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CN106796400A - layered structure - Google Patents

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Publication number
CN106796400A
CN106796400A CN201580055745.0A CN201580055745A CN106796400A CN 106796400 A CN106796400 A CN 106796400A CN 201580055745 A CN201580055745 A CN 201580055745A CN 106796400 A CN106796400 A CN 106796400A
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layer
adhesive layer
resin composition
protective layer
laminated structure
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CN106796400B (en
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宫部英和
小池直之
林亮
横山裕
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Taiyo Holdings Co Ltd
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Taiyo Ink Mfg Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

Provided is a structure which can satisfy the performance required as an insulating film of a flexible printed wiring board and is suitable for a process of simultaneously forming a bending portion and a mounting portion. Also disclosed is a flexible printed wiring board which is provided with such a cured product as a protective film, for example, a cover layer or a solder resist layer. A laminated structure body, a dry film and a flexible printed circuit board using the same, the laminated structure body having: the adhesive layer (A) is formed by an alkali developable resin composition, and the protective layer (B) is formed by a photosensitive resin composition on the adhesive layer (A), wherein the ratio of the film thickness of the adhesive layer (A) to the film thickness of the protective layer (B) is 0.5-50, and the ratio of the developing speed (a) of the adhesive layer (A) to the developing speed (B) of the protective layer (B) is 1.1-100.

Description

层叠结构体layered structure

技术领域technical field

本发明涉及层叠结构体,特别是涉及可用作柔性印刷电路板的绝缘膜的层叠结构体、使用其的干膜和柔性印刷电路板。The present invention relates to a laminated structure, and particularly relates to a laminated structure usable as an insulating film of a flexible printed wiring board, a dry film using the same, and a flexible printed wiring board.

背景技术Background technique

近年来,随着由智能手机、平板终端的普及带来的电子设备的小型薄型化,逐渐开始需要电路基板的小空间化。因此,能够弯曲收纳的柔性印刷电路板的用途扩大,对于上述柔性印刷电路板,也需要具有高达至今为止以上的可靠性。In recent years, with the miniaturization and thinning of electronic equipment brought about by the popularization of smartphones and tablet terminals, it has gradually become necessary to reduce the space of circuit boards. Therefore, the use of flexible printed wiring boards that can be bent and stored is expanding, and the above-mentioned flexible printed wiring boards are also required to have reliability higher than hitherto.

对此,目前,作为用于确保柔性印刷电路板的绝缘可靠性的绝缘膜,广泛采用弯曲部(挠曲部)使用以耐热性和挠曲性等机械特性优异的聚酰亚胺为基体的覆盖层(例如,参照专利文献1、2)、安装部(非挠曲部)使用电绝缘性等优异且能够进行精细加工的感光性树脂组合物的混载工艺。In this regard, at present, as an insulating film for ensuring the insulation reliability of flexible printed circuit boards, polyimide, which has excellent mechanical properties such as heat resistance and flexibility, is widely used as a base for bending parts (flexure parts). A coating process in which a photosensitive resin composition that is excellent in electrical insulation and capable of fine processing is used for the cover layer (for example, refer to Patent Documents 1 and 2) and the mounting portion (non-flexing portion).

即,以耐热性和挠曲性等机械特性优异的聚酰亚胺为基体的覆盖层需要利用模具冲压进行加工,因此,不适于精细布线。因此,对于需要精细布线的芯片安装部,需要部分组合使用能够利用光刻法进行加工的碱显影型感光性树脂组合物(阻焊剂)。That is, a cover layer based on a polyimide having excellent mechanical properties such as heat resistance and flexibility needs to be processed by die pressing, and thus is not suitable for fine wiring. Therefore, it is necessary to partially use an alkali-developing type photosensitive resin composition (soldering resist) that can be processed by photolithography in combination for a chip mounting portion that requires fine wiring.

现有技术文献prior art literature

专利文献patent documents

专利文献1:日本特开昭62-263692号公报Patent Document 1: Japanese Patent Application Laid-Open No. 62-263692

专利文献2:日本特开昭63-110224号公报Patent Document 2: Japanese Patent Application Laid-Open No. 63-110224

发明内容Contents of the invention

发明要解决的问题The problem to be solved by the invention

如此,在柔性印刷电路板的制造工序中,不得不采用贴合覆盖层的工序与形成阻焊层的工序的混载工艺,存在成本性和操作性较差的问题。In this way, in the manufacturing process of the flexible printed circuit board, it is necessary to adopt a mixed process of the process of laminating the cover layer and the process of forming the solder resist layer, and there is a problem of poor cost and operability.

对此,研究了将作为阻焊层的绝缘膜或作为覆盖层的绝缘膜适用于柔性印刷电路板的阻焊层和覆盖层这两者,但是能够充分满足两者的要求性能的材料还未实现实用化。特别是对于柔性印刷电路板,寻求实现兼具作为阻焊层的绝缘膜所要求的碱显影性、和作为覆盖层的绝缘膜所要求的耐热性和挠曲性等机械特性这两者的原材料。In this regard, the application of an insulating film as a solder resist layer or an insulating film as a cover layer to both the solder resist layer and the cover layer of a flexible printed circuit board has been studied, but materials that can sufficiently satisfy the required performance of both have not yet been developed. Realize practicality. Especially for flexible printed circuit boards, it is necessary to achieve both the alkali developability required for the insulating film as the solder resist layer and the mechanical properties such as heat resistance and flexibility required for the insulating film as the cover layer. raw materials.

因此,本发明的目的在于,提供一种结构体,其满足作为柔性印刷电路板的绝缘膜的要求性能,也适于同时形成弯曲部与安装部的工艺,另外,提供具备其固化物作为保护膜、例如覆盖层或阻焊层的柔性印刷电路板。Therefore, the object of the present invention is to provide a structure that satisfies the required performance as an insulating film of a flexible printed circuit board, is also suitable for the process of simultaneously forming a bending portion and a mounting portion, and provides a structure having its cured product as a protective film. Films, such as coverlays or solder masks for flexible printed circuit boards.

用于解决问题的方案solutions to problems

为了解决前述课题,本发明的特征在于,具有:由碱显影性树脂组合物形成的粘接层(A)、和在该粘接层(A)上形成的由感光性树脂组合物形成的保护层(B),前述粘接层(A)与前述保护层(B)的膜厚的比例为A/B=0.5~50,前述粘接层(A)的显影速度(a)与前述保护层(B)的显影速度(b)的比例为a/b=1.1~100。In order to solve the aforementioned problems, the present invention is characterized by comprising: an adhesive layer (A) formed of an alkali-developable resin composition; and a protective layer formed on the adhesive layer (A) formed of a photosensitive resin composition. layer (B), the film thickness ratio of the aforementioned adhesive layer (A) to the aforementioned protective layer (B) is A/B=0.5 to 50, and the developing speed (a) of the aforementioned adhesive layer (A) and the aforementioned protective layer (B) The ratio of the developing speed (b) is a/b=1.1-100.

本发明的层叠结构体中,前述粘接层(A)和前述保护层(B)优选均能够通过光照射进行图案化。另外,本发明的层叠结构体可以适宜用于柔性印刷电路板的挠曲部和非挠曲部中的至少任一者,具体而言,用于柔性印刷电路板的覆盖层、阻焊层和层间绝缘材料中的至少任一者的用途是有用的。In the laminated structure of the present invention, it is preferable that both the adhesive layer (A) and the protective layer (B) can be patterned by light irradiation. In addition, the laminated structure of the present invention can be suitably used for at least any of the flexible printed wiring board's flexure and non-flexible sections, specifically, for a flexible printed wiring board's cover layer, solder resist, and The use of at least any one of the interlayer insulating materials is useful.

另外,本发明的干膜的特征在于,前述本发明的层叠结构体的至少单面以薄膜支撑或保护。In addition, the dry film of the present invention is characterized in that at least one side of the laminated structure of the present invention is supported or protected by a film.

进而,本发明的柔性印刷电路板的特征在于,其具备绝缘膜,该绝缘膜是在柔性印刷电路基板上直接形成前述本发明的层叠结构体的层、或者以前述本发明的干膜形成层叠结构体的层,通过光照射进行图案化,并利用显影液使图案一次性形成而成的。Furthermore, the flexible printed circuit board of the present invention is characterized in that it includes an insulating film in which the layer of the above-mentioned laminated structure of the present invention is directly formed on the flexible printed circuit board, or a layer of the above-mentioned dry film of the present invention is used to form a laminate. The layer of the structure is patterned by light irradiation, and the pattern is formed at one time using a developer.

需要说明的是,本发明中,“图案”是指图案状的固化物、即绝缘膜。In addition, in this invention, a "pattern" means the hardened|cured material of a pattern shape, ie, an insulating film.

发明的效果The effect of the invention

根据本发明,能够实现满足作为柔性印刷电路板的绝缘膜的要求性能、也适于同时形成弯曲部与安装部的工艺的层叠结构体;以及使用其的干膜;和,柔性印刷电路板。According to the present invention, it is possible to realize a laminated structure that satisfies the required performance of an insulating film as a flexible printed circuit board and is also suitable for a process of simultaneously forming a bending portion and a mounting portion; a dry film using the same; and a flexible printed circuit board.

附图说明Description of drawings

图1为示意性地示出本发明的柔性印刷电路板的制造方法的一例的工序图。FIG. 1 is a process diagram schematically showing an example of a method for manufacturing a flexible printed wiring board according to the present invention.

具体实施方式detailed description

以下,参照附图并对本发明的实施方式进行详细说明。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(层叠结构体)(laminated structure)

本发明的层叠结构体具有:由碱显影性树脂组合物形成的粘接层(A)、和在该粘接层(A)上形成的由感光性树脂组合物形成的保护层(B),前述粘接层(A)与前述保护层(B)的膜厚的比例为A/B=0.5~50,前述粘接层(A)的显影速度(a)与前述保护层(B)的显影速度(b)的比例为a/b=1.1~100。The laminated structure of the present invention has an adhesive layer (A) formed of an alkali-developable resin composition, and a protective layer (B) formed of a photosensitive resin composition formed on the adhesive layer (A), The film thickness ratio of the adhesive layer (A) to the protective layer (B) is A/B=0.5 to 50, and the developing speed (a) of the adhesive layer (A) is different from the developing speed of the protective layer (B). The ratio of speed (b) is a/b=1.1-100.

为了使用碱显影液进行图案化,树脂组合物需要具有碱溶解性。为层叠结构体时,若在保护层中使用耐热性优异的树脂组合物,则难以对上述耐热性优异的树脂组合物赋予溶解性,因此,显影速度变迟缓,其结果,存在图案化变得困难的问题。In order to perform patterning using an alkali developing solution, the resin composition needs to have alkali solubility. In the case of a laminated structure, if a resin composition with excellent heat resistance is used for the protective layer, it is difficult to impart solubility to the resin composition with excellent heat resistance, so the development speed becomes slow, and as a result, patterning occurs. problem that becomes difficult.

本发明人等为了解决该课题,着眼于保护层与粘接层的膜厚和显影速度并进行了深入研究,结果发现,通过使保护层与粘接层的膜厚的比例、以及保护层与粘接层的显影速度的比例分别在前述范围内,从而能够解决前述课题,至此完成了本发明。In order to solve this problem, the inventors of the present invention focused on the film thickness and developing speed of the protective layer and the adhesive layer and conducted intensive research. The ratios of the developing speeds of the adhesive layers were within the above-mentioned ranges, and the above-mentioned problems could be solved, and the present invention has been accomplished thus far.

