CN106947906A - A kind of electronic package material and preparation method thereof - Google Patents
A kind of electronic package material and preparation method thereof Download PDFInfo
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- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
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- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
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Abstract
Description
技术领域technical field
本发明涉及封装材料技术领域,具体涉及一种电子封装材料及其制备方法。The invention relates to the technical field of packaging materials, in particular to an electronic packaging material and a preparation method thereof.
背景技术Background technique
电子封装即为安装集成电路内置芯片外用的管壳,起着安放固定密封、保护集成电路内置芯片、增强环境适应的能力的作用。封装材料对电子器件和电路的热性能乃至可靠性起着举足轻重的作用。现在,电了封装材料行业已成为半导体行业中的一个重要分支,它已经广泛涉及到化学、电学、热力学、机械和工艺设备等多种学科。The electronic package is the shell for installing the integrated circuit chip for external use, which plays the role of placing, fixing and sealing, protecting the integrated circuit chip, and enhancing the ability to adapt to the environment. Packaging materials play a pivotal role in the thermal performance and even reliability of electronic devices and circuits. Now, the electrical packaging material industry has become an important branch of the semiconductor industry, and it has been widely involved in various disciplines such as chemistry, electricity, thermodynamics, machinery and process equipment.
作为金属基复合材料的增强物,SiC颗粒具有高模量、高硬度、低热膨胀、高热导率、来源广泛和成本低廉等优点。Al合金具有低密度、高热导率( 170-220W/m·K )价格低廉以及热加工容易等优点。综合以上因素,并考虑到电子封装材料必须具备很低的且与基板匹配的热膨胀系数( CTE ),高的热导率,高刚度,低密度,及低成本等特性,将二者复合而成颗粒增强铝基复合材料后,材料具有了Al和SiC二者的优点,几乎代表了理想封装材料的所有性能要求,这使得SiC/Al复合材料成为电子封装用金属基复合材料中最倍受瞩目,潜在应用最广的复合材料。石墨烯是世界上最坚固的材料,具有良好的导热性和室温下高速的电子迁移率。同时,其独特的结构使其具有完美的量子霍尔效应、独特的量子隧道效应、双极电场效应等特殊的性质。因此由于石墨烯具备极佳的导热性,由石墨烯和Al/SiC复合形成的电子封装材料,不仅保持各自的性能优势,大幅度提高了材料的导热性能,而且在制造工艺和焊接性能有了明显改善,将有望成为新一代电子封装材料。As a reinforcement of metal matrix composites, SiC particles have the advantages of high modulus, high hardness, low thermal expansion, high thermal conductivity, wide range of sources and low cost. Al alloy has the advantages of low density, high thermal conductivity (170-220W/m·K), low price and easy thermal processing. Combining the above factors, and considering that the electronic packaging material must have a very low coefficient of thermal expansion (CTE) that matches the substrate, high thermal conductivity, high stiffness, low density, and low cost, the two are combined. After the particle-reinforced aluminum matrix composite material, the material has the advantages of both Al and SiC, and almost represents all the performance requirements of the ideal packaging material, which makes the SiC/Al composite material the most attractive metal matrix composite material for electronic packaging. , the most widely used composite material. Graphene is the strongest material in the world, with good thermal conductivity and high-speed electron mobility at room temperature. At the same time, its unique structure makes it have special properties such as perfect quantum Hall effect, unique quantum tunnel effect, and bipolar electric field effect. Therefore, due to the excellent thermal conductivity of graphene, the electronic packaging material composed of graphene and Al/SiC not only maintains their respective performance advantages, but also greatly improves the thermal conductivity of the material, and has advantages in manufacturing process and welding performance. Significantly improved, it is expected to become a new generation of electronic packaging materials.
集成电路芯片上的铆点也就是接点,是焊接到封装管壳的引脚上的,现有的SiC/Al复合材料电子封装材料主要采用渗浸法制造,其在导热性能,制造工艺和焊接性能上均存问题,特别是难以采用我国现有封装焊接进行焊接,限制了该类材料相关领域的应用。The riveting point on the integrated circuit chip is also the contact point, which is welded to the pin of the package shell. The existing SiC/Al composite electronic packaging material is mainly manufactured by the infiltration method. Its thermal conductivity, manufacturing process and welding There are problems in performance, especially it is difficult to use the existing package welding in our country for welding, which limits the application of this type of material in related fields.
