 are spaced apart from each other to define a plurality of side comb gaps 148 . Adjacent ones of the plurality of side comb protrusions 142 are adapted to engage and receive the outer edge 44 of the film holder 40, each of the lateral plurality of side comb gaps being defined in adjacent side comb structures of the side comb structures. between protrusions.

A plurality of side comb gaps are adapted to capture the outer edge 44 of the membrane holder 40 to limit movement of the outer edge 44 in the front/rear direction 56 . Additionally, each of the plurality of registration slots 62 of the spring carrier pad 36 is in planar alignment with a corresponding one of the plurality of side comb gaps 148 . In one embodiment, at least a portion of the plurality of side comb protrusions 142 includes the tapered profile depicted in FIG. 6A .

In various embodiments and referring to FIG. 8 , each of the plurality of first comb gaps 78 and second comb gaps 88 defines a gap depth 152 having a proximal end 154 . Each of the plurality of first comb-like protrusions 74 and the second comb-like protrusions 84 is defined in the vertical direction 76 from the proximal end of the adjacent one of the plurality of first comb-like gaps 78 and second comb-like gaps 88 154 to a protrusion height 156 of a distal end 158 of an adjacent one of the plurality of first comb protrusions 74 /second comb protrusions 84 . Each of the plurality of registration grooves 62 defines a groove depth 162 relative to an upper surface 164 of the main pad 58 in the vertical direction 76 .

In various embodiments, the ratio of protrusion height 152 to groove depth 162 is in the range of 1.5 to 5, inclusive. In some embodiments, the ratio is in the range of 2 to 4, inclusive. In some embodiments, the ratio is in the range of 2.5 to 3.5, inclusive. (Herein, ranges referred to as “comprising” include the endpoints of the range.) In all such embodiments, first comb protrusion 74 and second comb protrusion 84 are greater than groove depth 162 .

Functionally, the first comb protrusion 74 and the second comb protrusion 84 being greater than the slot depth 162 help prevent or resist "bounce" of the membrane holder 40 during a shock event. The drawings presented herein depict the spring carrier pad 36 in an undeflected state; when loaded with the membrane carrier 40 , the main pad 58 will deflect so that the bottom of the slot 166 is at the same height as the proximal end 154 . Thus, if the film frame 40 "bounces" in the registration groove 62 , the greater height of the protrusions 78 , 88 will catch the outer edge 44 of the film frame 40 and redirect the film frame 40 back into the registration groove 62 .

Referring again to FIG. 6A , in one embodiment, at least a portion of the plurality of first comb gaps 78 and second comb gaps 88 each define a minimum gap dimension 172 in the front/rear direction 56 . The minimum gap dimension 172 may be sized for a tight sliding fit with the membrane holder 40 . In some embodiments, minimum gap dimension 172 is in the range of 0.05 inches to 0.085 inches, inclusive. In some embodiments, the minimum gap dimension 172 is in the range of 0.055 inches to 0.075 inches, inclusive. In some embodiments, minimum gap dimension 172 is in the range of 0.055 inches to 0.065 inches, inclusive.

Functionally, the tighter the tolerance of the minimum gap dimension 172 relative to the outer edge 44 of the membrane frame 40, the tighter the membrane frame 40 is held, thereby reducing movement of the membrane frame 40 in the front/rear direction 56, which acts The effect of reducing particle generation. At the same time, slot 62 can be kept oversized to accommodate easy alignment during loading and realignment during impact events.

In various embodiments, the spring rack pads 36 are detachable from the film rack conveyor 20 by fitting into the grooved rails 38 with a press fit.

Referring to Figure 12, a first spring mount 36 is placed on the lid and a second spring rest 36 is seated on the container.

Referring to Figure 13, a third spring rack pad 36 is placed on the container.

In various embodiments and referring again to FIGS. 6 and 7 , the spring frame pad 32 includes a continuous frame 182 . The continuous frame 182 includes four walls defining four corners 184 . For the spring frame pad 36b, the first comb structure 72 and the second comb structure 82 include protrusions 186 extending around four corners 184 .

Claims (28)

1. a kind of film frame conveyer, it includes：

Container；

Lid, it forms closure to define internal chamber above the container portion；

Spring(-supported) mount pad, it is coupled at least one of the container and the lid, and the spring(-supported) mount includes opposing sidewalls, described Opposing sidewalls in forward/backward direction on extend and support main pad portion, main mat portion defines multiple registration slots, the multiple registration slot Each of extend on the horizontal direction orthogonal with the front/rear direction and suitable for blocking the outward flange of film frame to limit State movement of the film frame on the front/rear direction；And

First pectinate texture, it includes multiple first pectens, and the multiple first pecten is in vertical direction from institute The one extension in the opposing sidewalls of spring(-supported) mount pad is stated, the multiple first pecten is spaced apart from each other more to define Individual first pectination gap, the vertical direction is orthogonal and orthogonal with the horizontal direction with the front/rear direction,

Neighbor in wherein the multiple first pecten is suitable to engagement and receives the outward flange of the film frame, and institute State each of multiple first pectination gaps be defined in it is adjacent in first pecten of first pectinate texture Between person, the outward flange that each of the multiple described first pectination gap is suitable to block the film frame is to limit Movement of the outward flange on the front/rear direction is stated, and

Each of wherein the multiple registration slot on the horizontal direction with the phase in the multiple first pectination gap The person of answering is aligned.

