CN105834767B - Symmetrical motor with high-speed, high precision drives platform - Google Patents

Abstract

The invention discloses a symmetrical motor-driven platform with high speed and high precision. The motion platform includes: an X platform, a Y platform and a working platform, wherein the Y platform is installed on the X platform, the working platform is installed on the Y platform, and the X platform It mainly includes the first linear motor and the third linear motor arranged symmetrically to drive the Y platform to move on the X platform, and the first linear guide rail to support the movement of the Y platform. The Y platform mainly includes the drive table to move on the Y platform. The second linear motor and the second linear guide rail supporting the movement of the workbench, the workbench is loaded with a load, and the present invention also includes a magnetic shielding box arranged on the first linear motor and the second linear motor to reduce the magnetic flux of the motor. leak. Through the above-mentioned mechanism, the magnetic field of the stator of the linear motor is effectively shielded, thereby reducing the adverse effects caused by the magnetic flux leakage of the motor, and greatly reducing the calorific value of the motor. Under the condition of ensuring high-precision control, the movement of the platform can be further improved speed.

Description

Symmetrical motor-driven platform with high speed and high precision

technical field

The invention relates to the field of two-dimensional motion platforms, in particular to a symmetrical motor-driven platform with high speed and high precision under two-dimensional motion.

Background technique

The traditional motion platform drives the ball screw structure through a rotary motor (the motor that moves the mover to rotate) so as to drive the platform to realize two-dimensional motion. The motion chain needs to pass through many intermediate links from the power source motor to the actuator, such as Gear pairs, worm gear pairs, lead screw pairs, etc., will generate large moments of inertia (such as friction, noise, vibration, wear) in these links, resulting in the inability to achieve the high-speed and high-precision goals required by the platform.

The use of linear motor drive can solve the problem of the traditional two-dimensional platform, save the transmission mechanism of the intermediate link such as the ball screw, and improve the speed and accuracy of the platform. Compared with the traditional motor in the past, its driving method has made great progress. .

However, with the continuous advancement of science and technology, the requirements for faster and more accurate products are further enhanced, and the two-dimensional platform driven by a single linear motor still has certain shortcomings in some ultra-high-speed and high-precision fields. For example, single-motor drive will generate a lot of heat, which is difficult to dissipate, resulting in excessive temperature rise inside the motor and shortening the life of the motor. When the temperature reaches the upper limit, it is difficult to increase the speed of the motor. In addition, the single-motor drive method also has the problem of asymmetrical center of gravity, which will lead to large deviations in the dynamic performance of the motor during high-speed or ultra-high-speed operation and damage. These shortcomings limit the development of single-motor-driven platforms in a faster and more accurate direction.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the prior art and provide a symmetrical motor-driven two-dimensional motion platform that reduces magnetic flux leakage of the motor and can meet the requirements of high speed and high precision.

The object of the present invention is achieved through the following technical solutions:

A high-speed and high-precision symmetrical motor-driven platform includes an X platform, a Y platform and a workbench; the X platform is fixed, the Y platform is installed on the X platform, and the workbench is installed on the Y platform.

The X platform includes a first linear guide rail, a first base, a first linear motor, a third linear motor symmetrical to the first linear motor and a first feedback sensor. The first linear motor includes a first stator, a first mover, and a first magnetically shielded box, the third linear motor includes a third stator, a third mover, and a third magnetically shielded box, and the The first linear guide rail includes a first guide rail and a first slider, and the first feedback sensor includes a first grating scale and a first reading head. The first guide rail is fixed on the first base parallel to the X-axis direction. The first stator is fixed on the first base and is located at one end of the first guide rail. The first magnetic shielding box wraps the first stator to reduce magnetic leakage. The first mover is connected to one end of the Y platform . The third stator is arranged at the other end of the first guide rail, the third magnetic shielding box wraps the third stator, the third mover is connected to the other end of the Y platform, and drives the Y platform together with the first mover Reciprocate on the first linear guide.

