CN106896601A - Array base palte method for repairing disconnected lines - Google Patents
Array base palte method for repairing disconnected lines Download PDFInfo
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- CN106896601A CN106896601A CN201710108001.1A CN201710108001A CN106896601A CN 106896601 A CN106896601 A CN 106896601A CN 201710108001 A CN201710108001 A CN 201710108001A CN 106896601 A CN106896601 A CN 106896601A
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- 238000000034 method Methods 0.000 title claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 claims abstract description 157
- 239000002184 metal Substances 0.000 claims abstract description 157
- 230000004888 barrier function Effects 0.000 claims abstract description 86
- 230000000903 blocking effect Effects 0.000 claims abstract description 70
- 230000026267 regulation of growth Effects 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 20
- 229910052705 radium Inorganic materials 0.000 claims description 15
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 claims description 15
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 4
- 230000009194 climbing Effects 0.000 abstract description 5
- 241001391944 Commicarpus scandens Species 0.000 abstract description 3
- 230000001934 delay Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 126
- 239000010408 film Substances 0.000 description 39
- 238000001182 laser chemical vapour deposition Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 230000035772 mutation Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
- G02F1/136263—Line defects
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
Abstract
The present invention provides a kind of array base palte method for repairing disconnected lines, including：The two ends in the first line region long are obtained, the first line region long includes metal wire broken string part；Two ends to the first line region long use radium-shine light irradiation, remove color blocking layer and the second insulating barrier, expose second metal layer, and to obtain two first grooves, the side wall of first groove is stepped；The metal film of growth regulation one in color blocking layer in two first grooves and between two first grooves, is connected two second metal layers of first groove bottom with by the first metal film, completes the connection of metal wire broken string part.Because the first groove side wall that the above method is obtained is stepped, the first groove side wall formed i.e. in color blocking layer and the second insulating barrier declines process and relatively delays, substantially reduce the climbing of the first metal film highly, make the first metal film not easy to break, improve broken line repairing success rate.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of array base palte method for repairing disconnected lines.
Background technology
With continuing to develop for liquid panel technique, increasing New technical use is in thin-film transistor array base-plate
On, such as plane conversion (In-Plane Switching, abbreviation IPS), fringe field switching technology (Fringe Field
Switching, abbreviation FFS), the technology such as color filter array (Color Filter On Array, abbreviation COA).These technologies
Flatness requirement to display base plate is higher, it usually needs one layer of thicker organic layer such as color blocking is deposited on array base palte
Layer, flatness layer etc..In array base palte manufacturing process, due to the influence of various factors, plain conductor may be caused to include scanning
There is the situation of broken string or short circuit in line and data wire, influence yield.
To improve yield, laser chemical vapor deposition (Laser Chemical Vapor are carried out for disconnection portion branch
Deposition, abbreviation LCVD) line repairing long；For short problems, shorted section need to be initially switched off, shorted section is isolated, then
Carry out LCVD line repairings long.Current COA products, color blocking is made on array base palte, in LCVD line repairings long, because color blocking is very thick
(3um or so), directly bombardment (zapping) color blocking and dielectric film, can make LCVD line climbing height long too high, be easily caused LCVD
Thread breakage long.
The content of the invention
The present invention provides a kind of array base palte method for repairing disconnected lines, is used to solve method for repairing disconnected lines appearance of the prior art
It is easily caused the technical problem of LCVD thread breakages long.
One aspect of the present invention provides a kind of array base palte method for repairing disconnected lines, and the array base palte includes underlay substrate, the
One metal level, second metal layer, the first insulating barrier, the second insulating barrier and color blocking layer；Wherein, the first metal layer is arranged at institute
State on underlay substrate, first insulating barrier is covered on the first metal layer and the underlay substrate, second metal
Layer is located on first insulating barrier, and second insulating barrier is covered in the second metal layer and first insulating barrier,
The color blocking layer is covered on second insulating barrier, including：
The two ends in the first line region long are obtained, the first line region long includes metal wire broken string part；
Two ends to the described first line region long use radium-shine light irradiation, remove the color blocking layer and second insulation
Layer, exposes the second metal layer, and to obtain two first grooves, the side wall of the first groove is stepped；
The metal of growth regulation one in the color blocking layer in two first grooves and between two first grooves
Film, is connected two second metal layers of the first groove bottom with by first metal film, completes the gold
The connection of category line broken string part.
