CN106569116A - Probe station and low-temperature testing system - Google Patents

Abstract

The invention relates to a probe station and a low-temperature test system. The low-temperature test system includes a low-temperature test station and a refrigeration device for cooling the low-temperature test station. The low-temperature test station includes a test station chamber and a probe station that can be placed in the test station chamber. , the test bench chamber includes a test platform located at the lower part of the test bench chamber and a chamber upper cover arranged on the test platform, the probe station includes a sample platform, and the sample platform is provided with a probe for connecting with the sample. The rear end of the needle is detachably connected to the electrode in the chamber of the test bench, and a sample holder for fixing the sample is also provided on the sample stage, and the sample stage has a sample placement groove depressed from the upper surface of the sample stage. By adopting the probe station and the low-temperature testing system of the present invention, the probe station is set independently, which not only facilitates the alignment of the probe and the sample electrode, ensures the accuracy and safety of the alignment, but also has high connection efficiency. It can solve the problems of difficult connection and electrode damage during traditional sample measurement.

Description

A kind of probe platform and low temperature testing system

technical field

The invention relates to the field of low-temperature testing of semiconductor devices, in particular to a probe station and a low-temperature testing system.

Background technique

As an important material research equipment, low temperature testing system is widely used in the field of material microstructure and macroscopic performance research. The Linkam cryogenic test system mainly includes a low-temperature refrigeration system and a low-temperature test bench. The low-temperature test bench includes a test platform for placing samples and a test bench chamber that wraps the test platform. The low-temperature refrigeration system provides low-temperature testing for the test bench chamber through high-purity nitrogen. Environment, there is a circular metal track on the test platform, the needle handles of the two probes are connected to the magnet block, and the magnet block is adsorbed on the circular track and can slide on the track to realize the adjustment of the connection point of the probe. When the traditional test bench is used to test the sample to be tested, first connect the access terminal of the test equipment (such as voltage source meter, current source meter or other test instruments) outside the low temperature test bench to the test bench access port, and the test bench passes through the metal track The connection with the two probes is realized with a magnet. Then open the upper cover of the test bench chamber, put the sample on the test platform, connect the two probes on the test bench to the sample, and then close the upper cover of the test bench chamber, the low temperature refrigeration system is the test The bench chamber creates a low-temperature test environment, and the sample can be measured.

This test system has the following disadvantages: (1) There are only two probes for testing. Since the two probes can only be connected to the positive and negative poles of an external measuring instrument, and one measuring instrument cannot meet the requirements of the four-terminal method for measuring resistance, Therefore, the traditional two-probe method is not suitable for measuring resistance with the four-terminal method; (2) Due to the size of the sample and the diversification of the electrode distribution position, the sample may not be in the central part of the test bench, so the test bench cover is in the process of tightening It will cause the sample to slide, because the probe is lapped on the sample, and the lapping point of the probe is very sharp, and the movement of the sample will drive the probe to deviate relative to the electrode on the sample, which will damage the sample electrode and cause the probe to The connection between the needle and the sample fails; (3) Since the probe adjustment process is to manually toggle the probe to move or rotate on the circular track of the probe, the manual control is unstable, especially through manual control of small probes and tiny electrodes (4) Since the probe and the electrode are too small, it is difficult for the naked eye to initially distinguish whether they are connected, and when the naked eye does not use an observation instrument to connect, Multiple connections may be required for correct alignment, and scratches on multiple connections will cause damage to the electrode. Therefore, it is necessary to use a microscope to observe the connection between the probe and the sample electrode. However, since the sample is in the chamber of the test bench of the low-temperature test bench To connect, the microscope needs to be moved to the upper part of the low-temperature test bench, which is a cumbersome, laborious and inconvenient process.

Contents of the invention

The purpose of the present invention is to provide a low-temperature test system to solve the technical problems that the traditional sample measurement needs to place the sample in the chamber of the test bench for connection, resulting in difficult connection and electrode damage during connection.

In order to achieve the above object, the technical solution of the low temperature test system of the present invention is: the low temperature test system includes a low temperature test bench and a refrigeration device for cooling the low temperature test bench, and the low temperature test bench includes a test bench chamber and a probe that can be placed in the test bench chamber. Needle platform, the test platform chamber includes a test platform located at the lower part of the test platform chamber and a chamber cover set on the test platform, the probe station includes a sample platform, and the sample platform is provided with probes for connecting with the sample , the rear end of the probe is detachably connected to the electrodes in the chamber of the test bench, and a sample fixture for fixing the sample is also provided on the sample stage, and the sample stage has a sample placement groove that is sunken downward from the upper surface of the sample stage.

