CN107421810A - A kind of sample stage for being used to load stress-electric coupling uniaxial stretching device - Google Patents

Abstract

The invention discloses a sample stage for loading a force-electric coupling uniaxial stretching device, which comprises a base body, a base, a sample stage circuit board, a sample stage positioning sheet, an insulating cover sheet, and screws. The circuit board of the sample stage, the positioning piece of the sample stage, and the insulating cover are stacked on the base of the sample stage from bottom to top, and fixed by four screws. The invention fills the blank of one-dimensional and two-dimensional micro-nano materials in the uniaxial electromechanical coupling tensile test in the nano-indentation instrument, and has the characteristics of simple structure, reliable performance, easy installation, convenient operation and wide application range, and is easy to be compared with other tests. The combination of methods realizes the multi-field coupling test under atmospheric pressure.

Description

A sample stage for loading electromechanical coupling uniaxial tension device

technical field

The present invention relates to the field of elastic strain research of micro-nano materials, relates to a method and device applied to a multi-field (force, electricity, heat, light) joint characterization system of micro-nano materials, and specifically relates to a mechanical processing technology and a circuit board manufacturing technology The sample stage used to load the electromechanical coupling uniaxial tension device of micro-nano materials.

Background technique

John J. Gilman, a world-renowned scholar in the field of material mechanics, explained the theoretical strength of materials (under this stress, the bonds between atoms will be Spontaneous breaking or switching) and drastic electronic structure changes (such as the closing of the semiconductor band gap). Because almost all physical and chemical properties of materials depend on the electronic structure, and the electronic structure must undergo drastic changes before the atomic bonds spontaneously break, so when the applied strain is close to the theoretical strain, compared with the unstressed state, the material It should have unusual or even strange physical and chemical properties. A large number of experiments and theoretical work have proved that elastic strain can optimize many properties of materials and even change them fundamentally. A notable feature of micro-nano materials is the size effect of their strength. When the size of the material is reduced to the micro-nano scale, the elastic strain it can withstand is often 50-100 times that of its bulk base material, that is, academic circles often As the saying goes, "the smaller the stronger". For this reason, it is of great scientific significance and huge potential economic effect to study the structure, electrical, optical and other properties of one-dimensional and two-dimensional micro-nano materials in the large elastic strain range (both realizing multi-field coupling testing).

However, due to the extremely small physical size of one-dimensional and two-dimensional micro-nano materials compared with traditional macroscopic materials, traditional mechanical loading methods are no longer effective in the study of one-dimensional micro-nano materials. From the perspective of the applied strain, the material has a simple stress state under uniaxial tension and can effectively change the bonds between atoms, so as to more effectively control the properties of the material. Therefore, how to effectively apply uniaxial tensile strain to one-dimensional and two-dimensional micro-nano materials is a critical issue in elastic strain engineering.

Hysitron Corporation of the United States has designed and developed a mechanical-electrical coupling uniaxial tensile device called "Push-to-Pull (PTP)" (Micro/nano-mechanical test system employing tensile test holder with Push-to-pull transformer, US 2010 /0095780Al, 2010.4.22), combined with the company's transmission electron microscope (TEM) in-situ sample rod can realize high-precision uniaxial stretching of nanomaterials, apply continuous quasi-static strain to the sample, and effectively solve how to The problem of effectively applying uniaxial tensile strain to two-dimensional and two-dimensional micro-nanomaterials. However, this device currently has the following disadvantages: First, the electromechanical coupling uniaxial tension device can only be used with TEM in-situ sample rods, and the use environment is limited to high-vacuum TEMs. It is worth noting that in the practical application of nano-devices, most of them will serve in our real environment, that is, they will be affected by atmospheres such as oxygen and water vapor (which are important providers of hydrogen) in the air. Therefore, quantitative research on the influence of atmosphere environment on the properties of one-dimensional and two-dimensional micro-nano materials is particularly urgent and more practical. However, it is difficult for the TEM in-situ sample rod to realize the coupling experiment of different gas atmosphere fields and uniaxial tension, especially for the characterization of the multi-field coupling performance of one-dimensional and two-dimensional micro-nano materials under atmospheric pressure; secondly, the TEM in-situ sample rod can exert The stress range is very limited, and the strain that can be applied to materials with high elastic modulus is very limited, and the yield strength of the material is often not reached (such as high modulus semiconductor materials); third, it is easier to achieve electromechanical coupling in TEM, However, the introduction of other fields (optical, magnetic, etc.) is difficult to achieve due to the limitation of the high vacuum of the TEM, and the cost of equipment modification is very high.