Further, the two ends to the described first line region long use radium-shine light irradiation, specifically include：
The size and radium-shine energy of radium-shine hot spot are controlled, the diameter of the radium-shine hot spot is changed from big to small, to remove
The color blocking layer and second insulating barrier, expose the second metal layer, so as to obtain the first groove.
Further, the two ends to the described first line region long use radium-shine light irradiation, specifically include：
The annular radium raster for setting multiple different-diameters is irradiated to the two ends in the described first line region long, to remove
The color blocking layer and second insulating barrier, expose the second metal layer, so as to obtain the first groove.
Further, 3 annular radium rasters of different-diameter are set to shine the two ends in the described first line region long
Penetrate.
Further, first metal film is made up of tungsten or molybdenum.
Another aspect of the present invention provides a kind of array base palte method for repairing disconnected lines, the array base palte include underlay substrate,
The first metal layer, second metal layer, the first insulating barrier, the second insulating barrier and color blocking layer；Wherein, the first metal layer is arranged at
On the underlay substrate, first insulating barrier is covered on the first metal layer and the underlay substrate, second gold medal
Category layer is located on first insulating barrier, and second insulating barrier is covered in the second metal layer and first insulating barrier
On, the color blocking layer is covered on second insulating barrier, including：
The two ends in the second line region long are obtained, the second line region long includes metal wire broken string part；
Two ends to the described second line region long use radium-shine light irradiation, remove the color blocking layer, first insulation
Layer and two insulating barrier, expose the first metal layer, and to obtain two second grooves, the side wall of the second groove is in rank
Scalariform；
The metal of growth regulation two in the color blocking layer in two second grooves and between two second grooves
Film, is connected two the first metal layers of the second groove bottom with by second metal film, completes the gold
The connection of category line broken string part.
Further, the two ends to the described second line region long use radium-shine light irradiation, specifically include：
The size and radium-shine energy of radium-shine hot spot are controlled, the diameter of the radium-shine hot spot is changed from big to small, to remove
The color blocking layer, first insulating barrier and second insulating barrier, expose the first metal layer, so as to obtain described second
Groove.
Further, the two ends to the described second line region long use radium-shine light irradiation, specifically include：
The annular radium raster for setting multiple different-diameters is irradiated to the two ends in the described second line region long, to remove
The color blocking layer, first insulating barrier and second insulating barrier, expose the first metal layer, so as to obtain described second
Groove.
Further, 3 annular radium rasters of different-diameter are set to shine the two ends in the described second line region long
Penetrate.
Further, it is characterised in that second metal film is made up of tungsten or molybdenum.
The present invention provides a kind of array base palte method for repairing disconnected lines, and radium is used by the two ends to the first line region long
Penetrate light irradiation, remove color blocking layer and the second insulating barrier, expose second metal layer, thus obtain two side walls it is stepped first
Groove, the then metal film of growth regulation one in the color blocking layer in two first grooves and between two first grooves, with by
One metal film connects two second metal layers of first groove bottom, so as to complete the connection of metal wire broken string part.Due to
The first groove side wall that the above method is obtained is stepped, i.e., the first groove side wall formed in color blocking layer and the second insulating barrier
Decline process is relatively delayed, and substantially reduces the climbing of the first metal film highly, makes the first metal film not easy to break.Simultaneously as on
The scheme of stating is the metal film of growth regulation one on color blocking, without first removing color blocking layer, therefore will not cause color blocking layer residue problem,
And caused first insulating barrier or the second insulating barrier are damaged problem when removing color blocking layer, improve broken line repairing success rate.
Brief description of the drawings
The invention will be described in more detail below based on embodiments and refering to the accompanying drawings.Wherein：
Fig. 1 is a structural representation of array base palte broken line repairing；
One schematic flow sheet of the array base palte method for repairing disconnected lines that Fig. 2 is provided for the present invention；
Fig. 3 is another structural representation of array base palte broken line repairing；
Another schematic flow sheet of the array base palte method for repairing disconnected lines that Fig. 4 is provided for the present invention.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not drawn according to actual ratio.