The Y platform includes a second linear guide rail, a second base, a second linear motor and a second feedback sensor. The second linear motor includes a second stator, a second mover, and a second magnetic shielding box, the second linear guide includes a second guide rail and a second slider, and the second feedback sensor includes a second grating scale and a second readhead. The second base is installed on the first slide block, is respectively connected with the first mover and the third mover, and is driven by the first mover and the third mover. The second guide rail is fixed on the second base and parallel to the Y-axis direction. The second stator is fixed on the first base, and the second magnetic shielding box wraps the second stator to reduce magnetic leakage. The workbench is installed on the second slide block, the second mover is connected with the workbench, drives the workbench to move on the second linear guide rail, and the workbench is equipped with a load. The first grating ruler is arranged on one side of the second base, parallel to the first guide rail, and the first reading head is fixed on the first base to read the scale of the first grating ruler. The second grating ruler is arranged on one side of the workbench parallel to the second guide rail, and the second reading head is fixed on the second base to read the scale of the second grating ruler.

The present invention is driven by a symmetrical motor, so the first linear motor, the first linear guide rail and the third linear motor are in a straight line and parallel to the X-axis direction; the first mover and the third mover Synchronized and moving in the same direction. This symmetrical driving method can greatly reduce the heat generated by the linear motor due to high-speed and high-frequency reciprocating motion. Through precise control of two sets of linear motors, the speed and stability of the two-dimensional motion platform can be significantly improved.

After the stator shields the magnetic field, the sealed environment of the magnetic shielding box will inevitably cause the temperature inside the linear motor to rise. Too fast or too high a temperature will affect the reliability and service life of the motor. Therefore, the symmetrical motor with high speed and high precision The drive platform also includes a first fan, a second fan and a third fan for heat dissipation. The first fan is arranged on the first magnetic shielding box, and blows and dissipates heat against the first stator; the second fan is arranged on the second magnetic shielding box, and blows and dissipates heat against the second stator; The third fan is arranged on the third magnetic shielding box, and blows air and dissipates heat against the third stator. Because the blowing area of the fan is large and the blowing flow is large, it has a good cooling effect on the stator.

In order to further slow down the heating rate of the linear motor after magnetic shielding, so that the linear motor can run for a long time and reduce the probability of failure, the first magnetic shielding box, the second magnetic shielding box and the third magnetic shielding box in this solution The magnetic shielding box is provided with exhaust holes for heat dissipation. The exhaust holes are arranged on the tops of the first magnetic shielding box, the second magnetic shielding box and the third magnetic shielding box, and the heat generated in the motor can be quickly discharged from the exhaust holes.

Because the mover will generate a lot of heat when it works at high speed and high frequency, the blowing air volume of the fan is large, but the flow rate is low, and the distance between the mover and the mover is far away, which is not enough to quickly reduce the temperature of the mover. Air pipes for heat dissipation, the air pipes are respectively connected to the first mover, the second mover and the third mover, and blow air to the first mover, the second mover and the third mover to dissipate heat. Although the heat dissipation area of the trachea is small, its flow rate is fast and the local heat dissipation effect is good. When the mover needs to be cooled quickly, the fan and the trachea can be turned on at the same time to make the temperature of the mover drop rapidly.

The working process and principle of the present invention are: the first linear motor and the third linear motor are symmetrically arranged at both ends of the first linear guide rail, and jointly drive the second base back and forth on the first linear guide rail parallel to the X-axis direction Movement, the first feedback sensor accurately measures the second base to achieve high-precision control of the second base in the X-axis direction; similarly, the second linear motor drives the worktable on the second linear guide rail parallel to the Y-axis direction Reciprocating motion, the second feedback sensor accurately measures the workbench to realize high-precision control of the workbench in the Y-axis direction. At the same time, the stators of the linear motors are all set in the magnetic shielding box, which effectively shields the magnetic field generated by the stators, reduces the adverse effects caused by the magnetic flux leakage of the motor, increases the power and torque of the linear motor, and thus greatly improves the response speed of the linear motor and movement speed. The two-dimensional motion platform provided by the invention is simple in structure, easy to use, and has the advantages of high speed and high precision.

