CN107449410A - Microthrust test device is detected in electromagnetic drive type tunnel magnetoresistive face - Google Patents

Abstract

An electromagnetic-driven tunnel magnetoresistive in-plane detection micro-gyro device, the main structure of which is connected by a bonded substrate, a support frame, a driving combined beam, a detecting combined beam, a driving mass, a detecting mass, a driving beam, a detecting beam, and a driving beam block, detection beam connection block, driving magnet, detection magnet, tunnel magnetoresistive element, wires, electrodes, the support frame is set above the bonding substrate, the support frame is connected to the drive mass block through the drive combination beam, and the drive mass block passes through the detection combination beam The detection mass is connected, and the tunnel magnetoresistive element is set at the center of the upper surface of the detection mass and corresponds to the detection magnet deposited in the groove of the bonded substrate. The overall structure of the device is designed reasonably and compactly. Tunnel magnetoresistive elements have high sensitivity to weak magnetic field changes, can improve the detection accuracy of micro gyroscopes by one to two orders of magnitude, and are easy to use, good in reliability, and suitable for miniaturization.

Description

Electromagnetically Driven Tunneling Magnetoresistance In-Plane Detection Micro Gyro Device

technical field

The invention belongs to the technical field of measuring instrument components for micro-inertial navigation, and in particular relates to an electromagnetic-driven tunnel reluctance in-plane detection micro-gyroscope device.

Background technique

Gyroscope is a sensor used to measure angular rate and is one of the core devices of inertial technology. It plays an important role in modern industrial control, aerospace, national defense, consumer electronics and other fields.

According to different principles, gyroscopes are divided into mechanical rotor gyroscopes, optical gyroscopes, and micromechanical gyroscopes. At present, mechanical rotor gyroscopes and optical gyroscopes have high precision and play an important role in aerospace, national defense and military fields, but their structures are complicated, large in size and expensive. The micromechanical gyroscope is a high-tech developed in the early 1980s for both military and civilian purposes. Compared with the traditional gyroscope, it has small size, low power consumption, low cost, easy mass production, high sensitivity, and anti-overload. With the advantages of strong ability, large dynamic range and good integration, it can be embedded in electronics, information and intelligent control systems, which greatly reduces the system volume and cost, and greatly improves the overall performance, which is in line with the development direction of product informationization. The field of modern national defense has a wide range of application prospects, and more and more people pay attention to it.

At present, the commonly used driving methods of micro-mechanical gyroscopes are electrostatic, piezoelectric, electromagnetic, etc., and the detection methods include piezoresistive, piezoelectric, capacitive, resonance tunneling, and electronic tunneling. As for the driving method, although the electrostatic drive has the advantage of good stability, its driving amplitude is small, and it is prone to destabilization effect; the piezoelectric drive has the advantages of high precision and small error, but it has high requirements for the design of the gyro structure, which is not easy Processing and production; Electromagnetic drive has many advantages such as good stability and large driving amplitude. For the detection method, the piezoresistive effect detection has a low sensitivity and a large temperature coefficient, which limits the further improvement of the detection accuracy; the sensitivity of the piezoelectric effect detection is easy to drift, requires frequent calibration, and is slow to return to zero, so it is not suitable for continuous testing; capacitance detection The comb tooth structure has high displacement resolution, and the capacitor structure is suitable for MEMS process processing. However, with further miniaturization, the comb tooth voltage is easy to break down, and it will also fail to attract when it is subjected to lateral impact, especially the precision requirements of the comb tooth manufacturing process. The sensitivity of the resonant tunneling effect is an order of magnitude higher than that of the silicon piezoresistive effect, but the detection sensitivity obtained by the test is low, and the problem is that the bias voltage is easily caused by the gyro drive. Drift, causing the gyroscope to not work stably; the manufacturing process of the electronic tunnel effect device is extremely complicated, the detection circuit is relatively difficult to implement, the yield is low, it is difficult to work normally, and it is not conducive to integration, especially it is difficult to control the tunnel tip and electrode plate The distance between them is at the nanometer level, which cannot guarantee the normal operation of the sensor. Therefore, structural studies of new effect detection principles are urgently needed.

