CN107086167A - The manufacture method and discharge lamp of electrode for discharge lamp - Google Patents
The manufacture method and discharge lamp of electrode for discharge lamp Download PDFInfo
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- CN107086167A CN107086167A CN201610814228.3A CN201610814228A CN107086167A CN 107086167 A CN107086167 A CN 107086167A CN 201610814228 A CN201610814228 A CN 201610814228A CN 107086167 A CN107086167 A CN 107086167A
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- electrode
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- composition surface
- discharge lamp
- metal parts
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000000203 mixture Substances 0.000 claims abstract description 103
- 239000007787 solid Substances 0.000 claims abstract description 60
- 229910052751 metal Inorganic materials 0.000 claims description 91
- 239000002184 metal Substances 0.000 claims description 91
- 238000009792 diffusion process Methods 0.000 claims description 22
- 238000003754 machining Methods 0.000 abstract description 13
- 239000007772 electrode material Substances 0.000 abstract description 8
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 35
- 229910052776 Thorium Inorganic materials 0.000 description 35
- 238000002490 spark plasma sintering Methods 0.000 description 34
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 21
- WLTSUBTXQJEURO-UHFFFAOYSA-N thorium tungsten Chemical compound [W].[Th] WLTSUBTXQJEURO-UHFFFAOYSA-N 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 15
- 239000010937 tungsten Substances 0.000 description 14
- 229910052721 tungsten Inorganic materials 0.000 description 14
- 239000013078 crystal Substances 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 12
- 238000005245 sintering Methods 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 238000010891 electric arc Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000033228 biological regulation Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 235000016768 molybdenum Nutrition 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910000897 Babbitt (metal) Inorganic materials 0.000 description 1
- 241000790917 Dioxys <bee> Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000803 paradoxical effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Discharge Lamp (AREA)
Abstract
The manufacture method and discharge lamp of electrode for discharge lamp.The manufacture method of the electrode for discharge lamp of the present invention is the method that electrode for discharge lamp is manufactured using solidstate bonding, in the method, the front end solid components of column and the main body solid components of column is set to carry out solidstate bonding via mutual composition surface, wherein, the front end solid components constitutes at least a portion of electrode leading section, and contain emitter, the main body solid components at least constitutes electrode body portion, and with the diameter composition surface bigger than the composition surface of front end solid components, for the electrode material generated by solidstate bonding, to implement machining in the way of the electrode leading section for forming taper.
Description
The application is the applying date for September in 2013 9 days, Application No. 201380048037.5, entitled " discharge lamp
With the manufacture method of electrode and the discharge lamp with the electrode for discharge lamp produced using the manufacture method " patent of invention
The divisional application of application.
Technical field
The present invention relates to the discharge lamp used in exposure device etc., especially, it is related to engage multiple parts
The manufacture method of electrode for discharge lamp.
Background technology
In the discharge lamp, with high output, the different part such as metal species, crystal property is made to engage to form electricity
Pole.For example, regarding the metal parts for containing the emitters such as thorium as master as electrode leading section, using high-melting-point metal members such as pure tungstens
Body portion, makes two metal parts be engaged with each other.
It is used as joint method, it is known to engage as the diffusion of one of solidstate bonding., can be in engagement in diffusion engagement
Near face, to make crystal structure towards axially inclined or engaged in the way of metal grain is axially deformed, so that
The decline of electrode performance caused by engaging can be suppressed (with reference to patent document 1,2).Here, according to the pressure of regulation, pressurization when
Between, junction temperature, carry out discharge plasma sintering engagement (SPS engagements) as diffusion engagement.
In the electrode moulding using such diffusion engagement, electrode shape is determined using machining.For example, preparing
Constitute cylindric thorium tungsten (thoriated tungsten) part of electrode leading section and constitute the cylindric tungsten part of main part.
And then, the contact surface for making diameter be equal to each other is against each other, applies pressure from part both sides and carries out electrified regulation.Connect in diffusion
After conjunction, the leading section lateral incision of the part of integration is cut be processed as it is coniform, so as to obtain electrode shape (with reference to patent document
3)。
Different metal materials are made to carry out solidstate bonding come in the case of molding electrode, because coefficient of thermal expansion is different,
Thus when lighting, it is possible to apply larger power to composition surface and make electrode damaged.In order to prevent the situation, it is known to as follows
Electrode：The jut of ring-type is set on leading section and the composition surface of main part, them is engaged with each other and is diffused
Engagement (with reference to patent document 4).
On the other hand, it is also known that there are as below methods：By adjusting the area ratio of electrode side, make the life of lamp
(with reference to patent document 5).Here, thorium tungsten is being diffused into putting for engagement with the main part of pure tungsten as electrode fore-end
In electric light, it is set to make the structure of the ratio between the lateral area in thorium tungsten portion and electrode area in prescribed limit, makes arc discharge stable
Change.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2011-249027 publications
Patent document 2：Japanese Unexamined Patent Publication 2011-71091 publications
Patent document 3：Japanese Unexamined Patent Publication 2012-15007 publications
Patent document 4：Japanese Unexamined Patent Publication 2011-216442 publications
Patent document 5：Japanese Unexamined Patent Publication 2011-154927 publications
The content of the invention
The invention problem to be solved
Electrode main body-portions are being set to the metal of the emitters such as bag thoriated tungsten come in the case of constituting electrode, via engagement
Face provides emitter.Moreover, engaging condition, composition surface shape when the size on composition surface, the smoothness on composition surface, solidstate bonding
These structures related to composition surface of shape influence whether these electrode performances of the intensity, conductibility, heat conductivity of the electrode.
For example, the diameter on composition surface itself can bring influence to electrode performance.In the past, in solidstate bonding, do not have
Consider the influence that the diameter on composition surface is brought, therefore, electrode performance can be reduced according to circumstances.
In addition, on junction temperature, engaging time, plus-pressure, it is required according to the difference of the diameter on composition surface
Condition is also different.For junction temperature, engaging time, pressure and the diameter on composition surface, if between not accounting for them
Correlation and directly set, then can not obtain desired electrode performance.
Therefore, make multiple parts carry out solidstate bondings come in the case of forming electrode, it is necessary to during by junction temperature, engagement
Between, the diameter on pressure and composition surface is interrelated is set, so as to be set as realizing the value of excellent electrode performance.
On the other hand, compared with the section of tungsten part, the smoothness in the section of thorium tungsten part is relatively low.Diameter is bigger, and this is put down
The difference of slippery is more notable.Therefore in composition surface, bond strength is uneven, it is impossible to the bond strength stablized.
In addition, in the case of being diffused engagement using the power on heating, according to engaging condition etc., electric current appearance can be produced
The situation of face side is easily flowed to, so that the bond strength of the adjacent peripheral edges on composition surface is more than central part.Therefore, connect being diffused
When after conjunction using machining formation fore-end, the larger surface near portions of bond strength are cut more so that
Bond strength declines.