即,发现:将使用显影速度迟缓的树脂组合物的保护层层叠到使用与该保护层的树脂组合物相比显影速度快的树脂组合物的粘接层上,使两者的膜厚的比例和显影速度的比例分别在前述范围内时,即使保护层的显影速度迟缓而难以通过碱显影进行图案化、以及出现残渣,粘接层的显影速度也快,结果能够将两者完全冲洗,使层叠结构整体的显影速度为现实的范围内。That is, it was found that a protective layer using a resin composition having a slow developing speed is laminated on an adhesive layer using a resin composition having a fast developing speed compared with the resin composition of the protective layer, and the ratio of the film thicknesses of the two When the ratios to the developing speed are within the above-mentioned ranges, even if the developing speed of the protective layer is slow, it is difficult to pattern by alkali development, and residues appear, the developing speed of the adhesive layer is also fast, and as a result, both can be completely rinsed, making The development speed of the entire laminated structure is within a realistic range.

为了更良好地兼备碱显影性与耐热性和挠曲性等机械特性,前述膜厚的比例为A/B=0.5~50、优选为A/B=1.0~30、更优选为A/B=2.0~10,另外,前述显影速度的比例为a/b=1.1~100、优选为a/b=2.0~50、更优选为a/b=3.0~30。In order to achieve better balance between alkali developability and mechanical properties such as heat resistance and flexibility, the ratio of the aforementioned film thickness is A/B=0.5 to 50, preferably A/B=1.0 to 30, more preferably A/B =2.0-10, Moreover, the ratio of the said developing speed is a/b=1.1-100, Preferably it is a/b=2.0-50, More preferably, it is a/b=3.0-30.

膜厚的比例为A/B=50以下时,层叠结构体的层厚中具有耐热性的保护层(B)所占的比例较大,因此,显影性良好且也能得到充分的耐热性。另外,为A/B=0.5以上时,显影性良好的粘接层(A)的比例较大,因此,耐热性良好且能够通过碱显影进行图案化。When the ratio of the film thickness is A/B=50 or less, the ratio of the heat-resistant protective layer (B) in the layer thickness of the laminated structure is large, so that the developability is good and sufficient heat resistance can also be obtained. sex. Moreover, since the ratio of the adhesive layer (A) with favorable developability is large when it is A/B=0.5 or more, heat resistance is favorable and patterning by alkali image development is possible.

显影速度的比例在a/b=1.1以上时,相对于显影困难的保护层(B),粘接层(A)的显影速度相对变快,因此,能够通过碱显影进行图案化。另外,为a/b=100以下时,粘接层(A)对碱水溶液的溶解性适当,图案形状稳定,因此耐镀覆性等各特性也变得良好。When the ratio of development speed is a/b=1.1 or more, since the development speed of an adhesive layer (A) becomes relatively fast with respect to the protective layer (B) which development is difficult, patterning by alkali image development is possible. Moreover, when it is a/b=100 or less, the solubility to the aqueous alkali solution of an adhesive layer (A) becomes appropriate, and a pattern shape is stable, Therefore Various characteristics, such as plating resistance, also become favorable.

层叠结构体显影时,将保护层和粘接层的各层溶解于碱水溶液中所需要的时间设为显影时间[秒],将各层的膜厚设为膜厚[μm]时,显影速度由下述式表示。When developing a laminated structure, the time required to dissolve each layer of the protective layer and the adhesive layer in an alkaline aqueous solution is defined as the developing time [second], and the film thickness of each layer is defined as the film thickness [μm], the developing speed represented by the following formula.

显影速度[μm/秒]=膜厚[μm]/显影时间[秒]Developing speed [μm/sec] = film thickness [μm]/developing time [sec]

(保护层(B))(protective layer (B))

保护层(B)的感光性树脂组合物的组成没有特别的限制,例如,可以使用以往作为阻焊剂组合物所使用的、包含含羧基树脂或含羧基感光性树脂、具有烯属不饱和键的化合物、光聚合引发剂和热反应性化合物的光固化性热固性树脂组合物;包含含羧基树脂、光产碱剂和热反应性化合物的感光性热固性树脂组合物。The composition of the photosensitive resin composition of the protective layer (B) is not particularly limited. For example, a composition containing a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin and having an ethylenically unsaturated bond, which is conventionally used as a solder resist composition, can be used. A photocurable thermosetting resin composition comprising a compound, a photopolymerization initiator and a thermally reactive compound; a photosensitive thermosetting resin composition comprising a carboxyl-containing resin, a photobase generator and a thermally reactive compound.

其中,保护层(B)优选由包含耐热性、强韧性优异的具有酰亚胺环或酰亚胺前体骨架的碱溶解性树脂的树脂组合物形成。Among them, the protective layer (B) is preferably formed of a resin composition containing an alkali-soluble resin having an imide ring or an imide precursor skeleton excellent in heat resistance and toughness.

本发明中,具有酰亚胺环或酰亚胺前体骨架的碱溶解性树脂是指,具有羧基、酸酐基等碱溶解性基团和酰亚胺环或酰亚胺前体骨架的树脂。对于酰亚胺环或酰亚胺前体骨架导入到该碱溶解性树脂中,可以使用公知常用的方法。例如可举出:使羧酸酐成分与胺成分和异氰酸酯成分中的任一者或两者反应而得到的树脂。酰亚胺化可以通过热酰亚胺化来进行,也可以通过化学酰亚胺化来进行,还可以组合使用它们来制造。In the present invention, the alkali-soluble resin having an imide ring or an imide precursor skeleton refers to a resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring or an imide precursor skeleton. For the introduction of the imide ring or the imide precursor skeleton into the alkali-soluble resin, known and commonly used methods can be used. For example, resin obtained by making a carboxylic anhydride component react with either one or both of an amine component and an isocyanate component is mentioned. Imidation may be performed by thermal imidation, chemical imidation may be performed, and it may manufacture using these in combination.

其中,作为羧酸酐成分,可举出:四羧酸酐、三羧酸酐等,但并不限定于这些酸酐,只要为具有与氨基、异氰酸酯基反应的酸酐基和羧基的化合物,则包括其衍生物在内均可以使用。另外,这些羧酸酐成分可以单独使用或组合使用。Among them, the carboxylic anhydride component includes tetracarboxylic anhydride, tricarboxylic anhydride, etc., but is not limited to these anhydrides, and derivatives thereof are included as long as they have an acid anhydride group and a carboxyl group that react with an amino group or an isocyanate group. Can be used inside. In addition, these carboxylic anhydride components can be used individually or in combination.

作为四羧酸酐,例如可举出:均苯四酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-联苯四羧酸二酐、4,4’-氧双邻苯二甲酸二酐、1,2,3,4-苯四羧酸二酐、3,3”,4,4”-三联苯四羧酸二酐、3,3’”,4,4’”-四联苯四羧酸二酐、3,3””,4,4””-五联苯四羧酸二酐、亚甲基-4,4’-双邻苯二甲酸二酐、1,1-乙叉基-4,4’-双邻苯二甲酸二酐、2,2-丙叉基-4,4’-双邻苯二甲酸二酐、1,2-亚乙基-4,4’-双邻苯二甲酸二酐、1,3-三亚甲基-4,4’-双邻苯二甲酸二酐、1,4-四亚甲基-4,4’-双邻苯二甲酸二酐、1,5-五亚甲基-4,4’-双邻苯二甲酸二酐、硫代-4,4’-双邻苯二甲酸二酐、磺酰基-4,4’-双邻苯二甲酸二酐、1,3-双(3,4-二羧基苯基)-1,1,3,3-四甲基硅氧烷二酐、1,3-双(3,4-二羧基苯基)苯二酐、1,4-双(3,4-二羧基苯基)苯二酐、1,3-双(3,4-二羧基苯氧基)苯二酐、1,4-双(3,4-二羧基苯氧基)苯二酐、1,3-双〔2-(3,4-二羧基苯基)-2-丙基〕苯二酐、1,4-双〔2-(3,4-二羧基苯基)-2-丙基〕苯二酐、双〔3-(3,4-二羧基苯氧基)苯基〕甲烷二酐、2,3,6,7-萘四羧酸二酐、1,2,5,6-萘四羧酸二酐、3,4,9,10-苝四羧酸二酐、2,3,6,7-蒽四羧酸二酐、1,2,7,8-菲四羧酸二酐、1,2,3,4-丁烷四羧酸二酐、1,2,3,4-环丁烷四羧酸二酐、环戊烷四羧酸二酐、环己烷-1,2,3,4-四羧酸二酐、环己烷-1,2,4,5-四羧酸二酐、3,3’,4,4’-双环己基四羧酸二酐、羰基-4,4’-双(环己烷-1,2-二羧酸)二酐、亚甲基-4,4’-双(环己烷-1,2-二羧酸)二酐、1,2-亚乙基-4,4’-双(环己烷-1,2-二羧酸)二酐、1,1-乙叉基-4,4’-双(环己烷-1,2-二羧酸)二酐、2,2-丙叉基-4,4’-双(环己烷-1,2-二羧酸)二酐、乙二醇双(偏苯三酸二酐)、1,2-(亚乙基)双(偏苯三酸酐)、1,3-(三亚甲基)双(偏苯三酸酐)、1,4-(四亚甲基)双(偏苯三酸酐)、1,5-(五亚甲基)双(偏苯三酸酐)、1,6-(六亚甲基)双(偏苯三酸酐)、1,7-(七亚甲基)双(偏苯三酸酐)、1,8-(八亚甲基)双(偏苯三酸酐)、1,9-(九亚甲基)双(偏苯三酸酐)、1,10-(十亚甲基)双(偏苯三酸酐)、1,12-(十二亚甲基)双(偏苯三酸酐)、1,16-(十六亚甲基)双(偏苯三酸酐)、1,18-(十八亚甲基)双(偏苯三酸酐)等。Examples of tetracarboxylic anhydrides include pyromellitic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 3,3',4,4'-biphenyltetra Carboxylic dianhydride, 4,4'-oxydiphthalic dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, 3,3",4,4"-terphenyltetracarboxylic dicarboxylic acid anhydride, 3,3'",4,4'"-quaterphenyltetracarboxylic dianhydride, 3,3"",4,4""-pentaphenyltetracarboxylic dianhydride, methylene-4, 4'-Diphthalic dianhydride, 1,1-ethylidene-4,4'-diphthalic dianhydride, 2,2-propylidene-4,4'-diphthalic acid Dianhydride, 1,2-ethylene-4,4'-diphthalic dianhydride, 1,3-trimethylene-4,4'-bisphthalic dianhydride, 1,4-tetra Methylene-4,4'-bisphthalic dianhydride, 1,5-pentamethylene-4,4'-bisphthalic dianhydride, Thio-4,4'-bisphthalic dianhydride Dicarboxylic dianhydride, sulfonyl-4,4'-diphthalic dianhydride, 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethylsiloxane Alkanedianhydride, 1,3-bis(3,4-dicarboxyphenyl)phthalic anhydride, 1,4-bis(3,4-dicarboxyphenyl)phthalic anhydride, 1,3-bis(3, 4-dicarboxyphenoxy)phthalic anhydride, 1,4-bis(3,4-dicarboxyphenoxy)phthalic anhydride, 1,3-bis[2-(3,4-dicarboxyphenyl) -2-Propyl]phthalic anhydride, 1,4-bis[2-(3,4-dicarboxyphenyl)-2-propyl]phthalic anhydride, bis[3-(3,4-dicarboxyphenyl) Oxy)phenyl]methane dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 1,2,5,6-naphthalene tetracarboxylic dianhydride, 3,4,9,10-perylenetetracarboxylic dianhydride Carboxylic dianhydride, 2,3,6,7-anthracene tetracarboxylic dianhydride, 1,2,7,8-phenanthrene tetracarboxylic dianhydride, 1,2,3,4-butanetetracarboxylic dianhydride , 1,2,3,4-cyclobutane tetracarboxylic dianhydride, cyclopentane tetracarboxylic dianhydride, cyclohexane-1,2,3,4-tetracarboxylic dianhydride, cyclohexane-1 ,2,4,5-tetracarboxylic dianhydride, 3,3',4,4'-bicyclohexyltetracarboxylic dianhydride, carbonyl-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, methylene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,2-ethylene-4,4'-bis(cyclohexane- 1,2-dicarboxylic acid) dianhydride, 1,1-ethylidene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, 2,2-propylidene-4 ,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, ethylene glycol bis(trimellitic dianhydride), 1,2-(ethylene)bis(trimellitic anhydride), 1, 3-(trimethylene)bis(trimellitic anhydride), 1,4-(tetramethylene)bis(trimellitic anhydride), 1,5-(pentamethylene)bis(trimellitic anhydride), 1,6-(hexamethylene Base) bis(trimellitic anhydride), 1,7-(heptamethylene)bis(trimellitic anhydride), 1,8-(octamethylene)bis(trimellitic anhydride), 1,9-( Nonamethylene)bis(trimellitic anhydride), 1,10-(decamethylene)bis(trimellitic anhydride), 1,12-(dodecamethylene)bis(trimellitic anhydride), 1,16-(hexadecyl methylene base) bis(trimellitic anhydride), 1,18-(octadecamethylene)bis(trimellitic anhydride), etc.

