CN106002500A - Supercharging ultrasonic cavitation three-phase abrasive particle flow swirling polishing device - Google Patents

Abstract

The invention discloses a supercharging ultrasonic cavitation three-phase abrasive particle flow swirling polishing device. The device comprises a disc-shaped swirling polishing tool, a workpiece mounting platform and an ultrasonic bobble generator. A machined workpiece is mounted on the workpiece mounting platform. The disc-shaped swirling polishing tool is fixedly mounted over the machined workpiece. A knurl is arranged at the bottom of the disc-shaped swirling polishing tool, and a microspur finedraw is formed between the knurl and the surface of the machined workpiece. The ultrasonic bobble generator is arranged over the disc-shaped swirling polishing tool. Through the design of the top inlet angle and a conical inner cavity, the pressure and speed of an inner flow field are increased, and a gas-liquid-solid three-phase high-speed swirling flow field is formed by cavitation bubble generated by the ultrasonic bobble generator, so that the speed of abrasive particles in the gas-liquid-solid three-phase flow field is greatly increased, and the polishing efficiency of the workpiece is improved; by arranging the knurl and adjusting the distance of the microspur finedraw, an annular machining face generated by the swirling flow field is avoided, and large-area super-smooth uniformizing polishing is achieved.

Description

A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device

technical field

The invention relates to the technical field of ultra-precision machining, and more specifically, to a pressurized ultrasonic cavitation three-phase abrasive particle flow swirl polishing processing device.

Background technique

In view of the low efficiency of traditional solid-liquid two-phase flow polishing and small polishing area, it is difficult to apply to ultra-smooth surface processing in high-tech fields such as optics, electronic information and thin film science. Gas-liquid-solid three-phase abrasive flow polishing It has become a new difficulty and hot spot in fluid polishing technology. Ultrasonic cavitation three-phase abrasive flow swirl polishing refers to adding an ultrasonic bubble generator on the basis of the original solid-liquid two-phase swirl flow field. The ultrasonic bubble generator uses ultrasonic cavitation to generate voids in the swirl flow field. The micro-cavitation bubbles are used to drive the abrasive particle group by the collapsing effect of the micro-cavitation bubbles, thereby improving the efficiency of the polishing process. At present, the gas-liquid-solid three-phase abrasive flow polishing technology combined with ultrasonic cavitation and swirl flow field is a relatively mature three-phase flow polishing technology. This method can form a good and uniform processing effect on the surface of the workpiece.

However, the current ultrasonic cavitation three-phase abrasive flow polishing processing device still has the following problems: ①The design of the polishing disk is unreasonable, and the abrasive flow flows in from the side of the processing disk, resulting in the conflict between the swirling flow field and the surface of the workpiece. The pressure is low, and the processing efficiency is low; ②The workpiece is parallel to the micro-distance slit of the polishing disc, so that the turbulence of the flow field above the workpiece is not high, forming a circular gradient processing piece; ③The micro-bubble generator at the entrance of the slit Difficult to control and install.

How to further improve the gas-liquid-solid three-phase abrasive flow polishing processing device to achieve efficient, stable and uniform polishing processing effect is a major difficulty.

In view of some existing problems, a pressurized ultrasonic cavitation three-phase abrasive flow swirling polishing processing device was designed and developed.

Contents of the invention

The purpose of the present invention is to solve the problem of low pressure in the processing flow field of the existing three-phase abrasive flow polishing processing device, slow flow rate, low processing efficiency, and uneven surface quality of workpiece processing, and proposes a method that can continuously stabilize cavitation bubbles. A supercharged ultrasonic cavitation three-phase abrasive particle flow swirl polishing processing device for ultra-precision surface processing of precision optical parts.

The present invention achieves the above object through the following technical solutions: a pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device, including a disc-shaped swirl polishing tool, a workpiece mounting platform and an ultrasonic bubble generator, and the processed workpiece is Installed on the workpiece installation platform, the disc-shaped swirl polishing tool is fixedly installed directly above the processed workpiece, and the disc-shaped swirl polishing tool forms a micro-distance slit with the surface of the processed workpiece; the disc-shaped swirl The bottom of the flow polishing tool is provided with a knurling with a certain inclination angle, the inside of the disc-shaped swirl polishing tool is provided with an inverted conical inner cavity, and the top of the disc-shaped swirl polishing tool is provided with an inverted conical inner cavity. Connected solid-liquid two-phase abrasive polishing fluid inlet; an ultrasonic bubble generator is installed directly above the disc-shaped swirl processing tool; The top of the cavity is connected by a sealing top cover, and a sealing ring is arranged between the ultrasonic bubble generator and the sealing top cover.

Further, the sealing top cover is fixed on the top of the disc-shaped swirl polishing tool by bolts.

Further, the ultrasonic bubble generator is controlled by the control cabinet, and can generate cavitation bubbles with different diameters through different ultrasonic frequencies, and can generate optimal cavitation bubble sizes for flow fields with different flow velocities and pressures.