Accordingly, it would be desirable to make the part of leading section of the composition containing emitters such as thorium tungsten and constitute the part of main part in engagement
Solidstate bonding is carried out in the state of intensity stabilization.
In addition, the movement on emitter, the structure on composition surface also brings along influence.Emitter is towards electrode when lamp is lighted
What the movement of the front end surface side of leading section was spread based on the grain boundary decision diffused to the surface from electrode interior and along electrode surface
Concentration spreads.Grain boundary decision does not have directive property on its moving direction, therefore, is moved to point of the emitter of electrode surface
Cloth becomes uneven.In addition, because of surface concentration diffusion towards electrode after being moved towards the circumferential surface along leading section
During the front end face side movement of leading section, the offer of emitter expends the time.
Diffusion velocity is different according to electrode temperature, therefore, towards the front end face side emitter that moves of electrode leading section
Offer amount is also unstable so that near electrode leading section, and transmitting bulk concentration produces deviation.As a result, the brightness of arc discharge
The high position of the easy concentration for being moved to emitter of point, illumination occurs flicker and becomes unstable.
Accordingly, it would be desirable to all-the-time stable efficiently and provide emitter in advance to the front end surface side of electrode leading section so that
Emitter even concentration in electrode leading section.
The means used to solve the problem
The manufacture method of electrode for discharge lamp of the present invention is characterised by, makes the front end solid components and column of column
Main body solid components carries out solidstate bonding via mutual composition surface, wherein, the front end solid components constitutes electrode leading section
At least a portion, and contain emitter, the main body solid components at least constitutes electrode body portion, and compares front end with diameter
The big composition surface in the composition surface of solid components, for the electrode material generated by solidstate bonding, to form the electrode of taper
The mode of leading section implements machining.
For example, producing negative electrode, used in the discharge lamp as electrode.As emitter, thorium tungsten etc. can be applied,
Front end solid components, the shape of main body solid components are arbitrary, in addition, as material, can be with applied metal material or ceramics
Material etc..In addition, as solidstate bonding method, especially, can be engaged and carried out by SPS using various diffusion engagements
Solidstate bonding.
In the present invention, the diameter of front end solid components is less than the diameter of main body solid components.Moreover, by being connect in solid phase
Machining is carried out after conjunction, can be constituted only efficiently by easy generation wedge portion point and the weaker composition surface end of bond strength
Electrode after removal.
For example, it may be, when carrying out cutting process, in electrode material, at least cut front end solid components and main body
The composition surface peripheral part of solid components.Especially, machining can be carried out as follows：, will be in electrode material
The wedge portion point that the composition surface peripheral part office of front end solid components is formed is removed.In addition it is also possible to be cut as follows
Processing：Only retain the composition surface central portion of front end solid components in electrode material.
In order to realize such machining, it is configured to：The diameter on the composition surface of front end solid components and master
The diameter ratio on the composition surface of body solid components meets 0.05 ＜ D1/D2 ＜ 1.
On the other hand, the manufacture method formation of the electrode for discharge lamp of other manner of the invention has convex portion or recess
The leading section of (being denoted as bulge/recess below) and the main part with the recess/convex portion chimeric with the bulge/recess of leading section,
Leading section is abutted with main part, implement SPS engagements, the manufacture method is characterised by, in SPS engagements, make leading section with
Main part partly carries out solidstate bonding.
In order to carry out local solidstate bonding, for example, to carrying out the whole opposite face of electrode leading section and main part
The engaging time that is set in the case of solidstate bonding, sintering/junction temperature, at least any one applied in voltage are become
More/suppress.Thus, local solidstate bonding is carried out, the part of solidstate bonding is at least produced without in convex portion, recess.This is convex
Portion, recess are formed with the relative face in addition to the face along the direction vertical with electrode axis.
The discharge lamp produced using such manufacture method has electrode leading section and main part, wherein, the electrode
Emitter is contained and with convex portion or recess in leading section, and the main part has chimeric with the convex portion of electrode leading section or recess
Recess or convex portion.Electrode leading section has the front end face of the bright spot as arc discharge, constitutes the contracting of the electrode diameters such as cone shape
At least a portion in small portion.Main part is, for example, column, and one part can also be made to constitute electrode leading section.
Electrode leading section can be for example made up of thorium tungsten, and main part can be made up of pure tungsten etc..Convex portion, the forming portion of recess
Position is arbitrary, if it is axially formed recess, convex portion along electrode, and along the direction shape beyond the direction vertical with electrode axis
Into face relative to each other.
As long as in addition, convex portion, recess are shape chimeric each other, 1 group of recess, convex portion or multiple recessed can be set
Portion, convex portion.Wherein, chimeric expression its shape herein match each other and opposite face substantially contact each other as (be not with point
Sub- level but when being observed with macro-level) shape.For example, as the shape of bulge/recess, cylinder, Rhizoma Sparganii can be formed as
The columns such as post, quadrangular.
In the present invention, electrode leading section partly carries out solidstate bonding with main part.In electrode leading section and main part
Relative multiple faces in, electrode leading section bulge/recess and main part recess/convex portion surfaces opposite to each other
Without solidstate bonding at least a portion.
Due to there is the part without solidstate bonding in convex portion, recess, therefore, when lamp is lighted, because of grain boundary decision
And movement of the mobile thorium composition towards the direction vertical with electrode axis at non-solidstate bonding part is restricted.Its result
It is that the thorium composition moved along the direction vertical with electrode axis will not reach electrode surface mostly, more thorium compositions are in early stage
Just moved to the front end face direction of electrode leading section.
Convex portion, the forming position of recess be it is arbitrary, for example, electrode leading section bulge/recess and main part recess/
Convex portion can coaxially be formed with electrode axis.In this case, the thorium that is dispersed in whole electrode leading section can be made into diversity
Moved middlely to the front end face side of electrode leading section.
In view of thorium composition offer without making recess, convex portion solidstate bonding, and make opposite face in addition solid each other
Engage, thereby, it is possible to improve pole strength.That is, electrode leading section is configured in the convex of electrode leading section with main part
Portion/recess and outside recess/convex portion of the main part, progress at surfaces opposite to each other along the direction vertical with electrode axis
Solidstate bonding.
In the manufacture method of the electrode of the use for discharge lamp of other manner of the present invention, multiple solid components are formed, this is multiple
Solid components includes the front solid components with electrode front end face and the rear end side solid components supported by electrode support rod,
And at least one in multiple solid components is metal parts, for the multiple solid components, makes the front solid components
Solidstate bonding is carried out between the rear end side solid components, when composition surface external diameter L (mm) is in the scope of 2≤L≤60, with
The mode for meeting following conditional carries out solidstate bonding：
3000≤Tt+P≤150093
(1200≤T≤2500、10≤P≤90、3≤t≤60)。
Wherein, L represents composition surface external diameter (mm), and T represents junction temperature (DEG C), and P represents the pressurization applied in engagement
Power (MPa), t represents to keep the engaging time (min) of metal parts under pressurised conditions.
