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CN106404912B - A kind of internal passive acoustic sensing system and its method for sensing - Google Patents

A kind of internal passive acoustic sensing system and its method for sensing Download PDF

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Publication number
CN106404912B
CN106404912B CN201610772662.XA CN201610772662A CN106404912B CN 106404912 B CN106404912 B CN 106404912B CN 201610772662 A CN201610772662 A CN 201610772662A CN 106404912 B CN106404912 B CN 106404912B
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ultrasonic transducer
signal
acoustic
piezoelectric layer
layer
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CN106404912A (en
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冯雪
付际
韩志远
苏红宏
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Tsinghua University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/07Analysing solids by measuring propagation velocity or propagation time of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/12Analysing solids by measuring frequency or resonance of acoustic waves

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  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention discloses a kind of internal passive acoustic sensing system and its method for sensing.Sensor-based system of the invention includes: control circuit, active ultrasonic transducer, passive type ultrasonic transducer and surface acoustic wave sensor, control circuit and active ultrasonic transducer are arranged in outside measurand, and passive type ultrasonic transducer and surface acoustic wave sensor are arranged inside measurand;In method provided by the invention, the device of the part inside measurand is not necessarily to power supply power supply, therefore the problem of can solve long lasting for work;The present invention is decayed in measurand small using sound wave, and it is deeper to propagate depth, harmless to measurands such as human bodies, and sound wave there are also directive property good, the advantage of high conversion efficiency;Internal passive acoustic sensing system of the invention can be used for content of material or the physical parameter detection of tissue, fuel tank, sink and nuclear reactor internal, realize harmless operation for a long time.

Description

A kind of internal passive acoustic sensing system and its method for sensing
Technical field
The invention belongs to detect sensory field, and in particular to a kind of internal passive acoustic sensing system and its method for sensing.
Background technique
The life signal of organization internal includes blood pressure, cerebral, electrocardio, brain electricity, pulse, blood oxygen and various biochemical substances Content etc..These life signals characterize the health status of life entity, and carry a large amount of vital signs information.Accurate Determining These life signals, it will help judge vital movement signal, the health status of life entity is diagnosed and protected, it can be with According further to the signal of acquisition, disease is targetedly treated and prevented.
Such as: pass through the real-time reading of the life entity brain electricity handicapped to plant person etc., it can be determined that tested life entity Brain activity, and predict its behavior be intended to, and then can by external mechanical assist its activity;By to internal electrocardiosignal Read, it can be determined that whether human body occurs cardiac arrhythmia and atrial fibrillation, and can in time by heart apply extraneous electro photoluminescence with Prevent the generation of sudden death;By the real-time reading to intracorporal blood glucose signal, with real-time judge blood-sugar content and can remind tested Object control diet, the insulin syringe insulin injection of acceptable further auto-control.
But external sensor is currently depended on to the traditional measurement method of life signal, such as the blood pressure of body surface more Meter or ECG detecting equipment etc..The problem of measuring device of this kind of body surface is: measuring point is not the origin of biochemical signals, non-original Position measurement;Measurement inaccuracy;There is delay in measured signal;Vulnerable to outside noise, human motion and body surface deformation interference etc..
If desired accurately these signals are measured, then needs to develop the vital sign signals original for being placed in organization internal Level sensor and its signal transmission system.And the sensor for being placed in organization internal needs to solve following two challenge: energy supply And signal transmission issues.Due to organizing the operative complications problem of inner sensor, operation replacement electricity can not be often carried out Pond, and in view of there are biological tissue's hazardous materials for inside battery, so preferably developing passive senser element.Due to biological group Mostly aqueous tissue abundant is knitted, therefore electromagnetic wave can there can not be effect spread because of deep fades within the organization, need at this time It will be using the new method for transmitting signals being suitable in tissue.
Summary of the invention
In order to realize the real-time in-situ detection of life signal in tissue, and solve energy supply and the signal of respective sensor Transmission problem, the present invention provides a kind of novel internal passive acoustic sensing system and its method for sensing, this method is based on sound The small feature of signal transmission attenuation in measurand provides acoustical signal, quilt using the ultrasonic transducer of measurand outer surface It surveys inside object and is equipped with the surface acoustic wave sensor that energy converter receives the energy and is supplied to inside, surface acoustic wave sensor will be taken Signal with measurand detection information returns to internal ultrasonic transducer, and the ultrasonic transducer inside measurand takes this Using outside sonic transmissions to measurand, the energy converter outside measurand carries out signal receiving and decodes the signal of information.
An object of the present invention is to provide a kind of internal passive acoustic sensing systems.