The nanointrusion instrument can perform experiments under atmospheric pressure while having extremely high mechanical resolution, and it is relatively easy to introduce other fields, which can form an effective complement to the TEM in-situ sample rod. However, there is currently no sample stage for loading electromechanically coupled uniaxial tensile devices that can be used in nanoindenters.

As mentioned above, the nanointrusion instrument can perform experiments under atmospheric pressure while having extremely high mechanical resolution, and can form an effective complement to the TEM in situ sample holder. However, there is no sample stage for loading electromechanically coupled uniaxial tensioning devices that can be used in nanoindenters, which cannot meet the current research requirements on elastic strain engineering of micro-nano materials at the microscopic scale.

Contents of the invention

The purpose of the present invention is to provide a sample stage that can be used in a nanoindentation instrument for loading an electromechanical coupling uniaxial stretching device, so as to realize the multi-field coupling performance of one-dimensional and two-dimensional micro-nano materials under atmospheric pressure representation.

The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art, and provide a sample stage for loading a micro-nano material electromechanical coupling uniaxial stretching device that integrates mechanical processing technology and circuit board manufacturing technology. The sample stage realizes The combined use of the nanoindenter and the electromechanical coupling uniaxial stretching device can perform uniaxial electromechanical coupling tests on one-dimensional and two-dimensional micro-nano materials in an atmospheric environment, and then can also realize multi-field coupling tests on micro-nano materials. Greatly advance the elastic strain engineering of micro-nano materials.

To achieve the above goals, a sample stage for loading a mechatronic uniaxial tensile device according to the present invention includes a base body, a base, a sample stage circuit board, a sample stage positioning sheet, an insulating cover sheet, and screws. The circuit board of the sample stage, the positioning piece of the sample stage, and the insulating cover are stacked on the base of the sample stage from bottom to top, and fixed by four screws.

Technical scheme of the present invention is realized like this:

A sample stage for loading a mechatronic uniaxial tensile device, including a substrate, a base, a sample stage circuit board, a sample stage positioning piece, an insulating cover, screws, a sample stage circuit board, a sample stage positioning piece, and an insulating cover The slices are stacked sequentially on the base of the sample stage from bottom to top, and the base is fixed on the front of the substrate by screws.

The sample stage positioning piece has a bowl-shaped slot, the size of which is consistent with the electromechanical coupling uniaxial tensile device, and has a limiting effect on the electromechanical coupling uniaxial tensile device, so that the ring electrode of the electromechanical coupling uniaxial tensile device It is exactly aligned with the ring-shaped through-hole electrodes on the front of the sample stage circuit board.

The front surface of the sample stage circuit board has four ring-shaped through-hole electrodes that are insulated from each other, and their distribution is the same as that of the ring-shaped electrodes on the electromechanical coupling uniaxial stretching device. The surface of the ring-shaped through-hole electrodes has elastic conductive protrusions to facilitate good formation with the ring electrodes. There are four through-hole electrodes with large size on the rear surface of the sample stage circuit board, which are connected to the ring-shaped through-hole electrodes through wires. The wires are located in the inner layer of the sample stage circuit board, and the through-hole electrodes are connected to the test power meter through wires. .

The insulating cover has a trapezoidal protrusion, the position of the protrusion is aligned with the card slot and the size should be smaller than the card slot, and the insulating cover has good electrical insulation and elasticity.

The present invention has the following beneficial effects:

The invention fills the blank of one-dimensional and two-dimensional micro-nano materials in the uniaxial electromechanical coupling tensile test in the nano indenter, has the characteristics of simple structure, reliable performance, easy installation, convenient operation and wide application range, and is easy to be compared with other materials. The combination of test methods realizes the multi-field coupling test under atmospheric pressure. The circuit board of the sample stage of the invention has high processing precision, and the unique elastic conductive protrusions greatly ensure the excellent electrical contact between the circuit board of the sample stage and the electromechanical coupling uniaxial stretching device, greatly improving the reliability of electrical measurement. In the invention, the slot adapted to the shape of the rear support part of the electromechanical coupling uniaxial stretching device plays a role of limiting and fixing the stretching device during the sample loading process, which simplifies the sample loading process. The invention fully combines the high resolution of the force and displacement of the nanoindenter and the uniaxial stretchability of the electromechanical coupling uniaxial stretching device, and obtains the mechanical properties of micro-nano materials with high precision in a real atmospheric environment. Simultaneous detection of changes in charge transport performance can reveal the reliability of one-dimensional and two-dimensional nanomaterials with rich physical properties under service conditions, and provide a basis for the development and design of one-dimensional and two-dimensional nanomaterials in microelectromechanical systems, semiconductor devices, sensors, and many other fields. precious data.