作为三羧酸酐,例如可举出:偏苯三酸酐、核氢化偏苯三酸酐等。As a tricarboxylic anhydride, trimellitic anhydride, a nucleohydrogenated trimellitic anhydride, etc. are mentioned, for example.

作为胺成分,可以使用:脂肪族二胺、芳香族二胺等二胺;脂肪族聚醚胺等多元胺,但并不限定于这些胺。另外,这些胺成分可以单独使用或组合使用。As the amine component, diamines such as aliphatic diamine and aromatic diamine, and polyamines such as aliphatic polyetheramine can be used, but are not limited to these amines. In addition, these amine components can be used individually or in combination.

作为二胺,例如可举出:对苯二胺(PPD)、1,3-二氨基苯、2,4-甲苯二胺、2,5-甲苯二胺、2,6-甲苯二胺等1个苯核的二胺、4,4’-二氨基二苯醚、3,3’-二氨基二苯醚、3,4’-二氨基二苯醚等二氨基二苯醚类、4,4’-二氨基二苯基甲烷、3,3’-二甲基-4,4’-二氨基联苯、2,2’-二甲基-4,4’-二氨基联苯、3,3’-二氨基二苯醚、3,4’-二氨基二苯醚、4,4’-二氨基二苯醚、3,3’-二氨基二苯基硫醚、3,4’-二氨基二苯基硫醚等2个苯核的二胺、1,3-双(3-氨基苯基硫醚)苯、1,3-双(4-氨基苯基硫醚)苯、1,4-双(4-氨基苯基硫醚)苯等3个苯核的二胺、3,3’-双(3-氨基苯氧基)联苯、3,3’-双(4-氨基苯氧基)联苯、4,4’-双(3-氨基苯氧基)联苯、2,2-双〔3-(3-氨基苯氧基)苯基〕丙烷、2,2-双〔3-(4-氨基苯氧基)苯基〕丙烷、2,2-双〔4-(3-氨基苯氧基)苯基〕丙烷、2,2-双〔4-(4-氨基苯氧基)苯基〕丙烷等4个苯核的二胺等芳香族二胺、1,2-二氨基乙烷、1,3-二氨基丙烷、1,4-二氨基丁烷、1,5-二氨基戊烷、1,6-二氨基己烷等脂肪族二胺,作为脂肪族聚醚胺,可举出:乙二醇和/或丙二醇系的多元胺等。另外,如下所述,还可以使用具有羧基的胺。Examples of diamines include p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, 2,6-toluenediamine, etc. 1 Diamines with a benzene nucleus, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether and other diaminodiphenyl ethers, 4,4 '-Diaminodiphenylmethane, 3,3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl-4,4'-diaminobiphenyl, 3,3 '-Diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl sulfide, 3,4'-diamino Diamines with 2 benzene nuclei such as diphenyl sulfide, 1,3-bis(3-aminophenyl sulfide)benzene, 1,3-bis(4-aminophenyl sulfide)benzene, 1,4- Diamines with 3 benzene nuclei such as bis(4-aminophenylsulfide)benzene, 3,3'-bis(3-aminophenoxy)biphenyl, 3,3'-bis(4-aminophenoxy ) biphenyl, 4,4'-bis(3-aminophenoxy)biphenyl, 2,2-bis[3-(3-aminophenoxy)phenyl]propane, 2,2-bis[3- (4-aminophenoxy)phenyl]propane, 2,2-bis[4-(3-aminophenoxy)phenyl]propane, 2,2-bis[4-(4-aminophenoxy) Aromatic diamines such as diamines with 4 benzene nuclei such as phenyl]propane, 1,2-diaminoethane, 1,3-diaminopropane, 1,4-diaminobutane, 1,5-diamino Examples of aliphatic diamines such as pentane and 1,6-diaminohexane, and aliphatic polyetheramines include ethylene glycol and/or propylene glycol-based polyamines, and the like. In addition, as described below, an amine having a carboxyl group can also be used.

作为具有羧基的胺,可举出:3,5-二氨基苯甲酸、2,5-二氨基苯甲酸、3,4-二氨基苯甲酸等二氨基苯甲酸类;3,5-双(3-氨基苯氧基)苯甲酸、3,5-双(4-氨基苯氧基)苯甲酸等氨基苯氧基苯甲酸类;3,3’-二氨基-4,4’-二羧基联苯等羧基联苯化合物类;3,3’-二氨基-4,4’-二羧基二苯基甲烷、3,3’-二羧基-4,4’-二氨基二苯基甲烷、2,2-双[4-氨基-3-羧基苯基]丙烷等羧基二苯基烷烃类;3,3’-二氨基-4,4’-二羧基二苯醚、4,4’-二氨基-3,3’-二羧基二苯醚等羧基二苯醚化合物;3,3’-二氨基-4,4’-二羧基二苯基砜、4,4’-二氨基-3,3’-二羧基二苯基砜等二苯基砜化合物等。Examples of the amine having a carboxyl group include: diaminobenzoic acids such as 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, and 3,4-diaminobenzoic acid; 3,5-bis(3 -aminophenoxy)benzoic acid, 3,5-bis(4-aminophenoxy)benzoic acid and other aminophenoxybenzoic acids; 3,3'-diamino-4,4'-dicarboxybiphenyl Equal carboxybiphenyl compounds; 3,3'-diamino-4,4'-dicarboxydiphenylmethane, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2 -Carboxydiphenyl alkanes such as bis[4-amino-3-carboxyphenyl]propane; 3,3'-diamino-4,4'-dicarboxydiphenyl ether, 4,4'-diamino-3 ,3'-dicarboxydiphenyl ether and other carboxydiphenyl ether compounds; 3,3'-diamino-4,4'-dicarboxydiphenyl sulfone, 4,4'-diamino-3,3'-di Diphenylsulfone compounds such as carboxyldiphenylsulfone, etc.

作为异氰酸酯成分,可以使用:芳香族二异氰酸酯以及其异构体、多聚体、脂肪族二异氰酸酯类、脂环式二异氰酸酯类以及其异构体等二异氰酸酯、其他通用的二异氰酸酯类,但并不限定于这些异氰酸酯。另外,这些异氰酸酯成分可以单独使用或组合使用。As the isocyanate component, diisocyanates such as aromatic diisocyanates and their isomers and polymers, aliphatic diisocyanates, alicyclic diisocyanates and their isomers, and other general-purpose diisocyanates can be used. It is not limited to these isocyanates. In addition, these isocyanate components can be used individually or in combination.

作为二异氰酸酯,例如可举出:4,4’-二苯基甲烷二异氰酸酯、甲苯二异氰酸酯、萘二异氰酸酯、亚二甲苯基二异氰酸酯、联苯二异氰酸酯、二苯砜二异氰酸酯、二苯醚二异氰酸酯等芳香族二异氰酸酯以及其异构体、多聚体、六亚甲基二异氰酸酯、异佛尔酮二异氰酸酯、二环己基甲烷二异氰酸酯等脂肪族二异氰酸酯类;或将芳香族二异氰酸酯氢化而成的脂环式二异氰酸酯类以及异构体、或其他通用的二异氰酸酯类。Examples of diisocyanate include: 4,4'-diphenylmethane diisocyanate, toluene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, diphenyl ether Aromatic diisocyanate such as diisocyanate and its isomers, polymers, hexamethylene diisocyanate, isophorone diisocyanate, dicyclohexylmethane diisocyanate and other aliphatic diisocyanate; or aromatic diisocyanate Hydrogenated alicyclic diisocyanates and isomers, or other general-purpose diisocyanates.

以上说明的具有酰亚胺环或酰亚胺前体骨架的碱溶解性树脂可以具有酰胺键。其可以为使异氰酸酯与羧酸反应而得到的酰胺键,也可以为由其他反应所得的酰胺键。进而,可以具有由其他加成和缩合形成的键。The alkali-soluble resin having an imide ring or an imide precursor skeleton described above may have an amide bond. It may be an amide bond obtained by reacting an isocyanate and a carboxylic acid, or may be an amide bond obtained by another reaction. Furthermore, it may have a bond formed by other addition and condensation.

另外,对于酰亚胺环或酰亚胺前体骨架导入到该碱溶解性树脂中,可以使用公知常用的、具有羧基和酸酐基中的任一者或两者的碱溶解性聚合物、低聚物、单体,例如,为将这些公知常用的碱溶解性树脂类单独地或与上述羧酸酐成分组合,并与上述胺/异氰酸酯类反应而得到的树脂。In addition, for the introduction of imide ring or imide precursor skeleton into the alkali-soluble resin, known and commonly used alkali-soluble polymers having either or both of carboxyl groups and acid anhydride groups, low Polymers and monomers are, for example, resins obtained by reacting these well-known and commonly used alkali-soluble resins alone or in combination with the above-mentioned carboxylic anhydride components and the above-mentioned amines/isocyanates.

这种具有碱溶解性基团和酰亚胺环或酰亚胺前体骨架的碱溶解性树脂的合成中,可以使用公知常用的有机溶剂。作为上述有机溶剂,只要是不会与作为原料的羧酸酐类、胺类、异氰酸酯类反应,且可溶解这些原料的溶剂就没有问题,对于其结构没有特别的限制。其中,从原料的溶解性高的方面出发,优选:N,N-二甲基甲酰胺、N,N-二甲基乙酰胺、N-甲基-2-吡咯烷酮、二甲基亚砜、γ-丁内酯等非质子性溶剂。In the synthesis of such an alkali-soluble resin having an alkali-soluble group and an imide ring or an imide precursor skeleton, known and commonly used organic solvents can be used. As the above-mentioned organic solvent, there is no problem as long as it does not react with carboxylic acid anhydrides, amines, and isocyanates as raw materials and can dissolve these raw materials, and its structure is not particularly limited. Among them, N,N-dimethylformamide, N,N-dimethylacetamide, N-methyl-2-pyrrolidone, dimethyl sulfoxide, γ - Aprotic solvents such as butyrolactone.

