CN1059968A - Interferometric optical filter system selectively - Google Patents
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- CN1059968A CN1059968A CN 90107861 CN90107861A CN1059968A CN 1059968 A CN1059968 A CN 1059968A CN 90107861 CN90107861 CN 90107861 CN 90107861 A CN90107861 A CN 90107861A CN 1059968 A CN1059968 A CN 1059968A
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Abstract
Optical system has two identical filtering devices (1,2), and wherein each device comprises several reflection parts (3,4 and 5,6) and radiant light transmitting member (7,8).The passband peak wavelength of the wavelength of the passband peak value of a filtering device (1) and another filtering device (2) differs a difference, 0.85 of the peak value that its difference is enough to make the transmissive exponent of first device (1) to be reduced to be equal to or greater than it.Because the passband boundary line displacement each other of device (1,2) is so each additional peak value in the passband boundary line of a filtering device (1) is owing to the existence of second device (2) will can not passed through.
Description
The present invention relates to optical system, more precisely relate to the various filter systems of interferometric optical selectively.
The present invention can be applicable to spectral measurement and spectral analysis, is applied to optical instrument, particularly in laser device is made to the quality control of optical element.
It is well known that the conduct filtering device on interference optics basis selectively.For example, the interference light filter of known various gatings, they at least by two groups parallel and local transparent catoptron that many thin dielectric layers are housed betwixt form.Catoptron is made up of quarter-wave a plurality of transparent dielectric layers of high index of refraction and low-refraction, and the dielectric layer optical thickness between catoptron equals to leach the half-wavelength of radiant light.(volt, volt.Lie Biejiewa " spectral measurement methods ", 1977, Moscow, 166-167 page or leaf; Su, A, 539284).
As spectral measurement, the shortcoming of these light filters is that its passband width is too narrow, and exists the passband of the existing wavelength of additional interference separation.Another shortcoming of these light filters exists long stretch out " double-vane " simultaneously near its passband boundary line.
Known interferometer comprises the parallel thin slice of face of two placements parallel to each other, and this two thin slice is 45 to incident radiation light.In this instrument, Ray Of Light obtains the light of two beam interferometers when inciding first thin slice.The first bundle light is first boundary reflection formation at first thin slice, incides second thin slice, and first interface by second thin slice reflects back from second contact surface again, and passes through first interface of second thin slice.The second bundle light comes out from second interface of first thin slice and first boundary reflection of second thin slice by first interface of first thin slice.Progressive error between these light beams is inferior in zero in the parallel thin slice condition of strictness.Change the angle between the thin slice, can obtain the progressive error of each interfering beam, its difference corresponding to the interference peak of certain wavelength (volt. volt. Lie Biejiewa " spectral measurement methods ", 1977, Moscow, the 167th page).
The shortcoming of this equipment is that interference peak is very wide, and interference peak shifts very smooth to minimal value, and therefore, the interference image contrast is not enough.
Another interferometer of knowing comprises that being mutually two catoptrons placing at the right angle is the parallel thin slice of face of 45 with two with them, and one is come on first surface that transparent reflector is added to the parallel thin slice of first face in them.Light beam incides on the parallel thin slice half-mirror of first face and is separated into the light that two bundles are interfered mutually.The first bundle light goes out from first mirror reflects by the parallel thin slice of face, and then the half-mirror from first thin slice reflects.The second bundle light reflects from the half-mirror of first thin slice, then goes out and by first thin slice from second mirror reflects again.Stroke along the second bundle light is introduced second parallel thin slice of face to compensate the progressive error of these light beams in the front of second catoptron.Each light beam progressive error is zero on certain position of catoptron.Can obtain the stroke difference of each interfering beam with the method that moves first catoptron, this difference corresponding to the interference peak of certain wavelength (this. dust.Fu Lixi, Ah.Shellfish.Do not treat baby's " general physics study course " III volume season, 1952, Moscow, the 438th page).
This equipment and above-mentioned interferometer have same many shortcomings, because their boths are double beam interferometers.