Further, the sample holder includes at least two opposite spring top sheets. Two spring top pieces are used as sample clamps, which not only have a simple structure and are easy to operate, but also occupy a small space and are conveniently connected by screws to realize the adjustment of the sample clamps.

Further, the probe includes a needle handle and a needle head, the needle handle has a needle handle long hole through the upper and lower sides, and the end of the needle head has a downwardly bent contact, and the screw passes through the needle handle long hole to connect The needle shaft is pressed tightly against the sample stage. The probe with this structure is not only convenient to fix, but also has a simple structure, and the adjustment of the probe can be realized by only one screw. The sliding in the long hole of the needle handle on the needle handle adjusts the radial expansion and contraction of the probe on the sample stage, and the position of the contact at the end of the probe in the horizontal direction is adjusted through the rotation of the long hole of the needle handle relative to a screw.

Further, the spring top sheet is provided with a long hole for the fixture passing through the upper and lower sides, and the spring top sheet is pressed on the sample stage by passing through the long hole of the fixture. The middle part of the two spring top pieces of the sample fixture is provided with a strip-shaped long hole for the fixture, which can not only pass through the screw to fix the sample fixture, but also ensure the radial expansion and horizontal rotation of the sample fixture on the sample stage , to achieve multi-angle clamping and fixing of the sample.

Further, the sample table is a round table, and the sample placement groove is a cylindrical groove, and the sample table is also provided with a fixture installation hole penetrating from the outer peripheral surface of the sample table to the cylindrical groove, and the fixture installation hole is fixed by a screw. As for the sample holder, the probe is pressed against the upper surface of the sample stage by screws. The cylindrical sample stage and the cylindrical groove ensure that the center of the sample stage is symmetrical, and the circumferential direction does not need to distinguish the direction, and is more suitable for the inner cavity of the test bench chamber. The sample fixture is installed in the fixture installation hole on the side wall of the sample stage. When the cylindrical The groove is deep, and the sample is at the bottom of the groove. In order to make the sample holder fix the sample better, the installation groove of the fixed sample holder must be located in the middle and lower part of the sample stage. In order to ensure the firmness of the overall structure of the sample stage, the The fan-shaped holes are drawn out from the side wall, instead of opening grooves from both ends of the sample stage to the middle of the sample stage. In addition, the clamp installation hole ensures that the sample clamp can not only expand and contract in it, but also rotate around the fastening screw of the sample clamp in the clamp installation hole, so as to better fix the sample.

Further, heat dissipation holes are arranged on the inner wall of the sample placement groove. Since the sample storage tank is a closed space at the bottom, when the refrigeration system cools it, the heat conduction is slow, and multiple heat dissipation holes are added to ensure faster heat conduction to improve efficiency.

Another object of the present invention is to provide a probe station.

The technical scheme of the probe station of the present invention is: a probe station, including a sample station, the sample station is provided with a probe for connecting with the sample, and the rear end of the probe has a hole for connecting with the electrodes in the chamber of the test bench. The connection structure is also provided with a sample fixture for fixing the sample on the sample stage, and the sample stage has a sample placement groove depressed from the upper surface of the sample stage.

Further, the sample holder includes at least two opposite spring top sheets. Two spring top pieces are used as sample clamps, which not only have a simple structure and are easy to operate, but also occupy a small space and are conveniently connected by screws to realize the adjustment of the sample clamps.

Further, the probe includes a needle handle and a needle head, the needle handle has a needle handle long hole through the upper and lower sides, and the end of the needle head has a downwardly bent contact, and the screw passes through the needle handle long hole to connect The needle shaft is pressed tightly against the sample stage. The probe with this structure is not only convenient to fix, but also has a simple structure, and the adjustment of the probe can be realized by only one screw. The sliding in the long hole of the needle handle on the needle handle adjusts the radial expansion and contraction of the probe on the sample stage, and the position of the contact at the end of the probe in the horizontal direction is adjusted through the rotation of the long hole of the needle handle relative to a screw.