The tunnel magnetoresistance effect is based on the spin effect of electrons. There is a magnetic multilayer film structure with an insulator or a semiconductor non-magnetic layer between the magnetic pinned layer and the magnetic free layer. The current passes through the tunneling effect based on electrons, so this multilayer film structure is called a magnetic tunnel junction. Under the action of a voltage across the insulating layer, the tunnel current and tunnel resistance of this magnetic tunnel junction depend on the relative orientation of the magnetization of the two ferromagnetic layers (magnetic pinned layer and magnetic free layer). When the magnetic free layer is under the action of an external field, its magnetization direction changes, while the magnetization direction of the pinned layer remains unchanged. At this time, the relative orientation of the magnetization of the two magnetic layers changes, and the magnetization across the insulating layer can be achieved. A large resistance change is observed on the tunnel junction. This physical effect is based on the tunneling effect of electrons in the insulating layer, so it is called the tunnel magnetoresistance effect.

The tunnel magnetoresistance effect has the advantages of "high sensitivity, miniaturization, and easy detection", which made the applicant motivated to apply the tunnel magnetoresistance effect to the detection of the gyro structure to solve the problem of angular velocity signal detection. It is expected that the micromechanical gyro Compared with the capacitive gyroscope, the detection sensitivity is improved by one to two orders of magnitude, and there are no related products in this technical field.

Through the search of new materials in this field, three previously applied documents were found, namely, comparative document 1 "a micromechanical gyroscope based on tunneling magnetoresistance effect" (application number 201510043522.4), and comparative document 2 "based on nano-film quantum Electromagnetically Driven Gyroscope with Tunneling Effect" (application number 200910075586.7), and reference document 3 "A High-Q Tunneling Magnetoresistance Effect Micromechanical Gyroscope with In-Plane Detection" (application number 201520822683.9).

For comparison document 1, electrostatic drive and tunnel magnetoresistance detection are used; when electrostatic drive is used, the voltage of the comb tooth is easy to break down, and it will also fail to attract when subjected to lateral impact, especially the high precision of the comb tooth manufacturing process, resulting in high yield Low; for comparison document 2, using electromagnetic drive and nano-membrane tunneling effect detection, it is found that the manufacturing process of nano-membrane tunneling devices is extremely complicated, the detection circuit is relatively difficult to implement, the yield is low, it is difficult to work normally, and it is not conducive to integration , especially it is difficult to control the distance between the tunnel tip and the electrode plate at the nanometer level, which cannot guarantee the normal operation of the sensor; for reference 3, it uses electromagnetic drive and tunnel magnetoresistive detection, but its beam structure is a straight beam In contrast, the beam structure designed this time is not easy to be damaged due to processing, and can obtain a high yield. The designed beam structure driving and detection frequency are easier to match. It is easy to get a larger vibration amplitude in the driving and detection directions, and at the same time, the best gyro performance can be obtained by effectively designing the aspect ratio and gap of the beam;

Based on the above problems, the present invention proposes a micro-gyro device using electromagnetic drive and tunnel magnetoresistance detection. The design advantage is that electromagnetic drive is used for driving, and the drive displacement that can be provided is much greater than that provided by electrostatic force, and the drive mode and detection mode frequency are easier. Matching, using tunnel magnetoresistive elements with high sensitivity to detect the micro-displacement generated by the Coriolis effect. The beam structure is designed as a folded beam structure, which makes it easier to match the driving and detection frequencies, and can improve the performance of the micro gyroscope.

In order to further improve the detection accuracy of the micro-gyroscope, a magnetic concentration unit is deposited on the detection magnet, which has a magnetic concentration effect, which can increase the local magnetic field strength to increase the magnetic field change rate, forming a stable and high change rate magnetic field, so that the tunnel magnetoresistive element The weaker Coriolis force can be detected, thereby improving the detection accuracy of the micro-gyroscope. The overall structure of the device is reasonable and simple, and the detection accuracy is high.