Or, in the manufacture method of the electrode for discharge lamp of the other side of the present invention, to meet following conditional
Mode carry out solidstate bonding：
370.4/L≤(T+P)t/9.8L≤15857.1/L
2≤L≤60、1200≤T≤2500、10≤P≤90、3≤t≤60。
Above-mentioned two formula sets the variables L that can fully maintain bond strength, T, P, t setting range, and they are
It is rule of thumb derived, and set in the way of variable has dependency relation each other.
In each variable of independent studies, composition surface external diameter L, junction temperature T, plus-pressure P, engaging time t meet following
Condition：
5≤L≤30、1500≤T≤2200、30≤P≤80、5≤t≤30。
As multiple solid components, as long as at least any one is metal parts.As long as in addition, shape before splicing
Into, the rear end side solid components that molds the front solid components and engaged with the front solid components i.e.
Can.As front solid components, as long as preparing the metal parts containing thorium.In addition, as the mode of solidstate bonding, can
With application SPS engagements.
Invention effect
In accordance with the invention it is possible to manufacture the electrode with excellent electrode performance based on solidstate bonding.
Brief description of the drawings
Fig. 1 is the top view for diagrammatically illustrating the short arc formula discharge lamp as the 1st embodiment.
Fig. 2 is the general profile chart of anode.
Fig. 3 is the figure for showing discharge plasma sintering device.
Fig. 4 is the figure for the figure for showing conditional (1).
Fig. 5 is the figure for the figure for showing conditional (2).
Fig. 6 is the general profile chart of the negative electrode as the 2nd embodiment.
Fig. 7 is the figure for the manufacturing process for showing negative electrode.
Fig. 8 is the general profile chart of the negative electrode as the 3rd embodiment.
Fig. 9 is the approximate vertical view before leading section, the engagement of main part.
Figure 10 is the schematic plan of negative electrode.
Figure 11 is the approximate vertical view of the negative electrode of the 4th embodiment.
Figure 12 is the region for representing to show embodiment shown in table 1, the coordinate position of comparative example and conditional (1)
The figure of figure.
Figure 13 is the figure for representing to show the region of each embodiment, the coordinate position of comparative example and conditional (2)
Figure.
Figure 14 is by the figure of Figure 13 part amplifications.
Embodiment
Below, embodiments of the present invention are described with reference to.
Fig. 1 is the top view for the short arc formula discharge lamp for diagrammatically illustrating the 1st embodiment.
Short arc formula discharge lamp 10 is the electric discharge that can be used in light source of exposure device (not shown) of pattern etc. is formed
Lamp, the discharge tube (luminous tube) 12 with transparent quartz glass.In discharge tube 12, negative electrode 20 and anode 30 separate regulation
It is spaced and is oppositely disposed.
In the both sides of discharge tube 12, seal pipe 13A, 13B of quartz glass is integral with discharge tube 12 in an opposing fashion
Set, the two ends of seal pipe 13A, 13B are closed by lamp holder 19A, 19B.Discharge lamp 10 is in upside, negative electrode 20 with anode 30 and is in
The mode of downside is configured along vertical direction.As described later, anode 30 is made up of two metal parts 40,50.
In the inside of seal pipe 13A, 13B, negative electrode 20, the electrode branch of the electric conductivity of anode 30 of bearing metal are equipped
Rod 17A, 17B are held, electrode support rod 17A, 17B are respectively via metal foil 16A, 16B and electric conductivity such as becket (not shown), molybdenums
Lead rod 15A, 15B connection.Seal pipe 13A, 13B are welded with the glass tube (not shown) being arranged in seal pipe 13A, 13B
Together, thus, the discharge space DS for being sealed with mercury and rare gas is sealed.
Lead rod 15A, 15B is connected with outside power supply unit (not shown), via lead rod 15A, 15B, metal foil 16A,
16B and electrode support rod 17A, 17B apply voltage between negative electrode 20, anode 30.When providing electric power to discharge lamp 10,
Arc discharge is produced between electrode, the bright line (ultraviolet light) of mercury is radiated.
Fig. 2 is the general profile chart of anode.
Anode 30 is the electrode structure for engaging metal parts 40,50, and metal parts 40 is by truncated cone shape part
40A and cylindrical shape part 40B is constituted, and truncated cone shape part 40A includes electrode front end face 40S, cylindrical shape part
40B have with the columned identical diameter of metal parts 50, engaged with metal parts 50.Metal parts 40 is by dystectic pure
Tungsten etc. or alloy using tungsten as principal component are constituted.
On the other hand, cylindrical metal part 50 by containing the high metal of thermal conductivity ratio metal parts 40 (for example, can shape
Into the pure tungsten of larger shape, thorium, molybdenum, the tantalum with gettering effect, heat conductivity high aluminium nitride, carbon material etc.) metal structure
Into.
Metal parts 40,50 is diffused engagement by discharge plasma sintering (SPS) mode.Therefore, along with electricity
Near the composition surface S that direction vertical pole axis X is formed, diffusion layer is formed with.
Herein, only partly deformed to engaging contributive composition surface crystal grain, the crystalline substance near the S of composition surface in addition
Grain will not be deformed along the direction vertical with composition surface (electrode axial direction) substantially, particle diameter caused by secondary recrystallization
Coarsening, crystal boundary migration.In addition, generally uniform along the crystal grain diameter on composition surface, in addition, near composition surface along electrode axis
To crystal grain diameter it is also generally uniform.
Pass through the formation of such diffusion layer for clipping composition surface S so that thermal conduction characteristic, electric conductivity will not be along engagements
Face S produces deviation.It is being changed into the electrode front end face 40S (more than 1000 DEG C) of high temperature towards electrode support rod 17B from because lamp is lighted
In a period of conveying heat, the Temperature Distribution of anode interior is distributed symmetrically that heated conveying is not by composition surface centered on electrode axis X
S influence.
Further, it is also possible to be diffused engagement as follows：The diameter of metallic crystal along composition surface S it is generally uniform,
And crystal structure is along electrode axis X inclinationizations.Due to inclinationization, crystal diameter continuously or periodically becomes along electrode axis X
Change.
The shape of metal parts 40,50 can also be the shape beyond Fig. 2, can also be between metal parts 40,50
The mode of the other metal parts of sandwiched carries out solidstate bonding.
Fig. 3 is the figure for showing discharge plasma sintering device.