Internal passive acoustic sensing system of the invention includes: control circuit, active ultrasonic transducer, passive type ultrasound Energy converter and surface acoustic wave sensor;Wherein, control circuit and active ultrasonic transducer are arranged in outside measurand, the two It is connected by electric wire;The surface of emission of active ultrasonic transducer is close to the surface of measurand;Passive type ultrasonic transducer harmony Surface wave sensor is arranged inside measurand, is connected by conducting wire therebetween, the receiving plane of passive type ultrasonic transducer The surface of emission of the active ultrasonic transducer of face;Control circuit issues control signal to active ultrasonic transducer, controls signal Form be electric signal, active ultrasonic transducer converts the electrical signal to acoustical signal, and is transmitted by the surface of measurand To the inside of measurand;Passive type ultrasonic transducer receives acoustical signal, and converts acoustic signals into electric signal transmission to sound table Wave sensor, surface acoustic wave sensor convert the electrical signal to acoustical signal and propagate on surface, the inside object with measurand Matter or physical environment interaction, cause the change of acoustical signal, surface acoustic wave sensor will carry measurand internal information Acoustical signal be converted into electric signal transmission to passive type ultrasonic transducer, passive type ultrasonic transducer converts acoustic signals into telecommunications Launch after number, active ultrasonic transducer receives acoustical signal and converts acoustic signals into electric signal transmission to control circuit, control Processing of circuit analysis processed, extracts the information of measurand.
Control circuit includes: that energy issues module and signal analysis module;Wherein, energy issues module and issues with energy Control signal, such as transient pulse etc., and be transmitted to active ultrasonic transducer;The active ultrasound of signal analysis module processing The information of measurand is extracted and analyzed to the acoustical signal that energy converter receives.
Piezoelectric layer before active ultrasonic transducer includes: external acoustic matching layer, is external, it is external after piezoelectric layer, outside hub Elastic layer and external high quality support construction;Wherein, the piezoelectricity before outside is respectively set in two surfaces of external central elastic layer Layer and it is external after piezoelectric layer, it is external before behind piezoelectric layer and outside the polarization direction of piezoelectric layer it is identical;Piezoelectric layer and outside before outside Opposite outer central elastic layer is arranged symmetrically in piezoelectric layer geometric dimension afterwards;The front surface of piezoelectric layer is the surface of emission before outside, External acoustic matching layer is arranged in the front surface of piezoelectric layer before outside;Outside hub elastic layer is placed on external high quality support construction On, and external high quality support construction is far from the surface of emission;Before outside piezoelectric layer and it is external after piezoelectric layer respectively with control circuit It is electrically connected;Both the electric signal sent from control circuit is transmitted separately to piezoelectric layer and piezoelectric layer behind outside before outside, cause Vibration, and ensure that mode of vibration is bending vibration, piezoelectric layer and piezoelectric layer behind outside convert electrical signals to acoustical signal before outside; External high quality support construction far from surface of emission one end guarantees that energy is predominantly forward when vibration, and then acoustical signal is specified It propagates forward;External acoustic matching layer on the surface of emission is set, reduces acoustical signal from active ultrasonic transducer to tested pair Energy attenuation when as propagating improves propagation efficiency;When passive type ultrasonic transducer sends back to acoustical signal, pass through external acoustic matching Layer, piezoelectric layer and piezoelectric layer behind outside, which are experienced, before outside vibrates and acoustical signal is converted to electric signal, is transmitted to control circuit. It here forward, is the direction relative to the surface of emission of active ultrasonic transducer for forward.
Piezoelectric layer before passive type ultrasonic transducer includes: internal acoustic matching layer, is internal, it is internal after piezoelectric layer, inside center Elastic layer and internal high quality support construction;Wherein, the piezoelectricity before inside is respectively set in two surfaces of internal central elastic layer Layer and it is internal after piezoelectric layer, it is internal before the polarization direction of piezoelectric layer is identical behind piezoelectric layer and inside, and the two is geometrically in Elastic layer is symmetrical;The front surface of piezoelectric layer is receiving plane before inside, and internal sound is arranged in the front surface of piezoelectric layer before inside Matching layer;Inside center elastic layer is placed in high quality support construction, and high quality support construction is received far from receiving plane Face is opposite with the surface of emission of active ultrasonic transducer;Piezoelectric layer and piezoelectric layer behind inside are connected to sound table by conducting wire before inside Wave sensor;Active ultrasonic transducer launches acoustical signal, and piezoelectric layer and piezoelectric layer behind inside experience vibration before inside And acoustical signal is converted into electric signal, and by electric signal transmission to surface acoustic wave sensor;It is returned from surface acoustic wave sensor Carry before the electric signal transmission to inside of measurand internal information piezoelectric layer and it is internal after piezoelectric layer, both cause to vibrate, Acoustical signal is converted electrical signals to, the high quality support construction far from receiving plane one end guarantees that energy is predominantly previous when vibration, And then acoustical signal is specified propagation forward;Inside acoustic matching layer on the receiving surface is set, reduces acoustical signal from tested Energy attenuation when object is propagated to the active ultrasonic transducer of solid, improves propagation efficiency.Here forward, be relative to The direction of the receiving plane of passive type ultrasonic transducer is forward.
