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CN107063082B - A balance loading head posture detection device - Google Patents

A balance loading head posture detection device Download PDF

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CN107063082B
CN107063082B CN201610910346.4A CN201610910346A CN107063082B CN 107063082 B CN107063082 B CN 107063082B CN 201610910346 A CN201610910346 A CN 201610910346A CN 107063082 B CN107063082 B CN 107063082B
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loading head
balance
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江孝国
李洪
杨兴林
王远
杨国君
龙全红
张小丁
李一丁
蒋薇
李伟峰
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/70Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/74Image or video pattern matching; Proximity measures in feature spaces
    • G06V10/75Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
    • G06V10/751Comparing pixel values or logical combinations thereof, or feature values having positional relevance, e.g. template matching
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
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Abstract

本发明公开了一种天平加载头位姿检测装置,所述装置包括:指示光源、位置探测结构,所述指示光源安装在待检测天平加载头上表面,所述位置探测结构包括:指示光斑照射靶面、光学成像系统、位置探测器,所述指示光斑照射靶面开设有中心孔,所述位置探测器的端面设有开口,所述开口中心线与所述中心孔中心线重合,所述位置探测器固定在所述指示光斑照射靶面的背面,所述光学成像系统位于所述指示光斑照射靶面的正面前方,实现了利用本申请中的装置加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测可以同时进行,并满足了加载头位置姿态检测的大范围、高精度测量要求。

The invention discloses a device for detecting the position and posture of a loading head of a balance. The device includes: an indicating light source and a position detecting structure, the indicating light source is installed on the upper surface of the loading head of a balance to be detected, and the position detecting structure includes: indicating light spot irradiation A target surface, an optical imaging system, and a position detector, the target surface irradiated by the indicated light spot is provided with a central hole, the end surface of the position detector is provided with an opening, the centerline of the opening coincides with the centerline of the central hole, and the The position detector is fixed on the back of the target surface irradiated by the indicated light spot, and the optical imaging system is located in front of the front of the target surface irradiated by the indicated light spot, which realizes the monitoring and monitoring of the large-scale change of the position and posture of the loading head using the device in this application. The high-precision detection near the reset position and attitude can be carried out at the same time, and it meets the large-scale and high-precision measurement requirements of the position and attitude detection of the loading head.

Description

一种天平加载头位姿检测装置A balance loading head posture detection device

技术领域technical field

本发明涉及风洞试验所用天平校正系统领域,具体地,涉及一种天平加载头位姿检测装置。The invention relates to the field of balance correction systems used in wind tunnel tests, in particular to a position and posture detection device for a load head of a balance.

背景技术Background technique

力学天平是风洞实验中用来测量物体在风洞中受力情况及形变的一种重要测量仪器,在实验前一般需要对其进行校正以获得其输出信号与受力情况及形变间的关系,从而研究物体在风洞中的空气动力学特性。对天平进行校正有多种结构及系统形式,其中一种是复位校正系统。这种校正系统的特点是先将加载头置于一种平衡状态(或初始状态),再在天平的受力装置上施加各种力来模仿物体可能的受力情况,并要求此时将天平的位置姿态以高精度的要求恢复到初始的平衡状态,则最终施加在天平上的各种力代表了受力的状态,并以此校正天平各种输出信号。在这个过程中,还要求不对加载头的复位工作产生额外影响,最好采用非接触方式。在这个过程中,由于力的施加及复位过程是一个复杂的变化过程,而复位过程是一个动态的姿态测量、反馈控制过程,存在调节能力不足、控制失误等可能,这将导致天平的姿态发生变化甚至非常大的变化,并超出常规的测量范围,因此天平加载头的位置姿态如何在较大的范围内进行检测及达到较高的检测精度要求等成为一个重要的问题。The mechanical balance is an important measuring instrument used in wind tunnel experiments to measure the force and deformation of objects in the wind tunnel. Before the experiment, it generally needs to be calibrated to obtain the relationship between the output signal and the force and deformation. , so as to study the aerodynamic properties of the object in the wind tunnel. There are various structures and system forms for calibrating the balance, one of which is a reset calibrating system. The characteristic of this correction system is to put the loading head in a balanced state (or initial state), and then apply various forces on the force-bearing device of the balance to imitate the possible force of the object, and require the balance to be adjusted at this time. The position and posture of the balance are restored to the initial balance state with high precision requirements, and the various forces finally applied to the balance represent the state of the force, and the various output signals of the balance are corrected accordingly. In this process, it is also required not to have additional influence on the reset work of the loading head, and it is best to use a non-contact method. In this process, since the application of force and the reset process are a complex change process, and the reset process is a dynamic attitude measurement and feedback control process, there may be insufficient adjustment ability and control errors, which will lead to the balance’s attitude. The change is even very large, and it exceeds the conventional measurement range. Therefore, how to detect the position and posture of the balance loading head in a large range and achieve high detection accuracy requirements has become an important issue.

综上所述,本申请发明人在实现本申请发明技术方案的过程中,发现上述技术至少存在如下技术问题:To sum up, in the process of realizing the technical solution of the invention of the present application, the inventor of the present application found that the above-mentioned technology has at least the following technical problems:

在现有技术中,现有的平加载头位姿检测装置,存在无法同时进行加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测的技术问题。In the prior art, the existing horizontal loading head position and posture detection device has the technical problem of being unable to monitor the large-scale change of the loading head position and posture and the high-precision detection near the reset position and posture at the same time.

发明内容Contents of the invention

本发明提供了一种天平加载头位姿检测装置,解决了现有的天平加载头位姿检测装置所存在无法同时进行加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测的技术问题,实现了利用本申请中的天平装置加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测可以同时进行,并满足了加载头位置姿态检测的大范围、高精度测量要求。The invention provides a balance loading head position and posture detection device, which solves the problem that the existing balance loading head position and posture detection device cannot simultaneously monitor the large-scale change of the position and posture of the loading head and high-precision detection near the reset position and posture The technical problem is to realize the large-scale change monitoring of the position and posture of the loading head of the balance device in this application and the high-precision detection near the reset position and posture can be carried out simultaneously, and to meet the large-scale and high-precision measurement requirements of the position and posture detection of the loading head .

