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CN106876234A - A kind of sample stage for the analysis of mineral facies automatic identification - Google Patents

A kind of sample stage for the analysis of mineral facies automatic identification Download PDF

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Publication number
CN106876234A
CN106876234A CN201710250246.8A CN201710250246A CN106876234A CN 106876234 A CN106876234 A CN 106876234A CN 201710250246 A CN201710250246 A CN 201710250246A CN 106876234 A CN106876234 A CN 106876234A
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sample
sample stage
automatic identification
mineral
analysis
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CN106876234B (en
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李娟�
何同
陆现彩
陆建军
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Nanjing University
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Nanjing University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

本发明提供了一种用于矿物相自动识别分析的样品台,样品台底座形状与扫描电镜样品室内样品槽的形状匹配,样品台中间开有样品托,样品托中安装有可拆卸的卡槽,卡槽中安装有两组移动挡板;样品台侧壁镶嵌有Co标样,Co标样的上表面与样品台上表面在同一水平面。本发明专门针对地学类的块状样品、靶材样品(粉末状矿物颗粒)特制,用以满足尺寸、形状不一的样品进行有标样的测试需求。

The invention provides a sample table for automatic identification and analysis of mineral phases, the shape of the base of the sample table matches the shape of the sample groove in the sample room of the scanning electron microscope, a sample holder is opened in the middle of the sample table, and a detachable card slot is installed in the sample holder , There are two sets of movable baffles installed in the card slot; the Co standard sample is inlaid on the side wall of the sample stage, and the upper surface of the Co standard sample is at the same level as the upper surface of the sample stage. The invention is specially made for geoscience block samples and target samples (powder mineral particles) to meet the test requirements of samples with different sizes and shapes.

Description

一种用于矿物相自动识别分析的样品台A sample stage for automatic identification and analysis of mineral phases

技术领域technical field

本发明涉及地质样品的扫描电镜仪器分析测试领域,具体是一种适用于矿物相自动识别(INCA-mineral)分析使用的特制样品台。The invention relates to the field of scanning electron microscope instrument analysis and testing of geological samples, in particular to a special sample stage suitable for automatic identification of mineral phases (INCA-mineral) analysis.

背景技术Background technique

(1)自动矿物相识别技术(INCA-mineral):(1) Automatic mineral phase identification technology (INCA-mineral):

INCA-mineral是目前世界上最先进的矿物相自动识别分析测试系统之一。该矿物分析软件搭载在扫描电镜(SEM)上,通过能谱探头、背散射探头协作工作来完成测试分析。工作原理是依据背散射图像区分不同的矿物相,通过能谱分析获取各相的元素,再通过图形学处理采集到的全矿物特征。元素含量的变化,是鉴定矿物种类的主要依据。INCA-mineral技术在大面积SDD能谱探头的支持下,可以快速准确地采集每一个颗粒的形貌和成分信息,进行矿物分类和鉴别,实现每小时数千个矿物颗粒的自动分析,使得常规的SEM转变为自动矿物分析设备。INCA-mineral is currently one of the most advanced mineral phase automatic identification analysis testing systems in the world. The mineral analysis software is carried on the scanning electron microscope (SEM), and the test analysis is completed through the cooperative work of the energy spectrum probe and the backscatter probe. The working principle is to distinguish different mineral phases based on backscattered images, obtain the elements of each phase through energy spectrum analysis, and then process the collected mineral features through graphics. Changes in element content are the main basis for identifying mineral types. With the support of large-area SDD energy spectrum probes, INCA-mineral technology can quickly and accurately collect the shape and composition information of each particle, carry out mineral classification and identification, and realize the automatic analysis of thousands of mineral particles per hour, making routine Transformation of the SEM into an automated mineral analysis device.