Surface acoustic wave sensor includes: piezoelectric substrate, sensitive layer and interdigital electrode;Wherein, piezoelectric substrate uses piezoresistive material Material;Sensitive layer and interdigital electrode are separately positioned in piezoelectric substrate;Interdigital electrode is arranged in the centre of piezoelectric substrate, or arrangement It is located at the both ends of sensitive layer in piezoelectric substrate;Sensitive layer uses the material with the biochemical substances interaction inside measurand Material;Interdigital electrode uses metal material;Electric signal from passive type ultrasonic transducer is converted to acoustical signal simultaneously by interdigital electrode It is propagated on the surface of piezoelectric substrate, the biochemical substances or physical environment inside sensitive layer and measurand interact, and cause quick Sense layer physical characteristic itself changes, and corresponding quantitative variation occurs so as to cause the velocity of wave or resonant frequency of acoustical signal; When interdigital electrode is located at the both ends of sensitive layer, the variation of velocity of wave in acoustical signal is detected;When interdigital electrode is arranged in piezoelectricity base When the centre at bottom, the variation of resonant frequency in acoustical signal is detected, to carry measurand internal information in acoustical signal;Pressure Acoustical signal is converted to electric signal by electric substrate, is transmitted to passive type ultrasonic transducer.
It is another object of the present invention to provide a kind of internal passive acoustics sensor methods.
Internal passive acoustics sensor method of the invention, comprising the following steps:
1) control circuit issues control signal to active ultrasonic transducer, and control signal form is electric signal;
2) surface of emission of active ultrasonic transducer is close to the surface of measurand, converts the electrical signal to acoustical signal, and The inside of measurand is transmitted to by the surface of measurand;
3) the passive type ultrasonic transducer inside measurand is set and receives acoustical signal, and converts acoustic signals into telecommunications Number it is transmitted to surface acoustic wave sensor;
4) surface acoustic wave sensor converts the electrical signal to acoustical signal and propagates on its surface, the inner material of measurand Or physical environment interacts with the acoustical signal propagated on surface, causes the change of acoustical signal;
5) acoustical signal for carrying measurand internal information is converted into electric signal transmission to interior by surface acoustic wave sensor The passive type ultrasonic transducer in portion;
6) passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, active ultrasonic transducer reception sound Signal simultaneously converts acoustic signals into electric signal transmission to control circuit;
7) control circuit processing analysis, extracts the information of measurand.
Wherein, in step 2), active ultrasonic transducer converts the electrical signal to acoustical signal and is transmitted to measurand Inside, specifically includes the following steps:
A) piezoelectric layer and piezoelectric layer behind outside before the electric signal transmission to outside sent from control circuit, cause the two to be shaken It is dynamic, convert electrical signals to acoustical signal;
B) the external high quality support construction far from surface of emission one end guarantees that energy is predominantly forward when vibration, and then sound is believed Number for specified propagation forward;
C) external acoustic matching layer on the surface of emission is set, so that acoustical signal energy propagates in measurand unattenuatedly Portion.
In step 3), passive type ultrasonic transducer converts acoustic signals into electric signal transmission to surface acoustic wave sensor, Specifically includes the following steps:
A) acoustic matching layer damply to be transmitted to passive type ultrasonic transduction from active ultrasonic transducer acoustical signal is low Device;
B) preceding piezoelectric layer and rear piezoelectric layer, which are experienced, vibrates and acoustical signal is converted to electric signal;
C) electric signal transmission is to surface acoustic wave sensor.
In step 4), the inner material or physical environment of surface acoustic wave sensor and measurand interact, specifically The following steps are included:
A) electric signal from passive type ultrasonic transducer is converted to acoustical signal and in the table of piezoelectric substrate by interdigital electrode It propagates in face;
B) it is located at the sensitive layer of piezoelectric substrate performance and the substance inside measurand or physical environment interacts, causes Sensitive layer physical characteristic itself changes;
C) physical characteristic of sensitive layer, which changes, causes the velocity of wave of acoustical signal or resonant frequency to occur accordingly quantitatively Variation.
In step 5), surface acoustic wave sensor converts acoustic signals into electric signal transmission to passive type ultrasonic transducer, Specifically includes the following steps:
A) when interdigital electrode is arranged in the both ends for being located at sensitive layer in piezoelectric substrate, the change of velocity of wave in acoustical signal is detected Change;When interdigital electrode is arranged in the centre of piezoelectric substrate, the variation of resonant frequency in acoustical signal is detected, thus in acoustical signal Carry measurand internal information;
B) acoustical signal for carrying measurand internal information is converted to electric signal by piezoelectric substrate, and it is super to be transmitted to passive type Sonic transducer.
In step 6), passive type ultrasonic transducer is launched after converting acoustic signals into electric signal, and active ultrasound is changed Can device receive acoustical signal and convert acoustic signals into electric signal transmission to control circuit, specifically includes the following steps:
A) it is pressed before the electric signal transmission to inside for carrying measurand internal information returned from surface acoustic wave sensor Piezoelectric layer after electric layer and inside, causes the two to be vibrated, converts electrical signals to acoustical signal;
B) the inside high quality support construction far from receiving plane one end guarantees that energy is predominantly previous when vibration, and then sound is believed Number for specified propagation forward;
C) the inside acoustic matching layer of setting on the receiving surface damply propagates to actively from measurand so that acoustical signal is low Formula ultrasonic transducer;
D) pass through the external acoustic matching layer of active ultrasonic transducer, piezoelectric layer and piezoelectric layer behind outside are experienced before outside It vibrates and acoustical signal is converted into electric signal;
E) electric signal transmission is to control circuit.