Compared with the prior art, the present invention also has the following beneficial effects:

(1) The present invention uses symmetrically arranged linear motors to drive, which can further increase the movement speed of the platform while greatly reducing the heat generated by the linear motors. Moreover, because the heat generated by the linear motors is reduced, the energy consumption of the cooling fan can be further reduced. Reduce equipment costs.

(2) In the present invention, a fan is installed on the magnetic shielding box to dissipate heat over a large area of the stator, so that the temperature of the primary coil winding in the stator is rapidly cooled, and the stability and reliability of the linear motor are obviously improved.

(3) The present invention is provided with the exhaust hole of air outlet upwards on the magnetic shielding box body, and when this exhaust hole is used in conjunction with fan, the heat in the magnetic shielding box body can be drained away quickly, further reduces the temperature of motor, delays its service life.

(4) The present invention also installs an air pipe on the mover, and the air pipe blows air against the secondary coil winding in the mover. Because the wind flow rate blown out by the air pipe is fast, the secondary coil winding can be locally and rapidly dissipated heat. The remaining wind can effectively reduce the temperature of the mover.

(5) The present invention can well distribute the carrying capacity of the first linear motor and the second linear motor according to the position change of the load, so that the load can stably reach the designated position under high-speed and high-precision movement.

(6) Since the two linear motors in the X direction are installed symmetrically, the present invention can effectively reduce the deviation of the center of gravity in the X direction caused by the asymmetrical motors, and improve the dynamic characteristics and motion performance of the entire platform.

Description of drawings

Fig. 1 is a perspective view of the present invention.

Fig. 2 is a partial schematic view of the present invention.

FIG. 3 is a schematic perspective view of a third linear motor of the present invention.

The symbols in the above figure are explained as follows: 1-first base, 2-first guide rail, 3-second base, 4-first slider, 5-second guide rail, 6-second slider, 7-first Magnetic shielding box, 8-first mover, 9-first stator, 10-first reading head, 11-first grating ruler, 12-second magnetic shielding box, 13-second stator, 14- The second mover, 15-the second reading head, 16-the second grating ruler, 17-the third magnetic shielding box, 18-the third mover, 19-the third stator.

Detailed ways

In order to make the object, technical solution and advantages of the present invention more clear and definite, the present invention will be further described below with reference to the accompanying drawings and examples.

Example Example 1:

As shown in Fig. 1, Fig. 2 and Fig. 3, the present invention discloses a symmetrical motor-driven platform with high speed and high precision, including an X platform, a Y platform and a workbench. The X platform includes a first base 1, a first linear guide rail, a first linear motor, a third linear motor and a first feedback sensor. The first linear guide rail includes the first guide rail 2 and the first slider 4, the first linear motor includes the first stator 9 and the first mover 8, and the third linear motor includes the third stator 19 and the third mover 18 , the first feedback sensor includes a first grating ruler 11 and a first reading head 10 . The Y platform includes a second base 3, a second linear guide rail, a second linear motor and a second feedback sensor. The second linear guide rail includes a second guide rail 5 and a second slider 6 , the second linear motor includes a second stator 13 and a second mover 14 , and the second feedback sensor includes a second grating ruler 16 and a second reading head 15 .