对于以上说明的具有羧基或酸酐基等碱溶解性基团和酰亚胺环或酰亚胺前体骨架的碱溶解性树脂,为了应对光刻法工序,其酸值优选为20~200mgKOH/g、更优选为60~150mgKOH/g。在该酸值为20mgKOH/g以上时,对于碱的溶解性增加,显影性变得良好,进而,与光照射后的热固化成分的交联度变高,因此,可以得到充分的显影对比度。另外,在该酸值为200mgKOH/g以下时,能够抑制后述的光照射后的PEB(曝光后烘焙(POST EXPOSUREBAKE))工序中的所谓的热雾化,工艺裕量(process margin)变大。The alkali-soluble resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring or an imide precursor skeleton described above preferably has an acid value of 20 to 200 mgKOH/g in order to cope with the photolithography process. , More preferably 60 to 150 mgKOH/g. When the acid value is 20 mgKOH/g or more, the solubility to alkali increases, the developability becomes favorable, and the degree of crosslinking with the thermosetting component after light irradiation becomes high, so that sufficient development contrast can be obtained. In addition, when the acid value is 200 mgKOH/g or less, so-called thermal fogging in the PEB (POST EXPOSURE BAKE) process after light irradiation described later can be suppressed, and the process margin (process margin) becomes large. .

另外,对于该碱溶解性树脂的分子量,如果考虑显影性和固化涂膜特性,则质均分子量优选为1000~100000、更优选为2000~50000。在该分子量为1000以上时,曝光、PEB后可以得到充分的耐显影性与固化物性。另外,分子量为100000以下时,碱溶解性增加,显影性提高。In addition, the molecular weight of the alkali-soluble resin is preferably 1,000 to 100,000, and more preferably 2,000 to 50,000, in consideration of developability and cured coating film properties. When the molecular weight is 1000 or more, sufficient development resistance and cured product properties can be obtained after exposure and PEB. Moreover, when molecular weight is 100000 or less, alkali solubility increases and developability improves.

包含具有酰亚胺环或酰亚胺前体骨架的碱溶解性树脂的树脂组合物使用光产碱剂时,通常除碱溶解性树脂以外,还含有光产碱剂和热反应性化合物,使用光聚合引发剂时,除碱溶性树脂以外,还含有光聚合引发剂和具有烯属不饱和键的化合物。另外,作为树脂成分,可以组合使用含羧基的聚氨酯树脂、含羧基的酚醛清漆树脂等。When using a photobase generator in a resin composition containing an alkali-soluble resin having an imide ring or an imide precursor skeleton, it usually contains a photobase generator and a heat-reactive compound in addition to the alkali-soluble resin. In the case of the photopolymerization initiator, in addition to the alkali-soluble resin, a photopolymerization initiator and a compound having an ethylenically unsaturated bond are contained. In addition, as the resin component, a carboxyl group-containing polyurethane resin, a carboxyl group-containing novolak resin, or the like can be used in combination.

光产碱剂是通过紫外线、可见光等的光照射而分子结构发生变化或者分子裂解,从而生成可作为后述热反应性化合物的聚合反应的催化剂发挥功能的1种以上碱性物质的化合物。作为碱性物质,例如可举出:仲胺、叔胺。The photobase generator is a compound whose molecular structure is changed or molecularly cleaved by irradiation with light such as ultraviolet rays or visible light to generate one or more basic substances that can function as catalysts for polymerization reactions of thermally reactive compounds described later. As a basic substance, a secondary amine and a tertiary amine are mentioned, for example.

作为光产碱剂,例如可举出:α-氨基苯乙酮化合物;肟酯化合物;具有酰氧基亚氨基、N-甲酰化芳香族氨基、N-酰化芳香族氨基、硝基苄基氨基甲酸酯基、烷氧基苄基氨基甲酸酯基等取代基的化合物等。其中,优选肟酯化合物、α-氨基苯乙酮化合物。作为α-氨基苯乙酮化合物,特别优选具有2个以上氮原子的物质。Examples of photobase generators include: α-aminoacetophenone compounds; oxime ester compounds; Compounds with substituents such as base carbamate group, alkoxybenzyl carbamate group, etc. Among them, oxime ester compounds and α-aminoacetophenone compounds are preferable. As the α-aminoacetophenone compound, one having two or more nitrogen atoms is particularly preferable.

α-氨基苯乙酮化合物的分子中具有苯偶姻醚键,受到光照射时分子内发生裂解,生成发挥固化催化作用的碱性物质(胺)。作为α-氨基苯乙酮化合物的具体例,可以使用:(4-吗啉基苯甲酰基)-1-苄基-1-二甲基氨基丙烷(IRGACURE 369,商品名,BASF JAPANLTD.制造)、4-(甲硫基苯甲酰基)-1-甲基-1-吗啉基乙烷(IRGACURE 907,商品名,BASFJAPAN LTD.制造)、2-(二甲基氨基)-2-[(4-甲基苯基)甲基]-1-[4-(4-吗啉基)苯基]-1-丁酮(IRGACURE 379,商品名,BASF JAPAN LTD.制造)等市售的化合物或其溶液。The α-aminoacetophenone compound has a benzoin ether bond in its molecule, and when it is irradiated by light, it is cleaved in the molecule to generate a basic substance (amine) that exerts a curing catalytic effect. As a specific example of the α-aminoacetophenone compound, (4-morpholinobenzoyl)-1-benzyl-1-dimethylaminopropane (IRGACURE 369, trade name, manufactured by BASF JAPAN LTD.) can be used , 4-(methylthiobenzoyl)-1-methyl-1-morpholinoethane (IRGACURE 907, trade name, manufactured by BASFJAPAN LTD.), 2-(dimethylamino)-2-[( Commercially available compounds such as 4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone (IRGACURE 379, trade name, manufactured by BASF JAPAN LTD.), or its solution.

作为肟酯化合物,只要是通过光照射而生成碱性物质的化合物就可以任意使用。对于上述肟酯化合物,作为市售品,可举出:BASF JAPAN LTD.制造的CGI-325、IRGACUREOXE01、IRGACURE OXE02、ADEKA CORPORATION制造的N-1919、NCI-831等。另外,还可以优选使用日本专利第4344400号公报中记载的分子内具有2个肟酯基的化合物。As the oxime ester compound, any compound can be used as long as it generates a basic substance by light irradiation. As a commercial item of the said oxime ester compound, CGI-325 by BASF JAPAN LTD., Irgacure OXE01, Irgacure OXE02, N-1919 by ADEKA CORPORATION, NCI-831 etc. are mentioned. In addition, a compound having two oxime ester groups in the molecule described in Japanese Patent No. 4344400 can also be preferably used.

这种光产碱剂可以单独使用1种,也可以组合2种以上进行使用。相对于热反应性化合物100质量份,树脂组合物中的光产碱剂的配混量优选为0.1~40质量份、更优选为0.1~30质量份。为0.1质量份以上时,能够良好地得到光照射部/未照射部的耐显影性的对比度。另外,为40质量份以下时,固化物特性提高。Such a photobase generator may be used individually by 1 type, and may use it in combination of 2 or more types. The compounding quantity of the photobase generator in a resin composition becomes like this with respect to 100 mass parts of heat reactive compounds, Preferably it is 0.1-40 mass parts, More preferably, it is 0.1-30 mass parts. When it is 0.1 mass part or more, the contrast of the image development resistance of a light irradiation part / a non-irradiation part can be acquired favorably. Moreover, when it is 40 mass parts or less, hardened|cured material characteristic improves.

热反应性化合物是具有能够通过热发生固化反应的官能团的树脂,可举出:环氧树脂、多官能氧杂环丁烷化合物等。The heat-reactive compound is a resin having a functional group capable of undergoing a curing reaction by heat, and examples thereof include epoxy resins, polyfunctional oxetane compounds, and the like.

上述环氧树脂为具有环氧基的树脂,可以任意使用公知的树脂。具体而言,可举出:分子中具有2个环氧基的2官能性环氧树脂、以及分子中具有多个环氧基的多官能环氧树脂等。需要说明的是,也可以为经氢化的2官能环氧化合物。The above-mentioned epoxy resin is a resin having an epoxy group, and any known resin can be used arbitrarily. Specifically, a bifunctional epoxy resin having two epoxy groups in a molecule, a polyfunctional epoxy resin having a plurality of epoxy groups in a molecule, and the like are mentioned. In addition, hydrogenated bifunctional epoxy compounds may also be used.

作为上述环氧树脂,可举出:双酚A型环氧树脂、溴化环氧树脂、酚醛清漆型环氧树脂、双酚F型环氧树脂、氢化双酚A型环氧树脂、缩水甘油胺型环氧树脂、乙内酰脲型环氧树脂、脂环式环氧树脂、三羟基苯基甲烷型环氧树脂、联二甲苯酚型环氧树脂或联苯酚型环氧树脂或它们的混合物;双酚S型环氧树脂、双酚A酚醛清漆型环氧树脂、四羟苯基乙烷型环氧树脂、杂环式环氧树脂、邻苯二甲酸二缩水甘油酯树脂、四缩水甘油基二甲酚乙烷树脂、含萘基环氧树脂、具有双环戊二烯骨架的环氧树脂、甲基丙烯酸缩水甘油酯共聚系环氧树脂、环己基马来酰亚胺与甲基丙烯酸缩水甘油酯的共聚环氧树脂、CTBN改性环氧树脂等。Examples of the above-mentioned epoxy resin include bisphenol A epoxy resin, brominated epoxy resin, novolak epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, glycidol Amine type epoxy resin, hydantoin type epoxy resin, alicyclic epoxy resin, trishydroxyphenylmethane type epoxy resin, bixylenol type epoxy resin or biphenol type epoxy resin or their Mixture; bisphenol S type epoxy resin, bisphenol A novolak type epoxy resin, tetrahydroxyphenylethane type epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetraglycidyl Glyceryl xylenol ethane resin, naphthyl-containing epoxy resin, epoxy resin with dicyclopentadiene skeleton, glycidyl methacrylate copolymerized epoxy resin, cyclohexylmaleimide and methacrylic acid Glycidyl ester copolymerized epoxy resin, CTBN modified epoxy resin, etc.

这些环氧树脂可以单独使用1种,也可以组合使用2种以上。These epoxy resins may be used alone or in combination of two or more.

作为上述热反应性化合物的配混量,与碱溶解性树脂的当量比(羧基等碱溶解性基团:环氧基等热反应性基团)优选为1:0.1~1:10。通过设为这种配混比的范围,显影变得良好,能够容易形成精细图案。上述当量比更优选为1:0.2~1:5。As the compounding quantity of the said heat reactive compound, it is preferable that the equivalent ratio (alkali-soluble group, such as a carboxyl group: heat reactive group, such as an epoxy group) with alkali-soluble resin is 1:0.1-1:10. By setting it as the range of such a compounding ratio, image development becomes favorable, and a fine pattern can be formed easily. The said equivalent ratio is more preferably 1:0.2-1:5.