Contents of the invention

In order to overcome the deficiencies of the background technology, the present invention designs an electromagnetically driven tunnel magnetoresistance in-plane detection micro-gyroscope device. By designing the overall structure of the microgyroscope and adopting electromagnetic drive and tunnel magnetoresistance detection, the tunnel magnetoresistance effect based on the tunnel magnetoresistance effect is utilized. The manufactured tunnel magnetoresistive element has high sensitivity to weak magnetic fields, and then realizes the weak Coriolis force detection of the micro-gyroscope, which can improve the detection accuracy of the micro-gyroscope by one to two orders of magnitude.

Concrete scheme of the present invention is as follows:

An electromagnetic-driven tunnel magnetoresistive in-plane detection micro-gyro device, comprising a bonding substrate, a support frame, a first driving combined beam, a second driving combined beam, a third driving combined beam, a fourth driving combined beam, a first detecting Combination beam, second detection combination beam, third detection combination beam, fourth detection combination beam, drive mass, detection mass, first drive magnet, second drive magnet, detection magnet, tunnel magnetoresistive element, first drive electrodes, second drive electrodes, drive feedback electrodes, detection electrodes, first drive wires, second drive wires, drive feedback wires, and signal detection wires. The support frame is arranged above the bonding substrate, and the support frame passes through the first A drive combination beam, a second drive combination beam, a third drive combination beam, and a fourth drive combination beam are connected to a drive mass, and the drive mass passes through the first detection combination beam, the second detection combination beam, and the third detection combination beam . The fourth detection combination beam is connected to the detection mass, and the tunnel magnetoresistive element is arranged at the center of the upper surface of the detection mass.

Further, there is a groove in the center of the bonding substrate, and a first driving magnet, a second driving magnet and a detection magnet are built in the groove, and the depth of the groove is greater than that of the first driving magnet, the second driving magnet and the detection magnet. The thickness of the magnet, the first driving magnet and the second driving magnet are respectively arranged on the left and right sides of the bonding substrate, the overall structure of the first driving magnet and the second driving magnet is a cuboid, and its length and width are much greater than the thickness. The detection magnet includes a permanent magnet, an energized coil, and an optically controlled magnet. The detection magnet is arranged at the center of the bonding substrate, and a magnetic concentration unit is deposited above the detection magnet. The shape of the magnetic concentration unit can be a triangle or a square.

Further, the size of the support frame is the same as that of the bonding substrate, and is used to support the driving mass and the detection mass, the driving mass is arranged outside the detection mass, and the driving mass passes through the first driving combination beam , the second drive combination beam, the third drive combination beam, and the fourth drive combination beam are connected to the external support frame, and the detection mass is arranged at the center of the support frame, through which the first detection combination beam and the second detection combination beam , the third detection combination beam, and the fourth detection combination beam are connected to the driving mass block.

Further, the first driving combination beam, the second driving combination beam, the third driving combination beam, and the fourth driving combination beam are respectively arranged at the four corners of the driving mass, and the first driving combination beam , the second drive combination beam, the third drive combination beam, and the fourth drive combination beam have the same structural dimensions, and are all composed of the first drive beam, the second drive beam and the drive beam connecting block. The first drive beam, the second drive beam The driving beam is used for connecting the driving mass block and the driving beam connecting block, and the driving beam connecting block is used for connecting the first driving beam, the second driving beam and the support frame.

Further, the first driving beam and the second driving beam are slender beam structures, that is, the length of the beam is much greater than its width, and the first driving beam and the second driving beam are respectively located on both sides of the connecting block of the driving beam and are connected to each other. Parallel, the driving beam connecting block is in a "T" shape as a whole, and the thickness of the first driving beam and the second driving beam is the same as that of the driving beam connecting block.

Further, the first detection combination beam, the second detection combination beam, the third detection combination beam, and the fourth detection combination beam are respectively arranged on the detection mass near the corners, and the first detection combination beam, The second detection composite beam, the third detection composite beam, and the fourth detection composite beam have exactly the same structural dimensions, and are all composed of the first detection beam, the second detection beam and a detection beam connecting block. The first detection beam, the second detection beam The second detection beam is used to connect the detection mass block and the detection beam connection block, and the detection beam connection block is used to connect the first detection beam, the second detection beam and the driving mass block.