为解决上述技术问题,本申请提供了一种天平加载头位姿检测装置,所述装置包括:In order to solve the above technical problems, the application provides a balance loading head position and posture detection device, the device includes:

指示光源、位置探测结构,所述指示光源安装在待检测天平加载头上表面, 所述位置探测结构包括:指示光斑照射靶面、光学成像系统、位置探测器,所述指示光斑照射靶面开设有中心孔,所述位置探测器的端面设有开口,所述开口中心线与所述中心孔中心线重合,所述位置探测器固定在所述指示光斑照射靶面的背面,所述光学成像系统位于所述指示光斑照射靶面的正面前方。An indication light source and a position detection structure, the indication light source is installed on the upper surface of the loading head of the balance to be detected, the position detection structure includes: the indication light spot irradiates the target surface, an optical imaging system, and a position detector, and the indication light spot irradiates the target surface There is a central hole, the end face of the position detector is provided with an opening, the center line of the opening coincides with the center line of the central hole, the position detector is fixed on the back of the target surface irradiated by the indicating light spot, and the optical imaging The system is located in front of the target surface irradiated by the indicated light spot.

其中,当安装在待检测天平加载头上的指示光源发出光后照射在指示光斑照射靶面上,当照射在指示光斑照射靶面的非中心孔区域时,光学成像系统利用光线在靶面上的反射光进行成像,通过对光斑图像的处理完成加载头位置姿态的大范围变化测量及监测;当光线穿过中心孔时,则会直接在位置探测器上进行成像,由于探测器的高分辨力,从而利用位置探测器可以实现对复位位置姿态进行高精密检测的要求。Among them, when the indicator light source installed on the loading head of the balance to be tested emits light and then irradiates the indicator spot on the target surface, when it irradiates the non-center hole area of the indicator spot on the target surface, the optical imaging system uses the light to illuminate the target surface. The reflected light is used for imaging, and the large-scale change measurement and monitoring of the position and posture of the loading head is completed by processing the spot image; when the light passes through the central hole, it will be directly imaged on the position detector, due to the high resolution of the detector Force, so that the position detector can be used to meet the requirements of high-precision detection of the reset position and attitude.

本申请中的天平加载头的测控提出了这样一种测量与控制要求:当天平加载头位置姿态远离平衡位置时,对位置姿态的测量精度要求可以大幅度地降低,但希望控制机构可以快速将其复位到平衡位置附近;当天平加载头位置姿态处于平衡位置附近时,则要求对位置姿态的测量精度达到较高的水平,并希望控制机构逐步地以较高的精度将天平加载头的位置姿态复位到平衡状态。为了满足天平加载头姿态检测的大范围、高精度复位这种要求,提出了一种解决措施:当天平加载头姿态偏离平衡状态很大时,采用一种粗调系统,包括大范围的位移测量(可以高达±30cm或更大一些的测量范围)及复位控制技术;当天平加载头姿态偏离平衡位置较小时,启用精密的检测及调控系统,包括小范围的精密位移测量系统及高精度的反馈控制系统。这是基于测量范围大,则测量精度要求低、复位调节原理可以简单化及控制过程可以快速化的思路,这种方式完全可以满足加载头姿态粗调时低精度、快速度的要求;当粗调状态进入到精细复位的状态时,启用精密检测及复位方式,然后以很高的测量精度及复位精度可以逐步慢慢地逼近加载头平衡状态,最终完成加载头的复位。这样一种把两种范围内的不同测量方式融合在一起的形式解决了大范围、高精度的综合测量要求。The measurement and control of the balance loading head in this application proposes such a measurement and control requirement: when the position and attitude of the balance loading head are far away from the equilibrium position, the requirements for the measurement accuracy of the position and attitude can be greatly reduced, but it is hoped that the control mechanism can quickly change the It resets to the vicinity of the balance position; when the position and posture of the balance loading head is near the balance position, the measurement accuracy of the position and posture is required to reach a higher level, and it is hoped that the control mechanism will gradually adjust the position of the balance loading head with high precision. The posture is reset to a balanced state. In order to meet the requirements of large-scale and high-precision reset of the attitude detection of the balance loading head, a solution is proposed: when the attitude of the balance loading head deviates greatly from the equilibrium state, a coarse adjustment system is used, including a large-scale displacement measurement (It can be as high as ±30cm or a larger measurement range) and reset control technology; when the attitude of the balance loading head deviates from the balance position, a sophisticated detection and control system is enabled, including a small-scale precision displacement measurement system and high-precision feedback Control System. This is based on the idea that the measurement range is large, the measurement accuracy is low, the reset adjustment principle can be simplified, and the control process can be accelerated. When the state of adjustment enters the state of fine reset, the precise detection and reset mode is enabled, and then the loading head can be gradually approached to the balance state of the loading head with high measurement accuracy and reset accuracy, and the reset of the loading head is finally completed. Such a form of combining different measurement methods in two ranges solves the comprehensive measurement requirements of large range and high precision.

由于现有位置探测器的限制,如果选用探测器直接进行位置探测的技术路线,如利用面阵CCD或其它二维位置测量器件,则只能在约20mm*20mm的面积内实现高精度的位置测量,无法兼顾上述大范围测量的要求。但如果通过本申请中的将大范围内的位置信息转换到一个较小的比较合理的范围内来进行测量,虽然测量精度可能降低,但可以满足大范围内可以进行测量的要求。Due to the limitations of existing position detectors, if the technical route of direct position detection by the detector is used, such as using an area array CCD or other two-dimensional position measuring devices, it can only achieve high-precision position within an area of about 20mm*20mm Measurement, unable to take into account the requirements of the above-mentioned large-scale measurement. However, if the location information in a large range is converted into a smaller and more reasonable range for measurement in this application, although the measurement accuracy may be reduced, it can meet the requirement for measurement in a wide range.