Further, the spring top sheet is provided with a long hole for the fixture passing through the upper and lower sides, and the spring top sheet is pressed on the sample stage by passing through the long hole of the fixture. The middle part of the two spring top pieces of the sample fixture is provided with a strip-shaped long hole for the fixture, which can not only pass through the screw to fix the sample fixture, but also ensure the radial expansion and horizontal rotation of the sample fixture on the sample stage , to achieve multi-angle clamping and fixing of the sample.

Further, the sample table is a round table, and the sample placement groove is a cylindrical groove, and the sample table is also provided with a fixture installation hole penetrating from the outer peripheral surface of the sample table to the cylindrical groove, and the fixture installation hole is fixed by a screw. As for the sample holder, the probe is pressed against the upper surface of the sample stage by screws. The cylindrical sample stage and the cylindrical groove ensure that the center of the sample stage is symmetrical, and the circumferential direction does not need to distinguish the direction, and is more suitable for the inner cavity of the test bench chamber. The sample fixture is installed in the fixture installation hole on the side wall of the sample stage. When the cylindrical The groove is deep, and the sample is at the bottom of the groove. In order to make the sample holder fix the sample better, the installation groove of the fixed sample holder must be located in the middle and lower part of the sample stage. In order to ensure the firmness of the overall structure of the sample stage, the The fan-shaped holes are drawn out from the side wall, instead of opening grooves from both ends of the sample stage to the middle of the sample stage. In addition, the clamp installation hole ensures that the sample clamp can not only expand and contract in it, but also rotate around the fastening screw of the sample clamp in the clamp installation hole, so as to better fix the sample.

Further, heat dissipation holes are arranged on the inner wall of the sample placement groove. Since the sample storage tank is a closed space at the bottom, when the refrigeration system cools it, the heat conduction is slow, and multiple heat dissipation holes are added to ensure faster heat conduction to improve efficiency.

The beneficial effects of the low-temperature testing system of the present invention are: adopting the low-temperature testing system of the present invention, the probe station is independently arranged and detachably connected with the electrodes in the chamber of the test bench, ensuring that the probe station can move freely in the chamber of the test bench, When measuring a sample, even if the sample is too large or placed in a skewed position, the position of the probe station can be adjusted so that the sample is in the center of the chamber of the test bench to ensure that the upper cover of the chamber of the test bench is closed. It will not cause the misalignment of the sample and the probe, ensuring the safety of the sample electrode. At the same time, since the probe station is independent, during the process of connecting the sample electrode, the probe station can be taken out of the test bench chamber and placed under the microscope to realize the alignment between the probe and the sample electrode. The alignment is completed and fixed by the sample fixture Then put it into the test bench chamber for connection test, the operation is convenient and fast, and the sample electrode will not be damaged due to the difficulty in aligning the electrode position in the test bench chamber. In addition, the probe station can be equipped with four probes to realize the four-terminal method for measuring resistance. In addition, due to the independence of the probe station, other electrical tests can be performed without changing the electrode points.

When the probe station of the present invention is used in conjunction with the low-temperature test bench and the refrigeration system, it has the same beneficial effects as the low-temperature test system of the present invention. To avoid repetition, details are not repeated here.

Description of drawings

1 is a top view of a specific embodiment of a probe station of the present invention;

Fig. 2 is a sectional view at A-A place in Fig. 1;

Fig. 3 is the top view of sample stage in Fig. 1;

Fig. 4 is a sectional view at B-B place among Fig. 3;

Figure 5 is a top view of the probe in Figure 1;

Fig. 6 is the sectional view of C-C place in Fig. 5;

Fig. 7 is a top view of the card-like shrapnel in Fig. 1;

Fig. 8 is a cross-sectional view at D-D in Fig. 7;

In the figure: 1-sample stage, 11-sample placement groove, 12-fixture installation hole, 13-fixture screw hole, 14-probe screw hole, 2-probe, 21-needle handle, 212-needle handle long hole , 22-needle, 221-contact, 3-sample fixture, 31-fixture long hole, 4-screw, 5-sample.

detailed description

Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

A specific embodiment of the low temperature test system of the present invention, as shown in Figures 1 to 8, the low temperature test system includes a low temperature test bench (not shown in the figure) and a refrigeration device (not shown in the figure) that provides a low temperature environment for the low temperature test bench out), the low-temperature test bench includes a test bench chamber (not shown in the figure) and a probe station that can be placed in the test bench chamber, and the test bench chamber includes a test platform (not shown in the figure) located at the lower part of the test bench chamber shown) and the chamber cover (not shown) on the test platform.

