CN106116175B - 一种防火金银蓝low-e玻璃 - Google Patents
一种防火金银蓝low-e玻璃 Download PDFInfo
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- 239000011521 glass Substances 0.000 title claims abstract description 43
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 title claims abstract description 13
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical group [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910001120 nichrome Inorganic materials 0.000 claims abstract description 11
- 239000010935 stainless steel Substances 0.000 claims abstract description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 11
- 229910003087 TiOx Inorganic materials 0.000 claims abstract description 10
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical group CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910018138 Al-Y Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 229910052709 silver Inorganic materials 0.000 claims description 14
- 239000004332 silver Substances 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 5
- 229910007717 ZnSnO Inorganic materials 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 230000009970 fire resistant effect Effects 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 abstract description 12
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 177
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000001755 magnetron sputter deposition Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 5
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000005328 architectural glass Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- OLFCLHDBKGQITG-UHFFFAOYSA-N chromium(3+) nickel(2+) oxygen(2-) Chemical compound [Ni+2].[O-2].[Cr+3] OLFCLHDBKGQITG-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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Abstract
本发明公开了一种防火金银蓝low‑e玻璃，包括玻璃基片，在玻璃基的复合面上由内到外依次相邻地复合有十六个膜层，第一膜层为SSTZrOx层，第二层为ZnAlOx层，第三层为SnO2层，第四层为Co‑Ni‑Cr‑Al‑Y层，第五层为ZnAlOx层，第六层为SiAlNx层，第七层为TiOx层，第八层为氧化不锈钢层，第九层为ZnSnO2层，第十层为NiCrOx层，第十一层为AZO层,第十二层为Ag层，第十三层为CrNxOy层，第十四层为ZrNbOx层，第十五层为Si3N4层，第十六层为NiCr层。本发明的有益效果是：1、本发明采用新型膜系结构，提高了膜层的硬度及致密性；2、色泽均匀鲜艳，更明显呈现金银蓝色，具有较高透光率；3、最外层采用Si3N4层和NiCr层，不仅能够实现降低辐射的效果，而且防火性能良好。
Description
技术领域
本发明涉及low-e玻璃领域，具体是涉及一种防火金银蓝low-e玻璃。
背景技术
据统计，我国建筑物能耗已经占到全国年能源消耗总量的27.8％，经由门窗流失的热量更是占到了建筑物总能耗的一半以上。近年来社会各界对可持续发展以及节能减排工作的愈发关注，建筑业对门窗玻璃的性能要求也大幅提高。LOW-E玻璃因为有着优异的热性能和良好的光学性能，在社会生活中的运用越来越广泛，品种也越来越多。
而在LOW-E玻璃发展近30年的历程中，从最初的单银LOW-E玻璃，发展成为双银LOW-E玻璃，近些年又开发出了三银LOW-E玻璃产品，三银LOW-E玻璃具有较高的可见光透射比，可保证室内足够的自然采光，有更低的太阳红外线透射比和更低的传热系数，是目前世界建筑领域公认的最节能、最符合人性需求的建筑玻璃。