In step 7), control circuit processing analysis extracts the information of measurand, specifically includes: control circuit Signal analysis module handles the acoustical signal that active ultrasonic transducer receives, between the acoustical signal medium wave peak returned by monitoring The spectral characteristic of time difference or acoustical signal judges the feature of the inner material of measurand.
Internal passive acoustic sensing system of the invention can be used for tissue, fuel tank, sink and nuclear reactor internal Content of material or physical parameter detection, the part inside measurand be that can work without power supply, therefore may be implemented Harmless operation for a long time.
The present invention uses a special designing sound system, realizes the real-time passive detection to internal PM signals.This Invent in the method provided, the device of the part inside measurand is not necessarily to power supply power supply, therefore can solve long lasting for The problem of work.Compared with traditional passive measuring method based on electromagnetic transmission, the present invention uses acoustical signal as inside The carrier of energy supply and signal transmission, it is advantageous that:
1, electromagnetic wave has apparent decaying in many substance inside, and 2.45GHz electromagnetic wave is in the tissue of 10cm 75dB is decayed to, the simple transmission power that increases will lead to the problems such as power supply fever;Low, the 1MHz sound wave and sound wave is decayed in human body Decaying is only 10dB in the tissue of 10cm;
2, Electromagnetic Wave Propagation depth is limited, and the skin depth of 2.5GHz~5GHz electromagnetic wave is lower than 2cm;And the propagation of sound wave Depth can reach 10cm or more;
3, electromagnetic wave may have injury to human body, and electromagnetic wave firm power is 10mW/cm2, the World Health Organization is by electromagnetism Wave is classified as " being potentially carcinogenic ";And sound wave is harmless, firm power 720mW/cm2
4, electromagnetic wave is easy the interference by other wireless signals and medical instrument;To the interference source of communication sound wave in human body It is extremely limited, and sound wave there are also directive property good, the advantage of high conversion efficiency.
Detailed description of the invention
Fig. 1 is the schematic diagram of internal passive acoustic sensing system of the invention;
Fig. 2 be in internal passive acoustic sensing system of the invention control circuit and active ultrasonic transducer be arranged in it is soft Property substrate on schematic diagram, wherein (a) be top view, (b) be sectional view;
Fig. 3 is active ultrasonic transducer and surface acoustic wave sensor in internal passive acoustic sensing system of the invention Schematic diagram, wherein (a) is top view, (b) is sectional view;
Fig. 4 is the vertical view of one embodiment of the surface acoustic wave sensor of internal passive acoustic sensing system of the invention Figure;
Fig. 5 is the wave of surface acoustic wave sensor when internal passive acoustic sensing system of the invention is used to detect inhibition of HIV The relational graph of speed or the content of resonant frequency and inhibition of HIV.
Specific embodiment
With reference to the accompanying drawing, by specific embodiment, the present invention is further explained.
As shown in Figure 1, the internal passive acoustic sensing system of the present embodiment includes: control circuit 1, active ultrasonic transduction Device 2, passive type ultrasonic transducer 3 and surface acoustic wave sensor 4;Wherein, control circuit 1 and active ultrasonic transducer 2 are arranged In the outside of measurand 5, the two is connected by electric wire;The surface of emission of active ultrasonic transducer 2 is close to the table of measurand 5 Face;Passive type ultrasonic transducer 3 and surface acoustic wave sensor 4 are arranged inside measurand 1, are connected by conducting wire therebetween It connects, the surface of emission of the active ultrasonic transducer 2 of the receiving plane face of passive type ultrasonic transducer 3.
As shown in Fig. 2, control circuit 1 and active ultrasonic transducer 2 are collectively arranged in external flexible substrate 6.
Piezoelectric layer 22 before active ultrasonic transducer 2 includes external acoustic matching layer 21, is external, it is external after piezoelectric layer 24, outer Portion's central elastic layer 23 and external high quality support construction 25;Wherein, it is set respectively on two surfaces of external central elastic layer 23 Set before outside piezoelectric layer 22 and it is external after piezoelectric layer 23, the two geometric dimension is arranged symmetrically, it is external before piezoelectric layer 22 and it is external after The polarization direction of piezoelectric layer 23 is identical;The front surface of piezoelectric layer 22 is the surface of emission, the front surface of piezoelectric layer before outside before outside External acoustic matching layer 21 is set;Outside hub elastic layer 23 is placed in external high quality support construction 35, and external high-quality Support construction 25 is measured far from the surface of emission;Piezoelectric layer 22 and piezoelectric layer 23 behind outside are connected to control circuit 1 before outside.
As shown in figure 3, passive type ultrasonic transducer 3 is connected by flexible extendable conducting wire 8 with surface acoustic wave sensor 4 It connects, passive type ultrasonic transducer 3 is placed in inner flexible substrate 7.