本申请利用一种基于成像光学系统的大范围位置检测系统及图像信息处理的方法构建了一种满足天平加载头姿态的检测装置,可以满足在较大范围内进行位置测量但精度要求较低的要求。利用CCD相机及成像光学系统获取照射在靶面上的指示光源的图像,由于成像比例的关系,这种方式很容易地做到将大范围内的信息成像在一个较小的CCD芯片上,从而获得大范围内的相关信息;鉴于大范围的测量精度要求低的特点,可以简单地对光源光斑的图像特征进行图像数据处理(如最大值法)以获得指示光源的位置信息,从而获取加载头姿态初步测量的结果。本申请利用一种基于位置探测器直接进行探测的小范围位置检测及图像数据处理方法构建了一种满足天平加载头姿态的检测装置,满足在较小范围内进行位置的高精度测量要求。当天平加载头的位置姿态进入精细测量及调节范围时,此时,指示光源直接照射在用于精细测量的CCD芯片上,采用精密的光斑处理技术可以获取光斑在CCD上的精确位置,从而获得加载头在精细复位时的姿态数据用于反馈控制。通过指示光源照射靶面的结构设计及探测器、光学成像系统布局的设计,使得在靶面上形成的指示光源可以被两种状态下的测量方式共用,并经不同的处理方式获得位置测量信息,提高了位置探测系统的紧凑性。This application uses a large-scale position detection system based on imaging optical system and image information processing method to construct a detection device that meets the attitude of the balance loading head, which can meet the requirements of position measurement in a large range but with low precision requirements. Require. Use the CCD camera and imaging optical system to obtain the image of the indicator light source irradiated on the target surface. Due to the relationship between the imaging ratio, this method can easily image a large range of information on a smaller CCD chip, thereby Obtain relevant information in a wide range; in view of the characteristics of low measurement accuracy in a wide range, image data processing (such as the maximum value method) can be simply performed on the image characteristics of the light source spot to obtain the position information indicating the light source, so as to obtain the loading head Results of preliminary measurements of pose. This application uses a small-scale position detection and image data processing method based on direct detection by a position detector to construct a detection device that meets the attitude of the balance loading head, and meets the requirements for high-precision measurement of position in a small range. When the position and attitude of the loading head of the balance enters the range of fine measurement and adjustment, at this time, the indicating light source is directly irradiated on the CCD chip used for fine measurement, and the precise position of the light spot on the CCD can be obtained by using the precise spot processing technology, so as to obtain The attitude data of the loading head during fine reset is used for feedback control. Through the structural design of the indicator light source illuminating the target surface and the layout design of the detector and optical imaging system, the indicator light source formed on the target surface can be shared by the measurement methods in the two states, and the position measurement information can be obtained through different processing methods , improving the compactness of the position detection system.

其中,所述光学成像系统包括:CCD相机和镜头;所述位置探测结构固定在安装支架上;所述装置具体包括4个位置探测结构,所述4个位置探测结构均匀分布在待检测天平加载头四周并在水平面内以相互垂直的方式安装,呈现一种坐标系的形式,以便测量结果便于用于位置逆解而获得天平的空间姿态。Wherein, the optical imaging system includes: a CCD camera and a lens; the position detection structure is fixed on the mounting bracket; The first four sides are installed perpendicular to each other in the horizontal plane, presenting a form of coordinate system, so that the measurement results can be easily used for position inverse solution to obtain the spatial attitude of the balance.

其中,所述装置还包括连接支架,所述连接支架一端与所述光学成像系统连接,所述连接支架另一端与所述位置探测器连接;所述位置探测器具体包括:外壳、光电探测器、光电探测器安装板、信号处理器,所述光电探测器、所述光电探测器安装板、所述信号处理器均安装在外壳内,所述光电探测器芯片安装在光电探测器安装板上,所述光电探测器与所述信号处理器连接,所述光电探测器中心线与所述开口中心线重合;所述光电探测器的测量面积大于中心孔的面积;所述光电探测器包括:面阵CCD、二维PSD;所述光电探测器安装板通过紧固螺钉固定在外壳上。Wherein, the device further includes a connecting bracket, one end of the connecting bracket is connected to the optical imaging system, and the other end of the connecting bracket is connected to the position detector; the position detector specifically includes: a housing, a photodetector , photodetector installation board, signal processor, described photodetector, described photodetector installation board, described signal processor are all installed in the housing, described photodetector chip is installed on photodetector installation board , the photodetector is connected to the signal processor, the centerline of the photodetector coincides with the centerline of the opening; the measurement area of the photodetector is greater than the area of the central hole; the photodetector includes: Area array CCD, two-dimensional PSD; the photodetector mounting plate is fixed on the casing by fastening screws.