发明内容Contents of the invention
针对现有技术的缺陷,本发明的目的是提供一种电子封装材料及其制备方法,该电子封装材料密度较低,导热率较高,线膨胀系数可控、原料易得、易于封装焊接且制备方法简单,具有良好的应用前景。Aiming at the defects of the prior art, the object of the present invention is to provide an electronic packaging material and a preparation method thereof, which has low density, high thermal conductivity, controllable coefficient of linear expansion, easy-to-obtain raw materials, easy packaging and welding and The preparation method is simple and has good application prospects.
本发明解决技术问题采用如下技术方案:The present invention solves technical problem and adopts following technical scheme:
本发明提供了一种电子封装材料,包括以下重量份的原料:The invention provides an electronic packaging material, comprising the following raw materials in parts by weight:
Si-50%Al 50-100份、三氧化二铝20-30份、氮化铝1-10份、碳化硅颗粒40-70份、氧化石墨烯3-8份、玻璃纤维1-5份。Si-50%Al 50-100 parts, aluminum oxide 20-30 parts, aluminum nitride 1-10 parts, silicon carbide particles 40-70 parts, graphene oxide 3-8 parts, glass fiber 1-5 parts.
优选地,所述电池材料包括以下重量份的原料:Preferably, the battery material includes the following raw materials in parts by weight:
Si-50%Al 70-90份、三氧化二铝20-25份、氮化铝1-5份、碳化硅颗粒50-60份、氧化石墨烯4-7份、玻璃纤维2-3份。Si-50%Al 70-90 parts, aluminum oxide 20-25 parts, aluminum nitride 1-5 parts, silicon carbide particles 50-60 parts, graphene oxide 4-7 parts, glass fiber 2-3 parts.
优选地,所述电池材料包括以下重量份的原料:Preferably, the battery material includes the following raw materials in parts by weight:
Si-50%Al 80份、三氧化二铝23份、氮化铝3份、碳化硅颗粒55份、氧化石墨烯5份、玻璃纤维2.5份。80 parts of Si-50%Al, 23 parts of aluminum oxide, 3 parts of aluminum nitride, 55 parts of silicon carbide particles, 5 parts of graphene oxide, and 2.5 parts of glass fiber.
本发明还提供了一种电子封装材料的制备方法,包括以下步骤:The present invention also provides a kind of preparation method of electronic packaging material, comprises the following steps:
步骤一,将氧化石墨烯与乙醇按照体积比1:15混合,并用超声进行分散均匀;Step 1, mixing graphene oxide and ethanol according to the volume ratio of 1:15, and dispersing evenly with ultrasound;
步骤二,将步骤一制备的氧化石墨烯乙醇溶液,Si-50%Al、三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯、玻璃纤维加入V型混料设备中进行湿法混合,混合时间5-13小时,搅拌速度15-30转/分钟;Step 2, add the graphene oxide ethanol solution prepared in step 1, Si-50%Al, aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide, and glass fiber into the V-type mixing equipment for wet mixing , the mixing time is 5-13 hours, and the stirring speed is 15-30 rpm;
步骤三,将上述获得的混合粉末进行烘干,烘干后倒入V型混料设备中进行干法混合,混合5-13小时,转速15-30转每分钟;Step 3, drying the mixed powder obtained above, pouring it into a V-type mixing equipment for dry mixing after drying, mixing for 5-13 hours, and rotating speed 15-30 rpm;
步骤四,采用2mm厚LF21铝合金制备Φ240mm×210mm包套,将混合好的粉末装入包套中,要求总装粉重量控制在15千克~17千克,粉末振实密度达到大于1 .8g/cm3;Step 4: Use 2mm thick LF21 aluminum alloy to prepare a Φ240mm×210mm sheath, and put the mixed powder into the sheath. It is required that the weight of the assembled powder should be controlled at 15kg-17kg, and the powder tap density should be greater than 1.8g/cm 3 ;
步骤五,将装好包套的粉末放入环式烧结机中进行物理烧结,烧结的压力为95MPa-290MPa,温度为420℃-480℃,时间为1-2.5小时。Step five, put the sheathed powder into a ring sintering machine for physical sintering, the sintering pressure is 95MPa-290MPa, the temperature is 420°C-480°C, and the time is 1-2.5 hours.
优选地,所述步骤二混合时间为9小时,搅拌速度为20转每分钟。Preferably, the mixing time of the second step is 9 hours, and the stirring speed is 20 revolutions per minute.
优选地,所述步骤三混合时间为7小时,搅拌速度为20转每分钟。Preferably, the mixing time of the third step is 7 hours, and the stirring speed is 20 revolutions per minute.