Piezoelectric layer 32 before passive type ultrasonic transducer 3 includes: internal acoustic matching layer 31, is internal, it is internal after piezoelectric layer 34, interior Portion's central elastic layer 33 and internal high quality support construction 35;Wherein, it is set respectively on two surfaces of internal central elastic layer 33 Set before inside piezoelectric layer 31 and it is internal after piezoelectric layer 34, the two geometric dimension is arranged symmetrically, it is internal before piezoelectric layer 32 and it is internal after The polarization direction of piezoelectric layer 34 is identical;The front surface of piezoelectric layer is receiving plane before inside, and the front surface of piezoelectric layer is set before inside Set internal acoustic matching layer;In the internally placed high quality support construction 35 of inside center elastic layer 33, and internal high quality branch For support structure far from receiving plane, receiving plane is opposite with the surface of emission of active ultrasonic transducer;Inside center elastic layer 33 and sound table Wave sensor 4 is electrically connected.
As shown in figure 4, surface acoustic wave sensor 4 includes: piezoelectric substrate 41, sensitive layer 42 and interdigital electrode 43;Wherein, it presses Electric substrate 41 uses piezoelectric material;Sensitive layer 42 and interdigital electrode 43 are separately positioned in piezoelectric substrate 41;43 cloth of interdigital electrode It sets and is located at sensitive 41 layers of both ends in piezoelectric substrate.
To the detection of inhibition of HIV in the present embodiment, illustrate surface acoustic wave sensor of the invention to internal biochemical signals Testing principle:
If measurand is inhibition of HIV (human immunodeficiency virus), being attached to sensitive object on sensitive layer 42 can be with It is the complementary RNA segment specifically bound with inhibition of HIV Ribonucleic RNA, is also possible to and inhibition of HIV capsid is specifically bound Antibody or it is special can in conjunction with inhibition of HIV host and protein structure.
When having inhibition of HIV in measurand tissue or in blood, the RNA and capsid of HIV specific can be integrated to On sensitive layer 42, this combines the speed of sound wave in the change piezoelectric substrate 41 that can be quantified, or changes surface acoustic wave sensor 4 Resonant frequency.As shown in figure 5, the proportional pass of content of the knots modification and inhibition of HIV of surface acoustic wave device velocity of wave or resonant frequency System.
Therefore, the signal received from control circuit 1, can analyze the knots modification of wave beam or resonant frequency, and then give The specific value of the presence or absence of inhibition of HIV and its content out, and can realize prolonged real-time detection.
It is finally noted that the purpose for publicizing and implementing example is to help to further understand the present invention, but this field Technical staff be understood that without departing from the spirit and scope of the invention and the appended claims, it is various replacement and repair It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weigh Subject to the range that sharp claim defines.

Claims (10)

1.一种内部无源声学传感系统,其特征在于,所述传感系统包括:控制电路、主动式超声换能器、被动式超声换能器和声表面波传感器;其中,所述控制电路和主动式超声换能器布置在被测对象外部,二者通过电线连接;所述主动式超声换能器的发射面紧贴被测对象的表面;所述被动式超声换能器和声表面波传感器设置在被测对象内部,二者之间通过导线连接,被动式超声换能器的接收面正对主动式超声换能器的发射面;所述控制电路发出控制信号至主动式超声换能器,控制信号的形式是电信号,主动式超声换能器将电信号转换成声信号,并通过被测对象的表面传输至被测对象的内部;被动式超声换能器接收声信号,并将声信号转换成电信号传输至声表面波传感器,声表面波传感器将电信号转换成声信号并在表面传播,与被测对象的内部物质或物理环境相互作用,引起声信号的改变,声表面波传感器将携带有被测对象内部信息的声信号转换成电信号传输至被动式超声换能器,被动式超声换能器将声信号转换成电信号后发射出,主动式超声换能器接收声信号并将声信号转换成电信号传输至控制电路,控制电路处理分析,提取出被测对象的信息。1. An internal passive acoustic sensing system, characterized in that the sensing system comprises: a control circuit, an active ultrasonic transducer, a passive ultrasonic transducer and a surface acoustic wave sensor; wherein, the control circuit and the active ultrasonic transducer are arranged outside the measured object, and the two are connected by wires; the emission surface of the active ultrasonic transducer is close to the surface of the measured object; the passive ultrasonic transducer and the surface acoustic wave The sensor is arranged inside the measured object, and the two are connected by a wire. The receiving surface of the passive ultrasonic transducer is facing the emitting surface of the active ultrasonic transducer; the control circuit sends a control signal to the active ultrasonic transducer. , the control signal is in the form of an electrical signal. The active ultrasonic transducer converts the electrical signal into an acoustic signal and transmits it to the interior of the measured object through the surface of the measured object; the passive ultrasonic transducer receives