Further, the first detection beam and the second detection beam are slender beam structures, that is, the length of the beam is much greater than its width, and the first detection beam and the second detection beam are respectively located on both sides of the connection block of the detection beam and are connected to each other. Parallel, the overall detection beam connection block is in a "T" shape, and the thickness of the first detection beam and the second detection beam is the same as the thickness of the detection beam connection block.

Further, the first driving electrodes are respectively arranged on the upper and lower sides of one end of the supporting frame, and the second driving electrodes are respectively arranged on the upper and lower sides of the supporting frame opposite to the first driving electrode end, so The driving feedback electrodes are arranged close to the first driving electrodes, the detection electrodes are arranged close to the second driving electrodes, the first driving wires are connected to the first driving electrodes at both ends, and the second driving wires are connected to the first driving electrodes at both ends. Two drive electrodes, the drive feedback wires are connected to the drive feedback electrodes at both ends, and the signal detection wires lead out from the tunnel magnetoresistive element to connect the two detection electrodes.

Further, the structure of the tunnel magnetoresistive element is a nano-multilayer film structure, which is a top electrode layer, a magnetic free layer, an insulating layer, a magnetic pinning layer, and a bottom electrode layer sequentially arranged on the substrate layer from top to bottom.

Beneficial effect

The invention has the beneficial effect of solving the problems of weak driving ability and difficult detection of weak Coriolis force in the existing micromechanical gyroscope, and provides an electromagnetically driven gyroscope device for in-plane detection of tunnel reluctance. Compared with the out-of-plane detection micromechanical gyroscope, the designed in-plane detection micromechanical gyroscope has the advantages of small damping effect and high precision. The driving method adopted by the micromechanical gyroscope of the present invention is electromagnetic drive, and the driving amplitude that can be provided is far greater than that provided by electrostatic drive. It produces large-scale and stable amplitude oscillations, and at the same time adopts the tunnel magnetoresistance effect with high sensitivity for detection, which improves the detection accuracy of the micro-gyroscope. The micro-gyroscope of the present invention deposits high-permeability soft magnetic materials on the detection magnet, which has the effect of gathering magnetism, realizes the enhancement of the local magnetic field intensity to increase the rate of change of the magnetic field, and forms a magnetic field with a stable and high rate of change. When the tunnel magnetoresistive element is sensitive to When the magnetic field changes, the resistance value of the tunnel magnetoresistive element will change drastically under the weak magnetic field change, and this change can improve the detection accuracy of the designed micro-gyroscope by one to two orders of magnitude. The invention has the advantages of reasonable structure design, simple interface circuit and high detection precision, and can solve the difficult problem of angular rate signal detection.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the present invention;

Fig. 2 is a top view of the overall structure of the present invention;

3 is a structural diagram of a bonded substrate of the present invention;

Figure 4 is a top view of the bonded substrate of the present invention;

Fig. 5 is a supporting frame structure diagram;

Fig. 6 is the schematic diagram of micro-gyroscope quality block;

Fig. 7 is the structural diagram of micro-gyroscope driving mass block;

Figure 8 is a top view of the micro-gyro-driven mass block;

Fig. 9 is a schematic diagram of a micro-gyro-driven composite beam;

Figure 10 is a top view of the micro-gyro-driven composite beam;

Fig. 11 is a structural diagram of a microgyroscope proof mass;

Figure 12 is a top view of the microgyroscope proof mass;

Fig. 13 is the schematic diagram of micro-gyroscope detection combined beam;

Figure 14 is a top view of the micro-gyro detection composite beam;

Fig. 15 is the schematic diagram of microgyro electrode and wire;

Fig. 16 is a schematic diagram of the structure of the tunnel magnetoresistive nano-multilayer film.