本专利解决其技术问题所采用的技术方案是:根据天平加载头粗调时要求的测量范围,设计一个具有最大可用面积的供指示光源照射的靶面(外框为圆形或方形均可),照射面一侧的靶表面采用具有漫反射功能的表面结构,并最好具有白色特性。将该靶面置于或粘接在位置探测器表面,在中心位置处开孔并以仅覆盖CCD芯片边沿很小一部分的状态留出位置探测器需用的窗口,形成最终的指示光源的照射靶面。位置探测器主要由面阵CCD芯片构成,最好采用面积尽量大、像素尺寸尽量小的CCD芯片,但以满足位置姿态精密测量范围要求即可,不必过多地要求大面积;为了满足高精密的测量要求,最好将CCD芯片以表面焊接的方式安装在一个可以稳固在一定支架的面板上,并尽量远离发热源(如电路板上的电源模块等),减少热胀冷缩的影响;当指示光斑照射在该CCD芯片上时,即刻可以获得其光斑图像,通过对光斑进行一定的图像数据处理(如光斑质心处理),可以获得光斑在CCD芯片表面上的精确位置,一般达到像素级别是不存在问题,即可以达到数微米的测量精度,因此这种测量方式足以满足加载头位置姿态的高精度测量。但限于CCD芯片面积及像素尺寸的限制,这种方式可以测量的范围相对较小,一般在15mm以内;这种方式用于加载头位置姿态的小范围、高精度测量。在需要大范围测量时,则采用CCD相机成像系统来实现。通过选择焦距合适的成像镜头,与CCD相机一起可以组成一种照相系统,能够完成对相应成像面积(指示光源的照射靶面)的成像,获取成像区域内的相关信息。用其对指示光源照射的靶面进行成像,则可以获得包含了天平加载头位置姿态信息的指示光源的图像,由于测量精度要求大幅降低,可以对指示光源在靶上的位置信息进行简单化的处理(如采用最大值法),则可以快速地获得天平加载头位置姿态的信息。根据天平加载头姿态可能变化的范围,选择镜头焦距,可以满足变化范围内的测量。这种测量方式用于天平加载头位置姿态的粗略测量,具有测量范围大且方便调节的特点,本身由于测量精度要求不高,处理可以简单化、快速,满足此时测量与调节的要求。The technical solution adopted by this patent to solve its technical problems is: according to the measurement range required for the rough adjustment of the balance loading head, design a target surface with the largest usable area for the irradiation of the indicator light source (the outer frame can be circular or square) , the target surface on the side of the irradiated side adopts a surface structure with a diffuse reflection function, and preferably has white characteristics. Place or bond the target surface on the surface of the position detector, open a hole at the center and leave the window required for the position detector in a state that only covers a small part of the edge of the CCD chip, forming the final indication light source irradiation target surface. The position detector is mainly composed of an area array CCD chip. It is best to use a CCD chip with as large an area as possible and as small a pixel size as possible. According to the measurement requirements, it is best to mount the CCD chip on a panel that can be firmly fixed on a certain bracket by surface welding, and try to keep it away from the heat source (such as the power module on the circuit board, etc.), so as to reduce the influence of thermal expansion and contraction; When the indicated light spot is irradiated on the CCD chip, its spot image can be obtained immediately, and the precise position of the light spot on the surface of the CCD chip can be obtained by performing certain image data processing on the light spot (such as spot centroid processing), generally reaching the pixel level There is no problem, that is, the measurement accuracy of several microns can be achieved, so this measurement method is sufficient for high-precision measurement of the position and attitude of the loading head. However, limited by the CCD chip area and pixel size, the range that can be measured by this method is relatively small, generally within 15mm; this method is used for small-scale and high-precision measurement of the position and attitude of the loading head. When a large-scale measurement is required, a CCD camera imaging system is used to realize it. By selecting an imaging lens with a suitable focal length, a camera system can be formed together with a CCD camera, which can complete the imaging of the corresponding imaging area (indicating the irradiation target surface of the light source) and obtain relevant information in the imaging area. Using it to image the target surface irradiated by the indicating light source, the image of the indicating light source including the position and attitude information of the balance loading head can be obtained. Since the measurement accuracy requirements are greatly reduced, the position information of the indicating light source on the target can be simplified. Processing (such as using the maximum value method), you can quickly obtain the information on the position and attitude of the load head of the balance. According to the possible variation range of the attitude of the balance loading head, the lens focal length can be selected to meet the measurement within the variation range. This measurement method is used for rough measurement of the position and attitude of the loading head of the balance. It has the characteristics of large measurement range and convenient adjustment. Since the measurement accuracy itself is not high, the processing can be simplified and fast, which meets the requirements of measurement and adjustment at this time.

本申请提供的一个或多个技术方案,至少具有如下技术效果或优点:One or more technical solutions provided by this application have at least the following technical effects or advantages:

本发明的有益效果是,利用CCD相机与合适焦距的成像镜头组合成一种可以对较大面积的区域进行成像的测量系统,通过对成像区域内特定指示光源的图像处理,可以获得相应的位置姿态信息,从而获得一种大范围内的测量效果,简化了大范围位置测量系统的复杂性。通过基于CCD芯片型的位置探测器的使用,直接对指示光斑的空间位置进行测量可以获得指示光斑的空间位置姿态信息,满足了小范围、高精度的位置姿态测量要求。在兼顾大范围测量时指示光斑照射的特征,进行指示光斑照射靶面的设计,可以有效地将两种测量要求的指示光线照射靶面结构融合在一起,并满足两种位置测量系统对大范围、较低精度及小范围、高精度测量的共同要求,最终很好地将两种测量系统融合在一起形成了一种天平加载头位置姿态的检测系统,满足了天平加载头位置姿态的大范围、高精度的检测要求,解决了以往大范围、高精度不能同时进行的检测问题。The beneficial effect of the present invention is that a measurement system capable of imaging a larger area is formed by using a CCD camera and an imaging lens with a suitable focal length, and the corresponding position and posture can be obtained by processing the image of a specific indicating light source in the imaging area information, so as to obtain a large-scale measurement effect, which simplifies the complexity of the large-scale position measurement system. Through the use of the CCD chip-based position detector, the spatial position and attitude information of the indicated light spot can be obtained by directly measuring the spatial position of the indicated light spot, which meets the small-scale, high-precision position and attitude measurement requirements. Taking into account the characteristics of the indicator light spot irradiation during large-scale measurement, the design of the indicator light spot irradiation target surface can effectively integrate the structure of the indicator light irradiation target surface of the two measurement requirements, and meet the requirements of the two position measurement systems for large-scale , low precision and small-scale, high-precision measurement common requirements, and finally the two measurement systems are well integrated to form a balance loading head position and attitude detection system, which meets the large range of balance loading head position and attitude , high-precision detection requirements, to solve the previous large-scale, high-precision detection problems that cannot be carried out at the same time.