优选地,所述步骤四总装粉重量为16千克。Preferably, the weight of the powder in the fourth step is 16 kilograms.
优选地,所述步骤五烧结压力为210 MPa,温度450℃,时间为1.5小时。Preferably, the sintering pressure in the fifth step is 210 MPa, the temperature is 450° C., and the time is 1.5 hours.
与现有技术相比,本发明具有如下的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
(1)本发明的电子封装材料以Si-50%Al 为基复合材料,以三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯3-8份、玻璃纤维为增强体。(1) The electronic packaging material of the present invention uses Si-50%Al as the base composite material, and uses aluminum oxide, aluminum nitride, silicon carbide particles, 3-8 parts of graphene oxide, and glass fibers as reinforcements.
(2)Si-50%Al具有良好的导热、导电性能,较高的抗苛刻环境能力,抗冲击、抗疲劳性能和断裂性能;三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯3-8份、玻璃纤维作为增强体具有较高的导热系数、较低的膨胀系数、密度低、成本低、与基体材料具有良好的相容性。(2) Si-50%Al has good thermal conductivity, electrical conductivity, high resistance to harsh environments, impact resistance, fatigue resistance and fracture performance; aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide 3-8 parts, glass fiber as a reinforcement has high thermal conductivity, low expansion coefficient, low density, low cost, and good compatibility with matrix materials.
(3)采用粉末冶金方式,材料设计性强,可以根据需要制备不同线膨胀系数的产品。(3) The powder metallurgy method is adopted, and the material design is strong, and products with different linear expansion coefficients can be prepared according to needs.
(4)本发明的电子封装材料不仅导热系数较高,并且成本低廉,易于焊接,应用范围较广,操作工艺简单,利于生产控制,容易工业化生产,具有良好的应用前景。(4) The electronic packaging material of the present invention not only has a high thermal conductivity, but also has low cost, is easy to weld, has a wide application range, simple operation process, is conducive to production control, and is easy to industrialized production, so it has a good application prospect.
具体实施方式detailed description
下面结合具体实施例,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with specific embodiments. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
实施例1.Example 1.
本实施例的电子封装材料,包括以下重量份的原料:The electronic packaging material of the present embodiment includes the following raw materials in parts by weight:
Si-50%Al 50份、三氧化二铝20份、氮化铝1份、碳化硅颗粒40份、氧化石墨烯3份、玻璃纤维1份。50 parts of Si-50%Al, 20 parts of aluminum oxide, 1 part of aluminum nitride, 40 parts of silicon carbide particles, 3 parts of graphene oxide, and 1 part of glass fiber.
本实施例电子封装材料的制备方法,包括以下步骤:The preparation method of the electronic packaging material of this embodiment comprises the following steps:
步骤一,将氧化石墨烯与乙醇按照体积比1:15混合,并用超声进行分散均匀;Step 1, mixing graphene oxide and ethanol according to the volume ratio of 1:15, and dispersing evenly with ultrasound;
步骤二,将步骤一制备的氧化石墨烯乙醇溶液,Si-50%Al、三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯、玻璃纤维加入V型混料设备中进行湿法混合,混合时间5小时,搅拌速度15转/分钟;Step 2, add the graphene oxide ethanol solution prepared in step 1, Si-50%Al, aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide, and glass fiber into the V-type mixing equipment for wet mixing , the mixing time is 5 hours, and the stirring speed is 15 rpm;
步骤三,将上述获得的混合粉末进行烘干,烘干后倒入V型混料设备中进行干法混合,混合5小时,转速15转每分钟;Step 3, drying the mixed powder obtained above, pouring it into a V-type mixing equipment for dry mixing after drying, mixing for 5 hours, and rotating speed 15 rpm;
步骤四,采用2mm厚LF21铝合金制备Φ240mm×210mm包套,将混合好的粉末装入包套中,要求总装粉重量控制在15千克,粉末振实密度达到大于1 .8g/cm3;Step 4, use 2mm thick LF21 aluminum alloy to prepare Φ240mm×210mm wrapper, put the mixed powder into the wrapper, it is required that the weight of the assembled powder should be controlled at 15 kg, and the tap density of the powder should be greater than 1.8g/cm 3 ;
步骤五,将装好包套的粉末放入环式烧结机中进行物理烧结,烧结的压力为95MPa,温度为420℃,时间为1小时。Step five, put the packaged powder into a ring-type sintering machine for physical sintering, the sintering pressure is 95MPa, the temperature is 420°C, and the time is 1 hour.
