CN1062992C - Piezoelectric ultrasonic micro-motor based on bending vibration mode - Google Patents
Piezoelectric ultrasonic micro-motor based on bending vibration mode Download PDFInfo
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- CN1062992C CN1062992C CN97111805A CN97111805A CN1062992C CN 1062992 C CN1062992 C CN 1062992C CN 97111805 A CN97111805 A CN 97111805A CN 97111805 A CN97111805 A CN 97111805A CN 1062992 C CN1062992 C CN 1062992C
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Abstract
The invention belongs to the technical field of piezoelectric ultrasonic micromotors, and comprises a central shaft, a stator and a rotor, wherein the stator and the rotor are sleeved on the central shaft; the central shaft is arranged in the two bearings, is tightly matched with the rotor through the pressure mechanism, and outputs the torque of the rotor. The motor can be allowed to have stronger load carrying capacity, and a transmission mechanism with load is simplified, so that the motor becomes an independent driving element with simple structure; in addition, the end face of the contact surface between the stator and the rotor is cut with a plurality of grooves, so that larger fluctuation amplitude can be excited on the surface of the end face of the stator, and the friction transmission effect between the stator and the rotor is improved.
Description
The invention belongs to piezoelectric ultrasonic micromotor technical field, particularly based on the structural design of the cylindric piezoelectric ultrasonic micromotor of free bend vibration mode.
The piezoelectric ultrasonic micromotor is widely used as the driving element of precision instrument.Japan has announced one and has been entitled as the patent of " ultrasound waves motor " on December 24th, 1993, this patent is a kind of typical piezoelectric ultrasonic micromotor based on sandwich piezoelectric ceramic transducer beam mode, its structure as shown in Figure 1, this motor stator 10 is fixed on the fixed object 18, motor stator is by following match block 101, last match block 102, the piezoelectric ceramic 103 that presses between the piece is up and down formed, last match block is a bellows, one center fixation screw rod-12, to place piezoelectric ceramic therebetween to compress by the screw thread of match block centre bore up and down, the screw rod lower end is screwed in the fixed object 18 and is connected with it.The motor rotor 11 that has toothed disc inserts the screw rod upper end, is pressed on 102 upper surfaces and its tight contact by nut 121.
After giving this motor piezoelectric ceramic input electrical signal, at immobile interface one end place motor stator form fluctuation nodal section, other end motor rotor is a free end face, and it is moving then to produce the row wave-wave, motor rotor 11 produces moment output around fixed axis 12 rotations by epitrochanterian gear 110.
This motor has following weak point, one, motor are not independent components, and motor stator must be fixed on certain fixed object or the heavier object, could form the fluctuation nodal section at stationary plane, produce fluctuation output at free end, its two, when rotor loading is big, to make rotor be subjected to the cross force of a vertical axial, the uniform pressure that changes between rotor, stator is distributed, cause relying on the rotary speed unstabilization of the rotor of frictional force output torque, output torque descends; Its three, rotor relies on gear output, being driven part also must be that gear rotates, and makes whole drive mechanism complexity, the cost height; They are four years old, owing to be subjected to the motor stator size restrictions, the outside diameter of gear on the motor rotor can not be less than stator dimensions, small-sized when actuator, the result causes the gear wheel rotation pinion, and rotating speed is accelerated on the contrary, have to take the method for a plurality of gears rotations for this reason, speed is subtracted get off, this is not easy to be used in some limited space systems, requires the accurate occasion that drives of low speed.
The objective of the invention is to for overcoming the weak point of prior art, the novel piezoelectric ultrasonic wave micromotor of a kind of output torque is proposed, make it not only under same input electric power situation, can be in the bigger fluctuation amplitude of stator faces surface excitation, improve the frictional drive effect between stator, the rotor, and make it become a kind of independent component simple in structure, have working stability, the plurality of advantages that the life-span is long, volume is little.
The present invention proposes a kind of cylindric piezoelectric ultrasonic micromotor structure based on beam mode, comprise central shaft and be placed in stator and rotor on the axle, said stator is made of the upper and lower match block and the piezoelectric ceramic ring plate of pressing among upper and lower match block, said upward match block is a bellows, said rotor presses the upper end of going up match block in said, the upper/lower terminal inwall that it is characterized in that said stator is equipped with pair of bearings, said central shaft overweights among the two bearings, and said rotor and said central shaft are by the pressure mechanism tight fit.
The end face that the said bellows of the present invention contacts with rotor can have been cut a plurality of notches.Said pressure mechanism is by central shaft upper end flange connecting dish, spring leaf, and a ring-shaped rubber sheet that the rotor upper surface is stained with and an axle shelves snap ring that inserts axle bottom one cannelure constitute.