Discharge plasma sintering method is following sintering method：Directly connected in the particle gap of powder compact or formed body
The electric energy of pulse type, thermal diffusion, electricity are applied to by the high temperature energy of the plasma discharging instantaneously produced by Spark Discharges
Field diffusion etc..
Fig. 3 discharge plasma sintering device 60 has vacuum chamber 65, on the top being arranged inside vacuum chamber 65
Between drift 80A, lower punch 80B and graphite molding jig 80, make the metal parts 40,50 with the shape shown in Fig. 2
Contact surface contact respectively in the state of set metal parts 40,50.Metal parts 40,50 advances with the intermetallic composite coatings such as cutting
Processing, is formed as contact surface for identical size.
Upper punch 80A, the lower punch 80B of graphite respectively with upper punch electrode 70A, lower punch electrode 70B
Connection.It is set in by device after vacuum environment, using the pulse power 90, between upper punch 80A, lower punch 80B
Apply voltage.
And then, while being powered using pressing mechanism (not shown) upper punch 80A, lower punch 80B it
Between apply pressure.The plasma discharging for using the power on and producing, is instantaneously warming up to defined temperature, then, stressed applying
Kept for certain time under state.Thus, the anode with the shape shown in Fig. 2 is obtained.
Next, using Fig. 4,5, engaging condition when being manufactured to electrode is illustrated.
As described above, when carrying out SPS engagements to metal parts 40,50, setting junction temperature, plus-pressure, engagement/holding
Time.The setting of these parameters influences larger to electrode performance.In addition, the diameter on these parameters and composition surface have it is related
Relation, in order to obtain optimal conditions, it is necessary to which by composition surface external diameter, it is appropriate that junction temperature, plus-pressure, engaging time are set as
Value.
In the present embodiment, the appropriate value of each parameter is obtained, and exports the formula for representing the dependency relation between parameter.
The arrange parameter in the way of meeting derived conditional, thus, each parameter is set without heuristic (Heuristic), you can
The excellent electrode structure of electrode performance is automatically derived to a certain extent.
First, composition surface external diameter L (mm) is set as satisfaction 2≤L≤60.On composition surface, external diameter L is less than 2mm situation
Under, it is impossible to pressurization during increase engagement, fine discharge is partly produced beyond composition surface, is engaged unstable.If increase connects
Pressurization during conjunction, the then metal material before engaging easily ruptures or deformed.In addition, it also occur that the diffusion of thorium, so that
Thorium amount is reduced, lamp behaviour declines.On the other hand, when composition surface external diameter L is more than 60mm, for obtaining the smooth of composition surface
The working process of degree becomes miscellaneous, and thorium usage amount is excessive.
Junction temperature T (DEG C) when engaging is set as satisfaction 1200≤T≤2500.It is more than 2500 DEG C in junction temperature T
In the case of, considerably beyond the fusing point (about 1800 DEG C) of thorium, the part generation of the thorium contained in the superiors near composition surface
Melt and evaporate.If thorium is diffused into composition surface, bond strength declines.On the other hand, it is less than 1200 DEG C in junction temperature T
In the case of, it is impossible to obtain enough bond strengths.
Plus-pressure P (MPa) when engaging is set as satisfaction 10≤P≤90.If plus-pressure P is higher than 90MPa, entering
During row engagement, metal parts easily ruptures or deformed.Furthermore, it is necessary to make two metal parts just pair coaxially be added
Pressure, but deviation is produced on the direction of pressurization, the density produced on composition surface near warpage or depression, composition surface becomes uneven
It is even.On the other hand, in the case where plus-pressure P is less than 10MPa, it is impossible to obtain enough bond strengths.
Moreover, using as engagement when the metal parts retention time engaging time t (min) be set as 3≤t of satisfaction≤
60.When the retention time, t was longer than 60min, productivity ratio declines.On the other hand, in the case where retention time t is less than 3min, no
Enough bond strengths can be obtained.
So, composition surface external diameter L, temperature T, plus-pressure P, engaging time t when being engaged for SPS, respectively setting are realized
The number range of excellent electrode performance.But, there is dependency relation between these parameters, it is difficult to dividually change each parameter
And determine to realize the parameter combination of more excellent electrode performance.
Therefore, in the present embodiment, two conditionals are defined.The number range for meeting conditional is schemed respectively
Shape, thus, makes the scope visualization of 4 parameters.
First, it will be considered that 1 conditional of energy during engagement is defined as follows.
3000≤Tt+P≤150093·····(1)
(2≤L≤60)
While changing composition surface external diameter L, while setting junction temperature in the way of the lower limit of satisfaction (1) formula, higher limit
T, plus-pressure P, engaging time t.
Fig. 4 is the figure for the figure for showing conditional (1).As shown in figure 4,2 dimensions by defining transverse axis L, longitudinal axis Tt+P
Coordinate system, region S1 is patterned into by the scope of (1) formula of satisfaction.According to (L, Tt+P) coordinate position in the S of rectangular area, engagement
Intensity changes.
In addition, defining the following conditional for taking bond strength into account.
370.4/L≤α/L≤15857.1/L·····(2)
(α=(T+P) t/9.8,2≤L≤60)
Fig. 5 is the figure for the figure for showing conditional (2).As shown in figure 5, by defining transverse axis L, the longitudinal axis (T+P) t/
The 2 dimension coordinate systems of (9.8L), region S2 is patterned into by the scope of (2) formula of satisfaction.
By graphical so by the setting range of each parameter, even in manufacture electrode structure is different, i.e. composition surface
In the case of the different electrode of external diameter, it also can easily estimate and set for obtaining equal excellent heat conductivity, intensity
Numerical value.
Especially, by setting composition surface external diameter L, junction temperature T, plus-pressure P, engaging time t in following scope,
The electrode with more excellent electrode performance can be produced.
5≤L≤30、1500≤T≤2200、30≤P≤80、5≤t≤30
·····(3)
So, according to present embodiment, the metal parts 50 such as metal parts 40 and pure tungsten metal comprising compositions such as thoriums are made
Carry out SPS engagements and form anode.Moreover, when SPS is engaged, set in the permissible range of above-mentioned setting composition surface external diameter L,
Junction temperature T, plus-pressure P, engaging time t, and they are set as satisfaction (1), (2) formula.
Electrode can also be manufactured using the diffusing joining method beyond SPS engagements.For example, can by hot pressing (HP),
Diffusion juncture that hip treatment (HIP) etc. is sintered while being pressurizeed manufactures electrode.In addition, may be used also
With the solidstate bonding method (friction welded method, ultrasonic bonding method etc.) beyond application diffusing joining method.
In addition, on negative electrode, different metal parts can be made to carry out solidstate bonding.In addition it is also possible to make a side be gold
Belong to part, the part (ceramics etc.) for making the opposing party to be made up of other materials to carry out solidstate bonding.Further, it is also possible in part
Between sandwiched insertion (イ ン サ ー ト) part engaged.