the acoustic signal and converts the acoustic signal to the inside of the measured object. The signal is converted into an electrical signal and transmitted to the surface acoustic wave sensor. The surface acoustic wave sensor converts the electrical signal into an acoustic signal and propagates on the surface, interacting with the internal material or physical environment of the measured object, causing the change of the acoustic signal. The sensor converts the acoustic signal carrying the internal information of the measured object into an electrical signal and transmits it to the passive ultrasonic transducer. The passive ultrasonic transducer converts the acoustic signal into an electrical signal and emits it. Convert the acoustic signal into an electrical signal and transmit it to the control circuit, the control circuit processes and analyzes, and extracts the information of the measured object. 2.如权利要求1所述的传感系统,其特征在于,所述控制电路包括:能量发出模块和信号分析模块;其中,能量发出模块发出带有能量的控制信号,并传输至主动式超声换能器;信号分析模块处理主动式超声换能器收到的声信号,提取和分析被测对象的信息。2. The sensing system according to claim 1, wherein the control circuit comprises: an energy sending module and a signal analysis module; wherein, the energy sending module sends out a control signal with energy, and transmits it to the active ultrasound Transducer; the signal analysis module processes the acoustic signal received by the active ultrasonic transducer, extracts and analyzes the information of the measured object. 3.如权利要求1所述的传感系统,其特征在于,所述主动式超声换能器包括:外部声匹配层、外部前压电层、外部后压电层、外部中心弹性层和外部高质量支撑结构;其中,在外部中心弹性层的两个表面分别设置外部前压电层和外部后压电层,所述外部前压电层和外部后压电层的极化方向相同;所述外部前压电层和外部后压电层几何尺寸上相对外部中心弹性层对称布置;所述外部前压电层的前表面为发射面,在外部前压电层的前表面设置外部声匹配层;所述外部中心弹性层放置在外部高质量支撑结构上,并且外部高质量支撑结构远离发射面;所述外部前压电层和外部后压电层分别与控制电路电学连接;从控制电路发来的电信号分别传输至外部前压电层和外部后压电层,引起二者振动,并确保振动方式为弯曲振动,外部前压电层和外部后压电层将电信号转化为声信号;远离发射面一端的外部高质量支撑结构保证振动时能量主要为向前,进而声信号为指定的向前传播;设置在发射面上的外部声匹配层,降低了声信号从主动式超声换能器向被测对象传播时的能量衰减;被动式超声换能器发回声信号时,通过外部声匹配层,外部前压电层和外部后压电层感受到振动并将声信号转换为电信号,传输至控制电路。3. The sensing system of claim 1, wherein the active ultrasonic transducer comprises: an outer acoustic matching layer, an outer front piezoelectric layer, an outer rear piezoelectric layer, an outer central elastic layer, and an outer A high-quality support structure; wherein, an outer front piezoelectric layer and an outer rear piezoelectric layer are respectively provided on two surfaces of the outer central elastic layer, and the polarization directions of the outer front piezoelectric layer and the outer rear piezoelectric layer are the same; so The outer front piezoelectric layer and the outer rear piezoelectric layer are geometrically arranged symmetrically relative to the outer central elastic layer; the front surface of the outer front piezoelectric layer is an emission surface, and an external acoustic matching is arranged on the front surface of the outer front piezoelectric layer. layer; the outer central elastic layer is placed on the outer high-quality support structure, and the outer high-quality support structure is away from the emitting surface; the outer front piezoelectric layer and the outer rear piezoelectric layer are respectively electrically connected to the control circuit; from the control circuit The electrical signal sent is transmitted to the external front piezoelectric layer and the external rear piezoelectric layer respectively, causing them to vibrate, and ensuring that the vibration mode is bending vibration. The external front piezoelectric layer and the external rear piezoelectric layer convert the electrical signal into sound. Signal; the external high-quality support structure at one end away from the emitting surface ensures that the energy is mainly forward when vibrating, and then the acoustic signal propagates forward as specified; the external acoustic matching layer set on the emitting surface reduces the acoustic signal The energy attenuation of the transducer when it propagates to the measured object; when the passive ultrasonic transducer sends an echo signal, the external acoustic matching layer, the external front piezoelectric layer and the external rear piezoelectric layer feel the vibration and convert the acoustic signal into electrical signals. The signal is transmitted to the control circuit. 4.如权利要求1所述的传感系统,其特征在于,所述被动式超声换能器包括:内部声匹配层、内部前压电层、内部后压电层、内部中心弹性层和内部高质量支撑结构;其中,在内部中心弹性层的两个表面分别设置内部前压电层和内部后压电层,所述内部前压电层和内部后压电层的极化方向相同,且两者在几何上沿中弹性层对称分布;内部前压电层的前表面为接收面,在内部前压电层的前表面设置内部声匹配层;所述内部中心弹性层放置在高质量支撑结构上,并且高质量支撑结构远离接收面,接收面与主动式超声换能器的发射面相对;所述内部前压电层和内部后压电层通过导线连接至声表面波传感器;主动式超声换能器发射出声信号,内部前压电层和内部后压电层感受到振动并将声信号转换为电信号,并将电信号传输至声表面波传感器;从声表面波传感器返回的携带有被测对象内部信息的电信号传输至内部前压电层和内部后压电层,引起二者振动,将电信号转化为声信号,远离接收面一端的高质量支撑结构保证振动时能量主要为先前,进而声信号为指定的向前传播;设置在接收面上的内部声匹配层,降低了声信号在从被测对象向固体的主动式超声换能器传播时的能量衰减。