附图说明Description of drawings

此处所说明的附图用来提供对本发明实施例的进一步理解,构成本申请的一部分,并不构成对本发明实施例的限定;The drawings described here are used to provide a further understanding of the embodiments of the present invention, constitute a part of the application, and do not constitute a limitation to the embodiments of the present invention;

图1是天平加载头位姿检测装置结构示意图;Fig. 1 is a schematic structural diagram of a balance loading head posture detection device;

图2是一路姿态测量装置构成的示意图;Fig. 2 is a schematic diagram of the formation of an attitude measuring device;

图3是位置大范围测量及精密测量功能融合在一起的探测器组成示意图;Figure 3 is a schematic diagram of the composition of the detector that combines the functions of large-scale position measurement and precision measurement;

图4是靶面与基于面阵CCD芯片的位置探测器融合在一起的结构示意图;Fig. 4 is a structural schematic diagram of the fusion of the target surface and the position detector based on the area array CCD chip;

图5是基于面阵CCD芯片的位置探测器布局示意图;Fig. 5 is a schematic layout diagram of a position detector based on an area array CCD chip;

图6a-图6c是指示光斑在位置探测器表面的几种位置情况示意图;Figures 6a-6c are schematic diagrams showing several positions of the light spot on the surface of the position detector;

图7是一种位置姿态测量策略流程示意图;Fig. 7 is a schematic flow chart of a position and attitude measurement strategy;

其中,1-位置姿态待测的加载头及天平,2-指示光源,3-位置探测结构,4-位置探测结构安装支架,5-指示光斑照射靶面,6-中心孔,7-CCD相机,8-镜头,9-指示光线束,10-基于面阵CCD芯片的位置探测器,11-开口,12-连接支架,13-CCD芯片,14-紧固螺钉,15-安装板,16-线路板,17-电子元件,18-预设中心点坐标。Among them, 1-loading head and balance to be tested for position attitude, 2-indicating light source, 3-position detection structure, 4-position detection structure mounting bracket, 5-indicating light spot irradiating the target surface, 6-center hole, 7-CCD camera , 8-lens, 9-indicating light beam, 10-position detector based on area array CCD chip, 11-opening, 12-connecting bracket, 13-CCD chip, 14-fastening screw, 15-mounting plate, 16- Circuit board, 17-electronic components, 18-preset center point coordinates.

具体实施方式Detailed ways

本发明提供了一种天平加载头位姿检测装置,解决了现有的天平加载头位姿检测装置所存在无法同时进行加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测的技术问题,实现了利用本申请中的天平装置加载头位置姿态的大范围变化监测与复位位置姿态附近的高精密检测可以同时进行,并满足了加载头位置姿态检测的大范围、高精度测量要求。The invention provides a balance loading head position and posture detection device, which solves the problem that the existing balance loading head position and posture detection device cannot simultaneously monitor the large-scale change of the position and posture of the loading head and high-precision detection near the reset position and posture The technical problem is to realize the large-scale change monitoring of the position and posture of the loading head of the balance device in this application and the high-precision detection near the reset position and posture can be carried out simultaneously, and to meet the large-scale and high-precision measurement requirements of the position and posture detection of the loading head .

为了能够更清楚地理解本发明的上述目的、特征和优点,下面结合附图和具体实施方式对本发明进行进一步的详细描述。需要说明的是,在相互不冲突的情况下,本申请的实施例及实施例中的特征可以相互组合。In order to understand the above-mentioned purpose, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, under the condition of not conflicting with each other, the embodiments of the present application and the features in the embodiments can be combined with each other.

在下面的描述中阐述了很多具体细节以便于充分理解本发明,但是,本发明还可以采用其他不同于在此描述范围内的其他方式来实施,因此,本发明的保护范围并不受下面公开的具体实施例的限制。In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from the scope of this description. Therefore, the protection scope of the present invention is not limited by the following disclosure. limitations of specific examples.

在图1中,1是位置姿态待测的加载头及天平,2指示光源,3是位置探测结构,4是位置探测结构安装支架。In Fig. 1, 1 is the loading head and the balance whose position and attitude are to be measured, 2 indicates the light source, 3 is the position detection structure, and 4 is the installation bracket of the position detection structure.

在图3中,5是指示光斑照射靶面,其外形不限于圆形、方形等,受指示光斑照射一面的表面采用漫反射面结构,便于光斑的采集及图像数据处理,靶面中心位置开中心孔6。7、8是CCD相机及镜头,构成光学成像系统。10是基于面阵CCD芯片的位置探测器,其外形不限于圆形、方形等,对应中心位置开口11。12是将光学成像系统固定在位置探测器上的连接支架,其形式不限于固定在位置探测器上,可以固定于其它支撑支架上。In Fig. 3, 5 indicates the target surface irradiated by the indicated light spot, and its shape is not limited to a circle, square, etc. The surface irradiated by the indicated light spot adopts a diffuse reflection surface structure, which is convenient for the collection of the light spot and image data processing, and the center position of the target surface is open. The central holes 6, 7, and 8 are CCD cameras and lenses, forming an optical imaging system. 10 is a position detector based on an area array CCD chip, and its shape is not limited to a circle, a square, etc., corresponding to the central position opening 11. 12 is a connecting bracket for fixing the optical imaging system on the position detector, and its form is not limited to On the position detector, it can be fixed on other supporting brackets.

在图4中,5是指示光斑照射靶面。10是基于面阵CCD芯片的位置探测器。5与10之间通过粘接或螺钉铆接固定均可,但需要将指示光斑照射靶面5上的中心孔6与位置探测器上通光开口11对齐以确保指示光线能够正常照射在位置探测器内部的光电探测器CCD芯片13上,而CCD芯片13需要对齐开口11,CCD芯片13的有效测量面积应稍大于中心孔6以确保在测量面内当指示光斑照射位置从大范围过渡到小范围测量时总能获得指示光斑的有效图像。15是CCD芯片的安装板,也可以作为CCD芯片的驱动及信号处理电路板共同使用,但尽量在其上少安装电子元件尤其是发热较重的电源模块等,安装板15通过紧固螺钉14等固定在10的外壳上(如端面板上),这个步骤对安装要求较高,需要谨慎处理。16是信号处理的线路板,17是线路板16上的电子元件。In Fig. 4, 5 indicates that the light spot illuminates the target surface. 10 is a position detector based on an area array CCD chip. 5 and 10 can be fixed by bonding or screw riveting, but it is necessary to align the center hole 6 on the target surface 5 illuminated by the indicating light spot with the light opening 11 on the position detector to ensure that the indicating light can be normally irradiated on the position detector The internal photodetector CCD chip 13, and the CCD chip 13 needs to be aligned with the opening 11. The effective measurement area of the CCD chip 13 should be slightly larger than the central hole 6 to ensure that the position of the light spot in the measurement surface transitions from a large range to a small range. A valid image of the indicated flare is always obtained when measuring. 15 is the installation board of CCD chip, also can be used as the drive of CCD chip and signal processing circuit board jointly, but install electronic component as far as possible on it, especially the heavier power supply module etc. of heating, installation board 15 is passed fastening screw 14 etc. to be fixed on the shell of 10 (such as the end panel), this step has high requirements for installation and needs to be handled carefully. 16 is a circuit board for signal processing, and 17 is an electronic component on the circuit board 16 .