(2)INCA-mineral实验及样品制备(2) INCA-mineral experiment and sample preparation

进行INCA-mineral分析测试时,要求试样表面平整,与入射电子束垂直,呈90℃夹角,且样品颗粒均匀分散。因此,对于块状样品,首先要将待测面磨平并抛光。粉末样品则需要将粉末状矿物颗粒置入橡胶模具,注胶并制靶。待树脂固化后,置入自动金相抛光机碾磨抛光。待测样品表面在进行分析前,均需要喷镀连续的导电碳膜,随后装入扫描电镜样品室进行分析,软件测试时需要利用Co作为能谱定量分析标准。When performing INCA-mineral analysis and testing, the surface of the sample is required to be flat, perpendicular to the incident electron beam, at an angle of 90°C, and the sample particles are uniformly dispersed. Therefore, for bulk samples, the surface to be tested must first be ground and polished. For powder samples, it is necessary to put powdered mineral particles into rubber molds, inject glue and make targets. After the resin is cured, put it into an automatic metallographic polishing machine for grinding and polishing. The surface of the sample to be tested needs to be sprayed with a continuous conductive carbon film before analysis, and then loaded into the sample chamber of the scanning electron microscope for analysis. The software test needs to use Co as the energy spectrum quantitative analysis standard.

发明内容Contents of the invention

本发明为了解决现有技术的问题,提供了一种专门针对地学类的块状样品、靶材样品(粉末状矿物颗粒)特制的一种用于INCA-mineral分析的特制样品台,用以满足尺寸、形状不一的样品进行有标样的测试需求。In order to solve the problems of the prior art, the present invention provides a special sample platform for INCA-mineral analysis specially made for geoscience block samples and target samples (powder mineral particles) to meet Samples of different sizes and shapes need to be tested with standard samples.

本发明提供了一种用于矿物相自动识别分析的样品台,为纯Cu材料制作,样品台底座形状与扫描电镜样品室内样品槽的形状匹配,样品台中间开有样品托,样品托为空心圆柱体,空心圆柱体内部尺寸与标准一英寸靶尺寸相当,高度可以满足绝大多数靶材的厚度。The invention provides a sample stage for automatic identification and analysis of mineral phases, which is made of pure Cu material. The shape of the base of the sample stage matches the shape of the sample groove in the sample room of the scanning electron microscope. There is a sample holder in the middle of the sample stage, and the sample holder is hollow. Cylinder, the internal size of the hollow cylinder is equivalent to the size of a standard one-inch target, and the height can meet the thickness of most targets.

样品托中安装有可拆卸、可调节的卡槽,用以安装块状岩石样品。卡槽中安装有两组移动挡板,两组可移动挡板用以安装不同尺寸的块状岩石样品。A detachable and adjustable slot is installed in the sample holder for installing massive rock samples. Two sets of movable baffles are installed in the card slot, and the two sets of movable baffles are used to install massive rock samples of different sizes.

卡槽底部通过调节螺丝与样品托连接,卡槽侧面设有至少两组样品固定螺丝,对样品进行高度调节,以保证样品上表面与样品台的上表面平行且在同一高度。The bottom of the card slot is connected to the sample holder through adjustment screws, and at least two sets of sample fixing screws are provided on the side of the card slot to adjust the height of the sample to ensure that the upper surface of the sample is parallel to and at the same height as the upper surface of the sample stage.

样品台侧壁上表面镶嵌有Co标样,Co标样的上表面与样品台上表面在同一水平面,进而与样品表面在同一高度上,以满足样品能够在同一个工作距离(WD)下通过Co标样进行校准。The upper surface of the side wall of the sample stage is inlaid with a Co standard sample, and the upper surface of the Co standard sample is at the same level as the upper surface of the sample stage, and then at the same height as the sample surface, so that the sample can pass through at the same working distance (WD) Co standard samples for calibration.

本发明有益效果在于:提供了一种专门针对地学类的块状样品、靶材样品(粉末状矿物颗粒)特制的一种用于INCA-mineral分析的特制样品台,用以满足尺寸、形状不一的样品进行有标样的测试需求。The beneficial effect of the present invention is that it provides a special sample stage for INCA-mineral analysis specially made for geoscience block samples and target samples (powder mineral particles) to meet the requirements of different sizes and shapes. One sample needs to be tested with a standard sample.

附图说明Description of drawings

图1为样品台俯视图。Figure 1 is a top view of the sample stage.