Further, the top of the disc-shaped swirl processing tool is provided with three uniformly distributed solid-liquid two-phase abrasive grain polishing liquid inlets, and the solid-liquid two-phase abrasive grain polishing liquid inlet forms an included angle of 30 degrees with the top plane. The distribution of the inlet of the solid-liquid two-phase abrasive grain polishing fluid increases the flow field pressure in the inverted tapered inner cavity and the micro-pitch slit, forms a high-speed swirling flow field, and greatly improves the polishing efficiency.

Further, the inverted tapered inner cavity is an inner cavity whose diameter gradually decreases from top to bottom, which realizes the self-pressurization of the swirl flow field, thereby increasing the flow velocity and pressure of the flow field in the micro-pitch slit at the bottom, increasing the Polishing efficiency.

Further, the width of the micro-pitch gap is 1 to 2 millimeters, which solves the problem that the center pressure of the inverted tapered inner cavity is high and the pressure of the outer ring is small to form a ring-shaped processing surface, so as to realize uniform post-polishing of the surface of the processed workpiece.

Further, the workpiece installation platform is provided with a circular groove, and the processed workpiece is fixed at the bottom of the circular groove.

Further, the knurling at the bottom of the disc-shaped swirling flow processing tool is distributed in a ring shape, which can increase the turbulence of the flow field near the wall, thereby increasing the disorder of the movement of abrasive particles in the micro-pitch slits, and realizing the smoothness of the surface of the workpiece. Homogenization processing.

The beneficial effect of the present invention lies in that the structural design of the present invention is reasonable, the pressure and velocity of the internal flow field are increased through the top inlet and the tapered inner cavity, and the gas-liquid-solid three-phase high-speed flow is formed by the cavitation bubbles generated by the ultrasonic bubble generator. The swirl flow field greatly increases the velocity of the abrasive particles in the gas-liquid-solid three-phase flow field, thereby improving the polishing efficiency of the disc-shaped swirl polishing tool for the workpiece; at the same time, by adjusting the Knurling is set on the bottom of the disc-shaped swirl polishing tool, which overcomes the annular processing surface caused by the swirl flow field and realizes large-area ultra-smooth and uniform polishing.

Description of drawings

Fig. 1 is a schematic cross-sectional view of a pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing device of the present invention.

Fig. 2 is a top view of a pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device of the present invention.

Fig. 3 is a schematic structural view of the knurling of the present invention.

In Fig. 1, 1-processing workpiece, 2-disc swirl polishing tool, 3-solid-liquid two-phase abrasive polishing fluid inlet, 4-sealing ring, 5-ultrasonic bubble generator, 6-sealed top cover, 7 - Bottom knurling, 8-workpiece mounting platform.

detailed description

The present invention will be further described below in conjunction with accompanying drawing:

As shown in Figures 1 to 3, a pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device includes a disc-shaped swirl polishing tool 2, a workpiece installation platform 8 and an ultrasonic bubble generator 5, and processes a workpiece 1 Installed on the workpiece installation platform 8, the disc-shaped swirl polishing tool 2 is fixedly installed directly above the workpiece 1, and the disc-shaped swirl polishing tool 2 forms a micro-distance slit with the surface of the workpiece; The bottom of the disc-shaped swirl polishing tool 2 is provided with a knurling 7 with a certain inclination angle, the inside of the disc-shaped swirl polishing tool 2 is provided with an inverted conical cavity, and the top of the disc-shaped swirl polishing tool 2 is provided with There is a solid-liquid two-phase abrasive polishing liquid inlet 3 communicating with the inverted tapered inner cavity; an ultrasonic bubble generator 5 is installed directly above the disc-shaped swirl processing tool; the ultrasonic bubble generator 5 is connected to the The top of the inverted conical cavity of the disk-shaped swirl polishing tool 2 is connected by a sealing top cover 6 , and a sealing ring 4 is provided between the ultrasonic bubble generator 5 and the sealing top cover 6 .

The sealing top cover 6 is fixed on the top of the disc-shaped swirl polishing tool 2 by bolts.

The ultrasonic bubble generator 5 is controlled by the control cabinet. By controlling the ultrasonic bubble generator 5 to emit ultrasonic waves of different frequencies, cavitation bubbles of different diameters are generated in the disc-shaped swirl polishing tool 2 . Optimum cavitation bubble size can be produced for flow fields with different flow velocities and pressures.

The top of the disc-shaped swirl machining tool is provided with 3 evenly distributed solid-liquid two-phase abrasive polishing fluid inlets 3, and the solid-liquid two-phase abrasive polishing fluid inlet 3 forms an angle of 30 degrees with the top plane. The inlet distribution of the flow channel increases the flow field pressure in the inner cavity and the micro-pitch slits, forming a high-speed swirling flow field, which greatly improves the polishing efficiency.