As shown in the figure, the list of reference signs is as follows:

1-bonded substrate; 2-first drive magnet; 3-second drive magnet; 4-detection magnet; 5-support frame; 6-drive mass block; 7-detection mass block; - the first drive combination beam; 10 - the second drive combination beam; 11 - the third drive combination beam; 12 - the fourth drive combination beam; 13 - the first drive beam; 14 - the second drive beam; 15 - drive beam connection Block; 16-the first detection composite beam; 17-the second detection composite beam; 18-the third detection composite beam; 19-the fourth detection composite beam; 20-the first detection beam; 21-the second detection beam; 22- Detection beam connection block; 23-first driving wire; 24-second driving wire; 25-driving feedback wire; 26-signal detection wire; 27-first driving electrode; 28-second driving electrode; 29-driving feedback electrode 30-detection electrode; 31-substrate layer; 32-magnetic free layer; 33-insulating layer; 34-magnetic pinning layer; 35-top electrode layer; 36-bottom electrode layer;

detailed description

The present invention will be described in further detail below with reference to the drawings and embodiments, examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

In the present invention, it should be explained that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on accompanying drawing 1 The orientation or positional relationship shown is only for the convenience of describing and simplifying the description of the present invention, but does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a reference to the present invention. limits.

In the present invention, it should be noted that unless otherwise specified and limited, the terms "connected" and "connected" should be interpreted in a broad sense, for example: it can be fixedly connected, detachably connected, or integrally connected; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

The present invention will be further described below in conjunction with accompanying drawing:

As shown in Figures 1, 2, 3, and 4, an electromagnetically driven tunnel magnetoresistive in-plane detection micro-gyroscope device consists of a bonding substrate 1, a supporting frame 5, a first driving composite beam 9, and a second driving composite beam 10. , the third driving combination beam 11, the fourth driving combination beam 12, the first detection combination beam 16, the second detection combination beam 17, the third detection combination beam 18, the fourth detection combination beam 19, the driving mass 6, the detection mass Block 7, first drive magnet 2, second drive magnet 3, detection magnet 4, tunnel magnetoresistive element 8, first drive electrode 27, second drive electrode 28, drive feedback electrode 29, detection electrode 30, first drive wire 23. The second drive wire 24, the drive feedback wire 25, and the signal detection wire 26 are composed. The support frame 5 is arranged above the bonding substrate 1, and the support frame 5 passes through the first drive combination beam 9, the second drive combination beam 10, The third drive combination beam 11 and the fourth drive combination beam 12 are connected to the drive mass 6, and the drive mass 6 passes through the first detection combination beam 16, the second detection combination beam 17, the third detection combination beam 18, and the fourth detection combination beam. The combined beam 19 is connected to the detection mass 7 , and the tunnel magnetoresistive element 8 is arranged at the center of the upper surface of the detection mass 7 .

The bonded substrate 1 is square as a whole, and there is a square groove in the center of the bonded substrate 1, and a first drive magnet 2, a second drive magnet 3 and a detection magnet 4 are built in, and the depth of the groove is greater than that of the first drive magnet 2. , the thickness of the second drive magnet 3 and the detection magnet 4, the first drive magnet 2 and the second drive magnet 3 are respectively arranged on the left and right sides of the bonding substrate 1, the overall structure is a cuboid, and its length and width are much greater than the thickness, The detection magnet 4 can be any device that can generate a magnetic field, such as a permanent magnet, an energized coil, or an optically controlled magnet. The detection magnet 4 is arranged at the center of the bonded substrate 1, and a magnetization unit 37 is deposited above the detection magnet 4, which can be processed by a process. Obtained by etching, the magnetic concentration unit 37 can be triangular or square in shape, and has a magnetic concentration effect.

As shown in Figures 5 and 6, the external structure of the support frame 5 is a square shape, the size of which is consistent with that of the bonded substrate 1, and is used to support the driving mass 6 and the detection mass 7, and the driving mass 6 is arranged outside the detection mass 7. The first drive combination beam 9, the second drive combination beam 10, the third drive combination beam 11, and the fourth drive combination beam 12 are connected to the external support frame 5, and the detection mass 7 is arranged at the center of the support frame 5, and through the The first detection combination beam 16 , the second detection combination beam 17 , the third detection combination beam 18 , and the fourth detection combination beam 19 are connected to the driving mass 6 .

