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CN106971814A - A kind of structuring inductance ceramic magnetic material - Google Patents

A kind of structuring inductance ceramic magnetic material Download PDF

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Publication number
CN106971814A
CN106971814A CN201710183850.3A CN201710183850A CN106971814A CN 106971814 A CN106971814 A CN 106971814A CN 201710183850 A CN201710183850 A CN 201710183850A CN 106971814 A CN106971814 A CN 106971814A
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CN
China
Prior art keywords
magnetic
magnetic material
parts
ceramic
enhancement layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710183850.3A
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Chinese (zh)
Inventor
黄荣翠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Cuinan Electronic Technology Co Ltd
Original Assignee
Suzhou Cuinan Electronic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Cuinan Electronic Technology Co Ltd filed Critical Suzhou Cuinan Electronic Technology Co Ltd
Priority to CN201710183850.3A priority Critical patent/CN106971814A/en
Publication of CN106971814A publication Critical patent/CN106971814A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/14Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
    • H01F10/142Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel containing Si
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C23C28/3225Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only with at least one zinc-based layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/20Ferrites
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H01F41/183Sputtering targets therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Soft Magnetic Materials (AREA)

Abstract

The invention discloses a kind of structuring inductance ceramic magnetic material, including magnetic substrates, magnetic enhancement layer and ceramic surface, the material of magnetic substrates includes iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the material of the magnetic substrates of 100 parts by weight includes 95.5 98 parts of iron, 0.25 0.5 parts of silicon, 0.5 1.5 parts of boron oxide, 0.2 1 parts of 0.5 1.5 parts of chromium oxide and zinc oxide, the periphery that magnetic enhancement layer is wrapped in magnetic substrates forms magnetic material, and the soft magnetic material of magnetic enhancement layer choosing high magnetic permeability, magnetic enhancement layer is provided with ceramic surface in the another side relative to magnetic substrates.Present invention electro-deposition on magnetic material has ceramic membrane formation ceramic surface, the integral hardness of magnetic material can be effectively improved, reduction influences the situation of magnetic material hardness because of the infiltration of exterior resin, effective reliability, combination property and the element characteristic for ensureing inductance element.