4. The sensing system of claim 1, wherein the passive ultrasonic transducer comprises: an inner acoustic matching layer, an inner front piezoelectric layer, an inner rear piezoelectric layer, an inner central elastic layer, and an inner high piezoelectric layer. A mass support structure; wherein, an inner front piezoelectric layer and an inner rear piezoelectric layer are respectively provided on the two surfaces of the inner central elastic layer, and the inner front piezoelectric layer and the inner rear piezoelectric layer have the same polarization direction, and the two The front surface of the inner front piezoelectric layer is the receiving surface, and the inner acoustic matching layer is arranged on the front surface of the inner front piezoelectric layer; the inner center elastic layer is placed on a high-quality support structure and the high-quality support structure is far away from the receiving surface, and the receiving surface is opposite to the transmitting surface of the active ultrasonic transducer; the inner front piezoelectric layer and the inner rear piezoelectric layer are connected to the surface acoustic wave sensor through wires; the active ultrasonic transducer The transducer emits an acoustic signal, the inner front piezoelectric layer and the inner rear piezoelectric layer feel the vibration and convert the acoustic signal into an electrical signal, and transmit the electrical signal to the surface acoustic wave sensor; The electrical signal with the internal information of the measured object is transmitted to the internal front piezoelectric layer and the internal rear piezoelectric layer, causing the two to vibrate, converting the electrical signal into an acoustic signal, and the high-quality support structure at one end away from the receiving surface ensures that the energy is mainly during vibration. For the previous, and then the acoustic signal is the designated forward propagation; the internal acoustic matching layer arranged on the receiving surface reduces the energy attenuation of the acoustic signal when it propagates from the measured object to the solid active ultrasonic transducer. 5.如权利要求1所述的传感系统,其特征在于,所述声表面波传感器包括:压电基底、敏感层和叉指电极;其中,所述压电基底采用压电材料;所述敏感层和叉指电极分别设置在压电基底上;所述叉指电极布置在压电基底的中间,或者布置在压电基底上位于敏感层的两端;所述敏感层采用与被测对象内部的生化物质相互作用的材料;所述叉指电极采用金属材料;叉指电极将来自被动式超声换能器的电信号转换为声信号并在压电基底的表面传播,敏感层与被测对象内部的生化物质或物理环境相互作用,引起敏感层本身物理特性发生变化,从而导致声信号的波速或者共振频率发生相应的定量变化;当叉指电极位于敏感层的两端时,检测到声信号中波速的变化;当叉指电极布置在压电基底的中间时,检测到声信号中共振频率的变化,从而声信号中携带有被测对象内部信息;压电基底将声信号转化成电信号,传输至被动式超声换能器。5. The sensing system according to claim 1, wherein the surface acoustic wave sensor comprises: a piezoelectric substrate, a sensitive layer and an interdigital electrode; wherein, the piezoelectric substrate is made of piezoelectric material; the The sensitive layer and the interdigital electrodes are respectively arranged on the piezoelectric substrate; the interdigitated electrodes are arranged in the middle of the piezoelectric substrate, or are arranged on the piezoelectric substrate at both ends of the sensitive layer; The internal biochemical material interacts with the material; the interdigital electrode is made of metal material; the interdigital electrode converts the electrical signal from the passive ultrasonic transducer into an acoustic signal and propagates on the surface of the piezoelectric substrate, the sensitive layer and the measured object The internal biochemical substances or physical environment interact, causing the physical properties of the sensitive layer to change, resulting in a corresponding quantitative change in the wave speed or resonance frequency of the acoustic signal; when the interdigital electrodes are located at both ends of the sensitive layer, the acoustic signal is detected. The change of the medium wave speed; when the interdigital electrode is arranged in the middle of the piezoelectric substrate, the change of the resonance frequency in the acoustic signal is detected, so that the acoustic signal carries the internal information of the measured object; the piezoelectric substrate converts the acoustic signal into an electrical signal , transmitted to the passive ultrasonic transducer. 6.一种内部无源声学传感方法,其特征在于,所述传感方法包括以下步骤:6. An internal passive acoustic sensing method, wherein the sensing method comprises the following steps: 1)控制电路发出控制信号至主动式超声换能器,控制信号形式为电信号;1) The control circuit sends a control signal to the active ultrasonic transducer, and the control signal is in the form of an electrical signal; 2)主动式超声换能器的发射面紧贴被测对象的表面,将电信号转换成声信号,并通过被测对象的表面传输至被测对象的内部;2) The emitting surface of the active ultrasonic transducer is close to the surface of the measured object, converts the electrical signal into an acoustic signal, and transmits it to the inside of the measured object through the surface of the measured object; 3)设置在被测对象内部的被动式超声换能器接收声信号,并将声信号转换成电信号传输至声表面波传感器;3) The passive ultrasonic transducer arranged inside the measured object receives the acoustic signal, and converts the acoustic signal into an electrical signal and transmits it to the surface acoustic wave sensor; 4)声表面波传感器将电信号转换成声信号并在其表面传播,被测对象的内部物质或物理环境与在表面传播的声信号相互作用,引起声信号的改变;4) The surface acoustic