The probe station is set independently and detachably connected to the electrodes in the chamber of the test bench to ensure that the probe station can move freely in the chamber of the test bench. When measuring the sample 5, even if the sample 5 is too large or placed in a skewed position , the position of the probe station can also be adjusted so that the sample 5 is in the center of the chamber of the test bench, so that when the upper cover of the chamber of the test bench is closed, the movement of the sample 5 and the probe 2 will not be caused, ensuring that the sample electrode safety. In the process of connecting the sample electrode, the probe station can be taken out of the test bench chamber and placed under the microscope to realize the alignment between the probe 2 and the sample electrode. After the alignment is completed and fixed by the sample holder 3, it can be placed into the test bench chamber The connection test is convenient and fast, and the sample electrode will not be damaged due to the difficulty in aligning the electrode position in the test bench chamber. The probe station can be provided with four probes 2 to realize the resistance measurement by the four-terminal method. In addition, due to the independence of the probe station, other electrical tests can be performed without changing the electrode points.

As shown in Figures 1 to 2, the probe station includes a sample stage 1, a sample holder 3 arranged on the sample stage 1 for fixing the sample 5, and a probe 2 arranged on the sample stage 1 for connecting and testing the sample 5 .

As shown in FIGS. 3 to 4 , the sample stage 1 is a circular platform. In other embodiments, the shape of the sample stage 1 can also be a polygonal structure such as a regular hexagon. The sample stage 1 is 5mm high, and a 4mm deep cylindrical groove is opened downward from the upper surface of the sample stage 1 as the sample placement groove 11, and the sample 5 can be placed in the sample placement groove 11 for measurement. In other embodiments, the sample placement groove 11 can also be a polygonal structure such as a regular hexagon, and its depth can also be adjusted to 3mm or 2mm as required.

Four probe screw holes 14 for fixing the probe 2 are provided on the annular surface of the upper surface of the sample stage 1, which can be used to cooperate with the screw 4 of M2. In other embodiments, the screw 4 and the probe screw hole 14 Size can be adjusted as needed.

The sample stage 1 penetrates from its outer peripheral surface to the sample placement groove 11 and is provided with two opposite fixture mounting holes 12 for placing, fixing and adjusting the sample fixture 3 therein. In other embodiments, three or four clamp mounting holes 12 can also be provided, and correspondingly three or four spring top sheets of the sample clamp 3 can be set to be placed therein to better fix the sample 5 at multiple angles; the clamp The installation hole 12 can also be replaced by a groove opened downward from the upper surface of the sample table 1, and the spring top piece of the corresponding sample fixture 3 can be placed directly from top to bottom when placed, and the corresponding fixture screw hole 13 will also change accordingly. . The fixture installation hole 12 is a fan-shaped fan-shaped hole in the horizontal section, and the fan-shaped opening faces the axis of the sample table 1, so as to ensure that the spring top piece of the sample holder 3 installed in the fixture installation hole 12 has a larger rotation range. In other embodiments, the clamp installation hole 12 may also be a rectangular hole or a waist-shaped hole in a horizontal section whose size is sufficient for the required range of movement of the sample clamp 3 .

The sample stage 1 is also provided with a fixture screw hole 13 that penetrates from the upper end surface of the sample stage 1 to the bottom of the fixture installation hole 12, so that the screw 4 can press the sample fixture 3 on the bottom surface of the fixture installation hole 12. In other embodiments, The fixture screw hole 13 can also be used to penetrate from the lower end surface of the sample table 1 to the upper part of the fixture installation hole 12, so as to press the sample fixture 3 on the upper surface of the fixture installation hole 12.

The inner wall of the sample placement groove 11 of the sample table 1 is provided with cooling holes for cooling the sample placement groove 11 and the samples therein, and the cooling holes are evenly distributed on the bottom wall and the side wall of the sample placement groove 11, In other embodiments, heat dissipation holes may also be provided only on the bottom wall or side wall of the sample placement groove 11 .