作为光聚合引发剂,可以使用公知的光聚合引发剂,例如可举出:α-氨基苯乙酮系光聚合引发剂、酰基氧化膦系光聚合引发剂、苯偶姻化合物、苯乙酮化合物、蒽醌化合物、噻吨酮化合物、缩酮化合物、二苯甲酮化合物、叔胺化合物和呫吨酮化合物等。As the photopolymerization initiator, known photopolymerization initiators can be used, and examples thereof include: α-aminoacetophenone-based photopolymerization initiators, acylphosphine oxide-based photopolymerization initiators, benzoin compounds, and acetophenone compounds. , anthraquinone compounds, thioxanthone compounds, ketal compounds, benzophenone compounds, tertiary amine compounds and xanthone compounds, etc.

另外,作为具有烯属不饱和键的化合物,可以使用公知的化合物,有:丙烯酸2-羟基乙酯、丙烯酸2-羟基丙酯等丙烯酸羟基烷酯类;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等二醇的单丙烯酸酯或二丙烯酸酯类;己二醇、三羟甲基丙烷、季戊四醇、二季戊四醇、三羟基乙基异氰脲酸酯等多元醇或它们的环氧乙烷加成物或环氧丙烷加成物等多元丙烯酸酯类;丙烯酸苯氧酯、双酚A二丙烯酸酯、以及这些酚类的环氧乙烷加成物或环氧丙烷加成物等丙烯酸酯类等。In addition, as the compound having an ethylenically unsaturated bond, known compounds can be used, including: hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; ethylene glycol, methoxytetraethylene glycol, etc. monoacrylates or diacrylates of diols such as alcohol, polyethylene glycol, and propylene glycol; Polyacrylic acid esters such as ethylene oxide adducts or propylene oxide adducts; phenoxy acrylate, bisphenol A diacrylate, and ethylene oxide adducts or propylene oxide adducts of these phenols Acrylic esters, etc.

(粘接层(A))(Adhesive layer (A))

作为构成粘接层(A)的碱显影性树脂组合物,只要是包含含有酚性羟基、硫醇基和羧基中的1种以上官能团,能以碱溶液显影的树脂的组合物即可,可以使用光固化性树脂组合物,也可以使用热固性树脂组合物。优选举出包含具有2个以上酚性羟基的化合物、含羧基树脂、具有酚性羟基和羧基的化合物、具有2个以上硫醇基的化合物的树脂组合物,可以使用公知常用的物质。As the alkali-developable resin composition constituting the adhesive layer (A), any composition may be used as long as it contains one or more functional groups of phenolic hydroxyl group, thiol group, and carboxyl group and can be developed with an alkali solution. Using a photocurable resin composition, a thermosetting resin composition can also be used. Preferable examples include a resin composition containing a compound having two or more phenolic hydroxyl groups, a carboxyl group-containing resin, a compound having a phenolic hydroxyl group and a carboxyl group, and a compound having two or more thiol groups, and known and commonly used ones can be used.

具体而言,例如可举出以往用作阻焊剂组合物的光固化性热固性树脂组合物,该光固化性热固性树脂组合物包含:含羧基树脂或含羧基感光性树脂、具有烯属不饱和键的化合物、光聚合引发剂和热反应性化合物。另外,也可以使用包含含羧基的聚氨酯树脂、具有羧基的树脂、光产碱剂和热固化成分的树脂组合物。上述树脂组合物为如下组合物:将由光产碱剂产生的碱作为催化剂,利用曝光后的加热使具有羧基的聚氨酯树脂和热固化成分进行加成反应,并利用碱溶液去除未曝光部分,由此能够显影。Specifically, for example, a photocurable thermosetting resin composition conventionally used as a solder resist composition, the photocurable thermosetting resin composition comprising: a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin, having an ethylenically unsaturated bond compounds, photopolymerization initiators and thermally reactive compounds. In addition, a resin composition containing a carboxyl group-containing polyurethane resin, a carboxyl group-containing resin, a photobase generator, and a thermosetting component can also be used. The above-mentioned resin composition is a composition as follows: the base generated by the photobase generator is used as a catalyst, the polyurethane resin having a carboxyl group and the thermosetting component are subjected to an addition reaction by heating after exposure, and the unexposed part is removed by an alkaline solution. This can be visualized.

作为构成粘接层(A)中使用的树脂组合物的各材料,除了使用公知常用的物质以外,还可以同样地使用上述保护层(B)中使用的物质。As each material constituting the resin composition used in the adhesive layer (A), in addition to using known and commonly used materials, the materials used in the above-mentioned protective layer (B) can also be used in the same manner.

上述粘接层(A)和保护层(B)中使用的树脂组合物中,为了提高所得到的固化物的挠性、指触干燥性,可以配混公知常用的高分子树脂。作为这种高分子树脂,可举出:纤维素系、聚酯系、苯氧基树脂系聚合物、聚乙烯醇缩醛系、聚乙烯醇缩丁醛系、聚酰胺系、聚酰胺酰亚胺系粘结剂聚合物、嵌段共聚物、弹性体等。该高分子树脂可以单独使用1种,也可以组合使用2种以上。In the resin composition used for the above-mentioned adhesive layer (A) and protective layer (B), in order to improve the flexibility and dry-to-touch properties of the obtained cured product, a known and commonly used polymer resin may be compounded. Such polymer resins include cellulose-based, polyester-based, phenoxy resin-based polymers, polyvinyl acetal-based, polyvinyl butyral-based, polyamide-based, polyamide imide Amine-based binder polymers, block copolymers, elastomers, etc. These polymer resins may be used alone or in combination of two or more.

另外,粘接层(A)和保护层(B)中使用的树脂组合物中,为了抑制固化物的固化收缩、提高密合性、硬度等特性,可以配混无机填充剂。作为这种无机填充剂,例如可举出:硫酸钡、无定形二氧化硅、熔融二氧化硅、球状二氧化硅、滑石、粘土、碳酸镁、碳酸钙、氧化铝、氢氧化铝、氮化硅、氮化铝、氮化硼、诺易堡硅土等。In addition, an inorganic filler may be compounded in the resin composition used for the adhesive layer (A) and the protective layer (B) in order to suppress curing shrinkage of the cured product and improve properties such as adhesiveness and hardness. Examples of such inorganic fillers include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, nitrided Silicon, Aluminum Nitride, Boron Nitride, Neuberger Silica, etc.

粘接层(A)和保护层(B)中使用的树脂组合物中,为了制备树脂组合物、为了调节用于涂布于基材、载体膜上的粘度,可以使用有机溶剂。作为这种有机溶剂,可举出:酮类、芳香族烃类、二醇醚类、二醇醚乙酸酯类、酯类、醇类、脂肪族烃、石油系溶剂等。这种有机溶剂可以单独使用1种,也可以以2种以上的混合物的形式使用。In the resin composition used for the adhesive layer (A) and the protective layer (B), an organic solvent may be used for preparing the resin composition and for adjusting the viscosity for coating on a base material or a carrier film. Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum-based solvents, and the like. Such organic solvents may be used alone or as a mixture of two or more.

粘接层(A)和保护层(B)中使用的树脂组合物中,可以根据需要进一步配混着色剂、巯基化合物、密合促进剂、抗氧化剂、紫外线吸收剂等成分。这些成分可以使用电子材料领域中公知常用的物质。另外,可以适宜配混:微粉二氧化硅、水滑石、有机膨润土、蒙脱石等公知常用的增稠剂、有机硅系、氟系、高分子系等的消泡剂、流平剂、硅烷偶联剂、防锈剂等那样的公知常用的添加剂类。In the resin composition used for the adhesive layer (A) and the protective layer (B), components such as a colorant, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber may be further compounded as necessary. As these components, known and commonly used ones in the field of electronic materials can be used. In addition, it can be properly compounded: micropowdered silica, hydrotalcite, organic bentonite, montmorillonite and other commonly used thickeners, silicone-based, fluorine-based, polymer-based defoamers, leveling agents, silanes, etc. Well-known and commonly used additives such as coupling agents and rust inhibitors.

本发明的层叠结构体中,从对铜电路的追随性的观点出发,粘接层(A)优选比保护层(B)厚。In the multilayer structure of the present invention, the adhesive layer (A) is preferably thicker than the protective layer (B) from the viewpoint of followability to the copper circuit.

本发明的层叠结构体可以用于柔性印刷电路板的挠曲部和非挠曲部中的至少任一者、优选用于两者,由此,可以得到具备对弯曲的充分的耐久性的柔性印刷电路板且提高成本性和操作性。具体而言,本发明的层叠结构体可以用于柔性印刷电路板的覆盖层、阻焊层和层间绝缘材料中的至少任一者的用途。The laminated structure of the present invention can be used in at least any one of the flexible portion and the non-flexible portion of the flexible printed circuit board, preferably in both, thereby obtaining a flexible material having sufficient durability against bending. printed circuit boards and improve cost and operability. Specifically, the multilayer structure of the present invention can be used for at least any one of a cover layer, a solder resist layer, and an interlayer insulating material of a flexible printed wiring board.

(柔性印刷电路板的制造方法)(Manufacturing method of flexible printed circuit board)

本发明中,在柔性印刷电路基材上直接或借助干膜形成上述层叠结构体的层,通过光照射进行图案化,通过显影液一次性形成图案来形成绝缘膜,从而能够得到柔性印刷电路板。以往的阻焊层的单层的挠曲性等特性较差,但根据本发明制成由粘接层(A)和保护层(B)形成的层叠结构体,使保护层与粘接层的膜厚的比例、以及保护层与粘接层的显影速度的比例分别在前述范围内,可以良好地兼备碱显影性与耐热性和挠曲性等机械特性。In the present invention, the layer of the above-mentioned laminated structure is formed directly or via a dry film on the flexible printed circuit base material, patterned by light irradiation, and an insulating film is formed by patterning with a developer at one time, thereby obtaining a flexible printed circuit board. . The single layer of the conventional solder resist layer has poor properties such as flexibility, but according to the present invention, a laminated structure composed of the adhesive layer (A) and the protective layer (B) is produced, and the protective layer and the adhesive layer are separated. The ratio of the film thickness and the ratio of the developing speeds of the protective layer and the adhesive layer are within the above-mentioned ranges, and alkali developability, heat resistance, and mechanical properties such as flexibility can be satisfactorily compatible.

以下,关于由本发明的层叠结构体制造本发明的柔性印刷电路板的方法的一例,对于粘接层(A)和保护层(B)两者中使用了含有光产碱剂和热反应性化合物的树脂组合物的情况,基于图1示出的工序图进行说明。需要说明的是,在使用以往的作为阻焊剂组合物所使用的、包含含羧基树脂或含羧基感光性树脂、具有烯属不饱和键的化合物、光聚合引发剂和热反应性化合物的光固化性热固性树脂组合物的情况下,可以采用与阻焊层相同的工序。Hereinafter, regarding an example of the method for producing the flexible printed circuit board of the present invention from the laminated structure of the present invention, a compound containing a photobase generator and a thermally reactive compound is used for both the adhesive layer (A) and the protective layer (B). The case of the resin composition will be described based on the process chart shown in FIG. 1 . It should be noted that, in the case of photocuring using a conventional solder resist composition containing a carboxyl group-containing resin or carboxyl group-containing photosensitive resin, a compound having an ethylenically unsaturated bond, a photopolymerization initiator, and a heat-reactive compound, In the case of a permanent thermosetting resin composition, the same process as that for the solder resist layer can be employed.