Next, using Fig. 6,7, being illustrated to the discharge lamp as the 2nd embodiment.In the 2nd embodiment, lead to
The part that crossing makes diameter different carries out solidstate bonding, to mold electrode.
Fig. 6 is the general profile chart of the negative electrode as the 2nd embodiment.
Negative electrode 120, which is employed, to be made two engagements of metal parts 1110,1120 and then is molded and is obtained using machining
The electrode structure arrived.Metal parts 1110 constitutes a leading section 120A part, the pillared main part of the structure of metal parts 1120
120B, and constitute leading section 120A main body side part.
Metal parts 1110 is the metal parts being made up of thorium tungsten, and metal parts 1120 is by thermal conductivity ratio metal parts
1110 high metals (being herein pure tungsten) are constituted, wherein, thorium tungsten is containing thorium anhydride (ThO2) tungsten.
Metal parts 1110,1120 is carried out by discharge plasma sintering (SPS (Spark Plasma Sintering))
Diffusion engagement.Therefore, near the composition surface S vertical with electrode axis E, it is formed with diffusion layer.The diameter of metallic crystal is along connecing
Conjunction face S is substantially uniform.In addition, on electrode axis E, crystal diameter is generally uniform except composition surface S other than around.By so
The diffusion layer for clipping composition surface S formation, thermal conduction characteristic, electric conductivity along composition surface S do not have deviation.
Fig. 7 is the figure for the manufacturing process for showing negative electrode.Using Fig. 7, SPS engagements and machining are illustrated.
In addition, on anode, can also similarly be manufactured.
First, columned metal parts 1110,1120 is molded respectively.Now it is shaped to：Metal parts 1110 it is straight
Footpath D1 is less than the diameter D2 of metal parts 1120.Herein, in 3 ＜ D1 ＜ 30,5 ＜ D2 ＜ 60 (being mm units), to meet
0.05 ＜ D1/D2 ＜ 1 mode sets diameter D1, D2.Higher limit is set in the way of at least removing wedge portion described later point.This
Outside, lower limit is set according to angle of inclination, engaging condition of electrode leading section etc..
SPS joining process is carried out to the metal parts 1110,1120 prepared in the same manner as embodiment 1.Thus, obtain
Electrode material 1200.
And then, machining is implemented to the electrode material 1200 generated.Herein, it is coniform shown in dotted line K to be formed
Electrode front end face mode, carry out local cutting respectively to metal parts 1110,1120.For metal parts 1110, it will connect
Part beyond conjunction face 1110S central portion 1110T is pruned, and for metal parts 1120, composition surface 1120S peripheral part is cut
Go.On cutting process, cutting instrument etc., it can be carried out using existing known method, utensil etc..
Position on the cutting face shown in dotted line K, the position for forming electrode outer peripheral face, according to metal parts 1110,
Diameter D1, D2 of metal parts 1120 size and its difference, the angle of inclination of electrode outer peripheral face, the thickness of metal parts 1110
Deng being set.Especially, to be set as：At least the composition surface peripheral part 1110T of metal parts 1110 is removed, and retains and connects
Conjunction face middle body 1110C.
Electrode material 1200 after cutting is made up of coniform metal parts 1110 and metal parts 1120, so as to be molded
Go out the negative electrode 120 being made up of electrode leading section 120A, main part 120B shown in Fig. 6, wherein, a part for metal parts 1120
For circular cone shape, other parts are cylindric.
So, according to present embodiment, engaged using SPS, engagement is with the electrode leading section 120A's being made up of thorium tungsten
Use for discharge lamp negative electrode 120.In SPS bonding processs, via composition surface 1110S, 1120S, to cylindrical metal part 1110, circle
Cylindrical metal part 1120 carries out electrified regulation, them is carried out SPS engagements, wherein, cylindrical metal part 1110 is by thorium tungsten
Constitute, cylindrical metal part 1120 is pure tungsten, and with the diameter D2 bigger than the diameter D1 of metal parts 1110.Then, with
The mode that section shown in dotted line K turns into electrode outer peripheral face implements machining.
Compared with the composition surface 1120S of the metal parts 1120 of pure tungsten, the engagement of the metal parts 1110 containing thorium composition
Face 1110S smoothness is relatively low.Diameter is bigger, and its difference is more notable.But, connect because the diameter D2 than composition surface 1120 is small
Conjunction face 1110A diameter D1 is relatively small, therefore, and after solidstate bonding is carried out, its influence is not easy to show, and can suppress
The decline of bond strength.
Further, since the difference of the physical property of metal parts 1110,1120, near the end of composition surface, along with electricity
The vertical direction of pole axis produces local unassembled small wedge portion point.In the present embodiment, cutting metal part is passed through
1110 composition surface peripheral part 1110T, can remove the wedge formed when SPS is engaged at the 1110T of composition surface peripheral part.It is tied
Fruit is can to suppress the decline of bond strength.
Especially, the cutting tip of metal parts 1110 can be reduced as far as in the way of only removing wedge portion point, by
This makes the diameter D1 of metal parts 1110 be more nearly the diameter D2 of metal parts 1120.When SPS is engaged, this, which can increase, adds
Pressure, increases bond strength.
On the other hand, if being powered when SPS is engaged, because of engaging condition etc., sometimes with metal parts 1110,1120
Outer peripheral face near bond strength compare, the bond strength of composition surface middle body is smaller.But, due to metal parts 1110
Diameter D1 it is relatively small, therefore, its influence is smaller.In addition, near the periphery of the metal parts 1110 larger to bond strength
The scope cut is smaller.Therefore, compared with the situation that the contact surface for making diameter be equal to each other mutually is abutted, central portion connects
Close intensity and become big.
In the metal parts 1110 being made up of thorium tungsten, the portion in the absence of thorium anhydride is produced in its near surface sometimes
Point.But, the machining after being engaged due to the skin section of metal parts 1110 by SPS is removed, therefore, it is possible to prevent dioxy
Change the unstable of the caused arc discharge of thorium shortcoming.In addition, carrying out machining, thus, Bu Hui after by being engaged in SPS
Composition surface radially produces step difference.As a result, when lamp is lighted, paradoxical discharge will not be produced.
The size of the diameter of metal parts, the angle of inclination of electrode front end face, front end face cross sectional shape be it is arbitrary, can be with
It is configured to：The flat outer peripheral face without step difference is cut into, the electrode leading section of taper is formed.In addition, the material of metal parts
Matter, shape be also it is arbitrary, can by electrode leading section containing the emitter beyond thorium in the way of constituted solid components, also
The material (ceramics, carbon etc.) beyond metal parts can be utilized to constitute main part.In addition it is also possible to be configured to electrode leading section
Part with emitters such as bag thoriated tungstens and both the solid components of main part.