Description

A kind of structuring inductance ceramic magnetic material
Technical field
The present invention relates to electronic element device materials technical field, more particularly to a kind of structuring inductance ceramic magnetic material.
Background technology
Result of scaling trend based on current running gear, battery storage electricity also because the size of device reduce and with Reduction, the charge requirement based on running gear, transformer and its inductance element are generally arranged in various electronic product.Wherein The magnetic body of inductance element generally magnetic material, magnetic material is a kind of widely used functional material, due to exterior tree The infiltration of fat can directly affect the hardness of magnetic material, and then may influence the reliability and element characteristic of inductance element.Many institutes Known, ceramic material hardness is high, and wearability, corrosion resistance and pyro-oxidation resistance are good, and ceramics are deposited on the surface of magnetic material Film, can combine the advantage of ceramic above-mentioned advantage and magnetic material in itself, result in good with good reliability, combination property Inductance element that is good and having excellent electromagnetic properties.
Therefore, in order to solve above-mentioned technological deficiency, the present invention is special to provide a kind of new technical scheme.
The content of the invention
It is an object of the invention to provide a kind of structuring inductance ceramic magnetic material.
The technical scheme that the present invention is proposed for above-mentioned technological deficiency is:
A kind of structuring inductance ceramic magnetic material, including magnetic substrates, magnetic enhancement layer and ceramic surface, the magnetic substrates Material include iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the material of the magnetic substrates of 100 parts by weight includes iron 95.5-98 parts, 0.25-0.5 parts of silicon, 0.5-1.5 parts of boron oxide, 0.5-1.5 parts of chromium oxide and 0.2-1 parts of zinc oxide, the magnetic Property enhanced layer packets be rolled in the peripheries of magnetic substrates and form magnetic material, and the soft magnetism material of magnetic enhancement layer choosing high magnetic permeability Material, the magnetic enhancement layer is provided with ceramic surface in the another side relative to magnetic substrates.
Further, the material of the magnetic substrates of 100 parts by weight includes 96.5 parts of iron, 0.5 part of silicon, boron oxide 1.5 parts, 0.5 part of 1 part of chromium oxide and zinc oxide.
Further, the material of the magnetic substrates of 100 parts by weight includes 98 parts of iron, 0.25 part of silicon, boron oxide 1 Part, 0.25 part of 0.5 part of chromium oxide and zinc oxide.
Further, the soft magnetic material of the magnetic enhancement layer is any in silicon steel sheet, permalloy or ferrite It is a kind of.
Further, the magnetic material has ceramic surface by way of deposition in magnetic enhancement layer surface deposition.
Further, the operation for depositing ceramic surface on the magnetic material surface is as follows:
a:The surface to be deposited such as magnetic material is polished, degreasing, the pretreatment such as cleaning and stress relief annealing;
b:Electroplating processes are carried out on the pretreated surface of magnetic material, nickel or zinc transition zone is formed;
c:The magnetic material for being electroplate with nickel or zinc transition zone is implemented into cosputtering processing, using ceramic target in nickel or zinc transition zone Upper deposition ceramic membrane formation ceramic surface;
d:Produced after the magnetic material that deposition has ceramic surface is placed in into roasting in baking oven, insulation, cooling.
The beneficial effects of the invention are as follows:Present invention electro-deposition on magnetic material has ceramic membrane formation ceramic surface, energy The integral hardness of magnetic material is enough effectively improved, reduction influences the situation of magnetic material hardness because of the infiltration of exterior resin, had Reliability, combination property and the element characteristic of the guarantee inductance element of effect.
Brief description of the drawings
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
Fig. 1 is structural representation of the invention.
Wherein:1st, magnetic substrates, 2, magnetic enhancement layer, 3, ceramic surface.
Embodiment
In order to deepen the understanding of the present invention, below in conjunction with embodiment and accompanying drawing, the invention will be further described, should Embodiment is only used for explaining the present invention, does not constitute the restriction to protection scope of the present invention.
Embodiment 1
A kind of structuring inductance ceramic magnetic material as shown in Figure 1, including magnetic substrates 1, magnetic enhancement layer 2 and ceramic surface 3, the material of magnetic substrates 1 includes iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the material of the magnetic substrates of 100 parts by weight Material includes 0.5 part of 96.5 parts of iron, 0.5 part of silicon, 1.5 parts of boron oxide, 1 part of chromium oxide and zinc oxide, and magnetic enhancement layer 2 is wrapped in The periphery of magnetic substrates 1 forms magnetic material, and magnetic enhancement layer 2 is from the soft magnetic material of high magnetic permeability, specially silicon steel Piece, 2 layers of magnetic enhancement is provided with ceramic surface 3 in the another side relative to magnetic substrates 1, and magnetic material is by way of deposition There is 3 layers of ceramic watch in magnetic enhancement layer surface deposition, concrete operations are as follows:a:The surface to be deposited such as magnetic material is thrown Light, degreasing, cleaning and stress relief annealing etc. are pre-processed;b:Electroplating processes, shape are carried out on the pretreated surface of magnetic material Into nickel or zinc transition zone;c:The magnetic material for being electroplate with nickel or zinc transition zone is implemented into cosputtering processing, existed using ceramic target Ceramic membrane formation ceramic surface 3 is deposited on nickel or zinc transition zone;d:The magnetic material that deposition has ceramic surface 3 is placed in baking oven Produced after interior roasting, insulation, cooling.
Embodiment 2
A kind of structuring inductance ceramic magnetic material as shown in Figure 1, including magnetic substrates 1, magnetic enhancement layer 2 and ceramic surface 3, the material of magnetic substrates 1 includes iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the magnetic substrates 1 of 100 parts by weight Material includes 0.2 part of 97.5 parts of iron, 0.3 part of silicon, 1 part of boron oxide, 1 part of chromium oxide and zinc oxide, and magnetic enhancement layer 2 is wrapped in The periphery of magnetic substrates 1 forms magnetic material, and magnetic enhancement layer 2 is from the soft magnetic material of high magnetic permeability, specially perm Alloy, magnetic enhancement layer 2 is provided with ceramic surface 3, the side that magnetic material passes through deposition in the another side relative to magnetic substrates 1 Formula has ceramic surface 3 in 2 surface of magnetic enhancement layer deposition, and concrete operations are as follows:a:The surface to be deposited such as magnetic material is entered The pretreatments such as row polishing, degreasing, cleaning and stress relief annealing;b:Carried out on the pretreated surface of magnetic material at plating Reason, forms nickel or zinc transition zone;c:The magnetic material for being electroplate with nickel or zinc transition zone is implemented into cosputtering processing, ceramic target is utilized Material deposits ceramic membrane formation ceramic surface 3 on nickel or zinc transition zone;d:The magnetic material that deposition has ceramic surface 3 is placed in Produced in baking oven after roasting, insulation, cooling.
Embodiment 3
A kind of structuring inductance ceramic magnetic material as shown in Figure 1, including magnetic substrates 1, magnetic enhancement layer 2 and ceramic surface 3, the material of magnetic substrates 1 includes iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the magnetic substrates 1 of 100 parts by weight Material includes 0.25 part of 98 parts of iron, 0.25 part of silicon, 1 part of boron oxide, 0.5 part of chromium oxide and zinc oxide, and magnetic enhancement layer 2 is wrapped up Magnetic material is formed in the periphery of magnetic substrates 1, and magnetic enhancement layer 2 is from the soft magnetic material of high magnetic permeability, specially iron Oxysome, magnetic enhancement layer 2 is provided with ceramic surface 3, the side that magnetic material passes through deposition in the another side relative to magnetic substrates 1 Formula has ceramic surface 3 in 2 surface of magnetic enhancement layer deposition, and concrete operations are as follows:a:The surface to be deposited such as magnetic material is entered The pretreatments such as row polishing, degreasing, cleaning and stress relief annealing;b:Carried out on the pretreated surface of magnetic material at plating Reason, forms nickel or zinc transition zone;c:The magnetic material for being electroplate with nickel or zinc transition zone is implemented into cosputtering processing, ceramic target is utilized Material deposits ceramic membrane formation ceramic surface on nickel or zinc transition zone;d:The magnetic material that deposition has ceramic surface 3 is placed in Produced in baking oven after roasting, insulation, cooling.
The beneficial effects of the invention are as follows:Present invention electro-deposition on magnetic material has ceramic membrane formation ceramic surface, energy The integral hardness of magnetic material is enough effectively improved, reduction influences the situation of magnetic material hardness because of the infiltration of exterior resin, had Reliability, combination property and the element characteristic of the guarantee inductance element of effect.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies Change, equivalent substitution, improvement etc., should be included in the scope of the protection.