在图5中,这是基于面阵CCD芯片的位置探测器结构示意,主要需要保证CCD芯片13的有效探测面对齐其端面开口11,并要求开口11的面积稍小于CCD芯片13的有效探测面积。在探测器中的光电探测器包括但不限于面阵CCD,二维PSD也是很好的一种探测器件,由于多数二维PSD器件的有效探测面是圆形,因此,其上的开口不限于方形,也包括圆形;但采用二维PSD探测器后,其指示光斑的位置信息相关的处理方式将发生变化,主要将依赖于电子线路对PSD输出的电流信号进行直接处理,但处理速度较快并直接获得处理结果。In Fig. 5, this is a schematic diagram of the position detector based on the area array CCD chip. It is mainly necessary to ensure that the effective detection surface of the CCD chip 13 is aligned with the end face opening 11, and the area of the opening 11 is required to be slightly smaller than the effective detection of the CCD chip 13. area. The photodetectors in the detector include but are not limited to area array CCD. Two-dimensional PSD is also a good detection device. Since the effective detection surface of most two-dimensional PSD devices is circular, the openings on it are not It is limited to a square shape, but also includes a circle; but after using a two-dimensional PSD detector, the processing method related to the position information of the indicated light spot will change, mainly relying on the electronic circuit to directly process the current signal output by the PSD, but the processing speed Faster and immediate access to processing results.

天平加载头姿态检测系统全貌的结构及组成示意:姿态检测系统主要由图1中的指示光源2、融合了大范围及精密位置测量功能的位置探测结构3构成,其中位置探测结构3又由三大部分组成:由CCD相机7及镜头8组成的用于大范围位置测量的光学成像测量系统、基于CCD芯片的位置探测器10、融合了可供大范围及精密位置测量的指示光斑照射靶面5组成,如图2及图3组成所示。位置探测结构3共有四路,安装在位置探测结构安装支架4上,分布于相互垂直的四个方向上,如图1所示。The overall structure and composition of the balance loading head attitude detection system: the attitude detection system is mainly composed of the indicator light source 2 in Figure 1, and the position detection structure 3 that integrates large-scale and precise position measurement functions. Most of the components: an optical imaging measurement system composed of a CCD camera 7 and a lens 8 for large-scale position measurement, a position detector 10 based on a CCD chip, and an indicator light spot that can be used for large-scale and precise position measurement to illuminate the target surface 5 components, as shown in Figure 2 and Figure 3. The position detection structure 3 has four paths in total, which are installed on the position detection structure mounting bracket 4 and distributed in four directions perpendicular to each other, as shown in FIG. 1 .

天平加载头姿态的指示:在天平加载头上安装指示光源2,保证指示光源2与加载头1之间是固定不动的。指示光源2在同一个平面内(水平面)在四个方向上(最好是严格相互垂直的,便于位置逆解算)产生指示光线束9,指示光线束9的直径尽量小,如图1所示。由于这些指示光线束间的相互位置关系确定,可以作为标准的参考方向,又由于指示光源与加载头间是固定的,加载头的位置姿态变化与指示光源的位置姿态变化是一致的,因此,指示光线束的指向代表了加载头的姿态,对这些指示光线束的位置进行测量及进行姿态的求解就相当于对加载头的姿态进行测量。在复位型的加载头天平校正系统中,无需进一步进行姿态求解,只需要对指示光线束位置进行精密测量,并确保校正系统根据测量结果可以进行姿态的精密复位即可。基于高精度测量要求,这些光线束的指向需要具有较高的稳定度。Indication of the posture of the loading head of the balance: install the indicating light source 2 on the loading head of the balance, and ensure that the position between the indicating light source 2 and the loading head 1 is fixed. Indicating light source 2 produces indicating light beam 9 in four directions (preferably strictly perpendicular to each other, which is convenient for position inverse calculation) in the same plane (horizontal plane), and the diameter of indicating light beam 9 is as small as possible, as shown in Figure 1 Show. Since the mutual positional relationship between these indicating light beams is determined, it can be used as a standard reference direction, and because the indicating light source and the loading head are fixed, the position and attitude changes of the loading head are consistent with the position and attitude changes of the indicating light source. Therefore, The direction of the indicating light beams represents the attitude of the loading head, and measuring the position of these indicating light beams and solving the attitude is equivalent to measuring the attitude of the loading head. In the reset-type loading head balance calibration system, there is no need to further solve the attitude, it is only necessary to precisely measure the position of the indicating light beam, and ensure that the calibration system can perform a precise reset of the attitude according to the measurement results. Based on high-precision measurement requirements, the pointing of these light beams needs to have a high degree of stability.