As shown in Figures 7 and 8, the drive mass 6 is connected to the support frame 5 through the first drive combination beam 9, the second drive combination beam 10, the third drive combination beam 11, and the fourth drive combination beam 12. A driving combination beam 9, a second driving combination beam 10, a third driving combination beam 11, and a fourth driving combination beam 12 are respectively arranged at four corners of the driving mass 6, and the first driving combination beam 9 , the second drive combination beam 10, the third drive combination beam 11, and the fourth drive combination beam 12 have the same structural dimensions, and are made up of the first drive beam 13, the second drive beam 14 and the drive beam connection block 15. The driving beam 13 and the second driving beam 14 are used to connect the driving mass block 6 and the driving beam connecting block 15, and the driving beam connecting block 15 is used to connect the first driving beam 13, the second driving beam 14 and the supporting frame 5; when When the micro-gyroscope is subjected to the driving force, the driving beam connection block 15 is connected to the support frame 5 to play a fixed role and does not move. The first driving beam 13 and the second driving beam 14 have small stiffness in the driving direction and are prone to bending. This causes the driving mass 6 and the detection mass 7 to oscillate steadily in the driving direction under the driving force.

As shown in Figures 9 and 10, the first drive combination beam 9, the second drive combination beam 10, the third drive combination beam 11, and the fourth drive combination beam 12 are mainly composed of two first drive beams with the same structural size. 13. The second drive beam 14 is composed of a drive beam connecting block 15. The first drive beam 13 and the second drive beam 14 are slender beam structures, that is, the length of the beam is much greater than its width, and the first drive beam 13 1. The second drive beam 14 is located on both sides of the drive beam connection block 15 and parallel to each other. The drive beam connection block 15 is in the shape of a "T" as a whole. The first drive beam 13 and the second drive beam 14 are thicker than the drive beam connection block 15. Same thickness.

As shown in Figures 11 and 12, the detection mass 7 is connected to the drive mass 6 through the first detection combination beam 16, the second detection combination beam 17, the third detection combination beam 18, and the fourth detection combination beam 19, so that The first detection combination beam 16, the second detection combination beam 17, the third detection combination beam 18, and the fourth detection combination beam 19 are respectively arranged on the detection mass 7 near the corners, and the first detection combination beam 16. The second detection combination beam 17, the third detection combination beam 18, and the fourth detection combination beam 19 are identical in structure and size, and are composed of the first detection beam 20, the second detection beam 21 and the detection beam connection block 22. The first detection beam 20 and the second detection beam 21 are used to connect the detection mass block 7 and the detection beam connection block 22, and the detection beam connection block 22 is used to connect the first detection beam 20, the second detection beam 21 and the driving mass Block 6: When there is Z-axis angular rate input, due to the Korotkoff effect, the detection mass 7 oscillates in the detection direction with a steady amplitude, the first detection beam 20 and the second detection beam 21 bend, and the detection beam connects the block 22 is connected with driving mass block 6 to play a fixed role.

As shown in Figures 13 and 14, the first detection composite beam 16, the second detection composite beam 17, the third detection composite beam 18, and the fourth detection composite beam 19 are mainly composed of two first detection beams with identical structural dimensions. 20. The second detection beam 21 and the detection beam connection block 22 are composed. The first detection beam 20 and the second detection beam 21 are slender beam structures, that is, the length of the beam is much greater than its width, and the first detection beam 20 1. The second detection beam 21 is respectively located on both sides of the detection beam connection block 22 and parallel to each other. The detection beam connection block 22 is in the shape of a "T" as a whole, and the thickness of the first detection beam 20 and the second detection beam 21 is the same as the detection beam connection block 22 have the same thickness, the difference is that the first driving combination beam 9, the second driving combination beam 10, the third driving combination beam 11, the fourth driving combination beam 12 and the first detection combination beam 16, the second detection combination The beam 17, the third detection composite beam 18, and the fourth detection composite beam 19 are different in size, and the size is determined according to factors such as the stiffness and frequency of the actual micro-gyroscope.