在热学方面，三银LOW-E玻璃保持了较低的U值，夜晚通过限制对流传导传热阻止室内的远红外辐射泄出室外，且具有较高的遮阳系数和G值，使三银玻璃的节能效果大幅度提升，同比普通玻璃的节能水平提高80％。这一方面是现代建筑对能耗节约的需求驱动，更是人们节能、环保、低碳生活意识的提高所致。
在现有技术中，合理的膜层结构设计对Low-E玻璃的透过率、可加工性影响至关重要，膜层厚度和厚度均匀性是决定镀膜玻璃颜色及其均匀性的关键因素，这些也都是目前Low-E玻璃设计和生产的瓶颈和难点。
发明内容
本发明的目的在于提供一种膜层结构合理，耐磨耐腐蚀的防火金银蓝low-e玻璃。
本发明采用的技术方案为：一种防火金银蓝low-e玻璃，包括玻璃基片，在玻璃基的复合面上由内到外依次相邻地复合有十六个膜层，第一膜层为SSTZrOx层，第二层为ZnAlOx层，第三层为SnO2层，第四层为Co-Ni-Cr-Al-Y层，第五层为ZnAlOx层，第六层为SiAlNx层，第七层为TiOx层，第八层为氧化不锈钢层，第九层为ZnSnO2层，第十层为NiCrOx层，第十一层为AZO层,第十二层为Ag层，第十三层为CrNxOy层，第十四层为ZrNbOx层，第十五层为Si3N4层，第十六层为NiCr层。
作为优选方案，所述第一膜层SSTZrOx层、第二层ZnAlOx层、第五层ZnAlOx层的厚度为均20-30nm。
作为优选方案，所述第三层SnO2层的厚度为60nm。
作为优选方案，所述第四层Co-Ni-Cr-Al-Y层的厚度为10-30nm。
作为优选方案，所述第六层SiAlNx层、第九层ZnSnO2层的厚度为20-35nm。
作为优选方案，所述第七层TiOx层、第十一层AZO层的厚度为10-20nm。
作为优选方案，所述第八层氧化不锈钢层、第十二层Ag层的厚度为20-30nm。
作为优选方案，所述第十层NiCrOx层、第十三层CrNxOy层的厚度为5-10nm。
作为优选方案，所述第十四层ZrNbOx层的厚度为10-35nm。
作为优选方案，所述第十五层Si3N4层，第十六层NiCr层的厚度为20-40nm。
本发明的有益效果是：
1、本发明采用新型膜系结构，提高了膜层的硬度及致密性。
2、色泽均匀鲜艳，更明显呈现金银蓝色，具有较高透光率。
3、最外层采用Si3N4层和NiCr层，不仅能够实现降低辐射的效果，而且防火性能良好。
附图说明
图1是本发明的结构示意图。
图中：
玻璃基片-1 第一层SSTZrOx层-21，第二层ZnAlOx层-22，第三层SnO2层-23，第四层Co-Ni-Cr-Al-Y层-24，第五层为ZnAlOx层-25，第六层SiAlNx层-26，第七层TiOx层-27，第八层氧化不锈钢层-28，第九层ZnSnO2层-29，第十层NiCrOx层-210，第十一层AZO层-211，第十二层Ag层-212，第十三层CrNxOy层-213，第十四层ZrNbOx层-214，第十五层Si3N4层-215，第十六层NiCr层-216。
具体实施方式
下面结合附图与实施例对本发明的技术方案进行说明。
参照图1所示，一种防火金银蓝low-e玻璃，包括玻璃基片，在玻璃基片1的复合面上由内到外依次相邻地复合有十六个膜层，第一膜层为SSTZrOx层21，第二层为ZnAlOx层22，第三层为SnO2层23，第四层为Co-Ni-Cr-Al-Y层24，第五层为ZnAlOx层25，第六层为SiAlNx层26，第七层为TiOx层27，第八层为氧化不锈钢层28，第九层为ZnSnO2层29，第十层为NiCrOx层210，第十一层为AZO层211,第十二层为Ag层212，第十三层为CrNxOy层213，第十四层为ZrNbOx层214，第十五层为Si3N4层215，第十六层为NiCr层216。
第一膜层SSTZrOx层21，即掺锆氧化不锈钢层，在反应溅射时提高膜层的折射率，从而提升膜系的通过率，色泽鲜艳，透光率高达80％以上。SSTZrOx层的厚度为20-30nm，优选25nm。
第二层ZnAlOx层22减少膜层的光衰减，使得膜系产品有较高的透光率，其厚度为20-30nm，优选25nm。
第三层SnO2层23即为氧化锌层，为中间介质层，保护层，其厚度为60nm。
第四层Co-Ni-Cr-Al-Y层24使得膜层具有低辐射节能环保性能，为银蓝色提供层，其厚度为10-30nm，优选15nm。
第五层ZnAlOx层25减少膜层的光衰减，使得膜系产品有较高的透光率，其厚度为20-30nm，优选25nm。
第六层为SiAlNx层26为复合电介质层，起到玻璃与膜层的粘结过渡作用，其厚度为20-35nm，优选28nm。
第七层TiOx层27即钛的氧化物，采用高折射率n＝2.5的TiOx是为了提高玻璃的透光率，降低银层的面电阻，减少银的消耗，有可以减少Low-e热处理后产生光散射，而且玻璃呈中性颜色，其厚度为10-20nm，优选15nm。
第八层氧化不锈钢层28作为调节金色颜色层，可得到较黄的金色效果，其厚度为20-30nm，优选25nm。
第九层ZnSnO2层29即氧化锌锡层，为中间介质层，保护层，增加玻璃的透光率，其厚度为20-35nm，优选27nm。
第十层NiCrOx层210即氧化镍铬层，为阻挡层，还能提高膜层耐磨性、透光率以及钢化时抗高温氧化性，其厚度为5-10nm，优选7nm。
第十一层AZO层211即铝掺杂的氧化锌层，平整层，为AG层作铺垫，降低辐射率，其厚度为10-20nm，优选为15nm。
第十二层Ag层212即金属银层，为功能层，金属银层提供了较低的辐射率，起环保的作用，其厚度为20-30nm，优选15nm。
第十三层CrNxOy层213即氮氧化铬层，提高膜层耐磨性和透光率，其厚度为5-10nm，优选7nm。