The said down match block of the present invention can be a cylindrical piece that has pretension screw rod and a central through hole, and said piezoelectric ceramic ring plate is placed in outside this screw rod, and insulating case also can be arranged between piezoelectric ceramic ring plate and the screw rod; There are internal thread and this screw rod to screw togather and compress said piezoelectric ceramic ring plate in the center hole of said bellows lower end.
Place, match block lower surface can have a cannelure under the said central shaft of the present invention was positioned at, and a said shelves snap ring is embedded in wherein.
The said motor of the present invention is based on excellent freedom-free bend vibration mode.
The said piezoelectric ceramic ring plate of the present invention can adopt the flexible piezoelectric ceramic material of high piezoelectric constant d33 low Qm Qm to make.
Micromotor of the present invention has following characteristics:
The first, the present invention is based on the freedom-free bend vibration mode of rod, need not link to each other with a fixture, need not make stator one end produce node, an end produces wave amplitude, but one independently, make the driving element that free bend vibrates.Thereby make it have wider application scenario;
Second, the present invention is provided with the pair of bearings element, rotor drives the central shaft output torque by an elastic pressure mechanism, make stronger carrying load ability is arranged under identical electromotive power output, particularly when bearing the asymmetric load of vertical axial direction, show better load performance, and simplify the transmission mechanism that produces moment output.
The 3rd, bellows of the present invention upper surface has groove, scalable fluctuation amplitude and improve the friction-driven effect.
The 4th, the present invention adopts high piezoelectric constant d33, than the flexible piezoelectric ceramic of low Qm Qm, can make motor have wide operating frequency, need not frequency-tracking, and drive circuit is greatly simplified, and also need not to feed back piezoelectric ceramic piece on the motor stator.
Brief Description Of Drawings:
Fig. 1 is the micromotor structural representation of prior art.
Fig. 2 is an embodiments of the invention general structure schematic diagram.
Fig. 3 is a present embodiment pressure mechanism schematic diagram.
Fig. 4 is present embodiment piezoelectric ceramic and energisation mode schematic diagram.
The present invention designs a kind of piezoelectric ultrasonic micromotor embodiment based on beam mode, and its structure is described with reference to the accompanying drawings as follows as shown in Figure 2:
The general structure of present embodiment as shown in Figure 2, this motor is by stator 20, rotor 21, central shaft 22 and pressure mechanism 24 are formed.Wherein stator 20 is by the bellows 201 that amplifies the flexural vibrations amplitude, produce two pairs of piezoelectric ceramic ring plates 202 of the dynamo-electric conversion element of flexural vibrations, link to each other with bellows, and the following match block 203 that piezoelectric ceramic piece is pressed on wherein constitutes a sandwich free bend vibration mode driving stator.Following match block 203 is to be made of the cylinder 2031 that has central through hole and the tight screw rod 2032 that gives that joins together with it, screw rod 2032 cooperates connection with bellows 201 bottom screws, compresses being placed in to give on the tight screw rod and by the piezoelectric ceramic 202 of insulating case 2021 with its insulation.
The inner pair of bearings 231,232 of installing in the following match block bottom of stator and bellows upper end is felt relieved central shaft 22 preferably: central shaft is by pressure mechanism 24 and rotor tight fit, and rotor can drive central shaft and produce moment output.One group of groove 2011 has been cut in the upper surface of bellows, constitutes the fluctuation output face of motor stator.The effect of groove 2011 is to amplify crooked fluctuation amplitude and increase stator, and the friction effect between the rotor improves moment output.When relying on fluctuation and friction to drive rotor, occur some fine particles in the output face meeting because of frictional dissipation, another effect of groove 2011 is to allow these particles to fall into groove, thereby improves the stationarity of motor operation.
The pressure mechanism 24 of present embodiment as shown in Figure 3.The motor pressure mechanism is by central shaft 22 upper end flange connecting dishes 241, and by the spring leaf 242 that pin 245 connects with ring flange 241, the snap ring 244 of ring-shaped rubber sheet 243 that the rotor upper surface is stained with and insertion axle 22 bottoms one cannelure 221 constitutes.The motor central shaft is by the constant pressure between above-mentioned pressure mechanism maintenance rotor and the stator, when rotor rotates anti-, drive axle rotation together by the frictional force that is bonded at epitrochanterian sheet rubber and press between the elasticity butterfly sheet on it, metal (upper on the stator plays the dead axle heart to central shaft, allow the motor central shaft when bringing onto load is exported, to bear transverse load, and do not influence pressure between rotor, the stator, and make rotor output more steady strong, carrying load ability is stronger.Adopt axle output, can save the inconvenience of gear output.