Be the reflection interference light filter that people had the knack of, it has the thin slice of refractive index cycle variation, and simultaneously, the variations in refractive index cycle equals the half-wavelength of optical filtering radiation in sheeting.A light part that incides on the layering thin slice reflects from each layer, and a part then continues to pass through forward.So, from the light that the layering thin slice reflects, has interfering beam corresponding to the most like that amounts of the thin slice number of plies.The result of multiple-beam interference obtains the light of the high colour vision intensity of certain wavelength and higher harmonics thereof at exit portal.(volt. volt. Lie Biejiewa " spectral measurement methods ", 1977, Moscow, the 42nd page; Su, A, 881647)
The shortcoming of this equipment is the various additional peak value that exists interference simultaneously, and they are distributed within the Wavelength calibration scope between each main peak value and disturb the radiant light of this wavelength to separate.
Fundamental point of the present invention is to propose to establish optionally this system of task of interferometric optical filter system has very narrow working passband boundary line, has high contrast grade simultaneously, this is because of the precipitous knot of having founded in Wavelength calibration from peak value colour vision intensity to minimum colour vision intensity, and has reduced the relative value of the additional peak value of passband.
This task is to solve like this, promptly selectively the interferometric optical filter system comprises the filtering device that carries out work based on interference, and have a reflection part and radiation transmission parts at least, according to the present invention, also have second filtering device, it is identical with first filtering device, and it sequentially is placed on the back of first filtering device along the light beam stroke, and which comprises at least a reflection part and radiation transmission parts, for this reason, these filtering devices are made like this, even the passband peak wavelength of a filtering device is different from the passband peak wavelength of another filtering device, 0.85 of the peak value that its difference is enough to make the transmissive exponent of first filtering device to be reduced to be equal to or greater than it.
Introduce second filtering device and can form more precipitous knot from peak value colour vision intensity to minimum colour vision intensity in the Wavelength calibration scope, this just causes the contraction in system works passband boundary line, meanwhile, has improved contrast grade.
It is appropriate taking following measure, even the reflection part of each filtering device all has an opposite parallel thin sheet and in arbitrary filtering device an opposite parallel thin sheet be placed under a certain angle, with respect to the passband peak value of another filtering device a displacement is arranged with the passband peak value that guarantees a filtering device.
Following situation is desirable, promptly in each filtering device, one opposite parallel thin sheet places under certain angle, and makes an angle between the parallel thin slice of filtering device face different numerical value be arranged to guarantee above-mentioned that displacement with angle between the parallel thin slice of another filtering device face.
The reflection part of each filtering device can have two catoptrons, and a catoptron of first light filter can be placed on the place than second more close radiation transmission parts of the corresponding catoptron of filtering device, with the displacement with respect to the passband peak value of another filtering device of the passband peak value that guarantees a filtering device.
In addition, do like this and it seems and suit, even the reflection part of each filtering device has the adjustable refractive index of representing with periodic function, reflecting prism then is the radiant light transmitting member of each filtering device, reflection part is added on the reflecting interface of prism, simultaneously between the incident interface of the outgoing interface of first filtering device and second filtering device, certain angle to be arranged, with the displacement of the passband peak value that guarantees a filtering device to the passband peak value of another filtering device.
Next the present invention is illustrated with embodiment and accompanying drawing, wherein:
Fig. 1 has described interferometric optical filter system selectively according to invention;
Fig. 2 has described the transmissive exponent of filtering device to the relation between the radiation transmission optical wavelength;
Fig. 3 according to invention, has described the situation that this system has face parallel thin slice;
Fig. 4 according to the present invention, has described to have another embodiment of face parallel thin chip system;
Fig. 5 according to the present invention, has described the filter system that has catoptron;
Fig. 6 according to the present invention, has described the filter system that has reflecting prism;
Fig. 7 a, b, c, d, e according to the present invention, has described the filter system of its various filtering device different arrangement.