The first base 1 is fixedly installed on which a pair of first linear guides parallel to the X axis, the first stator 9, the second stator 13, the third stator 19 and the first reading head 10, the first stator 9 and the third stator 19 are symmetrically installed at both ends of the first linear guide rail. The second base 3 is installed on the first slider 4 , and the first grating scale 11 is arranged on the edge of one side of the second base 3 , opposite to the first reading head 10 . The first mover 8 and the third mover 18 are installed on both ends of the second base 3 respectively, are distributed symmetrically, and jointly drive the second base 3 to move on the first linear guide rail. A second linear guide rail parallel to the Y axis is installed on the second base 3, a workbench is installed on the second linear guideway, and the workbench has a load. A second reading head 15 is also provided on the second base 3 , and a second grating ruler 16 is arranged on the workbench. The second reading head 15 is opposite to the second grating ruler 16 to obtain the scale on the second grating ruler 16 . The second mover 14 is connected with the worktable, and drives the worktable to move on the second linear guide rail.

In the present invention, the first linear motor, the first linear guide rail and the third linear motor are installed in a straight line and parallel to the X-axis direction. The second base 3 is driven synchronously and in the same direction by the first mover 8 and the third mover 18 . This symmetrical driving method can greatly reduce the heat generated by the linear motor due to high-speed and high-frequency reciprocating motion. Through precise control of two sets of linear motors, the speed and stability of the two-dimensional motion platform can be significantly improved.

Preferably, the present invention also provides magnetic shielding boxes for shielding the stator magnetic field, which are respectively the first magnetic shielding box 7, the second magnetic shielding box 12 and the third magnetic shielding box 17, the first magnetic shielding box 7 Cover the first stator 9, the second magnetic shielding box 12 covers the second stator 13, and the third magnetic shielding box 17 covers the third stator 19, since the magnetic shielding box is made of metal material , has the effect of isolating the magnetic field lines, so under the action of the magnetic shielding box, the magnetic field lines generated by the first stator 9, the second stator 13 and the third stator 19 are blocked by the magnetic shielding box, and the magnetic field of the linear motor The leakage phenomenon is greatly reduced, the torque of the linear motor is greatly increased, and the moving speed of the mover of the linear motor is effectively improved.

In order to ensure the smooth and reliable operation of the linear motor under high-speed and high-precision moving conditions, the invention also includes a fan, an exhaust hole and an air pipe for cooling the linear motor. The fan is installed on the magnetic shielding box, blowing air to a large area of the primary coil winding in the stator, and the exhaust hole is set on the top of the magnetic shielding box, so that the hot air in the motor is quickly discharged upwards from the exhaust hole, while The air pipe is arranged on the mover, and blows air to the partial secondary coil winding on the mover to cool it down quickly.

The Y platform is jointly driven by the electromagnetic force between the first mover 8 and the first stator 9 of the first linear motor of the X platform, and the third mover 18 and the third stator 19 of the third linear motor. Running, its moving direction is parallel to the first linear guide. The workbench is driven by the electromagnetic force between the second mover 13 and the second stator 14 of the second linear motor of the Y platform, and its moving direction is parallel to the second linear guide rail. The load is placed on the workbench, and the second The linear motor and the first linear motor are jointly driven to realize rapid movement in two directions perpendicular to each other in a plane.

The first reading head 10 on the X platform and the corresponding first grating ruler 11 form a position feedback sensor on the X platform, which is used to detect the position information of the second base 3 of the Y platform. The second reading head 15 on the Y platform and the corresponding second grating ruler 16 form a position feedback sensor on the Y platform to detect the position information of the worktable. The position information detected by the position feedback sensor on the X platform and the position feedback sensor on the Y platform is input into the control system to realize precise positioning control.

The working process and principle of the present invention are: the first linear motor and the third linear motor are symmetrically arranged at both ends of the first linear guide rail, and jointly drive the second base 3 on the first linear guide rail parallel to the X-axis direction. Back movement, the first feedback sensor accurately measures the second base 3, and realizes the high-precision control of the second base 3 in the X-axis direction; similarly, the second linear motor drives the workbench in the second direction parallel to the Y-axis direction. The reciprocating motion on the linear guide rail, the second feedback sensor accurately measures the workbench, and realizes the high-precision control of the workbench in the Y-axis direction. At the same time, the stators of the linear motors are all set in the magnetic shielding box, which effectively shields the magnetic field generated by the stators, reduces the adverse effects caused by the magnetic flux leakage of the motor, increases the power and torque of the linear motor, and thus greatly improves the response speed of the linear motor and movement speed. The two-dimensional motion platform provided by the invention is simple in structure, easy to use, and has the advantages of high speed and high precision.