Specific embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
Refer to Fig. 1 and Fig. 2.The present embodiment provides a kind of array base palte method for repairing disconnected lines, and array base palte includes substrate
Substrate 1, the first metal layer 2, second metal layer 3, the first insulating barrier 4, the second insulating barrier 5 and color blocking layer 6；Wherein, the first metal
Layer 2 is arranged on underlay substrate 1, and the first insulating barrier 4 is covered on the first metal layer 2 and underlay substrate 1, second metal layer 3
In on the first insulating barrier 4, the second insulating barrier 5 is covered on the insulating barrier 4 of second metal layer 3 and first, and color blocking layer 6 is covered in second
On insulating barrier 5, including：
Step 101, obtains the two ends in the first line region long, and the first line region long includes metal wire broken string part.First gold medal
Category layer 2 includes multiple scan lines be arrangeding in parallel, and second metal layer 3 includes multiple data wires be arrangeding in parallel, scan line and number
It is vertically arranged according to line.First line region long is the region for including metal wire broken string part, and the two ends in the region are in second metal layer 3
On projection respectively be located at two data lines on.
Step 102, the two ends to the first line region long use radium-shine light irradiation, remove the insulating barrier of color blocking layer 6 and second
5, expose second metal layer 3, to obtain two first grooves 8, the side wall of first groove 8 is stepped.
Specifically, controlling the size and radium-shine energy of radium-shine hot spot, the diameter of the radium-shine hot spot is set to change from big to small,
To remove the color blocking layer 6 and second insulating barrier 5, expose the second metal layer 3, so as to obtain the first groove 8.
First the color blocking layer 6 to the two ends in the first line region long carries out radium-shine light irradiation, controls the size of radium-shine hot spot, makes the laser light
The diameter of spot changes from big to small, so until removing the insulating barrier 5 of color blocking layer 6 and second, exposes second metal layer 3, preferably
, radium-shine light irradiation can be carried out to second metal layer 3, make to form a little groove on the surface of second metal layer 3, it is complete in subsequent growth
After first metal film 7, the first metal film 7 can be made to contact more abundant with second metal layer 3.After radium-shine light irradiation is finished,
The two ends in one line region long can obtain two first grooves 8, and the first groove 8 empties part by diameter from big to small concentric
Cylinder stacking is formed, i.e. the side wall of first groove 8 is stepped.Preferably, by controlling the diameter of radium-shine hot spot in first paragraph
To obtain the first gradual change inclined-plane, the diameter for then adjusting radium-shine hot spot is mutated to a certain smaller value for slow gradual change in time,
The slow gradual change of diameter of control laser light spot is so as to obtain the second gradual change inclined-plane, then the diameter for adjusting radium-shine hot spot in two times
Mutation repeats above procedure, until exposing second metal layer 3 to smaller value.Due to after the first paragraph time terminates, radium-shine hot spot
Diameter have a mutation so that have a plane between the first gradual change inclined-plane and the second gradual change inclined-plane, so that first groove 8
Side wall it is stepped.The angle of inclination on the first gradual change inclined-plane and the second gradual change inclined-plane is no more than 70 degree.
Further, in an alternative embodiment of the invention, the two ends in the first line region long are also carried using radium-shine light irradiation
For a kind of alternative, that is, the annular radium raster for setting multiple different-diameters is shone the two ends in the described first line region long
Penetrate, to remove the color blocking layer 6 and second insulating barrier 5, expose the second metal layer 3, so as to obtain first ditch
Groove 8.In such scheme, the two ends in the first line region long are shone simultaneously using the annular radium raster of multiple different-diameters
Penetrate, to remove the insulating barrier 5 of color blocking layer 6 and second, expose second metal layer 3.Preferably, using three annular radium of different-diameter
Grating is penetrated to be irradiated the two ends in the first line region long.Preferably, radium-shine light irradiation is carried out to second metal layer 3, is made
The surface of two metal level 3 forms a little groove, in the first metal film 7 of subsequent growth, can make the first metal film 7 and second metal layer
3 contacts are more abundant.