Selectively the interferometric optical filter system comprises two identical filtering device 1(Fig. 1) and 2, wherein each filtering device is worked by principle of interference.Each filtering device 1(2) has a reflection part (in the scheme that has proposed, having two) at least, promptly 3,4 and 5,6 and radiant light transmitting member 7,8. Device 1,2 is placed in by optically transparent material, and glass for example is in the substrate 9 of making.
Each reflection part 3-6 makes layered component form 10,11,12 and 13, and they are made by optically transparent material respectively.Transmitted light parts 7,8 are made by the high index of refraction optically transparent material.Layering 10(11-13) directly be attached to parts 7(8) on, it is by than parts 7(8) material that refractive index is low makes.And then their layering 10 ', 11 ', 12 ' with 13 ' by with parts 7(8) high-index material that material is identical makes.Ensuing layering 10-13 and 10 '-13 ' presses said sequence and alternately arranges successively.
Optical clear layer 14 is arranged between device 1,2, device 1,2 is separated.
The wavelength X of passband 16 peak values 15 filtering device 1,2 is made like this,, 2) even filtering device 1(is Fig. 1
1(Fig. 2) with the wavelength X of the peak value 17 of the passband 18 of filtering device 2
2Differ △ λ.
This △ λ value determined by the transmissive exponent T value of device 1, and the T value will be reduced to and is equal to or greater than 0.85 of peak value 15 that should device 1.
If the displacement size is so selected, make transmissive exponent be reduced to value less than peak value 0.85, so, just can not produce the effect that reduces the passband added value.In Fig. 2, this value value is 0.97 of a peak value 15.
In fact shift value △ λ can draft and be 5-10 nanometer (HM).
Corresponding to device 1, (Fig. 1) 2 different wavelength X
1, λ
2Be to reach, even parts 7 equal λ with such method
1/
2Optical thickness, and parts 8 correspondingly equal λ
2/
2Optical thickness.Each layer 10,10 of device 1 ', 11,11 ', all equal λ
1/
4Optical thickness, and each layer 12,12 of device 2 ', 13,13 ' correspondingly is λ
2/
4
Because passband 16(18) result of (17) displacement peak value 15(Fig. 2), the additional peak value 19,20 of passband 16,18 almost overlaps on wavelength with the minimal value 21,22 of corresponding passband 18,16, and this just guarantees in the synthetic passband of total system that additional peak value sharply descends.In addition, synthetic passband is owing to peak value 15(17) the contraction that adds of displacement, this has just improved the optical characteristics of system.
Derived another scheme of implementing this system among Fig. 3, this system is reasonable to various interferometers.System comprise two identical filtering devices 1 ', 2 ', they comprise a pair of right parallel thin slice 23,24,25,26, are all made by optically transparent material.
In a filtering device, for example device 1 ', thin slice 23,24 parallel placements, though another device 2 ' in, thin slice 25,26 is placed in the position of certain angle α.
The α angle provides in advance in Fig. 3, but its value is very little, for example less than 1 °.
Place certain angle guaranteeing displacement thin slice 25,26, and interference image is set up by device 1,2 each thin slice effect at the interference image peak value.Thus, the boundary line of this composite image is compressed owing to the dark space increases.It is more clear that image becomes, and this has just alleviated the dried work load of penetrating instrument.
Device 1 ' or two devices 1 ' and 2 ' (Fig. 4) in, the similar rotation of thin slice that can realize filtering, in this case, optical filtering thin slice 25,26 rotation alpha angles, and optical filtering thin slice 23,24 rotation β angles, its angle value difference, but can be above 1 °.Resulting identical in synthesizing interference image and pressing Fig. 3 scheme.
Below we will study another scheme (Fig. 5) that realizes interferometer.Each of filtering device 1 " and 2 " comprises reflection part and two radiant light transmitting members 31,32 and 33,34 of two catoptrons (27,28 and 29,30) type therein.From a side each layer of half-mirror 35,36 is added on the parts 32,34.Catoptron 28,30 dresses are parallel mobile to realize with screw 39,40 with slide rail 37,38.