Claims (6)

1. a kind of structuring inductance ceramic magnetic material, including magnetic substrates, magnetic enhancement layer and ceramic surface, its feature exist In:The material of the magnetic substrates includes iron, silicon, boron oxide, chromium oxide and zinc oxide, wherein, the magnetic substrates of 100 parts by weight Material include 95.5-98 parts of iron, 0.25-0.5 parts of silicon, 0.5-1.5 parts of boron oxide, 0.5-1.5 parts of chromium oxide and zinc oxide 0.2-1 parts, the periphery that the magnetic enhancement layer is wrapped in magnetic substrates forms magnetic material, and the high magnetic conductance of magnetic enhancement layer choosing The soft magnetic material of rate, the magnetic enhancement layer is provided with ceramic surface in the another side relative to magnetic substrates.
2. a kind of structuring inductance ceramic magnetic material according to claim 1, it is characterised in that:100 parts by weight The materials of magnetic substrates include 96.5 parts of iron, 0.5 part of silicon, 1.5 parts of boron oxide, 0.5 part of 1 part of chromium oxide and zinc oxide.
3. a kind of structuring inductance ceramic magnetic material according to claim 1, it is characterised in that:100 parts by weight The materials of magnetic substrates include 98 parts of iron, 0.25 part of silicon, 1 part of boron oxide, 0.25 part of 0.5 part of chromium oxide and zinc oxide.
4. according to a kind of structuring inductance ceramic magnetic material described in claim 1, it is characterised in that:The magnetic enhancement layer Soft magnetic material is any one in silicon steel sheet, permalloy or ferrite.
5. a kind of structuring inductance ceramic magnetic material according to claim 1, it is characterised in that:The magnetic material leads to Cross the mode of deposition has ceramic surface in magnetic enhancement layer surface deposition.
6. a kind of structuring inductance ceramic magnetic material according to claim 4, it is characterised in that:In the magnetic material The operation of surface deposition ceramic surface is as follows:
a:The surface to be deposited such as magnetic material is polished, degreasing, the pretreatment such as cleaning and stress relief annealing;
b:Electroplating processes are carried out on the pretreated surface of magnetic material, nickel or zinc transition zone is formed;
c:The magnetic material for being electroplate with nickel or zinc transition zone is implemented into cosputtering processing, using ceramic target in nickel or zinc transition zone Upper deposition ceramic membrane formation ceramic surface;
d:Produced after the magnetic material that deposition has ceramic surface is placed in into roasting in baking oven, insulation, cooling.
CN201710183850.3A 2017-03-24 2017-03-24 A kind of structuring inductance ceramic magnetic material Pending CN106971814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710183850.3A CN106971814A (en) 2017-03-24 2017-03-24 A kind of structuring inductance ceramic magnetic material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710183850.3A CN106971814A (en) 2017-03-24 2017-03-24 A kind of structuring inductance ceramic magnetic material

Publications (1)

Publication Number Publication Date
CN106971814A true CN106971814A (en) 2017-07-21

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1359112A (en) * 2001-12-31 2002-07-17 北京航空航天大学 Preparation of nano multilayer high-resistance soft magnetic material by electronic beam gas phase deposition and method thereof
CN101069461A (en) * 2004-12-03 2007-11-07 新田股份有限公司 Electromagnetic interference suppression body, antenna device and electronic information transmission device
CN105845296A (en) * 2009-10-16 2016-08-10 阿维科斯公司 Thin film surface mount components
US20160284451A1 (en) * 2015-03-24 2016-09-29 International Business Machines Corporation High resistivity soft magnetic material for miniaturized power converter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1359112A (en) * 2001-12-31 2002-07-17 北京航空航天大学 Preparation of nano multilayer high-resistance soft magnetic material by electronic beam gas phase deposition and method thereof
CN101069461A (en) * 2004-12-03 2007-11-07 新田股份有限公司 Electromagnetic interference suppression body, antenna device and electronic information transmission device
CN105845296A (en) * 2009-10-16 2016-08-10 阿维科斯公司 Thin film surface mount components
US20160284451A1 (en) * 2015-03-24 2016-09-29 International Business Machines Corporation High resistivity soft magnetic material for miniaturized power converter

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Application publication date: 20170721