One group of piezo ceramic element of present embodiment excitation flexural vibrations and energisation mode are as shown in Figure 4.Pair of orthogonal voltage signal Simwt, coswt are input in two groups of piezoelectric ceramic ring plates 2021,2022, and its operating frequency is the resonance frequency of motor stator.The piezoelectric ceramic of present embodiment is to adopt a kind of soft, high piezoelectric constant (d33＞580 * 10-12 C/N), the material of low mechanical quality prime number (Qm～100), has broadband, need not the frequency-tracking on the circuit, need not to be used for the piezo ceramic element of signal feedback, the motor driven power supply is more simplified.
The piezoelectric ultrasonic micromotor of present embodiment demonstrates low speed, big moment and excellent high-resolution (～0.010 °) characteristic, and its major parameter and performance index are as follows: overall dimension is column type, diameter: φ 15mm, long 30mm; Operating frequency: 35KHz; No-load speed: 71.4 rev/mins; Maximum moment: 550gf.cm; Minimum angular resolution: 0.010 °.
Claims (6)
1, a kind of piezoelectric ultrasonic micromotor based on beam mode, comprise central shaft and be placed in stator and rotor on the axle, said stator is made of the upper and lower match block and the piezoelectric ceramic ring plate of pressing among upper and lower match block, said upward match block is a bellows, said rotor presses the upper end of going up match block in said, the upper/lower terminal inwall that it is characterized in that said stator is equipped with pair of bearings, said central shaft places among the two bearings, and said rotor and said central shaft are by the pressure mechanism tight fit.
2, the piezoelectric ultrasonic micromotor based on beam mode as claimed in claim 1 is characterized in that the end face that said bellows contacts with rotor has been cut a plurality of notches.
3, the piezoelectric ultrasonic micromotor based on beam mode as claimed in claim 1, it is characterized in that, said pressure mechanism is by central shaft upper end flange connecting dish, spring leaf, the ring-shaped rubber sheet that the rotor upper surface is stained with and the axle shelves snap ring formation of inserting central shaft bottom one cannelure.
4, the piezoelectric ultrasonic micromotor based on beam mode as claimed in claim 1, it is characterized in that, said match block down is a cylindrical piece that has pretension screw rod and central through hole, said piezoelectric ceramic ring plate is placed in outside this screw rod, has internal thread and this screw rod to screw togather and compress said piezoelectric ceramic ring plate in the center hole of said bellows lower end.
5, the piezoelectric ultrasonic micromotor based on beam mode as claimed in claim 1 is characterized in that, place, match block lower surface had a cannelure under said central shaft was positioned at, and a said shelves snap ring is embedded in wherein.
As the said piezoelectric ultrasonic micromotor of claim 1, it is characterized in that 6, said piezoelectric ceramic ring plate adopts the flexible piezoelectric ceramic material of high piezoelectric constant d33 low Qm Qm to make based on beam mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN97111805A CN1062992C (en) | 1997-06-20 | 1997-06-20 | Piezoelectric ultrasonic micro-motor based on bending vibration mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN97111805A CN1062992C (en) | 1997-06-20 | 1997-06-20 | Piezoelectric ultrasonic micro-motor based on bending vibration mode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1169055A CN1169055A (en) | 1997-12-31 |
| CN1062992C true CN1062992C (en) | 2001-03-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN97111805A Expired - Fee Related CN1062992C (en) | 1997-06-20 | 1997-06-20 | Piezoelectric ultrasonic micro-motor based on bending vibration mode |
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| Country | Link |
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| CN (1) | CN1062992C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1082274C (en) * | 1998-08-28 | 2002-04-03 | 清华大学 | Cylindrical piezoelectric ultrasonic micromotor based on free bending vibration mode |
| CN102151829A (en) * | 2011-03-22 | 2011-08-17 | 哈尔滨工业大学 | Assisted densification ultrasonic vibration and deposition device for spray-formed deposition billet |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05344758A (en) * | 1992-06-08 | 1993-12-24 | Alps Electric Co Ltd | Ultrasonic motor |
| JPH05344759A (en) * | 1992-06-09 | 1993-12-24 | Olympus Optical Co Ltd | Ultrasonic motor |
-
1997
- 1997-06-20 CN CN97111805A patent/CN1062992C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05344758A (en) * | 1992-06-08 | 1993-12-24 | Alps Electric Co Ltd | Ultrasonic motor |
| JPH05344759A (en) * | 1992-06-09 | 1993-12-24 | Olympus Optical Co Ltd | Ultrasonic motor |
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| Publication number | Publication date |
|---|---|
| CN1169055A (en) | 1997-12-31 |
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| CF01 | Termination of patent right due to non-payment of annual fee |