Catoptron 30 is provided with more recently to the distance of transmitting member 34 in " in, catoptron 28 to the distance of transmitting member 32 than at device 2 " in a filtering device, for example at device 1.In the interference image of being set up by each element of device 1 " and 2 ", the last difference of this distance has guaranteed the displacement of each peak value.Synthetic interference image is as pressing Fig. 3, and the resulting figure of 4 scheme obtains that way.
Derive an embodiment of optical lightscreening system selectively among Fig. 6 again.In this system, each filtering device 1 " and 2 " comprises that form is the reflection part of layering thin slice 41,42 and the transmitting member of reflecting prism (43,44) type.The variations in refractive index of layering thin slice 41,42 is little, and near different thin slices 41,42 along the light stroke, with cycle of equaling the radiant light half-wavelength that leached in the material of thin slice 41,42, similarly changing periodically.
The refractive index of prism 43,44 materials equals corresponding thin slice 41,42 and thin slice 41,42 contacted lip-deep refractive indexes.
At the outgoing interface 45 of prism 43 and the incident interface 46 of prism 44 a r angle is arranged, its value is no more than 1 °, and arranges in Fig. 6.
The existence of this angle just forms the displacement of passband peak value, and similar shown in it and Fig. 2, total synthetic passband boundary line is then similar with the system shown in Fig. 1.
But in the example of having studied (Fig. 6), contrast thin slice 41(Fig. 6), 42, equal λ with the cycle
1, λ
2When the periodic function refractive index of half-wavelength is modulated, can obtain similar effects.In this scheme, r equals zero.
Fig. 7 a, among the 7b, filtering device 1
, 2
Be to place like this, even prism 43,44 little right-angle sides are device 1
Outgoing interface 45 and device 2
Incident interface 46.For this reason, in Fig. 7 a, incident radiation light A and emergent radiation light B are parallel to each other, and in Fig. 7 b, its direction is an angle.
In Fig. 7 c and 7d, the hypotenuse interface of prism 43 is devices 1
Outgoing interface 45, prism 44 little right-angle side interfaces then are devices 2
Incident interface 46.For this reason, in Fig. 7 e, radiant light A, B are an angle, then are parallel to each other in Fig. 7 d.
In Fig. 7 e, prism 43,44 hypotenuse interfaces are respectively devices 1
Outgoing interface 45 and device 2
Incident interface 46, the direction of radiant light A and B is an angle respectively.
Selectively the interferometric optical filter system in the following manner.
Incide the light (Fig. 1) of system, on each border of two media boundary, be divided into that advance and two-beam reflection.Because the result of numerous bundle interference of light, by device 1 be not whole light, and only be that part of light that is consistent with the passband of device 1, its passband is in wavelength X
1The time " double-vane " that have the main peak value 15 of certain width and additional peak value 19 or take back and take over from main peak value 15.Because this light, 2 of filtering devices that act on similar device 1 leach those light corresponding to device 2 passbands.Because the passband boundary line displacement of device 1 and 2, so additional peak value 19(or 20) or " double-vane " in the passband boundary line of a filtering device will no longer pass through from second filtering device.The synthetic passband boundary line width of system is less, and additional simultaneously peak value is mild and have " double-vane " that boundary line than the passband 16,18 of filtering device 1 and 2 will be low.
At Fig. 3, the system of being described in 4,5 carries out work in the following manner." monochrome " light of the non-constant width in passband boundary line incides filtering device 1,1 " in.At device 1,1 " in because the interference that the two-beam line forms, device 1 ', 1 " exit portal form the interference image of equal inclination angle (or equal thickness) passband.These passbands change smooth and in fact do not have the dark space the passband from the peak value visual intensity to minimal value.The entrance port of " light of outgoing incides device 2,2 " by device 1,1, the similar device 1 of its role ', 1 ", still, according to its wavelength and device 1 ', 1 " passband wavelength difference and provide transmission peak value.This is at Fig. 3, in 4, just can obtain with various angle between every pair of thin slice 23,24 and 25,26; Simultaneously in Fig. 5, in device 1 " in parts 32 and catoptron 28 between and at device 2 ", can obtain equally with various distance between parts 34 and the catoptron 30.In the synthetic interference image that obtains from system (Fig. 3,4,5), the dark space broadening between the light belt, and with from independent filtering device 1 ', 1 " or 2 ', 2 " compared by the interference image that is obtained, its each bright light belt shrinks.