As shown in FIGS. 5 to 6 , the probe 2 includes a needle handle 21 and a needle head 22 . The needle handle 21 is in the shape of a cuboid as a whole, and its length, width and height are respectively 10mm, 3mm, and 0.5mm. In other embodiments, the needle handle 21 can also be a waist-shaped sheet or an oval sheet. Adjustment is required. Rectangular long holes of the needle handle are set on the two largest faces of the needle handle 21, for the screw 4 to fix it, and after the screw 4 can be loosened, the screw 4 can slide or rotate in the long hole of the needle handle, so as to ensure that the probe 2. It can be adjusted freely. In other embodiments, the elongated hole of the needle handle can also be a waist-shaped hole or an oval hole or other conveniently adjustable shapes. The length, width and height of the elongated hole of the needle handle are 8mm, 2mm, and 0.5mm respectively. In other embodiments, the specific dimensions can be adjusted as required. For example, when the screw 4 of M1.5 is selected for fastening, the size of the elongated hole of the needle handle can be Correspondingly smaller, the width can be set to 1.5mm and so on.

The needle head 22 is connected to one end in the length direction of the needle handle 21, extends 3 mm in the length direction of the needle handle 21, then bends downwards by 90 degrees, and then extends 4 mm. In other embodiments, the two sections of the needle head 22 that are perpendicular to each other The length can be adjusted as required. For example, when the probe 2 is installed and the distance from the upper surface of the sample 5 is 2 mm, the length of the section where the needle 22 is bent downward can be set to 2-3 mm to ensure that the probe 2 is fixed and its length is 2 mm. The force of the needle head 22 pressing on the sample 5 is appropriate, and can be fine-tuned through the tightness of the screw 4; the length of the section directly connected to the needle handle 21 on the needle head 22 can be adjusted appropriately, and the adjustment needs to cooperate with the overall installation of the probe 2 The position and the length of the long hole on the needle handle 21 need to ensure that the needle head 22 of the probe 2 can extend to any position on the sample 5 when the long hole of the needle handle 21 is covered on the screw 4 for telescopic movement. The end of the downwardly bent section of the needle 22 has a contact 221 for overlapping with the electrode on the sample 5 to realize electrical conduction between the probe 2 and the sample electrode.

As shown in FIGS. 7 to 8 , the sample holder 3 includes two oppositely arranged spring top pieces for fixing the sample on the sample stage 1 . In other embodiments, the sample holder 3 can also be composed of three, four or more spring top pieces, and the increase in the number of spring top pieces can realize the fixing of the sample 5 from multiple angles and directions. The spring top sheet is generally in the shape of a rectangular sheet, and in other embodiments, the shape of the spring top sheet can also be replaced by a waist shape or an oval shape. The length, width and height of the spring top sheet are 8 mm, 3 mm, and 1 mm respectively, and in other embodiments, they can also be adjusted to other sizes as required. The upper and lower sides of the spring top sheet are provided with through long holes 31 for the fixture to be fixed by the screw 4, and after the screw 4 can be loosened, the screw 4 can slide or rotate in the long hole 31 of the fixture to ensure that the sample fixture 3 can Free adjustment, in other embodiments, the long hole 31 of the clamp can also be a waist-shaped hole or an oval hole or other shapes that are convenient for adjustment. The size of the long hole 31 of the fixture is 6mm, 2mm, 1mm. In other embodiments, the size of the long hole 31 of the fixture can be adjusted as required.

In this embodiment, the length, width and height of the sample 5 are respectively 5mm, 5mm, and 0.5mm. The matching adjustment of the long hole 31 of the jig is properly adjusted.

During use of the low temperature test system of the present invention:

When the sample electrode is aligned with the probe 2, since the probe 2 and the sample electrode are very small, it is difficult to observe directly with the naked eye. The independently set probe station can be directly taken out of the test bench chamber, and placed under the microscope for sample electrode alignment. Correct alignment of probe 2, accurate and rapid alignment. When aligning, first place the probe table under the microscope, ensure that the probe fixing screws on the probe table and the sample holder 3 fixing screws are in a loose state, place the sample 5 on the probe table at a suitable position, and use the sample holder 3 to hold Fix the sample 5, tighten the fixing screw of the sample holder 3, align the probes 2 with the electrodes on the sample 5 one by one, and fix the probe 2 by tightening the fixing screw of the probe 2 after each probe 2 is aligned. During the specific alignment process, the pressing force of the probe 2 on the sample 5 can be fine-tuned through the tightness of the screw 4, and the probe can be adjusted by sliding or relative rotation of the screw 4 in the long hole of the needle handle 21 2, the position and angle of the sample 5 can be adjusted by the position or relative rotation of the screw 4 in the clamp slot 31 of the sample clamp 3.