Next, using Fig. 8~10, being illustrated to the discharge lamp as the 3rd embodiment.In the 3rd embodiment,
Step difference is set in composition surface, solidstate bonding is partly carried out.
Fig. 8 is the general profile chart of the negative electrode as the 3rd embodiment.Fig. 9 is general before leading section, the engagement of main part
Omit top view.Hereinafter, anticathode structure is illustrated.
Negative electrode 220 is the circular cone shape leading section 220A with electrode front end face 220S is engaged with columnar body portion 220B
Structure.Leading section 220A is to contain the metal that thorium composition is constituted as emitter, by thorium tungsten, and main part 220B is by warm
The high metal of conductivity (being herein pure tungsten) or the alloy comprising the metal etc. are constituted.
Leading section 220A is coaxially disposed the convex portion 223 towards main part lateral process, main body with electrode axis E in the central portion
Portion 220B has the recess 226 identical with the shape of the convex portion 223.By being consolidated leading section 220A, main part 220B
Engage, mold negative electrode 220.Herein, the SPS engagements as one of diffusion engagement have been used.
As shown in figure 9, leading section 220A, main part 220B are made up of multiple end faces, with connection surface relative to each other
222、225.In leading section 220A sides, end face 222A, the 222E vertical with electrode axis E and the end face of convex portion 223 are formed with
222C and end face 222B, the 222D parallel with electrode axis E.In main part 220B sides, the end face with leading section 220A is formed with
222A~222E relative end face 225A~225E respectively.
In SPS joining process processes, make leading section 220A convex portion 223 and main part 220B recess 226 chimeric simultaneously
Abut, the surface of its opposite side is abutted respectively with drift (not shown).Leading section 220A convex portion 223 is with main part 220B's
Recess 226 abut be end face 222B~222D, 225B~225D at it is very close to each other in the state of be fitted together to so that must
To negative electrode 220.
In the manufacturing process of electrode for discharge lamp, SPS engagements are carried out in a same manner as in the first embodiment.Adjust SPS engagements
In application voltage, plus-pressure, junction temperature, pressing time (retention time) so that leading section 220A convex portion 223 and main body
Portion 220B recess 226 (spreads and engaged) without solidstate bonding between end face 222B~222D, 225B~225D, and makes position
Annular end face 222A, 222E and annular end face 225A, 225E difference solidstate bonding around it.
For example, in the case where the diameter M (mm) of negative electrode 220 is set into 5≤M≤30, voltage V, plus-pressure P will be applied
(Mpa), sintering temperature T (DEG C), engaging time t (min) are respectively set as 5≤P≤30,1500≤T≤2200,5≤t≤30
Scope carries out SPS engagements, thus obtains the negative electrode 220 of above-mentioned partly solidstate bonding.
Figure 10 is the schematic plan of negative electrode 220.Use Figure 10, the mobile theory of the thorium composition in being lighted to lamp
It is bright.
When being changed into lamp illuminating state, the thorium composition (specifically thorium anhydride) inside the 220A of thorium leading section is because of crystal boundary
Spread and moved towards surface.Composition is no more than mutual end face ground mobile, inside or the end face of convex portion 223 due to convex portion 223
222D is simply simply abutted with main part 220B recess 226, therefore composition is moved along surface.
The convex portion 223 and the no solidstate bonding of recess 226 and simply abut, therefore, thorium composition is mostly towards electrode front end face
220S is moved.That is, along the direction vertical with electrode axis E, the movement of thorium composition is hindered, with thorium composition towards along leading section
The mobile phase ratio on 220A circumferential surface (circular conical surface), thorium composition towards electrode front end face 220S movement prevails.
As a result, internal thorium composition is with shorter total distance, electrode front end face 220S is reached rapidly and early.Especially
It is, because convex portion, recess are arranged on central portion, therefore, is dispersed in the thorium composition inside the 220A of leading section and is balancedly carried
The thorium concentration near front end face 220S, front end face 220S is supplied to be less subject to the influence of time process and become stable.
In addition, compared with the leading section shape for being not provided with convex portion 223, more thorium compositions can be stored to convex portion 223, because
This, also can side be carried forward successively from the relatively low convex portion 223 of temperature even if leading section temperature is uprised because of ignition condition
For enough thorium compositions.
So, according to present embodiment, the negative electrode 220 of discharge lamp is by the leading section 220A that is constituted with thorium tungsten and with pure tungsten structure
Into main part 220B constitute.Make leading section 220A convex portion 223 is chimeric with main part 220B recess 226 to be connect to implement SPS
Close.Now, convex portion 223 and recess 226 is carried out solidstate bonding, and end face 222A, 225A and 222E in addition,
Solidstate bonding is carried out at 225E.
Convex portion 223, recess 226 are in close contact in mode very close to each other of trying one's best, in addition, forming leading section 220A, master
During body portion 220B, the smoothness of end face is also molded.But, the end face of convex portion 223, recess 226 can not be made strictly smooth,
There can also be the surface roughness for the degree for being formed locally slight void.In addition it is also possible to be to make convex portion 223, recess
226 partly carry out solidstate bonding, do not enter simply by the presence of at least a portion end face or in a part for any one end face
The state of row solidstate bonding.
Next, using Figure 11, being illustrated to the discharge lamp as the 4th embodiment.In the 4th embodiment, with
Opposite mode forms concaveconvex shape.Structure in addition is identical with the 3rd embodiment.
Figure 11 is the approximate vertical view of the negative electrode of the discharge lamp of the 4th embodiment.
Negative electrode 2120 is made up of leading section 2120A and main part 2120B, and leading section 2120A has recess 2123, main part
2120B has convex portion 2126.In leading section 2120A and main part 2120B, end face 2122A, 2125A relative to each other and end
Face 2122E, 2125E carries out solidstate bonding, on the other hand, and recess 2123, convex portion 2126 are but embedding each other without solidstate bonding
Ground is closed to abut.
According to such structure, when lamp is lighted, the thorium composition inside the 2120A of leading section is on the surface towards recess 2123
When 2122B, 2122D are moved, moved towards front end face 2120S direction.Thus, thorium composition, which is efficiently provided, arrives front end face
2120S。
In addition, leading section 2120A is the structure with recess 2123, therefore, thermal capacitance is easily transmitted to front end face 2120S.Cause
This, under the relatively low ignition condition of leading section 2120A temperature, also can stably provide thorium composition.
Hereinafter, embodiments of the invention are illustrated.Herein, for study condition formula (1), (2), multiple realities are produced
Apply the anode of example and comparative example and tested.