The system of describing among Fig. 6 has provided the narrow passband of each harmonic component of a kind of wavelength and it at its exit portal, and this moment, the passband boundary line not have the peak value that adds.The let us this situation that begins one's study is promptly used the situation of carrying out index modulation with one-period in layering thin slice 41 and 42.In this case, the light reflection from thin slice 41 has been arranged, the optical filtering phenomenon of radiant light will take place on the basis of multiple-beam interference, the formation of numerous light is because due to the light reflection from all layerings of layered film 41.The wavelength of reflection peak depends on that the modulation period of layering thin slice refractive index and light incide the incident angle on the thin slice.When light when normal direction incides layering thin slice 41, the twice that the wavelength of reflection peak equals thin slice 41 multiply by the mean refractive index of thin slice 41 modulation period.Increase if incide the incident angle of thin slice 41, the wavelength of the light that is reflected from thin slice 41 will reduce so.
Prism 43 is used for two purposes.The first, it has eliminated the light that come out by " air-thin slice 41 " edge reflection.The second, its broadening light incide the angle variation range of thin slice 41.If light incides from air on the thin slice 41, so, near some incident angle, internal reflection completely just might take place in the difference owing to various refractive indexes on " film-air " border.Prism 43 is set realizes that in wideer angle variation range light incides on the thin slice 41 when not being provided with.Just so just broadening reflect the scope that optical wavelength may change from thin slice 41.
The system of describing in Fig. 6 can realize when r=0, but in this case, and may be selected to be various numerical value the modulation period of refractive index in thin slice 41 and 42.In a thin slice in the thin slice 41,42, equal λ modulation period
1/
2n, wherein n is the mean refractive index of this thin slice 41, then equals λ in another thin slice 42
2/
2n
The advantage of this scheme is that system architecture is fairly simple.In these two schemes, when the light that incides system was certain angle, the passband peak value of system was near wavelength X
1Or λ
2Near position (being in alternative plan their mean value).Can reduce this wavelength with the method that changes incident angle.So, all are just all absolutely clear, as clear as noonday, and this synthetic passband boundary line that relates to each filtering device passband boundary line and each layering of total system has been superposeed.
Therefore, above each system of being studied can access the passband boundary line of very narrow filter system, so just can obtain each boundary line of additional peak value and " double-vane ".In this case, according to this system, in one of its each scheme, just might integrate the narrow boundary line of passband and do not have spectrum additional peak value.
Claims (5)
1, selectively the interferometric optical filter system comprises filtering device (1), it carries out work according to principle of interference, and has a reflection part (3 at least, 4) and radiant light transmitting member (7), it is characterized in that: it has second filtering device (2), and it is identical with first filtering device (1), be placed in along the stroke route of light and be right after back in device (1), at least comprise simultaneously a reflection part (5,6) and radiant light transmitting member (8), filtering device (1 in this case, 2) wavelength of making passband (18) peak value (17) of the wavelength of passband (16) peak value (15) that makes a filtering device (1) and another filtering device (2) differs a difference, and its difference is enough to transmissive exponent with first filtering device (1) and is reduced to 0.85 of the peak value (15) that is equal to or greater than it.
2, according to the system of claim 1, it is characterized in that: each filtering device (1,2) reflection part all has an opposite parallel thin sheet (23,24 and 25,26) and in arbitrary filtering device (1), one opposite parallel thin sheet (23,24) is placed in certain angle with respect to the passband peak value of another filtering device (2 ') displacement is arranged with the passband peak value that guarantees a filtering device (1 ').