Step 103, the metal film of growth regulation one in the color blocking layer 6 in two first grooves 8 and between two first grooves 8
7, the second metal layer 3 of two bottoms of first groove 8 is connected with by the first metal film 7, complete metal wire broken string part
Connection.
Specifically, the first metal film 7 is identical with the material that second metal layer 3 is used.First metal film is by tungsten or molybdenum
It is made.The second metal layer 3 of two bottoms of first groove 8 is connected by the first metal film 7, so as to complete metal wire disconnection portion
The connection for dividing.
Above-described embodiment uses radium-shine light irradiation, removal color blocking layer 6 and the by the two ends to the first line region long
Two insulating barriers 5, expose second metal layer 3, so that two stepped first grooves of side wall 8 are obtained, then at two first
The metal film 7 of growth regulation one in color blocking layer 6 in groove 8 and between two first grooves 8, with by the first metal film 7 by two
The second metal layer 3 of the bottom of first groove 8 is connected, so as to complete the connection of metal wire broken string part.Because the above method is obtained
The side wall of first groove 8 it is stepped, i.e., the side wall of first groove 8 formed on the insulating barrier 5 of color blocking layer 6 and second declines process
Relatively delay, substantially reduce the climbing of the first metal film 7 highly, make the first metal film 7 not easy to break.Simultaneously as such scheme
It is the metal film 7 of growth regulation one on color blocking layer 6, without first removing color blocking layer 6, therefore the residue problem of color blocking layer 6 will not be caused,
And the insulating barrier 5 of caused first insulating barrier 4 or second is damaged problem when removing color blocking layer 6, improves broken line repairing success rate.
Refer to Fig. 3 and Fig. 4.The present embodiment provides a kind of array base palte method for repairing disconnected lines, and array base palte includes substrate
Substrate 1, the first metal layer 2, second metal layer 3, the first insulating barrier 4, the second insulating barrier 5 and color blocking layer 6；Wherein, the first metal
Layer 2 is arranged on underlay substrate 1, and the first insulating barrier 4 is covered on the first metal layer 2 and underlay substrate 1, second metal layer 3
In on the first insulating barrier 4, the second insulating barrier 5 is covered on the insulating barrier 4 of second metal layer 3 and first, and color blocking layer 6 is covered in second
On insulating barrier 5, including：
Step 201, obtains the two ends in the second line region long, and the second line region long includes metal wire broken string part.First gold medal
Category layer 2 includes multiple scan lines be arrangeding in parallel, and the second line region long is the region for including metal wire broken string part, the region
Projection of the two ends on the first metal layer 2 is located in two scan lines respectively.
Step 202, the two ends to the second line region long use radium-shine light irradiation, removal color blocking layer 6, the first insulating barrier 4
With the second insulating barrier 5, expose the first metal layer 2, to obtain two second grooves 9, the side wall of second groove 9 is stepped.
Specifically, controlling the size and radium-shine energy of radium-shine hot spot, the diameter of the radium-shine hot spot is set to change from big to small,
To remove color blocking layer 6, the first insulating barrier 4 and the second insulating barrier 5, expose the first metal layer 2, so as to obtain second groove 9.It is first right
The color blocking layer 6 at the two ends in the second line region long carries out radium-shine light irradiation, controls the size of radium-shine hot spot, makes the diameter of radium-shine hot spot
Change from big to small, so until removing color blocking layer 6, the first insulating barrier 4 and the second insulating barrier 5, expose the first metal layer 2.