Description of drawings

Fig. 1 is the overall structure front view of the present invention;

Fig. 2 is a front view of the substrate in Fig. 1;

Fig. 3 is a top view of the base of Fig. 1;

Fig. 4 is the top view of Fig. 1 sample platform circuit board;

Fig. 5 is the top view of Fig. 1 sample stage positioning piece;

Figure 6 is a top view of the electromechanical coupling uniaxial stretching device in Figure 1

FIG. 7 is a top view of the insulating cover in FIG. 1 .

Among them, 1 is the substrate, 2 is the base, 3 is the fixing screw, 4 is the circuit board of the sample stage, 5 is the positioning piece of the sample stage, 6 is the electromechanical coupling uniaxial tensile device, 7 is the insulating cover, 8 is the connection Screw, 9 is the base fixing screw hole, 10 is the front ring through-hole electrode, 11 is the wire, 12 is the back-end through-hole electrode, 13 is the lead wire, 14 is the limit groove, 15 is the trapezoidal protrusion, 16 is the stretching device ring-shaped through-hole electrodes.

detailed description

The present invention is described in further detail below in conjunction with accompanying drawing:

Referring to FIG. 1 , a sample stage for loading a mechatronic uniaxial tensile device according to the present invention is jointly processed by machining and circuit board manufacturing technology, and the base body 1 is the support frame of the sample stage. The sample stage circuit board 4 and the sample stage positioning piece 5 are sequentially stacked on the sample stage base 2 from bottom to top, fix the two screws 8 at the bottom, and then install the electromechanical coupling uniaxial tensile device 6 into the sample stage for positioning 5 into the slot 14, and then cover the insulating cover 7 with the protruding 15 facing down on the electrically coupled uniaxial tensile device 6, and ensure that it is aligned with the two screw holes on the upper part of the sample stage positioning piece 5, and fix the upper part. With two screws 8, the base 2 is fixed on the front of the substrate 1 by the screws 3.

The front surface of the sample stage circuit board 4 has four annular through-hole electrodes 10 with very small mutual spacing, but they must be insulated from each other. The surface of the hole electrode 10 has elastic conductive protrusions, which is very important to ensure good electrical contact between the ring-shaped through-hole electrode 10 and the ring-shaped electrode 15. There are 4 larger through-hole electrodes on the rear surface of the sample stage circuit board 4 12. It is convenient to connect with the external power supply, and is connected with the annular through-hole electrode 10 through the wire 11. The wire 11 is located in the inner layer of the sample stage circuit board 4, so that the short circuit between the four electrodes caused by the sample stage positioning piece 5 can be avoided. The through-hole electrodes 12 are connected to the test power meter through wires 13 .

The sample stage positioning piece 5 is a slot 14 of the same shape as the second half of the electromechanical coupling uniaxial stretching device 6, and its size is consistent with the electromechanical coupling uniaxial stretching device 6, ensuring that the electromechanical coupling uniaxial stretching device 6 It can be just inserted into the card slot 14 to play a limiting role for the electromechanical coupling uniaxial stretching device 6. At this time, the ring electrode 16 of the electrically coupled uniaxial stretching device 6 and the ring electrode 10 of the sample stage circuit board 4 Align top and bottom.

The insulating cover sheet 7 has a trapezoidal protrusion 15, the position of the protrusion 15 is aligned with the slot 14, and can be completely inserted into the slot 14. When the screw 8 is tightened, the protrusion 15 will electromechanically couple the uniaxial stretching device 6 Press tightly against the circuit board 4 of the sample stage to ensure that the ring electrode 16 of the electromechanical coupling uniaxial tensile device 6 is in full contact with the ring-shaped through-hole electrode 10 of the circuit board 4 of the sample stage to ensure good electrical contact. The insulating cover sheet 7 It has good electrical insulation and certain elasticity.