Embodiment
The discharge lamp of embodiment 1 corresponds to the discharge lamp of embodiment 1.On conditional (1), engaged, manufactured using SPS
It is thorium tungsten (thoriated tungsten) part, the anode that main part is pure tungsten part to go out leading section.Now, change respectively and connect
Conjunction face external diameter L, junction temperature T, plus-pressure P, engaging time t, are manufactured that embodiment 1~3, the anode of comparative example 1~3.So
Afterwards, tension test is carried out to each anode produced.Table 1 shows experimental result.
[table 1]
Embodiment 1, comparative example 1 are to make thorium tungsten part and pure tungsten part carry out SPS in the way of in the absence of insertion part to connect
The electrode for closing and producing.Embodiment 2, comparative example 2 be folded with tantalum (Ta) part SPS engagements carried out as insertion part and
Obtained electrode.Embodiment 3, comparative example 3 are folded with rhenium (Re) part and carried out as insertion part obtained from SPS engagements
Electrode.
In tension test, electrode two ends are held using the fixture of Material Testing Machine, are drawn with 10mm/min speed
Stretch, determine power during fracture.
Figure 12 is the region for representing to show embodiment shown in table 1, the coordinate position of comparative example and conditional (1)
The figure of figure.
As shown in figure 12, the present embodiment 1~3 is included in the S1 of region, in addition, it can be seen from table 1, tensile strength is very
Greatly.On the other hand, comparative example 1~3 is not belonging to region S1, and tensile strength is smaller.Due to engagement energy surplus, thus in stretching examination
Middle electrode is tested to be deformed.It was furthermore observed that thorium diffusion.
So, by setting composition surface external diameter L, junction temperature T, plus-pressure P, engaging time t in the range of the S1 of region,
It can obtain excellent electrode performance.
Next, on conditional (2), engaged using SPS, it is that thorium tungsten part, main part are pure tungsten to produce leading section
The electrode of part.Now, change composition surface external diameter L, junction temperature T, plus-pressure P, engaging time t, be manufactured that embodiment 5~
8th, 11~15, the anode of comparative example 1~4,9~10.Then, tension test is carried out to the anode produced.Table 2 shows experiment knot
Really.But, from unlike table 1, herein, according to manufacture and test sequence, numbering being assigned with to embodiment and comparative example.
[table 2]
Figure 13 is the figure for representing to show the region of each embodiment, the coordinate position of comparative example and conditional (2)
Figure.Figure 14 is by the figure of Figure 13 part amplification.
It can be seen from the numbering of embodiment, the numbering of comparative example in Figure 13,14 with reference to table 2, all comparative examples are respectively positioned on area
Outside domain S2 scope.In addition, it can be seen from table 2, in a comparative example, it was observed that thorium diffusion, bond strength deficiency or electrode deformation.
On the other hand, in all embodiments, bond strength is larger, and has obtained excellent electrode performance.
In the above-described embodiments, it is the structure that is engaged to thorium tungsten leading section and tungsten main part, but by addition
Metal solid part mutual SPS engagements, can also obtain identical result.
On the present invention, the situation of the intent of the present invention being defined by the appended claims and scope is not being departed from
Under, various changes, displacement can be carried out, substituted.In addition, the present invention is not intended to be limited to the particular implementation described in specification
Processing, device, manufacture, works, means, method and step.As long as those skilled in the art, then it will be appreciated that root
According to disclosure of the invention, the function identical function or reality substantially played with embodiment recited herein performance can be exported
Matter performance equivalent effect and the device of effect, means, method.Thus, it will be appreciated that as appended claims are included in
In device, means, the scope of method.
The application is that (Japanese Patent Application 2012-208372, September is applied on the 21st within 2012 with Japanese publication；Japanese Patent Application
No. 2012-212807, September is applied on the 26th within 2012；Japanese Patent Application 2012-214630, September is applied on the 27th within 2012) it is base
Plinth application and the application for asking priority, in the way of reference, will include specification, accompanying drawing and the claim of basis application
Disclosure inside is combined in the application entirety.
Label declaration
10 discharge lamps
12 discharge tubes
30 anodes
40 metal parts (front solid components)
50 metal parts (rear end side solid components)
S composition surfaces
Claims (5)
1. a kind of manufacture method of electrode for discharge lamp, forms multiple solid components, this multiple solid components, which is included, has electrode
The front solid components of front end face and the rear end side solid components supported by electrode support rod, and in the multiple solid components
At least one be metal parts, for the multiple solid components, make the front solid components and the rear end side solid
Solidstate bonding is carried out between part,
The manufacture method is characterised by,
The diffusion layer comprising composition surface is formed about on composition surface,
When external diameter L is in the scope of 2≤L≤60 on composition surface, solidstate bonding is carried out in the way of meeting following conditional：
3000≤Tt+P≤150093
1200≤T≤2500,10≤P≤90,3≤t≤60,
Wherein, L represents composition surface external diameter, and its unit is mm, and T represents junction temperature, and its unit is DEG C that P is represented in engagement when institute
The plus-pressure of application, its unit is MPa, and t represents to keep the engaging time of metal parts under pressurised conditions, and its unit is min.
2. a kind of manufacture method of electrode for discharge lamp, forms multiple solid components, this multiple solid components, which is included, has electrode
The front solid components of front end face and the rear end side solid components supported by electrode support rod, and in the multiple solid components
At least one be metal parts, for the multiple solid components, make the front solid components and the rear end side solid
Solidstate bonding is carried out between part,
The manufacture method is characterised by,
The diffusion layer comprising composition surface is formed about on composition surface,
Solidstate bonding is carried out in the way of meeting following conditional：
370.4/L≤(T+P)t/9.8L≤15857.1/L
2≤L≤60,1200≤T≤2500,10≤P≤90,3≤t≤60,
Wherein, L represents composition surface external diameter, and its unit is mm, and T represents junction temperature, and its unit is DEG C that P is represented in engagement when institute
The plus-pressure of application, its unit is MPa, and t represents to keep the engaging time of metal parts under pressurised conditions, and its unit is min.
3. the manufacture method of the electrode for discharge lamp described in any one in claim 1~2, it is characterised in that
Composition surface external diameter L, junction temperature T, plus-pressure P, engaging time t meet following condition：
5≤L≤30、1500≤T≤2200、30≤P≤80、5≤t≤30。
4. the manufacture method of the electrode for discharge lamp described in any one in claim 1~2, it is characterised in that
By make in the multiple solid components at least any one in the way of metal parts, form the front solid part
Part and the rear end side solid components that is engaged with the front solid components are as the multiple solid components.
5. a kind of discharge lamp, it has the manufacturer using the electrode for discharge lamp described in any one in claim 1~2
The electrode for discharge lamp that method is produced.