2. film frame conveyer according to claim 1, it includes：

Second pectinate texture, it includes multiple second pectens, and the multiple second pecten is in the vertical direction From the extension of both the in the opposing sidewalls of the spring(-supported) mount pad, the multiple second pecten is spaced apart from each other with boundary Fixed multiple second pectination gaps,

Adjacent second pecten in wherein the multiple second pecten is suitable to engagement and receives the described of the film frame Outward flange, and the second pectination gap in the multiple second pectination gap is defined in the described adjacent of second pectinate texture Between second pecten, the second pectination gap is suitable to block the outward flange of the film frame to limit the outward flange Movement on the front/rear direction, and

Each of wherein the multiple registration slot on the horizontal direction with the phase in the multiple second pectination gap The person of answering is aligned.

3. film frame conveyer according to claim 1, wherein main mat portion define multiple through slots, the multiple insertion Each of groove is placed between the adjacent registration slot in the multiple registration slot.

4. the film frame conveyer according to any claim in Claim 1-3, it includes

At least one substrate pectinate texture being placed on the base portion of the container, the substrate pectinate texture are included in described hang down Multiple substrate pectens that Nogata is extended in the internal chamber from the base portion of the container upwards, the substrate comb Shape structure is included and is spaced apart from each other to define multiple substrate pectens in multiple substrate pectination gaps,

Neighbor in wherein the multiple substrate pecten is suitable to engagement and receives the outward flange of the film frame, described Each of multiple substrate pectination gaps are defined between the neighbor in the multiple substrate pecten, the multiple base Bottom pectination gap is suitable to block the outward flange of the film frame to limit shifting of the outward flange on the front/rear direction It is dynamic, and

Each of the multiple registration slot of wherein described spring(-supported) mount pad is corresponding in the multiple substrate pectination gap Person's planar alignment.

5. film frame conveyer according to claim 4, it includes prolonging from the proximal process and on the front/rear direction That stretches matches somebody with somebody standard gauge, the rail height that the base portion that the container is higher by the vertical direction is defined in standard gauge, wherein The near-end in each of the multiple substrate pectination gap defines the clearance offsets relative to the base portion, the clearance offsets Less than rail height, and each of wherein the multiple substrate pecten defines greatly relative to the distal end of the base portion In the rising height of the rail height.

6. film frame conveyer according to claim 4, it includes：

At least one side pectinate texture being placed on the sidepiece of the container, the side pectinate texture are included in the Vertical Square The multiple side pectens extended up in the internal chamber, the side pectinate texture are more to define comprising being spaced apart from each other Multiple side pectens in individual side pectination gap,

Neighbor in wherein the multiple side pecten is suitable to engagement and receives the outward flange of the film frame, described more Each of individual side pectination gap is defined between the neighbor in the multiple side pecten, between the multiple side pectination Each of gap is suitable to block the outward flange of the film frame to limit shifting of the outward flange on the front/rear direction It is dynamic, and

Each of the multiple registration slot of wherein described spring(-supported) mount pad and the corresponding person in the multiple side pectination gap Planar alignment.

7. film frame conveyer according to claim 6, wherein the multiple first pecten, the multiple second pectination Each self-contained near-end of at least a portion of projection, the multiple substrate pecten and/or the multiple side pecten and remote End, and the tapered profiles of the horizontal direction upper process are defined in, the tapered profiles in the Vertical Square on upwardly extending Protruding axis in symmetrical, the tapered profiles tilt from the near-end to the distal end towards the protruding axis.

8. film frame conveyer according to claim 7, wherein at least a portion of the tapered profiles is arch.

9. film frame conveyer according to claim 7, wherein：

Define the gap depth with near-end in each of the multiple first pectination gap；

Each of the multiple first pecten is defined in the vertical direction from the multiple first pectination gap In neighbor the near-end to the distal end of the neighbor in the multiple first pecten rising height；

Each of the multiple registration slot is defined in the groove depth of the upper surface relative to main mat in the vertical direction Degree；And

The rising height is to the ratio of the groove depth 1.5 to 5 and comprising in 1.5 and 5 scope.

10. film frame conveyer according to claim 9, wherein the ratio be by 2 to 4 and the scope comprising 2 and 4 and One of 2.5 to 3.5 and one group of scope comprising 2.5 and 3.5 scope composition.

11. film frame conveyer according to claim 6, wherein the multiple first pectination gap, the multiple second comb At least a portion in shape gap, the multiple substrate pectination gap and/or the multiple side pectination gap each define it is described before/ The upward minimum clearance size in rear, the minimum clearance size are sized to be closely slidably matched with the film frame.

12. film frame conveyer according to claim 11, wherein the minimum clearance size is by 0.05 inch to 0.085 Inch and the scope comprising 0.05 inch and 0.085 inch, 0.055 inch to 0.075 inch and comprising 0.055 inch and 0.075 inch of scope and 0.055 inch to 0.065 inch and include the one of 0.055 inch and 0.065 inch of scope composition One of group minimum clearance size.