The inverted tapered lumen is a lumen whose diameter gradually decreases from top to bottom. The inverted tapered inner cavity realizes the self-pressurization of the swirling flow field, thereby increasing the flow velocity and pressure of the flow field in the micro-pitch slit at the bottom, and increasing the polishing efficiency.

The width of the macro gap is 1 to 2 millimeters. The micro-pitch gap solves the problem of high pressure in the center of the inner cavity and small pressure in the outer ring to form a ring-shaped processing surface to achieve uniform post-polishing of the workpiece surface.

The workpiece mounting platform 8 is provided with a circular groove, and the workpiece 1 is fixed at the bottom of the circular groove.

The knurling at the bottom of the disc-shaped swirl machining tool is distributed in a ring shape, which can increase the turbulence of the flow field near the wall, thereby increasing the disorder of the movement of abrasive grains in the micro-pitch slits, and realizing the machining of the surface of the workpiece Homogenization processing.

The solid-liquid two-phase abrasive particle flow enters the inverted tapered cavity of the disc-shaped swirl polishing tool 2 through the solid-liquid two-phase abrasive flow inlet 3 set at the top of the disc-shaped swirl polishing tool 2 at an inclination angle of 30 degrees. A high-speed solid-liquid two-phase swirl flow field is formed in the conical inner cavity. In the formed solid-liquid two-phase swirl flow field, cavitation bubbles are generated by the ultrasonic bubble generator 5 installed on the top, and the cavitation bubbles and the swirl flow The solid-liquid two-phase abrasive particle flow in the flow field forms a gas-liquid-solid three-phase abrasive particle flow, and the formed gas-liquid-solid three-phase abrasive particle flow flows through the inverted tapered inner cavity to the micro-pitch slit, thereby forming a self-pressurized Gas-liquid-solid three-phase abrasive flow swirling flow field. The gas-liquid-solid three-phase abrasive flow passes through the micro-pitch slits of different distances formed by the knurling 7 at the bottom to achieve uniform ultra-precision polishing on the workpiece 1 .

The above-described embodiments are only preferred embodiments of the present invention, and are not limitations to the technical solutions of the present invention. As long as they are technical solutions that can be realized on the basis of the above-mentioned embodiments without creative work, they should be regarded as falling into the scope of the patent of the present invention. within the scope of protection of rights.

Claims (8)

1. A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device, characterized in that: comprising a disc-shaped swirl polishing tool (2), a workpiece mounting platform (8) and an ultrasonic bubble generator (5) , the workpiece (1) is installed on the workpiece mounting platform (8), the disc-shaped swirl polishing tool (2) is fixedly installed directly above the workpiece (1), and the disc-shaped swirl polishing tool (2) form a micro-distance slit with the surface of the workpiece; the bottom of the disc-shaped swirl polishing tool (2) is provided with a knurling (7) with a certain inclination angle, and the inside of the disc-shaped swirl polishing tool (2) An inverted conical inner cavity is provided, and the top of the disc-shaped swirl polishing tool (2) is provided with a solid-liquid two-phase abrasive polishing liquid inlet (3) communicating with the inverted conical inner cavity; the disc An ultrasonic bubble generator (5) is installed directly above the swirl processing tool; the ultrasonic bubble generator (5) and the top of the inverted conical cavity of the disc-shaped swirl polishing tool (2) pass through a sealed top cover ( 6) connection, there is a sealing ring (4) between the ultrasonic bubble generator (5) and the sealing top cover (6). 2. A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device according to claim 1, characterized in that: the sealing top cover (6) is fixed on the disc-shaped swirl by bolts Polish the top of tool (2). 3. A kind of pressurized ultrasonic cavitation three-phase abrasive particle flow swirl polishing processing device according to claim 1, characterized in that: the ultrasonic bubble generator (5) is controlled by the control cabinet, by controlling the generation of ultrasonic bubbles The device (5) emits ultrasonic waves of different frequencies to generate cavitation bubbles of different diameters in the disc-shaped swirl polishing tool (2). 4. A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device according to claim 1, characterized in that: the top of the disc-shaped swirl processing tool is provided with three uniformly distributed solid-liquid The inlet (3) of the two-phase abrasive polishing fluid, and the inlet (3) of the solid-liquid two-phase abrasive polishing fluid forms an included angle of 30 degrees with the top plane. 5 . The pressurized ultrasonic cavitation three-phase abrasive flow swirling polishing processing device according to claim 1 , wherein the inverted tapered inner cavity is an inner cavity whose diameter gradually decreases from top to bottom. 5 . 6 . The pressurized ultrasonic cavitation three-phase abrasive flow swirling polishing processing device according to claim 1 , wherein the micro-pitch gap has a width of 1 to 2 millimeters. 7. A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device according to claim 1, characterized in that: the workpiece mounting platform is provided with a circular groove, and the workpiece is fixed on the circular groove. trough bottom. 8. A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device according to claim 1, characterized in that: the knurling at the bottom of the disc-shaped swirl processing tool is distributed in a ring.