图2为卡槽结构俯视图。Fig. 2 is a top view of the slot structure.

图3为样品台底座示意图。Figure 3 is a schematic diagram of the base of the sample stage.

图4为样品台侧视图。Figure 4 is a side view of the sample stage.

图5为样品台主视图。Figure 5 is a front view of the sample stage.

具体实施方式detailed description

本发明提供了一种用于矿物相自动识别分析的样品台,为纯Cu材料制作,样品台底座如图3所示,形状与扫描电镜样品室内样品槽的形状匹配,样品台中间开有高度可调节的样品托,样品托为空心圆柱体,如图4和图5所示,空心圆柱体内部尺寸与标准一英寸靶尺寸相当,高度可以满足绝大多数靶材的厚度。The invention provides a sample stage for automatic identification and analysis of mineral phases, which is made of pure Cu material. The base of the sample stage is shown in Figure 3, and its shape matches the shape of the sample groove in the sample chamber of the scanning electron microscope. Adjustable sample holder, the sample holder is a hollow cylinder, as shown in Figure 4 and Figure 5, the internal size of the hollow cylinder is equivalent to the size of a standard one-inch target, and the height can meet the thickness of most targets.

样品托中安装有可拆卸、可调节的卡槽,如图2所示,用以安装块状岩石样品。卡槽中安装有两组移动挡板,两组可移动挡板用以安装不同尺寸的块状岩石样品。A detachable and adjustable slot is installed in the sample holder, as shown in Figure 2, for installing massive rock samples. Two sets of movable baffles are installed in the card slot, and the two sets of movable baffles are used to install massive rock samples of different sizes.

卡槽底部通过调节螺丝与样品托连接,卡槽侧面设有至少两组样品固定螺丝,对样品进行高度调节,以保证样品上表面与样品台的上表面平行且在同一高度。The bottom of the card slot is connected to the sample holder through adjustment screws, and at least two sets of sample fixing screws are provided on the side of the card slot to adjust the height of the sample to ensure that the upper surface of the sample is parallel to and at the same height as the upper surface of the sample stage.

样品台侧壁上表面镶嵌有Co标样,如图1所示,Co标样的上表面与样品台上表面在同一水平面,进而与样品表面在同一高度上,以满足样品能够在同一个工作距离(WD)下通过Co标样进行校准。The upper surface of the side wall of the sample stage is inlaid with a Co standard sample, as shown in Figure 1, the upper surface of the Co standard sample is at the same level as the upper surface of the sample stage, and then at the same height as the sample surface, so that the samples can be placed on the same working surface. Calibration by Co standard at distance (WD).

本发明具体应用途径很多,以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以作出若干改进,这些改进也应视为本发明的保护范围。There are many specific application approaches of the present invention, and the above description is only a preferred embodiment of the present invention. It should be pointed out that for those of ordinary skill in the art, some improvements can also be made without departing from the principles of the present invention. Improvements should also be regarded as the protection scope of the present invention.

Claims (4)

1. it is a kind of for mineral facies automatic identification analysis sample stage, it is characterised in that:Sample stage base shape and ESEM The form fit of sample inside groove, is provided with sample carrier in the middle of sample stage, dismountable draw-in groove, draw-in groove are provided with sample carrier In two groups of moving stops are installed;Sample stage wall upper surface is inlaid with Co standard specimens, upper surface and the sample stage upper table of Co standard specimens Face is in same level.
2. it is according to claim 1 for mineral facies automatic identification analysis sample stage, it is characterised in that:Sample stage is pure Cu materials make.
3. it is according to claim 1 for mineral facies automatic identification analysis sample stage, it is characterised in that:Described sample It is hollow cylinder to hold in the palm, and one inch of target size of hollow cylinder inside dimension and standard is suitable.
4. it is according to claim 1 for mineral facies automatic identification analysis sample stage, it is characterised in that:Described draw-in groove Bottom is connected by set screw with sample carrier, and draw-in groove side is provided with least two groups sample fixed screws.
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CN117309526A (en) * 2023-10-07 2023-12-29 东北石油大学 Preparation and application methods of multi-experiment characterization rock slice

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