Preferably, radium-shine light irradiation can be carried out to the first metal layer 2, makes to form a little groove on the surface of the first metal layer 2, subsequently given birth to
After having grown the second metal film 7, the second metal film 7 can be made to contact more abundant with the first metal layer 2.After radium-shine light irradiation is finished,
Two second grooves 9 can be obtained at the two ends in the second line region long, the second groove 9 empties part by diameter from big to small
Concentric column stacking is formed, i.e. the side wall of first groove 8 is stepped.Preferably, by controlling the diameter of radium-shine hot spot
The diameter that slow gradual change adjusts radium-shine hot spot to obtain the 3rd gradual change inclined-plane, then in three times is mutated to a certain smaller value,
The slow gradual change of diameter of laser light spot is controlled within the 4th time so as to obtain the 4th gradual change inclined-plane, then adjusts radium-shine hot spot
Diameter is mutated to smaller value, above procedure is repeated, until exposing the first metal layer 2.It is radium-shine due to after the 3rd time terminates
The diameter of hot spot has a mutation so that have a plane between the 3rd gradual change inclined-plane and the 4th gradual change inclined-plane, so that second
The side wall of groove 9 is stepped.The angle of inclination on the 3rd gradual change inclined-plane and the 4th gradual change inclined-plane is no more than 70 degree.
Further, in an alternative embodiment of the invention, the two ends in the second line region long are also carried using radium-shine light irradiation
For a kind of alternative, that is, the annular radium raster for setting multiple different-diameters is shone the two ends in the described second line region long
Penetrate, to remove color blocking layer 6, the first insulating barrier 4 and the second insulating barrier 5, expose the first metal layer 2, so as to obtain second groove 9.
In such scheme, the two ends in the second line region long are irradiated simultaneously using the annular radium raster of multiple different-diameters, with
Color blocking layer 6, the first insulating barrier 4 and the second insulating barrier 5 are removed, exposes the first metal layer 2.Preferably, using three different-diameters
Annular radium raster the two ends in the second line region long are irradiated.Preferably, laser light photograph is carried out to the first metal layer 2
Penetrate, make to form a little groove on the surface of the first metal layer 2, in the second metal film 7 of subsequent growth, can make the second metal film 7 with
The first metal layer 2 contacts more abundant.
Step 203, the metal film of growth regulation two in the color blocking layer 6 in two second grooves 9 and between two second grooves 9
7, the first metal layer 2 of two bottoms of second groove 9 is connected with by the second metal film 7, complete metal wire broken string part
Connection.
Specifically, the second metal film 7 is made up of tungsten or molybdenum.By the second metal film 7 by two bottoms of second groove 9
The first metal layer 2 is connected, so as to complete the connection of metal wire broken string part.
Above-described embodiment uses radium-shine light irradiation by the two ends to the second line region long, and removal color blocking layer 6, first is exhausted
The insulating barrier 5 of edge layer 4 and second, exposes the first metal layer 2, so as to obtain two stepped second grooves of side wall 9, Ran Hou
The metal film 7 of growth regulation two in color blocking layer 6 in two second grooves 9 and between two second grooves 9, with by the second metal film
7 connect the first metal layer 2 of two bottoms of second groove 9, so as to complete the connection of metal wire broken string part.Due to above-mentioned side
The side wall of second groove 9 that method is obtained is stepped, i.e., the formed on color blocking layer 6, the first insulating barrier 4 and the second insulating barrier 5
The side wall of two groove 9 declines process and relatively delays, and substantially reduces the climbing of the second metal film 7 highly, makes the second metal film 7 not easily broken
Split.Simultaneously as such scheme is the metal film 7 of growth regulation two on color blocking layer 6, without first removing color blocking layer 6, therefore will not
Cause the residue problem of color blocking layer 6, and the insulating barrier 5 of caused first insulating barrier 4 or second is damaged problem when removing color blocking layer 6, carries
Broken string success rate of mending high.
Although by reference to preferred embodiment, invention has been described, is not departing from the situation of the scope of the present invention
Under, various improvement can be carried out to it and part therein can be replaced with equivalent.Especially, as long as in the absence of structure punching
Prominent, the every technical characteristic being previously mentioned in each embodiment can combine in any way.The invention is not limited in text
Disclosed in specific embodiment, but all technical schemes including falling within the scope of the appended claims.