指示光线束位置的大范围测量:这个功能由CCD相机7及镜头8构成的光学成像系统完成,指示光斑照射靶面5的形状及面积根据加载头姿态可能的变化范围确定,通过选用焦距合适的镜头可以将整个指示光斑照射靶面5的情况成像在CCD相机上,从而获得包含了位置测量信息的整个指示光斑照射靶面5的图像。光学成像系统进行固定时,需要避免遮挡住照射的指示光线束9。指示光线束9照射在靶5的表面上,形成一个亮斑的图像,这个亮斑的位置就是用于大范围位置测量的主要信息。将光学成像系统对准靶面5进行成像,获取包含测量位置信息的亮斑图像,通过使用包含但不限于图像最大值化、质心算法等方法的图像处理并提取出亮斑的质心位置坐标,该亮斑质心位置坐标即是指示光束9在指示光斑照射靶面5上的位置信息,如图6a的附图所示。将亮斑质心位置坐标与指示光斑照射靶面5的预设中心点坐标18进行比较,即可获得指示光束偏离中心轴线的偏离值,将其提供给控制系统进行相应反馈控制即可。为了降低亮斑背景图像的影响及提高亮斑探测的精准程度,可以在镜头上加装一定带宽的滤波片,滤除除指示光线波长外的其它光线,突出亮斑的图像质量。这种方式可以满足±30cm及以上范围的位置检测,精度容易地达到0.1mm-0.2mm,足以满足大范围、一定精度的位置检测要求。Large-scale measurement of the position of the indicating light beam: This function is completed by the optical imaging system composed of the CCD camera 7 and the lens 8. The shape and area of the target surface 5 illuminated by the indicating light spot are determined according to the possible variation range of the loading head posture. The lens can image the situation of the entire indicating light spot irradiating the target surface 5 on the CCD camera, so as to obtain an image of the entire indicating light spot irradiating the target surface 5 including position measurement information. When the optical imaging system is fixed, it is necessary to avoid blocking the irradiated indicating light beam 9 . The indicating light beam 9 is irradiated on the surface of the target 5 to form an image of a bright spot, and the position of the bright spot is the main information for large-scale position measurement. Align the optical imaging system with the target surface 5 for imaging, acquire a bright spot image containing measurement position information, and extract the centroid position coordinates of the bright spot by using image processing including but not limited to methods such as image maximization and centroid algorithm, The centroid position coordinates of the bright spot are the position information of the indicating light beam 9 on the target surface 5 irradiated by the indicating light spot, as shown in the accompanying drawing of FIG. 6 a . Comparing the position coordinates of the center of mass of the bright spot with the coordinates 18 of the preset center point irradiating the target surface 5 of the indicated light spot, the deviation value of the indicated light beam from the central axis can be obtained, which can be provided to the control system for corresponding feedback control. In order to reduce the influence of the bright spot background image and improve the accuracy of bright spot detection, a filter with a certain bandwidth can be added to the lens to filter out other light rays except the indicated light wavelength to highlight the image quality of the bright spot. This method can meet the position detection in the range of ±30cm and above, and the accuracy can easily reach 0.1mm-0.2mm, which is enough to meet the position detection requirements of a large range and a certain accuracy.

指示光线束位置的小范围精密测量:这个检测功能主要基于CCD芯片的位置探测器10完成。当指示光束进入到精密检测的设定范围即通光窗口中心孔6时,即指示光线束9可以较好地照射在位置探测器10的有效通光窗口时,如图6b所示。则可以获得一幅包含了光斑直接照射的图像,通过使用包含但不限于图像最大值化、质心算法等方法的图像处理并提取出亮斑的质心位置坐标,该亮斑质心位置坐标即是指示光束9在指示光斑照射靶面5上的位置信息。将亮斑质心位置坐标与指示光斑照射靶面5的预设中心点坐标18进行比较,即可获得指示光束偏离中心轴线的偏离值,将其提供给控制系统进行相应反馈控制即可。在这种测量方式下,由于CCD芯片直接用于获取照射光斑的图像,其分辨率达到CCD像素的水平,光斑图像经过图像处理后的质心位置的测量精度一般在像素或亚像素的水平,也即可以达到数mmm的水平;但有效的探测面积也限制在CCD芯片的面积范围内。一般而言,CCD芯片尺寸小于15mm,因此这种方式可以满足15mm范围内的精密位置检测,测量精度可以达到10mmm以下,满足小范围的精密位置检测要求。为了降低环境散射光的影响,可以在开口11或中心孔6上安装窄带滤光片以消除除指示光源外的光线的影响,获得较为干净的光斑图像用于图像处理,最终获得高精度的质心位置坐标。Small-scale precise measurement of the position of the light beam: this detection function is mainly completed based on the position detector 10 of the CCD chip. When the indicating light beam enters the setting range of precision detection, that is, the center hole 6 of the light-transmitting window, that is, when the indicating light beam 9 can be better irradiated on the effective light-transmitting window of the position detector 10, as shown in FIG. 6b. Then an image containing direct irradiation of the light spot can be obtained, and the centroid position coordinates of the bright spot can be extracted by using image processing including but not limited to methods such as image maximization and centroid algorithm, and the centroid position coordinates of the bright spot are the indication The position information of the light beam 9 on the irradiated target surface 5 indicating the light spot. Comparing the position coordinates of the center of mass of the bright spot with the coordinates 18 of the preset center point irradiating the target surface 5 of the indicated light spot, the deviation value of the indicated light beam from the central axis can be obtained, which can be provided to the control system for corresponding feedback control. In this measurement method, since the CCD chip is directly used to obtain the image of the irradiated spot, its resolution reaches the level of the CCD pixel, and the measurement accuracy of the centroid position of the spot image after image processing is generally at the pixel or sub-pixel level. That is, it can reach the level of several mmm; but the effective detection area is also limited within the area of the CCD chip. Generally speaking, the size of the CCD chip is less than 15mm, so this method can meet the precise position detection within the range of 15mm, and the measurement accuracy can reach below 10mm, which meets the requirements of small-scale precise position detection. In order to reduce the influence of ambient scattered light, a narrow-band filter can be installed on the opening 11 or the central hole 6 to eliminate the influence of light other than the indicator light source, obtain a relatively clean spot image for image processing, and finally obtain a high-precision centroid Position coordinates.

过渡阶段的指示位置测量:当指示光斑落在从大范围测量区域到精密测量区域的过渡边界上时,需要进行一种测量策略的选择。由于在这个区域上无所谓精密测量要求(可以精度较低,也可以较高。),可以以粗测方式对待以简化数据处理。此时,两种测量方式均会获得有一定亮度的光斑图像,也许不够完整,但可以用判断光斑图像中最大值位置的方法来获得其坐标,并以其为指示光束的位置。Indication position measurement in the transition stage: When the indicator spot falls on the transition boundary from the large-scale measurement area to the precise measurement area, a measurement strategy needs to be selected. Since there is no precise measurement requirement in this area (the precision can be lower or higher.), it can be treated as a rough measurement to simplify data processing. At this time, both measurement methods will obtain a spot image with a certain brightness, which may not be complete, but the method of judging the position of the maximum value in the spot image can be used to obtain its coordinates, and use it as the position of the indicator beam.