As shown in Figure 15, the electrodes mainly include a first drive electrode 27, a second drive electrode 28, a drive feedback electrode 29, and a detection electrode 30, and the wires mainly include a first drive wire 23, a second drive wire 24, a drive feedback wire 25, Signal detection wires 26; the first drive electrodes 27 are respectively arranged on the upper and lower sides of one end of the support frame 5, and the second drive electrodes 28 are respectively arranged on the support frame 5 opposite to the first drive electrodes 27 On the upper and lower sides of one end, the drive feedback electrode 29 is set close to the first drive electrode 27, the detection electrode 30 is set close to the second drive electrode 28, and the first drive wire 23 is connected to the first drive electrodes at both ends. The electrode 27, the second driving wire 24 is connected to the second driving electrode 28 at both ends, the driving feedback wire 25 is connected to the driving feedback electrode 29 at both ends, and the signal detection wire 26 is drawn out from the tunnel magnetoresistive element 8 to connect to the two detection electrodes 30.

As shown in FIG. 16 , it is a schematic diagram of the nano-multilayer film structure of the tunnel magneto-resistance element. The structure of the tunnel magneto-resistance element 8 is a nano-multilayer film structure. The electrode layer 35, the magnetic free layer 32, the insulating layer 33, the magnetic pinning layer 34, and the bottom electrode layer 36, when the external magnetic field changes, the tunneling current in the tunnel magnetoresistive element changes, showing a drastic resistance change, The detection signal is output through the top electrode layer 35 and the bottom electrode layer 36 .

Principle of invention

The micro-gyroscope device of the present invention is placed in the uniform magnetic field produced by the first drive magnet 2 and the second drive magnet 3, and an alternating drive current is loaded on the drive wire to generate an alternating Lorentz force to drive the mass block 6 Under the action of the driving force, vibrate reciprocatingly along the driving direction (X-axis), when there is an input of the angular velocity in the Z-axis direction, the detection mass 7 moves along the detection direction (Y-axis) under the action of the Coriolis force, and the detection The mass block 7 drives the tunnel magneto-resistance element 8 to perform steady amplitude oscillation above the detection magnet 4, so that the magnetic field sensitive to the tunnel magneto-resistance element 8 changes relatively greatly, and the change of the magnetic field causes the spin-related tunneling in the tunnel magneto-resistance element 8 The current changes, thereby causing the resistance value of the tunnel magnetoresistive element 8 to change drastically, and the weak Coriolis force can be detected by measuring the resistance value change.

In the description of this specification, references to the terms "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific examples," or "some examples" are intended to mean that the implementation A specific feature, structure, material, or characteristic described by an embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the invention is defined by the claims and their equivalents.

Claims (9)