3, according to claim 2 system, it is characterized in that: each filtering device (1 ', 2 ') in, one opposite parallel thin sheet (23,24 or 25,26) be placed in a certain angle, and the parallel thin slice of face of a filtering device (1 ') (23,24) between with between the parallel thin slice of face (25,26) of another filtering device (2 ') different angles is arranged.
4, according to the system of claim 1, it is characterized in that: each filtering device (1 "; 2 ") reflection part two catoptrons (27 are all arranged, 28 and 29,30), and a catoptron (28) of first filtering device (1 ") is laid to such an extent that with respect to the passband peak value of another filtering device (2 ") displacement is arranged with the passband peak value that guarantees a filtering device (1 ") than the more close radiation transmission parts of catoptron (30) (32) of corresponding second filtering device (2 ").
5, according to the system of claim 1, it is characterized in that: each filtering device (1
, 2
) reflection part (41,42) have refractive index with periodic function modulation, reflecting prism (43,44) is the radiant light transmitting member, reflection part (41,42) is added on the reflecting interface of prism, and at first filtering device (1
) outgoing interface (45) and second filtering device (2
) incident interface (46) between an angle to be arranged to guarantee a filtering device (1
) the passband peak value with respect to another filtering device (2
) the passband peak value displacement is arranged.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90107861 CN1059968A (en) | 1990-09-20 | 1990-09-20 | Interferometric optical filter system selectively |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90107861 CN1059968A (en) | 1990-09-20 | 1990-09-20 | Interferometric optical filter system selectively |
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| Publication Number | Publication Date |
|---|---|
| CN1059968A true CN1059968A (en) | 1992-04-01 |
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|---|---|---|---|
| CN 90107861 Pending CN1059968A (en) | 1990-09-20 | 1990-09-20 | Interferometric optical filter system selectively |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108572409A (en) * | 2013-01-29 | 2018-09-25 | 唯亚威通讯技术有限公司 | Variable optical filter and wavelength selective sensor based on it |
| CN109477958A (en) * | 2016-08-24 | 2019-03-15 | 浜松光子学株式会社 | Fabry-Perot Interference Filter |
| US10900834B2 (en) | 2016-05-27 | 2021-01-26 | Hamamatsu Photonics K.K. | Fabry-Perot interference filter having layer with thinned edge portion and production method for Fabry-Perot interference filter |
| US11041755B2 (en) | 2016-05-27 | 2021-06-22 | Hamamatsu Photonics K.K. | Production method for Fabry-Perot interference filter |
| CN118655711A (en) * | 2024-08-20 | 2024-09-17 | 华翊博奥(北京)量子科技有限公司 | Wavelength selector and monochromator |
-
1990
- 1990-09-20 CN CN 90107861 patent/CN1059968A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108572409A (en) * | 2013-01-29 | 2018-09-25 | 唯亚威通讯技术有限公司 | Variable optical filter and wavelength selective sensor based on it |
| CN108572409B (en) * | 2013-01-29 | 2022-03-01 | 唯亚威通讯技术有限公司 | Variable filter and wavelength selective sensor based thereon |
| US10900834B2 (en) | 2016-05-27 | 2021-01-26 | Hamamatsu Photonics K.K. | Fabry-Perot interference filter having layer with thinned edge portion and production method for Fabry-Perot interference filter |
| US10908022B2 (en) | 2016-05-27 | 2021-02-02 | Hamamatsu Photonics K.K. | Production method for fabry-perot interference filter |
| US11041755B2 (en) | 2016-05-27 | 2021-06-22 | Hamamatsu Photonics K.K. | Production method for Fabry-Perot interference filter |
| US12392661B2 (en) | 2016-05-27 | 2025-08-19 | Hamamatsu Photonics K. K. | Production method for Fabry-Perot interference filter |
| CN109477958A (en) * | 2016-08-24 | 2019-03-15 | 浜松光子学株式会社 | Fabry-Perot Interference Filter |
| CN118655711A (en) * | 2024-08-20 | 2024-09-17 | 华翊博奥(北京)量子科技有限公司 | Wavelength selector and monochromator |
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