When adjusting, the four probes 2 can adjust the position of the sample 5 at any time according to the needs during the alignment process, so that the sample 5 is in a suitable position. When adjusting, first loosen the fixing screws of the probe 2, and then remove the probe 2 , and then loosen the fixing screw of the sample holder 3, place the sample 5 in a suitable position and repeat the alignment process between the sample electrode and the probe 2 above.

During the connection process, after the alignment is completed, the probe station can be placed on the test platform in the chamber of the test bench, and the four electrode wires in the chamber of the test bench are respectively connected to the rear end of the probe 2 on the probe station. The rear end of the needle 2 has a connection structure connected with the electrode wire. After the connection is completed, place the probe station in a reasonable position in the chamber of the test bench to ensure that the probe station does not touch the inner wall of the chamber, and cover the chamber cover. If the position of the probe station is not suitable during the process of covering the chamber cover Can be adjusted manually at any time. After the upper cover of the chamber is closed, various external test equipment can be connected to it for data measurement. When connecting two ammeters, the four-terminal method can be used to measure resistance.

The specific embodiments of the probe station of the present invention are the same as the specific embodiments of the probe station of the low temperature testing system of the present invention, and will not be repeated here.

Claims (12)

1. a kind of probe station, it is characterised in that：Including sample stage, sample stage is provided with the probe for being connected with sample, probe Rear end have for the attachment structure that is connected with the electrode of testboard within the chamber, be additionally provided with sample stage for fixing sample Sample clamp, sample stage has from sample stage upper table the sample placement groove of the depression that faces down.

2. probe station according to claim 1, it is characterised in that：The sample clamp includes that at least two are oppositely arranged Spring top flat.

3. probe station according to claim 1 and 2, it is characterised in that：The probe includes needle handle and syringe needle, opens on needle handle There is the needle handle elongated hole of insertion upper and lower surface, needle has the contact of bending downwards, and by screw the needle handle elongated hole is passed through Needle handle is pressed on sample stage.

4. probe station according to claim 3, it is characterised in that：The folder of insertion upper and lower surface is provided with the spring top flat Tool elongated hole, is pressed on spring top flat on the sample stage through fixture elongated hole by screw.

5. probe station according to claim 1 and 2, it is characterised in that：The sample stage is round platform, and the sample is placed recessed Groove is cylinder shape groove, and sample stage is additionally provided with the fixture installing hole from sample stage outer peripheral face insertion to cylinder shape groove, fixture peace Dress fixes the sample clamp in hole by screw, and the probe is pressed on the upper surface of sample stage by screw.

6. the probe station according to claim 1,2 or 4, it is characterised in that：The sample placed and laid on the inwall of groove There is louvre.

7. low temperature test system, it is characterised in that：Including low-temperature test platform and the refrigerating plant for low-temperature test platform refrigeration, low temperature Testboard includes testboard chamber and can be put into the probe station of testboard chamber, and testboard chamber includes being located under testboard chamber The test platform in portion and the cavity top cover being located on test platform, probe station includes sample stage, sample stage be provided with for The probe of sample connection, probe rear end and the removable connection of electrode of testboard within the chamber, are additionally provided with for fixing on sample stage The sample clamp of sample, sample stage has from sample stage upper table the sample placement groove of the depression that faces down.

8. low temperature test system according to claim 7, it is characterised in that：The sample clamp includes that at least two is relative The spring top flat of setting.

9. the low temperature test system according to claim 7 or 8, it is characterised in that：The probe includes needle handle and syringe needle, pin The needle handle elongated hole of insertion upper and lower surface is provided with handle, needle has the contact of bending downwards, and by screw the pin is passed through Handle elongated hole is pressed on needle handle on sample stage.

10. low temperature test system according to claim 9, it is characterised in that：It is upper and lower insertion to be provided with the spring top flat The fixture elongated hole on two sides, is pressed on spring top flat on the sample stage through fixture elongated hole by screw.

11. low temperature test systems according to claim 7 or 8, it is characterised in that：The sample stage be round platform, the sample It is cylinder shape groove that product place groove, and sample stage is additionally provided with from the fixture of sample stage outer peripheral face insertion to cylinder shape groove and installs The sample clamp is fixed by screw in hole, fixture installing hole, the probe is pressed on the upper of sample stage by screw On surface.

12. low temperature test systems according to claim 7,8 or 10, it is characterised in that：The sample places the interior of groove Louvre is laid with wall.