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP2012-208372 | 2012-09-21 | ||
| JP2012208372A JP2014063655A (en) | 2012-09-21 | 2012-09-21 | Method of manufacturing electrode for discharge lamp |
| JPJP2012-212807 | 2012-09-26 | ||
| JP2012212807A JP6092557B2 (en) | 2012-09-26 | 2012-09-26 | Manufacturing method of discharge lamp electrode |
| JP2012214630A JP6140964B2 (en) | 2012-09-27 | 2012-09-27 | Discharge lamp electrode and manufacturing method thereof |
| JPJP2012-214630 | 2012-09-27 | ||
| CN201380048037.5A CN104641445B (en) | 2012-09-21 | 2013-09-09 | Method for producing electrode for discharge lamp and discharge lamp having electrode for discharge lamp produced by the production method |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380048037.5A Division CN104641445B (en) | 2012-09-21 | 2013-09-09 | Method for producing electrode for discharge lamp and discharge lamp having electrode for discharge lamp produced by the production method |
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| Publication Number | Publication Date |
|---|---|
| CN107086167A true CN107086167A (en) | 2017-08-22 |
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| CN201380048037.5A Active CN104641445B (en) | 2012-09-21 | 2013-09-09 | Method for producing electrode for discharge lamp and discharge lamp having electrode for discharge lamp produced by the production method |
| CN201610814228.3A Pending CN107086167A (en) | 2012-09-21 | 2013-09-09 | The manufacture method and discharge lamp of electrode for discharge lamp |
| CN201610816130.1A Active CN106887369B (en) | 2012-09-21 | 2013-09-09 | The manufacturing method and discharge lamp of electrode for discharge lamp |
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|---|---|---|---|
| CN201380048037.5A Active CN104641445B (en) | 2012-09-21 | 2013-09-09 | Method for producing electrode for discharge lamp and discharge lamp having electrode for discharge lamp produced by the production method |
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| CN201610816130.1A Active CN106887369B (en) | 2012-09-21 | 2013-09-09 | The manufacturing method and discharge lamp of electrode for discharge lamp |
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| KR (1) | KR102083286B1 (en) |
| CN (3) | CN104641445B (en) |
| TW (2) | TWI602216B (en) |
| WO (1) | WO2014045918A1 (en) |
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| US9023734B2 (en) | 2012-09-18 | 2015-05-05 | Applied Materials, Inc. | Radical-component oxide etch |
| JP6633826B2 (en) * | 2014-09-24 | 2020-01-22 | 株式会社オーク製作所 | Discharge lamp |
| JP6564598B2 (en) * | 2015-03-31 | 2019-08-21 | 株式会社オーク製作所 | Discharge lamp |
| CN109427519A (en) * | 2017-08-28 | 2019-03-05 | 深圳凯世光研股份有限公司 | A kind of the recycling and reusing method and its anode electrode of short arc discharge lamp anode electrode |
| KR102088035B1 (en) * | 2018-10-18 | 2020-03-11 | 유니램 주식회사 | Electrode and xenon flash lamp with the same |
| JP7557713B2 (en) * | 2021-01-19 | 2024-09-30 | 東芝ライテック株式会社 | Low pressure ultraviolet lamp unit |
| CN113410121B (en) * | 2021-06-18 | 2025-04-22 | 常州玉宇电光器件有限公司 | A new type of structural electrode and manufacturing process |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010055781A (en) * | 2008-08-26 | 2010-03-11 | Harison Toshiba Lighting Corp | Electrode, discharge lamp, manufacturing method of electrode |
| CN102034672A (en) * | 2009-09-24 | 2011-04-27 | 株式会社Orc制作所 | Discharge lamp |
| CN102315079A (en) * | 2010-07-02 | 2012-01-11 | 优志旺电机株式会社 | Short arc discharge lamp |
| CN102315078A (en) * | 2010-07-02 | 2012-01-11 | 优志旺电机株式会社 | Short arc discharge lamp |
| JP5556315B2 (en) * | 2010-04-02 | 2014-07-23 | ウシオ電機株式会社 | Short arc type discharge lamp |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3337658B2 (en) * | 1999-01-26 | 2002-10-21 | 浜松ホトニクス株式会社 | Discharge tube electrode and discharge tube using the same |
| JP3994880B2 (en) * | 2002-04-26 | 2007-10-24 | ウシオ電機株式会社 | Discharge lamp |
| JP4396747B2 (en) * | 2007-08-20 | 2010-01-13 | ウシオ電機株式会社 | Discharge lamp |
| JP5472915B2 (en) * | 2010-05-24 | 2014-04-16 | 株式会社オーク製作所 | Discharge lamp |
| JP4498468B1 (en) * | 2010-03-10 | 2010-07-07 | 株式会社オーク製作所 | Manufacturing method of electrode for discharge lamp |
| JP5316436B2 (en) | 2010-01-28 | 2013-10-16 | ウシオ電機株式会社 | Discharge lamp |
| JP5670708B2 (en) * | 2010-11-19 | 2015-02-18 | 株式会社ユメックス | Electrode for short arc discharge lamp and method for manufacturing the same |
-
2013
- 2013-09-09 KR KR1020157007058A patent/KR102083286B1/en active Active
- 2013-09-09 CN CN201380048037.5A patent/CN104641445B/en active Active
- 2013-09-09 CN CN201610814228.3A patent/CN107086167A/en active Pending
- 2013-09-09 WO PCT/JP2013/074235 patent/WO2014045918A1/en not_active Ceased
- 2013-09-09 CN CN201610816130.1A patent/CN106887369B/en active Active
- 2013-09-14 TW TW102133334A patent/TWI602216B/en active
- 2013-09-14 TW TW106118655A patent/TWI638380B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010055781A (en) * | 2008-08-26 | 2010-03-11 | Harison Toshiba Lighting Corp | Electrode, discharge lamp, manufacturing method of electrode |
| CN102034672A (en) * | 2009-09-24 | 2011-04-27 | 株式会社Orc制作所 | Discharge lamp |
| JP5556315B2 (en) * | 2010-04-02 | 2014-07-23 | ウシオ電機株式会社 | Short arc type discharge lamp |
| CN102315079A (en) * | 2010-07-02 | 2012-01-11 | 优志旺电机株式会社 | Short arc discharge lamp |
| CN102315078A (en) * | 2010-07-02 | 2012-01-11 | 优志旺电机株式会社 | Short arc discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI638380B (en) | 2018-10-11 |
| TWI602216B (en) | 2017-10-11 |
| WO2014045918A1 (en) | 2014-03-27 |
| CN104641445A (en) | 2015-05-20 |
| KR20150056783A (en) | 2015-05-27 |
| CN106887369B (en) | 2019-01-15 |
| CN104641445B (en) | 2017-05-10 |
| KR102083286B1 (en) | 2020-03-02 |
| TW201735096A (en) | 2017-10-01 |
| CN106887369A (en) | 2017-06-23 |
| TW201415527A (en) | 2014-04-16 |
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