实施例2.Example 2.
本实施例的电子封装材料,包括以下重量份的原料:The electronic packaging material of the present embodiment includes the following raw materials in parts by weight:
Si-50%Al 90份、三氧化二铝25份、氮化铝5份、碳化硅颗粒60份、氧化石墨烯7份、玻璃纤维3份。90 parts of Si-50%Al, 25 parts of aluminum oxide, 5 parts of aluminum nitride, 60 parts of silicon carbide particles, 7 parts of graphene oxide, and 3 parts of glass fiber.
本实施例电子封装材料的制备方法,包括以下步骤:The preparation method of the electronic packaging material of this embodiment comprises the following steps:
步骤一,将氧化石墨烯与乙醇按照体积比1:15混合,并用超声进行分散均匀;Step 1, mixing graphene oxide and ethanol according to the volume ratio of 1:15, and dispersing evenly with ultrasound;
步骤二,将步骤一制备的氧化石墨烯乙醇溶液,Si-50%Al、三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯、玻璃纤维加入V型混料设备中进行湿法混合,混合时间13小时,搅拌速度30转/分钟;Step 2, add the graphene oxide ethanol solution prepared in step 1, Si-50%Al, aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide, and glass fiber into the V-type mixing equipment for wet mixing , the mixing time is 13 hours, and the stirring speed is 30 rpm;
步骤三,将上述获得的混合粉末进行烘干,烘干后倒入V型混料设备中进行干法混合,混合13小时,转速30转每分钟;Step 3, drying the mixed powder obtained above, pouring it into a V-type mixing equipment for dry mixing after drying, mixing for 13 hours, and rotating speed 30 rpm;
步骤四,采用2mm厚LF21铝合金制备Φ240mm×210mm包套,将混合好的粉末装入包套中,要求总装粉重量控制在17千克,粉末振实密度达到大于1 .8g/cm3;Step 4, use 2mm thick LF21 aluminum alloy to prepare a Φ240mm×210mm sheath, put the mixed powder into the sheath, the weight of the assembled powder is required to be controlled at 17 kg, and the tap density of the powder is greater than 1.8g/cm 3 ;
步骤五,将装好包套的粉末放入环式烧结机中进行物理烧结,烧结的压力为290MPa,温度为480℃,时间为2.5小时。Step five, put the packaged powder into a ring-type sintering machine for physical sintering, the sintering pressure is 290MPa, the temperature is 480°C, and the time is 2.5 hours.
实施例3.Example 3.
本实施例的电子封装材料,包括以下重量份的原料:The electronic packaging material of the present embodiment includes the following raw materials in parts by weight:
Si-50%Al 80份、三氧化二铝23份、氮化铝3份、碳化硅颗粒55份、氧化石墨烯5份、玻璃纤维2.5份。80 parts of Si-50%Al, 23 parts of aluminum oxide, 3 parts of aluminum nitride, 55 parts of silicon carbide particles, 5 parts of graphene oxide, and 2.5 parts of glass fiber.
本实施例电子封装材料的制备方法,包括以下步骤:The preparation method of the electronic packaging material of this embodiment comprises the following steps:
步骤一,将氧化石墨烯与乙醇按照体积比1:15混合,并用超声进行分散均匀;Step 1, mixing graphene oxide and ethanol according to the volume ratio of 1:15, and dispersing evenly with ultrasound;
步骤二,将步骤一制备的氧化石墨烯乙醇溶液,Si-50%Al、三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯、玻璃纤维加入V型混料设备中进行湿法混合,混合时间9小时,搅拌速度20转/分钟;Step 2, add the graphene oxide ethanol solution prepared in step 1, Si-50%Al, aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide, and glass fiber into the V-type mixing equipment for wet mixing , the mixing time is 9 hours, and the stirring speed is 20 rpm;
步骤三,将上述获得的混合粉末进行烘干,烘干后倒入V型混料设备中进行干法混合,混合7小时,转速20转每分钟;Step 3, drying the mixed powder obtained above, pouring it into a V-type mixing equipment for dry mixing after drying, mixing for 7 hours, and rotating speed 20 rpm;
步骤四,采用2mm厚LF21铝合金制备Φ240mm×210mm包套,将混合好的粉末装入包套中,要求总装粉重量控制在16千克,粉末振实密度达到大于1 .8g/cm3;Step 4, use 2mm thick LF21 aluminum alloy to prepare Φ240mm×210mm sheath, put the mixed powder into the sheath, it is required that the weight of the assembled powder should be controlled at 16 kg, and the tap density of the powder should be greater than 1.8g/cm 3 ;
步骤五,将装好包套的粉末放入环式烧结机中进行物理烧结,烧结的压力为210MPa,温度为450℃,时间为1.5小时。Step five, put the packaged powder into a ring-type sintering machine for physical sintering, the sintering pressure is 210MPa, the temperature is 450°C, and the time is 1.5 hours.