关于指示位置的一种测量策略如图7所示。A measurement strategy for the indicated position is shown in Figure 7.

通过位置探测器的上述两个测量功能的有机融合可以完成了天平加载头的姿态的大范围粗略测量及精密测量,再根据控制策略对加载头的姿态进行调控,直到满足精密的复位要求。Through the organic fusion of the above two measurement functions of the position detector, the large-scale rough measurement and precise measurement of the attitude of the loading head of the balance can be completed, and then the attitude of the loading head is regulated according to the control strategy until the precise reset requirement is met.

在基于CCD芯片的位置探测器中,鉴于二维PSD器件具有的一定优势,如速度快、实时性好、直接输出代表坐标位置的电压信号等,也可以使用二维PSD器件代替CCD芯片构成位置探测器,只是相应的光斑图像处理方法需要进行改变并以处理电路的形式代替,适应这种数据处理变化即可。In the position detector based on the CCD chip, in view of the certain advantages of the two-dimensional PSD device, such as fast speed, good real-time performance, and direct output of the voltage signal representing the coordinate position, etc., the two-dimensional PSD device can also be used instead of the CCD chip to form the position For the detector, only the corresponding spot image processing method needs to be changed and replaced in the form of a processing circuit to adapt to this data processing change.

上述本申请实施例中的技术方案,至少具有如下的技术效果或优点:The above-mentioned technical solutions in the embodiments of the present application have at least the following technical effects or advantages:

本发明的有益效果是,利用CCD相机与合适焦距的成像镜头组合成一种可以对较大面积的区域进行成像的测量系统,通过对成像区域内特定指示光源的图像处理,可以获得相应的位置姿态信息,从而获得一种大范围内的测量效果,简化了大范围位置测量系统的复杂性。通过基于CCD芯片型的位置探测器的使用,直接对指示光斑的空间位置进行测量可以获得指示光斑的空间位置姿态信息,满足了小范围、高精度的位置姿态测量要求。在兼顾大范围测量时指示光斑照射的特征,进行指示光斑照射靶面的设计,可以有效地将两种测量要求的指示光线照射靶面结构融合在一起,并满足两种位置测量系统对大范围、较低精度及小范围、高精度测量的共同要求,最终很好地将两种测量系统融合在一起形成了一种天平加载头位置姿态的检测系统,满足了天平加载头位置姿态的大范围、高精度的检测要求,解决了以往大范围、高精度不能同时进行的检测问题。The beneficial effect of the present invention is that a measurement system capable of imaging a larger area is formed by using a CCD camera and an imaging lens with a suitable focal length, and the corresponding position and posture can be obtained by processing the image of a specific indicating light source in the imaging area information, so as to obtain a large-scale measurement effect, which simplifies the complexity of the large-scale position measurement system. Through the use of the CCD chip-based position detector, the spatial position and attitude information of the indicated light spot can be obtained by directly measuring the spatial position of the indicated light spot, which meets the small-scale, high-precision position and attitude measurement requirements. Taking into account the characteristics of the indicator light spot irradiation during large-scale measurement, the design of the indicator light spot irradiation target surface can effectively integrate the structure of the indicator light irradiation target surface of the two measurement requirements, and meet the requirements of the two position measurement systems for large-scale , low precision and small-scale, high-precision measurement common requirements, and finally the two measurement systems are well integrated to form a balance loading head position and attitude detection system, which meets the large range of balance loading head position and attitude , high-precision detection requirements, to solve the previous large-scale, high-precision detection problems that cannot be carried out at the same time.

尽管已描述了本发明的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本发明范围的所有变更和修改。While preferred embodiments of the invention have been described, additional changes and modifications to these embodiments can be made by those skilled in the art once the basic inventive concept is appreciated. Therefore, it is intended that the appended claims be construed to cover the preferred embodiment as well as all changes and modifications which fall within the scope of the invention.

显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies thereof, the present invention also intends to include these modifications and variations.

Claims (9)

1. a kind of balance loading head apparatus for detecting position and posture, which is characterized in that described device includes:
Indicate that light source, position sensing structure, the instruction light source are mounted on balance loading head to be detected upper surface, the position Detecting structure includes: instruction hot spot irradiation target surface, optical imaging system, position sensor, and the instruction hot spot irradiation target surface is opened Equipped with centre bore, the end face of the position sensor is equipped with opening, and the opening center line is overlapped with the center centerline hole, The position sensor is fixed on the back side of the instruction hot spot irradiation target surface, and the optical imaging system is located at the instruction light Spot irradiates the front front of target surface.
2. balance loading head apparatus for detecting position and posture according to claim 1, which is characterized in that the optical imaging system packet It includes: CCD camera and camera lens.
3. balance loading head apparatus for detecting position and posture according to claim 1, which is characterized in that the position sensing structure is solid It is scheduled in mounting bracket.
4. balance loading head apparatus for detecting position and posture according to claim 1, which is characterized in that described device specifically includes 4 A position sensing structure, 4 position sensing structures are evenly distributed on balance loading head surrounding to be detected.
5. balance loading head apparatus for detecting position and posture according to claim 1, which is characterized in that described device further includes connection Bracket, described connecting bracket one end are connect with the optical imaging system, the connecting bracket other end and the position sensing Device connection.
6. balance loading head apparatus for detecting position and posture according to claim 1, which is characterized in that the position sensing implement body It include: shell, photodetector, photodetector mounting plate, signal processor, the photodetector, the photodetection Device mounting plate, the signal processor are respectively mounted inside the shell, and the photoelectric detector chip is mounted on photodetector installation On plate, the photodetector is connect with the signal processor, the photodetector center line and the opening center line It is overlapped.
7. balance loading head apparatus for detecting position and posture according to claim 6, which is characterized in that the survey of the photodetector Measure the area that area is greater than centre bore.
8. balance loading head apparatus for detecting position and posture according to claim 6, which is characterized in that the photodetector packet It includes: area array CCD, Two-dimensional PSD.
9. balance loading head apparatus for detecting position and posture according to claim 6, which is characterized in that the photodetector installation Plate is fixed on the shell by fastening screw.
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