[层叠工序][Stacking process]

层叠工序为在基材上形成本发明的层叠结构体的工序。图1中的层叠工序显示在形成有铜电路2的柔性印刷电路基材1上,形成由粘接层3和保护层4构成的层叠结构体的状态,该粘接层3由碱显影型树脂组合物形成。The lamination step is a step of forming the multilayer structure of the present invention on a base material. The lamination process in FIG. 1 shows a state in which a laminated structure consisting of an adhesive layer 3 and a protective layer 4 formed of an alkali-developing type resin is formed on a flexible printed circuit substrate 1 on which a copper circuit 2 is formed. The composition is formed.

其中,对于构成层叠结构体的各层,例如可以通过将构成粘接层3和保护层4的树脂组合物依次涂布于基材上并使其干燥,直接形成粘接层3和保护层4的方法;或者将构成粘接层3和保护层4的树脂组合物分别制成干膜的形态依次层压于基材的方法来形成。另外,也可以通过将制成2层结构的干膜形态的层叠结构体层压于基材的方法来形成。此时,也可以使层叠结构体的至少单面以薄膜支撑或保护。作为使用的薄膜,可以使用自层叠结构体可剥离的塑料薄膜。对于薄膜的厚度没有特别的限制,但通常在10~150μm的范围内适宜选择。从涂膜强度的观点出发,各层间的界面也可以是融合的。Among them, for each layer constituting the laminated structure, for example, the resin composition constituting the adhesive layer 3 and the protective layer 4 can be coated on the base material in sequence and dried to form the adhesive layer 3 and the protective layer 4 directly. or by making the resin compositions constituting the adhesive layer 3 and the protective layer 4 into dry films and sequentially laminating them on the base material. In addition, it can also be formed by a method of laminating a laminated structure in the form of a dry film having a two-layer structure on a base material. At this time, at least one surface of the laminated structure may be supported or protected with a film. As the film to be used, a plastic film that can be peeled off from the laminated structure can be used. There is no particular limitation on the thickness of the film, but it is generally suitably selected within the range of 10 to 150 μm. From the viewpoint of coating film strength, the interface between the layers may also be fused.

树脂组合物对基材的涂布方法可以为刮刀涂布机、唇口涂布机、逗点涂布机、薄膜涂布机等公知的方法。另外,干燥方法可以为使用热风循环式干燥炉、IR炉、热板、对流烘箱等具有利用蒸气的加热方式的热源的装置,使干燥机内的热风对流接触的方法;以及通过喷嘴吹送至支撑体的方法等公知的方法。The method of applying the resin composition to the substrate may be a known method such as a knife coater, a lip coater, a comma coater, or a film coater. In addition, the drying method can be a method of using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven, etc., which has a heat source using a steam heating method, and making the hot air in the dryer convectively contact; and blowing it to the support through a nozzle known methods such as body methods.

其中,作为基材,为预先形成有电路的柔性印刷电路基材。另外,为了得到除期望的效果以外的其他效果,在粘接层3与保护层4之间还可以进一步设置层。Among them, the base material is a flexible printed circuit base material in which a circuit is formed in advance. In addition, in order to obtain effects other than the desired effect, a layer may be further provided between the adhesive layer 3 and the protective layer 4 .

[光照射工序][Light irradiation process]

光照射工序为如下工序:通过以负型的图案状利用光照射而使树脂组合物中所含的光产碱剂活化,从而使光照射部固化。该光照射工序中,在保护层4上配置掩模5,并以负型的图案状进行光照射,使树脂组合物所含的光产碱剂活化,从而使光照射部固化。The photoirradiation step is a step of curing the photoirradiated portion by activating the photobase generator contained in the resin composition by photoirradiation in a negative pattern form. In this light irradiation process, the mask 5 is arrange|positioned on the protective layer 4, and light irradiation is performed in negative pattern form, the photobase generator contained in a resin composition is activated, and the light irradiation part is hardened.

该工序中,由于在光照射部生成的碱而使光产碱剂不稳定化,由光产碱剂产生碱性物质(以下,有时简称为“碱”),由于该生成的碱而使光产碱剂不稳定化,进而生成碱。认为,通过以如此操作生成碱并化学地增殖直至各层的深部,可充分地固化直至各层的深部。在其后的热固化时,该碱作为碱显影性树脂与热反应性化合物的加成反应的催化剂起作用,且进行加成反应,因此,光照射部中,各层充分地热固化直至深部。此时的树脂组合物的固化是例如通过热反应的环氧的开环反应,因此,与以光反应进行的情况相比能够抑制应变、固化收缩。In this step, the photobase generator is destabilized due to the base generated at the light irradiation part, and a basic substance (hereinafter, sometimes simply referred to as "base") is generated from the photobase generator, and the photobase is destabilized due to the generated base. The base generator is destabilized, thereby generating a base. It is considered that by generating a base in this way and chemically proliferating to the deep part of each layer, it is considered that the solidification can be sufficiently carried out to the deep part of each layer. In the subsequent thermosetting, the alkali functions as a catalyst for the addition reaction between the alkali-developable resin and the heat-reactive compound, and the addition reaction proceeds. Therefore, in the light-irradiated part, each layer is sufficiently thermoset to the deep part. The curing of the resin composition at this time is, for example, a ring-opening reaction of epoxy by thermal reaction, and therefore, strain and cure shrinkage can be suppressed compared to the case of proceeding by photoreaction.

作为光照射中使用的光照射机,可以使用直描装置(例如,通过来自计算机的CAD数据直接以激光描绘图像的激光直接成像装置)、搭载有金属卤化物灯的光照射机、搭载有(超)高压汞灯的光照射机、搭载有水银短弧灯的光照射机、或使用了(超)高压汞灯等紫外线灯的直描装置。图案状的光照射用的掩模为负型的掩模。As a light irradiation machine used in light irradiation, a direct drawing device (for example, a laser direct imaging device that directly draws an image with a laser from CAD data from a computer), a light irradiation machine equipped with a metal halide lamp, a light irradiation machine equipped with ( Ultra) high pressure mercury lamp light irradiation machine, light irradiation machine equipped with mercury short arc lamp, or direct drawing device using ultraviolet lamp such as (ultra) high pressure mercury lamp. The mask for patterned light irradiation is a negative mask.

作为活性能量射线,优选使用最大波长处于350~410nm的范围的激光束或散射光。通过将最大波长设为该范围,可以高效地使光产碱剂活化。只要使用该范围的激光束即可,对于激光的种类,气体激光和固体激光均可。另外,其光照射量因膜厚等不同而不同,通常可以设为100~1500mJ/cm2、优选设为300~1500mJ/cm2的范围内。As the active energy ray, it is preferable to use a laser beam or scattered light having a maximum wavelength in the range of 350 to 410 nm. By setting the maximum wavelength into this range, the photobase generator can be efficiently activated. As long as a laser beam within this range is used, the type of laser light may be either a gas laser or a solid-state laser. In addition, the amount of light irradiation varies depending on the film thickness and the like, but can be generally set within a range of 100 to 1500 mJ/cm 2 , preferably within a range of 300 to 1500 mJ/cm 2 .

[加热工序][Heating process]

加热工序中,通过加热使光照射部固化,可以通过在光照射工序中产生的碱使其固化至深部。该加热工序为通过在光照射工序之后加热粘接层3和保护层4,使光照射部固化的工序,是被称为所谓的PEB(曝光后烘焙(POST EXPOSURE BAKE))工序的工序。由此,通过光照射工序中生成的碱使各层充分固化直至深部,可以得到固化特性优异的图案层。In the heating step, the light-irradiated portion is cured by heating, and it can be hardened to a deep portion by alkali generated in the light-irradiating step. This heating step is a step of curing the light-irradiated portion by heating the adhesive layer 3 and the protective layer 4 after the light irradiation step, and is called a so-called PEB (POST EXPOSURE BAKE) step. Thereby, each layer is fully hardened to the deep part by the alkali produced|generated in a light irradiation process, and the patterned layer excellent in hardening characteristic can be obtained.

例如,加热工序优选的是,以低于未照射的树脂组合物的放热开始温度或放热峰温度、且高于光照射的树脂组合物的放热开始温度或放热峰温度的温度进行加热。通过如此加热可以仅选择地固化光照射部。For example, in the heating step, heating is preferably performed at a temperature lower than the exothermic onset temperature or exothermic peak temperature of the unirradiated resin composition and higher than the exothermic onset temperature or exothermic peak temperature of the light-irradiated resin composition. Only the photoirradiated portion can be selectively cured by heating in this way.

其中,此时的加热温度优选树脂组合物中的光照射部热固化,但未照射部不发生热固化的温度。加热温度例如为80~140℃。通过使加热温度设为80℃以上,能够充分地固化光照射部。另一方面,通过使加热温度设为140℃以下,能够仅选择地固化光照射部。加热时间例如为10~100分钟。加热方法与上述干燥方法相同。需要说明的是,未照射部中未生成来自光产碱剂的碱,因此,热固化得到抑制。Among them, the heating temperature at this time is preferably a temperature at which the light-irradiated portion of the resin composition is thermally cured, but the non-irradiated portion is not thermally cured. The heating temperature is, for example, 80 to 140°C. By making heating temperature 80 degreeC or more, a light irradiation part can fully harden|cure. On the other hand, only the light irradiation part can be selectively hardened by making heating temperature 140 degreeC or less. The heating time is, for example, 10 to 100 minutes. The heating method is the same as the above drying method. In addition, since the base originating in a photobase generator does not generate|occur|produce in a non-irradiation part, thermal hardening was suppressed.

[显影工序][Development process]

显影工序是通过碱显影去除未照射部,而形成负型的图案层。图1中的显影工序是显示通过碱性水溶液使粘接层3和保护层4显影,去除未照射部并形成负型的图案层的工序。作为显影方法,可以利用浸渍法、喷淋法、喷涂法、刷涂法等公知的方法。另外,作为显影液,可以使用氢氧化钾、氢氧化钠、碳酸钠、碳酸钾、磷酸钠、硅酸钠、氨、乙醇胺等胺类、四甲基氢氧化铵水溶液(TMAH)等碱水溶液或它们的混合液。In the development step, the non-irradiated portion is removed by alkali development to form a negative pattern layer. The developing step in FIG. 1 shows a step of developing the adhesive layer 3 and the protective layer 4 with an alkaline aqueous solution, removing unirradiated portions, and forming a negative pattern layer. As a developing method, well-known methods, such as a dipping method, a shower method, a spray method, and a brushing method, can be utilized. In addition, as the developer, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines such as ethanolamine, aqueous alkali solutions such as tetramethylammonium hydroxide (TMAH) or the like can be used. their mixture.

[第2光照射工序][Second light irradiation process]

显影工序之后,优选包括第2光照射工序。该第2光照射工序是为了使光照射工序的图案层内未活化而残留的光产碱剂活化,并使碱生成,根据需要照射紫外线的工序。第2光照射工序中的紫外线的波长和光照射量(曝光量)可以与上述光照射工序相同,也可以不同。光照射量(曝光量)例如为150~2000mJ/cm2After the image development step, it is preferable to include a second light irradiation step. This 2nd light irradiation process is a process of irradiating ultraviolet rays as needed in order to activate the photobase generator which remained in the pattern layer which was not activated in the light irradiation process, and generate|occur|produce a base. The wavelength and light irradiation amount (exposure amount) of the ultraviolet-ray in a 2nd light irradiation process may be the same as that of the said light irradiation process, and may differ. The amount of light irradiation (exposure amount) is, for example, 150 to 2000 mJ/cm 2 .