实施例4.Example 4.
本实施例的电子封装材料,包括以下重量份的原料:The electronic packaging material of the present embodiment includes the following raw materials in parts by weight:
Si-50%Al 90份、三氧化二铝28份、氮化铝3份、碳化硅颗粒45份、氧化石墨烯7份、玻璃纤维4份。90 parts of Si-50%Al, 28 parts of aluminum oxide, 3 parts of aluminum nitride, 45 parts of silicon carbide particles, 7 parts of graphene oxide, and 4 parts of glass fiber.
本实施例电子封装材料的制备方法,包括以下步骤:The preparation method of the electronic packaging material of this embodiment comprises the following steps:
步骤一,将氧化石墨烯与乙醇按照体积比1:15混合,并用超声进行分散均匀;Step 1, mixing graphene oxide and ethanol according to the volume ratio of 1:15, and dispersing evenly with ultrasound;
步骤二,将步骤一制备的氧化石墨烯乙醇溶液,Si-50%Al、三氧化二铝、氮化铝、碳化硅颗粒、氧化石墨烯、玻璃纤维加入V型混料设备中进行湿法混合,混合时间11小时,搅拌速度28转/分钟;Step 2, add the graphene oxide ethanol solution prepared in step 1, Si-50%Al, aluminum oxide, aluminum nitride, silicon carbide particles, graphene oxide, and glass fiber into the V-type mixing equipment for wet mixing , the mixing time is 11 hours, and the stirring speed is 28 rpm;
步骤三,将上述获得的混合粉末进行烘干,烘干后倒入V型混料设备中进行干法混合,混合7小时,转速19转每分钟;Step 3, drying the mixed powder obtained above, pouring it into a V-type mixing equipment for dry mixing after drying, mixing for 7 hours, and rotating speed 19 rpm;
步骤四,采用2mm厚LF21铝合金制备Φ240mm×210mm包套,将混合好的粉末装入包套中,要求总装粉重量控制在15.5千克,粉末振实密度达到大于1 .8g/cm3;Step 4, use 2mm thick LF21 aluminum alloy to prepare a Φ240mm×210mm sheath, put the mixed powder into the sheath, the weight of the assembled powder is required to be controlled at 15.5kg, and the powder tap density is greater than 1.8g/cm 3 ;
步骤五,将装好包套的粉末放入环式烧结机中进行物理烧结,烧结的压力为260MPa,温度为470℃,时间为1.5小时。Step five, put the packaged powder into a ring-type sintering machine for physical sintering, the sintering pressure is 260MPa, the temperature is 470°C, and the time is 1.5 hours.
本发明的电子封装材料采用粉末冶金方式,材料设计性强,可以根据需要制备不同线膨胀系数的产品,本发明的封装材料基体材料具有较高的抗苛刻环境能力,抗冲击、抗疲劳性能和断裂性能;添加的增强体具有较高的导热系数、较低的膨胀系数、密度低、成本低、与基体材料具有良好的相容性。因此产品不仅导热系数较高,并且成本低廉,易于焊接,应用范围较广,操作工艺简单,利于生产控制,容易工业化生产,具有良好的应用前景。The electronic packaging material of the present invention adopts the powder metallurgy method, the material design is strong, and products with different linear expansion coefficients can be prepared according to the needs. The packaging material base material of the present invention has high resistance to harsh environments, impact resistance, fatigue resistance and Fracture performance; the added reinforcement has high thermal conductivity, low expansion coefficient, low density, low cost, and good compatibility with the base material. Therefore, the product not only has high thermal conductivity, but also has low cost, is easy to weld, has wide application range, simple operation process, is beneficial to production control, is easy to industrialize production, and has good application prospects.
对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be apparent to those skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Accordingly, the embodiments should be regarded in all points of view as exemplary and not restrictive, the scope of the invention being defined by the appended claims rather than the foregoing description, and it is therefore intended that the scope of the invention be defined by the appended claims rather than by the foregoing description. All changes within the meaning and range of equivalents of the elements are embraced in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only contains an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.
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