13. film frame conveyer according to claim 1, wherein at least one spring(-supported) mount pad can transmit from the film frame Machine is dismantled.

14. the film frame conveyer according to claim 1 or claim 13, wherein at least one spring(-supported) mount pad includes It is placed in the second spring frame pad of the first spring(-supported) mount pad covered and placement on the container.

15. film frame conveyer according to claim 14, wherein at least one spring(-supported) mount pad is described comprising being placed in The 3rd spring(-supported) mount pad on container.

16. film frame conveyer according to claim 1, it includes being placed at least one film frame therein.

17. a kind of spring(-supported) mount pad for being used to be coupled to film frame conveyer, the spring(-supported) mount pad include：

Opposite side, its in forward/backward direction on extend and support main pad portion, main mat portion defines multiple registration slots, the multiple Each of registration slot extend on the horizontal direction orthogonal with the front/rear direction and suitable for block the outward flange of film frame with Limit movement of the outward flange on the front/rear direction；And

First pectinate texture, it includes multiple first pectens, and the multiple first pecten is in vertical direction from institute State the extension of the one in the opposite side of spring(-supported) mount pad and be spaced apart from each other to define multiple first pectination gaps, it is described to hang down Nogata to orthogonal and orthogonal with the horizontal direction with the front/rear direction,

Neighbor in wherein the multiple first pecten is suitable to engagement and receives the outward flange of the film frame, and institute State each of multiple first pectination gaps be defined in it is adjacent in first pecten of first pectinate texture Between person, the outward flange that each of the multiple described first pectination gap is suitable to block the film frame is to limit Movement of the outward flange on the front/rear direction is stated, and

Each of wherein the multiple registration slot on the horizontal direction with the phase in the multiple first pectination gap The person of answering is aligned.

18. spring(-supported) mount pad according to claim 17, it includes：

Second pectinate texture, it includes multiple second pectens, and the multiple second pecten is in the vertical direction From the extension of both the in the opposing sidewalls of the spring(-supported) mount pad, the multiple second pecten is spaced apart from each other with boundary Fixed multiple second pectination gaps,

Neighbor in wherein the multiple second pecten is suitable to engagement and receives the outward flange of the film frame, and institute Each of multiple second pectination gaps are stated to be defined in the multiple second pecten of second pectinate texture Between neighbor, the outward flange that each of the multiple second pectination gap is suitable to block the film frame is to limit Movement of the outward flange on the front/rear direction is stated, and

Each of wherein the multiple registration slot on the horizontal direction with the phase in the multiple second pectination gap The person of answering is aligned.

19. spring(-supported) mount pad according to claim 17, wherein main mat portion define multiple through slots, the multiple insertion Each of groove is placed between the adjacent registration slot in the multiple registration slot.

20. spring(-supported) mount pad according to claim 17, wherein at least a portion of the multiple first pecten is each Comprising near-end and distal end, and the tapered profiles of the horizontal direction upper process are defined in, the tapered profiles described on hanging down In symmetrically, the tapered profiles tilt the protruding axis that Nogata upwardly extends from the near-end to the distal end towards the protruding axis.

21. spring(-supported) mount pad according to claim 20, wherein at least a portion of the tapered profiles is arch.

22. spring(-supported) mount pad according to claim 20, wherein：

Define the gap depth with near-end in each of the multiple first pectination gap；

Each of the multiple first pecten is defined in the vertical direction from the multiple first pectination gap In neighbor the near-end to the distal end of the neighbor in the multiple first pecten rising height；

Each of the multiple registration slot is defined in the groove depth of the upper surface relative to main mat in the vertical direction Degree；And

The rising height is to the ratio of the groove depth 1.5 to 5 and comprising in 1.5 and 5 scope.

23. spring(-supported) mount pad according to claim 25, wherein the ratio is by 2 to 4 and the scope comprising 2 and 4 and 2.5 To one of 3.5 and one group of scope comprising 2.5 and 3.5 scope composition.

24. spring(-supported) mount pad according to claim 17, wherein at least a portion in the multiple first pectination gap is each The minimum clearance size on the front/rear direction is defined, the minimum clearance size is sized with close with the film frame It is slidably matched.

25. spring(-supported) mount pad according to claim 24, wherein the minimum clearance size is by 0.05 inch to 0.085 English Very little and scope comprising 0.05 inch and 0.085 inch, 0.055 inch to 0.075 inch and include 0.055 inch and 0.075 Inch scope and 0.055 inch to 0.065 inch and comprising 0.055 inch and 0.065 inch of scope composition one group most One of small―gap suture size.

26. spring(-supported) mount pad according to claim 17, wherein the opposing sidewalls are the parts of continuous beam.

27. spring(-supported) mount pad according to claim 26, wherein the continuous beam includes four side walls, to define four corners Angle.

28. spring(-supported) mount pad according to claim 27, wherein first pectinate texture, which includes, surrounds four corners In both extension projection.