[热固化工序][Heat curing process]

显影工序之后,优选还包括热固化(后固化)工序。该热固化工序是为了使图案层充分热固化,根据需要进行热固化(后固化)的工序。显影工序之后,均进行第2光照射工序和热固化工序的情况下,热固化工序优选在第2光照射工序之后进行。After the development step, it is preferable to further include a thermal curing (post-curing) step. This thermal curing step is a step of performing thermal curing (post-curing) as necessary in order to sufficiently thermally cure the pattern layer. After the image development step, when both the second light irradiation step and the thermosetting step are performed, the thermosetting step is preferably performed after the second light irradiation step.

该热固化工序利用通过光照射工序、或光照射工序和第2光照射工序而由光产碱剂生成的碱,使图案层充分地热固化。在热固化工序的时刻,由于已经去除未照射部,热固化工序可以以未照射的树脂组合物的固化反应开始温度以上的温度进行。由此,可以使图案层充分地热固化。加热温度例如为150℃以上。In this thermal curing step, the pattern layer is sufficiently thermally cured using the base generated from the photobase generator in the light irradiation step, or the light irradiation step and the second light irradiation step. At the time of the thermal curing step, since the unirradiated portion has already been removed, the thermal curing step can be performed at a temperature equal to or higher than the curing reaction start temperature of the non-irradiated resin composition. Thereby, the pattern layer can be fully thermally cured. The heating temperature is, for example, 150° C. or higher.

实施例Example

以下,使用实施例进一步对本发明进行详细说明。Hereinafter, the present invention will be further described in detail using examples.

(合成例1)(Synthesis Example 1)

<具有酰亚胺环的碱溶解性树脂的合成><Synthesis of Alkali-Soluble Resin Having an Imide Ring>

在安装有搅拌机、氮气导入管、分流管和冷凝管的可拆式三口烧瓶中,加入3,5-二氨基苯甲酸12.5g、2,2’-双[4-(4-氨基苯氧基)苯基]丙烷8.2g、NMP30g、γ-丁内酯30g、4,4’-氧双邻苯二甲酸酐27.9g、偏苯三酸酐3.8g,在氮气气氛、室温下,以100rpm进行搅拌4小时。接着,加入甲苯20g,在硅浴温度180℃、150rpm下一边蒸馏去除甲苯和水一边搅拌4小时,得到含酰亚胺环的碱溶解性树脂溶液。然后,以固体成分成为30质量%的方式添加γ-丁内酯。所得树脂溶液的固体成分酸值为86mgKOH/g、Mw为10000。In a detachable three-necked flask equipped with a stirrer, a nitrogen inlet tube, a split tube and a condenser tube, add 12.5 g of 3,5-diaminobenzoic acid, 2,2'-bis[4-(4-aminophenoxy 8.2 g of ) phenyl] propane, 30 g of NMP, 30 g of γ-butyrolactone, 27.9 g of 4,4′-oxydiphthalic anhydride, and 3.8 g of trimellitic anhydride were stirred at 100 rpm for 4 hours under a nitrogen atmosphere at room temperature. Next, 20 g of toluene was added, and the mixture was stirred for 4 hours while distilling off toluene and water at a silicon bath temperature of 180° C. and 150 rpm to obtain an alkali-soluble resin solution containing an imide ring. Then, γ-butyrolactone was added so that the solid content would become 30% by mass. The solid content acid value of the obtained resin solution was 86 mgKOH/g, and Mw was 10000.

(合成例2)(Synthesis Example 2)

<含羧基的聚氨酯树脂的合成><Synthesis of carboxyl group-containing polyurethane resin>

在具备搅拌装置、温度计和冷凝器的反应容器中,投入由1,5-戊二醇和1,6-己二醇衍生的聚碳酸酯二醇(Asahi Kasei Chemicals Corporation制,T5650J,数均分子量800)2400g(3摩尔)、二羟甲基丙酸603g(4.5摩尔)、以及作为单羟基化合物的丙烯酸2-羟基乙酯238g(2.6摩尔)。接着,投入作为多异氰酸酯的异佛尔酮二异氰酸酯1887g(8.5摩尔),一边搅拌一边加热至60℃停止,在反应容器内的温度开始降低的时刻再次加热,并以80℃继续搅拌,以红外线吸收光谱确认异氰酸酯基的吸收光谱(2280cm-1)消失,结束反应。然后,以固体成分成为50质量%的方式添加卡必醇乙酸酯。所得含羧基的聚氨酯树脂的固体成分的酸值为50mgKOH/g。In a reaction vessel equipped with a stirring device, a thermometer and a condenser, polycarbonate diol derived from 1,5-pentanediol and 1,6-hexanediol (manufactured by Asahi Kasei Chemicals Corporation, T5650J, number average molecular weight 800 ) 2400 g (3 mol), 603 g (4.5 mol) of dimethylolpropionic acid, and 238 g (2.6 mol) of 2-hydroxyethyl acrylate as a monohydroxy compound. Next, 1887 g (8.5 moles) of isophorone diisocyanate as a polyisocyanate was put in, heated to 60° C. and stopped while stirring, and reheated when the temperature in the reaction vessel began to drop, and continued stirring at 80° C. It was confirmed by the absorption spectrum that the absorption spectrum (2280 cm -1 ) of the isocyanate group disappeared, and the reaction was terminated. Then, carbitol acetate was added so that the solid content would become 50% by mass. The acid value of the solid content of the obtained carboxyl group-containing polyurethane resin was 50 mgKOH/g.

<构成各层的树脂组合物的制备><Preparation of Resin Composition Constituting Each Layer>

按照下述表1和表2示出的配方,分别配混实施例和比较例示出的材料,并以搅拌机进行预混合后,用三辊磨进行混炼,制备构成粘接层和保护层的树脂组合物。表中的值在只要没有特别声明就为质量份。According to the formulations shown in the following Tables 1 and 2, the materials shown in the examples and comparative examples were mixed respectively, and after pre-mixing with a mixer, kneading was carried out with a three-roll mill to prepare the adhesive layer and the protective layer. resin composition. The values in the table are parts by mass unless otherwise stated.

<粘接层(A)的形成><Formation of Adhesive Layer (A)>

准备铜厚18μm的形成有电路的柔性印刷电路基材,使用Mec Corporation制的CB-801Y,进行前处理。然后,在进行了前处理的柔性印刷电路基材上以使干燥后的膜厚成为下述表1和表2示出的膜厚的方式涂布各粘接层用的树脂组合物。然后,用热风循环式干燥炉以80℃/30分钟进行干燥,形成由树脂组合物形成的粘接层(A)。需要说明的是,关于比较例1,未形成粘接层。A circuit-formed flexible printed circuit substrate having a copper thickness of 18 μm was prepared, and pre-treated using CB-801Y manufactured by Mec Corporation. Then, the resin composition for each adhesive layer was apply|coated so that the film thickness after drying might become the film thickness shown in following Table 1 and Table 2 on the preprocessed flexible printed circuit base material. Then, it dried at 80 degreeC/30 minutes in the hot-air circulation type drying oven, and formed the adhesive layer (A) which consists of a resin composition. In addition, regarding the comparative example 1, the adhesive layer was not formed.

<保护层(B)的形成><Formation of protective layer (B)>

在上述粘接层(A)上以使干燥后的膜厚成为下述表1和表2示出的膜厚的方式涂布各保护层用的树脂组合物。然后,用热风循环式干燥炉以80℃/30分钟进行干燥,形成由树脂组合物形成的保护层(B)。The resin composition for each protective layer was apply|coated on the said adhesive layer (A) so that the film thickness after drying might become the film thickness shown in Table 1 and Table 2 below. Then, it dried at 80 degreeC/30 minutes in the hot-air circulation type drying oven, and formed the protective layer (B) which consists of a resin composition.

粘接层(A)和保护层(B)的膜厚的总和全部为20μm。The total sum of the film thicknesses of the adhesive layer (A) and the protective layer (B) was 20 μm.

<膜厚的测定><Measurement of Film Thickness>

膜厚使用Mitutoyo Corporation.制的千分尺MDC-25MX进行测定。The film thickness was measured using a micrometer MDC-25MX manufactured by Mitutoyo Corporation.

<显影速度的测定><Measurement of developing speed>

在铜厚18μm的形成有电路的柔性印刷电路基材上涂布各树脂组合物,用热风循环式干燥炉以80℃/30分钟进行干燥。然后,在30℃、1质量%的碳酸钠水溶液中浸渍基材,测定直至涂膜溶解的时间。将直至涂膜溶解的时间设为显影时间[秒]、将膜厚设为膜厚[μm]时,显影速度由下述式表示。Each resin composition was apply|coated on the flexible printed circuit base material in which the circuit was formed with copper thickness 18 micrometers, and it dried at 80 degreeC/30 minutes in the hot-air circulation type drying oven. Then, the base material was immersed in 30 degreeC and 1 mass % sodium carbonate aqueous solution, and the time until the coating film melt|dissolved was measured. When the time until the coating film dissolves is defined as the developing time [second], and the film thickness is defined as the film thickness [μm], the developing speed is represented by the following formula.

显影速度[μm/秒]=膜厚[μm]/显影时间[秒]Developing speed [μm/sec] = film thickness [μm]/developing time [sec]

<碱显影性、耐焊接热性能、以及耐镀金性><Alkali Developability, Resistance to Soldering Heat, and Gold Plating Resistance>

对于具备上述所得层叠结构体的基材,用ORC CORPORATION制的HMW680GW(金属卤化物灯,散射光),以曝光量500mJ/cm2,以负型的图案状进行光照射。接着,以90℃进行加热处理60分钟。然后,在30℃、1质量%的碳酸钠水溶液中浸渍基材并进行3分钟显影,评价碱显影性的可否。评价用目视进行,按照以下基准进行评价。The substrate having the above-obtained laminated structure was irradiated with light in a negative pattern at an exposure amount of 500 mJ/cm 2 using HMW680GW (metal halide lamp, scattered light) manufactured by ORC CORPORATION. Next, heat treatment was performed at 90° C. for 60 minutes. Then, the base material was immersed in 30 degreeC and 1 mass % sodium carbonate aqueous solution, and image development was performed for 3 minutes, and the possibility of alkali developability was evaluated. The evaluation was performed visually, and was evaluated according to the following criteria.

○:可无残渣地显影○: Developed without residue

×:有显影残渣×: There is developing residue

接着,使用热风循环式干燥炉以150℃/60分钟进行热处理,得到图案状的固化涂膜。对于所得固化涂膜,在该评价基材上涂布松香系助焊剂,在预先设定为260℃的焊料槽中浸渍20秒(10秒×2次),用异丙醇清洗助焊剂后,进行利用透明胶带的剥离试验,对于抗蚀层的膨胀、剥离、变色,按照以下基准进行评价。Next, it heat-processed at 150 degreeC/60 minutes using the hot-air circulation type drying furnace, and obtained the patterned cured coating film. The obtained cured coating film was coated with rosin-based flux on the evaluation base material, dipped in a solder bath set at 260°C for 20 seconds (10 seconds x 2 times), and washed with isopropyl alcohol. A peeling test using a cellophane tape was performed, and the swelling, peeling, and discoloration of the resist layer were evaluated in accordance with the following criteria.