1. An electromagnetically driven tunnel magnetoresistive in-plane detection micro-gyro device, characterized in that it consists of a bonded substrate, a support frame, a first drive combination beam, a second drive combination beam, a third drive combination beam, and a fourth drive combination beam. Combination beam, first detection combination beam, second detection combination beam, third detection combination beam, fourth detection combination beam, driving mass, detection mass, first driving magnet, second driving magnet, detection magnet, tunnel magnet Resistance element, first drive electrode, second drive electrode, drive feedback electrode, detection electrode, first drive wire, second drive wire, drive feedback wire, signal detection wire, the support frame is set above the bonding substrate, The support frame is connected to the drive mass through the first drive combination beam, the second drive combination beam, the third drive combination beam, and the fourth drive combination beam, and the drive mass passes through the first detection combination beam and the second detection combination beam. The third detection combination beam and the fourth detection combination beam are connected to the detection mass block, and the tunnel magnetoresistive element is arranged at the center of the upper surface of the detection mass block. 2. The electromagnetically driven TMR in-plane detection micro-gyro device according to claim 1, wherein a groove is arranged in the center of the bonded substrate, and a first driving magnet and a second driving magnet are built in the groove and a detection magnet, the depth of the groove is greater than the thickness of the first drive magnet, the second drive magnet and the detection magnet, and the first drive magnet and the second drive magnet are respectively arranged on the left and right sides of the bonding substrate, the The overall structure of the first drive magnet and the second drive magnet is a cuboid, whose length and width are much greater than the thickness. The detection magnet includes a permanent magnet, an energized coil, and an optical control magnet. The detection magnet is arranged at the center of the bonding substrate. A magnetism concentrating unit is deposited above the detection magnet, and the magnetism concentrating unit has a magnetism concentrating effect, and the shape may be a triangle or a square. 3. The electromagnetically driven tunneling magnetoresistive in-plane detection micro-gyro device according to claim 1, wherein the size of the support frame is consistent with the bonded substrate, and is used to support the driving mass and the detection mass, and the The drive mass is arranged outside the detection mass, and the drive mass is connected to the external support frame through the first drive combination beam, the second drive combination beam, the third drive combination beam, and the fourth drive combination beam. The quality block is arranged at the center of the support frame, and is connected to the driving mass block through the first detection combination beam, the second detection combination beam, the third detection combination beam, and the fourth detection combination beam. 4. The electromagnetically driven tunnel magnetoresistance in-plane detection micro-gyroscope device according to claim 3, characterized in that, the first driving combination beam, the second driving combination beam, the third driving combination beam, and the fourth driving combination The beams are respectively arranged at the four corners of the driving mass, and the structural dimensions of the first driving combination beam, the second driving combination beam, the third driving combination beam and the fourth driving combination beam are exactly the same, and are all composed of the first driving combination beam. Composed of a driving beam, a second driving beam and a driving beam connecting block, the first driving beam and the second driving beam are used to connect the driving mass block and the driving beam connecting block, and the driving beam connecting block is used to connect the first driving beam , the second drive beam and the support frame. 5. The electromagnetically driven tunnel magnetoresistance in-plane detection micro-gyroscope device according to claim 4 is characterized in that, the first drive beam and the second drive beam are slender beam structures, that is, the length of the beam is much larger than it The width of the first drive beam and the second drive beam are respectively located on both sides of the drive beam connection block and parallel to each other. The drive beam connection block is in the shape of a "T" as a whole. The connecting blocks are of the same thickness. 6. The electromagnetically driven tunnel magnetoresistance in-plane detection micro-gyro device according to claim 3, wherein the first detection combination beam, the second detection combination beam, the third detection combination beam, and the fourth detection combination The beams are respectively arranged on the detection mass near the corners, and the structural dimensions of the first detection combination beam, the second detection combination beam, the third detection combination beam and the fourth detection combination beam are exactly the same, and are all determined by the first detection combination beam. Composed of a detection beam, a second detection beam and a detection beam connection block, the first detection beam and the second detection beam are used to connect the detection mass block and the detection beam connection block, and the detection beam connection block is used to connect the first detection beam beam, a second detection beam and a driving mass. 7. The electromagnetically driven tunnel magnetoresistance in-plane detection micro-gyro device according to claim 6 is characterized in that, the first detection beam and the second detection beam are slender beam structures, that is, the length of the beam is much larger than it The width of the first detection beam and the second detection beam are respectively located on both sides of the connection block of the detection beam and are parallel to each other. The connection block of the detection beam is in the shape of a "T" as a whole. Beam connection blocks have the same thickness. 8. The electromagnetically driven TMR in-plane detection micro-gyroscope device according to claim 1, wherein the first driving electrodes are respectively arranged on the upper and lower sides of one end of the supporting frame, and the second driving electrodes The electrodes are respectively arranged on the upper and lower sides of the supporting frame opposite to the end of the first driving electrode, the driving feedback electrode is arranged close to the first driving electrode, and the detection electrode is arranged close to the second driving electrode, so The first driving wire is connected to the first driving electrodes at both ends, the second driving wire is connected to the second driving electrodes at both ends, the driving feedback wire is connected to the driving feedback electrodes at both ends, and the signal detection wire is drawn out from the tunnel magnetoresistive element , to connect the two detection electrodes. 9. The electromagnetically driven tunneling magnetoresistive in-plane detection micro-gyro device according to claim 1, wherein the tunneling magnetoresistive element structure is a nano-multilayer film structure, which is sequentially formed on the substrate layer from top to bottom Arranged top electrode layer, magnetic free layer, insulating layer, magnetic pinned layer, bottom electrode layer.