The base body 1 is fixed to the outside world through the screw holes 9, the size and spacing of the screw holes 9 are determined by the connected base, and the base body 1 has a certain weight to ensure the stability of the entire sample stage.

The electromechanical coupling uniaxial tensioning device 6 is an electromechanical coupling testing device based on MEMS technology invented by Hysitron Corporation.

Taking the original force electrical coupling performance test of ZnO nanowire atmospheric pressure in the nanoindenter (TI 950) of Hysitron Company as an example, its specific implementation is as follows:

1. Put the ZnO nanowires grown on silicon substrate and the electromechanical coupling uniaxial stretching device 6 into the electron beam/ion beam dual-beam focused ion beam system (FIB), and use the nanomanipulator to transfer the ZnO nanowires to the electromechanical Couple the uniaxial stretching apparatus to the 6-sample zone. Ion beam assisted deposition of Pt was used to fix the nanowires and connect them to the testing electrodes of the electromechanical coupling uniaxial tensioning device 6 , so as to conduct electricity between the sample and the electrodes of the electromechanical coupling uniaxial tensioning device 6 . Take out the electromechanical coupling uniaxial tensile device 6 of the prepared sample from the FIB.

2. Stack the sample stage circuit board 4 and the sample stage positioning piece 5 from bottom to top on the sample stage base 2, fix the two screws 8 at the bottom, and then install the electromechanical coupling uniaxial tensile device 6 into the The sample stage positioning piece 5 is stuck in the slot 14, and then the insulating cover sheet 7 with the protrusion 15 faces down on the electrically coupled uniaxial tensile device 6, and ensures that it is aligned with the two screw holes on the upper part of the sample stage positioning piece 5, and fixed The two screws 8 on the upper part are fixed, and the base 2 is fixed on the front of the substrate 1 by screws 3 .

3. Fix the substrate 1 on the sample platform of TI 950 through the screw hole 9, connect the wire 13 with the power meter, and close the TI 950 sample chamber door.

4. Find the electromechanical coupling uniaxial tensile device 6 under the TI 950 light microscope and adjust it to the test height.

Move the sample stage under the indenter, set the required mechanical loading curve and start the mechanical loading while measuring the electrical properties of the ZnO nanowire sample, so that the electrical properties of the ZnO nanowire sample under a certain strain can be obtained, and the ZnO nanowire sample can be obtained. Electromechanical coupling test, complete the research on the strain on the ZnO nanowire electricity under atmospheric pressure.

Claims (4)

1. a kind of sample stage for being used to load stress-electric coupling uniaxial stretching device, including matrix (1), base (2), sample stage circuit Plate (4), sample stage spacer (5), insulation cover plate (7), screw (8), it is characterised in that：Sample stage circuit board (4), sample stage are fixed Bit slice (5), insulation cover plate (7) overlay on sample stage base (2) successively from top to bottom, and base (2) is fixed on base by screw (3) Body (1) front.

A kind of 2. sample stage for being used to load stress-electric coupling uniaxial stretching device according to claim 1, it is characterised in that Sample stage spacer (5) has the neck (14) of bowl structure, and size is consistent with stress-electric coupling uniaxial stretching device (6), to power Being electrically coupled uniaxial stretching device (6) has position-limiting action so that the annular electrode (16) of stress-electric coupling uniaxial stretching device (6) is proper It is good to be alignd one by one with the annular through-hole electrode (10) of sample stage circuit board (4) front end.

A kind of 3. sample stage for being used to load stress-electric coupling uniaxial stretching device according to claim 1, it is characterised in that Sample stage circuit board (4) front-end surface has four annular through-hole electrode (10) mutually insulateds, and it is distributed and stress-electric coupling single shaft Annular electrode (16) on stretching device (6) is identical, the flexible conductive bumps in annular through-hole electrode (10) surface in favor of with Annular electrode (15) forms good electrical contact, and sample stage circuit board (4) rear end surface has four larger-size through hole electricity Pole (12), it is connected with annular through-hole electrode (10) by wire (11), wire (11) is located at sample stage circuit board (4) internal layer, leads to Pore electrod (12) is connected by wire (13) with test power meter.

A kind of 4. sample stage for being used to load stress-electric coupling uniaxial stretching device according to claim 1, it is characterised in that The cover plate (7) that insulate has trapezoidal raised (15), and the position of raised (15) is alignd with neck (14) and size should be less than neck (14), Insulation cover plate (7) has good electrical insulating property and elasticity.