○:完全未确认到变化○: No change is confirmed at all

×:有膨胀、剥离×: There is swelling and peeling

另外,对于所得固化涂膜,使用市售品的化学镀镍浴和化学镀金浴,在80~90℃、镍5μm、金0.05μm的条件下进行镀覆。被镀覆的评价基材中,用目视评价有无镀覆的渗入。Moreover, the obtained cured coating film was plated on conditions of 80-90 degreeC, nickel 5 micrometers, and gold 0.05 micrometers using the commercially available electroless nickel plating bath and electroless gold plating bath. In the plated evaluation base material, the presence or absence of plating penetration was evaluated visually.

○:无渗入○: No penetration

×:在基材与涂膜之间确认到渗入×: Penetration was confirmed between the substrate and the coating film

将所得结果示于下述的表1和表2中。The obtained results are shown in Table 1 and Table 2 below.

[表1][Table 1]

※1:合成例1的树脂*1: Resin of Synthesis Example 1

※2:合成例2的树脂*2: Resin of Synthesis Example 2

※3:含羧基的酚醛清漆树脂(酸值104mgKOH/g,Bis A/苯酚酚醛清漆树脂)※3: Carboxyl group-containing novolak resin (acid value 104mgKOH/g, Bis A/phenol novolak resin)

※4:乙氧基化双酚A二甲基丙烯酸酯(新中村化学工业株式会社制)*4: Ethoxylated bisphenol A dimethacrylate (manufactured by Shin-Nakamura Chemical Industry Co., Ltd.)

※5:双环戊二烯型环氧树脂(DIC株式会社制)*5: Dicyclopentadiene-type epoxy resin (manufactured by DIC Corporation)

※6:双酚A型环氧树脂(分子量400)(三菱化学株式会社制)*6: Bisphenol A type epoxy resin (molecular weight 400) (manufactured by Mitsubishi Chemical Corporation)

※7:肟型光产碱剂(BASF JAPAN LTD.制)*7: Oxime photobase generator (manufactured by BASF JAPAN LTD.)

※8:2-(二甲基氨基)-2-[(4-甲基苯基)甲基]-1-[4-(4-吗啉基)苯基]-1-丁酮(BASF JAPAN LTD.制)※8: 2-(Dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone (BASF JAPAN LTD.)

※9:双酚F型酸改性环氧丙烯酸酯(日本化药株式会社制)*9: Bisphenol F acid-modified epoxy acrylate (manufactured by Nippon Kayaku Co., Ltd.)

※10:硫酸钡(堺化学工业株式会社制)*10: Barium sulfate (manufactured by Sakai Chemical Industry Co., Ltd.)

[表2][Table 2]

由上述表1和表2示出的评价结果明显可确认到:实施例的柔性印刷电路板显示出良好的显影性和耐热性。与此相对,可知:比较例1仅由具有酰亚胺环的树脂组合物的保护层构成,因此,耐热性虽然良好,但显影性差,不能使用通常的碳酸钠进行显影。另外,比较例2中,粘接层薄,且粘接层与保护层的膜厚的比例偏离本发明的范围,因此,耐热性虽然良好,但是结果仍然显影性较差。进而,比较例3中,粘接层与保护层的膜厚的比例偏离本发明的范围,因此,显影性虽然良好,但结果仍然耐热性较差。比较例4中,关于膜厚的比例,虽然在本发明的范围内,但粘接层与保护层的显影速度相同,两者的显影速度的比例偏离本发明的范围,因此结果仍然显影性较差。比较例5中,显影速度的比例偏离本发明的范围,因此,显影性虽然良好,但是结果耐热性较差。From the evaluation results shown in Table 1 and Table 2, it was clearly confirmed that the flexible printed wiring boards of Examples showed good developability and heat resistance. On the other hand, it can be seen that Comparative Example 1 is constituted only of the protective layer of the resin composition having an imide ring, so although the heat resistance is good, the developability is poor, and it cannot be developed using ordinary sodium carbonate. In addition, in Comparative Example 2, the adhesive layer was thin, and the ratio of the thickness of the adhesive layer to the protective layer deviated from the range of the present invention. Therefore, although the heat resistance was good, the result was still poor in developability. Furthermore, in Comparative Example 3, since the film thickness ratio of the adhesive layer and the protective layer deviated from the range of the present invention, the developability was good, but as a result, the heat resistance was still poor. In Comparative Example 4, although the ratio of the film thickness is within the scope of the present invention, the development speed of the adhesive layer and the protective layer are the same, and the ratio of the two development speeds deviates from the scope of the present invention, so the result is still relatively low in developability. Difference. In Comparative Example 5, since the ratio of the developing speed deviated from the range of the present invention, the developability was good, but as a result, the heat resistance was inferior.

附图标记说明Explanation of reference signs

1 柔性印刷电路基材1 Flexible printed circuit substrate

2 铜电路2 copper circuit

3 粘接层3 adhesive layer

4 保护层4 layers of protection

5 掩模5 masks

Claims (6)

1.一种层叠结构体,其特征在于,其具有:由碱显影性树脂组合物形成的粘接层(A)、和在该粘接层(A)上形成的由感光性树脂组合物形成的保护层(B),1. A laminated structure, characterized in that it has: an adhesive layer (A) formed of an alkali-developable resin composition, and a photosensitive resin composition formed on the adhesive layer (A). protective layer (B), 所述粘接层(A)与所述保护层(B)的膜厚的比例为A/B=0.5~50,The film thickness ratio of the adhesive layer (A) to the protective layer (B) is A/B=0.5-50, 所述粘接层(A)的显影速度(a)与所述保护层(B)的显影速度(b)的比例为a/b=1.1~100。The ratio of the developing speed (a) of the adhesive layer (A) to the developing speed (b) of the protective layer (B) is a/b=1.1-100. 2.根据权利要求1所述的层叠结构体,其中,所述粘接层(A)和所述保护层(B)均能够通过光照射进行图案化。2. The laminated structure according to claim 1, wherein both the adhesive layer (A) and the protective layer (B) can be patterned by light irradiation. 3.根据权利要求1所述的层叠结构体,其用于柔性印刷电路板的挠曲部和非挠曲部中的至少任一者。3. The laminated structure according to claim 1, which is used for at least any one of a flexure portion and a non-flexure portion of a flexible printed circuit board. 4.根据权利要求1所述的层叠结构体,其用于柔性印刷电路板的覆盖层、阻焊层和层间绝缘材料中的至少任一者的用途。4. The laminated structure according to claim 1, which is used for at least any one of a cover layer, a solder resist layer, and an interlayer insulating material of a flexible printed circuit board. 5.一种干膜,其特征在于,其是权利要求1~4中任一项所述的层叠结构体的至少单面以薄膜支撑或保护而成的。5. A dry film, characterized in that at least one side of the laminated structure according to any one of claims 1 to 4 is supported or protected by a film. 6.一种柔性印刷电路板,其特征在于,其具备绝缘膜,该绝缘膜是在柔性印刷电路基板上直接形成权利要求1~4中任一项所述的层叠结构体的层、或者以权利要求5所述的干膜形成层叠结构体的层,通过光照射进行图案化,并利用显影液使图案一次性形成而得到的。6. A flexible printed circuit board, characterized in that it is provided with an insulating film, and the insulating film is a layer in which the laminated structure according to any one of claims 1 to 4 is directly formed on the flexible printed circuit board, or is formed by The dry film according to claim 5 forms a layer of a laminated structure, is patterned by light irradiation, and is obtained by forming a pattern at one time with a developer.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110519936A (en) * 2019-08-01 2019-11-29 中国电子科技集团公司第二十九研究所 A kind of the high-precision ultrathin welding resistance film layer and its process for making on ltcc substrate surface

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102173182B1 (en) * 2018-11-06 2020-11-02 (주)이녹스첨단소재 flexible photo imageable coverlay film and manufacturing method thereof
CN112074099A (en) * 2020-09-04 2020-12-11 恒赫鼎富(苏州)电子有限公司 Preparation method of flexible circuit board insulating layer
JP2022151752A (en) * 2021-03-25 2022-10-07 太陽インキ製造株式会社 Laminate structure, cured material of resin layer in the laminate structure, electronic component, and formation method of cured material
WO2025121370A1 (en) * 2023-12-06 2025-06-12 日産化学株式会社 Composition for forming resist underlayer film

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1025991A1 (en) * 1999-02-02 2000-08-09 Agfa-Gevaert N.V. A method for making positive working printing plates
CN101071267A (en) * 2006-05-08 2007-11-14 株式会社东进世美肯 Photoresist composition
CN101071266A (en) * 2006-05-08 2007-11-14 株式会社东进世美肯 Photoresist composition
TW200905402A (en) * 2007-03-28 2009-02-01 Jsr Corp Double-layered film and pattern-forming method using the same, resin composition for forming lower layer of double-layered film, and positive radiation-sensitive resin composition for forming upper layer of double-layered film
CN102763036A (en) * 2010-02-08 2012-10-31 太阳控股株式会社 Layered structure and light-sensitive dry film used in same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62263692A (en) 1986-05-12 1987-11-16 ニツポン高度紙工業株式会社 Heat-resistant printed wiring board and manufacture of the same
JPS63110224A (en) 1986-10-27 1988-05-14 Dainippon Printing Co Ltd Flexible overlay film
JP2005092037A (en) * 2003-09-19 2005-04-07 Fuji Photo Film Co Ltd Ir photosensitive planographic printing original plate
TW200728908A (en) * 2006-01-25 2007-08-01 Kaneka Corp Photosensitive dry film resist, printed wiring board using same, and method for producing printed wiring board
JP4752754B2 (en) * 2006-12-20 2011-08-17 Jsr株式会社 Two-layer laminated film and pattern forming method using the same
JP5615415B2 (en) * 2012-09-28 2014-10-29 太陽インキ製造株式会社 Curable resin composition, composition for forming solder resist, dry film and printed wiring board, laminated structure and method for producing the same
JP6147995B2 (en) * 2012-11-26 2017-06-14 東京応化工業株式会社 Forming method of plating model
KR102229343B1 (en) * 2013-04-18 2021-03-19 다이요 잉키 세이조 가부시키가이샤 Laminate structure, flexible printed wiring board and method for manufacturing same
JP6549848B2 (en) * 2014-01-17 2019-07-24 太陽インキ製造株式会社 Laminated structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1025991A1 (en) * 1999-02-02 2000-08-09 Agfa-Gevaert N.V. A method for making positive working printing plates
CN101071267A (en) * 2006-05-08 2007-11-14 株式会社东进世美肯 Photoresist composition
CN101071266A (en) * 2006-05-08 2007-11-14 株式会社东进世美肯 Photoresist composition
TW200905402A (en) * 2007-03-28 2009-02-01 Jsr Corp Double-layered film and pattern-forming method using the same, resin composition for forming lower layer of double-layered film, and positive radiation-sensitive resin composition for forming upper layer of double-layered film
CN102763036A (en) * 2010-02-08 2012-10-31 太阳控股株式会社 Layered structure and light-sensitive dry film used in same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110519936A (en) * 2019-08-01 2019-11-29 中国电子科技集团公司第二十九研究所 A kind of the high-precision ultrathin welding resistance film layer and its process for making on ltcc substrate surface

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