The above-mentioned embodiment is a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.

Claims (5)

1. a kind of symmetrical motor with high-speed, high precision drives platform, which is characterized in that including X platforms, Y stage and work Platform；The X platforms are fixed, and Y stage is mounted on X platforms, and workbench is mounted on Y stage；

The X platforms include first straight line guide rail, first base, first straight line motor, symmetrically arranged with first straight line motor Third linear motor and the first feedback transducer, the first straight line motor include the first stator, the first mover and the first magnetic cup Babinet is covered, the third linear motor includes third stator, third mover and third magnetic screen babinet, the first straight line guide rail Including the first guide rail and the first sliding block, first feedback transducer includes first grating scale and the first reading head；Described first Guide rail is fixed on parallel with X-direction in first base, and first stator is fixed in first base, is located at the first guide rail One end, the first magnetic screen babinet wrap the first stator, reduce magnetic dispersion, one end connection of first mover and Y stage, institute It states third stator and the other end in the first guide rail is set, third magnetic screen babinet wraps third stator, the third mover and Y The other end of platform connects, and drives Y stage to be moved back and forth on first straight line guide rail jointly with the first mover；

The Y stage includes second straight line guide rail, second base, second straight line motor and the second feedback transducer, and described second Linear motor include the second stator, the second mover and the second magnetic screen babinet, the second straight line guide rail include the second guide rail and Second sliding block, second feedback transducer include second grating scale and the second reading head；The second base is mounted on first It on sliding block, connect with the first mover and third mover, is driven together by the first mover and third mover respectively, second guide rail It is fixed in second base and parallel with Y direction, second stator is fixed in first base, the second magnetic screen case Body wraps up the second stator, reduces magnetic dispersion, and the workbench is mounted on the second sliding block, and second mover connects with workbench It connects, driving workbench moves on second straight line guide rail；Equipped with load on the workbench；First grating scale setting is the The side of two pedestals, parallel with the first guide rail, first reading head is fixed in first base, reads the quarter of first grating scale Degree, the second grating scale is arranged in the side of workbench, parallel with the second guide rail, and second reading head is fixed on the second bottom On seat, the scale of second grating scale is read.

2. symmetrical motor according to claim 1 with high-speed, high precision drives platform, which is characterized in that described the One linear motor, first straight line guide rail and third linear motor three are in line, and parallel with X-direction；Described first is dynamic Sub synchronous with third mover and equidirectional movement.

3. the symmetrical motor according to claim 1 with high-speed, high precision drives platform, which is characterized in that further include The first fan, the second fan and third fan for heat dissipation；First fan is arranged on the first magnetic screen babinet, to the Heat dissipation is blowed in one stator；Second fan is arranged on the second magnetic screen babinet, and heat dissipation is blowed to the second stator； The third fan is arranged on third magnetic screen babinet, and heat dissipation is blowed to the second stator.

4. symmetrical motor according to claim 1 with high-speed, high precision drives platform, which is characterized in that described the One magnetic screen babinet, the second magnetic screen babinet and third magnetic screen babinet are equipped with the gas vent for heat dissipation；The gas vent It is arranged at the top of the first magnetic screen babinet, the second magnetic screen babinet and third magnetic screen babinet.

5. the symmetrical motor according to claim 1 with high-speed, high precision drives platform, which is characterized in that further include For the tracheae of rapid cooling, the tracheae is connect with the first mover, the second mover and third mover respectively, to the first mover, Second mover and the blowing heat dissipation of third mover.