Claims (10)
1. a kind of array base palte method for repairing disconnected lines, the array base palte includes underlay substrate, the first metal layer, the second metal
Layer, the first insulating barrier, the second insulating barrier and color blocking layer；Wherein, the first metal layer is arranged on the underlay substrate, described
First insulating barrier is covered on the first metal layer and the underlay substrate, and the second metal layer is located at the described first insulation
On layer, second insulating barrier is covered in the second metal layer and first insulating barrier, and the color blocking layer is covered in institute
State on the second insulating barrier, it is characterised in that methods described includes：
The two ends in the first line region long are obtained, the first line region long includes metal wire broken string part；
Two ends to the described first line region long use radium-shine light irradiation, remove the color blocking layer and second insulating barrier,
Expose the second metal layer, to obtain two first grooves, the side wall of the first groove is stepped；
The metal film of growth regulation one in the color blocking layer in two first grooves and between two first grooves, with
Two second metal layers of the first groove bottom are connected by first metal film, is completed the metal wire and is broken
The connection of line part.
2. array base palte method for repairing disconnected lines according to claim 1, it is characterised in that to the described first line region long
Two ends use radium-shine light irradiation, specifically include：
The size and radium-shine energy of radium-shine hot spot are controlled, the diameter of the radium-shine hot spot is changed from big to small, it is described to remove
Color blocking layer and second insulating barrier, expose the second metal layer, so as to obtain the first groove.
3. array base palte method for repairing disconnected lines according to claim 1, it is characterised in that to the described first line region long
Two ends use radium-shine light irradiation, specifically include：
The annular radium raster for setting multiple different-diameters is irradiated to the two ends in the described first line region long, described to remove
Color blocking layer and second insulating barrier, expose the second metal layer, so as to obtain the first groove.
4. array base palte method for repairing disconnected lines according to claim 3, it is characterised in that 3 rings of different-diameter are set
Shape radium raster is irradiated to the two ends in the described first line region long.
5. the array base palte method for repairing disconnected lines according to any one of claim 1-4, it is characterised in that first gold medal
Category film is made up of tungsten or molybdenum.
6. a kind of array base palte method for repairing disconnected lines, the array base palte includes underlay substrate, the first metal layer, the second metal
Layer, the first insulating barrier, the second insulating barrier and color blocking layer；Wherein, the first metal layer is arranged on the underlay substrate, described
First insulating barrier is covered on the first metal layer and the underlay substrate, and the second metal layer is located at the described first insulation
On layer, second insulating barrier is covered in the second metal layer and first insulating barrier, and the color blocking layer is covered in institute
State on the second insulating barrier, it is characterised in that methods described includes：
The two ends in the second line region long are obtained, the second line region long includes metal wire broken string part；
Radium-shine light irradiation is used to the two ends in the described second line region long, remove the color blocking layer, first insulating barrier and
Two insulating barrier, exposes the first metal layer, and to obtain two second grooves, the side wall of the second groove is in ladder
Shape；
The metal film of growth regulation two in the color blocking layer in two second grooves and between two second grooves, with
Two the first metal layers of the second groove bottom are connected by second metal film, is completed the metal wire and is broken
The connection of line part.
7. array base palte method for repairing disconnected lines according to claim 6, it is characterised in that to the described second line region long
Two ends use radium-shine light irradiation, specifically include：
The size and radium-shine energy of radium-shine hot spot are controlled, the diameter of the radium-shine hot spot is changed from big to small, it is described to remove
Color blocking layer, first insulating barrier and second insulating barrier, expose the first metal layer, so as to obtain second ditch
Groove.
8. array base palte method for repairing disconnected lines according to claim 6, it is characterised in that to the described second line region long
Two ends use radium-shine light irradiation, specifically include：
The annular radium raster for setting multiple different-diameters is irradiated to the two ends in the described second line region long, described to remove
Color blocking layer, first insulating barrier and second insulating barrier, expose the first metal layer, so as to obtain second ditch
Groove.
9. array base palte method for repairing disconnected lines according to claim 8, it is characterised in that 3 rings of different-diameter are set
Shape radium raster is irradiated to the two ends in the described second line region long.
10. the array base palte method for repairing disconnected lines according to any one of claim 6-9, it is characterised in that described second
Metal film is made up of tungsten or molybdenum.
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Application publication date: 20170627 |