第十四层ZrNbOx层214为电介质层，起到保护膜层的作用，提高膜层的加工性能，其厚度为10-35nm，优选23nm。
第十五层Si3N4层215即为氮化硅层，是一种非常坚硬的材料，提高膜层的物理性能和抗氧化性能，它确保整个镀层具有良好的机械耐久性，其厚度为20-40nm，优选为30nm。
第十六层NiCr层216即镍铬金属层，平整层，提高耐氧化性能，其厚度为20-40nm，优选为30nm。
本发明的制备方法包括如下步骤：
(1)磁控溅射SSTZrOx层21，用交流中频电源，氧气作反应气体溅射掺锆的不锈钢靶Fe:Zr＝80:20，氩氧比为400SCCM-420SCCM:450SCCM-500SCCM,本步骤中氩氧比决定成膜的质量。
(2)磁控溅射ZnAlOx层22层，用交流中频电源，功率为18KW-25KW,纯氮气、纯氧气或者氮气和氧气混合气体溅射的合金圆靶。
(3)磁控溅射SnO2层23，用交流中频电源，用氧气作为反应气体溅射Sn靶,氩氧比为400SCCM-420SCCM:450SCCM-500SCCM,本步骤中氩氧比决定成膜的质量。
(4)磁控溅射Co-Ni-Cr-Al-Y层24，用交流中频电源，纯氮气或者纯氧气作为反应气体。
(5)磁控溅射ZnAlOx层25，用交流中频电源，功率为18KW-25KW,纯氮气、纯氧气或者氮气和氧气混合气体溅射的合金圆靶。
(6)磁控溅射SiAlNx层26，用交流中频电源，纯氮气、纯氧气或者氮气和氧气混合气体溅射的合金圆靶。
(7)磁控溅射TiOx层27，用中频交流电源溅射陶瓷钛靶，用氩气作为溅射气体，掺入少量O2，氩氧比为400SCCM-420SCCM:20SCCM-40SCCM。
(8)磁控溅射氧化不锈钢层28，用直流电源，氧气作为主要反应气体。
(9)磁控溅射ZnSnO2层29，用中频交流电源，氧气作为反应气体溅射Sn靶，氩氧比为400SCCM-420SCCM:450SCCM-500SCCM,本步骤中氩氧比决定成膜的质量。
(10)磁控溅射NiCrOx层210，用直流电源溅射，用氩气作为反应气体，掺入少量O2，氩氧比为400SCCM-420SCCM:20SCCM-40SCCM。
(11)磁控溅射AZO层211，直流电源溅射，用氩气作为工艺气体，气体流量500SCCM-550SCCM。
(12)磁控溅射Ag层212，直流电源溅射，用氩气作为工艺气体，气体流量500SCCM-550SCCM。
(13)磁控溅射CrNxOy层213，直流电源溅射，用氮气作为工艺气体，掺入少量O2。
(14)磁控溅射ZrNbOx层214，用中频交流电源，纯氧气、纯氮气或者氮气和氧气混合气体作为反应气体溅射合金圆靶。
(15)磁控溅射Si3N4层215，用中频交流电源，氮气作为反应气体。
(16)磁控溅射NiCr层216，用直流电源，氩气作为反应气体的金属溅射。
上述实施例仅是显示和描述了本发明的基本原理、主要特征和优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。
Claims (10)
1.一种防火金银蓝low-e玻璃，包括玻璃基片，其特征在于：在玻璃基片(1)的复合面上由内到外依次相邻地复合有十六个膜层，第一膜层为SSTZrOx层(21)，第二层为ZnAlOx层(22)，第三层为SnO2层(23)，第四层为Co-Ni-Cr-Al-Y层(24)，第五层为ZnAlOx层(25)，第六层为SiAlNx层(26)，第七层为TiOx层(27)，第八层为氧化不锈钢层(28)，第九层为ZnSnO2层(29)，第十层为NiCrOx层(210)，第十一层为AZO层(211),第十二层为Ag层(212)，第十三层为CrNxOy层(213)，第十四层为ZrNbOx层(214)，第十五层为Si3N4层(215)，第十六层为NiCr层(216)。
2.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第一膜层SSTZrOx层(21)、第二层ZnAlOx层(22)、第五层ZnAlOx层(25)的厚度为均20-30nm。
3.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第三层SnO2层(23)的厚度为60nm。
4.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第四层Co-Ni-Cr-Al-Y层(24)的厚度为10-30nm。
5.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第六层SiAlNx层(26)、第九层ZnSnO2层(28)的厚度为20-35nm。
6.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第七层TiOx层(27)、第十一层AZO层(211)的厚度为10-20nm。
7.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第八层氧化不锈钢层(28)、第十二层Ag层(212)的厚度为20-30nm。
8.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第十层NiCrOx层(210)、第十三层CrNxOy层(213)的厚度为5-10nm。
9.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第十四层ZrNbOx层(214)的厚度为10-35nm。
10.根据权利要求1所述的一种防火金银蓝low-e玻璃，其特征在于：所述第十五层Si3N4层(215)，第十六层NiCr层(216)的厚度为20-40nm。
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