wave sensor converts the electrical signal into an acoustic signal and propagates on its surface. The internal material or physical environment of the measured object interacts with the acoustic signal propagating on the surface, causing the change of the acoustic signal; 5)声表面波传感器将携带有被测对象内部信息的声信号转换成电信号传输至内部的被动式超声换能器;5) The surface acoustic wave sensor converts the acoustic signal carrying the internal information of the measured object into an electrical signal and transmits it to the internal passive ultrasonic transducer; 6)被动式超声换能器将声信号转换成电信号后发射出,主动式超声换能器接收声信号并将声信号转换成电信号传输至控制电路;6) The passive ultrasonic transducer converts the acoustic signal into an electrical signal and emits it, and the active ultrasonic transducer receives the acoustic signal and converts the acoustic signal into an electrical signal and transmits it to the control circuit; 7)控制电路处理分析,提取出被测对象的信息。7) The control circuit processes and analyzes, and extracts the information of the measured object. 7.如权利要求6所述的传感方法,其特征在于,在步骤2)中,主动式超声换能器将电信号转换成声信号传输至被测对象的内部,具体包括以下步骤:7. The sensing method of claim 6, wherein in step 2), the active ultrasonic transducer converts the electrical signal into an acoustic signal and transmits it to the inside of the measured object, specifically comprising the following steps: a)从控制电路发来的电信号传输至外部前压电层和外部后压电层,引起二者振动,将电信号转化为声信号;a) The electrical signal sent from the control circuit is transmitted to the external front piezoelectric layer and the external rear piezoelectric layer, causing the two to vibrate, converting the electrical signal into an acoustic signal; b)远离发射面一端的外部高质量支撑结构保证振动时能量主要为向前,进而声信号为指定的向前传播;b) The external high-quality support structure at one end away from the emitting surface ensures that the energy is mainly forward during vibration, and then the acoustic signal propagates forward as specified; c)设置在发射面上的外部声匹配层,使得声信号能量不衰减地传播至被测对象内部。c) The external acoustic matching layer is arranged on the emitting surface, so that the acoustic signal energy is propagated to the inside of the measured object without attenuation. 8.如权利要求6所述的传感方法,其特征在于,在步骤3)中,被动式超声换能器将声信号转换成电信号传输至声表面波传感器,具体包括以下步骤:8. The sensing method of claim 6, wherein in step 3), the passive ultrasonic transducer converts the acoustic signal into an electrical signal and transmits it to the surface acoustic wave sensor, specifically comprising the following steps: a)声匹配层使得来自主动式超声换能器声信号低衰减地传输至被动式超声换能器;a) The acoustic matching layer enables the acoustic signal from the active ultrasonic transducer to be transmitted to the passive ultrasonic transducer with low attenuation; b)前压电层和后压电层感受到振动并将声信号转换为电信号;b) The front piezoelectric layer and the rear piezoelectric layer sense the vibration and convert the acoustic signal into an electrical signal; c)电信号传输至声表面波传感器。c) The electrical signal is transmitted to the surface acoustic wave sensor. 9.如权利要求6所述的传感方法,其特征在于,在步骤4)中,声表面波传感器与被测对象的内部物质或物理环境相互作用,具体包括以下步骤:9. The sensing method according to claim 6, wherein in step 4), the surface acoustic wave sensor interacts with the internal material or physical environment of the measured object, specifically comprising the following steps: a)叉指电极将来自被动式超声换能器的电信号转换为声信号并在压电基底的表面传播;a) Interdigital electrodes convert electrical signals from passive ultrasonic transducers to acoustic signals and propagate on the surface of the piezoelectric substrate; b)位于压电基底表现的敏感层与被测对象内部的物质或物理环境相互作用,引起敏感层本身物理特性发生变化;b) The sensitive layer located on the piezoelectric substrate interacts with the material or physical environment inside the measured object, causing the physical properties of the sensitive layer itself to change; c)敏感层的物理特性发生改变导致声信号的波速或者共振频率发生相应的定量变化。c) Changes in the physical properties of the sensitive layer lead to corresponding quantitative changes in the wave speed or resonance frequency of the acoustic signal. 10.如权利要求6所述的传感方法,其特征在于,在步骤5)中,声表面波传感器将声信号转换成电信号传输至被动式超声换能器,具体包括以下步骤:10. The sensing method of claim 6, wherein in step 5), the surface acoustic wave sensor converts the acoustic signal into an electrical signal and transmits it to the passive ultrasonic transducer, specifically comprising the following steps: a)当叉指电极布置在压电基底上位于敏感层的两端时,检测到声信号中波速的变化;当叉指电极布置在压电基底的中间时,检测到声信号中共振频率的变化,从而声信号中携带有被测对象内部信息;a) When the interdigital electrodes are arranged on the piezoelectric substrate at both ends of the sensitive layer, the change of the wave speed in the acoustic signal is detected; when the interdigital electrodes are arranged in the middle of the piezoelectric substrate, the change in the resonant frequency in the acoustic signal is detected changes, so that the acoustic signal carries the internal information of the measured object; b)压电基底将携带有被测对象内部信息的声信号转化成电信号,传输至被动式超声换能器。b) The piezoelectric substrate converts the acoustic signal carrying the internal information of the measured object into an electrical signal and transmits it to the passive ultrasonic transducer.
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